Metal light-shielding plate substrate, metal light-shielding plate, camera module, electronic device, and method for manufacturing metal light-shielding plate

Abstract

The three-dimensional surface roughness (Sa) of the surface (10MR) of a metal light-shielding plate substrate (10M) used in the metal light-shielding plate is 0.142 [mu] m or more in a 50-fold field of view. The surface (10MR) has a three-dimensional surface roughness (Sz) of 2.666 [mu] m or more in a 50-fold field of view.

Description

Technical Field

[0001] The invention relates to a metal shading plate substrate, a metal shading plate, a camera component, an electronic device and a method for manufacturing the metal shading plate.

[0002] This application claims the benefit of priority based on Tokugan Application No. 2023-120877 filed in Japan on July 25, 2023, and the contents of which are incorporated herein by reference. Background Art

[0003] In the camera module of electronic devices such as smartphones, a component called a shading plate is used that functions as an aperture for external light. The shading plate has a through hole that penetrates in the thickness direction of the plate and allows only necessary external light to pass through. The shading plate suppresses image defects such as ghosting or glare in the image caused by unnecessary external light (such as scattered light) entering the lens or the imaging element (CCD, CMOS, etc. image sensor).

[0004] Japanese Patent Application Laid-Open No. 2021-113920 discloses a metal light shielding plate (metal light shielding plate) having a desired light shielding performance even when formed thinly. When manufacturing the metal light shielding plate, through holes are formed in the metal light shielding plate substrate (metal foil).

[0005] When forming a through hole in the metal shading plate substrate, resist layers are provided on both sides of the metal shading plate substrate, patterns corresponding to the through holes are formed on each resist layer, and the metal shading plate substrate is etched from both sides using the resist layer with the pattern formed thereon as a mask. Thus, the through hole can be formed in the metal shading plate substrate. Summary of the invention

[0006] Problems to be solved by the invention

[0007] However, if the through hole is formed in the metal shading plate substrate by simply using the resist layer, there is a problem that the edge of the through hole becomes uneven or the size (e.g., diameter) of the through hole varies greatly. In this case, unnecessary external light in the camera module enters the lens or the imaging element, and there is a problem that the shading performance of the shading plate cannot be ensured.

[0008] An object of the present invention is to provide a metal sunshade substrate, a metal sunshade, a camera module, an electronic device, and a method for manufacturing a metal sunshade that can ensure the light shielding performance of the metal sunshade.

[0009] Means for solving problems

[0010] The first embodiment of the present invention is a metal shading plate substrate, which is a substrate for a metal shading plate, wherein the three-dimensional surface roughness Sa of the surface of the substrate is greater than 0.142 μm in a 50x field of view, and the three-dimensional surface roughness Sz of the surface is greater than 2.666 μm in a 50x field of view.

[0011] A second aspect of the present invention is a metal sunshade plate using the metal sunshade plate substrate according to the first aspect.

[0012] A third aspect of the present invention is a camera module using the metal light shielding plate according to the second aspect.

[0013] A fourth aspect of the present invention is an electronic device using the camera module according to the third aspect.

[0014] The fifth embodiment of the present invention is a method for manufacturing a metal shading plate, comprising: preparing a metal shading plate substrate, which has a surface to which a dry film resist is to be pasted, an opening formed by etching using the patterned dry film resist, the three-dimensional surface roughness Sa of the surface is greater than 0.142 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz of the surface is greater than 2.666 μm in a 50-fold field of view; configuring the dry film resist on the surface; in the metal shading plate substrate, forming a through hole in the dry film resist, the through hole is used to form a recessed portion that is recessed along the thickness direction of the metal shading plate substrate and has the opening on the surface; forming the recessed portion in the metal shading plate substrate via the dry film resist; and removing the dry film resist from the metal shading plate substrate on which the recessed portion is formed.

[0015] Effects of the Invention

[0016] According to the present invention, the light shielding performance of the metal light shielding plate can be ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] [ Figure 1 ] is a perspective view schematically showing a metal shading plate substrate involved in one embodiment of the present invention.

[0018] [ Figure 2 ] is a plan view schematically showing a metal shading plate involved in one embodiment of the present invention.

[0019] [ Figure 3 ] is a schematic diagram showing Figure 2 A cross-sectional view of the main parts of the metal sunshade.

[0020] [ Figure 4 ] is a diagram used to illustrate the manufacturing method of the metal shading plate.

[0021] [ Figure 5] is a diagram used to illustrate the manufacturing method of the metal shading plate.

[0022] [ Figure 6 ] is a diagram used to illustrate the manufacturing method of the metal shading plate.

[0023] [ Figure 7 ] is a diagram used to illustrate the manufacturing method of the metal shading plate.

[0024] [ Figure 8 ] is a diagram used to illustrate the manufacturing method of the metal shading plate.

[0025] [ Fig. 9 ] is to show that includes Figure 2 , 3 A diagram of an example of a metal sunshade camera assembly.

[0026] [ Fig.10 ] is an image showing an example in which the edges of the holes of the metal shading plate have no unevenness.

