Vacuum evaporation equipment and horizontal coating machine

Abstract

The present invention discloses an evaporation device for vacuum evaporation and a horizontal coating machine. The evaporation device for vacuum evaporation comprises a heating container and a dripping assembly for dripping liquid coating material into the heating container. The bottom of the heating container is provided with a plurality of nozzles for discharging vaporized products after evaporation of the liquid coating material. The heating container is provided with a transition container for receiving the liquid coating material dripped by the dripping assembly. The inner cavity of the transition container is connected with the inner cavity of the heating container. The horizontal coating machine is provided with the evaporation device for vacuum evaporation. The present invention has the advantages of simple structure, low cost, easy implementation and application, and can improve the coating quality.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to an evaporation device for vacuum evaporation and a horizontal coating machine. Background Art

[0002] Vacuum evaporation refers to a process in which a certain heating evaporation method is used under vacuum conditions to evaporate the coating material (or film material) and gasify it, and the particles fly to the surface of the substrate and condense into a film. The evaporation device in the vacuum evaporation equipment is the core device for evaporating the coating material. When a liquid coating material (for example, AF liquid) is used, the evaporation device mainly includes a heating container with a closed inner cavity and a droplet assembly. The heating container is provided with a nozzle for spraying the vaporized product after the liquid coating material evaporates. When working, the droplet assembly drops the liquid coating material into the heating container, and the liquid coating material is heated in the heating container and evaporated into a vaporized product, and then sprayed out from the nozzle of the heating container. In special models such as bedroom coating machines, the evaporation device is arranged above the workpiece to be coated, and the nozzle is arranged at the bottom of the heating container to spray the vapor downward for coating. When the dripping component of this evaporation device drops the liquid coating material into the inner cavity of the heating container, it is easy for the liquid coating material to be directly sprayed out from the nozzle at the bottom of the heating container and fall directly onto the substrate without being completely vaporized, resulting in spots, uneven film thickness and other problems, thereby affecting the coating quality. Summary of the invention

[0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide an evaporation device and a horizontal coating machine for vacuum evaporation which have a simple structure, low cost, are easy to implement and apply, and can improve the coating quality.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] An evaporation device for vacuum evaporation comprises a heating container and a dripping assembly for dripping liquid coating material into the heating container, the bottom of the heating container is provided with a plurality of nozzles for discharging vaporized products after evaporation of the liquid coating material, the heating container is provided with a transition container for receiving the liquid coating material dripped by the dripping assembly, and the inner cavity of the transition container is connected to the inner cavity of the heating container.

[0006] In the above-mentioned evaporation device for vacuum evaporation, preferably, the transition container is an open container opening upward, and there is a gap between the upper end opening of the open container and the top surface of the inner cavity of the heating container, and the inner cavity of the transition container is connected with the inner cavity of the heating container through the gap.

[0007] In the above-mentioned evaporation device for vacuum evaporation, preferably, the transition container divides the inner cavity of the heating container into two first cavities, and the plurality of nozzles are respectively arranged at the bottom of the two first cavities.

[0008] In the above-mentioned evaporation device for vacuum evaporation, preferably, the transition container is located in the middle of the inner cavity of the heating container so that the lower part of the inner cavity of the heating container forms an annular cavity, and a plurality of nozzles are arranged at the bottom of the annular cavity.

[0009] In the above-mentioned evaporation device for vacuum evaporation, preferably, the inner cavity of the heating container is cylindrical, the transition container is a cylindrical container, and the axis of the transition container coincides with the axis of the inner cavity of the heating container.

[0010] In the above-mentioned evaporation device for vacuum evaporation, preferably, the inner cavity of the heating container is square, the transition container is a square container, and the geometric center of the transition container coincides with the geometric center of the transition container.

