Device and method for detecting particles generated in service process of optical-mechanical system

Abstract

The invention discloses a device and a method for detecting particles generated in the service process of an optical-mechanical system. Relates to the technical field of optical-mechanical system cleaning performance detection, and comprises a sampling bearing part which is arranged under an optical-mechanical system and is used for bearing particles settled in the service process of the optical-mechanical system; and the detection part is used for detecting the number and the size of the particles on the sampling bearing part. According to the detection method of the device for on-line detection of particles generated in the service process of the optical-mechanical system, settled particles generated in the service process of the optical-mechanical system can be detected, and the cleaning performance of the optical-mechanical system can be evaluated conveniently.

Description

Technical Field

[0001] The present invention relates to the technical field of cleanliness performance detection of optical-mechanical systems, and in particular to a device and method for detecting particles generated during the operation of an optical-mechanical system. Background Art

[0002] During the operation of the optical-mechanical system, various tiny particles may be generated inside the system due to factors such as material wear, lubricant volatilization, and environmental dust intrusion. These particles may not only affect the transmittance and reflectivity of optical components and reduce imaging quality, but may also cause wear on precision mechanical parts and shorten the life of the equipment.

[0003] At present, various research units have implemented corresponding clean control methods according to their own characteristics, such as dynamic clean replacement, air knife / laminar flow, laser cleaning, plasma cleaning and other online control measures. However, there is still a lack of systematic dynamic clean measurement methods for optomechanical systems in service, resulting in the inability to accurately evaluate the clean performance of optomechanical systems, and thus the inability to clean the optomechanical systems in a timely manner.

[0004] Therefore, designing a device and method for online detection of particles generated during the operation of an optomechanical system has become an urgent problem to be solved in the cleanliness performance evaluation of the optomechanical system. Summary of the invention

[0005] The purpose of the present invention is to provide a device and method for detecting particles generated during the operation of an optomechanical system, so as to solve the problems existing in the above-mentioned prior art, and to detect the settled particles generated during the operation of the optomechanical system, so as to facilitate the evaluation of the cleanliness performance of the optomechanical system.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a device for detecting particles generated during the operation of an optical-mechanical system, comprising:

[0008] A sampling carrier, which is arranged directly below the optical-mechanical system and is used to carry particles precipitated during the operation of the optical-mechanical system;

[0009] The detection part is used to detect the number and size of particles on the sampling carrier.

[0010] Optionally, the sampling carrying part includes a plurality of sampling glass plates connected end to end and arranged obliquely, and the inclination directions of two adjacent sampling glass plates are opposite.

[0011] Optionally, the detection unit includes a microscopic imaging system, which is capable of microscopically imaging a sampling glass plate carrying particles and transmitting the imaging data to a control computer.

[0012] Optionally, the detection unit further includes a light source system, the light source system includes a side lighting light source, and the side lighting light source is arranged at a connection position between two adjacent sampling glass plates at the lowest ends.

[0013] Optionally, the detection unit further includes a beam trap, and the beam trap includes a black glass substrate arranged on one side of the sampling carrier, and a plurality of triangular black glass substrates are arranged inside the black glass substrate.

[0014] Optionally, the vertex angle of the triangular black glass substrate is 45°.

[0015] Optionally, it also includes a support plate, the upper surface of which is coated with a support plate protective coating, the support plate protective coating is an anodized black coating, and the reflectivity in the 390nm to 760nm band is less than 2%; a plurality of V-shaped sampling glass plate slots are fixed in sequence on the support plate, two inclined sampling glass plates are symmetrically arranged in the sampling glass plate slot, and the side lighting light source is provided at the center of the bottom of the sampling glass plate slot.

[0016] Optionally, the side lighting source includes an LED lamp bead capable of emitting 532nm green light.

[0017] Optionally, the microscopic imaging system includes a horizontally arranged one-dimensional motion platform, on which a support rod is slidably provided, an imaging module is provided on the top of the support rod, and the imaging module is connected to the control computer; the one-dimensional motion platform can control the imaging module to image the cross-section of the sampling glass plate, and after moving the same depth of field distance, multiple imaging methods can be used to realize the detection of particles on the surface of all sampling glass plates.

[0018] The present invention also provides a method for detecting particles generated during the operation of an optical-mechanical system, comprising the following steps:

[0019] Step 1: Place the sampling glass plate in the sampling glass plate slot, place the entire detection device directly below the optical-mechanical system in operation, and the sampling glass plate collects particles deposited by the optical-mechanical system;

[0020] Step 2, by horizontally moving the support rod, adjusting the microscopic imaging system to the vicinity of the beam trap position, imaging the nearby sampling glass plate, so that the imaging of the sampling glass plate is the clearest;

[0021] Step 3, controlling the microscopic imaging system by controlling the computer to take pictures to obtain image information of the sample glass plate;

[0022] Step 4, move the support rod to the imaging position of the next sampling glass plate, repeat step 3, and obtain a series of images;

[0023] Step 5: Use the control computer to synthesize the image using image processing methods, eliminate duplicate points, and count the number and size information of the settled particles.

