Staggered hole machining method

Abstract

The invention belongs to the technical field of semiconductor part processing, and discloses a staggered hole processing method. The staggered hole machining method comprises the following steps that S10, primary drilling is conducted, specifically, a first drill bit is adopted for drilling of a second hole in a to-be-machined part with a first hole, the axis of the second hole and the axis of the first hole are arranged in an angle mode, and the second hole communicated with the first hole is obtained; s20, secondary drilling is conducted, specifically, a second through hole is machined through a second drill bit so as to remove burrs, a roughly machined second hole is obtained, and the length of the second drill bit is larger than that of the first drill bit; and S30, finish machining is conducted, specifically, finish machining is conducted on the second hole subjected to rough machining, and the second hole subjected to finish machining is obtained. According to the staggered hole machining method, burrs can be removed in the process of drilling the second hole, an additional burr removing method is not needed, the removing effect is better, the cost is low, and the machining efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor component processing, and in particular to a staggered hole processing method. Background Art

[0002] At present, in the process of processing staggered holes in semiconductor components, through holes and broken holes often appear at the intersection of the holes, and flange burrs appear on the edges of the broken holes or the through holes. This burr is sharp and located at the edge of the hole, making it difficult to remove manually.

[0003] In the prior art, the staggered hole processing method for semiconductor component products is usually to process the holes by drilling and then using a reamer to ensure the size requirements of the holes, and then remove the burrs on the inner edges of the holes by subsequent abrasive flow deburring, dry ice deburring, ultrasonic deburring, etc. However, the above deburring methods have a long processing cycle, are expensive to deburr, have poor removal effects, and increase processing steps and processing equipment, and are cumbersome to operate.

[0004] Therefore, a staggered hole processing method is urgently needed to solve the above technical problems. Summary of the invention

[0005] The object of the present invention is to provide a staggered hole processing method, which can remove burrs during the process of drilling a second hole without the need for an additional burr removal method, and has a better removal effect, low cost and high processing efficiency.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] The staggered hole processing method comprises the following steps:

[0008] S10: primary drilling: using a first drill bit to drill a second hole in the workpiece having the first hole, wherein the axis of the second hole is set at an angle to the first hole, so as to obtain the second hole that penetrates the first hole;

[0009] S20: secondary drilling: using a second drill bit to process the through second hole to remove burrs and obtain the rough-machined second hole, wherein the length of the second drill bit is greater than that of the first drill bit;

[0010] S30: Finishing: Finishing the rough-machined second hole to obtain the finished second hole.

[0011] Optionally, in step S20, the second drill bit is used to process the second through hole at least twice.

[0012] Optionally, in step S10, the length of the first drill bit is L1, 85mm≤L1≤90mm; in step S20, the length of the second drill bit is L2, 90mm≤L2≤110mm.

[0013] Optionally, the diameter of the second drill bit is greater than the diameter of the first drill bit.

[0014] Optionally, in step S10, the diameter of the first drill bit is D1, 3mm≤D1≤5mm; in step S20, the diameter of the second drill bit is D2, 5mm≤D2≤8mm.

[0015] Optionally, the rotation speed of the first drill bit during processing is n1, and the rotation speed of the second drill bit is n2, where n2=0.5n1.

[0016] Optionally, in step S30, fine-machining the rough-machined second hole includes step S31: fine-polishing the edge of the rough-machined second hole by using an inner hole brush.

[0017] Optionally, in the above step S30, the fine machining of the rough-machined second hole further includes step S32: fine reaming the hole wall of the rough-machined second hole with a reamer to obtain the finely machined second hole.

[0018] Optionally, the diameter of the rough-machined second hole is D3, the diameter of the reamer is D4, and D3+0.01mm≤D4≤D3+0.03mm.

[0019] Optionally, before step S10, the method further includes step S05: machining a first hole on the workpiece to be machined to form the workpiece to be machined having the first hole.

[0020] Beneficial effects of the present invention:

[0021] The present invention provides a staggered hole processing method, which uses a longer second drill bit to process the second hole and the first hole after a shorter first drill bit has processed the through hole. Since the second drill bit is longer, it will swing when processing the intersection of the first hole and the second hole, thereby knocking off the burrs and some sharp edges at the intersection of the first hole and the second hole, thereby achieving the effect of removing burrs. Finally, fine processing is performed to complete the processing of the second hole, and the processing of the staggered holes is completed. The burrs can be removed during the processing, and there is no need to use other deburring methods for deburring, which saves costs, improves processing efficiency, and has a better deburring effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a workflow diagram of a staggered hole processing method provided by a specific embodiment of the present invention;

[0023] Figure 2 is an axonometric view of the first drill bit during processing provided by a specific embodiment of the present invention;

[0024] Figure 3 is an axonometric view of the second drill bit during processing provided by a specific embodiment of the present invention;

[0025] Figure 4 It is an axonometric view of the inner hole brush processing provided by the specific embodiment of the present invention;

[0026] Figure 5 It is an axonometric view of the reamer during processing provided by a specific embodiment of the present invention;

[0027] Figure 6 It is a finished picture of a component after staggered hole processing according to the prior art of the present invention;

[0028] Figure 7 It is a finished product diagram of a component of a staggered hole processing method provided in a specific embodiment of the present invention.

