Workpiece treatment device, process equipment and workpiece treatment method

Abstract

The invention provides a workpiece processing device, process equipment and a workpiece processing method, and relates to the field of semiconductor processing. The workpiece processing device comprises a bearing part, the bearing part comprises a tray and a sleeve, and the sleeve is connected to the lower surface, away from a workpiece, of the tray; the sleeve is provided with a first center hole, the first center hole is provided with an internal thread section and a non-thread section, and the internal thread section is arranged close to the lower end of the first center hole; the supporting piece comprises a bottom plate and a lining, the lining is connected to the upper surface of the bottom plate, and the outer side face, away from the central axis of the workpiece processing device, of the lining is provided with an external thread section; gas flowing out of the first gas inlet pipeline is used for lifting a bearing part upwards; gas flowing out of the second gas inlet pipeline is used for pushing the bearing part to rotate in the first direction, gas flowing out of the third gas inlet pipeline is used for pushing the bearing part to rotate in the second direction, and the second direction is opposite to the first direction. According to the invention, multi-dimensional motion can be realized.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor processing technology, and in particular to a workpiece processing device, process equipment and a workpiece processing method. Background Art

[0002] In the process equipment for manufacturing semiconductor devices, how to solve multi-dimensional motion is one of the topics currently being studied. Summary of the invention

[0003] The present disclosure provides a workpiece processing device, process equipment and a workpiece processing method.

[0004] According to one aspect of the present disclosure, there is provided a workpiece processing device, comprising: a carrier, the carrier comprising a tray and a sleeve, the tray being used to carry the workpiece, the sleeve being connected to the lower surface of the tray facing away from the workpiece; the sleeve having a first center hole, the first center hole having an internal thread section and a non-thread section, the internal thread section being arranged near the lower end of the first center hole; the inner side surface of the internal thread section facing the central axis of the workpiece processing device is protruding inwardly relative to the inner side surface of the non-thread section; a support member, the support member comprising a bottom plate and a bushing, the bushing being connected to the upper surface of the bottom plate, the bushing facing away from the workpiece The outer side surface of the center axis of the processing device has an external thread section, and the external thread of the external thread section can cooperate with the internal thread of the internal thread section; a first air inlet pipeline, the gas flowing out of the first air inlet pipeline is used to lift the support member upward; wherein, after the internal thread section is separated from the external thread end, the gas flowing out of the first air inlet pipeline is used to keep the support member at a target position; a second air inlet pipeline and a third air inlet pipeline, the gas flowing out of the second air inlet pipeline is used to push the support member to rotate in a first direction, and the gas flowing out of the third air inlet pipeline is used to push the support member to rotate in a second direction, and the second direction is opposite to the first direction.

[0005] In some embodiments, the workpiece processing device also includes: a center pin, the center pin includes a rod body and a head, the rod body is fixedly disposed in the second center hole of the bushing, the head is connected to the upper end of the rod body, the cross-sectional area of ​​the head is larger than the cross-sectional area of ​​the rod body, and the head is located in the first center hole.

[0006] In some embodiments, the head is used to limit the support member from further upward movement when the support member moves upward to an upper limit position.

[0007] In some embodiments, the workpiece processing device also includes: a first bracket, in which a first ball is installed; the first bracket is connected to a portion of the sleeve close to the internal thread segment and one of the heads; the first ball is used to roll in contact with a portion of the sleeve close to the internal thread segment and another one of the heads when the support member is located at the upper limit position.

[0008] In some embodiments, the distance between the outer side surface of the head and the inner side surface of the non-threaded segment is smaller than the distance between the outer side surface of the external threaded segment and the inner side surface of the non-threaded segment, so that the center pin guides the movement of the carrier.

[0009] In some embodiments, the workpiece processing device further includes: a second bracket, the second bracket is connected to one of the parts of the head and sleeve located in the non-threaded section; a second ball is installed in the second bracket, and the second ball is in rolling contact with the other part of the part of the head and sleeve located in the non-threaded section.

[0010] In some embodiments, the carrier further includes: a plurality of ribs, wherein the ribs are connected to the lower surface of the tray, and the ribs are connected to the outer side surface of the sleeve, and the plurality of ribs are spaced and evenly distributed along the outer circumference of the sleeve.

[0011] In some embodiments, the second air intake pipeline is connected to a second nozzle, the third air intake pipeline is connected to a third nozzle, and the fluids flowing out of the second nozzle and the third nozzle can act on the ribs respectively.

[0012] In some embodiments, the orthographic projections of the second nozzle and the third nozzle on the first projection plane are both located below the orthographic projection of the tray on the first projection plane; the first projection plane is parallel to the central axis of the tray; the orthographic projections of the second nozzle and the third nozzle on the second projection plane are located outside the tray on the second projection plane; the second projection plane is parallel to the lower surface of the tray; and in the second projection plane, the minimum distance between the orthographic projection of the second nozzle and the orthographic projection of the third nozzle is smaller than the size of the orthographic projection of the tray along the corresponding direction.

[0013] In some embodiments, the second nozzle and the third nozzle are symmetrically arranged; the axial direction of the second nozzle is arranged parallel to the axial direction of the third nozzle.