[0024] Compared with the prior art, the present invention has achieved the following technical effects:

[0025] The present invention uses a sampling glass plate to collect settled particles under the optical machine system, and uses a one-dimensional motion platform combined with a high-resolution CCD to image the particles settled on the surface of the sampling glass plate, and transmits the formed image to the control computer. The software can analyze the number of settled particles, particle size distribution, particle concentration and other detection results. Overlapping particles are eliminated by image processing to obtain characteristic information of deposited particles. This detection method is non-destructive and non-contact detection, has no secondary pollution residue, and has high detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of the overall structure of the particle detection device used in the operation process of the optical-mechanical system of the present invention;

[0028] Figure 2 Schematic diagram of the light beam trap in the present invention;

[0029] Figure 3 It is a schematic diagram of a side lighting source in the present invention;

[0030] Figure 4 Schematic diagram of the microscopic imaging system of the present invention.

[0031] In the figure: 1-sampling glass plate, 2-side lighting source, 3-microscope imaging system, 4-beam trap, 5-control computer, 6-support plate, 7-support plate protective coating, 8-black glass substrate, 9-triangular black glass substrate, 10-LED lamp beads, 11-sampling glass plate slot, 12-one-dimensional motion platform, 13-support rod, 14-imaging module. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] The purpose of the present invention is to provide a device and method for online detection of particles generated during the operation of an optomechanical system, so as to solve the problems existing in the above-mentioned prior art. It is capable of detecting settled particles generated during the operation of an optomechanical system, and is convenient for evaluating the cleanliness performance of the optomechanical system.

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the present invention provides a device for detecting particles generated during the operation of an optical-mechanical system, comprising a sampling carrier and a detection unit. The sampling carrier is arranged directly below the optical-mechanical system and is used to carry particles that settle during the operation of the optical-mechanical system; the detection unit is used to detect the number and size of particles on the sampling carrier. By detecting the number and size of settled particles when the optical-mechanical system is in operation, an online evaluation of the dynamic cleanliness of the optical-mechanical system is achieved, which facilitates the timely cleaning of the optical-mechanical system.

[0036] In a preferred embodiment, in order to achieve accurate collection of settled particles in the optical machine system, the sampling support portion of this embodiment includes a plurality of sampling glass plates 1 connected end to end and arranged at an angle, and the inclination directions of two adjacent sampling glass plates 1 are opposite, so that settled particles can be collected in a larger range and more comprehensively; the detection portion of this embodiment includes a microscopic imaging system, which can microscopically image the sampling glass plate 1 carrying particles and transmit the imaging data to the control computer 5.

[0037] In order to make the imaging clearer, a light source system is designed in one embodiment. The light source system includes a side lighting source 2, which is arranged at the lowest connection position of two adjacent sampling glass plates 1; the side lighting source 2 of this embodiment includes an LED lamp bead 10 that can emit green light in the 532nm band. Correspondingly, in order to filter out stray light, a beam trap 4 is designed synchronously. The beam trap 4 includes a black glass substrate 8 vertically arranged on one side of the sampling carrier, and a plurality of triangular black glass substrates 9 are arranged on one side of the black glass substrate 8; the vertex angle of the triangular black glass substrate 9 is 45°.

[0038] In a preferred embodiment, in order to install the above-mentioned structure, a support plate 6 is designed, and the upper surface of the support plate 6 is coated with a support plate protective coating 7, and the support plate protective coating 7 adopts an anodized black coating, and its reflectivity in the 390nm~760nm band is less than 2%; a plurality of V-shaped sampling glass plate slots 11 are fixed in sequence on the support plate 6, and two inclined sampling glass plates 1 are symmetrically arranged in the sampling glass plate slot 11, and a side lighting light source 2 is provided at the bottom center position of the sampling glass plate slot 11.

[0039] The microscopic imaging system of this embodiment includes a horizontally arranged one-dimensional motion platform 12. The structure of the one-dimensional motion platform 12 is not limited. A structure in which a slide rail and a slider cooperate can be used. A support rod 13 is slidably provided on the slider to achieve horizontal sliding of the support rod 13. A lead screw nut structure can also be used to achieve horizontal movement of the support rod 13. An imaging module 14 is provided on the top of the support rod 13. The imaging module 14 is connected to the control computer 5. The imaging module 14 of this embodiment adopts CCD, i.e., a charge coupled device, which is a semiconductor device widely used in the field of digital imaging and is used to convert optical signals into electrical signals. CCD is one of the core components in a variety of devices such as digital cameras, astronomical telescopes, medical imaging equipment, and security cameras. Working principle of CCD CCD consists of a series of photosensitive units (pixels), each pixel containing a photodiode and a capacitor for storing charge. When light is irradiated on the CCD, the photodiode in each pixel generates a corresponding charge according to the received light intensity. These charges are then transferred to adjacent pixels, and finally output electrical signals through a readout circuit. After the electrical signal is amplified and digitized, a digital image can be generated.

