Combined seed crystal separation equipment

Abstract

The invention discloses combined seed crystal separation equipment which comprises a support frame and a bracket, and further comprises a suspension unit mounted on the support frame and used for bearing a combination of a crucible cover and a seed crystal and suspending the combination; and the automatic knocking unit is mounted on the bracket and can automatically knock the upper end of the crucible cover. The equipment can automatically knock a combined body in a suspension state, is beneficial to rapid damage to a bonding interface, accelerates separation of seed crystals and a crucible cover, reduces the labor intensity and improves the working efficiency.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a combined seed crystal separation device. Background Art

[0002] Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, and high chemical stability. It can be made into high-frequency, high-power electronic and optoelectronic devices that work under high temperature and strong radiation conditions. It has huge application value in the fields of national defense, high technology, industrial production, power supply, and power transformation, and is regarded as a third-generation wide bandgap semiconductor material with great development prospects.

[0003] At present, seed crystals are usually required in the preparation of silicon carbide crystals (the crystals serve as starting crystals and provide templates for the growth of new crystals). In actual installation, most of the seed crystals are bonded to the crucible cover with high-temperature glue. After the crystals are prepared, the crucible cover is generally knocked to break the adhesive layer and separate the seed crystal from the crucible cover.

[0004] When using the knocking method to separate the seed crystal from the crucible cover, a carrier frame (for supporting the combination of the seed crystal and the crucible cover) and a knocking rod are required. Since the carrier frame is placed on a mounting table, when the knocking rod knocks the crucible cover on the carrier frame, some energy is lost due to vibration conduction (contact between the crucible cover and the carrier frame), which reduces the destructive effect of the knocking on the adhesive layer, and is not conducive to the rapid separation of the seed crystal and the crucible cover. At the same time, manually using the knocking rod to knock the combination is labor-intensive and inefficient. Therefore, the present application provides a carrier frame for seed crystal separation to meet the demand. Therefore, the present application provides a combined seed crystal separation equipment to meet the demand. Summary of the invention

[0005] The purpose of the present application is to provide a combined seed crystal separation device to solve the technical problems raised in the above background.

[0006] To achieve the above-mentioned objectives, the present application provides the following technical solutions: a combined seed crystal separation device, comprising a support frame and a bracket, and also comprising a suspension unit installed on the support frame, for carrying a combination of a crucible cover and a seed crystal and suspending the combination; an automatic knocking unit installed on the bracket, and the automatic knocking unit can automatically knock on the upper end of the crucible cover.

[0007] As a preferred implementation in this embodiment, the suspension unit includes an upper outer ring and a lower outer ring arranged on the support frame, and an upper inner ring and a lower inner ring respectively arranged corresponding to the upper outer ring and the lower outer ring, and the upper ends of the upper outer ring, the lower outer ring, the upper inner ring and the lower inner ring are relatively provided with arc-shaped baffles, and the upper ends of the arc-shaped baffles of the upper outer ring and the lower outer ring are fixed with limit blocks; A second magnetic ring is installed at the lower end of the upper inner ring, and a first magnetic ring is installed at the upper end of the upper outer ring, wherein the magnetic poles of the opposite ends of the first magnetic ring and the second magnetic ring are the same; The upper end of the lower outer ring is circumferentially provided with a plurality of first magnetic blocks, and the lower end of the lower inner ring is correspondingly provided with a plurality of second magnetic blocks, and the magnetic poles of the opposite ends of the plurality of first magnetic blocks and the corresponding second magnetic blocks are the same; At least two first limiting magnets are circumferentially arranged on the inner walls of the two arc-shaped baffles on the upper outer ring and the lower outer ring, and at least two second limiting magnets are circumferentially arranged on the inner walls of the two arc-shaped baffles on the upper inner ring and the lower inner ring, and the plurality of the second limiting magnets are arranged one-to-one with the plurality of the first limiting magnets, and the magnetic poles at the opposite ends are the same; The automatic knocking unit includes a mounting plate mounted on the bracket, an adjusting screw threadedly connected to the bracket, a rotating motor mounted on the mounting plate, and a gear ring; The inner cavity of the mounting plate is circumferentially provided with a plurality of U-shaped plates, and a reciprocating screw rod is rotatably provided on each of the plurality of U-shaped plates, and a ball nut is threadedly sleeved on the reciprocating screw rod, and side plates are fixed on both side ends of the ball nut, one of the side plates is slidably penetrated by a rod body mounted on the U-shaped plate, and an L-shaped rod is slidably penetrated on the other side plate, and a roller is rotatably provided on the upper end of the L-shaped rod, and an elastic impact ball is installed on the lower end of the L-shaped rod, and a mounting ring is fixed on the L-shaped rod, and the mounting ring and the side plate are connected by a compression spring; A driving bar with a wave-shaped structure is installed on the U-shaped plate, and the driving bar is located above the reciprocating screw rod. Plane rods with horizontal upper ends are arranged at both ends of the driving bar, and the upper end surface of the plane rod is located between the wave crest surface and the wave trough surface of the driving bar. The gear ring is rotatably arranged in the inner cavity of the mounting plate, and the gear ring is gear-engaged with the gear on the output shaft of the rotating motor and the rotating gears arranged on one end of the reciprocating screw rods; The lower end of the adjusting screw rod is rotatably connected to the upper end of the mounting plate, and the upper end of the mounting plate is connected to the telescopic rod through a rotary bearing, and the telescopic rod is installed on the bracket; The lower end of the bracket is slidably arranged on the slide rail.

