Film removing equipment for copper-clad ceramic substrate

Abstract

The invention discloses film removing equipment for a copper-clad ceramic substrate, and relates to the technical field of film removing equipment, and the film removing equipment comprises a mounting frame, a conveying device, a temporary storage device, a mechanical arm, a plate conveying device, a positioning device, a transferring device, a film tearing device and a film clamping device, the conveying device is used for conveying the copper-clad ceramic substrates, the temporary storage device is used for placing screened NG products, the mechanical arm is used for rotating the copper-clad ceramic substrates by a fixed angle and transferring the copper-clad ceramic substrates to the plate conveying device, the plate conveying device is used for placing the copper-clad ceramic substrates on the positioning device, and the positioning device is used for accurately positioning the copper-clad ceramic substrates. The transferring device conveys the positioned copper-clad ceramic substrate to the conveying device, the film tearing device adheres films on the upper side and the lower side of the copper-clad ceramic substrate, the film clamping device tears the films adhering to the film tearing device, and therefore the purpose of removing the films on the two faces of the copper-clad ceramic substrate is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of film removal equipment, in particular to a film removal equipment for a copper-clad ceramic substrate. Background Art

[0002] Copper-clad ceramic substrate is a power semiconductor device with a layer of copper foil wrapped on the surface of a ceramic substrate. It has excellent thermal conductivity, excellent insulation performance and high strength, and is suitable for power devices, especially for applications in high-power, high-frequency and high-temperature environments. The manufacture of copper-clad ceramic substrates usually includes the following steps: copper-ceramic sintering, pattern transfer, laser cutting, etc.

[0003] The pattern transfer process requires a photosensitive adhesive film to be attached to the copper-clad ceramic substrate, and then the pattern of the film is transferred to the photosensitive layer of the substrate through exposure, and then the film on the substrate is removed. The size of the copper-clad ceramic substrate is small, and the frequent film attachment and removal process has high requirements for the accuracy and efficiency of manual work. In addition, ceramics are brittle, and there is a risk of damage during manual work.

[0004] In view of the above situation, the present invention proposes a film removal device. The device is first positioned by a sensor, and then the film is glued and torn off by the device, and foolproof mechanisms such as sensors and NG temporary storage are added in the intermediate process, so as to realize automatic film removal of the device. Summary of the invention

[0005] The object of the present invention is to provide a film removal device for a copper-clad ceramic substrate to solve the problems raised in the prior art.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a film removal device for a copper-clad ceramic substrate, the film removal device comprising a mounting frame, a conveying device, a temporary storage device, a robotic arm, a plate feeding device, a positioning device, a transfer device, a film tearing device and a film clamping device, the mounting frame and the conveying device are rotatably connected, the temporary storage device, the robotic arm, the plate feeding device, the positioning device, the transfer device, the film tearing device and the film clamping device are respectively fastened to the mounting frame, the robotic arm, the plate feeding device, the positioning device, the transfer device and the film tearing device are arranged in sequence according to the conveying direction of the conveying device, two film tearing devices and two film clamping devices are each provided, the two film tearing devices are located on the upper and lower sides of the conveying device, and the two film clamping devices are located on the side of the two film tearing devices close to the transfer device.

[0007] Furthermore, the mounting frame serves as an installation base for installing other components, the conveying device is used to convey the copper-clad ceramic substrate, the temporary storage device is used to place the screened NG products, the robotic arm is used to rotate the copper-clad ceramic substrate to a fixed angle and transfer it to the plate feeding device, the plate feeding device is used to place the copper-clad ceramic substrate on the positioning device, the positioning device accurately positions the copper-clad ceramic substrate, the conveying device conveys the positioned copper-clad ceramic substrate to the conveying device, the film tearing device sticks the film on the upper and lower sides of the copper-clad ceramic substrate, and the film clamping device tears off the film stuck on the film tearing device. The equipment uses an L-shaped loading table, and the copper-clad ceramic substrate can be loaded in large quantities at one time in the form of multiple pieces per stack and multiple stacks per machine, and the robotic arm is equipped with a weighing function to prevent overlapping. Two film tearing devices and two film clamping devices are provided, and two copper-clad ceramic substrates can be defilmed at the same time to improve work efficiency.

[0008] The conveying device comprises a conveying belt and an auxiliary shaft. The conveying belt is rotatably connected to a mounting frame, the auxiliary shaft is rotatably connected to the mounting frame, and the auxiliary shaft is located above the side of the conveying belt close to the film tearing device.