[0011] In the above-mentioned evaporation device for vacuum evaporation, preferably, the heating container includes a shell having a hollow inner cavity, the hollow inner cavity is provided with a partition that divides the lower part of the hollow inner cavity into a second cavity and a third cavity, a bottom of one of the second cavity and the third cavity is provided with a plurality of the nozzles, and the other bottom of the second cavity and the third cavity is not provided with a nozzle as the inner cavity of the transition container.

[0012] In the above-mentioned evaporation device for vacuum evaporation, preferably, the liquid dripping assembly includes a liquid supply mechanism and a liquid dripping head for dripping the liquid coating material, and the liquid dripping head extends into the inner cavity of the transition container.

[0013] As a general technical concept, the present invention also provides a horizontal coating machine, which is provided with the above-mentioned evaporation device for vacuum evaporation.

[0014] Compared with the prior art, the advantages of the present invention are:

[0015] The evaporation device for vacuum evaporation of the present invention is provided with a transition container in the heating container for receiving the liquid coating material dripped by the dripping component. The liquid coating material dripped by the dripping component will first enter the transition container, evaporate into gaseous matter in the transition container, and then escape into the inner cavity of the transition container, and be discharged through the nozzle at the bottom of the heating container, which can avoid the liquid coating material being directly sprayed out from the nozzle at the bottom of the heating container before being completely vaporized, resulting in spots, uneven film thickness, etc., and can improve the coating quality. Since only the transition container needs to be provided in the heating container, it also has the advantages of simple structure, low cost, and easy implementation and application.

[0016] Since the horizontal coating machine of the present invention adopts the evaporation device for vacuum evaporation of the present invention, it also has the advantages of the evaporation device for vacuum evaporation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1This is a schematic diagram of the main cross-sectional structure of the evaporation device for vacuum evaporation in Example 1.

[0018] Figure 2 for Figure 1 Enlarged structural diagram at A in the middle.

[0019] Figure 3 This is a schematic diagram of the top view of the heating container in Example 1.

[0020] Figure 4 This is a schematic diagram of the top view of the heating container in Example 2.

[0021] Figure 5 This is a schematic diagram of the top view of the heating container in Example 3.

[0022] Figure 6 This is a schematic diagram of the top view of the heating container in Example 4.

[0023] Legend:

[0024] 1. Heating container; 11. Nozzle; 12. First cavity; 13. Partition; 2. Dropping assembly; 21. Dropping head; 3. Transition container. DETAILED DESCRIPTION

[0025] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Embodiment 1:

[0027] like Figure 1 and Figure 2 As shown, the evaporation device for vacuum evaporation of this embodiment comprises a heating container 1 and a dripping assembly 2 for dripping liquid coating material into the heating container 1. The bottom of the heating container 1 is provided with a plurality of nozzles 11 for discharging vaporized products after evaporation of the liquid coating material. A transition container 3 for receiving the liquid coating material dripped by the dripping assembly 2 is provided in the heating container 1. The inner cavity of the transition container 3 is communicated with the inner cavity of the heating container 1. The evaporation device for vacuum evaporation is provided in the heating container 1 with a transition container 3 for receiving the liquid coating material dripped by the dripping assembly 2. The liquid coating material dripped by the dripping assembly 2 will first enter the transition container 3, evaporate into gaseous substances in the transition container 3, and then escape into the inner cavity of the transition container 3, and be discharged through the nozzles 11 at the bottom of the heating container 1, which can avoid the problems of spots and uneven film thickness caused by the liquid coating material being directly sprayed out from the nozzles 11 at the bottom of the heating container 1 before being completely vaporized, thereby improving the coating quality. Since only the transition container 3 needs to be arranged in the heating container 1, it also has the advantages of simple structure, low cost and easy implementation and application. The vacuum evaporation device is particularly suitable for the working condition of spraying the vaporized product downward for coating.