[0027] [ Fig.11 ] is an image showing an example in which the edges of the holes of the metal shading plate are uneven.

[0028] Explanation of symbols

[0029] 10Metal sunshade

[0030] 10F Second Side

[0031] 10R First side (surface)

[0032] 10H hole

[0033] 10H1 first recess (recess)

[0034] 10M metal sunshade substrate

[0035] 10MF Side 2

[0036] 10MR first side (surface)

[0037] 20 Camera Components

[0038] 21 lenses

[0039] 22 Camera Components

[0040] H1R first opening (opening)

[0041] RF Second Dry Film Resist

[0042] RR First Dry Film Resist

[0043] RRh first through hole (through hole) DETAILED DESCRIPTION

[0044] Reference Figures 1 to 11 , an embodiment of a metal shading plate substrate, a metal shading plate, a camera component, an electronic device, and a method for manufacturing a metal shading plate is described. Hereinafter, a metal shading plate substrate, a metal shading plate, a method for manufacturing a metal shading plate, a camera component, and an embodiment are described in sequence.

[0045] [Metal sunshade substrate]

[0046] Figure 1 The metal shade plate substrate 10M shown is used for the metal shade plate 10 described later (refer to Figure 2 , Figure 3 ). The metal shading plate substrate 10M is a metal layer extending along one surface. The metal shading plate substrate 10M is composed of a rolled material having a thickness of not less than 10 μm and not more than 50 μm. The metal shading plate substrate 10M has a first surface 10MR (surface) and a second surface 10MF. The first surface 10MR and the second surface 10MF are surfaces facing opposite sides to each other in the thickness direction of the metal shading plate substrate 10M.

[0047] The first surface 10MR is an example of a surface configured to be provided with a resist, and more specifically, an example of a surface configured to be attached with a first dry film resist RR (dry film resist). The three-dimensional surface roughness Sa of the first surface 10MR is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 2.666 μm or more in a 50-fold field of view. In addition, the three-dimensional surface roughness Sa of the first surface 10MR is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 1.289 μm or more in a 150-fold field of view.

[0048] The second surface 10MF is an example of a surface configured to be provided with a resist, and more specifically, an example of a surface configured to be attached with a second dry film resist RF (dry film resist). The three-dimensional surface roughness Sa of the second surface 10MF is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 2.666 μm or more in a 50-fold field of view. In addition, the three-dimensional surface roughness Sa of the second surface 10MF is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 1.289 μm or more in a 150-fold field of view.

[0049] The above three-dimensional surface roughness Sa and three-dimensional surface roughness Sz are obtained according to ISO

[0050] The three-dimensional surface roughness Sa is the arithmetic mean height Sa in a defined region having a predetermined area, and the three-dimensional surface roughness Sz is the maximum height Sz in a defined region having a predetermined area.

[0051] The material of the metal sunshade substrate 10M may be, for example, stainless steel (SUS), that is, an alloy with iron and chromium as main components. It should be noted that the material of the metal sunshade substrate 10M may also be other metal materials or alloy materials.

[0052] According to the above-mentioned metal shading plate substrate 10M, the three-dimensional surface roughness Sa of the first surface 10MR is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 2.666 μm or more in a 50-fold field of view. Therefore, it is difficult to form a gap between the first surface 10MR and the first dry film resist RR attached to the first surface 10MR, and the adhesion at the interface between the first surface 10MR of the metal shading plate substrate 10M and the first dry film resist RR can be improved.

[0053] In addition, in the above-mentioned metal shading plate substrate 10M, the three-dimensional surface roughness Sa of the first surface 10MR is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 1.289 μm or more in a 150-fold field of view. Therefore, the adhesion at the interface between the first surface 10MR of the metal shading plate substrate 10M and the first dry film resist RR can be reliably improved.

[0054] In addition, according to the metal light shielding plate substrate 10M, the three-dimensional surface roughness Sa of the second surface 10MF is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 2.666 μm or more in a 50-fold field of view. Therefore, in addition to the first surface 10MR, the adhesion between the metal light shielding plate substrate 10M and the second dry film resist RF can also be improved on the second surface 10MF.

[0055] In addition, in the above-mentioned metal light shielding plate substrate 10M, the three-dimensional surface roughness Sa of the second surface 10MF is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 1.289 μm or more in a 150-fold field of view. Therefore, the adhesion between the metal light shielding plate substrate 10M of the second surface 10MF and the second dry film resist RF can be reliably improved.

[0056] In addition, when the above-mentioned metal shading plate substrate 10M is made of stainless steel, by setting the three-dimensional surface roughness Sa and Sz of the first surface 10MR and the second surface 10MF of the metal shading plate substrate 10M as described above, the close adhesion between the metal shading plate substrate 10M and the first dry film resist RR and the second dry film resist RF can be effectively improved.

