Texturing and boron diffusion acid mist waste gas treatment system and process

Abstract

The invention discloses a texturing and boron diffusion acid mist waste gas treatment system and a texturing and boron diffusion acid mist waste gas treatment process. The air inlet and the air outlet are formed in the two sides of the box body in the horizontal direction, the first rotating spray head is arranged on the upper portion in the box body, the filler layer is arranged in the box body, the liquid outlet 113 is formed in the bottom of the box body, and the baffle is arranged in the box body in the vertical direction and located on one side of the air outlet. The liquid caustic soda supply device is used for supplying liquid caustic soda to the first rotary spray head; an air inlet device; and an exhaust device. The water change frequency of the purification tower can be reduced, so that the water consumption and the water treatment capacity are reduced, the reaction time of acid mist waste gas and a medicament is prolonged, the utilization rate of the medicament is increased, the absorption and purification efficiency is improved, and meanwhile, the problem that a chimney discharges a large amount of water vapor due to overlarge temperature difference between inside and outside in winter is solved; the device and maintenance cost can be reduced in design, the stability of the device is improved, and the service life of the device is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, and in particular to a texturing and boron diffusion acid mist waste gas treatment system and process. Background Art

[0002] In the production process of photovoltaic cells, the purpose of the texturing and boron diffusion process is to prepare various microstructures on the surface of silicon wafers to reduce the reflectivity of the silicon wafer surface, improve the absorption of sunlight, and improve the conversion efficiency of solar cells. The texturing process uses a mixed acid of hydrofluoric acid and hydrogen chloride to remove the residual alkali liquid on the surface of the silicon wafer during the elution process in the cleaning tank, and uses hydrofluoric acid to remove the silicon dioxide layer on the surface. The main pollutants are hydrochloric acid mist and hydrofluoric acid mist. The boron diffusion process is to diffuse the required dopants into the surface of the silicon wafer under high temperature conditions, forming a thin layer on the surface with the opposite conductive properties of the base material. The main pollutant is Cl2 waste gas.

[0003] The basic principle of acid mist purification technology is that during the process, hydrochloric acid, hydrofluoric acid, sulfuric acid, etc. are produced when they are heated at high temperature and circulated. Their components are water vapor and acid gas. The acid gas is easily soluble in water, and liquid alkali or water is used as the absorption liquid. The gas in the acid mist is reacted and absorbed in the purification tower by spraying, so as to reduce the emission of acid gas and meet environmental protection requirements.

[0004] At present, the main acid mist waste gas treatment technologies include adsorption, condensation, membrane separation and absorption.

[0005] Adsorption is the most common method for domestic chemical waste treatment. Its principle is to pass waste gas pollutants through a solid medium with a microporous structure so that the target substances in the waste gas are adsorbed on the surface of the medium, thereby achieving the waste gas separation process. The adsorption method is simple to operate, but the adsorption efficiency is low and the adsorption medium needs to be replaced regularly, which is costly.

[0006] The condensation method is one of the most widely used methods, and is often directly connected to the reaction device for material recovery. The basic principle is to use the characteristics of different substances having different saturated vapor pressures at different temperatures, and use low-temperature condensate to condense high-temperature exhaust gas into droplets, thereby realizing the separation and recovery of high-boiling-point exhaust gas. Common condensation media include cooling water and liquid nitrogen. The exhaust gas treatment device and working conditions using the condensation method are relatively simple, but if the exhaust gas is to be condensed to a lower concentration, a higher pressure and a lower temperature condensation medium are often required, which is more expensive.

[0007] Membrane separation is a method of selectively permeating pollutants through polymer membranes. Different pollutants have different dissolution and diffusion rates when passing through polymer membranes, thereby achieving waste gas separation. The membrane separation method is simple to treat waste gas and has low pollution, but the membrane surface is prone to pollution, resulting in reduced membrane performance.

[0008] The absorption method uses absorbents to fully contact with waste gas pollutants and undergo chemical reactions to achieve the purpose of purifying waste gas. The common chemical absorption method uses a purification tower to treat waste gas. However, most of the existing acid mist purification towers have poor purification effects, the purification towers themselves heat up quickly, and the absorption liquid is lost too much.

