Source bottle and thin film deposition equipment

Abstract

The invention provides a source bottle and thin film deposition equipment, and relates to the technical field of thin film deposition. The source bottle comprises a shell and a tray group, wherein an air inlet through hole and an air outlet through hole are formed in the shell; the tray set comprises a plurality of trays which are sequentially arranged in the shell in a stacked mode. Each of the plurality of trays comprises a spiral channel; the air inlet through hole, the spiral channels of the trays and the air outlet through hole are sequentially communicated. The source bottle is used for fully mixing carrier gas and precursor steam in the source bottle, so that the concentration of the conveyed precursor steam is improved, and the product quality is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film deposition, and in particular to a source bottle and thin film deposition equipment. Background Art

[0002] A source bottle is a device used to transport precursors to a thin film deposition reactor. Precursor particles are heated in the source bottle to generate precursor vapor, which is transported to the reactor under the action of the carrier gas entering the source bottle. With the development of deposition materials, source bottles have been more widely used in chemical vapor deposition (CVD), atomic layer deposition (ALD) and other equipment.

[0003] However, the existing source bottle has the problem that the carrier gas and the precursor vapor in the source bottle cannot be fully mixed, which will result in a low concentration of the delivered precursor vapor and affect the product quality. Summary of the invention

[0004] The object of the present invention is to provide a source bottle and a thin film deposition device, which are used to fully mix the carrier gas in the source bottle with the precursor vapor, improve the concentration of the transported precursor vapor, and ensure the product quality.

[0005] To achieve this object, the present invention provides the following technical solutions:

[0006] On the one hand, a source bottle is provided. The source bottle comprises a shell and a tray group. The shell is provided with an air inlet hole and an air outlet hole; the tray group comprises a plurality of trays stacked in sequence in the shell; the plurality of trays each comprises a spiral channel; the air inlet hole, the spiral channels of the plurality of trays, and the air outlet hole are connected in sequence.

[0007] In some embodiments, the air inlet through hole and the air outlet through hole are arranged on the same side of the shell.

[0008] In some embodiments, the plurality of trays include a first tray (21), a second tray (22) and a third tray (23) arranged in sequence; the first tray and the second tray each include an air inlet channel separated from the spiral channel; the air inlet hole, the air inlet channel of the first tray, the air inlet channel of the second tray, the spiral channel of the third tray, the spiral channel of the second tray, the spiral channel of the first tray and the air outlet hole are connected in sequence.

[0009] In some embodiments, the first tray, the second tray and the third tray each include a bottom plate, a side plate and a baffle; the side plate is arranged on the bottom plate, the baffle is arranged in the internal space enclosed by the side plate and the bottom plate, and the baffle defines the internal space as the open spiral channel; the first tray and the second tray each include a partition, and the partition and the baffle form the air inlet channel; the bottom plate of the first tray and the bottom plate of the second tray are both provided with an air inlet and an air outlet, the air inlet is connected to the air inlet channel of the corresponding tray, and the air outlet is connected to the spiral channel of the corresponding tray.

[0010] In some embodiments, the number of the third tray is 1; the number of the first tray and the second tray is the same, and the number of both is at least 1; when the number of the first tray and the second tray are both multiple, the second tray and the first tray are stacked alternately in sequence in the first direction.

[0011] In some embodiments, the third tray and the plurality of second trays and first trays that are alternately stacked in sequence are arranged in decreasing heights in the first direction.

[0012] In some embodiments, the third tray, the second tray, and the first tray are arranged in decreasing heights in a first direction.

[0013] In some embodiments, a gas permeable plate is provided in the spiral channel, gas permeable holes are provided on the gas permeable plate, and the gas permeable plate divides the spiral channel into multiple parts; gas permeable holes are provided on the gas permeable plate; precursor particles are loaded in the spiral channel, and the opening size of the gas permeable holes is smaller than the size of the precursor particles.

[0014] In some embodiments, the plurality of trays each include a bottom plate; and in two adjacent trays, there is a gap between the air permeable plate of the tray located at the bottom and the bottom plate of the tray located at the top.

[0015] In some embodiments, the sum of the heights of the plurality of trays is the same as the height of the inner wall of the shell.

[0016] On the other hand, a thin film deposition device is provided, which includes a carrier gas delivery pipeline, a precursor heating system, a reactor and the source bottle described in any of the above embodiments; a solid precursor is loaded in the source bottle, and the precursor heating system is used to heat the solid precursor in the source bottle to form a precursor vapor; the carrier gas delivery pipeline is connected to the air inlet hole of the source bottle, and is used to introduce carrier gas into the source bottle; the air outlet hole of the source bottle is connected to the reactor, and the precursor vapor can enter the reactor along with the carrier gas.