[0014] In some embodiments, the first air inlet pipe is connected to a plurality of first nozzles, and the plurality of first nozzles are distributed at intervals; the orthographic projections of the plurality of first nozzles on the first projection plane are all located below the orthographic projection of the rib on the first projection plane; the first projection plane is parallel to the central axis of the tray; the orthographic projections of the plurality of first nozzles on the second projection plane are located in the orthographic projection of the tray on the second projection plane; and the second projection plane is parallel to the lower surface of the tray.

[0015] In some embodiments, a material of at least one of the carrier, the support, the first air inlet pipeline, the second air inlet pipeline, and the third air inlet pipeline includes: quartz.

[0016] According to another aspect of the present disclosure, a process equipment is provided, comprising: a workpiece processing device as described in any one of the above.

[0017] According to another aspect of the present disclosure, there is provided a workpiece processing method based on the aforementioned workpiece processing device, comprising:

[0018] Transferring the workpiece to the top of the carrier;

[0019] When the internal thread section and the external thread section are in a mating state, air is ventilated into the second air inlet pipeline, so that the first force provided by the gas in the second air inlet pipeline can push the bearing member to rotate along the first direction, and the bearing member can also move upward relative to the support member;

[0020] Ventilate the first air inlet pipeline so that the lifting force provided by the gas in the first air inlet pipeline can push the bearing member and the workpiece to move upward relative to the support member until the bearing member moves to a target position and remains there; wherein when the bearing member is at the target position, the internal thread section and the external thread section are in a separated state;

[0021] Ventilating the second air inlet pipeline and the third air inlet pipeline so that the rotation speed of the bearing member in the first direction gradually decreases until the bearing member stops rotating;

[0022] Ventilate the second air inlet pipeline so that the second force provided by the second air inlet pipeline can push the carrier to rotate in the first direction and process the workpiece; or ventilate the third air inlet pipeline so that the third force provided by the third air inlet pipeline can push the carrier to rotate in the second direction, which is opposite to the first direction, and process the workpiece;

[0023] After the workpiece is processed, air is ventilated into the second air inlet pipeline and the third air inlet pipeline, so that the rotation speed of the carrier is gradually reduced until the carrier stops rotating;

[0024] Stopping ventilation into the first air inlet pipeline, so that the bearing member can move downward under the action of its own gravity;

[0025] When the internal thread section and the external thread section are in a mating state, air is ventilated into the third air inlet pipeline, so that the fourth force provided by the third air inlet pipeline can push the bearing member to rotate along the second direction, and the bearing member can also move downward relative to the support member.

[0026] The workpiece processing device provided in this embodiment can realize multi-dimensional motion.

[0027] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The accompanying drawings are used to better understand the present solution and do not constitute a limitation of the present disclosure.

[0029] Figure 1 is a schematic structural diagram of a workpiece processing device according to an embodiment of the present disclosure (when the carrier is located at an initial position);

[0030] Figure 2 is a schematic structural diagram of a bearing member and a supporting member according to an embodiment of the present disclosure;

[0031] Figure 3 is a schematic structural diagram of a workpiece processing device according to an embodiment of the present disclosure (when the carrier is located at the upper limit position);

[0032] Figure 4 is a schematic diagram of the relative positions of the carrier, the second air intake pipe and the third air intake pipe according to an embodiment of the present disclosure;

[0033] Figure 5 is a structural schematic diagram of a workpiece processing device according to another embodiment of the present disclosure;

[0034] Figure 6 It is a flowchart of a workpiece processing method according to an embodiment of the present disclosure.

[0035] Explanation of the reference numerals: 100-carrying member; 110-tray; 120-sleeve; 121-first center hole; 121a-non-threaded section; 121b-internal threaded section; 122-first bracket; 123-first ball; 130-support column; 140-rib; 200-support member; 210-base plate; 220-bushing; 221-external threaded section; 222-second center hole; 300-first air intake line; 400-second air intake line; 500-third air intake line; 600-workpiece; 700-center pin; 710-rod; 720-head; 730-second ball. DETAILED DESCRIPTION

[0036] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0037] For ease of description, the direction toward the central axis of the workpiece processing device is taken as the inner direction, the direction of the support toward the workpiece is taken as the upper direction, and the direction of the support away from the workpiece (that is, the gravity direction of the workpiece) is taken as the lower direction.

[0038] Figure 1 is a schematic structural diagram of a workpiece processing device according to an embodiment of the present disclosure (when the carrier is located at an initial position); Figure 2 is a schematic structural diagram of a bearing member and a supporting member according to an embodiment of the present disclosure; Figure 3 is a schematic structural diagram of a workpiece processing device according to an embodiment of the present disclosure (when the carrier is located at the upper limit position); Figure 4 Schematic diagram of the relative positions of the support, the second air intake pipe and the third air intake pipe according to an embodiment of the present disclosure. Figures 1 to 3 A cross-sectional view obtained by cutting along a plane passing through the central axis of the workpiece processing device; Figure 4 is a schematic diagram of the support, the second air intake pipe and the third air intake pipe when viewed from bottom to top.