[0009] At present, the problems that still exist in acid mist purification technology are mainly manifested in that the emission values ​​after exhaust gas purification are difficult to meet the standards, the water consumption is large, the acid mist waste gas loss is serious, the water treatment volume is large, the purification tower’s own temperature rise causes secondary pollution, and the chimney emits a large amount of water vapor due to the large temperature difference between the inside and the outside.

[0010] Therefore, it is necessary to improve the existing technology to provide a more reliable solution. Summary of the invention

[0011] The technical problem to be solved by the present invention is to provide a texturing and boron diffusion acid mist waste gas treatment system and process in view of the deficiencies in the above-mentioned prior art.

[0012] In order to solve the above technical problems, the technical solution adopted by the present invention is: the present invention provides a texturing and boron diffusion acid mist waste gas treatment system, comprising:

[0013] A horizontal spray box, comprising a box body, an air inlet and an air outlet opened on both sides of the box body in a horizontal direction, a first rotating spray head arranged above the inside of the box body, a packing layer arranged inside the box body, a liquid discharge port opened at the bottom of the box body, and a baffle plate arranged in the box body in a vertical direction and located on one side of the air outlet;

[0014] a liquid caustic soda supply device, used for supplying liquid caustic soda to the first rotating spray head;

[0015] an air intake device for providing the exhaust gas to be treated to the air intake port;

[0016] and an exhaust device, which is used to discharge the air exhausted from the air outlet.

[0017] Preferably, the liquid alkali supply device includes a dosing box, a dosing pipe connecting the dosing box to the box body, and an alkali-resistant lifting pump arranged on the dosing pipe.

[0018] Preferably, a swirl plate is arranged above the interior of the box, the first rotating nozzle is connected and arranged below the swirl plate, and the end of the dosing pipe is connected to the swirl plate.

[0019] Preferably, the air intake device includes an air intake pipe connected to the air intake port, an air flow meter arranged on the air intake pipe, and a heat exchanger arranged on the air intake pipe.

[0020] Preferably, the exhaust device includes an exhaust pipe connected to the exhaust port, a fan and an air quality detector arranged on the exhaust pipe, and a chimney arranged at the end of the exhaust pipe.

[0021] Preferably, the packing layer comprises a packing frame and PP spherical packing arranged on the packing frame.

[0022] Preferably, a liquid storage tank is provided in the box body and below the packing layer, and a second rotating nozzle is also provided inside the box body on one side of the air inlet. The second rotating nozzle is connected to the liquid storage tank through a reflux pipe, and a reflux pump is provided on the reflux pipe.

[0023] Preferably, the baffle comprises a mesh plate sealed with the inner wall of the box body, a plurality of sealing baffles rotatably connected to the mesh plate, and a driving mechanism for driving the sealing baffles to rotate to control the opening or closing of the baffle.

[0024] Preferably, the box body is also provided with a plurality of filling ports for adding fillers into the box body.

[0025] The present invention also provides a texturing and boron diffusion acid mist waste gas treatment process, which uses the system as described above to treat the texturing and boron diffusion acid mist waste gas, and the process includes the following steps:

[0026] S1. The acid mist waste gas to be treated enters the heat exchanger after passing through the air flow meter, so that the temperature of the acid mist waste gas drops from 80-500℃ to 30-40℃, and then enters the spray box;

[0027] S2, the liquid alkali in the dosing box enters the swirl plate through the alkali-resistant lifting pump, and then is sprayed from top to bottom by the first rotating nozzle, and contacts and reacts with the acid mist waste gas in the box body in the packing layer;

[0028] The liquid alkali in the liquid storage tank below the packing layer is transported to the second rotating nozzle through the reflux pump, and is sprayed from the air inlet toward the air outlet, where it reacts with the acid mist waste gas in the box body in the packing layer;

[0029] S3. Control the sealing baffle on the baffle to rotate regularly to open the baffle at set intervals and close the air inlet at the same time, so that the treated waste gas in the packing layer is discharged from the air outlet, and is transported to the exhaust pipe after being tested by the air quality detector and finally discharged from the chimney.

[0030] The beneficial effects of the present invention are:

[0031] The present invention proposes an acid mist waste gas purification treatment system and process based on a horizontal spray structure. The present invention can reduce the frequency of water replacement in the purification tower, thereby reducing water consumption and water treatment volume, increasing the reaction time between the acid mist waste gas and the reagent, increasing the utilization rate of the reagent, and increasing the absorption and purification efficiency. At the same time, the problem of a large amount of water vapor being discharged from the chimney due to the large temperature difference between the inside and outside in winter is improved. The present invention can reduce equipment and maintenance costs from a design perspective, and increase the stability and service life of the equipment.

