A vacuum evaporation device with uniform evaporation

Abstract

The present application relates to vacuum evaporation device technical field, especially to a kind of evaporation uniform vacuum evaporation device.The technical scheme includes evaporation device, rotating structure, storage structure, linkage structure one and linkage structure two, the evaporation device includes cabinet, located in the side of cabinet's open-close door;The rotating structure includes ring seat, installation ring;The storage structure includes support gusset, support rod, storage frame;The linkage structure one includes support strip one, sliding sleeve one, guide rod one, connecting tendon one, limit ring one, spring one, guide vane one;The linkage structure two includes support strip two, sliding sleeve two, guide rod two, connecting tendon two, limit ring two, spring two, guide vane two.The present application is matched between linkage structure one and linkage structure.The present application has the function of uniform evaporation base material, solves the need support or clamping when base material evaporation, causes the contact surface of clamping or supporting base material cannot be uniformly deposited processing condition.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation equipment technology, and more particularly to a vacuum evaporation equipment for uniform evaporation. Background Technology

[0002] Vapor deposition is a thin film preparation technique that uses advanced vacuum technology to prepare materials from solid sources into gaseous, ionic, or atomic states through evaporation, sputtering, or other methods in a vacuum environment, and then deposits them onto a substrate surface to form a thin film.

[0003] In the vapor deposition process of metal parts, atoms generated by the evaporation of the target material pass through the vacuum chamber to the substrate surface and condense to form a thin film. However, the substrate material needs to be supported or clamped, and the contact surface where the substrate material is clamped or supported cannot achieve uniform deposition. Therefore, those skilled in the art have provided a vacuum vapor deposition apparatus for uniform deposition to solve the problems mentioned in the background art. Summary of the Invention

[0004] The purpose of this invention is to address the problems existing in the background art by proposing a vacuum evaporation apparatus for uniform evaporation.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vacuum vapor deposition apparatus for uniform vapor deposition, comprising a vapor deposition apparatus, a rotating structure, a storage structure, a linkage structure one and a linkage structure two, wherein the vapor deposition apparatus comprises a housing and an opening and closing door located on one side of the housing;

[0006] The rotating structure includes ring seats that are equidistantly distributed on one side of the opening and closing door, and a mounting ring located inside the upper end of the ring seats;

[0007] The storage structure includes symmetrically distributed support corner plates fixed on the upper end of the mounting ring, a support rod located at the upper end of the support corner plates, and a storage frame located at one end of the support rod.

[0008] The linkage structure includes multiple sets of equally spaced support bars, a sliding sleeve embedded in the support corner plate, a guide rod slidably inserted into the sliding sleeve, a connecting rib passing through the support bar and connected to the upper end of the guide rod on one side at its lower end, a limiting ring sleeved on the outer wall of the guide rod, a spring fixed between the limiting ring and the support corner plate, and a guide plate located inside the housing and equally spaced longitudinally.

[0009] The second linkage structure includes multiple sets of equally spaced support bars, a sliding sleeve embedded in the support corner plate, a guide rod slidably inserted into the sliding sleeve, a connecting rib passing through the support bars and connected to the upper end of the guide rod, a limiting ring sleeved on the outer wall of the guide rod, a spring fixed between the limiting ring and the support corner plate, and a guide plate located inside the housing and equally spaced longitudinally.

[0010] The machine shell one end is provided with access, the access with open and close door corresponding, the access inner wall is provided with fender. Access for with open and close connection structure, and the effective use of the opening of the storage structure, for the access of parts after evaporation.

[0011] The machine shell lower end inner wall is provided with open and close structure, the open and close structure includes motor two located in the lower end inner wall of the machine shell, the output end of the motor two is provided with a screw rod, the lower end inner wall of the machine shell is provided with bearing support two, one end of the screw rod is rotatably inserted into the bearing support two. When the motor two drives the screw rod to rotate, one end of the screw rod is supported by the bearing support two, and the stability of the screw rod is improved when rotating.

[0012] The lower end inner wall of the machine shell is provided with a guide rail, the outer wall of the guide rail is slidably installed with a sliding block, the upper end of the sliding block is provided with a nut which is threadedly connected with the screw rod, and the upper end of the nut is provided with a connecting plate which is fixedly connected with the opening and closing door. The nut is threadedly connected with the screw rod, and the lower end is slidably connected with the outer wall of the guide rail through the sliding block, so that the rotating screw rod pushes the screw thread groove in the nut, drives the nut to move in the direction guided by the sliding block, and the pushing force applied to the nut is applied to the opening and closing door through the connecting plate.

