Cavity heat shielding system and battery process equipment

Abstract

The invention discloses a cavity heat shielding system and battery process equipment, and belongs to the technical field of battery coating equipment. The cavity heat shielding system comprises a main body which comprises a first cavity, a second cavity and an isolation cavity communicated with the first cavity and the second cavity, and an air curtain output assembly which is arranged in the isolation cavity and is configured to output air into the isolation cavity; the air curtain recovery assembly is arranged in the isolation cavity and is configured to absorb air from the interior of the isolation cavity; the air curtain output assembly and the air curtain recovery assembly form an air curtain in the isolation cavity. According to the cavity heat shielding system, the air curtain output assembly and the air curtain recovery assembly are arranged in the isolation cavity between the two cavities, so that the air curtain is formed in the isolation cavity, heat in the isolation cavity can be taken away in the flowing process of the air curtain, compared with simple isolation, the heat transferred between the cavities can be treated more effectively, and the heat shielding efficiency is improved. Effective geothermal isolation between the cavities is achieved, change of existing equipment is small, and application is convenient.

Description

Technical Field

[0001] The present application belongs to the technical field of battery coating equipment, and in particular, relates to a cavity heat shielding system and battery process equipment. Background Art

[0002] In the existing Topcon (Tunnel Oxide Passivated Contact) battery, the aluminum oxide coating will be too thick in some areas during the aluminum oxide process. After relevant process verification and data analysis, the preheating chamber uses infrared lamp heating. In the normal process, the high temperature of some preheating chambers is transmitted to the coating process chamber, resulting in the temperature being higher than other areas of the coating process chamber due to the proximity to the preheating chamber. During the process, the higher the temperature, the more violent the reaction between trimethylaluminum and water, resulting in excessively thick aluminum oxide deposition in some areas. This leads to uneven coating within the board.

[0003] At present, the conventional heat insulation method is to add a gate valve, and close the gate valve to isolate the heat transfer between the two cavities. Or add a thermal barrier between the two cavities (such as patent CN117758235A), which reduces the contact area between the thermal barrier device and the reaction chamber, thereby reducing the heat transfer from the reaction chamber to the thermal barrier device. However, these solutions do not form a good heat insulation system, resulting in heat transfer between two adjacent cavities. This will cause temperature deviations in specific areas of the carrier, thereby affecting the process environment temperature, resulting in deviations between the actual process effect and the theoretical process effect. Summary of the invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a cavity heat shielding system and battery process equipment, which can effectively achieve thermal isolation between cavities by forming an air curtain in the isolation cavity, and has little change to the existing equipment, which is easy to apply.

[0005] In a first aspect, the present application provides a cavity heat shielding system, comprising:

[0006] The main body includes a first cavity, a second cavity and an isolation cavity connecting the first cavity and the second cavity,

[0007] An air curtain output assembly is disposed in the isolation chamber and is configured to output gas into the isolation chamber;

[0008] an air curtain recovery assembly disposed in the isolation chamber and configured to absorb gas from the isolation chamber;

[0009] Among them, the air curtain output component and the air curtain recovery component form an air curtain in the isolation cavity.

[0010] According to the cavity heat shielding system of the present application, an air curtain output assembly and an air curtain recovery assembly are set by utilizing the isolation cavity between two cavities to form an air curtain in the isolation cavity. The heat in the isolation cavity can be taken away during the flow of the air curtain. Compared with simple isolation, the heat transferred between cavities can be more effectively handled, and effective thermal isolation between cavities can be achieved. In addition, the changes to existing equipment are relatively small, which is convenient for application.

[0011] According to one embodiment of the present application, the air curtain output assembly includes an air source and an air curtain generating pipeline connected to the air source, and the air curtain generating pipeline is provided with an air curtain output hole;

[0012] The air curtain recovery assembly includes a vacuum pump group and an air curtain recovery pipeline connected to the vacuum pump group, and the air curtain recovery pipeline is provided with an air curtain recovery hole;

[0013] The air curtain generating pipeline and the air curtain recovery pipeline are arranged relatively to each other and are both located in the isolation cavity.

[0014] According to one embodiment of the present application, the aperture of each air curtain output hole gradually increases in a direction away from the air source;

[0015] And / or, the distance between two adjacent air curtain output holes gradually decreases in the direction away from the air source.

[0016] According to one embodiment of the present application, the isolation cavity extends along a first direction, the air curtain output holes and the air curtain recovery holes are aligned and arranged along a second direction, and the second direction intersects with the first direction.