[0008] As a preferred implementation manner in this embodiment, it also includes an automatic adjustment unit that can automatically adapt to the suspension separation of seed crystals of different lengths from the crucible cover.

[0009] Since the length of the seed crystal produced during production will vary according to actual conditions, the length of the seed crystal produced by our company varies within the range of 12 to 21 cm. In order to ensure that the support frame can be used for the suspended support of the combination of seed crystals and crucible covers of different lengths, an automatic adjustment unit is provided to change the spacing between the upper outer ring 2 and the lower outer ring 3.

[0010] As a preferred implementation in this embodiment, the automatic adjustment unit includes two sliding sleeves slidably mounted on the support frame, two transverse plates installed on the outer wall of the lower outer ring, and two pulley blocks arranged at the upper end of the support frame, and the two sliding sleeves are respectively fixedly arranged at the ends corresponding to the transverse plates; The upper ends of the two horizontal plates are connected with pull ropes, and the two pull ropes are assembled on the corresponding pulley sets. The ends of the pull ropes away from the horizontal plates pass through the support frame and are connected to the weight. The two pull ropes are fixed with baffle rings. At the beginning, under the action of the gravity of the weight, the baffle rings contact the support frame to form a blockage.

[0011] As a preferred implementation manner in this embodiment, it also includes a slowing unit to slow down the lower outer ring carrying the separated seed crystals and moving downward.

[0012] As a preferred implementation in this embodiment, the retarding unit includes a cylinder with an elastic sealing diaphragm inside, a bevel gear rotatably arranged on the plate body through a rotating shaft, and a gear rod slidably arranged in a U-shaped groove; The gear rod is gear-connected with the bevel gear by rotating the transmission gear arranged on the plate body, an elastic extrusion column is rotatably arranged on the end of the gear rod close to the sliding sleeve, and the elastic extrusion column is located on the sliding sleeve and has an open inner cavity, and the U-shaped groove is fixedly connected to the cross plate; The upper end of the bevel gear is provided with a long vertical rod, and a push rod is rotatably provided on the front end of the vertical rod, and the end of the push rod is located in the cavity of the long driving ring, and a movable rod is fixed to the side end of the driving ring, and the end of the movable rod away from the driving ring is sealed and slidably provided in the inner cavity of the hollow tube, and the hollow tube is communicated with the inner cavity of the cylinder; The cylinder is installed at the lower end of the lower outer ring, an extrusion column is fixed at the upper end of the elastic sealing diaphragm, and the upper end of the extrusion column slides through the lower outer ring, and a contact plate adapted to the extrusion column is provided on the outer wall of the arc-shaped baffle on the lower inner ring; The plate body is fixed on the transverse plate.

[0013] As a preferred implementation manner in this embodiment, it also includes a magnetic shielding structure, which is used to shield the magnetic field between the first magnetic block and the second magnetic block when the separated seed crystal is carried on the lower inner ring, so that the weight of the seed crystal acts on the extrusion column.

[0014] As a preferred implementation in this embodiment, the magnetic shielding structure includes two arc-shaped rods connected by a connecting rod and arranged circumferentially, and a lower pressure rod arranged on the outer wall of the arc-shaped baffle on the lower inner ring; An arc-shaped slider is provided at the lower end of one of the arc-shaped rods, and the arc-shaped slider is slidably arranged in an arc-shaped groove arranged at the upper end of the lower outer ring, and the inner wall of the arc-shaped groove and the arc-shaped slider are connected by a return spring of an arc structure, and a plurality of magnetic shielding plates are provided on both of the arc-shaped rods; One of the arc-shaped rods is provided with a block with a driving inclined surface, and the block is located below the pressing rod.

[0015] As a preferred implementation manner in this embodiment, it also includes a knocking intensity automatic variable unit, which can automatically change the knocking intensity of the impact ball and the crucible cover according to the needs of the knocking part during the knocking process.