[0013] The one end of the opening and closing door is provided with a motor one, the output end of the motor one is provided with a rotating shaft, the one end of the opening and closing door is provided with a bearing support one, the upper end of the rotating shaft is rotatably installed in the bearing support one. When the motor one drives the rotating shaft to rotate, one end of the rotating shaft rotates in the bearing support one, thereby supporting the rotating shaft, and the stability of the rotating shaft is improved when rotating.

[0014] The one end of the opening and closing door is provided with a motor one, the output end of the motor one is provided with a rotating shaft, the one end of the opening and closing door is provided with a bearing support one, the upper end of the rotating shaft is rotatably installed in the bearing support one. When the motor one drives the rotating shaft to rotate, one end of the rotating shaft rotates in the bearing support one, thereby supporting the rotating shaft, and the stability of the rotating shaft is improved when rotating.

[0015] The inner wall of the ring seat on both sides and the lower end is provided with a rolling groove in the shape of a ring, and the outer wall of the mounting ring on both ends and the lower end is rotatably installed with a steel ball which is slidably installed in the rolling groove. The ring seat is supported by the steel ball in multiple points and multiple surfaces, and is guided in rotation in the rolling groove. The rotation of the steel ball improves the stability of the mounting ring.

[0016] The guide plate one end is provided with guide surface one, the guide surface one gradually increases in thickness towards the center section of the guide plate one, and the lower end of the guide rod one is rotatably installed with a ball one. When the guide rod one enters the guide plate two, it is guided by the guide surface one, and at the same time, it is in rolling contact with the guide plate one through the ball one, thereby reducing the friction resistance when passing through.

[0017] The guide plate two is provided with guide surfaces two at both ends, the thickness of the guide surfaces two gradually increases towards the center section of the guide plate two, the guide rod two is rotatably installed with a ball two at the lower end, and the outer walls of the guide plate one and the guide plate two are provided with side plates which are symmetrically distributed and fixedly connected with the inner wall of the shell.

[0018] The guide plate one and the guide plate two are semicircular, a stroke groove is arranged between the guide plate one and the guide plate two, the support strip one is provided with a rubber head one at the upper end, and the support strip two is provided with a rubber head two at the upper end.

[0019] Compared with the prior art, the beneficial effects of the present application are as follows:

[0020] The feeding port of the vacuum evaporation device is opened and closed by an opening and closing door, a rotating structure is arranged on one side of the lower end of the opening and closing door to drive the rotation of the base material, the base material is supported by a plurality of arrayed support strips one and support strips two, the support strips one and the support strips two are linked through the guide plate one and the guide plate two, the base material is supported at different points during rotation according to the different positions, and the base material is uniformly evaporated when evaporated in the shell. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a front view of the present application;

[0022] Figure 2 It is a rear view of the present application;

[0023] Figure 3 It is a side view of the shell of the present application;

[0024] Figure 4 It is a bottom view of the shell of the present application;

[0025] Figure 5 It is a first angle view of the inside of the opening and closing plate of the present application;

[0026] Figure 6 It is a second angle view of the inside of the opening and closing plate of the present application;

[0027] Figure 7 Fig. 1 is a schematic diagram of the top view of the ring seat of the present application;

[0028] Figure 8 Fig. 2 is a schematic diagram of the side view of the ring gear of the present application;

[0029] Figure 9 Fig. 3 is a schematic diagram of the top view of the guide plate one and the guide plate two of the present application;

[0030] Figure 10 Fig. 4 is a schematic diagram of the front view of the linkage structure one and the linkage structure two of the present application;

[0031] Figure 11 Fig. 5 is a schematic diagram of the first angle of the linkage structure one of the present application;

[0032] Figure 12 Fig. 6 is a schematic diagram of the second angle of the linkage structure one of the present application;

[0033] Figure 13 Fig. 7 is a schematic diagram of the first angle of the linkage structure two of the present application;

[0034] Figure 14 Fig. 8 is a schematic diagram of the second angle of the linkage structure two of the present application;

[0035] Figure 15 Fig. 9 is a schematic diagram of the top view of the storage structure of the present application;

[0036] Figure 16 Fig. 10 is a schematic diagram of the partial main cross-sectional view of the ring seat of the present application.