[0039] This embodiment provides a workpiece processing device, including: a carrier 100 , a support member 200 , a first air intake pipeline 300 , a second air intake pipeline 400 and a third air intake pipeline 500 .

[0040] The carrier 100 is used to carry the workpiece 600; the workpiece 600 includes a wafer or other semiconductor devices. The carrier 100 can be cylindrical or prismatic. For ease of description, the carrier 100 is cylindrical as an example. In order to facilitate the compactness of the structure, the carrier 100 can be stepped, and the size of the portion of the carrier 100 near the upper end is larger than the size of the portion of the carrier 100 near the lower end.

[0041] Exemplarily, the carrier 100 includes: a tray 110 and a sleeve 120. The tray 110 is used to carry the workpiece 600. The sleeve 120 is connected to the lower surface of the tray 110 away from the workpiece 600. The sleeve 120 can be integrally provided with the tray 110, and the diameter of the tray 110 is larger than the diameter of the sleeve 120. The sleeve 120 has a first center hole 121, and the opening of the first center hole 121 is located at the lower end surface of the tray 110. The first center hole 121 extends into the tray 110 and penetrates the tray 110, or the first center hole 121 penetrates the sleeve 120, or the first center hole 121 can be a blind hole.

[0042] The first center hole 121 includes an internal thread segment 121b and a non-thread segment 121a. The internal thread segment 121b is located below the non-thread segment 121a, so that the internal thread segment 121b is arranged close to the lower end of the first center hole 121. The length of the internal thread segment 121b along the axial direction of the workpiece processing device can be set according to actual needs. The ratio between the length of the internal thread segment 121b and the length of the first center hole 121 can be greater than or equal to 0.24 and less than or equal to 0.36; for example, the ratio between the length of the non-thread segment 121a and the length of the first center hole 121 can be 0.24 or 0.26 or 0.28 or 0.30 or 0.32 or 0.34 or 0.36, or a ratio between any two of the above.

[0043] Optionally, the inner side surface of the internal thread segment 121 b protrudes inwardly from the inner side surface of the non-thread segment 121 a , so as to ensure that the carrier 100 can continue to move upward after the internal thread segment 121 b is separated from the external thread segment 221 .

[0044] In other embodiments, the inner wall of the first central hole 121 may be provided with internal threads, that is, the first central hole 121 is an internal thread section 121 b.

[0045] The carrier 100 may further include a support column 130, which is used to support the workpiece 600 to reduce the contact area between the workpiece 600 and the carrier 100. There are multiple support columns 130, and the multiple support columns 130 are respectively connected to the tray 110. At least three support columns 130 may be distributed along the circumference of the tray 110 at intervals.

[0046] Optionally, the support column 130 is a lifting pin; the upper surface of the tray 110 is provided with a fixing hole, and the portion of the lifting pin close to the lower end is fixed in the fixing hole. In other examples, the support column 130 can be a cylinder, and the cylinder can be integrally provided with the tray 110.

[0047] The support member 200 includes a bottom plate 210 and a bushing 220. The bottom plate 210 is used to fix the workpiece processing device to a preset installation position. For example, the bottom plate 210 fixes the workpiece processing device to a reaction chamber. The bushing 220 is connected to the upper surface of the bottom plate 210. The bottom plate 210 and the bushing 220 can be integrally provided, or the bottom plate 210 and the bushing 220 can be fixedly connected by bonding, screwing, or plugging.

[0048] The outer side of the bushing 220 has an external thread section 221, and the external thread of the external thread section 221 can cooperate with the internal thread of the internal thread section 121b, so that under the external force, the internal thread section 121b can cooperate with the external thread section 221 to achieve the rotational ascending movement and the rotational descending movement of the tray 110. The external thread section 221 is arranged near the upper end of the bushing 220. The height of the external thread section 221 along the axial direction can be equal to the height of the bushing 220, or the height of the external thread section 221 is less than the height of the bushing 220.

[0049] The bushing 220 may have a second center hole 222, and the central axis of the second center hole 222 may coincide with the central axis of the first center hole 121, so that a center pin 700 can be set in the second center hole 222, and the first center hole 121 and the second center hole 222 can be ensured to be coaxial through the center pin 700; in other examples, the bushing 220 may also be a cylinder.

[0050] The gas flowing out of the first air inlet pipeline 300 can be sprayed toward the lower surface of the tray 110 to lift the carrier 100 upward. After the internal thread segment 121b is separated from the external thread end, the gas flowing out of the first air inlet pipeline 300 is used to lift the carrier 100 to continue to move to the target position and keep the carrier 100 at the target position. The target position can be set according to actual needs; when the carrier 100 is at the target position, the internal thread segment 121b is in a separated state from the external thread segment 221.

[0051] The layout path of the first air inlet pipe can be set according to actual needs. The first air inlet pipe can be connected to one or more first nozzles (not shown in the figure), and the axial direction of the first nozzle can be parallel to the central axis of the workpiece processing device; when there are multiple first nozzles, the multiple first nozzles are evenly distributed to improve the stability of the movement of the carrier 100. In other examples, the axial direction of the first nozzle can also have an acute angle with the central axis of the workpiece processing device.