[0057] [Metal sunshade]

[0058] Figure 2 , Figure 3 The metal shading plate 10 shown is manufactured using the above-mentioned metal shading plate substrate 10M. The metal shading plate 10 includes a first surface 10R (surface), a second surface 10F, and a hole 10H. The first surface 10R of the metal shading plate 10 corresponds to the first surface 10MR of the metal shading plate substrate 10M. In addition, the second surface 10F of the metal shading plate 10 corresponds to the second surface 10MF of the metal shading plate substrate 10M. The hole 10H passes through between the second surface 10F and the first surface 10R. Similar to the metal shading plate substrate 10M, the thickness T of the metal shading plate 10 is greater than 10μm and less than 50μm. In the metal shading plate 10, the second surface 10F is a surface located on the incident side of light.

[0059] The first surface 10R, the second surface 10F, and the side surface of the hole 10H in the metal shading plate 10 may be covered with an anti-reflection film (not shown). The anti-reflection film has a lower reflectivity than the metal forming the metal shading plate 10, and has a function of absorbing a portion of the light irradiated on the anti-reflection film. It should be noted that the anti-reflection film covering the metal shading plate 10 does not necessarily completely eliminate the reflection of light in the metal shading plate 10.

[0060] like Figure 2 As shown, the metal shading plate 10 is formed in a circular shape in a plan view. The hole 10H is also formed in a circular shape in a plan view.

[0061] like Figure 3 As shown, the hole 10H includes a first recess 10H1 and a second recess 10H2. The first recess 10H1 is a recess having a first opening H1R on the first surface 10R and having a shape that becomes thinner from the first surface 10R toward the second surface 10F. The second recess 10H2 has a second opening H2F on the second surface 10F that is larger than the first opening H1R. The second recess 10H2 has a shape that becomes thinner from the second surface 10F toward the first surface 10R and is connected to the first recess 10H1. Among the openings of the first recess 10H1, the opening on the opposite side to the first opening H1R is a circular central opening HC.

[0062] The depth dimension of the second recess 10H2 is greater than the depth dimension of the first recess 10H1 in the thickness direction of the metal light shielding plate 10. In addition, the central opening HC is located near the first opening H1R.

[0063] The hole 10H is formed in a tapered shape that becomes smaller from the first surface 10R toward the second surface 10F and from the second surface 10F toward the first surface 10R.

[0064] In the present embodiment, in the cross section along the plane orthogonal to the second surface 10F, the side surface (inner surface) of the second recess 10H2 is arc-shaped, and the center of curvature of the side surface of the second recess 10H2 is located outside the metal light shielding plate 10. In addition, the side surface (inner surface) of the first recess 10H1 is arc-shaped, and the center of curvature of the side surface of the first recess 10H1 is located outside the metal light shielding plate 10.

[0065] In the metal shading plate 10, the diameter of the first opening H1R of the first recess 10H1 is the first diameter DH1, and the diameter of the second opening H2F of the second recess 10H2 is the second diameter DH2. In this embodiment, since the central opening HC is located near the first opening H1R, the diameter of the central opening HC is substantially equal to the first diameter DH1 of the first recess 10H1.

[0066] The first diameter DH1 is a value set according to the camera assembly to which the metal visor 10 is installed. For example, when the metal visor 10 is installed in the camera assembly of a smartphone, the first diameter DH1 can be greater than 0.4 mm and less than 1.0 mm. In addition, for example, when the metal visor 10 is installed in a vehicle-mounted camera, the first diameter DH1 can be greater than 2.0 mm and less than 7.0 mm. The percentage of the first diameter DH1 to the second diameter DH2 (DH1 / DH2×100) can be, for example, greater than 80% and less than 99%.

[0067] [Method for manufacturing metal sunshade]

[0068] Next, refer to Figures 4 to 8 , an example of a method for manufacturing the metal shade plate 10 using the metal shade plate substrate 10M is described.

[0069] When manufacturing the metal sunshade plate 10, a metal sunshade plate substrate 10M ( Figure 1 ). When preparing the metal sunshade substrate 10M, first Figure 4 As shown, a base material 15a made of stainless steel (SUS) and extending in one direction, namely, an extension direction D1, is prepared. Next, the base material 15a is conveyed to a rolling device 50 having a pair of rolling rollers 51 and 52 so that the extension direction D1 of the base material 15a is parallel to the conveying direction D2 of the base material 15a.

[0070] When the base material 15a reaches between the pair of rolling rollers 51 and 52, the base material 15a is rolled by the pair of rolling rollers 51 and 52. As a result, the thickness of the base material 15a is reduced, and the base material 15a extends in the conveying direction D2, so that the rolled material 15 serving as the metal shade plate substrate 10M can be obtained. Figure 4 In the embodiment, the rolled material 15 is wound around the core C, but the rolled material 15 may be handled in a strip-shaped stretched state without being wound around the core C. The thickness of the rolled material 15 is, for example, not less than 10 μm and not more than 50 μm.

[0071] Although not shown, in order to eliminate the residual stress accumulated inside the rolled material 15 formed by rolling the base material 15a, the rolled material 15 may be annealed. In this case, the rolled material 15 with reduced residual stress can be obtained.