[0009] Furthermore, the conveyor belt is used to convey the copper-clad ceramic substrate, and the auxiliary shaft is used to assist the film tearing device in tearing the film. When the film tearing device tears the film, the auxiliary shaft rotates under the film, so that the film can be better separated from the copper-clad ceramic substrate.

[0010] The plate sending device includes a first fixed plate, a first linear module, a fixed frame, a first lifting module, a first motor and a first vacuum suction cup. The first fixed plate and the mounting frame are tightly connected, the fixed end of the first linear module and the first fixed plate are tightly connected, the output end of the first linear module and the fixed frame are tightly connected, the fixed end of the first lifting module and the fixed frame are tightly connected, the output end of the first lifting module and the fixed end of the first motor are tightly connected, the output end of the first motor and the first vacuum suction cup are tightly connected, the first linear module, the fixed frame, the first lifting module, the first motor and the first vacuum suction cup are each provided with two, and the axes of the two first linear modules and the fixed frame are symmetrically distributed on a horizontal plane.

[0011] Furthermore, the first fixed plate serves as an installation base for installing other components, the first linear module serves as a power source to drive the fixed frame to perform linear motion, the fixed frame serves as an installation base for installing the first lifting module, the first lifting module serves as a power source to drive the first motor to perform lifting motion, the first motor serves as a power source to output torque to the copper-clad ceramic substrate, so that the copper-clad ceramic substrate is flipped 180°, the first vacuum suction cup generates negative pressure to suck the copper-clad ceramic substrate, thereby achieving the purpose of transporting the copper-clad ceramic substrate, and the first vacuum suction cup is provided with four suction ports, so that the movement is smoother during the process of transporting the copper-clad ceramic substrate to the positioning device, and the first vacuum suction cup is provided with two, so that two copper-clad ceramic substrates can be transported at the same time, thereby improving work efficiency.

[0012] The positioning device includes a positioning plate and an alignment cylinder. The positioning plate is tightly connected to the mounting frame, the fixed end of the alignment cylinder is tightly connected to the positioning plate, the output end of the alignment cylinder is connected to the copper-clad ceramic substrate, a positioning groove is provided at the end of the positioning plate away from the robotic arm, two positioning grooves are provided, the positioning grooves and the copper-clad ceramic substrate are of the same size, the positioning grooves are inclined, four alignment cylinders are provided, the alignment cylinder is located on the side of the positioning groove close to the plate feeding device, and the output displacement direction of the alignment cylinder is perpendicular to the side line adjacent to the copper-clad ceramic substrate.

[0013] Furthermore, the positioning plate is used as an installation base for installing other components, and the alignment cylinder is used as a pneumatic element to ensure the precise positioning of the copper-clad ceramic substrate on the positioning plate. The positioning plate is provided with a positioning groove for placing the copper-clad ceramic substrate, and the size of the positioning groove and the copper-clad ceramic substrate are such that the copper-clad ceramic substrate can fit perfectly with the positioning groove. The output direction of the alignment cylinder is perpendicular to the side line adjacent to the copper-clad ceramic substrate, so that the copper-clad ceramic substrate that does not fit perfectly with the positioning groove can be aligned to achieve high-precision positioning. There are two positioning grooves and four alignment cylinders, so two copper-clad ceramic substrates can be positioned at the same time, thereby improving work efficiency.

[0014] The transfer device includes a first telescopic cylinder, a second fixed plate, a second linear module and a second vacuum suction cup. The fixed end of the first telescopic cylinder is tightly connected to the mounting frame, the output end of the first telescopic cylinder is tightly connected to the second fixed plate, the fixed end of the second linear module is tightly connected to the second fixed plate, the output end of the second linear module is tightly connected to the second vacuum suction cup, and two second linear modules and two second vacuum suction cups are each provided. The two second linear modules and the second vacuum suction cups are symmetrically distributed on a horizontal plane about the first telescopic cylinder, and the adsorption direction of the second vacuum suction cup is downward.

[0015] Furthermore, the first telescopic cylinder is used as a power source to drive the second fixed plate to perform telescopic movement. The second fixed plate is used as an installation base to install the second linear module. The second linear module is used as a power source to drive the second vacuum suction cup to perform linear movement. The second vacuum suction cup generates negative pressure, thereby sucking the positioned copper-clad ceramic substrate. The second vacuum suction cup is provided with four suction ports, so that the movement is smoother during the process of transporting the copper-clad ceramic substrate to the conveyor belt. There are two second vacuum suction cups, which can transport two copper-clad ceramic substrates at the same time, thereby improving work efficiency.