[0029] In the figure:

[0030] 10. First drill bit; 20. Second drill bit; 30. Internal hole brush; 40. Reamer;

[0031] 200, workpiece to be processed; 210, first hole; 220, second hole; 300, burr. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplified operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0036] Refer to the following Figures 1 to 7 The invention discloses a staggered hole processing method.

[0037] It should be noted that the workpiece 200 to be processed is any structure that needs to be processed with staggered holes. In this embodiment, the workpiece 200 to be processed is a semiconductor structure that requires high precision, and the presence of the burr 300 affects the processing precision of the workpiece 200 to be processed.

[0038] Please refer to Figures 1 to 5 Specifically, the staggered hole processing method includes step S10: primary drilling: using a first drill bit 10 to drill a second hole 220 on a workpiece 200 having a first hole 210, the axis of the second hole 220 is set at an angle to the axis of the first hole 210, and a second hole 220 that penetrates the first hole 210 is obtained.

[0039] Step S10 also includes step S20: secondary drilling: using a second drill bit 20 to process the through second hole 220 to remove burrs 300 and obtain a rough-processed second hole 220, and the length of the second drill bit 20 is greater than the length of the first drill bit 10; when the second drill bit 20 is processing, the second drill bit 20 will swing near the first hole 210, so that the burrs 300 at the intersection of the first hole 210 and the second hole 220 can be removed.

[0040] Step S20 also includes step S30: finishing: finishing the roughly machined second hole 220 to obtain a finished second hole 220, thereby completing the machining of the second hole 220 and realizing the machining of the staggered holes.

[0041] The staggered hole processing method uses a longer second drill bit 20 to process the second hole 220 and the first hole 210 after the shorter first drill bit 10 has processed the through hole. Since the second drill bit 20 is longer, it will swing when processing the intersection of the first hole 210 and the second hole 220, thereby knocking off the burrs 300 and some sharp edges at the intersection of the first hole 210 and the second hole 220, thereby achieving the effect of removing the burrs 300. Finally, fine processing is performed to complete the processing of the second hole 220, and the processing of the staggered holes is completed. The burrs 300 can be removed during the processing, and there is no need to use other deburring methods to deburr, which saves costs, improves processing efficiency, and has a better deburring effect.

[0042] Please refer to Figure 6 and Figure 7 , which are respectively the finished product pictures of the workpiece 200 to be processed after the deburring 300 is processed by the prior art and the finished product pictures of the workpiece 200 to be processed after the staggered hole processing method of the present embodiment is adopted. It can be seen that the deburring 300 effect of the workpiece 200 to be processed after the staggered hole processing method of the present embodiment is better.

[0043] Please refer to Figures 1 to 3 Optionally, in step S20, the second drill bit 20 is used to process the through second hole 220 at least twice, so that the burrs 300 can be better removed. Exemplarily, in this embodiment, the second drill bit 20 is used to process the through second hole 220 twice, and the burrs 300 are removed twice, so that the burrs 300 at the intersection of the second hole 220 and the first hole 210 are basically removed.

[0044] Specifically, the length of the second drill bit 20 is greater than that of the first drill bit 10, that is, the first drill bit 10 uses a short drill bit and the second drill bit 20 uses a long drill bit, so that when the second drill bit 20 is used, one end close to the staggered position will swing, thereby removing the burr 300.

[0045] Optionally, in step S10, the length of the first drill bit 10 is L1, 85 mm ≤ L1 ≤ 90 mm; in step S20, the length of the second drill bit 20 is L2, 90 mm ≤ L2 ≤ 110 mm. The above dimensions are commonly used dimensions of the first drill bit 10 and the second drill bit 20.

[0046] For example, L1 may be 85 mm, 86 mm, 87 mm, 88 mm, 89 mm or 90 mm, and L2 may be 90 mm, 95 mm, 100 mm, 105 mm or 110 mm.

[0047] Specifically, the diameter of the second drill bit 20 is greater than the diameter of the first drill bit 10 , which ensures that the second hole 220 is drilled step by step until the design requirements are met.

[0048] Optionally, in step S10, the diameter of the first drill bit 10 is D1, 3mm≤D1≤5mm; in step S20, the diameter of the second drill bit 20 is D2, 5mm≤D2≤8mm. The above dimensions are commonly used dimensions of the first drill bit 10 and the second drill bit 20.

[0049] For example, D1 may be 3 mm, 4 mm or 5 mm, and D2 may be 5 mm, 6 mm, 7 mm or 8 mm.