[0017] According to one embodiment of the present application, the cavity body of the isolation cavity includes an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are connected through a flange interface, the air curtain generating pipeline is arranged at the lower end of the upper cover plate, and the air curtain recovery pipeline is arranged at the upper end of the lower cover plate.

[0018] According to one embodiment of the present application, a proton flowmeter is provided on the pipeline connecting the gas source and the gas curtain generating pipeline.

[0019] According to one embodiment of the present application, a vacuum pipeline butterfly valve is provided on the pipeline connecting the vacuum pump group and the air curtain recovery pipeline.

[0020] According to one embodiment of the present application, the cavity heat shielding system further includes:

[0021] A vacuum gauge is disposed in the isolation chamber;

[0022] The PLC controller is connected to the vacuum gauge and the air curtain recovery component respectively, and is configured to control the air suction volume of the air curtain recovery component according to the detection data of the vacuum gauge.

[0023] According to one embodiment of the present application, the air curtain recovery assembly includes an air curtain recovery pipeline, a vacuum pipeline butterfly valve, and a vacuum pump group connected in sequence;

[0024] The PLC controller is configured to control the opening of the vacuum pipeline butterfly valve and / or the frequency of the vacuum pump group according to the detection data of the vacuum gauge.

[0025] According to one embodiment of the present application, the gas is nitrogen or an inert gas.

[0026] In a second aspect, the present application provides a battery process equipment, including the aforementioned cavity heat shielding system, wherein the first cavity in the cavity heat shielding system is a preheating cavity, and the second cavity is an aluminum oxide coating reaction cavity.

[0027] According to the battery process equipment of the present application, an air curtain is formed between the preheating chamber and the alumina coating reaction chamber. During the flow of the air curtain, the heat transferred from the preheating chamber to the alumina coating reaction chamber can be taken away. Compared with simple isolation, the heat transferred between the chambers can be more effectively handled, and effective thermal isolation between the chambers can be achieved, thereby ensuring the uniformity of the alumina coating of the battery silicon wafers. In addition, the changes to the existing equipment are relatively small, making it easy to apply.

[0028] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0030] Figure 1 It is one of the structural schematic diagrams of the cavity heat shielding system provided in the embodiment of the present application;

[0031] Figure 2 This is the second structural schematic diagram of the cavity heat shielding system provided in the embodiment of the present application;

[0032] Figure 3 It is a control system diagram of the cavity heat shielding system provided in an embodiment of the present application.

[0033] Reference numerals:

[0034] The first chamber 11, the second chamber 12, the isolation chamber 13, the upper cover plate 131, the lower cover plate 132, the air curtain 14, the air curtain output assembly 20, the air source 21, the air curtain generating pipeline 22, the air curtain output hole 23, the air curtain recovery assembly 30, the vacuum pump group 31, the air curtain recovery pipeline 32, the air curtain recovery hole 33, the proton flowmeter 40, the vacuum pipeline butterfly valve 50, the vacuum gauge 60, and the PLC controller 70. DETAILED DESCRIPTION

[0035] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0036] The following description relates to elements or components that are "connected" or "coupled" together. As used herein, "connection" may refer to an element / component being mechanically coupled to (or directly connected to) another element / component, and is not necessarily direct. Similarly, "coupling" may refer to an element / component being directly or indirectly coupled to (or directly or indirectly connected to) another element / component, and is not necessarily mechanical. However, it should be understood that although in one embodiment, two elements are described below as "connected", similar elements may be "coupled" in alternative embodiments, and vice versa. Therefore, although the schematic diagram shown here describes an exemplary arrangement of elements, additional intermediate elements, devices, parts or components may still exist in a practical embodiment.

[0037] Reference Figure 1 , Figure 1 The structure of a cavity heat shielding system is shown. An embodiment of the present application provides a cavity heat shielding system. In this embodiment, the cavity heat shielding system includes a main body, an air curtain output assembly 20 and an air curtain recovery assembly 30, the main body includes a first cavity 11, a second cavity 12 and an isolation cavity 13 connecting the first cavity 11 and the second cavity 12, the air curtain output assembly 20 is arranged in the isolation cavity 13, and is configured to output gas into the isolation cavity 13; the air curtain recovery assembly 30 is arranged in the isolation cavity 13, and is configured to absorb gas from the isolation cavity 13; wherein the air curtain output assembly 20 and the air curtain recovery assembly 30 form an air curtain 14 in the isolation cavity 13.

