Backboard waterway cleaning method and device

Abstract

The invention discloses a backboard waterway cleaning method and device, and relates to the technical field of waterway cleaning, and the method comprises the following steps: 1, introducing a mixed fluid from an inlet end of a backboard waterway; 2, the mixed fluid is driven to rub the inner wall of the back plate waterway and then guided out from the outlet end of the back plate waterway; thirdly, the first step and the second step are conducted in a circulating mode, and cleaning of the backboard water way is completed; the backboard waterway is cleaned through the combination of compressed air and abrasive particles, the backboard waterway cleaning device can adapt to long-distance and complex-shaped waterways difficult to clean, the waterways can be more fully cleaned through the combination, and the comprehensiveness of the cleaning range is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of waterway cleaning, and in particular to a back plate waterway cleaning method and device. Background Art

[0002] Target material, also known as sputtering target, is the target material bombarded by high-speed energetic particles. In the sputtering coating process, a high-speed ion beam (or laser, ion beam) bombards the surface of the target material, causing the target atoms or molecules to be sputtered out and forming the desired thin film on the substrate. Through the interaction between different lasers (ion beams) and different target materials, film systems with different compositions, structures and properties can be obtained. These film systems can achieve multiple functions such as conductivity, blocking, optics, corrosion resistance, etc., and are widely used in semiconductors, displays, solar cells, information storage and other fields.

[0003] The target material usually consists of two parts: the "target blank" and the "back plate". The target blank is the main part of the target material, which is made of high-purity metal or metal oxide. It is the target of the high-speed ion beam bombardment, and the atoms or molecules are transferred to the substrate to form a thin film through the sputtering process. The back plate is connected to the target blank through a welding process, which plays the role of fixing the target blank, and a water channel is opened inside the back plate to play the role of heat transfer during the sputtering process.

[0004] The target back plate water channel is a key structure in the sputtering coating equipment. It is responsible for delivering the coolant to the back of the target to effectively absorb and take away the heat generated during the sputtering process. This is crucial to maintaining a stable operating temperature of the target, improving the sputtering efficiency and coating quality. However, during the sputtering process, since the coolant may contain impurities, microorganisms, and precipitates produced by chemical reactions, these substances will gradually accumulate on the walls of the water channel to form scale. The adhesion of these scales will seriously affect the patency and heat dissipation effect of the water channel. Under the action of thermal stress, the target on the back plate may crack or fall off. Cracked target materials will seriously affect the quality and uniformity of the coating, and may even cause the coating process to be interrupted. The detached target material may directly damage the sputtering equipment, causing serious economic losses and safety hazards. Therefore, in order to avoid the generation and adhesion of foreign matter such as scale in the target back plate water channel, it is necessary to regularly clean the target back plate water channel to remove the scale and foreign matter attached to the walls of the water channel.

[0005] In the prior art, waterway cleaning generally includes chemical cleaning, high-pressure water cleaning, PIG cleaning, etc. Chemical cleaning is to use chemical agents to corrode and clean the waterway, but it may cause chemical residues and risk damaging the backboard; high-pressure water cleaning is mainly used for short-distance waterway cleaning, using high-pressure water to remove foreign matter in the waterway, and has certain requirements for the diameter and length of the pipeline. When cleaning the backboard, there are shortcomings such as poor cleaning effect in dead corners and long-distance and complex-shaped waterways; for PIG industrial cleaning technology, the driving force generated by the pump to drive the PIG (pipe cleaner) forward in the pipe to discharge the dirt accumulated in the pipeline out of the pipe, but it is necessary to select a suitable pipe cleaner according to the pipe diameter and dirt type, and there is a problem of difficulty in matching the pipe cleaner with the waterway.

[0006] In view of this, a back plate water channel cleaning method is urgently needed to solve the problem that long-distance and complex-shaped water channels are difficult to clean. Summary of the invention

[0007] The purpose of the present invention is to provide a back plate water channel cleaning method and device to solve the problem that long-distance and complex-shaped water channels are difficult to clean.