[0016] As a preferred implementation in this embodiment, the tapping intensity self-varying unit includes a first gradient zone L1, a constant zone L2, and a second gradient zone L3 which are sequentially arranged on the driving bar; The wave crests in the first gradient zone L1 become higher from right to left; The peaks and valleys in the constant region L2 remain unchanged, and the peak height of the constant region L2 is the highest peak height of the first gradual change region L1; The peak height in the second gradient zone L3 gradually decreases; The distances between the crests and troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent, and the heights of the troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent.

[0017] In summary, the technical effects and advantages of the present invention are as follows: The invention has a reasonable structure, and the device can automatically knock the combined body in a suspended state, which is beneficial to the rapid destruction of the bonding interface, accelerates the separation of the seed crystal and the crucible cover, reduces labor intensity and improves work efficiency; In the present invention, an automatic adjustment unit is provided, so that the support frame can be used for suspension support of seed crystals and crucible cover combinations of different lengths; In the present invention, a retarding unit is provided, which can automatically retarded seed crystals 42 of different lengths to different degrees, thereby providing good protection for the seed crystals; In the present invention, a magnetic shielding structure is provided to shield the first magnetic block, and the weight of the seed crystal will be basically completely borne on the two extrusion columns, thereby increasing the friction between the elastic extrusion columns and the support frame, and enhancing the damping effect on the lower outer ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 It is a front view structural schematic diagram of the present invention; Figure 2 for Figure 1 Schematic diagram of the middle load-bearing frame structure; Figure 3 for Figure 2 Schematic diagram of the partial split structure of the middle load-bearing frame; Figure 4 for Figure 3 Schematic diagram of the structure of the upper middle inner ring and the lower inner ring; Figure 5 for Figure 3 Schematic diagram of the structure of the medium resistance and buffer unit; Figure 6 for Figure 5 Schematic diagram of the cross-section structure of the middle gas cylinder; Figure 7 for Figure 2 Schematic diagram of the middle magnetic shielding structure; Figure 8 for Figure 1 Schematic diagram of the structure of the middle installation plate when viewed from above; Fig. 9 for Figure 8 Schematic diagram of the structure of the middle U-shaped plate; Fig.10 for Fig. 9 The enlarged structural diagram at A in the middle; Fig.11 for Fig. 9 Schematic diagram of the front view structure of the middle drive bar.

[0020] In the figure: 1, support frame; 2, upper outer ring; 3, lower outer ring; 4, upper inner ring; 401, arc baffle; 5, lower inner ring; 51, contact plate; 6, limit block; 7, first limit magnet; 8, second limit magnet; 9, first magnetic ring; 10, second magnetic ring; 11, first magnetic block; 12, second magnetic block; 13, horizontal plate; 14, sliding sleeve; 15, opening; 16, pulley block; 17, pull rope; 18, weight; 19, baffle ring; 20, plate; 21 , vertical rod; 22, bevel gear; 23, push rod; 24, drive ring; 25, transmission gear; 26, U-shaped groove; 27, gear rod; 28, elastic extrusion column; 29, movable rod; 30, hollow tube; 31, cylinder; 32, extrusion column; 33, elastic sealing diaphragm; 34, arc rod; 35, block; 36, driving inclined plane; 37, magnetic shielding plate; 38, arc slider; 39, reset spring; 40, down-pressing rod; 41, crucible cover; 42, seed crystal; 101. Bracket; 102. Mounting plate; 103. Rotating bearing; 104. Telescopic rod; 105. Adjusting screw; 106. Rotating motor; 107. Gear ring; 108. U-shaped plate; 109. Rod body; 110. Driving bar; 111. Reciprocating screw; 112. Rotating gear; 113. Plane rod; 114. Ball nut; 115. L-shaped rod; 116. Roller; 117. Compression spring; 118. Mounting ring; 119. Impact ball. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Example: Reference Figure 1 A combined seed crystal separation device is shown, comprising a support frame 1 and a support 101, and also comprising a suspension unit installed on the support frame 1, for carrying a combination of a crucible cover 41 and a seed crystal 42 and suspending the combination; an automatic knocking unit installed on the support 101, and the automatic knocking unit can automatically knock on the upper end of the crucible cover 41.

[0023] By providing a suspension unit, the seed crystal can be suspended. When the seed crystal is struck, the vibration generated by the strike can act more directly on the bonding interface, so that the impact force is more concentrated, which is conducive to the rapid separation of the crucible cover 41 and the seed crystal 42. The crucible cover 41 can be knocked automatically by the automatic knocking unit without manual knocking.

