Three-gear air floatation control rapid moving device for objective table

Abstract

The invention relates to an objective table three-gear air floatation control rapid moving device which comprises a large supporting plate, a middle supporting plate, a small supporting plate and an X guide shaft support fixed to one side of the large supporting plate. The top of the large supporting plate and the top of the middle supporting plate are connected with the middle supporting plate and the small supporting plate in a sliding mode through crossed cylindrical roller guide rails respectively. An inner cavity of the X guide shaft support is rotationally connected with an X-direction guide shaft driven by a first driving mechanism. According to the three-gear air floatation control rapid moving device for the objective table, sliding friction is reduced according to the air floatation principle, the overall movement precision is higher, when the objective table needs to be moved for a long distance, through cooperation of pneumatic operation and rotation of the guide shaft, position adjustment can be rapidly conducted while accurate positioning is achieved, and the purposes of rapid movement and positioning are achieved.

Description

Technical Field

[0001] The invention relates to the technical field of air-floating movement, in particular to a three-stage air-floating controlled rapid movement device for a loading platform. Background Art

[0002] Air flotation is a principle that uses the air film generated by gas flow to reduce the contact area between an object and the ground, thereby achieving easy movement of the object. It is usually used in scenarios that require reducing friction, lowering motion resistance, or achieving precise position adjustment.

[0003] In actual application, the movement of the processing table or the carrier plate is often multi-directional, so it is necessary to design a control structure that independently controls the air-floating movement to ensure the stable movement of the carrier plate. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a three-speed air-floating controlled rapid moving device for a loading platform, which solves the above-mentioned problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a three-speed air-floating controlled rapid moving device for a stage, comprising a large pallet, a middle pallet, a small pallet and an X-guide shaft bracket fixed on one side of the large pallet, the tops of the large pallet and the middle pallet are slidably connected to the middle pallet and the small pallet respectively through cross cylindrical roller guides, the inner cavity of the X-guide shaft bracket is rotatably connected with an X-direction guide shaft driven by a first driving mechanism, the surface of the X-direction guide shaft is driven and connected with an X-direction pneumatic nut, one side of the X-direction pneumatic nut is fixedly connected with an X-direction connecting frame, the side edge of the X-direction connecting frame passes through the inner cavity of the X-direction guide shaft bracket and extends to the outside of the X-direction guide shaft bracket, the side edge of the X-direction connecting frame is fixedly connected to the side edge of the middle pallet, the side edge of the middle pallet is fixedly connected with a Y-guide shaft bracket, the inner cavity of the Y-guide shaft bracket is rotatably connected with a Y-direction guide shaft driven by a second driving mechanism, the surface of the Y-direction guide shaft is driven and connected with a Y-direction pneumatic nut, the Y-direction pneumatic nut One side of the pneumatic nut is fixedly connected with a Y-direction connecting frame, and the side edge of the Y-direction connecting frame penetrates the inner cavity of the Y-guide shaft bracket and extends to the outside of the Y-guide shaft bracket. The side edge of the Y-direction connecting frame is fixedly connected to the side edge of the small supporting plate. When in use, the X-direction guiding shaft bracket and the Y-guide shaft bracket are supplied with air by an external air pump, so that an air film is formed under the X-direction pneumatic nut and the Y-direction pneumatic nut to float, and then the X-direction guiding shaft is driven to rotate, the X-direction pneumatic nut is driven to make a linear motion, and the middle supporting plate is driven to move and adjust the X-direction orientation through the X-direction connecting frame, and then an air film is formed under the X-direction pneumatic nut and the Y-direction pneumatic nut to float, and then the Y-direction guiding shaft is driven to rotate, the Y-direction pneumatic nut is driven to make a linear motion, and the small supporting plate is driven to move and adjust the Y-direction orientation through the Y-direction connecting frame, so as to realize the single X-axis motion of the bearing plate, the single Y-axis motion, and the three-speed control of synchronous movement in the two directions of the X-axis and the Y-axis, thereby increasing the practicality of the equipment, reducing the sliding friction by the air flotation principle, and achieving higher overall motion accuracy;

[0006] It also includes calibration components which are respectively arranged in the inner cavities of the X-guide shaft bracket and the Y-guide shaft bracket.

[0007] As a further solution of the present invention: the sides of the X-guide shaft bracket and the Y-guide shaft bracket are both threadedly connected with brake nuts, and the brake nuts are rotated to enter the interior of the X-guide shaft bracket and the Y-guide shaft bracket, respectively abutting against the X-direction guide shaft and the Y-direction guide shaft for positioning and braking.

[0008] As a further solution of the present invention: the inner cavities of the X-guide axis bracket and the Y-guide axis bracket are connected to an external air pump through air inlet and air outlet pipes respectively.