[0032] In the box body of the present invention, the unreacted liquid alkali in the liquid storage tank is transported by a reflux pump into the second rotating nozzle on the left for recycling, neutralizing a part of the acid mist waste gas, thereby improving the utilization rate of the liquid alkali; at the same time, spraying from top to bottom and from left to right allows the acid mist waste gas to react more fully with the liquid alkali, thereby improving the acid mist waste gas treatment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a structural schematic diagram of the texturing and boron diffusion acid mist waste gas treatment system of the present invention;

[0034] Figure 2 It is a schematic diagram of the internal structure of the horizontal spray box in the present invention;

[0035] Figure 3 It is a schematic diagram of the external structure of the horizontal spray box in the present invention;

[0036] Figure 4 It is a structural schematic diagram of the baffle in the present invention in a closed state;

[0037] Figure 5 It is a structural schematic diagram of the baffle in the present invention in an open state;

[0038] Figure 6 It is a schematic diagram of the structure of the heat exchanger in the present invention.

[0039] Description of reference numerals:

[0040] 1—horizontal spray box; 11—box body; 12—swirl plate; 13—first rotary nozzle; 14—packing layer; 15—baffle; 16—liquid storage tank; 17—second rotary nozzle; 18—reflux pipe; 19—reflux pump; 111—air inlet; 112—air outlet; 113—liquid discharge port 113; 114—packing port; 115—stainless steel wire mesh; 141—packing frame; 142—PP spherical packing; 151—mesh plate; 152—sealing baffle;

[0041] 2—liquid alkali supply device; 21—dosing box; 22—dosing pipe; 23—alkali-resistant lifting pump;

[0042] 3—air intake device; 31—air intake pipe; 32—air flow meter; 33—heat exchanger; 34—temperature sensor; 331—air inlet of heat exchanger; 332—air outlet of heat exchanger; 333—water inlet; 334—water outlet;

[0043] 4—exhaust device; 41—exhaust pipe; 42—fan; 43—air quality detector; 44—chimney. DETAILED DESCRIPTION

[0044] The present invention is further described in detail below in conjunction with embodiments so that those skilled in the art can implement the invention with reference to the description.

[0045] It should be understood that the terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.

[0046] The present invention provides a texturing and boron diffusion acid mist waste gas treatment system, comprising:

[0047] A horizontal spray box 1 comprises a box body 11, an air inlet 111 and an air outlet 112 opened on both sides of the box body 11 in a horizontal direction, a first rotating nozzle 13 arranged at the upper part of the box body 11, a packing layer 14 arranged inside the box body 11, a liquid discharge port 113 opened at the bottom of the box body 11, and a baffle 15 arranged in the box body 11 in a vertical direction and located on one side of the air outlet 112;

[0048] A liquid caustic soda supply device 2, which is used to supply liquid caustic soda to the first rotating spray head 13;

[0049] An air intake device 3, which is used to provide the exhaust gas to be treated to the air intake port 111;

[0050] and an exhaust device 4 for exhausting the air exhausted from the air outlet 112 to the outside.

[0051] In a preferred embodiment, the liquid alkali supply device 2 includes a dosing box 21 , a dosing pipe 22 connecting the dosing box 21 to the housing 11 , and an alkali-resistant lifting pump 23 disposed on the dosing pipe 22 .

[0052] In a preferred embodiment, a swirl plate 12 is disposed above the interior of the box body 11 , the first rotary nozzle 13 is disposed below the swirl plate 12 , and the end of the dosing pipe 22 is connected to the swirl plate 12 .

[0053] In a preferred embodiment, the air intake device 3 includes an air intake pipe 31 connected to the air intake port 111, an air flow meter 32 disposed on the air intake pipe 31, and a heat exchanger 33 disposed on the air intake pipe 31. A temperature sensor 34 is disposed at the outlet of the heat exchanger 33.

[0054] In a preferred embodiment, the exhaust device 4 includes an exhaust pipe 41 connected to the exhaust port, a fan 42 and an air quality detector 43 arranged on the exhaust pipe 41, and a chimney 44 arranged at the end of the exhaust pipe 41. The fan 42 is a PP anti-corrosion fan 42.