[0038] It is understandable that in the alumina process of Topcon cells, the cell silicon wafers need to be transferred between the reaction chambers. The isolation chamber 13 in this embodiment can be formed in the transfer channel between the first chamber 11 and the second chamber 12, so when setting the air curtain output assembly 20 and the air curtain recovery assembly 30, it is not necessary to move the main equipment and the corresponding automation equipment for the already debugged equipment.

[0039] It should be noted that valves may be provided at the connection between the isolation chamber 13 and the first chamber 11 and the second chamber 12. The valves on both sides of the isolation chamber 13 are closed when no battery silicon wafers are transported, which can also achieve a certain heat insulation effect while achieving spatial isolation.

[0040] In this embodiment, the gas is ejected from the air curtain output assembly 20, then absorbs heat in the isolation chamber 13, and then enters the air curtain recovery assembly 30, so that the gas flowing in the isolation chamber 13 forms an air curtain and takes away the heat in the isolation chamber 13, thereby achieving isolation. The flow rate of the air curtain can be achieved by adjusting the outlet speed of the air curtain output assembly 20 and / or the air intake speed of the air curtain recovery assembly 30.

[0041] For example, when the outlet speed of the air curtain output component 20 and the air intake speed of the air curtain recovery component 30 are substantially the same, the amount of gas contained in the air curtain in the isolation chamber 13 remains substantially unchanged. At this time, the thermal insulation efficiency of the air curtain remains unchanged. The higher the outlet speed of the air curtain output component 20 and the air intake speed of the air curtain recovery component 30, the faster the gas flow rate, and the improved thermal insulation efficiency of the air curtain. When the outlet speed of the air curtain output component 20 increases, or the air intake speed of the air curtain recovery component 30 decreases, the amount of gas contained in the air curtain in the isolation chamber 13 increases; when the outlet speed of the air curtain output component 20 decreases, or the air intake speed of the air curtain recovery component 30 increases, the amount of gas contained in the air curtain in the isolation chamber 13 decreases.

[0042] In some embodiments, the gas is nitrogen or an inert gas. Using nitrogen or an inert gas can prevent reactants generated by the gas reaction in the isolation cavity 13 from contaminating the first cavity 11, the second cavity 12 or the battery silicon wafer.

[0043] According to the cavity heat shielding system of the present application, an air curtain output component 20 and an air curtain recovery component 30 are set by utilizing the isolation cavity 13 between the two cavities to form an air curtain in the isolation cavity 13. The heat in the isolation cavity 13 can be taken away during the flow of the air curtain. Compared with simple isolation, the heat transferred between the cavities can be more effectively handled, and effective thermal isolation between the cavities can be achieved. Moreover, the changes to existing equipment are relatively small, which is convenient for application.

[0044] Reference Figure 2 , Figure 2 A cavity heat shielding system is shown. In this embodiment, the air curtain output assembly 20 includes an air source 21 and an air curtain generating pipeline 22 connected to the air source 21, and the air curtain generating pipeline 22 is provided with an air curtain output hole 23; the air curtain recovery assembly 30 includes a vacuum pump group 31 and an air curtain recovery pipeline 32 connected to the vacuum pump group 31, and the air curtain recovery pipeline 32 is provided with an air curtain recovery hole 33; the air curtain generating pipeline 22 and the air curtain recovery pipeline 32 are arranged opposite to each other and are both located in the isolation cavity 13.

[0045] As an example, the gas source 21 and the vacuum pump group 31 can be arranged outside the isolation chamber 13, and the gas source 21 and the gas curtain generating pipeline 22 and the vacuum pump group 31 and the gas curtain recovery pipeline 32 can be connected by a gas delivery pipeline. The gas in the gas source 21 is transmitted to the gas curtain generating pipeline 22 along the gas delivery pipeline and ejected through the gas curtain output hole 23. The gas in the isolation chamber 13 enters the gas curtain recovery pipeline 32 from the gas curtain recovery hole 33, and then is transmitted to the vacuum pump group 31 along the gas delivery pipeline.

[0046] As an example, the air curtain output hole 23 may be circular or polygonal, etc. The number of the air curtain output holes 23 may be multiple, and the multiple air curtain output holes 23 may be arranged along the extension direction of the air curtain generating pipeline 22, or arranged in multiple rows and columns on the air curtain generating pipeline 22. The number of the air curtain recovery holes 33 may also be multiple, and the multiple air curtain recovery holes 33 may be arranged along the extension direction of the air curtain recovery pipeline 32, or arranged in multiple rows and columns on the air curtain recovery pipeline 32.