[0017] Beneficial effects of the present invention:

[0018] On the one hand, the present invention provides a source bottle, which has an air inlet through hole and an air outlet through hole on the shell, and a tray group including a plurality of trays stacked in sequence is arranged in the shell, and spiral channels are arranged on the plurality of trays, and the air inlet channel, the spiral channels of the plurality of trays, and the air outlet channel are connected in sequence. In this way, after the carrier gas passes into the interior of the source bottle through the air inlet through hole, it can flow in a swirling manner along the spiral channels of the plurality of trays in sequence, and after flowing through the spiral channels of all the trays arranged in the shell, the carrier gas flows out through the air outlet through hole, which greatly prolongs the flow path of the carrier gas inside the source bottle, increases the contact time between the carrier gas and the precursor vapor, enables the carrier gas to be fully mixed with the precursor vapor inside the source bottle, and makes the output precursor vapor have a higher concentration, thereby ensuring the product quality.

[0019] On the other hand, the present invention provides a thin film deposition device, which has all the technical features of the above-mentioned source bottle and has the same beneficial effects as the above-mentioned source bottle, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A structural diagram of a source bottle provided in a specific embodiment of the present invention;

[0021] Figure 2 for Figure 1 A cross-sectional view of the structure shown along the AA direction;

[0022] Figure 3 It is an exploded structural diagram of a source bottle provided by a specific embodiment of the present invention;

[0023] Figure 4 It is an exploded structural diagram of a first tray, a second tray and a third tray provided in a specific embodiment of the present invention.

[0024] In the figure:

[0025] 1, shell; 11, cover plate; 111, air inlet hole; 112, air outlet hole; 12, cylinder;

[0026] 2, tray; 21, first tray; 22, second tray; 23, third tray; 211, spiral channel; 212, air inlet channel; 213, bottom plate; 2131, air inlet; 2132, air outlet; 214, side plate; 215, baffle; 216, partition; 217, air permeable plate;

[0027] X1, first direction. DETAILED DESCRIPTION

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0029] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present invention, unless otherwise clearly stipulated and limited, a first feature being “on” or “below” a second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them.

[0031] In addition, the terms “first” and “second” are merely used for distinction in description and have no special meanings.

[0032] Combination Figure 1 , Figure 2 As shown, the present invention provides a source bottle, which includes a shell 1 and a tray group. The shell 1 is provided with an air inlet hole 111 and an air outlet hole 112, and the tray group is arranged in the shell 1. It can be understood that the shell 1 can be composed of two parts arranged along the first direction X1, for example, a cover plate 11 and a cylinder 12, or two semi-shell cylinders 12. As long as it can accommodate the tray group, the specific structure of the shell 1 is not too much restricted here. The following is a specific description taking the shell 1 consisting of a cover plate 11 and a cylinder 12 arranged in the first direction X1 as an example.

[0033] like Figure 2 As shown, the housing 1 includes a cover plate 11 and a cylinder 12. The cylinder 12 is a columnar structure with a storage space inside. The cylinder 12 has an opening that can connect the internal storage space with the outside. The cover plate 11 is a plate-shaped structure. The cover plate 11 is adapted to the opening of the cylinder 12, that is, the shape and size of the cover plate 11 are the same as the shape and size of the opening of the cylinder 12. The cover plate 11 can at least completely cover the opening of the cylinder 12. The cover plate 11 is provided with an air inlet hole 111 and an air outlet hole 112. When the cover plate 11 covers the open part of the cylinder 12, the air inlet hole 111 and the air outlet hole 112 connect the internal storage space of the cylinder 12 with the outside.

[0034] The above-mentioned tray group includes a plurality of trays 2 stacked in sequence in the shell 1; the plurality of trays 2 each include a spiral channel 211, and the openings of the plurality of spiral channels 211 are all arranged toward the air inlet through hole 111. The above-mentioned air inlet through hole 111, the spiral channels 211 of the plurality of trays 2, and the air outlet through hole 112 are connected in sequence. For example, two trays 2 are arranged in the tray group, and the two trays 2 each have a spiral channel 211 opening toward the air inlet through hole 111. For the convenience of description, the two trays 2 are named as tray No. 1 2 and tray No. 2 2, so it can be understood that after tray No. 1 2 and tray No. 2 2 are stacked in sequence in the shell 1 along the first direction X1, the air inlet through hole 111 of the shell 1, the spiral channel 211 of tray No. 2 2, the spiral channel 211 of tray No. 1 2, and the air outlet through hole 112 of the shell 1 are connected in sequence. At this time, the flow path of the carrier gas is: the air inlet hole 111, the spiral channel 211 of the No. 2 tray 2, the spiral channel 211 of the No. 1 tray 2, and the air outlet hole 112. The air inlet hole 111 and the air outlet hole 112 are located on different sides of the housing 1.

[0035] The present invention provides a source bottle, which is provided with an air inlet hole 111 and an air outlet hole 112 on a shell 1, and a tray group including a plurality of trays 2 stacked in sequence is arranged in the shell 1, and a spiral channel 211 is arranged on each of the plurality of trays 2, and the air inlet channel 111, the spiral channels 211 of the plurality of trays 2, and the air outlet channel 112 are connected in sequence. Through the above arrangement, after the carrier gas passes into the interior of the source bottle through the air inlet hole 111, it can flow in a swirling manner along the spiral channels 211 of the plurality of trays 2 in sequence, and after flowing through the spiral channels 211 of all the trays 2 arranged in the shell 1, the carrier gas flows out through the air outlet hole 112, which greatly prolongs the flow path of the carrier gas in the source bottle, increases the contact time between the carrier gas and the precursor vapor, enables the carrier gas to be fully mixed with the precursor vapor in the source bottle, and makes the output precursor vapor have a higher concentration, thereby ensuring the product quality.

