Water-cooled linear motor system

Abstract

The invention provides a linear motor system, which is provided with a linear motor with high speed, high precision and stability, can improve cooling efficiency and simplify a structure of a manufacturing process, and improves overall power, stability and productivity. In order to solve the technical problem, the linear motor according to one embodiment of the present invention, as a linear motor system in which a coil is formed on at least one of a rotor and a stator, comprises: a coil molding part in which the coil is formed and which is injection-molded from a composite resin material; and an isolation cover part which forms a structure that covers at least one side surface of the coil molding part, in which a flow path groove is formed in the side surface of the coil molding part, and a cooling flow path (F) that provides a flow path for a cooling fluid is formed by the adhesion of the coil molding part and the isolation cover part.

Description

Technical Field

[0001] The present invention relates to a linear motor system, and more particularly, to a linear motor system, which is composed of a linear motor with high speed, high precision and stability, forming a structure that can improve cooling efficiency and simplify manufacturing process, thereby improving overall power, stability and productivity. Background Art

[0002] Linear motors are widely used in the electronics, automotive, aerospace and other industries. With the continuous improvement of precision and accuracy, they are more commonly used in semiconductor equipment and precision processing equipment, and the requirements for additional technical improvements are also increasing.

[0003] For example, in the semiconductor manufacturing process, the semiconductor circuit chips produced by the wafer must go through the process of dividing the multiple semiconductor circuit chip structures made by the previous process one by one through the cutting process of the later process, and the finished semiconductor is generated through the remaining later processes. At this time, the production ratio of the final finished semiconductor circuit chips in a wafer can be expressed by the wafer defect rate.

[0004] The wafer defect rate has an impact on the production cost of semiconductor manufacturing. Therefore, it is necessary to reduce this type of wafer defect rate in the manufacturing process. In addition, there is a possibility that the wafer will be discarded due to poor cut quality during the cutting process. Therefore, the drive unit related to cutting in the cutting equipment needs to be accurate, safe and quick.

[0005] Here, in order to meet the accuracy, safety and speed required of the equipment performing linear motion, the driving unit uses a linear motor that uses the polarity of a magnet to form linear motion. This is because the linear motor's own motion characteristics are driven in a form that minimizes physical friction. Therefore, it has the advantages of less risk of vibration and very fast linear motion speed.

[0006] With the emergence of new technologies related to semiconductor manufacturing, the thickness of wafers used to manufacture semiconductors is required to be thinner, and the cutting method of the cutting process has also developed from cutting using a physical blade to laser cutting and plasma cutting methods that can form a fine area of ​​the cutting gap and improve the cutting precision.

[0007] With the development of the above-mentioned cutting equipment, the precision and straightness, safety, speed and other standards required of the linear motor used in the driving part of the cutting equipment are gradually improved, and thus various different linear motors related thereto are developed.

[0008] However, if the conventional linear motor is an iron core type, an attractive force is generated between the metallic iron core located at the center of the coil and the external permanent magnet, thereby causing a cogging effect that causes the linear motor to move unsmoothly. Furthermore, compared to an iron core type motor, an ironless linear motor that can solve the cogging effect has a problem in that the overall structural rigidity of the linear motor is fragile.

[0009] Furthermore, the coreless linear motor has a problem of reduced power at the same electric power compared to the iron core motor. Therefore, higher electric power is required at the same speed, which leads to increased heating of the coil part and problems related thereto. Therefore, the cooling performance of the coil part is particularly important.

[0010] That is, if the cooling performance of the coil part is improved, the coil can be cooled well, and even if high electric power is supplied to the coil, the heat generated is not high, thereby increasing the speed of the linear motor. Therefore, the manufacturing company of the coreless linear motor is researching and developing a solution that can improve the cooling performance of the coreless linear motor.

[0011] However, in order to improve the cooling performance, the conventional coreless linear motors have expanded the flow path design, which has increased the size of the linear motor, or the design of the flow path structure itself has become complicated, which has prolonged the processing time or molding time of the flow path part. In addition, the productivity has been reduced due to the complicated structure, and there has been a problem of high overall production costs.

[0012] Therefore, in the coil cooling structure of the coreless linear motor, it is necessary to develop a linear motor system that can improve the cooling efficiency, reduce the size of the linear motor, reduce the manufacturing time for forming the flow path, and save the overall manufacturing cost. Summary of the invention

[0013] Technical problem to be solved by the invention

[0014] Therefore, in order to improve the above-mentioned conventional problems, an object of the present invention is to provide a linear motor system which can improve the cooling efficiency and the maximum speed of the linear motor when configuring a cooling structure of the linear motor.

[0015] Furthermore, an object of the present invention is to provide a linear motor system in which an internal cooling water flow path can be formed by a simple method when constructing a cooling structure of the linear motor, thereby saving time and cost.

[0016] Furthermore, an object of the present invention is to provide a linear motor system in which, when configuring a cooling structure of the linear motor, the size of the linear motor is reduced and can be applied to a small device.

[0017] Another object of the present invention is to provide a linear motor system in which, when configuring a cooling structure of the linear motor, a flow path for cooling water to flow inside the linear motor is simply formed.

[0018] Furthermore, an object of the present invention is to provide a linear motor system, which can simply construct a method for manufacturing the linear motor when constructing a cooling structure of the linear motor, thereby reducing the time consumed by the entire manufacturing process and reducing its manufacturing cost.

[0019] Technical solutions to the problem

[0020] In order to solve the above technical problems, a linear motor system according to one embodiment of the present invention is provided, as a linear motor system having a coil formed in at least one of a mover or a stator, the mover or the stator comprising: a coil forming portion, which has the coil formed therein and is injection molded with a composite resin material; and an isolation cover portion, which forms a structure covering at least one side surface of the coil forming portion, and a flow path groove is formed on the side surface of the coil forming portion, and a cooling flow path providing a flow path for a cooling fluid is formed by means of the inner surface of the isolation cover portion and the flow path groove of the coil forming portion.