[0055] In a preferred embodiment, a stainless steel wire mesh 115 is further provided in the box body 11 between the baffle 15 and the exhaust port.

[0056] In a preferred embodiment, the filler layer 14 includes a filler frame 141 and PP spherical fillers 142 disposed on the filler frame 141 .

[0057] In a preferred embodiment, a liquid storage tank 16 is provided in the box body 11 and below the packing layer 14, and a second rotary nozzle 17 is provided inside the box body 11 on one side of the air inlet 111. The second rotary nozzle 17 is connected to the liquid storage tank 16 through a reflux pipe 18, and a reflux pump 19 is provided on the reflux pipe 18. The reflux pump 19 is an acid- and alkali-resistant reflux pump 19.

[0058] In a preferred embodiment, the baffle 15 includes a mesh plate 151 sealed to the inner wall of the box body 11, a plurality of sealing baffles 152 rotatably connected to the mesh plate 151, and a driving mechanism for driving the sealing baffles 152 to rotate to control the opening or closing of the baffle 15. For example, the baffle 15 is opened once every 10 minutes.

[0059] In a preferred embodiment, the box body 11 is further provided with a plurality of filling ports 114 for adding fillers into the box body 11 .

[0060] The present invention also provides a texturing and boron diffusion acid mist waste gas treatment process, which uses the above system to treat the texturing and boron diffusion acid mist waste gas, and the process includes the following steps:

[0061] S1, the acid mist waste gas to be treated enters the heat exchanger 33 after passing through the air flow meter 32 at a certain flow rate, so that the temperature of the acid mist waste gas drops from 80-500°C to 30-40°C, and then enters the spray box;

[0062] S2, the liquid alkali in the dosing box 21 enters the swirl plate 12 through the alkali-resistant lifting pump 23, and then is sprayed from top to bottom by the first rotating nozzle 13, and reacts with the acid mist exhaust gas in the box body 11 in the packing layer 14; the generated salt substances and the unreacted liquid alkali enter the liquid storage tank 16 at the bottom of the spray box;

[0063] The unreacted liquid alkali in the liquid storage tank 16 below the packing layer 14 is transported to the second rotating nozzle 17 through the reflux pump 19, and is sprayed from the air inlet 111 toward the air outlet 112, and reacts with the acid mist waste gas in the box 11 in the packing layer 14; the utilization rate of the liquid alkali can be improved by recycling part of the liquid alkali;

[0064] S3. Control the sealing baffle 152 on the baffle 15 to rotate regularly, so as to open the baffle 15 at set intervals, and at the same time close the air inlet 111, so that the treated waste gas in the packing layer 14 is drawn out by the PP anti-corrosion fan 42 and discharged from the air outlet 112, and is transported to the exhaust pipe 41 after being tested by the air quality detector 43 and finally discharged from the chimney 44.

[0065] In a preferred embodiment, the gas flow rate is 80-100m 3 / h, and adjust the air flow meter 32 according to the required flow rate.

[0066] In a preferred embodiment, the liquid caustic soda flow rate is set to 14-17m 3 / h, the reaction time of waste gas and liquid alkali in the spray box is 19-22min, and the filler filling rate is 50%.

[0067] The gas to be treated in the present invention may be acid mist waste gas and tail gas generated in the process of texturing cleaning and boron diffusion cleaning in the process of producing photovoltaic cells.

[0068] In the present invention, the liquid alkali is a sodium hydroxide solution, and the main reaction of the acid mist waste gas with the liquid alkali in the box 11 is as follows:

[0069] NaOH+HCl=NaCl+H2O;

[0070] NaOH+HF=NaF+H2O;

[0071] 2NaOH+Cl2=NaCl+NaClO+H2O.

[0072] Inside the box body 11, the unreacted liquid alkali in the liquid storage tank 16 is transported to the second rotary nozzle 17 on the left through the reflux pump 19 for recycling, neutralizing a part of the acid mist waste gas, thereby improving the utilization rate of the liquid alkali; in addition, due to the special structure of the PP spherical filler 142 and the timing switch of the baffle 15 on the right side of the spray box, the contact area and reaction time between the spray liquid and the acid mist waste gas are increased. At the same time, the spray liquid from top to bottom and from left to right makes the acid mist waste gas fully react with the alkali liquid, thereby improving the acid mist waste gas treatment efficiency.