[0052] The gas flowing out of the second air inlet pipeline 400 is used to push the support member 100 to rotate along a first direction, and the gas flowing out of the third air inlet pipeline 500 is used to push the support member 100 to rotate along a second direction, which is opposite to the first direction.

[0053] The layout paths of the second air intake pipeline 400 and the third air intake pipeline 500 can be set according to actual needs. The second air intake pipeline 400 is connected to a second nozzle (not shown in the figure), and the third air intake pipeline 500 is connected to a third nozzle (not shown in the figure). The gases ejected from the second nozzle and the third nozzle can act on the support 100. When one of the second air intake pipeline 400 and the third air intake pipeline 500 is ventilated, the support 100 can rotate in the corresponding direction, which can be accelerated rotation, uniform rotation or decelerated rotation; when the second air intake pipeline 400 and the third air intake pipeline 500 are ventilated at the same time, the support 100 decelerates and can stop rotating quickly.

[0054] One of the first direction and the second direction is a clockwise direction, and the other is a counterclockwise direction. For example, the first direction is a clockwise direction, and the second direction is a counterclockwise direction. For another example, the first direction is a counterclockwise direction, and the second direction is a clockwise direction.

[0055] In some examples, the carrier 100 also includes a rib 140, which is located on the lower side of the tray 110. The rib 140 can be connected to at least one of the tray 110 and the sleeve 120, so that the gas sprayed from the second nozzle or the third nozzle can act on the rib 140, thereby driving the carrier 100 to rotate.

[0056] In other examples, the tray 110 may be provided with a guide groove, the notch of which is located on the lower surface of the tray 110 , and the gas sprayed from the second nozzle or the third nozzle can be blown into the guide groove and generate a force to push the carrier 100 to rotate.

[0057] Optionally, at least one of the carrier 100, the support 200, the first air inlet pipeline 300, the second air inlet pipeline 400 and the third air inlet pipeline 500 is made of quartz, thereby improving the high temperature resistance and light transmittance of the workpiece processing device and reducing the weight of the workpiece processing device.

[0058] In some examples, the bearing member 100, the support member 200, the first air inlet pipeline 300, the second air inlet pipeline 400, and the third air inlet pipeline 500 can all be made of quartz. In other examples, the bearing member 100 and the support member 200 are made of quartz; the material of the first air inlet pipeline 300, the second air inlet pipeline 400, and the third air inlet pipeline 500 can be selected according to actual needs, for example, rubber or plastic can be used.

[0059] The process of processing the workpiece 600 by the workpiece processing device of this embodiment can be as follows: when the carrier 100 is in the initial position and the internal thread segment 121b is in a mating state with the external thread segment 221, the second air inlet pipe is ventilated, and under the gas flowing out of the second air inlet pipe and the meshing action of the internal thread segment 121b and the internal thread segment 121b, the carrier 100 can be rotated and raised relative to the support 200. In this process, the first air inlet pipe can be ventilated so that the carrier 100 can rise relatively quickly; in other examples, it can also be not ventilated. It can be understood that: if the first air inlet pipe is ventilated.

[0060] When the internal thread section 121b and the external thread section 221 switch from the matching state to the separation state, the first air inlet pipe is ventilated, and the gas flowing out of the first air inlet pipe pushes the tray 110, so that the carrier 100 can continue to rise to the target position. When the internal thread section 121b and the external thread section 221 are in the separation state, the second air inlet pipe can continue to be ventilated to ensure the stability of the carrier 100 during the movement; in other examples, the second air inlet pipe can also be stopped. In the process of the carrier 100 rising, the carrier 100 can lift the workpiece 600 transported by the robot.

[0061] After the support 100 moves to the target position, the first air inlet pipe is continuously ventilated so that the gas flowing out of the first air inlet pipe can overcome the gravity of the support 100, thereby keeping the support 100 at the target position. Then, the third air inlet pipe is ventilated so that both the second air inlet pipe and the third air inlet pipe are in a ventilated state, so that the support 100 decelerates and stops rotating relatively quickly.

[0062] According to the process requirements, air is ventilated into the second air inlet line 400 or the third air inlet line 500, so that the carrier 100 pushes the workpiece 600 to rotate at the speed required by the process until the process is completed. During this process, the first air inlet line 300 is in a ventilated state to keep the carrier 100 at the target position.

[0063] After the process is completed, air is ventilated into the second air inlet line 400 and the third air inlet line 500, so that the carrier 100 rotates at a reduced speed and can stop rotating relatively quickly. In addition, the first air inlet line 300 is in a ventilated state to keep the carrier 100 at the target position.

[0064] After the manipulator moves to the bottom of the workpiece 600, air is supplied to the third air inlet pipeline 500, and air is supplied to the first air inlet pipeline 300 and the second air inlet pipeline 400. Under the action of the weight of the support 100 itself, the support 100 will fall and transfer the workpiece 600 to the manipulator; when the internal thread segment 121b and the external thread segment 221 are in a mating state, the support 100 can rotate and descend under the gas provided by the third air inlet pipeline 500 and the meshing action of the internal thread segment 121b and the external thread segment 221 until the support 100 moves to the initial position.