[0024] As a preferred implementation in this embodiment, Figure 1-4 As shown in 8-11, the suspension unit includes an upper outer ring 2 and a lower outer ring 3 which are arranged on the support frame 1 in an upper and lower manner, and an upper inner ring 4 and a lower inner ring 5 which are arranged corresponding to the upper outer ring 2 and the lower outer ring 3 respectively, and the upper ends of the upper outer ring 2, the lower outer ring 3, the upper inner ring 4 and the lower inner ring 5 are all relatively provided with arc-shaped baffles 401, and the upper ends of the arc-shaped baffles 401 of the upper outer ring 2 and the lower outer ring 3 are fixed with limit blocks 6; A second magnetic ring 10 is installed at the lower end of the upper inner ring 4, and a first magnetic ring 9 is installed at the upper end of the upper outer ring 2. The magnetic poles of the opposite ends of the first magnetic ring 9 and the second magnetic ring 10 are the same; The upper end of the lower outer ring 3 is circumferentially provided with a plurality of first magnetic blocks 11, and the lower end of the lower inner ring 5 is correspondingly provided with a plurality of second magnetic blocks 12, and the magnetic poles of the opposite ends of the plurality of first magnetic blocks 11 and the corresponding second magnetic blocks 12 are the same; At least two first limiting magnets 7 are circumferentially arranged on the inner walls of the two arc-shaped baffles 401 on the upper outer ring 2 and the lower outer ring 3, and at least two second limiting magnets 8 are circumferentially arranged on the inner walls of the two arc-shaped baffles 401 on the upper inner ring 4 and the lower inner ring 5, and the plurality of second limiting magnets 8 are arranged one-to-one correspondingly to the plurality of first limiting magnets 7, and the magnetic poles at the opposite ends are the same; When in use, the seed crystal of the combination is inserted from top to bottom, so that the lower end of the crucible cover 41 contacts the upper end of the upper inner ring 4 to form a support, and the upper end of the seed crystal contacts the upper end of the lower inner ring 5, most of the weight acts on the upper inner ring 4 (at this time, the upper inner ring 4 is suspended in the inner cavity of the upper outer ring 2 and does not contact the limit block 6), and a very small part of the weight acts on the lower inner ring 5 (at this time, the lower inner ring 5 is suspended in the inner cavity of the lower outer ring 3 and does not contact the limit block 6), so that the seed crystal forms a whole with the upper inner ring 4 and the lower inner ring 5 and is suspended in the air (it is suspended by the first magnetic ring 9 and the second magnetic ring 10, as well as the repulsive force between the first magnetic block 11 and the second magnetic block 12, are used to suspend the crucible cover 41, and at the same time, the upper inner ring 4 and the lower inner ring 5 are limited by the repulsive force between the first limiting magnet 7 and the second limiting magnet 8). At this time, the upper end of the crucible cover 41 is knocked by a knocking device, which can effectively reduce the energy damage caused by vibration conduction, is beneficial to the destruction of the bonding interface, and accelerates the separation of the crucible cover 41 and the seed crystal 42. During separation, the seed crystal 42 will automatically fall onto the lower inner ring 5 due to the action of gravity.

[0025] It should be noted that, firstly, most of the weight acts on the upper inner ring 4, and a very small part of the weight acts on the lower inner ring 5, so that the gravity of the seed crystal 42 is offset very little, and the seed crystal 42 has a downward gravity effect on the bonding interface, which is conducive to accelerating the separation of the crucible cover 41 and the seed crystal 42; secondly, when the seed crystal 42 falls, the repulsive force between the first magnetic block 11 and the second magnetic block 12 can slow down the falling speed, prevent the seed crystal 42 from being damaged by a more intense collision, and finally make the lower inner ring 5 contact with the lower outer ring 3 under the action of the gravity of the seed crystal 42 , an elastic pad can be set at the upper end of the lower outer ring 3 to further reduce the buffer; third, the setting of the arc baffle 401 can ensure that the crucible cover 41 and the seed crystal 42 can stay stably on the corresponding upper inner ring 4 and lower inner ring 5 respectively; fourth, the limit block 6 can prevent the upper inner ring 4 and the lower inner ring 5 from moving out of the corresponding upper outer ring 2 and the inner cavity of the lower outer ring 5 under the action of repulsive force; fifth, two notches can be set opposite to each other on the upper inner ring 4 and the lower inner ring 5, and the notch is not set on the side with the arc baffle 401. The purpose is to facilitate the placement of the crucible cover 41 or the seed crystal 42.