[0036] It is understandable that the air inlet hole 111 and the air outlet hole 112 can be arranged on the same side of the housing 1. Continuing with the example of two trays 2 arranged in the tray group, the two trays 2 are also provided with air outlet channels, the air outlet channel of tray No. 2 is connected to the air outlet hole 111 but is separated from its own spiral channel 211, and the air outlet channel of tray No. 1 is connected to its own spiral channel 211 and is also connected to the air outlet channel of tray No. 2. After the carrier gas flows downward from the spiral channel 211 of tray No. 2 to the spiral channel 211 of tray No. 1, it can flow upward through the air outlet channel of tray No. 1 to the air outlet channel of tray No. 2, and then flow out through the air outlet hole 112 arranged on the same side as the air inlet hole 111. Of course, this is only an example of an implementation method in which the air inlet hole 111 and the air outlet hole 112 are arranged on the same side of the shell 1. Other methods can also be used to implement this arrangement. For example, an air outlet pipe is directly connected to the spiral channel 211 of tray No. 1 2, and the air outlet end of the air outlet pipe is connected to the air outlet hole 112. In this way, the air inlet hole 111 and the air outlet hole 112 can also be arranged on the same side, which will not be described in detail here.

[0037] By arranging the air inlet hole 111 and the air outlet hole 112 on the same side of the shell 1, it is convenient to connect the carrier gas delivery pipeline and the precursor delivery pipeline, facilitate the arrangement of the source bottle, and improve the convenience of using the source bottle.

[0038] like Figure 2 As shown, the plurality of trays 2 include a first tray 21, a second tray 22 and a third tray 23 sequentially arranged in the housing 1. It can be understood that the three trays 2 of the tray group are stacked in a preset order in the accommodation space inside the cylinder 12, and the three trays 2 of the tray group can all hold precursor particles, and the side of the tray 2 facing the cover plate 11 is used to load the precursor particles.

[0039] Combination Figure 3 , Figure 4 As shown, it can be understood that the structures of the first tray 21, the second tray 22 and the third tray 23 are not completely the same.

[0040] Specifically, Figure 3As shown, the first tray 21, the second tray 22 and the third tray 23 all include a spiral channel 211. The function of the spiral channels 211 provided on the three trays is to make the carrier gas swirl and flow inside the source bottle, and the first tray 21 and the second tray 22 also include an air inlet channel 212 separated from the spiral channel 211. In other words, the first tray 21 and the second tray 22 are both provided with an air inlet channel 212 and a spiral channel 211, and the air inlet channel 212 is not connected to the spiral channel 211; the third tray 23 is only provided with a spiral channel 211, and no air inlet channel 212 is provided. The above-mentioned air inlet through hole 111, the air inlet channel 212 of the first tray 21, the air inlet channel 212 of the second tray 22, the spiral channel 211 of the third tray 23, the spiral channel 211 of the second tray 22, the spiral channel 211 of the first tray 21 and the air outlet through hole 112 are connected in sequence.

[0041] The spiral channels 211 mentioned above all have an air inlet end and an air outlet end, and the air inlet channels 212 also have an air inlet end and an air outlet end. Figure 3 , Figure 4 As shown ( Figure 4 The dotted arrow in the middle indicates the carrier gas flow direction). After the first tray 21, the second tray 22 and the third tray 23 are stacked and arranged in a preset order, the air inlet hole 111 opened in the above-mentioned cover plate 11 is connected to the air inlet end of the air inlet channel 212 of the first tray 21, the air outlet end of the air inlet channel 212 of the first tray 21 is connected to the air inlet end of the air inlet channel 212 of the second tray 22, the air outlet end of the air inlet channel 212 of the second tray 22 is connected to the air inlet end of the spiral channel 211 of the third tray 23, the air outlet end of the spiral channel 211 of the third tray 23 is connected to the air inlet end of the spiral channel 211 of the above-mentioned second tray 22, the air outlet end of the spiral channel 211 of the second tray 22 is connected to the air inlet end of the spiral channel 211 of the above-mentioned first tray 21, and the air outlet end of the spiral channel 211 of the first tray 21 is connected to the air outlet hole 112 opened in the above-mentioned cover plate 11, thereby realizing the connection of the carrier gas flow path inside the entire source bottle.

[0042] Through the above arrangement, the carrier gas introduced into the source bottle from the air inlet hole 111 of the cover plate 11 can first flow to the third tray 23 along the air inlet channel 212 of the first tray 21 and the air inlet channel 212 of the second tray 22, and swirl in the spiral channel 211 of the third tray 23; then, the carrier gas flows from the spiral channel 211 of the third tray 23 to the second tray 22, and swirls in the spiral channel 211 of the second tray 22; further, the carrier gas flows from the spiral channel 211 of the second tray 22 to the first tray 21, and swirls in the spiral channel 211 of the first tray 21, and finally the carrier gas is discharged through the air outlet hole 112 opened on the cover plate 11 and connected to the spiral channel 211 of the first tray 21. The flow path of the carrier gas inside the source bottle is greatly increased, the contact time between the carrier gas and the precursor vapor is increased, the carrier gas and the precursor vapor are fully mixed, and the transported precursor vapor is ensured to have a high concentration, thereby ensuring product quality.