[0016] The film tearing device comprises a third fixed plate, a second telescopic cylinder, a second motor, a fixed block group, a new tape, an old tape, a glue head and a guide rod. The fixed end of the second telescopic cylinder is fastened to the mounting frame, the output end of the second telescopic cylinder is fastened to the third fixed plate, four second motors and four fixed block groups are provided, the four second motors are arranged on the third fixed plate from top to bottom, the fixed end of the second motor is fastened to the third fixed plate, the output ends of the four second motors are respectively connected to the adjacent new tape and old tape, the fixed block group is connected to the second motor, the glue head is fastened to the third fixed plate, the guide rod is fastened to the third fixed plate, the output direction of the second motor is toward the side away from the second telescopic cylinder, and the output directions of adjacent second motors are opposite, two new tapes, two old tapes, glue heads and guide rods are provided, two new tapes are respectively installed on both sides of the third fixed plate, two glue heads are located at the bottom of the third fixed plate, the old tape is installed between the new tape and the glue head on the same side, the glue direction of the glue head is downward, and the guide rod is located between the new tape and the old tape.

[0017] Furthermore, the third fixed plate is used as an installation base for installing other components, the second telescopic cylinder is used as a power source to drive the third fixed plate to perform telescopic movement, the second motor is used as a power source to output torque to a given shaft, and the fixed shaft is used to realize transmission, so that the fixed block group, the new tape and the old tape can rotate, the fixed block group is used to fix the new tape and the old tape on the fixed shaft, and the fixed block group is detachable, the new tape is used to adhere to the film on the copper-clad ceramic substrate, and the old tape is used to recycle the used tape, and the adhesive head is located at the bottom of the third fixed plate. Guiding the tape allows it to accurately stick to the film of the copper-clad ceramic substrate. The guide rod is located between the new tape and the old tape, and is used to guide the movement trajectory of the tape to prevent movement interference between the new tape and the old tape. Four second motors and four fixed block groups are provided, and the output directions of adjacent second motors are opposite. Two new tapes, two old tapes, two adhesive heads and two guide rods are provided. A new tape, an old tape, a adhesive head and a guide rod form a working group, which rotates with the two second motors so that the adhesive head is always a new tape, thereby ensuring the viscosity of the adhesive head.

[0018] The film clamping device includes a third linear module, a second lifting module and a film clamp. The fixed end of the third linear module is tightly connected to the mounting frame, the output end of the third linear module is tightly connected to the fixed end of the second lifting module, the output end of the second lifting module is tightly connected to the film clamp. Two film clamps are provided, and the film clamping direction of the film clamp is toward the adhesive head.

[0019] Furthermore, the third linear module is used as a power source to drive the second lifting module to perform linear motion. The second lifting module is used as a power source to drive the film clamp to perform lifting motion. The two film clamps separate the two adhesive heads and the torn film, making it convenient for the film tearing device to continue tearing the film. The torn film will not interfere with subsequent work, thereby realizing an automated process.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. An L-shaped loading table can be used to load a large amount of materials at one time, reducing the burden of manpower.

[0022] 2. The film can be torn off simultaneously on both sides, which realizes automatic film tearing, improves work efficiency and reduces production loss rate.

[0023] 3. An auxiliary shaft is set up to help the film tearing device to tear the film so that the film and the copper-clad ceramic substrate can be completely separated.

[0024] 4. A film clamping device is set up to handle the film torn off by the film tearing device in a timely manner without interfering with subsequent work, thus realizing an automated process.

[0025] 5. It realizes the connection with downstream processes and realizes automated production. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of a film removal device for a copper-clad ceramic substrate of the present invention;

[0027] Figure 2 It is a schematic diagram of the overall front view structure of a film removal device for a copper-clad ceramic substrate of the present invention;

[0028] Figure 3 It is a schematic structural diagram of a plate feeding device of a film removal device for a copper-clad ceramic substrate of the present invention;

[0029] Figure 4 A film removal device for a copper-clad ceramic substrate according to the present invention Figure 3 View detail A: Enlarged view;

[0030] Figure 5 It is a schematic structural diagram of a positioning device of a film removal device for a copper-clad ceramic substrate of the present invention;

[0031] Figure 6 It is a schematic structural diagram of a conveying device of a film removal device for a copper-clad ceramic substrate of the present invention;

[0032] Figure 7 The present invention is a schematic structural diagram of a film peeling device of a film peeling device for a copper-clad ceramic substrate.