[0050] Specifically, the first drill bit 10 has a rotation speed of n1, and the second drill bit 20 has a rotation speed of n2, where n2=0.5n1. The first drill bit 10 is used to drill the second hole 220, and a high rotation speed is not required. The second drill bit 20 is used to remove the burrs 300 by swinging, and appropriately increasing the rotation speed facilitates the swing of the second drill bit 20.

[0051] Optionally, the cutting speed of the second drill bit 20 is reduced when processing the junction between the first hole 210 and the second hole 220 , so that the burr 300 can be removed more cleanly.

[0052] Please refer to Figure 1 , Figure 4 and Figure 5 In this embodiment, in step S30, fine processing of the rough-machined second hole 220 includes step S31: fine polishing the edge of the rough-machined second hole 220 using the inner hole brush 30. This operation is because after the second drill bit 20 is processed, the edge of the intersection of the second hole 220 and the first hole 210 will be uneven and not smooth. Fine polishing the edge of the rough-machined second hole 220 by the inner hole brush 30 can achieve a more regular and beautiful edge of the rough-machined second hole 220.

[0053] Furthermore, in step S30, the fine processing of the rough-machined second hole 220 further includes step S32: fine reaming the hole wall of the rough-machined second hole 220 using a reamer 40 to obtain a finely machined second hole 220. In this way, the hole wall of the rough-machined second hole 220 can also be finely machined to obtain a finely machined second hole 220, thereby completing the processing of the second hole 220.

[0054] Optionally, the aperture of the rough-machined second hole 220 is D3, the diameter of the reamer 40 is D4, D3+0.01mm≤D4≤D3+0.03mm, and the fine machining of the rough-machined second hole 220 can be completed within this range. If the diameter is too large or too small, secondary burrs 300 will be generated, and the effect will be worse.

[0055] In this embodiment, step S05 is also included before step S10: processing the first hole 210 of the workpiece 200 to form the workpiece 200 having the first hole 210, so as to facilitate the subsequent processing of the second hole 220. At the same time, the problem of burrs 300 will also occur when the second hole 220 penetrates into the first hole 210.

[0056] Specifically, when processing the first hole 210, conventional hole-making steps such as drilling and reaming are performed on the workpiece 200 in sequence. Only a single hole is opened, and there are no staggered holes, so there is no need to perform deburring 300. Only when processing the second hole 220, since the second hole 220 and the first hole 210 are staggered, it is necessary to perform deburring 300 at the staggered position.

[0057] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A staggered hole processing method, characterized in that: The following steps are involved: S10: primary drilling: using a first drill bit (10) to drill a second hole (220) in a workpiece (200) having a first hole (210), wherein the axis of the second hole (220) is arranged at an angle to the axis of the first hole (210), thereby obtaining the second hole (220) that penetrates the first hole (210); S20: secondary drilling: using a second drill bit (20) to process the through second hole (220) to remove burrs (300) and obtain a roughly processed second hole (220), wherein the length of the second drill bit (20) is greater than the length of the first drill bit (10); S30: Finishing: Finishing the roughly machined second hole (220) to obtain a finished second hole (220).

2. The staggered hole processing method according to claim 1, characterized in that: In step S20, the second drill bit (20) is used to process the second through hole (220) at least twice.

3. The staggered hole processing method according to claim 1, characterized in that: In step S10, the length of the first drill bit (10) is L1, 85mm≤L1≤90mm; in step S20, the length of the second drill bit (20) is L2, 90mm≤L2≤110mm.

4. The staggered hole processing method according to claim 3, characterized in that: The diameter of the second drill bit (20) is greater than the diameter of the first drill bit (10).

5. The staggered hole processing method according to claim 4, characterized in that: In step S10, the diameter of the first drill bit (10) is D1, 3mm≤D1≤5mm; in step S20, the diameter of the second drill bit (20) is D2, 5mm≤D2≤8mm.

6. The staggered hole processing method according to claim 1, characterized in that: The rotation speed of the first drill bit (10) during processing is n1, and the rotation speed of the second drill bit (20) is n2, where n2=0.5n1.

7. The staggered hole processing method according to claim 1, characterized in that: In step S30, fine machining of the roughly machined second hole (220) includes step S31: fine polishing of the hole edge of the roughly machined second hole (220) using an inner hole brush (30).

8. The staggered hole processing method according to claim 7, characterized in that: In the step S30, the fine machining of the rough-machined second hole (220) further comprises a step S32: fine reaming the hole wall of the rough-machined second hole (220) using a reamer (40) to obtain a finely machined second hole (220).

9. The staggered hole processing method according to claim 8, characterized in that: The diameter of the roughly machined second hole (220) is D3, the diameter of the reamer (40) is D4, and D3+0.01mm≤D4≤D3+0.03mm.

10. The staggered hole processing method according to any one of claims 1 to 9, characterized in that: Before step S10, the method further includes step S05: machining the first hole (210) of the workpiece (200) to form the workpiece (200) having the first hole (210).

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