[0028] In this embodiment, the transition container 3 is an open container that opens upward, and there is a gap between the upper end opening of the open container and the top surface of the inner cavity of the heating container 1, and the inner cavity of the transition container 3 is connected with the inner cavity of the heating container 1 through the gap. This type of transition container 3 has a simple structure, low cost, and is easy to manufacture and assemble. The transition container 3 is in the form of an open container, which is convenient for receiving and accommodating liquid coating materials, and also facilitates the smooth and timely dissipation of gasification formed after the liquid coating materials evaporate from the transition container 3.

[0029] In this embodiment, Figure 2 and Figure 3 As shown, the transition container 3 divides the inner cavity of the heating container 1 into two first cavities 12, and a plurality of nozzles 11 are arranged at the bottom of the two first cavities 12. The vapor generated after the liquid coating material in the transition container 3 evaporates from both sides of the transition container 3 to the two first cavities 12, and is ejected from the nozzles 11 at the bottom of the two first cavities 12, which can be used to coat two substrates at the same time. Preferably, the volume of the two first cavities 12 is consistent, so that the speed and amount of the vapor escaped from the transition container 3 to the two first cavities 12 are consistent, and the speed and amount of the vapor ejected from the two first cavities 12 are also consistent, and the uniformity of the ejected vapor is good, which can improve the coating quality.

[0030] In this embodiment, the liquid dripping assembly 2 includes a liquid supply mechanism and a liquid dripping head 21 for dripping the liquid coating material, and the liquid dripping head 21 extends into the inner cavity of the transition container 3. The liquid coating material dripped from the liquid dripping head 21 is completely entered into the transition container 3 without being splashed outside the transition container 3, which can completely prevent the liquid coating material from being directly sprayed out from the nozzle 11 at the bottom of the heating container 1 without being completely vaporized. The above-mentioned liquid supply mechanism and liquid dripping head 21 can both adopt existing technologies.

[0031] Embodiment 2:

[0032] The vacuum evaporation device of this embodiment is basically the same as that of the embodiment 1, except that Figure 4 As shown, in this embodiment, the transition container 3 is located in the middle of the inner cavity of the heating container 1 so that the lower part of the inner cavity of the heating container 1 forms an annular cavity, and a plurality of nozzles 11 are arranged at the bottom of the annular cavity. The vapor generated after the liquid coating material in the transition container 3 evaporates uniformly from the periphery of the upper opening of the transition container 3 into the annular cavity, and then sprayed out from the nozzles 11 at the bottom of the annular cavity. The vapor sprayed out by each nozzle 11 has good uniformity, which is conducive to improving the coating quality.

[0033] In this embodiment, preferably, the inner cavity of the heating container 1 is cylindrical, the transition container 3 is a cylindrical container, and the axis of the transition container 3 coincides with the axis of the inner cavity of the heating container 1. That is, even if the annular cavity is in the shape of an annular ring, after the vapor is uniformly dispersed from the upper opening of the transition container 3, the distribution uniformity at each position of the annular cavity is good, which is conducive to further improving the uniformity of the vapor sprayed from each nozzle 11 and further improving the coating quality. In addition, this structural form is particularly suitable for coating of circular substrates and annular substrates.

[0034] Embodiment 3:

[0035] The vacuum evaporation device of this embodiment is basically the same as that of embodiment 2, except that Figure 5 As shown, in this embodiment, the inner cavity of the heating container 1 is square, the transition container 3 is a square container, and the geometric center of the transition container 3 coincides with the geometric center of the transition container 3. In the evaporation device for vacuum evaporation of this embodiment, the vapor generated after the liquid coating material in the transition container 3 evaporates relatively evenly from the upper opening of the transition container 3 to the annular cavity, and then sprays out from the nozzle 11 at the bottom of the annular cavity. Similarly, the uniformity of the vapor sprayed from each nozzle 11 is good, which is conducive to improving the coating quality. In addition, this structural form is particularly suitable for the coating of square substrates and annular substrates extending along a square path.