[0033] In the figure: 1, mounting frame; 2, conveying device; 3, temporary storage device; 4, mechanical arm; 5, plate feeding device; 6, positioning device; 7, transfer device; 8, film tearing device; 9, film clamping device; 21, conveyor belt; 22, auxiliary axis; 51, first fixed plate; 52, first linear module; 53, fixed frame; 54, first lifting module; 55, first motor; 56, first vacuum suction cup; 61, positioning plate; 62, alignment cylinder; 71, first telescopic cylinder; 72, second fixed plate; 73, second linear module; 74, second vacuum suction cup; 81, third fixed plate; 82, second telescopic cylinder; 83, second motor; 84, fixed block; 85, new tape; 86, old tape; 87, adhesive head; 88, guide rod; 91, third linear module; 92, second lifting module; 93, film clamp; 611, positioning groove. DETAILED DESCRIPTION

[0034] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0035] Example: Figure 1-Figure 7 As shown, the present invention provides a technical solution for a film removal device for a copper-clad ceramic substrate:

[0036] like Figure 1 As shown, a film removal device for a copper-clad ceramic substrate is provided, the film removal device comprises a mounting frame 1, a conveying device 2, a temporary storage device 3, a robotic arm 4, a plate feeding device 5, a positioning device 6, a transfer device 7, a film tearing device 8 and a film clamping device 9. The mounting frame 1 is rotatably connected to the conveying device 2. The temporary storage device 3, the robotic arm 4, the plate feeding device 5, the positioning device 6, the transfer device 7, the film tearing device 8 and the film clamping device 9 are respectively fastened to the mounting frame 1. The robotic arm 4, the plate feeding device 5, the positioning device 6, the transfer device 7 and the film tearing device 8 are arranged in sequence according to the conveying direction of the conveying device 2. Two film tearing devices 8 and two film clamping devices 9 are provided. The two film tearing devices 8 are located on the upper and lower sides of the conveying device 2. The two film clamping devices 9 are located on the side of the two film tearing devices 8 close to the transfer device 7.

[0037] The mounting frame 1 is used as an installation base for installing other components. The conveying device 2 is used to convey the copper-clad ceramic substrate. The temporary storage device 3 is used to place the screened NG products. The robotic arm 4 is used to rotate the copper-clad ceramic substrate to a fixed angle and transfer it to the plate feeding device 5. The plate feeding device 5 is used to place the copper-clad ceramic substrate on the positioning device 6. The positioning device 6 accurately positions the copper-clad ceramic substrate. The transfer device 7 conveys the positioned copper-clad ceramic substrate to the conveying device 2. The film tearing device 8 sticks the films on the upper and lower sides of the copper-clad ceramic substrate. The film clamping device 9 tears off the film stuck on the film tearing device 8. The equipment uses an L-shaped loading table. The copper-clad ceramic substrate can be loaded in large quantities at one time in the form of multiple pieces per stack and multiple stacks per machine. The robotic arm is equipped with a weighing function to prevent stacking. Two film tearing devices 8 and two film clamping devices 9 are each provided. Two copper-clad ceramic substrates can be removed from the film at the same time to improve work efficiency.

[0038] like Figures 1-2 As shown, the conveying device 2 includes a conveying belt 21 and an auxiliary shaft 22. The conveying belt 21 is rotatably connected to the mounting frame 1. The auxiliary shaft 22 is rotatably connected to the mounting frame 1. The auxiliary shaft 22 is located above the conveying belt 21 on the side close to the film tearing device 8.

[0039] The conveyor belt 21 is used to convey the copper-clad ceramic substrate, and the auxiliary shaft 22 is used to assist the film tearing device 8 in tearing the film. When the film tearing device 8 tears the film, the auxiliary shaft 22 rotates under the film, so that the film can be better separated from the copper-clad ceramic substrate.