[0008] The purpose of the present invention can be achieved through the following technical solutions:

[0009] A back plate water channel cleaning method comprises the following steps:

[0010] Step 1: Introduce the mixed fluid from the inlet end of the back plate water channel;

[0011] Step 2: driving the mixed fluid to rub against the inner wall of the back plate water channel, and then being discharged from the outlet end of the back plate water channel;

[0012] Step 3: Step 1 and step 2 are repeated repeatedly to complete the cleaning of the back plate water channel.

[0013] As a further solution of the present invention: the mixed fluid is a combination of compressed air and abrasive particles.

[0014] As a further solution of the present invention: the compressed air pressure is 0.4-0.7 MPa.

[0015] As a further solution of the present invention: the abrasive particles include one or more combinations of quartz sand, copper ore sand, glass beads, aluminum oxide sand, zirconium oxide sand, steel sand and garnet.

[0016] As a further solution of the present invention: the mesh size of the abrasive particles is 35-60.

[0017] As a further solution of the present invention: the back plate in step one is a target material back plate, and at least one set of cooling water channels is arranged inside the target material back plate, and the cooling water channels include an inlet end and an outlet end.

[0018] As a further solution of the present invention: the cooling water channel is a rectangular structure.

[0019] As a further solution of the present invention: the inlet end and the outlet end are both arranged upward.

[0020] As a further scheme of the present invention: a back plate water channel cleaning device is applied to the above-mentioned back plate water channel cleaning method, the device includes a fixed seat, a feed pipe is tied to the fixed seat, one end of the feed pipe is connected to the cooling water channel inlet end of the target material back plate, the other end of the feed pipe is connected to a venturi tube, and the venturi tube is connected to a compressed air pipe, the compressed air pipe is connected to an external compressor, the venturi tube is connected to a sand inlet pipe, the other end of the sand inlet pipe is fixed at the bottom of the sand box, the cooling water channel outlet end of the target material back plate is connected to a sand outlet pipe, and the other end of the sand outlet pipe is introduced into the surface of the sand box.

[0021] As a further solution of the present invention: at least one group of cleaning devices is provided.

[0022] Beneficial effects of the present invention:

[0023] The present invention cleans the back plate water channel by adopting a combination of compressed air and abrasive particles, which can adapt to long-distance and complex-shaped water channels that are difficult to clean. The combination can clean the water channel more fully and ensure the comprehensiveness of the cleaning range. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] Figure 1 It is a schematic flow diagram of the cleaning method of the present invention;

[0026] Figure 2 It is a schematic diagram of the target back plate and cooling water path in the present invention;

[0027] Figure 3 It is a schematic diagram of the cleaning device in the present invention;

[0028] Figure 4 It is a schematic diagram of the cooling water channel of the present invention not being cleaned under endoscope;

[0029] Figure 5 It is a schematic diagram of partial cleaning of the cooling water channel under the endoscope of the present invention;

[0030] Figure 6 It is a schematic diagram of the cooling water channel of the present invention being completely cleaned under an endoscope.

[0031] In the figure: 1. target material back plate; 2. cooling water channel; 3. fixing seat; 4. feed pipe; 5. venturi tube; 6. sand inlet pipe; 7. compressed air pipe; 8. sand outlet pipe; 9. sand box. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] Embodiment 1

[0034] In this embodiment, Figure 1 As shown, a back plate waterway cleaning method is provided, the method comprising the following steps:

[0035] Step 1: Introduce the mixed fluid from the inlet end of the back plate water channel;

[0036] Step 2: driving the mixed fluid to rub against the inner wall of the back plate water channel, and then being discharged from the outlet end of the back plate water channel;

[0037] Step 3: Step 1 and step 2 are repeated repeatedly to complete the cleaning of the back plate water channel.

[0038] Preferably, the backing plate in step 1 can be a target backing plate 1, such as Figure 2 As shown, at least one group of cooling water channels 2 is arranged inside the target material back plate 1, and the cooling water channels 2 include an inlet end and an outlet end. When there are multiple groups of cooling water channels 2, the multiple groups of cooling water channels 2 can be combined to form an integral water channel, and the integral water channel has only one inlet end and one outlet end, or can exist separately. The multiple groups of cooling water channels 2 are arranged side by side along the length direction of the target material back plate 1, and each group of cooling water channels 2 is provided with an inlet end and an outlet end. When the cooling water channels 2 are a group, they are arranged separately.