[0021] Furthermore, according to the linear motor system of an embodiment of the present invention, the isolation cover is formed of a non-metallic material or a non-magnetic metal material.

[0022] Furthermore, according to the linear motor system of one embodiment of the present invention, the width of the flow path grooves formed in the upper and lower parts of the side surface of the coil molding portion is formed to be larger than the width of the flow path groove formed in the middle.

[0023] Furthermore, in a linear motor system according to one embodiment of the present invention, a flow path groove formed on the side surface of the coil forming portion is formed corresponding to the winding shape of the coil so that the cooling fluid flows on the side surface of the coil forming portion along the winding shape of the coil formed inside the coil forming portion.

[0024] Furthermore, according to the linear motor system of one embodiment of the present invention, the insulating cover portion further forms a second cooling flow path outside the cooling flow path formed by the flow path groove of the coil molding portion and the inner surface of the insulating cover portion.

[0025] Furthermore, according to the linear motor system of an embodiment of the present invention, the size, shape, and flow rate of the cooling flow path are limited so that the cooling fluid used for cooling the linear motor flows at high speed and in a laminar flow inside the linear motor.

[0026] Moreover, in the linear motor system according to an embodiment of the present invention, the shielding cover portion includes: a plate-shaped shielding cover member formed of a plate-like material and adhesively bonded to the side surface of the coil forming portion; and a pocket-shaped shielding cover member formed in a 'U' or '匚' cross-sectional shape and adhesively bonded to the structure directly or indirectly wrapping the outer side of the coil forming portion including the side surface of the coil forming portion.

[0027] Moreover, in the linear motor system according to an embodiment of the present invention, a plurality of flow path grooves are formed on the side surface of the coil forming portion, and are formed in a form connecting one side and the other side of the coil forming portion along the movement direction of the linear motor. Flow inlet / outlet manifold modules are respectively formed on one side and the other side of the coil forming portion, and a partition supply port corresponding to the plurality of flow path grooves is formed in one of the flow inlet / outlet manifold modules, and an aggregation discharge port corresponding to the plurality of flow path grooves is formed in the remaining one.

[0028] Advantages of the Invention

[0029] As described in the above configuration and operation, the present invention has the following advantages: providing a linear motor system, the cooling structure of the linear motor can improve the cooling efficiency, thereby increasing the maximum speed of the linear motor.

[0030] Moreover, the present invention has the following advantages: providing a linear motor system, the cooling structure of the linear motor forms an internal cooling water flow path in a simple manner, so that time and costs can be saved.

[0031] Moreover, the present invention has the following advantages: providing a linear motor system, the size of the linear motor is miniaturized in the cooling structure of the linear motor, so that it can be applied to small devices.

[0032] Moreover, the present invention has the following advantages: providing a linear motor system, in the cooling structure of the linear motor, a flow path for the internal cooling water to flow is simply formed.

[0033] Moreover, the present invention has the following advantages: providing a linear motor system, in the cooling structure of the linear motor, the manufacturing method of the linear motor is simply configured, so that the time required for the overall manufacturing process can be reduced, and the manufacturing cost can also be reduced.

[0034] It should be understood that the advantages of the present invention are not limited to the above advantages, but include all advantages that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1It is a perspective view exemplarily showing the overall structure of a mover of a linear motor system according to an embodiment of the present invention.

[0036] Figure 2 The present invention is a front view and a side view showing the surface structure of a composite material mold of a coil forming portion in the overall structure of a mover of a linear motor system according to an embodiment of the present invention.

[0037] Figure 3 It is a front view and a side view of the overall structure of a mover of a linear motor system according to an embodiment of the present invention.

[0038] Figure 4 This is a front view showing in perspective the overall structure of a mover of a linear motor system according to an embodiment of the present invention for understanding the relationship between a flow path and a coil.

[0039] Figure 5 This is an explanatory diagram showing a front view of a modified example of the flow channel structure of the coil molding portion in the overall structure of the mover of the linear motor system according to one embodiment of the present invention.

[0040] Figure 6 This is an explanatory diagram showing, in a front view, another modified embodiment of the flow channel structure of the coil molding portion in the overall structure of the mover of the linear motor system according to one embodiment of the present invention.

[0041] Figure 7 This is an explanatory diagram showing in a side view still another modified embodiment of a flow path structure modified by using an inlet and outlet manifold module in the overall structure of a mover of a linear motor system according to an embodiment of the present invention.

[0042] Figure 8 This is an explanatory diagram showing in a side view still another modified embodiment including a flow path structure added in the thickness direction of the isolation cover portion in the overall structure of the mover of the linear motor system according to the one embodiment of the present invention. DETAILED DESCRIPTION

[0043] The present invention will be described below with reference to the accompanying drawings. However, the present invention can be implemented in various forms, and therefore the present invention is not limited to the embodiments described here.

[0044] Throughout the specification, when one part is "connected (coupled, in contact with, combined)" to another part, this includes not only "direct connection" but also "indirect connection" with other parts in between. And, when a part "includes" a certain component, unless otherwise specified, it means that other components may also be included without excluding other components.

[0045] The terms used in this specification are only used to describe specific embodiments and are not used to limit the present invention. Unless the context clearly stipulates otherwise, singular expressions include plural expressions. It should be understood that in this specification, terms such as "including" or "having" are intended to indicate the presence of features, numbers, steps, operations, components, parts or combinations thereof described in the specification, and do not exclude the presence or addition of one or more other features, characteristics, numbers, steps, operations, components, parts or combinations thereof.

[0046] In this specification, when describing the structure of the mover of the linear motor system or the structure of the coil forming part of its detailed components, the terms "upper part", "lower part", "horizontal side", "front end", "rear end" and the like shall be used in accordance with the relevant provisions unless otherwise provided in the text. Figure 1 Explain the postures represented in the figure.

[0047] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention.