[0009] As a further solution of the present invention: the large pallet, the middle pallet and the small pallet are stacked in sequence from bottom to top.

[0010] As a further solution of the present invention: the first driving mechanism and the second driving mechanism are driving motors or driving handles respectively connected to the X-axis guide shaft and the Y-axis guide shaft, which can electrically or manually drive the X-axis guide shaft and the Y-axis guide shaft to rotate, thereby driving the X-axis pneumatic nut and the Y-axis pneumatic nut to move.

[0011] As a further solution of the present invention: the calibration component includes a take-up wheel and a dynamometer driven by a motor, which are respectively arranged on the left and right sides of the inner cavity of the X-guide shaft bracket and the Y-guide shaft bracket, the surface of the take-up wheel is transmission-connected with a calibration wire connected to the force measuring end of the dynamometer, and both sides of the bottom of the X-axis pneumatic nut and the Y-axis pneumatic nut are rotatably connected with abutment wheels, and the bottom of the abutment wheel abuts against the surface of the calibration wire.

[0012] As a further solution of the present invention: when the X-direction pneumatic nut and the Y-direction pneumatic nut are inflated, the abutment wheel is located above the calibration wire, and the tension of the calibration wire is detected by a dynamometer to determine whether it is squeezed by the upper X-direction pneumatic nut and the Y-direction pneumatic nut. When the tension value changes, it can be determined that the displacement values ​​of the X-direction pneumatic nut and the Y-direction pneumatic nut are inaccurate, resulting in a Z-direction displacement, and when the X-direction pneumatic nut and the Y-direction pneumatic nut are not working, the X-direction pneumatic nut and the Y-direction pneumatic nut lose the air film below and fall, squeezing the surface of the calibration wire. At this time, the take-up wheel is driven by a driving motor to release the wire to prevent long-term squeezing and deformation. After inflation, the take-up wheel stops after the wire reaches the preset tension of the dynamometer, which can ensure that the calibration wire is error-free and will not affect the detection result.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. The present invention increases the practicability of the equipment by realizing a single X-axis movement, a single Y-axis movement, and a three-speed control of synchronous movement in the X-axis and Y-axis directions of the carrier plate, and utilizes the air flotation principle to reduce sliding friction, so that the overall movement accuracy is higher. Moreover, through the setting of the pneumatic nut, rapid movement and slow and precise positioning can be performed according to the position adjustment requirements. When it is necessary to move a large distance, the three bearing rings inside the pneumatic nut are kept horizontal to form a 90-degree angle with the guide shaft. At this time, the pneumatic nut can be driven by pneumatics to move quickly to the working position, and then the pneumatic nut and the guide shaft are locked. The pneumatic nut is driven by the rotation of the guide shaft to rotate for precise adjustment. When it is necessary to move a long distance, the pneumatic and guide shaft rotations are coordinated to achieve precise positioning and rapid position adjustment, thereby achieving the purpose of rapid movement and positioning.

[0015] 2. In the present invention, when the X-direction pneumatic nut and the Y-direction pneumatic nut are not working, the X-direction pneumatic nut and the Y-direction pneumatic nut lose the air film below and fall down, being squeezed on the surface of the calibration wire. At this time, the take-up wheel is driven by the driving motor to release the wire to prevent long-term squeezing and deformation. After inflation, the take-up wheel stops after the wire reaches the preset tension of the dynamometer, which can ensure that the calibration wire is error-free and will not affect the test result. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention;

[0017] Figure 2 It is a top view of the structure of the present invention;

[0018] Figure 3 It is a structural front view of the present invention;

[0019] Figure 4 For the present invention Figure 3 A partial enlarged view of point A in the middle.

[0020] In the figure: 1. large pallet; 2. middle pallet; 3. small pallet; 4. cross cylindrical roller guide; 5. X-guide shaft bracket; 6. Y-guide shaft bracket; 7. X-guide shaft; 8. X-connecting frame; 9. X-pneumatic nut; 10. Y-guide shaft; 11. Y-pneumatic nut; 12. Y-connecting frame; 13. second drive mechanism; 14. first drive mechanism; 15. abutment wheel; 16. take-up wheel; 17. calibration wire; 18. dynamometer. DETAILED DESCRIPTION