[0039] Preferably, the inlet and outlet are located on the same side to facilitate installation with external matching structures.

[0040] Preferably, the cooling water channel 2 is a rectangular structure, and the rectangular water channel design can provide a larger close-range heat exchange area, so that the heat generated by the target during the coating process can be transferred to the cooling water more quickly and evenly. The cooling water circulates through the water channel to take away the heat, thereby maintaining the temperature of the target stable. According to simulation and experimental data, the rectangular flow channel has the highest target surface average Nu number among the four flow channels with different cross-sectional shapes, such as semi-cylindrical and arc-shaped. The Nu number represents the heat conduction efficiency, showing its excellent cooling effect. The efficient cooling effect can significantly reduce the deformation of the target due to high temperature during the coating process, maintain the flatness and precision of the target, and improve the yield rate of the coating product.

[0041] Furthermore, the rectangular water channel design can ensure the uniform distribution of cooling water on the target backing plate, thereby avoiding local overheating or insufficient cooling. This helps to maintain the temperature uniformity of the target and improve the coating quality.

[0042] Preferably, the mixed fluid in step 1 is a combination of compressed air and abrasive particles.

[0043] Preferably, the compressed air pressure is 0.4-0.7 MPa, most preferably 0.7 MPa.

[0044] Preferably, the mesh number of the abrasive particles is 35-60, and the optimal mesh number of the abrasive particles is 40 mesh;

[0045] Preferably, the abrasive particles include quartz sand, copper ore sand, glass sand, aluminum oxide sand, zirconium oxide sand, steel sand, garnet, etc.; among them, aluminum oxide sand is the best to save costs.

[0046] Preferably, the opening end and the inlet end of the back plate water channel are both set upward. If the opening end and the inlet end are set downward, a greater air pressure is required to introduce abrasive particles into the water channel, and the amount of abrasive particles introduced is smaller than that set upward. It has been verified by experiments that the amount of abrasive particles introduced when the opening end and the inlet end are upward is 1.42 kg / min, while the amount introduced when the opening end and the inlet end are downward is 0.36 kg / min.

[0047] Preferably, the specific process of driving the mixed fluid to rub the inner wall of the backplate water channel in step 2 is: driving the abrasive particles to flow along the direction of the backplate water channel by compressed air, rubbing against the inner wall of the backplate water channel, thereby removing dirt from the inner wall of the backplate water channel.

[0048] Embodiment 2

[0049] like Figure 3 As shown, this embodiment provides a device for the above-mentioned back plate water channel cleaning method, which includes a fixed seat 3, on which a feed pipe 4 is tied, one end of the feed pipe 4 is provided with a connecting seat, which is connected to the inlet end of the cooling water channel 2 of the target material back plate 1, and the other end of the feed pipe 4 is connected to a venturi tube 5, the venturi tube 5 is also fixed on the fixed seat 3, and the air inlet end of the venturi tube 5 is connected to a compressed air pipe 7, the compressed air pipe 7 is connected to an external compressor, and compressed air is provided as power through the compressed air pipe 7, a sand inlet pipe 6 is connected to the throat of the negative pressure end of the venturi tube 5, and the other end of the sand inlet pipe 6 is fixed to the bottom of the sand box 9 by a clamp, and a sand outlet pipe 8 is connected to the outlet end of the cooling water channel 2 of the target material back plate 1, and the other end of the sand outlet pipe 8 is introduced into the surface of the sand box 9, and abrasive sand is contained in the sand box 9.

[0050] Preferably, the above device can be provided with multiple groups, corresponding to multiple groups of cooling water channels 2 of the target material back plate 1, and the cleaning can be performed synchronously to improve the cleaning efficiency. Similarly, one group can be provided to perform the cleaning one by one.

[0051] Preferably, the fixing seat 3 is made of iron to provide a stable supporting force, and can also be installed on the target backing plate 1 by a clamp.