[0040] like Figures 1 to 4 As shown, the plate feeding device 5 includes a first fixed plate 51, a first linear module 52, a fixed frame 53, a first lifting module 54, a first motor 55 and a first vacuum suction cup 56. The first fixed plate 51 is fastened to the mounting frame 1, the fixed end of the first linear module 52 is fastened to the first fixed plate 51, the output end of the first linear module 52 is fastened to the fixed frame 53, the fixed end of the first lifting module 54 is fastened to the fixed frame 53, the output end of the first lifting module 54 is fastened to the fixed end of the first motor 55, the output end of the first motor 55 is fastened to the first vacuum suction cup 56, and two first linear modules 52, fixed frame 53, first lifting module 54, first motor 55 and first vacuum suction cup 56 are each provided, and the axes of the two first linear modules 52 and the fixed frame 53 are symmetrically distributed on a horizontal plane.

[0041] The first fixed plate 51 is used as an installation base for installing other components. The first linear module 52 is used as a power source to drive the fixed frame 53 to perform linear motion. The fixed frame 53 is used as an installation base for installing the first lifting module 54. The first lifting module 54 is used as a power source to drive the first motor 55 to perform lifting motion. The first motor 55 is used as a power source to output torque to the copper-clad ceramic substrate, so that the copper-clad ceramic substrate is flipped 180°. The first vacuum suction cup 56 generates negative pressure to suck the copper-clad ceramic substrate, thereby achieving the purpose of transporting the copper-clad ceramic substrate. The first vacuum suction cup 56 is provided with four suction ports, so that the movement is smoother during the process of transporting the copper-clad ceramic substrate to the positioning device 6. There are two first vacuum suction cups 56, which can transport two copper-clad ceramic substrates at the same time, thereby improving work efficiency.

[0042] like Figures 2 to 5 As shown, the positioning device 6 includes a positioning plate 61 and an alignment cylinder 62. The positioning plate 61 is fastened to the mounting frame 1, the fixed end of the alignment cylinder 62 is fastened to the positioning plate 61, the output end of the alignment cylinder 62 is connected to the copper-clad ceramic substrate, and a positioning groove 611 is provided at the end of the positioning plate 61 away from the robotic arm 4. There are two positioning grooves 611. The positioning grooves 611 are consistent in size with the copper-clad ceramic substrate, and the positioning grooves 611 are inclined. There are four alignment cylinders 62. The alignment cylinder 62 is located on the side of the positioning groove 611 close to the plate feeding device 5, and the output displacement direction of the alignment cylinder 62 is perpendicular to the side line adjacent to the copper-clad ceramic substrate.

[0043] The positioning plate 61 is used as an installation base for installing other components. The alignment cylinder 62 is used as a pneumatic element to ensure the precise positioning of the copper-clad ceramic substrate on the positioning plate 61. The positioning plate 61 is provided with a positioning groove 611 for placing the copper-clad ceramic substrate, and the size of the positioning groove 611 and the copper-clad ceramic substrate are such that the copper-clad ceramic substrate can be completely fitted with the positioning groove 611. The output direction of the alignment cylinder 62 is perpendicular to the side line adjacent to the copper-clad ceramic substrate, and the copper-clad ceramic substrate that is not completely fitted with the positioning groove 611 can be aligned to achieve high-precision positioning. There are two positioning grooves 611 and four alignment cylinders 62, so two copper-clad ceramic substrates can be positioned at the same time, thereby improving work efficiency.

[0044] like Figures 2 to 6As shown, the transfer device 7 includes a first telescopic cylinder 71, a second fixed plate 72, a second linear module 73 and a second vacuum suction cup 74. The fixed end of the first telescopic cylinder 71 is fastened to the mounting frame 1, the output end of the first telescopic cylinder 71 is fastened to the second fixed plate 72, the fixed end of the second linear module 73 is fastened to the second fixed plate 72, the output end of the second linear module 73 is fastened to the second vacuum suction cup 74, and two second linear modules 73 and two second vacuum suction cups 74 are each provided. The two second linear modules 73 and the second vacuum suction cups 74 are symmetrically distributed on a horizontal plane about the first telescopic cylinder 71, and the adsorption direction of the second vacuum suction cup 74 is downward.

[0045] The first telescopic cylinder 71 is used as a power source to drive the second fixed plate 72 to perform telescopic movement. The second fixed plate 72 is used as an installation base to install the second linear module 73. The second linear module 73 is used as a power source to drive the second vacuum suction cup 74 to perform linear movement. The second vacuum suction cup 74 generates negative pressure to suck the copper-clad ceramic substrate that has been positioned. The second vacuum suction cup 74 is provided with four suction ports, so that the movement is smoother during the process of transporting the copper-clad ceramic substrate to the conveyor belt 21. There are two second vacuum suction cups 74, which can transport two copper-clad ceramic substrates at the same time, thereby improving work efficiency.