[0047] In another example, the air curtain output hole 23 and the air curtain recovery hole 33 may be in the shape of a long strip. The strip-shaped air curtain output hole 23 extends along the extension direction of the air curtain generating pipeline 22. The strip-shaped air curtain output hole 23 may be one or more, and a plurality of strip-shaped air curtain output holes 23 are arranged along the circumference of the air curtain generating pipeline 22 and are parallel to each other. The strip-shaped air curtain recovery hole 33 extends along the extension direction of the air curtain recovery pipeline 32. The strip-shaped air curtain recovery hole 33 may be one or more, and a plurality of strip-shaped air curtain recovery holes 33 are arranged along the circumference of the air curtain recovery pipeline 32 and are parallel to each other.

[0048] In another example, the air curtain output hole 23 and the air curtain recovery hole 33 may be in different shapes. For example, the air curtain output hole 23 may be circular, and the air curtain recovery hole 33 may be in a strip shape.

[0049] In some embodiments, the shapes of the gas curtain generating pipeline 22 and the gas curtain recovery pipeline 32 can fit the cavity wall of the isolation cavity 13 , so that the gas can be more fully filled in the isolation cavity 13 .

[0050] As an example, the cavity body of the isolation cavity 13 includes an upper cover plate 131 and a lower cover plate 132, the upper cover plate 131 and the lower cover plate 132 are connected by a flange interface, the air curtain generating pipeline 22 is arranged at the lower end of the upper cover plate 131, and the air curtain recovery pipeline 32 is arranged at the upper end of the lower cover plate 132.

[0051] The lower end surface of the upper cover plate 131 and the upper end surface of the lower cover plate 132 can be horizontal planes, and the air curtain generating pipeline 22 and the air curtain recovery pipeline 32 can be straight pipes. In the extension direction perpendicular to the isolation chamber 13, the length of the air curtain generating pipeline 22 and the air curtain recovery pipeline 32 can be equal to or slightly less than the width of the upper cover plate 131 and the lower cover plate 132. The arrangement length of the air curtain output hole 23 and the air curtain recovery hole 33 in the direction of the corresponding pipeline length is as long as possible. For example, the arrangement length is greater than 85% or 90% of the pipeline length. Among them, the extension direction of the isolation chamber 13 refers to the connection direction between the first chamber 11 and the second chamber 12.

[0052] In other embodiments, the lower end surface of the upper cover plate 131 and the upper end surface of the lower cover plate 132 can be arc surfaces, and the air curtain generating pipeline 22 and the air curtain recovery pipeline 32 can be curved pipes in an arc shape so as to fit the cavity wall of the isolation cavity 13.

[0053] In some embodiments, the aperture of each air curtain output hole 23 gradually increases in the direction away from the air source 21; and / or the distance between two adjacent air curtain output holes 23 gradually decreases in the direction away from the air source 21.

[0054] It is understandable that the larger the aperture of the air curtain output hole 23, the greater the gas output, and the smaller the spacing between two adjacent air curtain output holes 23, the greater the gas output at the corresponding position. Since the gas flow rate in the air curtain output hole 23 decreases in the direction away from the gas source 21, the gas curtain output hole 23 with a gradually increasing aperture is set in the direction away from the gas source 21, and / or the spacing between two adjacent air curtain output holes 23 is set to gradually decrease, so as to achieve compensation for the decrease in gas flow rate, thereby ensuring that the gas ejection amount at each position is uniform in the direction away from the gas source 21.

[0055] In some embodiments, the compensation scheme of gradually increasing aperture and the compensation scheme of gradually decreasing spacing can be used alone or in combination.

[0056] In some embodiments, the isolation cavity 13 extends along a first direction, the air curtain output holes 23 and the air curtain recovery holes 33 are aligned and arranged along a second direction, and the second direction intersects with the first direction.

[0057] In this embodiment, the isolation cavity 13 extends between the first cavity 11 and the second cavity 12, that is, the first direction refers to the communication direction between the first cavity 11 and the second cavity 12. The alignment direction of the air curtain output hole 23 and the air curtain recovery hole 33 is parallel to the plane formed by the air curtain, and the alignment direction is located in the plane. The plane formed by the air curtain intersects with the communication direction between the first cavity 11 and the second cavity 12.

[0058] It is understandable that the heat between the first cavity 11 and the second cavity 12 is transferred along the first direction, and the plane formed by the air curtain intersects with the first direction, so that the air curtain can absorb more heat, thereby improving the thermal isolation effect. For example, the plane formed by the air curtain can be perpendicular to the first direction.