[0072] In the metal shading plate substrate 10M composed of the rolled material 15 obtained as described above, the three-dimensional surface roughness Sa of the first surface 10MR is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 2.666 μm or more in a 50-fold field of view. In addition, the three-dimensional surface roughness Sa of the first surface 10MR is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 1.289 μm or more in a 150-fold field of view. In addition, the three-dimensional surface roughness Sa of the second surface 10MF is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 2.666 μm or more in a 50-fold field of view. In addition, the three-dimensional surface roughness Sa of the second surface 10MF is 0.109 μm or more in a 150-times field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 1.289 μm or more in a 150-times field of view.

[0073] The three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz of the metal shade plate substrate 10M can be obtained, for example, by transferring the surfaces of the rolling rollers 51 and 52 to the base material 15 a when rolling the base material 15 a .

[0074] After preparing the metal sunshade substrate 10M, Figure 5 As shown, a first dry film resist RR is disposed on the first surface 10MR of the metal light shielding plate substrate 10M. In addition, a second dry film resist RF is disposed on the second surface 10MF of the metal light shielding plate substrate 10M. The dry film resists RR and RF may be negative resists or positive resists.

[0075] like Figure 6As shown, through holes RRh, RFh are formed in the dry film resists RR, RF by exposure and development of the dry film resists RR, RF, thereby obtaining patterned dry film resists RR, RF.

[0076] More specifically, the first through hole RRh is formed in the first dry film resist RR by exposure and development of the first dry film resist RR. The first through hole RRh is used to form the first recess 10H1 having the first opening H1R on the first surface 10MR (see Figure 2 , Figure 7 ) of the first dry film resist RR.

[0077] In addition, by exposing and developing the second dry film resist RF, a second through hole RFh is formed in the second dry film resist RF. The second through hole RFh is used to form a second recess 10H2 having a second opening H2F on the second surface 10MF (see Figure 2 , Figure 8 )'s second dry film resist RF.

[0078] like Figure 7 As shown, a first recess 10H1 is formed in the metal light shielding plate substrate 10M through the first dry film resist RR disposed on the first surface 10MR. The first recess 10H1 is recessed in the thickness direction of the metal light shielding plate substrate 10M and has a first opening H1R on the first surface 10MR. The first recess 10H1 has a shape that becomes thinner from the first surface 10MR toward the second surface 10MF. The first recess 10H1 is the first recess 10H1 of the metal light shielding plate 10.

[0079] When forming the first recess 10H1, the metal shading plate substrate 10M is etched using an etching solution capable of etching the metal shading plate substrate 10M. It should be noted that before etching the metal shading plate substrate 10M, the second dry film resist RF is covered with a second surface protection film PMF resistant to the etching solution. The second surface protection film PMF can fill the second through hole RFh of the second dry film resist RF, or can only cover the second through hole RFh. By covering the second dry film resist RF with the second surface protection film PMF, it is possible to prevent the second surface 10MF of the metal shading plate substrate 10M and the first surface 10MR of the metal shading plate substrate 10M from being etched at the same time.

[0080] It should be noted that, when the first recess 10H1 is formed by etching the first surface 10MR, the depth of the first recess 10H1 is greater than the depth from the first surface 10R to the central opening HC (see FIG. 1 ). Figure 3 ) has a first recess 10H1 with a large distance therebetween.

[0081] like Figure 8As shown, after the first recess 10H1 is formed, a second recess 10H2 is formed in the metal light shielding plate substrate 10M via the second dry film resist RF disposed on the second surface 10MF, which is recessed in the thickness direction of the metal light shielding plate substrate 10M and has a second opening H2F on the second surface 10MF. The second recess 10H2 has a shape that becomes thinner from the second surface 10MF toward the first surface 10MR. Thus, the second recess 10H2 is connected to the first recess 10H1 to form a central opening HC. The second recess 10H2 is the second recess 10H2 of the metal light shielding plate 10. In addition, the central opening HC is the central opening HC of the metal light shielding plate 10.

[0082] When forming the second recess 10H2, the metal shading plate substrate 10M is etched using an etching solution capable of etching the metal shading plate substrate 10M, similarly to when forming the first recess 10H1. It should be noted that before etching the metal shading plate substrate 10M, the first dry film resist RR is removed from the first surface 10MR of the metal shading plate substrate 10M. Then, before etching the metal shading plate substrate 10M, the first surface 10MR of the metal shading plate substrate 10M is covered with a first surface protective film PMR resistant to the etching solution, and the inside of the first recess 10H1 is buried. By covering the first surface 10MR of the metal shading plate substrate 10M with the first surface protective film PMR, it is possible to prevent the first surface 10MR side of the metal shading plate substrate 10M and the second surface 10MF of the metal shading plate substrate 10M from being etched at the same time.