[0065] The workpiece processing device provided in the present embodiment can realize the rotational ascending movement of the carrier 100 by utilizing the cooperation of the internal thread segment 121b in the carrier 100 and the external thread segment 221 in the support 200, and combining with the force provided by the gas in the second air inlet pipeline 400; after the internal thread segment 121b is separated from the external thread segment 221, the ascending movement of the carrier 100 can be realized by utilizing the first air inlet pipeline 300; after the carrier 100 moves to the target position, the rotational movement of the carrier 100 can be realized by utilizing the second air inlet pipeline 400 or the third air inlet pipeline 500 to perform process processing on the workpiece 600; after the process processing is completed, the downward movement of the carrier 100 can be realized by utilizing the cooperation of the internal thread segment 121b in the carrier 100 and the external thread segment 221 in the support 200, and combining with the force provided by the third air inlet pipeline 500, thereby, the present embodiment can realize multi-dimensional movement.

[0066] In some embodiments, the workpiece processing device further includes: a center pin 700, which is used to guide the carrier 100 to move in a direction parallel to the central axis of the workpiece processing device, or to rotate around the direction parallel to the central axis of the workpiece processing device. Optionally, the first center hole 121 and the second center hole 222 are coaxially arranged, and the center pin 700 is used to ensure that the first center hole 121 is coaxial with the second center hole 222; wherein the central axis of the second center hole 222 can coincide with the central axis of the workpiece processing device.

[0067] Exemplarily, the center pin 700 includes a rod body 710 and a head 720, the rod body 710 is fixedly disposed in the second center hole 222, the head 720 is connected to the upper end of the rod body 710, the cross-sectional area of ​​the head 720 is larger than the cross-sectional area of ​​the rod body 710, and the head 720 is located in the first center hole 121. Optionally, the rod body 710 and the head 720 are both cylindrical, the diameter of the rod body 710 is smaller than the diameter of the head 720, and the rod body 710 and the head 720 are coaxially disposed.

[0068] The head 720 is used to limit the upper limit position of the bearing member 100; wherein, when the bearing member 100 is at the upper limit position, it will stop moving upward. That is, the head 720 is used to limit the bearing member 100 from continuing to move upward when the bearing member 100 moves upward to the upper limit position. When the bearing member 100 is at the upper limit position, the lower end surface of the head 720 can directly or indirectly contact with the upper end surface of the internal thread segment 121b; when in indirect contact, the two can be in rolling contact through a ball.

[0069] In some examples, the workpiece processing device further includes: a first bracket 122, in which a first ball 123 is installed; the first bracket 122 can be fixed to the upper end of the internal thread section 121b, and the first bracket 122 is annular, and the hollow portion of the first bracket 122 is used to avoid the center pin 700. The first ball 123 is used to roll with the lower end surface of the head 720 when the bearing member 100 is located at the upper limit position, thereby reducing friction loss.

[0070] The material of at least one of the first bracket 122 and the first ball 123 includes sapphire; for example, the first bracket 122 and the first ball 123 are both made of sapphire (or corundum), or the first bracket 122 is made of quartz and the first ball 123 is made of sapphire, or the first bracket 122 is made of sapphire and the first ball 123 is made of quartz. The first bracket 122 can be fixedly connected to the internal thread segment 121b by bonding or fastening; or the first bracket 122 and the internal thread segment 121b are integrally arranged. The first ball 123 is rotatably arranged in the first bracket 122.

[0071] In other examples, the first bracket 122 is connected to the head 720; the first ball 123 is used to roll with the internal thread segment 121b when the bearing member 100 is at the upper limit position. The first bracket 122 can be fixedly connected to the head 720 by bonding or fastening; or the first bracket 122 and the head 720 are integrally arranged.

[0072] In some examples, in order to prevent the relative movement between the bushing 220 and the sleeve 120 in the radial direction, the distance between the head 720 and the inner wall of the non-threaded section 121a of the first central hole 121 can be set relatively small. Exemplarily, the distance between the outer edge of the head 720 and the inner wall of the non-threaded section 121a is smaller than the distance between the outer edge of the bushing 220 and the inner wall of the non-threaded section 121a. In this way, when the bearing 100 moves downward, the internal thread section 121b is smoothly matched with the external thread section 221.

[0073] In order to avoid radial relative movement between the bushing 220 and the sleeve 120 and reduce friction loss, the head 720 and the inner wall of the non-threaded section 121 a may be arranged to be in rolling contact.

[0074] Figure 5 is a schematic diagram of the structure of a workpiece processing device according to another embodiment of the present disclosure. Figure 5 In some examples, the workpiece processing device further includes: a second bracket connected to the head 720; a second ball 730 is installed in the second bracket, and the second ball 730 is in rolling contact with the sleeve 120 located in the non-threaded section 121a.