[0048] First, the various drawings are described. Figure 1 This is a perspective view showing the overall structure of a mover of a linear motor system according to an embodiment of the present invention, and is a drawing shown in a perspective view to help understand the description of the structure of a water-cooled linear motor. Figure 2 In order to show the overall structure of the mover of the linear motor system of one embodiment of the present invention, the front view and side view of the composite resin injection molding surface structure are shown in order to illustrate the mold structure that can easily form a flow path. It is also a figure used to illustrate the structure that can evenly apply the adhesive to ensure the bonding strength of the plate-type isolation cover component that forms the flow path.

[0049] Figure 3 These are a front view and a side view of the overall structure of a mover of a linear motor system according to one embodiment of the present invention. In order to illustrate the internal coil configuration structure and the flow path structure for cooling, the internal coil configuration is represented by a front view, and the internal cross-section is represented by a side view. In addition, the accompanying drawings are enlarged to facilitate understanding. Figure 4 In order to understand the relationship between the flow path grooves and the coils in the overall structure of the mover of the linear motor system of one embodiment of the present invention, a front view is shown through a perspective drawing of the coils, and it is a drawing used to illustrate the flow of cooling water and the direct cooling location of the coils.

[0050] Figure 5The present invention is an explanatory diagram showing a front view of a modified embodiment of a flow path structure in the overall structure of a mover of a linear motor system according to an embodiment of the present invention, and is a diagram for explaining a flow path structure in which the width of a flow path groove is deformed in order to improve the cooling efficiency of a coil. Figure 6 In the overall structure of the mover of the linear motor system of one embodiment of the present invention, an explanatory diagram of other modified embodiments in which the path structure of the flow path groove is changed is shown in a front view, and it is also a figure used to illustrate the flow path structure in which the flow path groove is changed to follow the winding shape of the coil in order to improve the cooling efficiency of the coil.

[0051] Figure 7 In the overall structure of the mover of the linear motor system of one embodiment of the present invention, a side view is shown to illustrate another modified embodiment with a flow path structure modified by an inlet and outlet manifold module, and a figure showing a flow path structure in which multiple flow paths are formed by flowing in staggered directions to ensure uniform cooling performance of the mover as a whole. Figure 8 In the overall structure of the mover of the linear motor system of one embodiment of the present invention, an explanatory diagram of another modified embodiment having a flow path structure added in the thickness direction of the isolation cover portion is shown in a side view, which shows a structure in which multiple flow paths are formed in the thickness direction in order to improve the cooling efficiency of the coil, and is a brief illustration in which the adhesive for bonding the execution structures is omitted.

[0052] A linear motor system according to an embodiment of the present invention, Figures 1 to 8 As shown, it is a linear motor system that optimizes the flow path structure for water-cooling to improve cooling efficiency and simplifies its manufacturing process, thereby improving the power, productivity and economy of the motor.

[0053] Generally speaking, a linear motor is composed of a stator equipped with a permanent magnet and a mover having an electromagnet that uses the stator as a running track, and the above-mentioned permanent magnets are arranged in a pair so that the polarities of different polarities are formed facing the center, and the polarities of the permanent magnets arranged along the length direction can also be formed in a form of crossing each other. In addition, the linear motor can be formed in a form in which the permanent magnet is formed in the mover and the electromagnet is formed in the stator, or the electromagnet is formed on both sides of the stator and the mover.

[0054] The present invention relates to a cooling structure for a mover or stator having an electromagnet coil in a linear motor system. The following example illustrates a case where the electromagnet coil is formed on the mover, but the present invention is also applicable to a case where the electromagnet coil is formed on the stator.

[0055] A linear motor system according to an embodiment of the present invention includes, for example, a mover disposed between a pair of stators and having a coil formed therein. The mover 100 of the linear motor system has an electromagnet coil formed therein, and forms a non-contact magnetic suspension state by repulsion between permanent magnets constituting the stators according to the energization state of the coil 11, and moves in this state by the attraction of adjacent coils.

[0056] Here, in order to move the mover 100 of the linear motor system, current needs to be continuously supplied to the coil 11, and in order to quickly change the polarity of the supplied current, the magnetic polarity of the coil changes faster, and the speed of the mover 100 of the linear motor system also increases.

[0057] However, when the coil is energized faster to increase the speed of the mover 100 of the linear motor system, the temperature of the coil increases due to the current resistance, resulting in a serious heat generation, and thus a problem of weakening the magnetic force generated by the energization of the coil.

[0058] Therefore, in order to prevent the temperature of the coil 11 from rising, a cooling flow path F through which a cooling fluid flows around the coil 11 inside the mover 100 is required to form a cooling structure capable of cooling the coil 11 and its surroundings.

[0059] A mover 100 of a linear motor system according to an embodiment of the present invention comprises: a coil forming portion 10 in a form in which the periphery of the coil 11 is formed with a composite resin material to wrap the coil 11, and a flow path groove 12 for constituting a cooling flow path F is formed on the surface of the coil forming portion 10, and an isolation cover portion 20 is formed by structural bonding to cover the outer surface of the coil forming portion 10, so that the inner surface of the isolation cover portion 20 and the flow path groove 12 portion together form a cooling flow path F.

[0060] As described above, the peripheral portion of the coil 11 is injection molded to integrally form the coil forming portion 10, and the cooling flow path F is formed in the form of an isolation cover portion 20 attached to the outer surface of the coil forming portion 10. When the flow path is formed in the peripheral portion of the coil, the probability of forming a defective flow path during manufacturing can be reduced, which facilitates maintenance. In addition, the coil can be operated in a state of being arranged on one side during the injection molding operation, thereby having the effect of reducing the defective rate of the wiring of each coil.

[0061] In a linear motor system according to an embodiment of the present invention, Figure 2 As shown, the starting part 100 includes: a coil forming part 10 in which the coil 11 is embedded in order to form a flow path structure for cooling the coil 11, and a flow path groove 12 is formed on the outer surface of at least one of the two horizontal side surfaces of the coil forming part 10.

[0062] The manufacturing process of the coil forming part 10 formed with the flow path groove 12 is described step by step by way of example, wherein the coil 11 is arranged in a state where a cable receiving an electric energy source is located at the upper end, and an injection molding operation is performed to seal the overall shape of the outside of the coil 11 using a composite resin, thereby forming the coil forming part 10.