[0046] like Figures 2 to 7 As shown, the film tearing device 8 includes a third fixed plate 81, a second telescopic cylinder 82, a second motor 83, a fixed block group 84, a new tape 85, an old tape 86, a glue head 87 and a guide rod 88. The fixed end of the second telescopic cylinder 82 is fastened to the mounting frame 1, and the output end of the second telescopic cylinder 82 is fastened to the third fixed plate 81. There are four second motors 83 and four fixed block groups 84. The four second motors 83 are arranged on the third fixed plate 81 from top to bottom. The fixed end of the second motor 83 is fastened to the third fixed plate 81. The output ends of the four second motors 83 are respectively connected to the adjacent new tape 85 and the old tape 86 for transmission. The fixed block group 84 and the first The two motors 83 are transmission connected, the glue head 87 and the third fixed plate 81 are fastened, the guide rod 88 and the third fixed plate 81 are fastened, the output direction of the second motor 83 is toward the side away from the second telescopic cylinder 82, and the output directions of adjacent second motors 83 are opposite. There are two new tapes 85, old tapes 86, glue heads 87 and guide rods 88. The two new tapes 85 are respectively installed on both sides of the third fixed plate 81, and the two glue heads 87 are located at the bottom of the third fixed plate 81. The old tape 86 is installed between the new tape 85 and the glue head 87 on the same side. The glue direction of the glue head 87 is downward, and the guide rod 88 is located between the new tape 85 and the old tape 86.

[0047] The third fixed plate 81 is used as an installation base for installing other components. The second telescopic cylinder 82 is used as a power source to drive the third fixed plate 81 to perform telescopic movement. The second motor 83 is used as a power source to output torque to a given shaft. The fixed shaft is used to realize transmission, so that the fixed block group 84, the new tape 85 and the old tape 86 can rotate. The fixed block group 84 is used to fix the new tape 85 and the old tape 86 on the fixed shaft, and the fixed block group 84 is detachable. The new tape 85 is used to adhere the film on the copper-clad ceramic substrate. The old tape 86 is used to recycle the used tape. The adhesive head 87 is located at the bottom of the third fixed plate 81 and is used to guide the tape. The tape can accurately stick to the film of the copper-clad ceramic substrate. The guide rod 88 is located between the new tape 85 and the old tape 86, and is used to guide the movement trajectory of the tape to prevent movement interference between the new tape 85 and the old tape 86. The second motor 83 and the fixed block group 84 are each provided with four, and the output directions of adjacent second motors 83 are opposite. The new tape 85, the old tape 86, the glue head 87 and the guide rod 88 are each provided with two. A new tape 85, an old tape 86, a glue head 87 and a guide rod 88 are a working group, which cooperate with the two second motors 83 to rotate, so that the glue head 87 is always the new tape 85, thereby ensuring the viscosity of the glue head 87.

[0048] like Figures 2 to 7 As shown, the film clamping device 9 includes a third linear module 91, a second lifting module 92 and a film clamp 93. The fixed end of the third linear module 91 is fastened to the mounting frame 1, the output end of the third linear module 91 is fastened to the fixed end of the second lifting module 92, the output end of the second lifting module 92 is fastened to the film clamp 93, and two film clamps 93 are provided. The film clamping direction of the film clamp 93 is toward the adhesive head 87.

[0049] The third linear module 91 is used as a power source to drive the second lifting module 92 to perform linear motion. The second lifting module 92 is used as a power source to drive the film clamp 93 to perform lifting motion. The two film clamps 93 separate the two adhesive heads 87 and the torn film, making it convenient for the film tearing device 8 to continue tearing the film. The torn film will not interfere with subsequent work, thereby realizing an automated process.