[0073] Among them, the box body 11 adopts a horizontal structure with a large cross-sectional area. A large number of rotary nozzles can be installed. The excessive amount of liquid alkali sprayed can fully absorb the acid mist waste gas and avoid waste gas escape accidents. The liquid alkali is added in the form of a rotary nozzle spray, which can offset the heat generated when the liquid alkali reacts with the waste gas and avoid the temperature in the spray box being too high, which causes the decomposition of effective chlorine.

[0074] The inner wall of the box 11 is made of polytetrafluoroethylene, which has the characteristics of acid resistance, alkali resistance, high temperature resistance, extremely low friction coefficient, easy cleaning, etc., and can work normally in the temperature range of -200℃ to 300℃. The filler is a spherical filler made of PP material, which has a large gas absorption capacity and high efficiency. At the same time, the PP material has a certain strength, light weight, small size, and strong corrosion resistance. The spherical structure increases the contact area between the exhaust gas and the alkali solution, and improves the exhaust gas treatment efficiency.

[0075] The packing rack 141 is staggered to increase the residence time of the liquid alkali in the packing area so that it can fully react with the acid mist waste gas. In order to facilitate the replacement of the packing, a packing port 114 is provided on the box body 11.

[0076] In a preferred embodiment, 5° C. cooling water is passed through the heat exchanger 33 for condensation.

[0077] In a preferred embodiment, the baffle 15 is opened once every 19 minutes, while the air inlet 111 is closed, and each opening time lasts for 10 minutes, thereby increasing the residence time of the exhaust gas in the spray box and improving the exhaust gas treatment efficiency. At the same time, a stainless steel filter is set on the front side of the baffle 15 for demisting.

[0078] In order to ensure that the gas meets the emission standards, an air quality detector 43 is provided at the bottom of the chimney 44 to facilitate the detection of the exhaust gas quality.

[0079] The above is the overall concept of the present invention, and detailed embodiments are provided below on the basis of the overall concept to further illustrate the present invention.

[0080] Example 1

[0081] A texturing and boron diffusion acid mist waste gas treatment system, comprising:

[0082] A horizontal spray box 1 comprises a box body 11, an air inlet 111 and an air outlet 112 opened on both sides of the box body 11 in a horizontal direction, a first rotating nozzle 13 arranged at the upper part of the box body 11, a packing layer 14 arranged inside the box body 11, a liquid discharge port 113 opened at the bottom of the box body 11, and a baffle 15 arranged in the box body 11 in a vertical direction and located on one side of the air outlet 112;

[0083] The liquid alkali supply device 2 is used to supply the liquid alkali to the first rotating nozzle 13; the liquid alkali supply device 2 comprises a dosing box 21, a dosing pipe 22 connecting the dosing box 21 to the box body 11, and an alkali-resistant lifting pump 23 arranged on the dosing pipe 22;

[0084] The air intake device 3 is used to provide the exhaust gas to be treated to the air intake port 111; the air intake device 3 includes an air intake pipe 31 connected to the air intake port 111, an air flow meter 32 arranged on the air intake pipe 31, and a heat exchanger 33 arranged on the air intake pipe 31; wherein the heat exchanger 33 includes a heat exchanger air inlet 331, a heat exchanger air outlet 332, a water inlet 333 and a water outlet 334, and a temperature sensor 34 is arranged on the heat exchanger air outlet 332;

[0085] And an exhaust device 4, which is used to discharge the air exhausted from the outlet 112; the exhaust device 4 includes an exhaust pipe 41 connected to the exhaust port, a fan 42 and an air quality detector 43 arranged on the exhaust pipe 41, and a chimney 44 arranged at the end of the exhaust pipe 41, wherein the chimney 44 is 25m high.

[0086] In this embodiment, a swirl plate 12 is disposed above the interior of the box body 11 , the first rotary nozzle 13 is disposed below the swirl plate 12 , and the end of the dosing pipe 22 is connected to the swirl plate 12 .

[0087] In this embodiment, the packing layer 14 includes a packing frame 141 and a PP spherical packing 142 disposed on the packing frame 141 .