[0083] In the etching of the second recess 10H2, the second surface 10MF of the metal shading plate substrate 10M is etched while the first recess 10H1 is buried by the first surface protection film PMR. Therefore, after the etching of the second surface 10MF reaches the first surface protection film PMR, the supply of etching liquid to the metal shading plate substrate 10M is controlled by the first surface protection film PMR. Thus, even in the case where the thickness of the metal shading plate substrate 10M is in a wide range of 10 μm to 50 μm, the accuracy of the cross-sectional shape of the second recess 10H2 can be improved. In contrast, when the inside of the first recess 10H1 is not buried by the first surface protection film PMR, when the metal shading plate substrate 10M is penetrated by connecting the first recess 10H1 and the second recess 10H2, the etching liquid passes through the connection between the first recess 10H1 and the second recess 10H2 and leaks to the first surface 10MR of the metal shading plate substrate 10M. As a result, the accuracy of the shapes of the first recess 10H1 and the second recess 10H2 decreases.

[0084] After the first recess 10H1 and the second recess 10H2 are formed in the metal light shielding plate substrate 10M, the second dry film resist RF is removed from the second surface 10MF, and the first surface protection film PMR is removed from the first surface 10MR. Figure 2 , Figure 3 The metal sunshade 10 is shown.

[0085] In the manufacturing method of the metal shading plate 10, for example, after removing the second dry film resist RF and the first surface protection film PMR from the metal shading plate substrate 10M, an anti-reflection film covering the second surface 10MF, the first surface 10MR, and the side surfaces of the first recess 10H1 and the second recess 10H2 may be formed. As described above, the anti-reflection film has a lower reflectivity than the metal shading plate substrate 10M and has a function of absorbing a portion of light incident on the anti-reflection film.

[0086] The anti-reflection film is, for example, a black coating. The anti-reflection film can be formed on the metal visor substrate 10M using a film forming method such as a sputtering method or an evaporation method. Alternatively, the anti-reflection film can also be formed on the metal visor substrate 10M by bringing the metal visor substrate 10M into contact with a liquid for forming the anti-reflection film.

[0087] It should be noted that, in the manufacturing method of the metal shading plate 10, the first dry film resist RR may not be removed before forming the first surface protection film PMR. In this case, it is sufficient to form the first surface protection film PMR that covers the first dry film resist RR and fills the first recess 10H1. In addition, after the second recess 10H2 is formed by etching the second surface 10MF, the first surface protection film PMR and the first dry film resist RR can be removed from the first surface 10MR together.

[0088] [Camera Kit]

[0089] Next, refer to Fig. 9 The camera assembly is described. It should be noted that Fig. 9 The composition of the camera assembly is schematically shown.

[0090] like Fig. 9 As shown, the camera module 20 includes the above-mentioned metal shading plate 10, a lens 21, and an imaging element 22. The lens 21 transmits the light passing through the hole of the metal shading plate 10. The light passing through the lens 21 is incident on the imaging element 22. In a state where the first surface 10R is opposite to the lens 21, the metal shading plate 10 is located on the incident side of the light relative to the lens 21. Compared with the case where the second surface 10F of the metal shading plate 10 is opposite to the lens 21, the light passing through the central opening HC is reflected on the side of the hole 10H, thereby limiting the light incident on the lens 21.

[0091] The diameter of the central opening HC of the metal shading plate 10 may be smaller than the effective diameter of the lens 21. This can prevent light passing through the central opening HC from entering outside the effective diameter of the lens 21. Therefore, unnecessary light is prevented from entering the imaging element 22.

[0092] The imaging element 22 may be a CCD image sensor or a CMOS image sensor. In the camera module 20, one metal shading plate 10 and one lens 21 adjacent to the metal shading plate 10 on the optical axis of light passing through the metal shading plate 10 form one lens unit. The camera module 20 may also include a plurality of lens units.

[0093] It should be noted that the camera module is not limited to the one including the lens 21 and the imaging element 22 described above, and it is sufficient as long as it includes at least one metal light shielding plate 10 .

[0094] The camera module 20 is mounted on various electronic devices. The electronic device includes the camera module 20 and a housing that supports the camera module 20. The electronic device may be, for example, a smartphone, a tablet-type personal computer, a notebook-type personal computer, or the like.

[0095] In the metal shading plate substrate 10M of the present embodiment, the three-dimensional surface roughness Sa of the first surface 10MR (surface) is greater than 0.142 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is greater than 2.666 μm in a 50-fold field of view. Therefore, the adhesion at the interface between the first surface 10MR of the metal shading plate substrate 10M and the first dry film resist RR can be improved. Thus, when the first recess 10H1 is formed in the metal shading plate substrate 10M using the first dry film resist RR, it is possible to suppress the occurrence of unevenness at the edge of the first opening H1R of the first recess 10H1 or the side (inner surface) of the first recess 10H1. Therefore, in the manufactured metal shading plate 10, it is possible to suppress the occurrence of unevenness at the edge of the hole 10H or unevenness in the size of the hole 10H. As a result, the shading performance of the metal shading plate 10 can be ensured.