[0037] Reference signs:

[0038] 100, evaporator; 101, casing; 102, opening and closing door; 103, access opening; 104, blocking edge;

[0039] 200, rotating structure; 201, motor one; 202, fixed rod; 203, rotating shaft; 204, gear; 205, bearing support one; 206, ring gear; 207, ring seat; 208, mounting ring; 209, rolling groove; 210, steel ball;

[0040] 300, storage structure; 301, support angle plate; 302, support rod; 303, storage frame; 304, stroke groove;

[0041] 400, linkage structure one; 401, rubber head one; 402, support strip one; 403, connecting rib one; 404, guide rod one; 405, limiting ring one; 406, ball one; 407, spring one; 408, sliding sleeve one; 409, guide plate one; 410, guide surface one;

[0042] 500, linkage structure two; 501, rubber head two; 502, connecting rib two; 503, support bar two; 504, ball two; 505, limiting ring two; 506, spring two; 507, sliding sleeve two; 508, guide rod two; 509, guide plate two; 510, guide surface two; 511, side plate;

[0043] 600, opening and closing structure; 601, motor two; 602, screw; 603, sliding block; 604, guide rail; 605, bearing support two; 606, nut; 607, connecting plate. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0045] Please refer to Figures 1 to 9 The present application provides three embodiments:

[0046] Embodiment one:

[0047] The vacuum evaporator 100 includes a casing 101, an opening and closing door 102 located on one side of the casing 101, a rotating structure 200, a storage structure 300, a linkage structure one 400 and a linkage structure two 500.

[0048] The storage structure 300 includes support angle plates 301 fixed on the upper end of the mounting ring 208 in a symmetrical distribution, support rods 302 located on the upper end of the support angle plates 301, and storage frames 303 located on one end of the support rods 302.

[0049] In this embodiment, hardware and other parts that need to be evaporated are stored in the storage frames 303, the structure of the storage frames 303 is in a grid shape, and there are several gaps inside. The vacuum evaporator 100 includes:

[0050] A vacuum system is used to extract the pressure inside the chamber to a certain level to create a highly vacuum working environment.

[0051] A heating evaporation source is used, and a heat source such as an electron beam furnace provides heat to make the raw materials sublimate or evaporate into a gaseous state:

[0052] A deposition process is used, and the gaseous material of the evaporated material diffuses along the chamber and is deposited on the substrate to form a thin film.

[0053] Thin film control, by controlling parameters such as deposition rate, temperature, pressure, etc. to adjust the thickness, smoothness and uniformity of the thin film; finally, end process, stop evaporation after reaching the required film thickness, turn off the system and restore the normal pressure in the chamber;

[0054] At the same time, the evaporation device 100 also includes:

[0055] Monitoring system for monitoring temperature, pressure, ion flow and other parameters during deposition to ensure film quality;

[0056] Control system responsible for adjusting heating source, substrate position, deposition rate and other parameters to control the thickness and uniformity of the thin film;

[0057] In use, the evaporation device 100 operates, and the evaporation materials such as gas, ion or atom flow between the storage frames 303, contact the base material hardware and other parts, and then form a thin film on the outside of the base material hardware and other parts, realizing the evaporation processing of the base material.

[0058] Example two:

[0059] The machine shell 101 is provided with an access opening 103 at one end, the access opening 103 corresponds to the opening and closing door 102, and the inner wall of the access opening 103 is provided with a stop edge 104;

[0060] The inner wall of the lower end of the machine shell 101 is provided with an opening and closing structure 600, the opening and closing structure 600 includes a motor two 601 located at the inner wall of the lower end of the machine shell 101, the output end of the motor two 601 is provided with a screw rod 602, the lower end of the inner wall of the machine shell 101 is provided with a bearing bracket two 605, and one end of the screw rod 602 is rotatably inserted into the inner part of the bearing bracket two 605;

[0061] The lower end of the inner wall of the machine shell 101 is provided with a guide rail 604, the outer wall of the guide rail 604 is slidably provided with a sliding block 603, the upper end of the sliding block 603 is provided with a nut 606 which is threadedly connected with the screw rod 602, and the upper end of the nut 606 is provided with a connecting plate 607 which is fixedly connected with the opening and closing door 102;