[0063] Here, the frame of the coil forming part 10 is formed with a concavo-convex structure that can simultaneously mold the channel grooves 12 in the form of grooves for forming the cooling channel F on the outer surface of the coil forming part 10 during the injection molding operation.

[0064] Furthermore, the coil forming portion 10 is constructed in a form in which injection molding operations are performed separately on each coil, but preferably, more than one coil 11 is formed inside, and is formed in a form in which a plurality of coils 11 are formed integrally, thereby being prepared for use as a coil assembly of a predetermined scale that can constitute the mover 100 of the linear motor system.

[0065] The composite resin material used for coil injection molding in the coil forming part 10 may be, for example, a thermosetting plastic material such as epoxy resin, but is not limited thereto.

[0066] In a linear motor system according to an embodiment of the present invention, Figure 2 As shown, the starting portion 100 is additionally combined with a front end side inflow and outflow manifold module 30 and a rear end side inflow and outflow manifold module 40 at the front end and the rear end in the length direction of the coil forming portion 10 which forms an internal coil assembly, and the front end side inflow and outflow manifold module 30 and the rear end side inflow and outflow manifold module 40 form a flow path in which cooling water can flow, and the flow path is fluidically connected to the base module 50 from the upper end of the inflow and outflow manifold module, and at least one of the two side surfaces of the inflow and outflow manifold module is fluidically connected to the flow path groove 12 formed on the side surface of the corresponding coil forming portion 10, so as to form a separation supply port 31 and / or a polymerization discharge port 41.

[0067] Here, preferably, a module groove 35 is formed on the side surface of the inlet and outlet manifold module in a structure connected to the flow path groove 12 of the coil forming part 10, and a partition supply port 31 and / or an aggregate discharge port 41 are formed in the module groove 35.

[0068] The inflow / outflow manifold module 30 and the inflow / outflow manifold module 40 prepared as described above can be respectively combined with the front end and rear end sides of the coil forming part 10 to form an assembly, and the combination can be selectively applied by connecting parts or by bonding such as welding or adhesive bonding.

[0069] The starting unit 100 of the linear motor system according to an embodiment of the present invention is as follows: Figure 3 As shown, it includes an isolation cover part 20 bonded with a structure covering at least one side of the coil forming part 10. The isolation cover part 20 can be selected from at least one of a member formed by a flat plate form, a member formed by a pocket structure, etc., and is bonded by welding or adhesive bonding to form a structure covering at least one side of the coil forming part 10.

[0070] In order to eliminate the influence on the magnetic field for the electromagnet formed by the coil, the material of the isolation cover 20 is selected from non-metallic materials or non-magnetic metal materials, for example, preferably, it is selected from fiber reinforced plastic materials, carbon fiber reinforced plastic materials, etc. And, if it is a linear motor system for a vacuum environment, etc., preferably, the material of the isolation cover 20 is selected from non-magnetic metal materials.

[0071] like Figure 3 As shown, in a linear motor system according to an embodiment of the present invention, the isolation cover part 20 that is combined with the coil forming part 10 to form the cooling flow path F may include a plate-type isolation cover member 21 formed in a flat plate form. That is, the plate-type isolation cover member 21 is formed in a form bonded to the side wall of the coil forming part 10 through an adhesive layer p, thereby forming an inner surface of the plate-type isolation cover member 21 that covers the flow path groove 12 of the coil forming part 10, and the cooling flow path F is formed through the flow path groove 12 of the coil forming part 10.

[0072] That is, the outer wall of the assembly is formed in the form of grooves and ridges, and the plate-type isolation cover component 21 is formed in the form of a bonding surface 13 formed in the form of a ridge and attached to the outer wall of the assembly, so that the flow path 12 formed in the form of a groove is formed as the cooling flow path F.

[0073] As described above, no additional processing procedure is required when forming the cooling flow path F. The cooling flow path F can be formed through only one injection molding operation and the bonding process of the plate-type isolation cover component 21. Therefore, the cost and time of forming the cooling flow path F can be reduced, and it has the effect of preventing adverse structures caused by collapse during the formation operation of the cooling flow path F.

[0074] Furthermore, a partitioning protrusion 14 is additionally formed on the bonding surface portion 13 of the coil forming portion 10 in order to ensure uniformity of the adhesive layer p of the plate-shaped insulating cover member 21 for forming the cooling flow path F.

[0075] More specifically, during the process of attaching the plate-shaped shield member 21 to the outer wall of the coil forming portion 10, the adhesive layer p applied is coated on the bonding surface portion 13 and bonded to the plate-shaped shield member 21 through the adhesive layer p on it. At this time, in the pressing step for bonding, if the distribution of the uncurred adhesive layer p inside is uneven, the bonding strength of the plate-shaped shield member 21 cannot be maintained, resulting in part of the adhesive flowing into the flow path groove side, and the problem that the internal flow path cannot be correctly formed occurs.

[0076] Therefore, the partition protrusion 14 is formed to have a height that can ensure the minimum amount of the adhesive layer p required for attaching the plate-shaped shield member 21, and is formed at scattered positions on the bonding surface portion 13. More preferably, at the uppermost end, lowermost end, and central portion, etc. of the coil forming portion 10 corresponding to the edge portion and central portion, etc. with a relatively high correlation with the bonding strength in the bonding structure of the plate-shaped shield member 21, it is formed and scattered on the bonding surface portion 13.

[0077] In addition, partition protrusions having the same effect as the partition protrusion 14 are also formed on the periphery of the module groove 35 of the inflow / outflow manifold module 30 and the inflow / outflow manifold module 40, or as a countermeasure with a similar effect to the partition protrusion 14, a module protrusion 36 is formed. The module protrusion 36 can be formed in a protruding band shape on the periphery of the module groove 35. Thus, during the pressing and bonding process of the adhesive to the bonding object after coating the adhesive, in addition to the effect of ensuring a predetermined thickness of the adhesive layer p, it also has the effect of eliminating the problem that the adhesive flows into the inside of the module groove 35 to hinder the formation of the flow path or reducing the cross-section of the flow path.