[0096] In addition, in the metal shading plate substrate 10M of the present embodiment, the three-dimensional surface roughness Sa of the first surface 10MR is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the first surface 10MR is 1.289 μm or more in a 150-fold field of view. Therefore, the adhesion at the interface between the first surface 10MR of the metal shading plate substrate 10M and the first dry film resist RR can be reliably improved. As a result, when the first recess 10H1 is formed in the metal shading plate substrate 10M, it is possible to more reliably suppress the occurrence of unevenness at the edge of the first opening H1R of the first recess 10H1 or the side (inner surface) of the first recess 10H1.

[0097] In addition, in the metal light shielding plate substrate 10M of the present embodiment, the three-dimensional surface roughness Sa of the second surface 10MF, which is the surface on the opposite side of the first surface 10MR, is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 2.666 μm or more in a 50-fold field of view. Therefore, in addition to the first surface 10MR, the adhesion between the metal light shielding plate substrate 10M and the second dry film resist RF can also be improved on the second surface 10MF. As a result, when the second recess 10H2 is formed in the metal light shielding plate substrate 10M using the second dry film resist RF, it is possible to suppress the occurrence of unevenness at the edge of the second opening H2F of the second recess 10H2 or the side (inner surface) of the second recess 10H2. Therefore, in the manufactured metal light shielding plate 10, it is possible to more effectively suppress the occurrence of unevenness at the edge of the hole 10H or unevenness in the size of the hole 10H. As a result, the light shielding performance of the metal light shielding plate 10 can be ensured.

[0098] In addition, in the metal shading plate substrate 10M of the present embodiment, the three-dimensional surface roughness Sa of the second surface 10MF is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz of the second surface 10MF is 1.289 μm or more in a 150-fold field of view. Therefore, the adhesion between the metal shading plate substrate 10M of the second surface 10MF and the second dry film resist RF can be reliably improved. As a result, when the second recess 10H2 is formed in the metal shading plate substrate 10M, it is possible to more reliably suppress the occurrence of unevenness at the edge of the second opening H2F of the second recess 10H2 or the side (inner surface) of the second recess 10H2.

[0099] In addition, the metal light shielding plate substrate 10M of the present embodiment is made of an alloy with iron and chromium as main components. Therefore, the adhesion between the metal light shielding plate substrate 10M and the first dry film resist RR and the second dry film resist RF can be effectively improved, and as a result, the occurrence of unevenness on the edges of the first and second openings H1R and H2F of the first and second recesses 10H1 and 10H2 formed in the metal light shielding plate 10 and the side surfaces (inner surfaces) of the first and second recesses 10H1 and 10H2 can be effectively suppressed.

[0100] The metal sunshade substrate according to the present invention is further described using experimental examples (Examples 1 to 6 and Comparative Examples 1 to 3). The technical scope of the present invention is not limited to any specific content of the experimental examples.

[0101] [Measurement of surface roughness]

[0102] The metal shade plate substrates of Examples 1 to 6 and Comparative Examples 1 to 3 were all stainless steel foils with a thickness of 25 μm. The three-dimensional surface roughness Sa and three-dimensional surface roughness Sz of the first and second surfaces of the metal shade plate substrates of Examples 1 to 6 and Comparative Examples 1 to 3 were measured by the following method.

[0103] The three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz were measured using a shape analysis laser microscope (VK-X210, manufactured by KEYENCE Corporation) equipped with 50x and 150x objective lenses. In the case of a 50x lens, the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz of a surface with a width of about 280 μm in one direction and a width of about 220 μm in a direction orthogonal to one direction were measured. In the case of a 150x lens, the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz of a surface with a width of about 90 μm in one direction and a width of about 70 μm in a direction orthogonal to one direction were measured.

[0104] In addition, the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz are measured by the method based on ISO 25178.

[0105] For each of the metal visor substrates of Examples 1 to 6 and Comparative Examples 1 to 3, the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz at 50 times the magnification, and the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz at 150 times the magnification were measured, and the results are shown in Table 1. Table 1 shows only the measurement results of the three-dimensional surface roughness Sa and the three-dimensional surface roughness Sz of the first surface, but the measurement results of the second surface are the same as those of the first surface.

[0106] [Table 1]

[0107]

[0108] As shown in Table 1, in the metal sunshade substrate of Example 1, the three-dimensional surface roughness Sa is 0.151 μm in a 50-fold field of view (×50), and the three-dimensional surface roughness Sz is 2.910 μm in a 50-fold field of view. In addition, in the metal sunshade substrate of Example 1, the three-dimensional surface roughness Sa is 0.116 μm in a 150-fold field of view (×150), and the three-dimensional surface roughness Sz is 1.338 μm in a 150-fold field of view.

[0109] In the metal visor substrate of Example 2, the three-dimensional surface roughness Sa is 0.165 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.982 μm in a 50-fold field of view. In addition, in the metal visor substrate of Example 2, the three-dimensional surface roughness Sa is 0.111 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.494 μm in a 150-fold field of view.

[0110] In the metal visor substrate of Example 3, the three-dimensional surface roughness Sa is 0.159 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.896 μm in a 50-fold field of view. In addition, in the metal visor substrate of Example 3, the three-dimensional surface roughness Sa is 0.110 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.429 μm in a 150-fold field of view.