[0052] Preferably, the specific application process of the above device in the cleaning method is:

[0053] First, turn on the external compressor to provide 0.7MPa compressed air. The compressed air passes through the compressed air pipe 7 and the Venturi tube 5, and is blown into the cooling water channel 2 through the feed pipe 4. During the flow of compressed air in the Venturi tube 5, negative pressure is generated at the negative pressure end of the Venturi tube 5, and the abrasive particles inside the sand box 9 are introduced into the cooling water channel 2 through the sand inlet pipe 6 to form a mixed fluid with the compressed air. The mixed fluid flows along the direction of the cooling water channel 2, thereby achieving the effect of sand blasting. After sand blasting, the dirt on the inner wall of the cooling water channel 2 will be brought out of the water channel under the action of the mixed fluid blowing. The processing time is determined according to the severity of the dirt in the cooling water channel 2. After the mixed fluid is brought out of the cooling water channel 2, it is introduced into the surface of the abrasive particles in the sand box 9 through the sand outlet pipe 8 to spit out the abrasive particles. This cycle is repeated to achieve the purpose of cleaning the water channel.

[0054] In this embodiment, alumina sand is the best abrasive. The cooling water channel 2 is fully cleaned by a combination of compressed air and alumina sand. On the one hand, the price of alumina sand is relatively low and easy to obtain, which reduces the cleaning cost. On the other hand, compressed air can blow the alumina sand to every corner of the cooling water channel 2 to ensure a comprehensive cleaning range.

[0055] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, and a specific direction structure and operation, and therefore, cannot be understood as a limitation on the present invention. In addition, "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0056] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A back plate waterway cleaning method, characterized in that: The following steps are involved: Step 1: Introduce the mixed fluid from the inlet end of the back plate water channel; Step 2: driving the mixed fluid to rub against the inner wall of the back plate water channel, and then being discharged from the outlet end of the back plate water channel; Step 3: Step 1 and step 2 are repeated repeatedly to complete the cleaning of the back plate water channel.

2. A back plate water channel cleaning method according to claim 1, characterized in that: The mixed fluid is a combination of compressed air and abrasive particles.

3. A back plate water channel cleaning method according to claim 2, characterized in that: The compressed air pressure is 0.4-0.7 MPa.

4. A back plate water channel cleaning method according to claim 2, characterized in that: The abrasive grains include one or more combinations of quartz sand, copper ore sand, glass beads, aluminum oxide sand, zirconium oxide sand, steel sand and garnet.

5. A back plate water channel cleaning method according to claim 4, characterized in that: The abrasive grain size is 35-60.

6. A back plate water channel cleaning method according to claim 1, characterized in that: The backing plate in step 1 is a target material backing plate (1), and at least one set of cooling water channels (2) is arranged inside the target material backing plate (1), and the cooling water channels (2) include an inlet end and an outlet end.

7. A back plate water channel cleaning method according to claim 6, characterized in that: The cooling water channel (2) is a rectangular structure.

8. A back plate water channel cleaning method according to claim 6, characterized in that: The inlet end and the outlet end are both arranged upward.

9. A back plate water channel cleaning device, characterized in that: The device is applied to the back plate water channel cleaning method as described in claims 1-8, comprising a fixed seat (3), a feed pipe (4) tied to the fixed seat (3), one end of the feed pipe (4) being connected to the inlet end of the cooling water channel (2) of the target material back plate (1), the other end of the feed pipe (4) being connected to a venturi tube (5), and the venturi tube (5) being connected to a compressed air pipe (7), the compressed air pipe (7) being connected to an external compressor, the venturi tube (5) being connected to a sand introduction pipe (6), the other end of the sand introduction pipe (6) being fixed to the bottom of a sand box (9), the outlet end of the cooling water channel (2) of the target material back plate (1) being connected to a sand outlet pipe (8), the other end of the sand outlet pipe (8) being introduced into the surface of the sand box (9).

10. A back plate water channel cleaning device according to claim 9, characterized in that: At least one group of cleaning devices is provided.

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