[0062] In this embodiment: after the evaporation processing of the base material, the motor two 601 drives the screw rod 602 to rotate, because the lower end of the nut 606 slides on the outer wall of the guide rail 604 through the sliding block 603, the nut 606 slides transversely, when the screw rod 602 rotates, the screw rod 602 extrudes the screw thread raceway in the nut 606, thereby pushing the nut 606 to move, the opening and closing door 102 is connected with the nut 606 through the connecting plate 607, the opening and closing door 102 is opened, the base material in the storage frame 303 is also removed from the machine body through the access opening 103, and enters the outside, after taking out the evaporated base material, the new base material is stored in the storage frame 303, thereby realizing the storage and taking of the material;

[0063] And in the process of material access, the screw 602 can be reversed by motor two 601, at this time the force applied to the nut 606 changes, pulling the nut 606 to drive the connecting plate 607 and the opening and closing plate to move towards the body, and the movement process is worth mentioning that the storage frame 303 corresponds to the travel groove 304, which ensures the passage of the storage frame and the supporting angle plate 301, and the opening and closing door 102 is closed when it is attached to the edge 104. In addition, by adding a sealing element at the attachment, the sealing performance can be improved to ensure the sealing during evaporation processing.

[0064] Example three:

[0065] The rotating structure 200 includes ring seats 207 located on one side of the opening and closing door 102 at equal intervals, and mounting rings 208 located inside the upper ends of the ring seats 207;

[0066] One end of the opening and closing door 102 is provided with a motor one 201, and the output end of the motor one 201 is provided with a rotating shaft 203. One end of the opening and closing door 102 is provided with a bearing bracket one 205, and the upper end of the rotating shaft 203 is rotatably installed in the inside of the bearing bracket one 205;

[0067] One end of each of the ring seats 207 is provided with a fixed rod 202 symmetrically distributed and fixedly connected with the opening and closing door 102. The outer wall of the rotating shaft 203 is sleeved with longitudinally equidistantly distributed gear wheels 204, and the outer wall of the mounting ring 208 is sleeved with a gear ring 206 engaged with the gear wheels 204;

[0068] The inner walls and the lower ends of the ring seats 207 are each provided with a rolling groove 209 in the shape of a ring, and the two ends and the lower end of the mounting ring 208 are each rotatably installed with a steel ball 210 in the shape of a ring array and slidingly installed in the rolling groove 209;

[0069] In this embodiment: through the travel groove 304, after the supporting angle plate 301 and the storage frame 303 horizontally enter the inside of the body, the motor one 201 drives the rotating shaft 203 to rotate, the rotating shaft 203 drives the gear wheels 204 to push the gear ring 206, because the mounting ring 208 is rotatably supported by the steel balls in the rolling grooves 209, the rotational time interval of the three groups of steel balls in the shape of a ring array remains stable, and the rolling support is performed at multiple points during rotation, the rotational stability is high, the stability of the mounting ring 208 is improved when driving the supporting stirring and the installation frame to rotate, the stability of the base material inside the installation frame is guaranteed, and during the evaporation processing, the base material rotates with the mounting ring 208, and the gas, ions or atoms prepared by sputtering or other methods more fully contact the base material, improving the uniformity of evaporation.

[0070] Example four:

[0071] The linkage structure one 400 comprises a plurality of groups of equidistantly distributed support strips one 402, a sliding sleeve one 408 embeddedly installed inside the support angle plate 301, a guide rod one 404 slidingly inserted inside the sliding sleeve one 408, a connecting rib one 403 penetrating through the support strip one 402 and connected at the lower end one side with the upper end of the guide rod one 404, a limiting ring one 405 sleeved on the outer wall of the guide rod one 404, a spring one 407 fixedly arranged between the limiting ring one 405 and the support angle plate 301, and a guide plate one 409 located inside the casing 101 and equidistantly longitudinally distributed;

[0072] The linkage structure two 500 comprises a plurality of groups of equidistantly distributed support strips two 503, a sliding sleeve two 507 embeddedly installed inside the support angle plate 301, a guide rod two 508 slidingly inserted inside the sliding sleeve two 507, a connecting rib two 502 penetrating through the support strip two 503 and connected at the lower end one side with the upper end of the guide rod two 508, a limiting ring two 505 sleeved on the outer wall of the guide rod two 508, a spring two 506 fixedly arranged between the limiting ring two 505 and the support angle plate 301, and a guide plate two 509 located inside the casing 101 and equidistantly longitudinally distributed;

[0073] Both ends of the guide plate one 409 are provided with guide surfaces one 410, the guide surfaces one 410 gradually increase in thickness towards the central section of the guide plate one 409, and the lower end of the guide rod one 404 is rotatably installed with a ball one 406.