[0111] In the metal sunshade substrate of Example 4, the three-dimensional surface roughness Sa is 0.153 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.823 μm in a 50-fold field of view. In addition, in the metal sunshade substrate of Example 4, the three-dimensional surface roughness Sa is 0.109 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.304 μm in a 150-fold field of view.

[0112] In the metal sunshade substrate of Example 5, the three-dimensional surface roughness Sa is 0.145 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.750 μm in a 50-fold field of view. In addition, in the metal sunshade substrate of Example 5, the three-dimensional surface roughness Sa is 0.113 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.320 μm in a 150-fold field of view.

[0113] In the metal sunshade substrate of Example 6, the three-dimensional surface roughness Sa is 0.142 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.666 μm in a 50-fold field of view. In addition, in the metal sunshade substrate of Example 6, the three-dimensional surface roughness Sa is 0.111 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.289 μm in a 150-fold field of view.

[0114] In the metal sunshade substrate of Comparative Example 1, the three-dimensional surface roughness Sa is 0.099 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 1.808 μm in a 50-fold field of view. In addition, in the metal sunshade substrate of Comparative Example 1, the three-dimensional surface roughness Sa is 0.078 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 0.886 μm in a 150-fold field of view.

[0115] In the metal visor substrate of Comparative Example 2, the three-dimensional surface roughness Sa is 0.096 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 1.691 μm in a 50-fold field of view. In addition, in the metal visor substrate of Comparative Example 2, the three-dimensional surface roughness Sa is 0.071 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 0.803 μm in a 150-fold field of view.

[0116] In the metal visor substrate of Comparative Example 3, the three-dimensional surface roughness Sa is 0.093 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is 1.631 μm in a 50-fold field of view. In addition, in the metal visor substrate of Comparative Example 3, the three-dimensional surface roughness Sa is 0.061 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is 0.727 μm in a 150-fold field of view.

[0117] Using the metal shading plate substrates of Examples 1 to 6 and Comparative Examples 1 to 3, Figures 5 to 8 The metal shading plates of Examples 1 to 6 and Comparative Examples 1 to 3 were manufactured by the same steps as the manufacturing method shown in the figure. That is, after the first recess is formed by etching the metal shading plate substrate from the first surface of the metal shading plate substrate, the second recess is formed by etching the metal shading plate substrate from the second surface of the metal shading plate substrate. Thus, a metal shading plate having a hole formed by the first recess and the second recess is obtained. The target value of the first diameter of the first recess is set to 491μm, and the target value of the second diameter of the second recess is set to 571μm. A plurality of holes are formed in each of the metal shading plates of Examples 1 to 6 and Comparative Examples 1 to 3.

[0118] For each of the metal shading plates of Examples 1 to 6 and Comparative Examples 1 to 3 manufactured as described above, Fig.10 , Fig.11 The edge of the hole 10H is visually confirmed in the field of view of the laser microscope, and the unevenness of the edge of the hole 10H is evaluated. Fig.10 As shown in the example, the case where the edge of the hole 10H has no unevenness is set as "○" (good). Fig.11 As shown in the example, the case where the edge of the hole 10H has unevenness is marked as "×" (not acceptable). Table 2 shows the evaluation results of the unevenness of the edge of the hole 10H.

[0119] [Table 2]

[0120] Uneven evaluation Example 1 ○ Example 2 ○ Example 3 ○ Example 4 ○ Example 5 ○ Example 6 ○ Comparative Example 1 × Comparative Example 2 × Comparative Example 3 ×

[0121] As shown in Table 2, in the metal shading plates of Comparative Examples 1 to 3, there are unevenness at the edges of the holes 10H. It is believed that this is because the three-dimensional surface roughness Sa of the metal shading plate substrate used in the manufacture of the metal shading plates of Comparative Examples 1 to 3 is less than 0.142 μm in a 50-fold field of view, and the three-dimensional surface roughness Sz is less than 2.666 μm in a 50-fold field of view. In addition, it is believed that this is because the three-dimensional surface roughness Sa of the metal shading plates of Comparative Examples 1 to 3 is less than 0.109 μm in a 150-fold field of view, and the three-dimensional surface roughness Sz is less than 1.289 μm in a 150-fold field of view.

[0122] On the other hand, in the metal light shielding plates of Examples 1 to 6, there is no unevenness at the edge of the hole 10H.

[0123] This is believed to be because the three-dimensional surface roughness Sa of the metal shading plates of Examples 1 to 6 is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz is 2.666 μm or more in a 50-fold field of view. In addition, this is believed to be because the three-dimensional surface roughness Sa of the metal shading plates of Examples 1 to 6 is 0.109 μm or more in a 150-fold field of view, and the three-dimensional surface roughness Sz is 1.289 μm or more in a 150-fold field of view.