[0026] The automatic knocking unit includes a mounting plate 102 mounted on a bracket 101, an adjusting screw rod 105 threadedly connected to the bracket 101, a rotating motor 106 mounted on the mounting plate 102, and a gear ring 107; The inner cavity of the mounting plate 102 is circumferentially provided with a plurality of U-shaped plates 108, on which a reciprocating screw rod 111 is rotatably provided, and a ball nut 114 is threadedly sleeved on the reciprocating screw rod 111, and side plates are fixed on both sides of the ball nut 114, one side plate is slidably penetrated by a rod body 109 mounted on the U-shaped plate 108, and an L-shaped rod 115 is slidably penetrated on the other side plate, and a roller 116 is rotatably provided on the upper end of the L-shaped rod 115, and an elastic impact ball 119 is installed on the lower end of the L-shaped rod 115, and a mounting ring 118 is fixed on the L-shaped rod 115, and the mounting ring 118 is connected to the side plate by a compression spring 117; A driving bar 110 with a wave-shaped structure is installed on the U-shaped plate 108, and the driving bar 110 is located above the reciprocating screw rod 111. Both ends of the driving bar 110 are provided with a plane rod 113 with a horizontal upper end, and the upper end surface of the plane rod 113 is located between the wave crest surface and the wave trough surface of the driving bar 110. The gear ring 107 is rotatably arranged in the inner cavity of the mounting plate 102, and the gear ring 107 is gear-engaged with the gear on the output shaft of the rotating motor 106 and the rotating gear 112 arranged on one end of a plurality of reciprocating screw rods 111; The lower end of the adjusting screw rod 105 is rotatably connected to the upper end of the mounting plate 102, and the upper end of the mounting plate 102 is connected to the telescopic rod 104 through a rotary bearing 103, and the telescopic rod 104 is installed on the bracket 1; The lower end of the bracket 101 is slidably disposed on a slide rail.

[0027] When in use, the mounting plate 102 is moved (through the slide rail provided at the bottom of the bracket 101, the slide rail is installed on the mounting surface, and the bracket 101 can slide on it) to the top of the combination and align it with it, and the adjusting screw rod 105 is rotated to make the mounting plate 102 move downward, and the lower end of the impact ball 119 contacts the upper end of the crucible cover 31, and the rotating motor 106 is controlled to work, and the gear ring 107 drives the multiple rotating gears 112 to rotate, and then drives the multiple reciprocating screw rods 111 to rotate at the same time, so that the multiple ball nuts 11 drive the L-shaped rod 115 to move outward along the axis of the crucible cover 41. Linear motion. During the motion, the roller 116 will contact the raised part on the driving bar 110 to make the L-shaped rod 115 move upward, and the compression spring 117 will be stretched. When the roller 116 passes over the raised part, the L-shaped rod 115 will move downward to return to its original position through the compression spring 117, and the impact ball 119 will contact and collide with the upper end of the crucible cover 41 by relying on the elastic force of the compression spring 117 and the inertia of the movement, thereby destroying the adhesive layer, and finally separating the crucible cover from the seed crystal, and automatically performing the knocking operation, which is convenient and simple to operate, with low labor intensity and high work efficiency.

[0028] It should be noted that, first, the wafers produced by our company are mainly 12 inches and 8 inches, and the crucible covers required for the production of the corresponding seed crystals are 14 inches and 10 inches. When the upper ends of the 14-inch and 10-inch crucible covers are struck, the number of the corresponding reciprocating screw rods 111 is generally not less than eight groups and not less than six groups; second, during the entire striking process, the roller 116 does not contact the concave surface of the trough of the drive bar 110, that is, the height of the highest protrusion on the drive bar 110 is less than the depth of the depression of the trough, so as to avoid the roller 116 contacting and colliding with the trough surface, resulting in the inability to better transmit the impact force to the crucible cover 41.

[0029] As a preferred implementation manner in this embodiment, an automatic adjustment unit is also included, which can automatically adapt to the suspension separation of seed crystals 42 of different lengths and the crucible cover 41.

[0030] Since the length of the seed crystal produced during production varies according to the actual situation, the length of the seed crystal produced by our company varies within the range of 12 to 21 cm. In order to ensure that the carrier can be used for the suspension bearing of the combination of seed crystals and crucible covers of different lengths, an automatic adjustment unit is set to change the spacing between the upper outer ring 2 and the lower outer ring 3. As a preferred implementation in this embodiment, Figure 1-4 As shown, the automatic adjustment unit includes two sliding sleeves 14 slidably mounted on the support frame 1, two transverse plates 13 mounted on the outer wall of the lower outer ring 3, and two pulley blocks 16 arranged at the upper end of the support frame 1, and the two sliding sleeves 14 are respectively fixedly arranged at the ends of the corresponding transverse plates 13; The upper ends of the two horizontal plates 13 are connected with pull ropes 17, and the two pull ropes 17 are assembled on the corresponding pulley sets 16. The end of the pull rope 17 away from the horizontal plate 13 passes through the support frame 1 and is connected to the weight 18. The two pull ropes 17 are fixed with a blocking ring 19. At the beginning, under the action of the gravity of the weight 18, the blocking ring 19 contacts the support frame 1 to form a blockage.