[0043] Combine the following Figure 3 , Figure 4 As shown, the structures of the first tray 21, the second tray 22 and the third tray 23 are described in detail.

[0044] The first tray 21, the second tray 22 and the third tray 23 all include a bottom plate 213, a side plate 214 and a baffle 215. The shape and size of the bottom plate 213 are adapted to the cylinder 12, that is, when the bottom plate 213 and the bottom wall of the cylinder 12 are in a parallel state, the bottom plate 213 can be smoothly placed in the internal space of the cylinder 12, where the cylinder 12 is, for example, a cylinder, and the shape of the bottom plate 213 is circular. The side plate 214 is a structure formed by bending and connecting the opposite sides of a rectangular plate, and it can also be understood that the side plate 214 is a circular ring structure with a certain height in the first direction X1. The baffle 215 is a spiral structure with a certain height in the first direction X1.

[0045] The side plate 214 is arranged on the bottom plate 213, that is, the side plate 214 is arranged on the side of the bottom plate 213 facing the cover plate 11. The baffle plate 215 is arranged in the internal space enclosed by the side plate 214 and the bottom plate 213, and is arranged in this way so that the baffle plate 215 can define the internal space enclosed by the side plate 214 and the bottom plate 213 as a spiral channel 211 with an opening, and the opening of the spiral channel 211 points to the cover plate 11. The precursor particles can be evenly distributed on the inner side wall of the spiral channel 211, that is, the precursor particles can be evenly distributed on the inner side wall of the side plate 214, the inner side wall of the bottom plate 213 and the side wall of the baffle plate 215.

[0046] like Figure 3As shown, the first tray 21 and the second tray 22 further include a partition 216. The partition 216 may be a rectangular plate-like structure, and the partition 216 is arranged inside the spiral channel 211, and two of the opposite sides of the partition 216 are in contact with the baffle 215, and one of the other two opposite sides of the partition 216 is in contact with the bottom plate 213. In the first direction X1, the height of the partition 216 is the same as the height of the baffle 215. The partition 216 and the baffle 215 can form an air inlet channel 212. The partition 216 is connected to the end of the baffle 215, and the air inlet channel 212 is located in the middle of the tray. Of course, the partition 216 may also be a plate-like structure of other shapes, for example, the partition 216 is a curved plate-like structure, as long as the partition 216 can form the air inlet channel 212 with the baffle 215 after being arranged as described above, and the specific shape of the partition 216 is not limited too much here.

[0047] like Figure 4 As shown, an air inlet 2131 and an air outlet 2132 are provided on the bottom plate 213 of the first tray 21 and the bottom plate 213 of the second tray 22. The air inlet 2131 is adapted to the air inlet channel 212. For example, the shape and size of the air inlet 2131 are the same as the shape and size of the air inlet channel 212, such as the shape and size of the cross-sectional diagram of the air inlet channel 212 (the cross-sectional direction here is perpendicular to the extension direction of the air inlet channel 212). The shape of the air outlet 2132 is, for example, circular or rectangular. The size of the air outlet 2132 is not excessively restricted herein, but the outline of the orthographic projection of the air outlet 2132 on the cover plate 11 should be within the outline of the orthographic projection of the opening of the spiral channel 211 on the cover plate 11.

[0048] The air inlet 2131 is connected to the air inlet channel 212 of the corresponding tray, and the air outlet 2132 is connected to the spiral channel 211 of the corresponding tray. Figure 3 , Figure 4 As shown, the air inlet 2131 opened on the bottom plate 213 of the first tray 21 is connected to the air inlet channel 212 of the first tray 21, and the air inlet hole opened on the bottom plate 213 of the second tray 22 is connected to the air inlet channel 212 of the second tray 22; the air outlet 2132 opened on the bottom plate 213 of the first tray 21 is connected to the spiral channel 211 of the first tray 21, and the air outlet 2132 opened on the bottom plate 213 of the second tray 22 is connected to the spiral channel 211 of the second tray 22.

[0049] In the above-mentioned source bottle, by setting the structure of the first tray 21, the second tray 22 and the third tray 23 as a bottom plate 213, a side plate 214 arranged on the bottom plate 213 and a baffle 215 arranged in the internal space surrounded by the bottom plate 213 and the side plate 214, the first tray 21, the second tray 22 and the third tray 23 can all form a spiral channel 211, and the spiral channel 211 is designed to be open, and can be sealed after the above-mentioned three types of trays 2 are stacked in sequence. The structure is simple, easy to install or disassemble, and convenient for loading the precursor particles into the tray group. At the same time, the above-mentioned source bottle is also provided with a partition 216 on the first tray 21 and the second tray 22. The partition 216 and the baffle 215 can form an air inlet channel 212. An air inlet 2131 and an air outlet 2132 are opened on the bottom plate 213 of the first tray 21 and the second tray 22, and the air inlet 2131 is connected with the air inlet channel 212 of the corresponding tray, and the air outlet 2132 is connected with the spiral channel 211 of the corresponding tray, thereby ensuring the smooth flow path of the carrier gas in the source bottle. The structure is simple and convenient for processing and manufacturing.