[0078] As Figure 3 shown, in the linear motor system according to an embodiment of the present invention, the shield portion 20 that is integrally bonded with the coil forming portion 10 to form the cooling flow path F may include a pocket-type shield member 23 having a pocket structure with a "U" or "C" cross-sectional shape, and a structure that directly or indirectly covers the bonding surface portions on both sides of the coil forming portion 10.

[0079] Here, in the structure that directly covers the bonding surface portions on both sides of the coil forming portion 10, during the process of inserting the coil forming portion 10 into the inside of the pocket-type shield member 23, the adhesive used for bonding the pocket-type shield member 23 and the coil forming portion 10 is pushed away, which is slightly disadvantageous for forming a good adhesive layer.

[0080] Furthermore, the structure for indirectly covering the two side bonding surfaces of the coil forming part 10 can be formed in the following manner: for example, after the front end and the rear end of the coil forming part 10 are respectively combined with the inflow and outflow manifold module 30 and the inflow and outflow manifold module 40, the structure is formed by inserting the plate-type isolation cover component 21 into the interior of the pocket structure in an assembled state by bonding the plate-type isolation cover component 21 to the two side walls of the coil forming part 10, and the horizontal side surface of the pocket-type isolation cover component 23 is not directly bonded to the horizontal side surface of the coil forming part 10, but is indirectly bonded to the plate-type isolation cover component 21, and the pocket-type isolation cover component 23 is a structure in which multiple surfaces are connected as a whole, and therefore, the sealing performance for cooling fluid, etc. can be improved.

[0081] Furthermore, in order to form additional cooling performance through the bottom surface of the coil forming part 10, when a flow path groove is also formed on the bottom surface of the coil forming part 10 to form a bottom flow path B, the flow path groove 21 formed on the bottom surface of the coil forming part 10 may be difficult to attach due to the small area of ​​the coil forming part 10 itself. Therefore, first, an assembly is prepared in which the plate-type isolation cover part 21 is attached to the side wall of the coil forming part 10 to form a cooling flow path F on the side wall, and then the assembly is inserted into the inner space of the pocket-type isolation cover part 23, so that the lower end of the pocket-type isolation cover part 23 is connected to the bottom surface of the coil forming part 10, and a bottom flow path B is formed together with the flow path groove formed on the bottom surface.

[0082] The method is to simply insert the assembly into the interior of the U-shaped pocket structure and bond the two corresponding surfaces together to form a bottom flow path. Therefore, it has the effect of forming the bottom flow path B at the bottom of the mover without going through a complicated manufacturing process.

[0083] Here, based on the excellent sealing structure of the pocket-shaped insulating cover member 23, the width of the bottom surface flow path B formed at the lower end of the coil forming portion 10 is formed into a maximum width form, so that the heat exchange efficiency can be maximized.

[0084] And, if Figure 3 As shown in the figure, the upper end of the pocket-type isolation cover component 23 further includes a flange portion extending in a shape bent outward, and the flange portion is used to form a coupling structure for maintaining a strong coupling state when the assembly is inserted into the pocket-type isolation cover component 23 and coupled with the base module 50. As described above, the coupling structure formed by the flange portion of the pocket-type isolation cover component 23 has the effect of ensuring a high sealing performance through a strong coupling force, and also has the effect of being able to be easily separated and coupled for maintenance, etc.

[0085] Furthermore, in order to additionally block the possibility of cooling fluid flowing out due to the open structure at the front and rear ends of the pocket-type isolation cover component 23, additional plate-type isolation cover components are attached to the front and rear ends of the assembly assembled in combination with the pocket-type isolation cover component 23 to further improve the sealing performance, or, as Figure 1 and Figure 3 As shown, the final cover component 60 formed in the form of a cover is respectively covered on the front end and the rear end of the assembly to improve the sealing performance. In addition, the pocket-shaped isolation cover component 23 can also be used to form a pocket structure with only the upper side open, and after the assembly is inserted, the assembly and the pocket-shaped isolation cover component 23 are sealed and combined with a strong bonding force to form a sealing performance.

[0086] Furthermore, a covering type isolation cover component 26 may be additionally formed on the outside of the pocket type isolation cover component 23, and the covering type isolation cover component 26 has the following effects: an effect of protecting the outer surface of the pocket type isolation cover component 23; an internal pressure resistance effect of preventing the inner plate type isolation cover component 21 and / or the pocket type isolation cover component 23 from being damaged or floating due to the internal pressure of the cooling fluid; an effect of improving the sealing performance by wrapping the structure of the assembly from the outside, etc.

[0087] like Figure 1 As shown in the figures, in a linear motor system of an embodiment of the present invention, a coil forming portion 10 having a coil 11 and an isolation cover portion 20 are formed at the lower portion of the mover 100, a base module 50 is formed at the upper portion, and the base module 50 forms a cooling water inlet 51 on one side of the front end or the rear end based on the moving direction of the mover 100 of the linear motor system, and forms a cooling water outlet 52 on the other side.

[0088] The cooling fluid supplied through the cooling water inlet 51 flows in the cooling flow path F to cool the temperature of the coil 11 and is discharged through the cooling water outlet 52. In addition, a circulation structure is formed as needed in which the cooling fluid discharged through the cooling water outlet 52 is supplied again through the cooling water inlet 51 via a predetermined path. Here, preferably, the cooling fluid is supplied again through the cooling water inlet 51 in a state where the temperature is reduced after passing through a predetermined path that can be cooled naturally or another cooler such as a chiller.

[0089] Furthermore, as described above, the positions of the cooling water inlet 51 and the cooling water outlet 52 are determined by the lengthwise configuration of the base module 50, so that when the mover 100 of the linear motor system is assembled together with the stator and mounted on the system, the pipe for supplying the cooling fluid is formed to protrude from the outer area of ​​the stator, thereby improving the phenomenon that the cooling water pipe is caught or interfered with by the stator when the linear motor is driven.