[0040] In one embodiment, the present invention further provides a method for detecting particles generated during the operation of an optical-mechanical system, comprising the following steps:

[0041] Step 1: Place the sampling glass plate 1 in the sampling glass plate slot 11, and place the entire detection device directly below the optical-mechanical system in operation, so that the sampling glass plate 1 collects particles deposited by the optical-mechanical system;

[0042] Step 2: By horizontally moving the support rod 13, the microscopic imaging system is adjusted to the position close to the beam trap 4. The working principle of the beam trap 4 is mainly to absorb or scatter the light beam so that the unnecessary light beam energy is dissipated and will not continue to propagate to other sensitive areas. The beam trap 4 removes the excess light beam, and then images the nearby sampling glass plate. After the beam trap 4 removes the excess light beam, the imaging of the sampling glass plate 1 is the clearest.

[0043] Step 3, controlling the microscopic imaging system by controlling the computer 5 to take pictures to obtain image information of the sampling glass plate 1;

[0044] Step 4, move the support rod 13 to the imaging position of the next sampling glass plate 1, adjust the distance to the depth of field of the imaging system, repeat step 3, and obtain a series of images;

[0045] Step 5, using the control computer 5, using image processing methods to synthesize images, remove duplicate points, and count the number and size information of the settled particles.

[0046] The detection method of the present invention is a non-destructive test, which has no contact with the optical-mechanical system and no secondary pollution. It can test the cleanliness characteristics under the service condition. It can be used to detect the cleanliness characteristics of different types of optical-mechanical systems under the service condition. This detection method has no requirements for the detection object, and the error of the detection result is very small, which is about 1.1 to 1.2 times the actual size of the particles.

[0047] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A device for detecting particles generated during the operation of an optical-mechanical system, characterized in that: include: A sampling carrier, which is arranged directly below the optical-mechanical system and is used to carry particles precipitated during the operation of the optical-mechanical system; The detection part is used to detect the number and size of particles on the sampling carrier.

2. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 1, characterized in that: The sampling bearing part comprises a plurality of sampling glass plates connected end to end and arranged obliquely, and the inclination directions of two adjacent sampling glass plates are opposite.

3. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 2, characterized in that: The detection part includes a microscopic imaging system, which can microscopically image the sampling glass plate carrying particles and transmit the imaging data to a control computer.

4. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 3, characterized in that: The detection part also includes a light source system, and the light source system includes a side lighting light source, and the side lighting light source is arranged at the connection position of two adjacent sampling glass plates at the lowest ends.

5. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 3, characterized in that: The detection part further includes a beam trap, and the beam trap includes a black glass substrate vertically arranged on one side of the sampling bearing part, and a plurality of triangular black glass substrates are arranged inside the black glass substrate.

6. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 5, characterized in that: The vertex angle of the triangular black glass substrate is 45°.

7. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 4, characterized in that: It also includes a support plate, the upper surface of which is coated with a support plate protective coating, the support plate protective coating is an anodized black coating, and the reflectivity in the 390nm to 760nm band is less than 2%; a plurality of V-shaped sampling glass plate slots are fixed in sequence on the support plate, two inclined sampling glass plates are symmetrically arranged in the sampling glass plate slot, and the side lighting light source is provided at the center of the bottom of the sampling glass plate slot.

8. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 4, characterized in that: The side lighting source includes an LED lamp bead capable of emitting 532nm green light.

9. The device for detecting particles generated during the operation of an optical-mechanical system according to claim 3, characterized in that: The microscopic imaging system comprises a horizontally arranged one-dimensional motion platform, on which a support rod is slidably arranged, and an imaging module is arranged on the top of the support rod, and the imaging module is connected to the control computer.

10. A method for detecting particles generated during the operation of an optical-mechanical system, characterized in that: The steps include: Step 1: Place the sampling glass plate in the sampling glass plate slot, place the entire detection device directly below the optical-mechanical system in operation, and the sampling glass plate collects particles deposited by the optical-mechanical system; Step 2, by horizontally moving the support rod, adjust the microscopic imaging system to the beam trap position so that the image of the sampling glass plate is clearest; Step 3, controlling the microscopic imaging system by controlling the computer to take pictures to obtain image information of the sample glass plate; Step 4, move the support rod to the imaging position of the next sampling glass plate, repeat step 3, and obtain a series of images; Step 5: Use the control computer to synthesize the image using image processing methods, eliminate duplicate points, and count the number and size information of the settled particles.

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