[0050] like Figure 3 As shown, the number of the third tray 23 in the above-mentioned tray group is 1, the number of the first tray 21 and the second tray 22 is the same and the number of both is at least 1; when the number of the first tray 21 and the second tray 22 are both plural, the second tray 22 and the first tray 21 are stacked alternately in the first direction X1. It is not difficult to understand that there is always only one third tray 23 in the tray group, and the third tray 23 is arranged close to the bottom wall of the above-mentioned cylinder 12. When the number of the first tray 21 is 1, the number of the second tray 22 remains the same as the number of the first tray 21, that is, the number of the second tray 22 is also 1. At this time, in the first direction X1, the tray group is stacked in the order of the third tray 23, the second tray 22, and the first tray 21; when the number of the first tray 21 is plural (for example, 2), the number of the second tray 22 is the same as the first tray 21. The number of first trays 21 remains the same, that is, the number of second trays 22 is also 2, and at this time, in the first direction X1, the second trays 22 and the first trays 21 are alternately stacked (for the convenience of description, the two first trays 21 and the two second trays 22 are respectively divided into No. 1 and No. 2 in the order of the first direction X1), that is, in the first direction X1, the tray group is stacked in the order of the third tray 23, the No. 1 second tray 22, the No. 1 first tray 21, the No. 2 second tray 22, and the No. 2 first tray 21. When the number of first trays 21 and second trays 22 is other, the multiple trays in the tray group are also stacked according to the above concept, and no more description is given here.

[0051] In the above-mentioned source bottle, by setting the number of the third tray 23 to 1, setting the number of the second tray 22 and the first tray 21 to be the same and at least 1 respectively, and when the number of the first tray 21 and the second tray 22 are both plural, the two trays 2 are stacked alternately in sequence in the first direction X1. In this way, when it is necessary to further increase the capacity of the precursor particles in the source bottle or extend the flow path of the carrier gas according to the carrier gas introduction speed, the same number of first trays 21 and second trays 22 can be directly added, and the barrel 12 can be adaptively replaced according to the number of increased trays 2, without redesigning or substantially modifying the source bottle, saving the design or manufacturing cost, and improving the applicability of the source bottle.

[0052] In some embodiments, Figure 3 As shown, a gas permeable plate 217 is arranged in the spiral channel 211. The gas permeable plate 217 is in a rectangular plate structure. The gas permeable plate 217 is arranged inside the spiral channel 211, and two of the opposite sides of the gas permeable plate 217 are in contact with the baffle 215, and one of the other two opposite sides of the gas permeable plate 217 is in contact with the bottom plate 213. The gas permeable plate 217 is provided with gas permeable holes, and the shape of the gas permeable holes is, for example, circular or rectangular, and the opening size of the gas permeable holes is smaller than the size of the precursor particles, for example, the aperture of the gas permeable holes is less than 1 mm. The gas permeable plate 217 can separate the spiral channel 211 into multiple parts.

[0053] In the above-mentioned source bottle, through the above-mentioned setting, the precursor particles in the spiral channel 211 are divided into multiple parts by the air permeable plate 217, so that when the source bottle is in use, the precursor vapor formed after heating can flow smoothly through the air permeable plate 217 under the driving effect of the carrier gas, and the precursor particles in each part of the spiral channel 211 will be blocked by the air permeable plate 217, so as to prevent the precursor particles from being discharged under the driving effect of the carrier gas, thereby preventing the valve provided in the subsequent air outlet pipeline connected to the air outlet through hole 112 from being blocked, thereby ensuring the normal operation of the thin film deposition equipment. At the same time, it can also prevent a part of the precursor particles from being driven by the faster flow rate of the carrier gas and all accumulating at the air permeable plate 217, and the accumulated precursor particles will block the air holes on the air permeable plate 217, affecting the efficiency of precursor vapor transportation.

[0054] It is not difficult to understand that the number of air permeable plates 217 can be set according to the size of the tray 2 and the flow rate of the carrier gas entering the source bottle. That is, when the size of the tray 2 is large and the corresponding spiral channel 211 is also long, but the flow rate of the carrier gas entering the source bottle is slow, the number of air permeable plates 217 can be appropriately reduced to reduce the influence of the air permeable plates 217 on the flow rate of the carrier gas, thereby avoiding the flow rate of the carrier gas at the outlet hole 112 being too slow, thereby affecting the efficiency of the precursor output; and when the size of the tray 2 is small and the corresponding spiral channel 211 is also short, but the flow rate of the carrier gas entering the source bottle is fast, the number of air permeable plates 217 can be appropriately increased to improve the blocking effect on the precursor particles, while dividing the precursor particles in the spiral channel 211 into more parts, and the number of precursor particles in each individual part will be reduced.