[0059] In some embodiments, a proton flowmeter 40 is provided on the pipeline connecting the gas source 21 and the gas curtain generating pipeline 22 .

[0060] A proton flow meter is an instrument that uses a proton conductive membrane (PCM) to measure gas flow. It usually consists of a PCM thin film sensor that is placed in a measuring volume. The gas flowing through the sensor causes a redox reaction, which generates a potential difference. This potential difference can be used to measure the flow and pressure of the gas. By using a proton flow meter 40, the flow of the gas curtain can be accurately monitored, thereby monitoring the thermal isolation effect for easy adjustment.

[0061] In some embodiments, a vacuum pipeline butterfly valve 50 is provided on the pipeline connecting the vacuum pump group 31 and the air curtain recovery pipeline 32 .

[0062] The vacuum pipeline butterfly valve 50 mainly includes a valve body, a butterfly plate, a valve stem and a seal. The valve is opened and closed mainly by rotating the butterfly plate fixed on the rotating shaft, and the rotation angle of the butterfly plate can also be used to adjust the flow. In this embodiment, the vacuum pump group 31 and the vacuum pipeline butterfly valve 50 are used to jointly adjust the air curtain flow, which is more flexible.

[0063] In some embodiments, the isolation chamber 13 may further be provided with a vacuum gauge 60 .

[0064] The vacuum gauge 60 measures the rarefaction degree of gas (ie, vacuum degree) or pressure in the vacuum container using one or more pressure sensors and converts it into a readable electrical signal.

[0065] It should be noted that the air pressure in the isolation chamber 13 is easily affected by temperature. When the gas content remains unchanged, the more heat is transferred between the first chamber 11 and the second chamber 12, the higher the temperature in the isolation chamber 13, which in turn leads to a higher air pressure in the isolation chamber 13. Therefore, the use of a vacuum gauge 60 to detect the air pressure in the isolation chamber 13 can reflect the heat transferred between the first chamber 11 and the second chamber 12, and thus the air curtain flow rate can be adaptively adjusted.

[0066] Reference Figure 3 , Figure 3A control part of a cavity heat shielding system is shown. In some embodiments, the cavity heat shielding system further includes a PLC controller 70 , which is connected to the vacuum gauge 60 and the air curtain recovery assembly 30 , respectively, and is configured to control the air suction volume of the air curtain recovery assembly 30 according to the detection data of the vacuum gauge 60 .

[0067] The PLC controller 70 determines the temperature in the isolation chamber 13 based on the signal fed back by the vacuum gauge 60. When the temperature in the isolation chamber 13 is high, the air intake of the air curtain recovery component 30 can be controlled to increase, thereby increasing the heat absorption effect of the air curtain on the isolation chamber 13 and ensuring the heat insulation effect. Alternatively, when the temperature in the isolation chamber 13 is low, the air intake of the air curtain recovery component 30 can be controlled to decrease, thereby reducing the heat absorption effect of the air curtain on the isolation chamber 13 and reducing the energy consumed by the component operation.

[0068] In some embodiments, the air curtain recovery assembly 30 includes an air curtain recovery pipeline 32, a vacuum pipeline butterfly valve 50 and a vacuum pump group 31 connected in sequence, and the PLC controller 70 is configured to control the opening of the vacuum pipeline butterfly valve 50 and / or the frequency of the vacuum pump group 31 according to the detection data of the vacuum gauge 60.

[0069] In this embodiment, when the PLC controller 70 needs to increase the air intake of the air curtain recovery assembly 30, the opening of the vacuum pipeline butterfly valve 50 can be increased and / or the frequency of the vacuum pump group 31 can be increased. When the air intake of the air curtain recovery assembly 30 needs to be reduced, the opening of the vacuum pipeline butterfly valve 50 can be reduced and / or the frequency of the vacuum pump group 31 can be reduced. By coordinating the control of the opening of the vacuum pipeline butterfly valve 50 and / or the frequency of the vacuum pump group 31, the air intake of the air curtain recovery assembly 30 can be adjusted more flexibly and accurately to ensure the heat insulation consumption of the air curtain in the isolation chamber 13 and reduce energy consumption.

[0070] An embodiment of the present application further provides a battery process equipment, which includes the aforementioned cavity heat shielding system, wherein the first cavity 11 in the cavity heat shielding system is a preheating cavity, and the second cavity 12 is an aluminum oxide coating reaction cavity.