[0031] In the initial state, the lower outer ring 3 is kept at a certain height through the contact between the retaining ring 19 and the support frame 1 (the lower outer ring 3 has a tendency to move upward, that is, when the retaining ring 19 is removed, the lower outer ring 3 moves upward), and the seed crystal of the combination is inserted from top to bottom, and the lower end of the seed crystal 42 will contact the upper end of the lower inner ring 5. As the seed crystal 42 continues to move downward, the repulsive force between the magnetic blocks will make the lower outer ring 3 overcome the gravity of the weight 18 and move downward, and finally make the crucible cover 41 contact with the upper end of the upper inner ring 4. At this time, the combination is in a suspended state (at this time, neither the upper inner ring 4 nor the lower inner ring 5 is in contact with the limit block 6, and it is in a suspended state), and at this time, the lower outer ring 3 remains motionless, waiting for the seed crystal 42 to move downward. When the seed crystal 42 separates and falls, the seed crystal 42 drives the lower inner ring 5 to move downward and contact with the upper end of the lower outer ring 3. At this time, all the gravity of the seed crystal acts on the lower outer ring 3, which can drive the lower outer ring 3 to move downward. When the upper end of the weight 18 contacts the support frame 1, the lower outer ring 3 stops moving. At this time, the seed crystal 42 can be removed. After the seed crystal 42 is removed, the gravity of the weight 18 will drive the lower outer ring 3 to move upward and return to its original position (the lower inner ring 5 also automatically resets under the action of the magnetic force). This automatic adjustment unit can automatically adjust the distance between the upper outer ring 2 and the lower outer ring 3 according to the length of the seed crystal 42 to adapt to the suspended separation of seed crystals 42 of different lengths and the crucible cover 41, and also has an automatic reset function.

[0032] It should be noted that, first, the sum of the gravity of the heavy objects is greater than the sum of the total gravity of the sleeve 14, the cross plate 13 and the lower outer ring 3 (including the components thereon) and the friction resistance encountered by the movement of the sleeve 14; second, at the same time, this structure (because it can move downward) can provide a large enough operating space to remove the seed crystal 42 from the lower outer ring 3.

[0033] As a preferred implementation manner in this embodiment, a slowing unit is further included to slow down the lower outer ring 3 carrying the separated seed crystals and moving downward.

[0034] When the seed crystal 42 drives the lower outer ring 3 to move downward, it accelerates. When the weight 18 contacts the support frame 1 to form a block, the lower outer ring 3 will suddenly stop, which will have a great impact on the seed crystal (and the seed crystal 42 will be unstable and fall after the collision), which will easily damage the seed crystal 42 and is not conducive to the stability of the seed crystal 42 on the lower outer ring 3. As a preferred implementation in this embodiment, Figure 3-6As shown, the retarding unit includes a cylinder 31 with an elastic sealing membrane 33 inside, a bevel gear 22 rotatably arranged on a plate 20 through a rotating shaft, and a gear rod 27 slidably arranged in a U-shaped groove 26; The gear rod 27 is geared with the bevel gear 22 by rotating the transmission gear 25 disposed on the plate body 20. An elastic extrusion column 28 is rotatably disposed on the end of the gear rod 27 close to the sliding sleeve 14. The elastic extrusion column 28 is located on the sliding sleeve 14 and has an inner cavity with an opening 15. The U-shaped groove 26 is fixedly connected to the horizontal plate 13. The upper end of the bevel gear 22 is provided with a long vertical rod 21, and a push rod 23 is rotatably provided on the front end of the vertical rod 21, and the end of the push rod 23 is located in the cavity of the long driving ring 24, and a movable rod 29 is fixed to the side end of the driving ring 24, and the end of the movable rod 29 away from the driving ring 24 is sealed and slidably provided in the inner cavity of the hollow tube 30, and the hollow tube 30 is communicated with the inner cavity of the cylinder 31; The cylinder 31 is installed at the lower end of the lower outer ring 3, the upper end of the elastic sealing diaphragm 33 is fixed with an extrusion column 32, and the upper end of the extrusion column 32 slides through the lower outer ring 3, and the outer wall of the arc-shaped baffle 401 on the lower inner ring 5 is provided with a contact plate 51 adapted to the extrusion column 32; The plate body 20 is fixed on the transverse plate 13 .