[0090] In addition, a wiring configuration hole 54 for connecting a cable for supplying current to the coil 11 and controlling it is formed at the front end or rear end of the base module 50, so that wiring for external driving current supply and electrical communication functions can be configured through the wiring configuration hole 54, and a sensor connection hole 53 is additionally formed for inserting and installing sensors required for operational assistance of the system, such as temperature sensors and current sensors.

[0091] As described above, when other components of the system or external devices are connected to the mover 100 of the linear motor system through wires, in the structure formed by the base module 50, the relevant pipes and wiring are located on the base module 50 side, thereby having the effect of eliminating conflicts or interferences with the stator during the operation of the linear motor.

[0092] Furthermore, one or more structure connection portions 55 are formed at the upper end and both side ends of the base module 50 so that when a transfer platform or other structures are installed using a linear motor system, the structure connection portion 55 can be used to fix the load on the mover. In addition, the structure connection portion 55 is formed by a conventional bolt connection hole form. In addition, for example, it can also be formed by a hole form having a countersunk hole structure with one side open, thereby providing effects such as concealing the bolt head and facilitating tool operation.

[0093] Furthermore, the upper end of the assembly can be formed into a shape combined with the base module 50, and the wiring of the coil part protruding from the upper end of the coil forming part 10 constituting the assembly is inserted inward through the bottom surface of the base module 50, and is electrically connected to other components of the system or external devices, power supplies, etc. through the wiring configuration hole 54 formed on the front end or rear end side of the base module 50.

[0094] Furthermore, the cooling water inlet 51 and the cooling water outlet 52 formed in the base module 50 are connected with pipes for supplying and discharging cooling fluid for cooling the coil 11, and are fluidically connected to the upper ends of the inlet and outlet manifold modules 30 and 40 through the internal flow path of the base module 50.

[0095] Here, preferably, the connection between the isolation cover part 20 and the base module 50 is both strong and easy to load and unload, and, preferably, the structure for fixing the isolation cover part 20 and the base module 50 firmly and easily to load and unload is formed by utilizing the flange portion of the pocket-type isolation cover part 23 described above.

[0096] Furthermore, the cooling water flowing in through the cooling water inlet 51 of the base module 50 flows from the front end of the base module 50 to the upper end of the inlet and outlet manifold module 30, and the cooling water flowing in from the inlet and outlet manifold module 30 flows downward along the internal flow path of the inlet and outlet manifold module 30, and is supplied to the respective cooling flow paths F through the partition supply port 31 formed on at least one of the two horizontal side surfaces of the inlet and outlet manifold module 30.

[0097] Furthermore, the cooling fluid flowing through the respective cooling flow paths F flows from the rear end into the aggregate outlet 41 of the inlet and outlet manifold module 40, and flows into the base module 50 through the upper end of the inlet and outlet manifold module 40, and then is discharged through the cooling water outlet 52 located at the rear end of the base module 50. The cooling fluid approaches the periphery of the coil 11 using the above-mentioned flow path to perform a cooling function, and the cooling fluid with increased temperature flows in again through the cooling water inlet 51 after being cooled externally, or the cooling fluid with increased temperature is discharged externally and discarded, and then new cooling fluid flows in.

[0098] Furthermore, the structure of the cooling flow path F disposed on the side of the coil forming portion 10 so that the cooling water for cooling the coil 11 flows is described as follows. Figure 4 As shown, a flow channel groove 12 with a uniform flow channel width is formed on the side surface of the coil forming portion 10 where the coil 11 is arranged, thereby enabling the cooling flow channel F to have a uniform flow channel width.

[0099] As described above, the flow path groove 21 is formed with a uniform flow path width, so the partition supply ports 31 flowing in and out of the manifold module 30 are also configured with the same size and at equal intervals, and the supplied cooling water is also supplied in a uniform flow rate form to cool the side wall of the coil forming part 10.

[0100] However, the cooling fluid flowing along the inside of the cooling flow path F in order to cool the heat generated by the coil 11 mainly performs a conductive cooling function by contacting with the inner surface of the cooling flow path F. Therefore, the cooling flow path F where the cooling fluid flows is formed adjacent to the coil 11, or is formed by increasing the contact surface, thereby providing an effect of improving the cooling efficiency.

[0101] like Figure 5As shown, in a linear motor system according to an embodiment of the present invention, as a modified embodiment of the cooling flow path, the width of the upper flow path groove 12a and the lower flow path groove 12c are formed wider than the width of the middle flow path groove 12b.

[0102] That is, for example, in the coil configuration structure inside the coil forming part 10 in which the O-shaped coil 11 is continuously configured, in order to increase the contact area with the cooling flow path F, the configuration path of the flow path groove 12 located on the side wall of the coil forming part 10 is as continuous as possible with or close to the configuration structure of the winding shape of the coil 11 on the side wall, and in order to expand the heat transfer surface, the width of the upper flow path groove 12a and the lower flow path groove 12c are widened, thereby having the effect of improving the cooling efficiency.

[0103] As described above, when the flow path widths of the upper flow path grooves 12a and the lower flow path grooves 12c are widened, the flow rate of cooling water flowing inside the upper flow path 23a and the lower flow path 23c is also increased, thereby having the effect of improving the cooling efficiency.

[0104] Furthermore, in order to form a flow structure that conforms to the above-mentioned flow path groove structure, preferably, the separation supply port 31 of the inlet and outlet manifold module 30 and the aggregation exhaust port 41 of the inlet and outlet manifold module 40 are formed by increasing the diameter and / or number of the separation supply port 31 and the aggregation exhaust port 41 at the positions corresponding to the upper flow path groove 12a and the lower flow path groove 12c.

[0105] The linear motor system of one embodiment of the present invention is another modified embodiment in which the distance between the heat generating portion of the coil 11 and the cooling flow path F for cooling is reduced to improve the cooling efficiency, such as Figure 6 As shown, a cooling flow path can be formed along the winding shape of the coil 11.