[0074] Both ends of the guide plate two 509 are provided with guide surfaces two 510, the guide surfaces two 510 gradually increase in thickness towards the central section of the guide plate two 509, the lower end of the guide rod two 508 is rotatably installed with a ball two 504, and the outer walls of the guide plate one 409 and the guide plate two 509 are provided with symmetrically distributed side plates 511 fixedly connected with the inner wall of the casing 101;

[0075] The guide plate one 409 and the guide plate two 509 are both semicircular, a stroke groove 304 is arranged between the guide plate one 409 and the guide plate two 509, a rubber head one 401 is arranged at the upper end of the support strip one 402, and a rubber head two 501 is arranged at the upper end of the support strip two 503;

[0076] In the embodiment, the bottom of the base material located inside the storage frame 303 is supported by a plurality of groups of equidistantly distributed support strips one 402 and support strips two 503, the support strips one 402 and the support strips two 503 support the bottom of the base material at multiple points, and the support strips one 402 and the support strips two 503 are connected in the same group through the connecting rib one 403 and the connecting rib two 502. Since the plurality of groups of support strips one 402 and support strips two 503 in the same storage frame 303 are spaced apart, even if only the support strips one 402 or the support strips two 503 support the bottom of the base material, multiple-point uniform support is also achieved, thereby providing stable conditions for the single support of the support strips one 402 or the support strips two 503 in the same storage frame 303.

[0077] In the process of the installation ring 208 rotating, driving the base material to rotate along the ring seat 207, the guide surface one 410 extruding the bottom of the ball one 406, the gradually increasing height of the guide surface one 410 extruding the spring one 407, and then the spring one 407 shrinking, and through the gradually increasing thickness of the guide surface one 410, the spring extruding process is stable, the ball one 406 moving on the guide plate, through the connecting rib one 403, the support strip one 402 in the same storage frame 303 is synchronously lifted, and then the stored base material is lifted, the ball one 406 passing through the guide plate one 409, through the gradually decreasing thickness of the guide surface one 410, the spring is reset stably, and then the spring is prevented from shaking violently, and the stability of the base material in the conveying process is ensured.

[0078] In the process of the ball one 406 passing through the guide plate one 409, the ball two 504 enters the corresponding guide plate two 509, and the above principle is consistent, except that the support strip one 402 loses the extrusion condition, the support strip two 503 is extruded and lifted, and then the support point of the base material at the bottom is changed, in the evaporation environment, the base material is prevented from being clamped or supported by a fixed point all the time, and the contact surface for clamping or supporting the base material cannot be uniformly deposited and processed, in the process of the base material rotating, the base material is repeatedly supported at different points, and the evaporation effect of the base material is improved.

[0079] The above specific embodiments are only several preferred embodiments of the present application, and based on the technical solutions of the present application and the related inspiration of the above embodiments, those skilled in the art can make various alternative improvements and combinations on the above specific embodiments.

[0080] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims.