[0055] In some embodiments, Figure 2 As shown, the plurality of trays 2 each include a bottom plate 213, and there is a gap between the air permeable plate 217 of the tray 2 located at the bottom of the two adjacent trays 2 and the bottom plate 213 of the tray 2 located at the top, that is, in the first direction X1, there is a gap between the air permeable plate 217 of the tray close to the bottom wall of the cylinder 12 and the bottom plate 213 of the tray close to the cover plate 11 of the two adjacent trays 2. In other words, the air permeable plate 217 is arranged in the spiral channel 211 of the tray 2 and one side of the air permeable plate 217 is in contact with the bottom plate 213 of the tray 2, and the other side opposite to the side has a certain gap with the bottom plate 213 of another tray 2 stacked on the tray 2. That is, in a single tray 2, one side of the air permeable plate 217 is in contact with the bottom plate 213 of the tray 2, and in the first direction X1, the height of the air permeable plate 217 is slightly lower than the height of the baffle 215 arranged on the tray 2.

[0056] It is not difficult to understand that in the first direction X1, in a tray 2 that is closest to the above-mentioned cover plate 11, one side edge of the air permeable plate 217 of the tray 2 is in contact with the bottom plate 213 of the tray 2, and at the same time, the other side edge opposite to the side edge also has a certain gap with the cover plate 11.

[0057] In the above-mentioned source bottle, through the above-mentioned arrangement, the precursor vapor formed after heating can flow through the gap between the air permeable plate 217 and the bottom plate 213 of another adjacent tray 2, which can improve the transportation efficiency of the precursor vapor while blocking the precursor particles.

[0058] In some embodiments, Figure 3 , Figure 4As shown, in the first direction X1, the second tray 23, the second tray 22 and the first tray 21 are arranged in descending height. In other words, the height of the tray 2 closer to the bottom wall of the cylinder 12 in the tray group is greater than the height of the tray 2 closer to the cover plate 11 in the tray group, that is, the height of the tray 2 closer to the bottom wall of the cylinder 12 in the tray group is higher, and the height of the tray 2 closer to the cover plate 11 is lower. For example, when only one first tray 21, one second tray 22 and one third tray 23 are arranged in the tray group, the height relationship of the multiple trays 2 in the tray group is: the height of the third tray 23> the height of the second tray 22> the height of the first tray 21.

[0059] When a plurality of first trays 21 and second trays 22 are provided in the tray group, the third tray 23 and a plurality of second trays 22 and first trays 21 alternately stacked in sequence are arranged in decreasing height in the first direction X1. Specifically, for example, when two first trays 21, two second trays 22 and one third tray 23 are provided in the tray group, the plurality of trays 2 are stacked first according to the stacking order of the trays 2 described above. It is not difficult to understand that the stacking order in the first direction X1 is (for the convenience of description, the two first trays 21 and the two second trays 22 are respectively divided into No. 1 and No. 2 according to the order of the first direction X1): the third tray 23, the No. 1 second tray 22, the No. 1 first tray 21, the No. 2 second tray 22, the No. 2 first tray 21, then at this time, the height relationship of each tray 2 in the tray group is: the height of the third tray 23> the height of the No. 1 second tray 22> the height of the No. 1 first tray 21> the height of the No. 2 second tray 22> the height of the No. 2 first tray 21. When the number of the first tray 21 and the second tray 22 is other than the number of the first tray 21 and the second tray 22, the heights of the plurality of trays 2 in the tray group are also set according to the above concept, and no further description will be given here.

[0060] It can be understood that after the carrier gas enters the source bottle through the air inlet hole 111 on the cover plate 11, it first flows into the spiral channel 211 of the tray 2 close to the bottom wall of the cylinder 12, and finally flows into the spiral channel 211 of the tray 2 close to the cover plate 11. With the increase of the flow path and the barrier effect of the air permeable plate 217, compared with the spiral channel 211 of the tray 2 close to the cover plate 11, the carrier gas flow rate in the spiral channel 211 of the tray 2 close to the bottom wall of the cylinder 12 is greater, the transportation speed of the precursor vapor is faster, and then the consumption speed of the precursor particles is also faster.

[0061] Therefore, in the above-mentioned source bottle, by setting the heights of the multiple trays 2 in the tray group in a decreasing manner in the first direction X1, the height of the tray 2 close to the bottom wall of the cylinder 12 is higher than that of the tray 2 close to the cover plate 11. In this way, the inner wall area of ​​the spiral channel 211 of the tray is larger, and more precursor particles can be distributed in the spiral channel 211, so that the consumption progress of the precursor particles in the spiral channels 211 of the multiple trays 2 in the tray group can be kept consistent, thereby avoiding the situation where the precursor particles in the spiral channel 211 are consumed prematurely, ensuring the concentration of the precursor transported by the source bottle, and thus ensuring the product quality.