[0075] The material of at least one of the second bracket and the second ball 730 includes sapphire; for example, the second bracket and the second ball 730 are both made of sapphire (or corundum), or the second bracket is made of quartz and the second ball 730 is made of sapphire, or the second bracket is made of sapphire and the second ball 730 is made of quartz. The second bracket can be fixedly connected to the head 720 by bonding or fastening; or the first bracket 122 is integrally provided with the head 720. The second ball 730 is rotatably provided in the second bracket.

[0076] In other examples, the second bracket is connected to a portion of the sleeve 120 located at the non-threaded section 121 a ; and the second ball 730 is in rolling contact with the head 720 .

[0077] In other examples, the side surface of the head 720 may also be set to be a spherical surface.

[0078] In some embodiments, the carrier 100 further includes: a plurality of ribs 140, the ribs 140 are connected to the lower surface of the tray 110, the ribs 140 are connected to the outer side of the sleeve 120, and the plurality of ribs 140 are spaced and evenly distributed along the outer circumference of the sleeve 120. In this way, the strength of the carrier 100 can be improved. The number of ribs 140 may be two, three, four, six, eight, or more.

[0079] In order to facilitate the setting of the first nozzle, the dimension of the rib 140 along the axial direction of the workpiece processing device may be smaller than the dimension of the sleeve 120 along the direction, that is, the lower end of the rib 140 is higher than the lower end of the sleeve 120. Exemplarily, the ratio of the height of the rib 140 to the height of the sleeve 120 may be 0.40, 0.42, 0.44, 0.46, 0.48, 0.50, 0.52, 0.54, 0.56, 0.58, or 0.60, or a ratio between any two of the above.

[0080] In order to reduce the difficulty of installing the second air intake pipeline 400 and the third air intake pipeline 500 and improve the pushing effect of the gas on the supporting component 100, the second air intake pipeline 400 is connected to a second nozzle, and the third air intake pipeline 500 is connected to a third nozzle, and the fluid flowing out from the second nozzle and the third nozzle can act on the rib 140 respectively, thereby pushing the supporting component 100 to rotate.

[0081] The orthographic projections of the second nozzle and the third nozzle on the first projection plane are both located below the orthographic projection of the tray 110 on the first projection plane; the first projection plane is parallel to the central axis of the tray 110. The central axis of the tray 110 is parallel to the central axis of the workpiece processing device; optionally, the central axis of the tray 110 coincides with the central axis of the workpiece processing device.

[0082] The orthographic projections of the second nozzle and the third nozzle on the second projection plane are located outside the tray 110 ; the second projection plane is parallel to the lower surface of the tray 110 .

[0083] In the second projection plane, the minimum distance between the orthographic projection of the second nozzle and the orthographic projection of the third nozzle is smaller than the size of the orthographic projection of the tray 110 along the corresponding direction. For example, the minimum distance between the orthographic projection of the second nozzle and the orthographic projection of the third nozzle is smaller than the diameter of the orthographic projection of the tray 110; the ratio between the minimum distance and the diameter may be 0.64, 0.70, 0.75, 0.80, 0.85, 0.90, or 0.96, or a ratio between any two of the above.

[0084] Through the above arrangement, the gas sprayed from the second nozzle or the third nozzle can be blown toward the rib 140 more often, and the second nozzle and the third nozzle can be prevented from interfering with the rotation of the carrier 100 .

[0085] In some examples, the second nozzle and the third nozzle are symmetrically arranged. The symmetry lines corresponding to the second nozzle and the third nozzle are perpendicular to the central axis of the tray 110, and the line connecting the second nozzle and the third nozzle toward one end of the tray 110 is perpendicular to the central axis of the tray 110. In other examples, the second nozzle and the third nozzle may also be arranged asymmetrically to reduce the difficulty of installing the second nozzle or the third nozzle and to avoid other components.

[0086] In some examples, the axial direction of the second nozzle is arranged parallel to the axial direction of the third nozzle. The axial direction of the second nozzle and the axial direction of the third nozzle are both parallel to the horizontal direction. For example, the axial direction of the second nozzle is arranged perpendicular to the line connecting the second nozzle and the third nozzle toward one end of the tray 110. In other examples, the axial direction of the second nozzle and the axial direction of the third nozzle may also intersect to reduce the difficulty of installing the second nozzle or the third nozzle and avoid other components.

[0087] In some examples, the first air inlet pipe is connected to a plurality of first nozzles. The plurality of first nozzles may be spaced and evenly distributed along a preset circumference, the diameter of the preset circumference being smaller than the diameter of the tray 110. The orthographic projections of the plurality of first nozzles on the first projection plane are all located below the orthographic projection of the rib plate 140 on the first projection plane; the first projection plane is parallel to the central axis of the tray 110; the orthographic projections of the plurality of first nozzles on the second projection plane are located in the orthographic projection of the tray 110 on the second projection plane; and the second projection plane is parallel to the lower surface of the tray 110.

[0088] Through the above arrangement, the gas blown out by the first nozzle can be blown more toward the tray 110 , and the first nozzle can be prevented from interfering with the rotation of the carrier 100 .