[0050] The working principle of the present invention is as follows: the L-shaped loading platform filled with copper-clad ceramic substrates is placed on the conveyor belt 21, the robot arm 4 rotates the copper-clad ceramic substrates to a fixed angle and transfers them to the plate feeding device 5 through the vacuum suction cup, and the robot arm 4 is equipped with a weighing function to prevent overlapping, and the identified NG products are transported to the temporary storage device 3, the copper-clad ceramic substrates are placed on the first vacuum suction cup 56 by the robot arm 4, the first vacuum suction cup 56 generates negative pressure, sucks the copper-clad ceramic substrates, the first linear module 52 drives the first vacuum suction cup 56 to move linearly toward the positioning device 6, and the first lifting module 54 drives the first The vacuum suction cup 56 descends toward the positioning device 6, and the first motor 55 outputs torque to make the first vacuum suction cup 56 flip 180 degrees. The first vacuum suction cup 56 is inflated to release the copper-clad ceramic substrate and place the copper-clad ceramic substrate in the positioning groove 611. The alignment cylinder 62 pushes the adjacent side of the copper-clad ceramic substrate so that the copper-clad ceramic substrate and the positioning groove 611 are completely fitted. The first telescopic cylinder 71 drives the second vacuum suction cup 74 to extend downward until the second vacuum suction cup 74 contacts the copper-clad ceramic substrate. The second vacuum suction cup 74 generates negative pressure to suck the copper-clad ceramic substrate. The first telescopic cylinder 71 drives the second vacuum suction cup 74 to extend downward until the second vacuum suction cup 74 contacts the copper-clad ceramic substrate. The second vacuum suction cup 74 generates negative pressure to suck the copper-clad ceramic substrate. The cylinder 71 drives the second vacuum suction cup 74 to retract upward, and the second linear module 73 drives the second vacuum suction cup 74 to make a linear motion toward the film tearing device 8, and then the first telescopic cylinder 71 drives the second vacuum suction cup 74 to extend downward until the copper-clad ceramic substrate contacts the conveyor belt 21, and the second vacuum suction cup 74 is inflated to make the copper-clad ceramic substrate fall on the conveyor belt 21, and the conveyor belt 21 drives the copper-clad ceramic substrate to move toward the film tearing device 8, and the second motor 83 outputs torque to make the new tape 85 and the old tape 86 rotate, so that the adhesive head 87 is always on the new tape 85, and the second extensions on the upper and lower sides are The retracting cylinder 82 extends toward the conveyor belt 21, so that the adhesive head 87 sticks to the film on the copper-clad ceramic substrate, and the auxiliary shaft 22 and the shaft of the conveyor belt 21 rotate under the stuck film, cooperating with the contraction of the second telescopic cylinder 82, so that the film and the copper-clad ceramic substrate are completely separated, and the film clamp 93 clamps the film stuck to the adhesive head 87, and the second lifting module 92 drives the film clamp 93 to lift, so that the film and the adhesive head 87 are separated, and the third linear module 91 drives the film clamp 93 to make a linear motion in the direction away from the film tearing device 8, and the film clamp 93 is released, so that the film falls off, and the film removal work of the copper-clad ceramic substrate is realized.

[0051] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A film removal device for a copper-clad ceramic substrate, characterized in that: The film removal device comprises a mounting frame (1), a conveying device (2), a temporary storage device (3), a mechanical arm (4), a plate feeding device (5), a positioning device (6), a transfer device (7), a film tearing device (8) and a film clamping device (9); the mounting frame (1) and the conveying device (2) are rotatably connected; the temporary storage device (3), the mechanical arm (4), the plate feeding device (5), the positioning device (6), the transfer device (7), the film tearing device (8) and the film clamping device (9) are respectively and firmly connected to the mounting frame (1); the mechanical arm (4), the plate feeding device (5), the positioning device (6), the transfer device (7) and the film tearing device (8) are arranged in sequence according to the conveying direction of the conveying device (2); two of the film tearing devices (8) and two of the film clamping devices (9) are provided; the two film tearing devices (8) are located on the upper and lower sides of the conveying device (2); and the two film clamping devices (9) are located on the side of the two film tearing devices (8) close to the transfer device (7).

2. The film removal device for a copper-clad ceramic substrate according to claim 1, characterized in that: The conveying device (2) comprises a conveying belt (21) and an auxiliary shaft (22); the conveying belt (21) is rotatably connected to the mounting frame (1); the auxiliary shaft (22) is rotatably connected to the mounting frame (1); and the auxiliary shaft (22) is located above the side of the conveying belt (21) close to the film tearing device (8).