[0062] In some embodiments, Figure 2 As shown, the sum of the heights of the plurality of trays 2 is the same as the height of the inner wall of the housing 1. Through the above arrangement, the tray group including the plurality of trays 2 can be adapted to the housing 1, and the tray group can be completely stacked and arranged inside the housing 1, ensuring that the housing 1 can be tightly closed. At the same time, the bottom plate 213 of the upper tray 2 is tightly connected with the side plate 214 and the baffle plate 215 of the next tray 2, so that the spiral channel 211 is closed.

[0063] Of course, when the number of first trays 21 and second trays 22 in the tray group increases, the height of the inner wall of the shell 1 in the first direction X1 should also be adaptively increased. Here, the method of increasing the inner wall of the shell 1 is, for example: replacing the original cylinder 12 with a cylinder 12 of a higher height; or, providing a plurality of sub-cylinders with the same height as the increased first tray 21 and the second tray 22, and stacking the plurality of sub-cylinders on the original cylinder 12; or, providing the cylinder 12 with a structure that is retractable in the first direction X1, so that it can be adaptively retracted and adjusted according to the increased height of the first tray 21 and the second tray 22.

[0064] In some embodiments, Figure 2As shown, the bottom plate 213 of the first tray 21 is closely connected with the side plate 214, the baffle 215 and the partition 216 of the second tray 22; the bottom plate 213 of the second tray 22 is closely connected with the side plate 214 and the baffle 215 of the third tray 23. In other words, when the first tray 21, the second tray 22 and the third tray 23 in the tray group are stacked and arranged in the above-mentioned shell 1 according to a preset order, the upper end surface of the side plate 214 of the second tray 22, the upper end surface of the baffle 215 and the upper end surface of the partition 216 are respectively in contact with the lower surface of the bottom plate 213 of the first tray 21; the upper end surface of the side plate 214 of the third tray 23 and the upper end surface of the baffle 215 are respectively in contact with the lower surface of the bottom plate 213 of the second tray 22. Through the above arrangement, when multiple trays of the tray group are stacked and arranged in the shell 1, the interior of each spiral channel 211 is isolated from the external environment, thereby preventing the source bottle from leaking the carrier gas or the precursor vapor during use.

[0065] It is not difficult to understand that when the number of first trays 21 and second trays 22 in the tray group is multiple, the bottom plate 213, side plate 214, baffle 215 and partition 216 in every two adjacent first trays 21 and second trays 22 are also connected and arranged according to the above concept, and the purpose is to avoid leakage of carrier gas or precursor vapor during use of the source bottle. The specific connection method will not be repeated here.

[0066] In some embodiments, Figure 1 , Figure 2 As shown, the source bottle further includes an air inlet short pipe and an air outlet short pipe. The air inlet short pipe is connected to the air inlet through hole 111 provided on the cover plate 11 and is located on the side of the cover plate 11 away from the cylinder 12; the air outlet short pipe is connected to the air outlet through hole 112 provided on the cover plate 11 and is also located on the side of the cover plate 11 away from the cylinder 12. Through the above arrangement, the carrier gas delivery pipeline in the thin film deposition device can be connected to the air inlet through hole 111 provided on the cover plate 11 through the air inlet short pipe, and the precursor delivery pipeline in the thin film deposition device can be connected to the air outlet through hole 112 provided on the cover plate 11 through the air outlet short pipe, which facilitates the connection and use of the source bottle.

[0067] In some embodiments, Figure 3 As shown, the source bottle further includes a sealing gasket, which is disposed between the cover plate 11 and the barrel 12. Specifically, an annular groove is provided at one end surface of the barrel 12 close to the cover plate 11, and the sealing gasket can be disposed in the annular groove. Through the above arrangement, the sealing performance between the cover plate 11 and the barrel 12 of the source bottle can be improved, and the leakage of carrier gas or precursor vapor from between the cover plate 11 and the barrel 12 when the source bottle is in use can be avoided, thereby improving the reliability of the source bottle when in use.

[0068] The present invention also provides a thin film deposition device, which includes a carrier gas delivery pipeline, a precursor heating system, a reactor, and a source bottle described in any one of the above embodiments.

[0069] The solid precursor (e.g., block precursor, granular precursor, powder precursor, etc.) is loaded in the source bottle, and the precursor heating system is used to heat the solid precursor in the source bottle to form precursor vapor; the carrier gas delivery pipeline is connected to the gas inlet through hole 111 provided on the cover plate 11 of the source bottle, and the carrier gas delivery pipeline is used to introduce carrier gas into the source bottle. The gas outlet through hole 112 provided on the cover plate 11 of the source bottle is connected to the reactor, and the precursor vapor in the source bottle can enter the reactor along with the carrier gas.

[0070] It is understandable that the above-mentioned thin film deposition equipment can also include a precursor vapor delivery pipeline and a control valve. One end of the above-mentioned precursor vapor delivery pipeline is connected to the air outlet hole 112 opened on the cover plate 11 of the source bottle, and the other end of the precursor vapor delivery pipeline is connected to the reactor, so that the precursor delivery pipeline can transport the precursor vapor in the source bottle to the reactor. The above-mentioned control valve is arranged between the air outlet hole 112 and the precursor vapor delivery pipeline, and is used to control the delivery of the precursor vapor in the source bottle. The precursor heating system is arranged and installed corresponding to the source bottle.