[0071] In this embodiment, the battery process equipment is an aluminum oxide coating equipment, and an infrared lamp can be provided in the first chamber 11 to achieve preheating. A spray structure can be provided in the second chamber 12 to spray trimethylaluminum and water onto the battery silicon wafer, and react to form aluminum oxide on the battery silicon wafer. A connecting channel is provided between the first chamber 11 and the second chamber 12, and the connecting channel forms the aforementioned isolation chamber 13, and an air curtain output component 20 and an air curtain recovery component 30 are provided in the isolation chamber 13. The specific structure and principle of the cavity heat shielding system can be referred to above, and this embodiment will not be repeated here.

[0072] According to the battery process equipment of the present application, an air curtain is formed between the preheating chamber and the alumina coating reaction chamber. During the flow of the air curtain, the heat transferred from the preheating chamber to the alumina coating reaction chamber can be taken away. Compared with simple isolation, the heat transferred between the chambers can be more effectively handled, and effective thermal isolation between the chambers can be achieved, thereby ensuring the uniformity of the alumina coating of the battery silicon wafers. In addition, the changes to the existing equipment are relatively small, making it easy to apply.

[0073] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0074] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0075] In the description of the present application, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.

[0076] In the description of the present application, “above”, “over” and “above” a first feature to a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0077] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0078] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A cavity heat shielding system, characterized in that: include: A main body, comprising a first cavity, a second cavity and an isolation cavity connecting the first cavity and the second cavity, An air curtain output assembly is disposed in the isolation chamber and is configured to output gas into the isolation chamber; an air curtain recovery assembly disposed in the isolation chamber and configured to absorb gas from the isolation chamber; Wherein, the air curtain output assembly and the air curtain recovery assembly form an air curtain in the isolation cavity.

2. The cavity heat shielding system according to claim 1, characterized in that: The air curtain output assembly includes an air source and an air curtain generating pipeline connected to the air source, and the air curtain generating pipeline is provided with an air curtain output hole; The air curtain recovery assembly comprises a vacuum pump group and an air curtain recovery pipeline connected to the vacuum pump group, and the air curtain recovery pipeline is provided with an air curtain recovery hole; The air curtain generating pipeline and the air curtain recovering pipeline are arranged relative to each other and are both located in the isolation cavity.

3. The cavity heat shielding system according to claim 2, characterized in that: The aperture of each of the air curtain output holes gradually increases in the direction away from the air source; And / or, the distance between two adjacent air curtain output holes gradually decreases in the direction away from the air source.

4. The cavity heat shielding system according to claim 3, characterized in that: The isolation cavity extends along a first direction, and the air curtain output holes and the air curtain recovery holes are aligned and arranged along a second direction, and the second direction intersects with the first direction.

5. The cavity heat shielding system according to claim 2, characterized in that: The cavity body of the isolation cavity includes an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are connected through a flange interface, the air curtain generating pipeline is arranged at the lower end of the upper cover plate, and the air curtain recovery pipeline is arranged at the upper end of the lower cover plate.

6. The cavity heat shielding system according to claim 2, characterized in that: A proton flowmeter is provided on the pipeline connecting the gas source and the gas curtain generating pipeline.

7. The cavity heat shielding system according to claim 2, characterized in that: A vacuum pipeline butterfly valve is provided on the pipeline connecting the vacuum pump group and the air curtain recovery pipeline.

8. The cavity heat shielding system according to any one of claims 1 to 7, characterized in that: The cavity heat shielding system also includes: A vacuum gauge is disposed in the isolation chamber; The PLC controller is connected to the vacuum gauge and the air curtain recovery assembly respectively, and is configured to control the air intake volume of the air curtain recovery assembly according to the detection data of the vacuum gauge.

9. The cavity heat shielding system according to claim 8, characterized in that: The air curtain recovery assembly comprises an air curtain recovery pipeline, a vacuum pipeline butterfly valve and a vacuum pump group connected in sequence; The PLC controller is configured to control the opening of the vacuum pipeline butterfly valve and / or the frequency of the vacuum pump group according to the detection data of the vacuum gauge.

10. The cavity heat shielding system according to any one of claims 1 to 6, characterized in that: The gas is nitrogen or an inert gas.

11. A battery process equipment, characterized in that: It comprises a cavity heat shielding system according to any one of claims 1 to 10, wherein the first cavity in the cavity heat shielding system is a preheating cavity, and the second cavity is an aluminum oxide coating reaction cavity.

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