[0035] When the combination is in a suspended state, the lower inner ring 5 does not contact the upper end of the lower outer ring 3. When the seed crystal 42 is separated from the crucible cover 41, the contact plate 51 on the lower inner ring 5 will contact the extrusion column 31 and drive the extrusion column 32 to move downward, so that the elastic sealing diaphragm 33 deforms and moves downward, the gas in the cylinder 31 is squeezed and the movable rod 29 drives the driving ring 24 to move outward, pushing the push rod 23 to move, and then the bevel gear 22 rotates around the axis, and drives the gear rod 27 to move outward through the transmission gear 25, so that the elastic extrusion column 28 is in close contact with the outer wall of the support frame 1. , which can increase the friction resistance and thus reduce the descending speed of the lower outer ring 3. In the above process, due to the obstruction of the elastic sealing diaphragm 33, the lower end of the lower inner ring 5 is never in contact with the upper end of the lower outer ring 3, so that the retarding unit can automatically perform different degrees of retarding on seed crystals 42 of different lengths (that is, its retarding effect is proportional to the weight of the seed crystal 42). When the seed crystal 42 is removed, the movable rod 29 is driven to return to its original position through the elastic sealing diaphragm 33, and finally the elastic extrusion column 28 is driven to contact and separate from the support frame 1. Under the action of the gravity of the weight 18, the lower outer ring 3 moves upward to return to its original position.

[0036] It should be noted that the length of the plate body 20 is greater than the radius of the bevel gear 22 , thereby forming a force-saving lever, which is beneficial to further improve the damping effect on the lower outer ring 3 .

[0037] As a preferred implementation manner in this embodiment, it also includes a magnetic shielding structure, which is used to shield the magnetic field between the first magnetic block 11 and the second magnetic block 12 when the separated seed crystal is carried on the lower inner ring 5, so that the weight of the seed crystal acts on the extrusion column 32.

[0038] Due to the magnetic repulsion, the weight of the seed crystal 42 cannot be fully applied to the extrusion column 32, and the slowing effect on the lower outer ring 3 is weakened. Therefore, a magnetic shielding mechanism is provided to solve this problem.

[0039] As a preferred implementation in this embodiment, Figure 3 and Figure 7 As shown, the magnetic shielding structure includes two arc-shaped rods 34 connected by a connecting rod and arranged circumferentially, and a lower pressure rod 40 arranged on the outer wall of the arc-shaped baffle 401 on the lower inner ring 5; An arc-shaped slider 38 is provided at the lower end of one of the arc-shaped rods 34, and the arc-shaped slider 38 is slidably provided in an arc-shaped groove provided at the upper end of the lower outer ring 3, and the inner wall of the arc-shaped groove and the arc-shaped slider 38 are connected by a return spring 39 of an arc structure, and a plurality of magnetic shielding plates 37 are provided on both arc-shaped rods 34; One of the arc-shaped rods 34 is provided with a block 35 with a driving inclined surface 36 , and the block 35 is located below the pressing rod 40 .

[0040] When the seed crystal 42 separates and falls to the upper and lower inner rings 5 ​​and drives the lower inner ring 5 to move downward, its downward pressure rod 40 will contact and squeeze with the driving inclined surface 36 at the upper end of the block 35, and make the arc rod 34 rotate in a circle around the axis of the lower outer ring 3 and shield the first magnetic block 11 through the magnetic shielding plate 37. Finally, the downward pressure rod 40 will break away from the driving inclined surface 36. At this time, as the lower inner ring 5 continues to move downward, the weight of the seed crystal 42 will be basically completely borne on the two extrusion columns 32, thereby increasing the friction between the elastic extrusion column 28 and the support frame 1 and enhancing the braking effect. After the seed crystal 42 is removed, the arc rod 34 automatically returns to its original position through the elastic force of the reset spring 39 (releasing the blocking of the magnetic shielding plate 37 to the first magnetic block 11).

[0041] It should be noted that the magnetic shielding plate 37 is a magnetic isolation material.

[0042] As a preferred implementation mode of this embodiment, it also includes a knocking intensity automatic variable unit, which can automatically change the knocking intensity of the impact ball 119 and the crucible cover 41 according to the needs of the knocking part during the knocking process.

[0043] As a preferred implementation in this embodiment, Fig.11 As shown, the tapping intensity self-changing unit includes a first gradual change area L1, a constant area L2 and a second gradual change area L3 which are sequentially arranged on the driving bar 110; The wave crests in the first gradient zone L1 become higher from right to left; The peaks and valleys in the constant region L2 remain unchanged, and the peak height of the constant region L2 is the highest peak height of the first gradual change region L1; The peak height in the second gradient zone L3 gradually decreases; The distances between the crests and troughs in the first gradual change area L1 , the constant area L2 and the second gradual change area L3 are consistent, and the heights of the troughs in the first gradual change area L1 , the constant area L2 and the second gradual change area L3 are consistent.