[0021] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0022] See also Figure 1-4The present invention provides a technical solution: a three-speed air-floating controlled rapid moving device for a stage, comprising a large pallet 1, a middle pallet 2, a small pallet 3 and an X-guide shaft bracket 5 fixed on one side of the large pallet 1, the tops of the large pallet 1 and the middle pallet 2 are respectively slidably connected with the middle pallet 2 and the small pallet 3 through a cross cylindrical roller guide 4, the inner cavity of the X-guide shaft bracket 5 is rotatably connected with an X-direction guide shaft 7 driven by a first driving mechanism 14, the surface of the X-direction guide shaft 7 is drive-connected with an X-direction pneumatic nut 9, and the X-direction pneumatic nut One side of the female 9 is fixedly connected with an X-axis connecting frame 8, the side of the X-axis connecting frame 8 passes through the inner cavity of the X-guide shaft bracket 5 and extends to the outside of the X-guide shaft bracket 5, the side of the X-axis connecting frame 8 is fixedly connected to the side of the middle support plate 2, the side of the middle support plate 2 is fixedly connected with the Y-guide shaft bracket 6, the inner cavity of the Y-guide shaft bracket 6 is rotatably connected with a Y-axis guide shaft 10 driven by a second driving mechanism 13, the surface of the Y-axis guide shaft 10 is driven and connected with a Y-axis pneumatic nut 11, and one side of the Y-axis pneumatic nut 11 is fixed A Y-axis connecting frame 12 is connected, and the side of the Y-axis connecting frame 12 passes through the inner cavity of the Y-guide shaft bracket 6 and extends to the outside of the Y-guide shaft bracket 6. The side of the Y-axis connecting frame 12 is fixedly connected to the side of the small support plate 3. When in use, an external air pump is used to supply air to the X-guide shaft bracket 5 and the Y-guide shaft bracket 6, so that an air film is formed under the X-axis pneumatic nut 9 and the Y-axis pneumatic nut 11 to float, and then the X-axis guide shaft 7 is driven to rotate, driving the X-axis pneumatic nut 9 to make a linear motion, and the X-axis connecting frame 8 is driven to drive the X-axis pneumatic nut 9 to move linearly. The moving support plate 2 moves to adjust the X-direction position, and then an air film is formed under the X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11 to float, and then the Y-direction guide shaft 10 is driven to rotate, driving the Y-direction pneumatic nut 11 to make a linear motion, and the small support plate 3 is driven to move and adjust the Y-direction position through the Y-direction connecting frame 12, so as to realize the single X-axis motion, single Y-axis motion, and three-speed control of the bearing plate for synchronous movement in the X-axis and Y-axis directions, thereby increasing the practicality of the equipment, using the air flotation principle to reduce sliding friction, and achieving higher overall motion accuracy;

[0023] It also includes calibration components which are respectively arranged in the inner cavities of the X-guide shaft bracket 5 and the Y-guide shaft bracket 6.

[0024] Braking nuts are threadedly connected to the sides of the X-guide shaft bracket 5 and the Y-guide shaft bracket 6. The braking nuts are rotated to enter the X-guide shaft bracket 5 and the Y-guide shaft bracket 6, and respectively abut against the X-direction guide shaft 7 and the Y-direction guide shaft 10 for positioning and braking.

[0025] The inner cavities of the X-guide axis bracket 5 and the Y-guide axis bracket 6 are connected to an external air pump through air inlet and air outlet pipes respectively.

[0026] The large pallet 1, the middle pallet 2 and the small pallet 3 are stacked in sequence from bottom to top.

[0027] The first driving mechanism 14 and the second driving mechanism 13 are driving motors or driving handles respectively connected to the X-axis guide shaft 7 and the Y-axis guide shaft 10, which can electrically or manually drive the X-axis guide shaft 7 and the Y-axis guide shaft 10 to rotate, thereby driving the X-axis pneumatic nut 9 and the Y-axis pneumatic nut 11 to move.

[0028] The calibration assembly includes a take-up wheel 16 and a dynamometer 18 driven by a motor, which are respectively arranged on the left and right sides of the inner cavity of the X-guide shaft bracket 5 and the Y-guide shaft bracket 6. The surface of the take-up wheel 16 is transmission-connected with a calibration wire 17 connected to the force measuring end of the dynamometer 18. Both sides of the bottom of the X-axis pneumatic nut 9 and the Y-axis pneumatic nut 11 are rotatably connected with abutment wheels 15, and the bottom of the abutment wheel 15 abuts against the surface of the calibration wire 17.

[0029] When the X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11 are inflated, the abutment wheel 15 is located above the calibration wire 17, and the tension of the calibration wire 17 is detected by the dynamometer 18 to determine whether it is squeezed by the upper X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11. When the tension value changes, it can be determined that the displacement values ​​of the X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11 are inaccurate, resulting in Z-direction displacement, and when the X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11 are not working, the X-direction pneumatic nut 9 and the Y-direction pneumatic nut 11 lose the air film below and fall down, and are squeezed on the surface of the calibration wire 17. At this time, the take-up wheel 16 is driven by the driving motor to release the wire to prevent long-term squeezing and deformation. After inflation, the take-up wheel 16 stops after the wire reaches the preset tension of the dynamometer 18, which can ensure that the calibration wire 17 is error-free and will not affect the detection result.