[0089] This embodiment also provides a process device, including a workpiece processing device as in any of the above embodiments. Optionally, the process device also includes a chamber, and the workpiece is located in the internal space of the chamber. The bottom plate of the support member in the workpiece processing device can be used to seal with the lower end of the chamber; or, the carrier and the support member in the workpiece processing device are also located in the internal space of the chamber.

[0090] Please refer to Figure 6 This embodiment also provides a workpiece processing method, which is implemented based on the workpiece processing device in any of the above embodiments. The same as the above embodiments will not be repeated in this embodiment. The workpiece processing method of this embodiment includes:

[0091] S601, transferring the workpiece to the top of the carrier;

[0092] S602, when the internal thread section and the external thread section are in a mating state, ventilate the second air inlet pipeline, so that the first force provided by the gas in the second air inlet pipeline can push the bearing member to rotate along the first direction, and the bearing member can also move upward relative to the support member;

[0093] S603, ventilating the first air inlet pipeline so that the lifting force provided by the gas in the first air inlet pipeline can push the bearing member and the workpiece to move upward relative to the support member until the bearing member moves to the target position and remains there; wherein, when the bearing member is at the target position, the internal thread section and the external thread section are in a separated state;

[0094] S604, ventilating the second air inlet pipeline and the third air inlet pipeline so that the rotation speed of the bearing member in the first direction gradually decreases until the bearing member stops rotating;

[0095] S605, ventilating the second air inlet pipeline so that the second force provided by the second air inlet pipeline can push the carrier to rotate in the first direction, and process the workpiece; or ventilating the third air inlet pipeline so that the third force provided by the third air inlet pipeline can push the carrier to rotate in the second direction, which is opposite to the first direction, and process the workpiece;

[0096] S606, after the workpiece is processed, air is ventilated into the second air inlet pipeline and the third air inlet pipeline, so that the rotation speed of the carrier is gradually reduced until the carrier stops rotating;

[0097] S607, stop ventilating the first air inlet pipeline, so that the bearing member can move downward under the action of its own gravity;

[0098] S608. When the internal thread section and the external thread section are in a mating state, air is ventilated into the third air inlet pipeline, so that the fourth force provided by the third air inlet pipeline can push the bearing member to rotate along the second direction, and the bearing member can also move downward relative to the support member.

[0099] In step S602 and step S603, during the upward movement of the carrier, the carrier will support the workpiece and continue to move upward until it reaches the target position. In step S602, air may or may not be ventilated into the first air intake pipeline.

[0100] In step S603 to step S606, the support member is kept at the target position, and the first air intake line is kept in a ventilated state.

[0101] In step S604 and step S606, after the bearing member stops rotating, ventilation to the second air inlet pipe and the third air inlet pipe is stopped.

[0102] In step S607, when the manipulator moves to below the workpiece, the ventilation to the first air inlet pipeline is stopped. In this step, the third air inlet pipeline may be ventilated or not ventilated.

[0103] In step S607 and step S608, the workpiece is transferred to the robot during the downward movement of the carrier. When the carrier moves to the initial position, the ventilation to the third air inlet pipeline is stopped.

[0104] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0105] In the description of the present disclosure, it should be understood that the terms "center", "length", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0106] In addition, the terms "first", "second", etc. used in the embodiments of the present disclosure are only used for descriptive purposes and should not be understood as indicating or implying relative importance, or implicitly indicating the number of technical features indicated in the embodiments. Therefore, the features defined by the terms "first", "second", etc. in the embodiments of the present disclosure may explicitly or implicitly indicate that at least one of the features is included in the embodiment. In the description of the present disclosure, the word "multiple" means at least two or two or more, such as two, three, four, etc., unless otherwise clearly and specifically defined in the embodiments.

[0107] In the present disclosure, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "connected" and "fixed" etc. appearing in the embodiments should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integrated connection. It can be understood that it can also be a mechanical connection, an electrical connection, etc.; of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements, or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific implementation situation.

[0108] In the present disclosure, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0109] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. A workpiece processing device, comprising: A carrier, the carrier comprising a tray and a sleeve, the tray being used to carry a workpiece, the sleeve being connected to a lower surface of the tray facing away from the workpiece; the sleeve having a first center hole, the first center hole having an internal thread section and a non-thread section, the internal thread section being arranged near the lower end of the first center hole; the inner side surface of the internal thread section facing the central axis of the workpiece processing device is arranged to protrude inwardly relative to the inner side surface of the non-thread section; A support member, the support member includes a base plate and a bushing, the bushing is connected to the upper surface of the base plate, the outer side of the bushing away from the central axis of the workpiece processing device has an external thread section, and the external thread of the external thread section can cooperate with the internal thread of the internal thread section; a first air inlet pipeline, wherein the gas flowing out of the first air inlet pipeline is used to lift the carrier upward; wherein, after the carrier moves to the point where the internal thread section is separated from the external thread end, the gas flowing out of the first air inlet pipeline is used to keep the carrier at a target position; A second air intake pipeline and a third air intake pipeline, the gas flowing out of the second air intake pipeline is used to push the support member to rotate along a first direction, and the gas flowing out of the third air intake pipeline is used to push the support member to rotate along a second direction, and the second direction is opposite to the first direction.