Claims

1. A vacuum evaporation device for evaporation uniformity, comprising an evaporation device (100), a rotating structure (200), a storage structure (300), a linkage structure I (400) and a linkage structure II (500), characterized in that: The evaporation device (100) comprises a shell (101), an opening and closing door (102) on one side of the shell (101); The rotating structure (200) comprises ring seats (207) equidistantly distributed on one side of the opening and closing door (102), and mounting rings (208) inside upper ends of the ring seats (207); The storage structure (300) comprises support angle plates (301) fixedly arranged on upper ends of the mounting rings (208) in a symmetrical manner, support rods (302) on upper ends of the support angle plates (301), and storage frames (303) on one end of the support rods (302). The linkage structure one (400) comprises a plurality of groups of support strips one (402) equidistantly distributed, sliding sleeves one (408) embeddedly arranged in the support angle plates (301), guide rods one (404) slidingly inserted into the sliding sleeves one (408), connecting ribs one (403) penetrating through the support strips one (402) and connected to upper ends of the guide rods one (404) on one side of lower ends, limiting rings one (405) sleeved to outer walls of the guide rods one (404), springs one (407) fixedly arranged between the limiting rings one (405) and the support angle plates (301), and guide plates one (409) equidistantly and longitudinally arranged in the shell (101). The linkage structure two (500) comprises a plurality of groups of support strips two (503) equidistantly distributed, sliding sleeves two (507) embeddedly arranged in the support angle plates (301), guide rods two (508) slidingly inserted into the sliding sleeves two (507), connecting ribs two (502) penetrating through the support strips two (503) and connected to upper ends of the guide rods two (508) on one side of lower ends, limiting rings two (505) sleeved to outer walls of the guide rods two (508), springs two (506) fixedly arranged between the limiting rings two (505) and the support angle plates (301), and guide plates two (509) equidistantly and longitudinally arranged in the shell (101). Both ends of the guide plates one (409) are provided with guide surfaces one (410), the guide surfaces one (410) gradually increase in thickness towards central sections of the guide plates one (409), and lower ends of the guide rods one (404) are rotatably provided with ball bearings one (406); both ends of the guide plates two (509) are provided with guide surfaces two (510), the guide surfaces two (510) gradually increase in thickness towards central sections of the guide plates two (509), lower ends of the guide rods two (508) are rotatably provided with ball bearings two (504), and outer walls of the guide plates one (409) and the guide plates two (509) are provided with side plates (511) fixedly connected to inner walls of the shell (101) in a symmetrical manner.

2. The vacuum evaporator of claim 1, wherein: One end of the shell (101) is provided with an access opening (103), the access opening (103) corresponds to the opening and closing door (102), and an inner wall of the access opening (103) is provided with a stop edge (104).

3. The vacuum evaporator of claim 1, wherein: The lower end inner wall of the shell (101) is internally provided with an opening and closing structure (600), the opening and closing structure (600) comprises a motor two (601) located at the lower end inner wall of the shell (101), the output end of the motor two (601) is provided with a screw rod (602), the lower end inner wall of the shell (101) is provided with a bearing support two (605), and one end of the screw rod (602) is rotatably inserted into the bearing support two (605).

4. The vacuum evaporator of claim 3, wherein: The lower end inner wall of the shell (101) is provided with a guide rail (604), the outer wall of the guide rail (604) is slidably provided with a sliding block (603), the upper end of the sliding block (603) is provided with a nut (606) which is threadedly sleeved with the screw rod (602), and the upper end of the nut (606) is provided with a connecting plate (607) which is fixedly connected with the opening and closing door (102).

5. The vacuum evaporator of claim 1, wherein: One end of the opening and closing door (102) is provided with a motor one (201), the output end of the motor one (201) is provided with a rotating shaft (203), one end of the opening and closing door (102) is provided with a bearing support one (205), and the upper end of the rotating shaft (203) is rotatably installed in the bearing support one (205).

6. The vacuum evaporator of claim 5, wherein: One end of the ring seat (207) is provided with a fixed rod (202) which is symmetrically distributed and fixedly connected with the opening and closing door (102), the outer wall of the rotating shaft (203) is sleeved with a gear (204) which is longitudinally and equidistantly distributed, and the outer wall of the mounting ring (208) is sleeved with a gear ring (206) which is engaged with the gear (204).

7. The vacuum evaporator of claim 1, wherein: The inner walls on both sides and the lower end of the ring seat (207) are both provided with a rolling groove (209) in the shape of a ring, and the mounting ring (208) is rotatably installed with a steel ball (210) which is arranged in an annular array and slidably installed in the rolling groove (209) at both ends and the lower end.

8. The vacuum evaporator of claim 1, wherein: The guide plate one (409) and the guide plate two (509) are both semicircular, the guide plate one (409) and the guide plate two (509) are provided with a stroke groove (304) therebetween, the upper end of the support strip one (402) is provided with a rubber head one (401), and the upper end of the support strip two (503) is provided with a rubber head two (501).

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