3. The film removal device for a copper-clad ceramic substrate according to claim 1, characterized in that: The plate delivery device (5) comprises a first fixed plate (51), a first linear module (52), a fixed frame (53), a first lifting module (54), a first motor (55) and a first vacuum suction cup (56); the first fixed plate (51) is tightly connected to the mounting frame (1); the fixed end of the first linear module (52) is tightly connected to the first fixed plate (51); the output end of the first linear module (52) is tightly connected to the fixed frame (53); the fixed end of the first lifting module (54) is tightly connected to the fixed frame (53); the output end of the first lifting module (54) is tightly connected to the fixed end of the first motor (55); the output end of the first motor (55) is tightly connected to the first vacuum suction cup (56); the first linear module (52), the fixed frame (53), the first lifting module (54), the first motor (55) and the first vacuum suction cup (56) are all provided with two, and the axes of the two first linear modules (52) and the fixed frame (53) are symmetrically distributed on a horizontal plane.

4. The film removal device for a copper-clad ceramic substrate according to claim 1, characterized in that: The positioning device (6) comprises a positioning plate (61) and an alignment cylinder (62); the positioning plate (61) is tightly connected to the mounting frame (1); the fixed end of the alignment cylinder (62) is tightly connected to the positioning plate (61); the output end of the alignment cylinder (62) is connected to the copper-clad ceramic substrate; the end of the positioning plate (61) away from the robot arm (4) is provided with a positioning groove (611); two positioning grooves (611) are provided; the positioning grooves (611) and the copper-clad ceramic substrate are of the same size; the positioning grooves (611) are inclined; four alignment cylinders (62) are provided; the alignment cylinders (62) are located on a side of the positioning groove (611) close to the plate feeding device (5); the output displacement direction of the alignment cylinder (62) is perpendicular to the side line adjacent to the copper-clad ceramic substrate.

5. The film removal device for a copper-clad ceramic substrate according to claim 1, characterized in that: The transfer device (7) comprises a first telescopic cylinder (71), a second fixed plate (72), a second linear module (73) and a second vacuum suction cup (74); the fixed end of the first telescopic cylinder (71) is tightly connected to the mounting frame (1); the output end of the first telescopic cylinder (71) is tightly connected to the second fixed plate (72); the fixed end of the second linear module (73) is tightly connected to the second fixed plate (72); the output end of the second linear module (73) is tightly connected to the second vacuum suction cup (74); two second linear modules (73) and two second vacuum suction cups (74) are each provided; the two second linear modules (73) and two second vacuum suction cups (74) are symmetrically distributed on a horizontal plane with respect to the first telescopic cylinder (71); the second vacuum suction cup (74) adsorbs in a downward direction.

6. The film removal device for a copper-clad ceramic substrate according to claim 1, characterized in that: The film tearing device (8) comprises a third fixed plate (81), a second telescopic cylinder (82), a second motor (83), a fixed block group (84), a new adhesive tape (85), an old adhesive tape (86), an adhesive head (87) and a guide rod (88). The fixed end of the second telescopic cylinder (82) is tightly connected to the mounting frame (1), the output end of the second telescopic cylinder (82) is tightly connected to the third fixed plate (81), the second motor (83) and the fixed block group (84) are both provided with four, the four second motors (83) are arranged on the third fixed plate (81) from top to bottom, the fixed end of the second motor (83) is tightly connected to the third fixed plate (81), the output ends of the four second motors (83) are respectively connected to the adjacent new adhesive tape (85) and the old adhesive tape (86), the fixed block group (84) and the second motor ( 83) transmission connection, the adhesive head (87) and the third fixed plate (81) are tightly connected, the guide rod (88) and the third fixed plate (81) are tightly connected, the output direction of the second motor (83) is toward the side away from the second telescopic cylinder (82), and the output directions of adjacent second motors (83) are opposite, the new tape (85), the old tape (86), the adhesive head (87) and the guide rod (88) are each provided with two, the two new tapes (85) are respectively installed on both sides of the third fixed plate (81), the two adhesive heads (87) are located at the bottom of the third fixed plate (81), the old tape (86) is installed between the new tape (85) and the adhesive head (87) on the same side, the adhesive direction of the adhesive head (87) is downward, and the guide rod (88) is located between the new tape (85) and the old tape (86).

7. The film removal device for a copper-clad ceramic substrate according to claim 6, characterized in that: The film clamping device (9) comprises a third linear module (91), a second lifting module (92) and a film clamp (93); the fixed end of the third linear module (91) is tightly connected to the mounting frame (1); the output end of the third linear module (91) is tightly connected to the fixed end of the second lifting module (92); the output end of the second lifting module (92) is tightly connected to the film clamp (93); two film clamps (93) are provided, and the film clamping directions of the two film clamps (93) are toward the adhesive head (87).

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