[0071] When the above-mentioned thin film deposition equipment is in use, the staff first evenly loads the solid precursor into the tray group of the source bottle, then sets and installs the source bottle and the precursor heating system accordingly, and starts the precursor heating device to heat the solid precursor inside the source bottle, so that the precursor vapor is generated inside the source bottle. Next, the staff can pass the carrier gas into the source bottle through the carrier gas delivery pipeline. The carrier gas is fully mixed with the precursor vapor inside the source bottle during the flow inside the source bottle. Then, the carrier gas carries the precursor vapor into the reactor through the precursor vapor delivery pipeline, and the precursor vapor is deposited in the reaction chamber. During the above operation process, the staff can also realize the on and off of the precursor delivery pipeline and the control of the precursor vapor delivery flow rate by operating the control valve.

[0072] The thin film deposition device has all the technical features of the above-mentioned source bottle and has the same beneficial effects as the above-mentioned source bottle, which will not be described again here.

[0073] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A source bottle, characterized in that: include: A shell (1), wherein the shell (1) is provided with an air inlet through hole (111) and an air outlet through hole (112); A tray group, the tray group comprising a plurality of trays (2) stacked in sequence and arranged in the shell (1); the plurality of trays (2) each comprising a spiral channel (211); The air inlet through hole (111), the spiral channels (211) of the plurality of trays (2), and the air outlet through hole (112) are sequentially connected.

2. The source bottle according to claim 1, characterized in that: The air inlet through hole (111) and the air outlet through hole (112) are arranged on the same side of the housing (1).

3. The source bottle according to claim 2, characterized in that: The plurality of trays (2) include a first tray (21), a second tray (22) and a third tray (23) which are arranged in sequence; The first tray (21) and the second tray (22) both comprise an air inlet channel (212) separated from the spiral channel (211); the air inlet through hole (111), the air inlet channel (212) of the first tray (21), the air inlet channel (212) of the second tray (22), the spiral channel (211) of the third tray (23), the spiral channel (211) of the second tray (22), the spiral channel (211) of the first tray (21), and the air outlet through hole (112) are sequentially connected.

4. The source bottle according to claim 3, characterized in that: The first tray (21), the second tray (22) and the third tray (23) all comprise a bottom plate (213), a side plate (214) and a baffle (215); the side plate (214) is arranged on the bottom plate (213), the baffle (215) is arranged in an internal space enclosed by the side plate (214) and the bottom plate (213), and the baffle (215) defines the internal space as the spiral channel (211) having an open opening; The first tray (21) and the second tray (22) both further comprise a partition (216), wherein the partition (216) and the baffle (215) form the air inlet channel (212); the bottom plate (213) of the first tray (21) and the bottom plate (213) of the second tray (22) are both provided with an air inlet (2131) and an air outlet (2132), wherein the air inlet (2131) is in communication with the air inlet channel (212) of the corresponding tray (2), and the air outlet (2132) is in communication with the spiral channel (211) of the corresponding tray (2).

5. The source bottle according to claim 3, characterized in that: The number of the third tray (23) is 1; the number of the first tray (21) and the second tray (22) is the same, and the number of both is at least 1; when the number of the first tray (21) and the number of the second tray (22) are both plural, the second tray (22) and the first tray (21) are alternately stacked in sequence in a first direction (X1).

6. The source bottle according to claim 5, characterized in that: The third tray (23) and a plurality of the second trays (22) and the first trays (21) stacked alternately in sequence are arranged with decreasing heights in the first direction (X1).

7. The source bottle according to claim 3, characterized in that: The third tray (23), the second tray (22) and the first tray (21) are arranged in decreasing heights in a first direction (X1).

8. The source bottle according to any one of claims 1 to 7, characterized in that: A gas permeable plate (217) is arranged in the spiral channel (211), and the gas permeable plate (217) divides the spiral channel (211) into a plurality of parts; the gas permeable plate (217) is provided with gas permeable holes; the spiral channel (211) is loaded with precursor particles, and the opening size of the gas permeable holes is smaller than the size of the precursor particles.

9. The source bottle according to claim 8, characterized in that: The plurality of trays (2) all comprise a bottom plate (213); in two adjacent trays (2), a gap is provided between the air permeable plate (217) of the tray (2) located at the bottom and the bottom plate (213) of the tray (2) located at the top.

10. The source bottle according to any one of claims 1 to 7, characterized in that: The sum of the heights of the plurality of trays (2) is the same as the height of the inner wall of the shell (1).

11. A thin film deposition device, characterized in that: The thin film deposition equipment comprises a carrier gas delivery pipeline, a precursor heating system, a reactor and a source bottle according to any one of claims 1 to 10; A solid precursor is loaded in the source bottle, and the precursor heating system is used to heat the solid precursor in the source bottle to form precursor vapor; the carrier gas delivery pipeline is connected to the gas inlet hole (111) of the source bottle, and is used to introduce carrier gas into the source bottle; the gas outlet hole (112) of the source bottle is connected to the reactor, and the precursor vapor can enter the reactor along with the carrier gas.

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