[0106] In more detail, when manufacturing the coil forming portion 10, in order to ensure the structural strength of the coil forming portion 10, the coil 11 is formed in a coreless type, and epoxy resin or the like is added at the position where the core was previously formed to support the center of the coil. In the above structure, the heat transfer path from the coil through the center portion of the coil or the heat transfer path through the peripheral portion of the coil has limited effect on improving the cooling performance. Therefore, the cooling flow path for cooling the coil 11 appropriately follows the winding shape of the coil 11 so that it can be effectively cooled.

[0107] Here, preferably, in order to guide the smooth flow of the cooling fluid, in the structure formed by continuously arranging the coils 11, a partition is formed by connecting the center parts of the coils 11 filled with epoxy resin or the like, thereby forming a smooth dispersed flow structure of the cooling fluid.

[0108] That is, in the structure in which the coil 11 is continuously arranged inside the coil forming portion 10, a semicircular flow path groove is continuously formed following half of the winding shape of the coil, thereby dividing the winding shape of the entire coil 11 into two parts, the upper end and the lower end, and forming a cooling flow path F that ensures a shorter heat transfer path from the coil 11.

[0109] Furthermore, when forming the above-mentioned cooling flow path F, in order to allow the internal cooling fluid to flow smoothly, it is preferred that the structure of the flow path groove forms a curved shape with respect to the curved portion of the internal flow path.

[0110] Corresponding to the flow path groove structure of the modified embodiment, the separated supply port 31 of the inlet and outlet manifold module 30 and the aggregated discharge port 41 of the inlet and outlet manifold module 40 are formed on the side with two separated supply and discharge structures, so that the cooling fluid can be effectively supplied to the cooling flow path F.

[0111] Furthermore, the linear motor system of one embodiment of the present invention is another modified embodiment for improving the cooling efficiency of the heat generated by the coil 11, such as Figure 7 As shown, an internal flow path for supplying cooling fluid and an internal flow path for discharging cooling fluid are formed simultaneously inside the inflow and outflow manifold module 30 formed at the front end of the coil forming part 10 and the inflow and outflow manifold module 40 formed at the rear end, so that each flow path groove 12 of the coil forming part 10 forms a different flow direction of the cooling fluid.

[0112] That is, the inflow and outflow manifold module 30 formed at the front end of the coil forming part 10 simultaneously forms a separated supply port 31 and a gathered discharge port 32, and the inflow and outflow manifold module 40 formed at the rear end simultaneously forms a gathered discharge port 41 and a separated supply port 42, so that the cooling fluid supplied through the separated supply port 31 of the inflow and outflow manifold module 30 passes through the corresponding flow path groove 12 and is discharged through the gathered discharge port 41 of the inflow and outflow manifold module 40, and the cooling fluid supplied through the separated supply port 42 of the inflow and outflow manifold module 40 passes through the corresponding flow path groove 12 and is discharged through the gathered discharge port 32 of the inflow and outflow manifold module 30, thereby forming different flow directions of the cooling fluid in each flow path groove 12.

[0113] As mentioned above, when comparing the cooling effects in the cases where the flow directions of the various flow grooves 12 are formed differently and the flow directions of the cooling fluid in the flow grooves 12 are formed consistently, when the cooling fluid flowing through the flow grooves 12 of the coil forming part 10 is supplied from one side of the front end or the rear end of the coil forming part 10 and discharged to the other side, the cooling effect on the supply side of the cooling fluid is too high and the cooling effect on the discharge side is too low, thereby resulting in an imbalance in the cooling performance and a decrease in the electromagnetic field control performance of the mover. Therefore, the flow directions of the cooling fluid are set differently according to the flow grooves 12 of each of the coil forming parts 10, thereby ensuring uniform cooling performance and, further, ensuring good electromagnetic field control performance of the mover.

[0114] Furthermore, internal flow paths for supplying cooling fluid and internal flow paths for discharging cooling fluid are simultaneously formed inside the front and rear end inlet and outlet manifold modules 30, 40. Therefore, when it is necessary to form different flow directions of the cooling fluid according to each flow path groove 12, the fluid connection between the base module 50 and the front and rear end inlet and outlet manifold modules 30, 40 must also be formed with a deformed structure.

[0115] That is, for example, an internal flow path connected to the cooling water inlet 51 for supplying cooling fluid branches off to form an additional structure extending across the base module 50 to the rear end position and connected to the inlet and outlet manifold module 40 at the rear end position, so that a portion of the cooling fluid flowing into the internal flow path of the base module 50 from the cooling water inlet 51 formed at the front end of the base module 50 is supplied to the inlet and outlet manifold module 30 at the front end position, and the remaining portion of the inflowing cooling fluid flows across the base module 50 and is supplied to the inlet and outlet manifold module 40 at the rear end position. Similarly, an internal flow path for discharging the cooling fluid connected to the cooling water outlet 52 forms an additional structure extending across the base module 50 to the front end position, so that the cooling fluid discharged from the inlet and outlet manifold module 30 at the front end position and then flowing into the internal flow path of the base module 50 is discharged from the inlet and outlet manifold module 40 extending across the base module 50 to the rear end position and then merges with the cooling fluid flowing into the internal flow path of the base module 50 and is discharged from the cooling water outlet 52.

[0116] Alternatively, instead of an additional internal flow path that crosses the base module 50, a structure in which a cooling water inlet 51 and a cooling water outlet 52 are respectively formed at the front end and the rear end of the base module 50 may be adopted. In this case, the cooling fluid flowing into the cooling water inlet 51 at the front end passes through the cooling flow path F formed by the coil forming part 10 and the isolation cover part 20 and is discharged to the cooling water outlet 52 at the rear end, and the cooling fluid flowing into the cooling water inlet 51 at the rear end passes through the cooling flow path F formed by the coil forming part 10 and the isolation cover part 20 and is discharged to the cooling water outlet 52 at the front end.

[0117] Furthermore, the linear motor system of one embodiment of the present invention is another modified embodiment that can improve the cooling efficiency of the heat generated by the coil 11, such as Figure 8 As shown, a second cooling flow path S forming a flow path for a cooling fluid is additionally formed outside the cooling flow path F that surrounds the coil forming portion 10 in the thickness direction.