[0036] Embodiment 4:

[0037] The vacuum evaporation device of this embodiment is basically the same as that of the embodiment 1, except that Figure 6 As shown, in this embodiment, the heating container 1 includes a shell having a hollow inner cavity, a partition 13 is provided in the hollow inner cavity to divide the lower part of the hollow inner cavity into a second cavity and a third cavity, a plurality of nozzles 11 are provided at the bottom of one of the second cavity and the third cavity, and the other bottom of the second cavity and the third cavity is not provided with nozzles 11 as the inner cavity of the transition container 3. In this embodiment, the partition 13 is directly provided in the hollow inner cavity of the shell to form the inner cavity of the transition container 3, and its structure is simpler, the cost is lower, and it is easier to manufacture.

[0038] Embodiment 5:

[0039] A horizontal coating machine is provided with any one of the evaporation devices for vacuum evaporation of embodiments 1 to 4. Except for the evaporation device for vacuum evaporation, the other parts of the horizontal coating machine of this embodiment adopt the existing technology, which will not be described in detail.

[0040] Since the horizontal coating machine of this embodiment adopts any one of the evaporation devices for vacuum evaporation in Embodiments 1-4, it also has the corresponding advantages of the evaporation devices for vacuum evaporation in each embodiment.

[0041] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and changes obtained without departing from the technical concept of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. An evaporation device for vacuum evaporation, comprising a heating container (1) and a dripping assembly (2) for dripping a liquid coating material into the heating container (1), wherein the bottom of the heating container (1) is provided with a plurality of nozzles (11) for discharging vaporized products after evaporation of the liquid coating material, and characterized in that: The heating container (1) is provided with a transition container (3) for receiving the liquid coating material dripped by the dripping component (2); the inner cavity of the transition container (3) is connected to the inner cavity of the heating container (1); the transition container (3) is an open container opening upward.

2. The evaporation device for vacuum evaporation according to claim 1, characterized in that: There is a gap between the upper end opening of the open container and the top surface of the inner cavity of the heating container (1), and the inner cavity of the transition container (3) is connected to the inner cavity of the heating container (1) through the gap.

3. The evaporation device for vacuum evaporation according to claim 2, characterized in that: The transition container (3) divides the inner cavity of the heating container (1) into two first cavities (12), and a plurality of nozzles (11) are arranged at the bottom of the two first cavities (12).

4. The evaporation device for vacuum evaporation according to claim 2, characterized in that: The transition container (3) is located in the middle of the inner cavity of the heating container (1), so that the lower part of the inner cavity of the heating container (1) forms an annular cavity, and a plurality of nozzles (11) are arranged at the bottom of the annular cavity.

5. The evaporation device for vacuum evaporation according to claim 4, characterized in that: The inner cavity of the heating container (1) is cylindrical, the transition container (3) is a cylindrical container, and the axis of the transition container (3) coincides with the axis of the inner cavity of the heating container (1).

6. The evaporation device for vacuum vapor deposition according to claim 4, characterized in that: The inner cavity of the heating container (1) is square, the transition container (3) is a square container, and the geometric center of the transition container (3) coincides with the geometric center of the transition container (3).

7. The evaporation device for vacuum deposition according to claim 2, characterized in that: The heating container (1) comprises a shell having a hollow inner cavity, wherein a partition (13) is provided in the hollow inner cavity for dividing the lower portion of the hollow inner cavity into a second cavity and a third cavity, wherein a plurality of nozzles (11) are provided at the bottom of one of the second cavity and the third cavity, and the other of the second cavity and the third cavity is not provided with a nozzle (11) at the bottom, serving as the inner cavity of the transition container (3).

8. The evaporation device for vacuum vapor deposition according to any one of claims 1 to 7, characterized in that: The liquid dripping assembly (2) comprises a liquid supply mechanism and a liquid dripping head (21) for dripping liquid coating material, and the liquid dripping head (21) extends into the inner cavity of the transition container (3).

9. A horizontal coating machine, characterized in that: The horizontal coating machine is provided with the evaporation device for vacuum evaporation according to any one of claims 1 to 8.

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