[0030] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A three-speed air-floating controlled rapid moving device for a stage, comprising a large support plate (1), a middle support plate (2), a small support plate (3) and an X-guide shaft bracket (5) fixed to one side of the large support plate (1), characterized in that: The tops of the large support plate (1) and the middle support plate (2) are slidably connected to the middle support plate (2) and the small support plate (3) respectively through cross cylindrical roller guide rails (4); the inner cavity of the X-guide shaft bracket (5) is rotatably connected to an X-direction guide shaft (7) driven by a first driving mechanism (14); the surface of the X-direction guide shaft (7) is drivably connected to an X-direction pneumatic nut (9); one side of the X-direction pneumatic nut (9) is fixedly connected to an X-direction connecting frame (8); the side of the X-direction connecting frame (8) passes through the inner cavity of the X-guide shaft bracket (5) and extends to the outside of the X-guide shaft bracket (5); the side of the X-direction connecting frame (8) is connected to the middle support plate (1) and the inner cavity of the X-guide shaft bracket (5) and the inner cavity of the X-guide shaft bracket (5) and the inner cavity of the X-guide shaft bracket (5) are connected to the inner cavity of the X-guide shaft bracket (5). The side of the middle support plate (2) is fixedly connected, the side of the middle support plate (2) is fixedly connected with a Y-guide shaft bracket (6), the inner cavity of the Y-guide shaft bracket (6) is rotatably connected with a Y-direction guide shaft (10) driven by a second driving mechanism (13), the surface of the Y-direction guide shaft (10) is drivably connected with a Y-direction pneumatic nut (11), one side of the Y-direction pneumatic nut (11) is fixedly connected with a Y-direction connecting frame (12), the side of the Y-direction connecting frame (12) passes through the inner cavity of the Y-guide shaft bracket (6) and extends to the outside of the Y-guide shaft bracket (6), and the side of the Y-direction connecting frame (12) is fixedly connected with the side of the small support plate (3); It also includes calibration components which are respectively arranged in the inner cavities of the X-guide shaft bracket (5) and the Y-guide shaft bracket (6).

2. The three-stage air-floating controlled rapid moving device for a stage according to claim 1, characterized in that: The sides of the X-guide shaft bracket (5) and the Y-guide shaft bracket (6) are both threadedly connected with brake nuts, and the brake nuts are rotated to enter the interior of the X-guide shaft bracket (5) and the Y-guide shaft bracket (6), respectively abutting against the X-direction guide shaft (7) and the Y-direction guide shaft (10) for positioning and braking.

3. The three-stage air-floating controlled rapid moving device for a stage according to claim 1, characterized in that: The inner cavities of the X-guide shaft bracket (5) and the Y-guide shaft bracket (6) are connected to an external air pump through air inlet and air outlet pipes respectively.

4. The three-stage air-floating controlled rapid moving device for a stage according to claim 1, characterized in that: The large pallet (1), the middle pallet (2) and the small pallet (3) are stacked in sequence from bottom to top.

5. The three-stage air-floating controlled rapid moving device for a stage according to claim 1, characterized in that: The first driving mechanism (14) and the second driving mechanism (13) are driving motors or driving handles respectively connected to the X-direction guide shaft (7) and the Y-direction guide shaft (10), and can electrically or manually drive the X-direction guide shaft (7) and the Y-direction guide shaft (10) to rotate, thereby driving the X-direction pneumatic nut (9) and the Y-direction pneumatic nut (11) to move.

6. The three-speed air-floating controlled rapid moving device for a stage according to claim 1, characterized in that: The calibration component comprises a wire take-up wheel (16) and a dynamometer (18) driven by a motor, which are respectively arranged on the left and right sides of the inner cavity of the X-guide shaft bracket (5) and the Y-guide shaft bracket (6); the surface of the wire take-up wheel (16) is transmission-connected with a calibration wire (17) connected to the force measuring end of the dynamometer (18); both sides of the bottom of the X-direction pneumatic nut (9) and the Y-direction pneumatic nut (11) are rotationally connected with abutment wheels (15); the bottom of the abutment wheel (15) abuts against the surface of the calibration wire (17).

7. The three-stage air-floating controlled rapid moving device for a stage according to claim 6, characterized in that: When the X-direction pneumatic nut (9) and the Y-direction pneumatic nut (11) are inflated, the abutment wheel (15) is located above the calibration wire (17).

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