[0118] The cooling flow path F formed on the surface of the coil forming part 10 in order to cool the coil 11 is a cooling structure by means of conduction. The cooling efficiency of the adjacent locations is high, but the cooling efficiency of the non-adjacent locations is reduced. Therefore, there is a problem of temperature rise in the locations where the cooling flow path F is not formed.

[0119] In this regard, a plate-type insulating cover member 21 is attached to the outer surface of the coil forming portion 10 to form the cooling flow path F once, and another plate-type insulating cover member 21 is attached thereon to form a second cooling flow path S, thereby achieving an effect of further improving the cooling efficiency.

[0120] Here, the second cooling flow path S only has to cool the heat that has not been cooled in the cooling flow path F, and therefore, there is no need to increase the flow rate, and the flow pressure of the cooling fluid flowing inside is not high, and therefore, the width of the second cooling flow path S is formed wider than the width of the first cooling flow path F, so that the contact structure of the second cooling flow path S formed by the thickness direction of the isolation cover portion can also be formed in a simple form.

[0121] Furthermore, when forming the second cooling flow path S, in addition to the method of additionally combining another plate-type isolation cover component 21 on the plate-type isolation cover component 21 attached to the outer surface of the coil forming part 10 to form the second cooling flow path S, it is also possible to first combine the plate-type isolation cover components 21 with each other to form the second cooling flow path S, and then attach the combination of the plate-type isolation cover components 21 to the outer surface of the coil forming part 10 to form the cooling flow path F.

[0122] Furthermore, the linear motor of the present invention can be used as a starter in ultra-precision equipment such as semiconductor manufacturing equipment, and therefore safety must be ensured.

[0123] Therefore, the flow of the cooling fluid used for cooling of the present invention forms a high-speed flow in order to improve the cooling efficiency, and suppresses turbulent flow and controls the Reynolds number of its flow, so that the flow of the internal cooling fluid is formed only by a laminar flow state.

[0124] That is, in fluid mechanics, the Reynolds number can be used to predict whether the flow is laminar or turbulent. When the Reynolds number Re is expressed numerically using fluid properties such as density and viscosity and flow environment parameters such as flow velocity and flow path diameter, it can be written as Re = ρuL / μ (here, ρ is density, u is flow velocity, L is the diameter of the flow path, and μ is the viscosity coefficient), and a Reynolds number (Re) below 2000 can be regarded as a laminar state.

[0125] As mentioned above, when the cooling fluid used for internal cooling flows at a high speed and forms turbulent flow, the internal cooling flow path may vibrate due to the turbulence. Therefore, the driving part of the device that requires precise driving may have a problem of reduced precision. Therefore, the cross-sectional size and flow velocity of the internal flow path of the mover of the linear motor system are organically selected to ensure the cooling performance and make the Reynolds number below 2000.

[0126] In addition, it should be understood that the above description of the present invention is for illustrative purposes, and those of ordinary skill in the art can easily modify it into other specific forms without changing the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood to be illustrative and not restrictive in all aspects. For example, each component described as a single type can be implemented in a distributed or split manner, and similarly, the components described as distributed or split can also be implemented in a combined form within the scope of understanding of those of ordinary skill in the art. In addition, a method step can be performed multiple times alone or in combination with at least one other step.

[0127] The scope of the present invention is defined by the claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents are intended to fall within the scope of the present invention.

Claims

1. A linear motor system, which is a linear motor system in which at least one of a mover and a stator is formed with a coil, and is characterized in that, The mover or the stator includes: A coil forming portion (10) which has the coil formed therein and is injection molded with a composite resin material; and An isolation cover portion (20) which is formed to cover at least one side surface of the coil forming portion (10), A flow path groove is formed on the side surface of the coil forming portion (10), and a cooling flow path (F) for providing a flow path of a cooling fluid is formed by the inner surface of the isolation cover portion (20) and the flow path groove of the coil forming portion (10).

2. The linear motor system according to claim 1, characterized in that, The isolation cover portion (20) is formed of a non-metallic material or a non-magnetic metal material.

3. The linear motor system according to claim 1, characterized in that, The widths of the flow path grooves formed in the upper and lower middle portions of the side surface of the coil forming portion (10) are formed to be larger than the width of the flow path groove formed in the middle.

4. The linear motor system according to claim 1, characterized in that, The flow path groove formed on the side surface of the coil forming portion (10) is formed corresponding to the winding shape of the coil (11), so that the cooling fluid flows along the winding shape of the coil (11) formed inside the coil forming portion (10) on the side surface of the coil forming portion (10).

5. The linear motor system according to claim 1, characterized in that, The isolation cover portion (20) further forms a second cooling flow path (S) outside the cooling flow path (F) formed by the flow path groove of the coil forming portion (10) and the inner surface of the isolation cover portion (20).

6. The linear motor system according to any one of claims 1 to 5, characterized in that, In order for the cooling fluid for cooling the linear motor to flow at a high speed and in a laminar flow inside the linear motor, the size, shape, and flow velocity of the cooling flow path are defined.

7. The linear motor system according to claim 1, characterized in that, The isolation cover portion (20) includes at least one of the following configurations: A plate-shaped isolation cover member (21) which is formed of a plate-shaped material and is adhesively bonded to the side surface of the coil forming portion (10); and A pocket-shaped isolation cover member (22) which is formed in a "U" shape or a "匚" shape cross-section and is adhesively bonded to the structure outside the coil forming portion including the side surface of the coil forming portion (10) directly or indirectly.

8. The linear motor system according to claim 1, characterized in that, A plurality of flow path grooves are formed on the side surface of the coil forming portion (10), and are formed in a shape connecting one side and the other side of the coil forming portion (10) along the movement direction of the linear motor. Inflow / outflow manifold modules (30, 40) are respectively formed on the one side and the other side of the coil forming portion (10), and a partition supply port (31) corresponding to the plurality of flow path grooves is formed in one of the inflow / outflow manifold modules (30, 40), and an aggregation discharge port (41) corresponding to the plurality of flow path grooves is formed in the remaining one.

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