2. The workpiece processing device according to claim 1, further comprising: A center pin, the center pin includes a rod body and a head, the rod body is fixedly arranged in the second center hole of the bushing, the head is connected to the upper end of the rod body, the cross-sectional area of ​​the head is larger than the cross-sectional area of ​​the rod body, and the head is located in the first center hole.

3. The workpiece processing device according to claim 2, wherein: The head is used to limit the support member from further upward movement when the support member moves upward to an upper limit position.

4. The workpiece processing device according to claim 3, further comprising: a first bracket, wherein a first ball is installed in the first bracket; The first bracket is connected to a portion of the sleeve close to the internal thread section and one of the head; The first ball is used for rolling contact with the other one of the portion of the sleeve close to the internal thread section and the head when the bearing member is located at the upper limit position.

5. The workpiece processing device according to claim 2, wherein: The distance between the outer side surface of the head and the inner side surface of the non-threaded segment is smaller than the distance between the outer side surface of the external threaded segment and the inner side surface of the non-threaded segment, so that the center pin can guide the movement of the carrier.

6. The workpiece processing device according to claim 2, further comprising: a second bracket connected to the head and one of the portions of the sleeve located in the non-threaded section; A second ball is mounted in the second bracket, and the second ball is in rolling contact with the other of the head and the sleeve in the non-threaded section.

7. The workpiece processing device according to claim 1, wherein: The bearing member further comprises: a plurality of ribs, wherein the ribs are connected to the lower surface of the tray, and the ribs are connected to the outer side surface of the sleeve, and the plurality of ribs are spaced and evenly distributed along the outer circumference of the sleeve.

8. The workpiece processing device according to claim 7, wherein: The second air intake pipeline is connected to a second nozzle, the third air intake pipeline is connected to a third nozzle, and the fluids flowing out of the second nozzle and the third nozzle can act on the rib plate respectively.

9. The workpiece processing device according to claim 8, wherein: The orthographic projections of the second nozzle and the third nozzle on the first projection plane are both located below the orthographic projection of the tray on the first projection plane; the first projection plane is parallel to the central axis of the tray; The orthographic projections of the second nozzle and the third nozzle on the second projection plane are located outside the tray on the second projection plane; the second projection plane is parallel to the lower surface of the tray; and in the second projection plane, the minimum distance between the orthographic projection of the second nozzle and the orthographic projection of the third nozzle is smaller than the size of the orthographic projection of the tray along the corresponding direction.

10. The workpiece processing device according to claim 8, wherein: The second nozzle is symmetrically arranged with the third nozzle; The axial direction of the second nozzle is arranged parallel to the axial direction of the third nozzle.

11. The workpiece processing device according to claim 7, wherein: The first air inlet pipe is connected to a plurality of first nozzles, and the plurality of first nozzles are distributed at intervals; The orthographic projections of the plurality of first nozzles on the first projection plane are all located below the orthographic projection of the rib on the first projection plane; The first projection plane is parallel to the central axis of the tray; The orthographic projections of the plurality of first nozzles on the second projection plane are located in the orthographic projection of the tray on the second projection plane; The second projection plane is parallel to the lower surface of the tray.

12. The workpiece processing device according to any one of claims 1 to 11, wherein: The material of at least one of the bearing member, the supporting member, the first air intake pipeline, the second air intake pipeline and the third air intake pipeline includes: quartz.

13. A process equipment comprising: A workpiece processing device as claimed in any one of claims 1 to 12.

14. A workpiece processing method based on the workpiece processing device according to any one of claims 1 to 12, comprising: Transferring the workpiece to the top of the carrier; When the internal thread section and the external thread section are in a mating state, air is ventilated into the second air inlet pipeline, so that the first force provided by the gas in the second air inlet pipeline can push the bearing member to rotate along the first direction, and the bearing member can also move upward relative to the support member; Ventilate the first air inlet pipeline so that the lifting force provided by the gas in the first air inlet pipeline can push the bearing member and the workpiece to move upward relative to the support member until the bearing member moves to a target position and remains there; wherein when the bearing member is at the target position, the internal thread section and the external thread section are in a separated state; Ventilating the second air inlet pipeline and the third air inlet pipeline so that the rotation speed of the bearing member in the first direction gradually decreases until the bearing member stops rotating; Ventilate the second air inlet pipeline so that the second force provided by the second air inlet pipeline can push the carrier to rotate in the first direction and process the workpiece; or ventilate the third air inlet pipeline so that the third force provided by the third air inlet pipeline can push the carrier to rotate in the second direction, which is opposite to the first direction, and process the workpiece; After the workpiece is processed, air is ventilated into the second air inlet pipeline and the third air inlet pipeline, so that the rotation speed of the carrier is gradually reduced until the carrier stops rotating; Stopping ventilation into the first air inlet pipeline, so that the bearing member can move downward under the action of its own gravity; When the internal thread section and the external thread section are in a mating state, air is ventilated into the third air inlet pipeline, so that the fourth force provided by the third air inlet pipeline can push the bearing member to rotate along the second direction, and the bearing member can also move downward relative to the support member.

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