[0124] In addition, the first diameter DH1 of the first recessed portion of the plurality of holes formed in each of the manufactured metal light shielding plates of Examples 1 to 6 and Comparative Examples 1 to 3 was measured (see Figure 3 ). Regarding the number of holes of the measured first diameter (n [number]), there are 3200 holes in each metal shading plate of Examples 1 to 6 and 648 holes in Comparative Examples 1 to 3. For each metal shading plate of Examples 1 to 6 and Comparative Examples 1 to 3, the average value (ave [μm]) of the first diameter, the maximum value (max [μm]) of the first diameter, the minimum value (min [μm]) of the first diameter, the difference between the maximum and minimum values ​​of the first diameter (max-min [μm]) and the standard deviation (σ [μm]) were calculated. The results are shown in Table 3.

[0125] [Table 3]

[0126]

[0127] As shown in Table 3, the difference in the first diameter (max-min [μm]) in the metal light shielding plates of Comparative Examples 1 to 3 is 10 μm or more, which is relatively large. This is probably because the metal light shielding plates of Comparative Examples 1 to 3 have unevenness at the edge of the hole.

[0128] On the other hand, in the metal light shielding plates of Examples 1 to 6, the difference in the first diameter (max-min [μm]) was 7 μm or less, which was relatively small. This is probably because the metal light shielding plates of Examples 1 to 6 had no unevenness at the edge of the hole.

[0129] In addition, the dimensional deviation of the first diameter was evaluated based on the standard deviation σ (see Table 3) of the first diameter of each metal light shielding plate of Examples 1 to 6 and Comparative Examples 1 to 3. The standard deviation σ of 1.0 μm or less was set as "◎" (excellent; very small dimensional deviation), 2.0 μm or less was set as "○" (good; small dimensional deviation), and more than 2.0 μm was set as "×" (unacceptable; large dimensional deviation). The evaluation results of the dimensional deviation of the first diameter are shown in Table 4.

[0130] [Table 4]

[0131] Evaluation of dimensional deviation Example 1 ◎ Example 2 ◎ Example 3 ◎ Example 4 ◎ Example 5 ○ Example 6 ○ Comparative Example 1 × Comparative Example 2 × Comparative Example 3 ×

[0132] As shown in Table 4, the metal light shielding plates of Comparative Examples 1 to 3 were all evaluated as "×" in terms of the dimensional variation of the first diameter of the hole. This is considered to be because the metal light shielding plates of Comparative Examples 1 to 3 had unevenness at the edge of the hole.

[0133] On the other hand, in the metal light shielding plates of Examples 1 to 4, the evaluation of the dimensional deviation of the first diameter of the hole was "◎". In addition, in the metal light shielding plates of Examples 5 to 6, the evaluation of the dimensional deviation of the first diameter of the hole was "○". This is considered to be because the metal light shielding plates of Examples 1 to 6 have no unevenness at the edge of the hole.

[0134] Industrial Applicability

[0135] According to the present invention, the light shielding performance of the metal light shielding plate can be ensured.

Claims

1. A metal sunshade substrate, which is a substrate for a metal sunshade, The three-dimensional surface roughness Sa of the surface of the substrate is 0.142 μm or more in a 50-fold field of view, The three-dimensional surface roughness Sz of the surface is 2.666 μm or more in a 50-fold field of view.

2. The metal sunshade substrate according to claim 1, wherein: The three-dimensional surface roughness Sa of the surface is 0.109 μm or more in a 150-fold field of view, The three-dimensional surface roughness Sz of the surface is 1.289 μm or more in a 150-fold field of view.

3. The metal sunshade substrate according to claim 1 or claim 2, wherein: The surface is a first surface, The surface opposite to the first surface is the second surface, The three-dimensional surface roughness Sa of the second surface is 0.142 μm or more in a 50-fold field of view. The three-dimensional surface roughness Sz of the second surface is 2.666 μm or more in a 50-fold field of view.

4. The metal sunshade substrate according to claim 3, wherein: The three-dimensional surface roughness Sa of the second surface is 0.109 μm or more in a 150-fold field of view. The three-dimensional surface roughness Sz of the second surface is 1.289 μm or more in a 150-fold field of view.

5. The metal sunshade substrate according to claim 1 or claim 2, wherein: The metal sunshade substrate is made of an alloy having iron and chromium as main components. 6 . A metal sunshade plate using the metal sunshade plate substrate according to claim 1 or claim 2 .

7. A camera module using the metal sunshade according to claim 6.

8. An electronic device using the camera module according to claim 7.

9. A method for manufacturing a metal sunshade, comprising: Preparing a metal shading plate substrate, the metal shading plate substrate having a surface configured to be attached with a dry film resist and having an opening formed by etching using the patterned dry film resist, wherein the three-dimensional surface roughness Sa of the surface is 0.142 μm or more in a 50-fold field of view, and the three-dimensional surface roughness Sz of the surface is 2.666 μm or more in a 50-fold field of view; disposing the dry film resist on the surface; In the metal light shielding plate substrate, a through hole is formed in the dry film resist, the through hole is used to form a concave portion that is recessed along the thickness direction of the metal light shielding plate substrate and has the opening on the surface; forming the recess in the metal shade substrate via the dry film resist; as well as The dry film resist is removed from the metal shade plate substrate having the recessed portion formed therein.

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