[0088] In this embodiment, a liquid storage tank 16 is provided in the box body 11 and below the packing layer 14. A second rotary nozzle 17 is also provided inside the box body 11 on one side of the air inlet 111. The second rotary nozzle 17 is connected to the liquid storage tank 16 through a reflux pipe 18. A reflux pump 19 is provided on the reflux pipe 18. The reflux pump 19 is an acid- and alkali-resistant reflux pump 19.

[0089] In this embodiment, the baffle 15 includes a mesh plate 151 sealed with the inner wall of the box body 11, a plurality of sealing baffles 152 rotatably connected to the mesh plate 151, and a driving mechanism (not shown in the figure) for driving the sealing baffles 152 to rotate to control the opening or closing of the baffle 15. The baffle 15 and the liquid storage tank 16 are always kept closed, that is, the bottom of the baffle 15 is always kept closed at the position of the liquid storage tank 16.

[0090] In this embodiment, the box body 11 is further provided with a plurality of filling ports 114 for adding fillers into the box body 11 .

[0091] Example 2

[0092] A texturing and boron diffusion acid mist waste gas treatment process, which uses the system of Example 1 to treat the texturing and boron diffusion acid mist waste gas, and the process includes the following steps:

[0093] S1, the acid mist waste gas to be treated enters the heat exchanger 33 after passing through the air flow meter 32, so that the temperature of the acid mist waste gas drops from 80-500°C to 30-40°C, and then enters the spray box;

[0094] S2, the liquid alkali in the dosing box 21 enters the swirl plate 12 through the alkali-resistant lifting pump 23, and then is sprayed from top to bottom by the first rotating nozzle 13, and contacts and reacts with the acid mist waste gas in the box body 11 in the packing layer 14;

[0095] The liquid alkali in the liquid storage tank 16 below the packing layer 14 is transported to the second rotating nozzle 17 through the reflux pump 19, and is sprayed from the air inlet 111 toward the air outlet 112, and reacts with the acid mist waste gas in the box 11 in the packing layer 14;

[0096] S3, controlling the sealing baffle 152 on the baffle 15 to rotate at a fixed time, so as to open the baffle 15 at set intervals, so that the treated waste gas in the packing layer 14 is discharged from the air outlet 112, and is transported to the exhaust pipe 41 after being tested by the air quality detector 43, and finally discharged from the chimney 44.

[0097] Test Example 1

[0098] The process of Example 2 was used to treat the acid mist waste gas for testing. The following gas composition was used to simulate the acid mist waste gas: HCl 9%, HF 1%, Cl2 12%, N2 78% (all volume fractions), and the temperature fluctuated within 200-300°C.

[0099] The gas flow rate into the box 11 is 80m 3 / h, the gas temperature after cooling by heat exchanger 33 is controlled to 30-40°C; the concentration of liquid alkali is set to 15%, and the flow rate of liquid alkali is set to 14m 3 / h, the reaction time of waste gas and liquid alkali in the spray box is 19min, and the filling rate of the filler is 50%.

[0100] The damper 15 on the right side of the spray box is opened every 19 minutes. When the damper 15 is opened, the air inlet 111 is closed at the same time, and the damper 15 is opened for 10 minutes.

[0101] Test Example 2

[0102] The process of Example 2 was used to treat the acid mist waste gas for testing. The following gas composition was used to simulate the acid mist waste gas: HCl 9%, HF 1%, Cl2 12%, N2 78% (all volume fractions), and the temperature fluctuated within 200-300°C.

[0103] The gas flow rate into the box 11 is 80m 3 / h, the gas temperature after cooling by heat exchanger 33 is controlled to 30-40°C; the concentration of liquid alkali is set to 15%, and the flow rate of liquid alkali is set to 14m 3 / h, the reaction time of waste gas and liquid alkali in the spray box is 22min, and the filling rate of the filler is 50%.

[0104] The damper 15 on the right side of the spray box is opened every 19 minutes. When the damper 15 is opened, the air inlet 111 is closed at the same time, and the opening time lasts for 10 minutes.

[0105] The exhaust gas components obtained in Test Examples 1 and 2 were tested, and the test results are shown in Table 1 below:

[0106] Table 1

[0107] HCl HF <![CDATA[Cl2]]> <![CDATA[N2]]> Test Example 1 0.1％ 0.15％ 0.12％ 99.63％ Test Example 2 0.09％ 0.12％ 0.1％ 99.69％

[0108] From the test results, it can be seen that the device is highly effective in removing waste gas generated in the photovoltaic industry's texturing and boron diffusion processes. The removal rates for HCl and Cl2 can reach over 98%, and the removal rate for HF can reach over 85%. The absorption liquid is highly efficient, and the treatment effect is higher than that of traditional liquid alkali absorption.

[0109] Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and the implementation modes. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to specific details.

Claims

1. A texturing and boron diffusion acid mist waste gas treatment system, characterized in that: include: A horizontal spray box, comprising a box body, an air inlet and an air outlet opened on both sides of the box body in a horizontal direction, a first rotating spray head arranged above the inside of the box body, a packing layer arranged inside the box body, a liquid discharge port opened at the bottom of the box body, and a baffle plate arranged in the box body in a vertical direction and located on one side of the air outlet; a liquid caustic soda supply device, used for supplying liquid caustic soda to the first rotating spray head; an air intake device for providing the exhaust gas to be treated to the air intake port; and an exhaust device, which is used to discharge the air exhausted from the air outlet.

2. The texturing and boron diffusion acid mist waste gas treatment system according to claim 1 is characterized in that: The liquid alkali supply device comprises a dosing box, a dosing pipe connecting the dosing box to the box body, and an alkali-resistant lifting pump arranged on the dosing pipe.

3. The texturing and boron diffusion acid mist waste gas treatment system according to claim 2 is characterized in that: A swirl plate is arranged above the interior of the box body, the first rotating nozzle is arranged below the swirl plate, and the end of the dosing pipe is connected to the swirl plate.

4. The texturing and boron diffusion acid mist waste gas treatment system according to claim 3 is characterized in that: The air intake device includes an air intake pipe communicated with the air intake port, an air flow meter arranged on the air intake pipe, and a heat exchanger arranged on the air intake pipe.

5. The texturing and boron diffusion acid mist waste gas treatment system according to claim 4 is characterized in that: The exhaust device comprises an exhaust pipe connected to the exhaust port, a fan and an air quality detector arranged on the exhaust pipe, and a chimney arranged at the end of the exhaust pipe.

6. The texturing and boron diffusion acid mist waste gas treatment system according to claim 5 is characterized in that: The packing layer comprises a packing frame and a PP spherical packing arranged on the packing frame.

7. The texturing and boron diffusion acid mist waste gas treatment system according to claim 6 is characterized in that: A liquid storage tank is arranged in the box body and below the packing layer, and a second rotating nozzle is arranged inside the box body on one side of the air inlet. The second rotating nozzle is connected to the liquid storage tank through a reflux pipe, and a reflux pump is arranged on the reflux pipe.

8. The texturing and boron diffusion acid mist waste gas treatment system according to claim 7 is characterized in that: The baffle comprises a mesh plate sealed with the inner wall of the box, a plurality of sealing baffles rotatably connected to the mesh plate, and a driving mechanism for driving the sealing baffles to rotate to control the opening or closing of the baffle.

9. The texturing and boron diffusion acid mist waste gas treatment system according to claim 8, characterized in that: The box body is also provided with a plurality of filling ports for adding fillers into the box body.

10. A process for treating waste gas from texturing and boron diffusion acid mist, characterized in that: The system as claimed in any one of claims 7 to 9 is used to treat the waste gas of texturing and boron diffusion acid mist, and the process includes the following steps: S1. The acid mist waste gas to be treated enters the heat exchanger after passing through the air flow meter, so that the temperature of the acid mist waste gas drops from 80-500℃ to 30-40℃, and then enters the spray box; S2, the liquid alkali in the dosing box enters the swirl plate through the alkali-resistant lifting pump, and then is sprayed from top to bottom by the first rotating nozzle, and contacts and reacts with the acid mist waste gas in the box body in the packing layer; The liquid alkali in the liquid storage tank below the packing layer is transported to the second rotating nozzle through the reflux pump, and is sprayed from the air inlet toward the air outlet, where it reacts with the acid mist waste gas in the box body in the packing layer; S3. Control the sealing baffle on the baffle to rotate regularly to open the baffle at set intervals and close the air inlet at the same time, so that the treated waste gas in the packing layer is discharged from the air outlet, and is transported to the exhaust pipe after being tested by the air quality detector and finally discharged from the chimney.

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