[0044] When the roller 116 moves on the first gradient zone L1, the impact strength of the L-shaped rod 115 on the crucible cover increases continuously. The gradually increasing knocking strength can give the bonding surface between the crucible cover and the seed crystal a gradual adaptation process, reducing the stress concentration and cracking risks that may be caused by sudden large impacts. Although the knocking strength at this stage is not strong, it has begun to act on the bonding surface between the seed crystal and the crucible cover, which is helpful for subsequent separation. When the roller 116 moves on the constant area L2, the impact strength of the L-shaped rod 115 on the crucible cover remains unchanged, and the knocking is continued at a stable maximum knocking strength, which can continuously exert an effect on the bonding surface between the seed crystal and the crucible cover, accelerating the destruction and separation of the bonding surface. Compared with the gradual increase in the first stage, the stable knocking strength in this stage can more effectively promote separation and improve separation efficiency; When the roller 116 moves on the second gradient zone L2, the impact strength of its L-shaped rod 115 on the crucible cover gradually decreases. When the seed crystal is about to or has been separated from the crucible cover, reducing the knocking strength can avoid excessive impact on the loose seed crystal or crucible cover and causing damage. The gradually reduced knocking strength helps to stably end the knocking process and ensure the smooth separation of the seed crystal.

[0045] The crucible cover is divided into a first gradual change zone L1, a constant zone L2 and a second gradual change zone L3, so as to accelerate the stable separation of the seed crystal from the crucible cover without damaging the crucible cover and the seed crystal.

[0046] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A combined seed crystal separation device, comprising a support frame (1) and a bracket (101), characterized in that: It also includes a suspension unit installed on the support frame (1) and used to carry the combination of the crucible cover (41) and the seed crystal (42) and suspend the combination; and an automatic knocking unit installed on the support frame (101), the automatic knocking unit being capable of automatically knocking the upper end of the crucible cover (41).

2. A combined seed crystal separation device according to claim 1, characterized in that: The suspension unit comprises an upper outer ring (2) and a lower outer ring (3) which are arranged on the support frame (1) in an upper and lower manner, and an upper inner ring (4) and a lower inner ring (5) which are arranged corresponding to the upper outer ring (2) and the lower outer ring (3), respectively; the upper ends of the upper outer ring (2), the lower outer ring (3), the upper inner ring (4) and the lower inner ring (5) are all provided with arc-shaped baffles (401) opposite to each other, and the upper ends of the arc-shaped baffles (401) of the upper outer ring (2) and the lower outer ring (3) are both fixed with limit blocks (6); A second magnetic ring (10) is mounted on the lower end of the upper inner ring (4), and a first magnetic ring (9) is mounted on the upper end of the upper outer ring (2), wherein the magnetic poles of the opposite ends of the first magnetic ring (9) and the second magnetic ring (10) are the same; A plurality of first magnetic blocks (11) are circumferentially arranged at the upper end of the lower outer ring (3), and a plurality of second magnetic blocks (12) are correspondingly arranged at the lower end of the lower inner ring (5), wherein the magnetic poles of the opposite ends of the plurality of first magnetic blocks (11) and the corresponding second magnetic blocks (12) are the same; At least two first limiting magnets (7) are circumferentially arranged on the inner walls of the two arc-shaped baffles (401) on the upper outer ring (2) and the lower outer ring (3), and at least two second limiting magnets (8) are circumferentially arranged on the inner walls of the two arc-shaped baffles (401) on the upper inner ring (4) and the lower inner ring (5), wherein the plurality of second limiting magnets (8) are arranged in one-to-one correspondence with the plurality of first limiting magnets (7), and the magnetic poles at the opposite ends are the same; The automatic knocking unit comprises a mounting plate (102) mounted on the bracket (101), an adjusting screw rod (105) threadedly connected to the bracket (101), a rotating motor (106) mounted on the mounting plate (102), and a gear ring (107); The inner cavity of the mounting plate (102) is provided with a plurality of U-shaped plates (108) in a circular shape, and a reciprocating screw rod (111) is rotatably provided on each of the plurality of U-shaped plates (108), and a ball nut (114) is threadedly sleeved on the reciprocating screw rod (111), and side plates are fixed to both side ends of the ball nut (114), one of the side plates is slidably penetrated by a rod body (109) mounted on the U-shaped plate (108), and an L-shaped rod (115) is slidably penetrated on the other side plate, and a roller (116) is rotatably provided on the upper end of the L-shaped rod (115), and an elastic impact ball (119) is installed on the lower end of the L-shaped rod (115), and a mounting ring (118) is fixed on the L-shaped rod (115), and the mounting ring (118) and the side plate are connected via a compression spring (117); A driving bar (110) with a wave-shaped structure is mounted on the U-shaped plate (108), and the driving bar (110) is located above the reciprocating screw rod (111), and two ends of the driving bar (110) are provided with plane rods (113) with horizontal upper ends, and the upper end surface of the plane rod (113) is located between the wave crest surface and the wave trough surface of the driving bar (110); The gear ring (107) is rotatably arranged in the inner cavity of the mounting plate (102), and the gear ring (107) is gear-engaged with a gear on the output shaft of the rotating motor (106) and a rotating gear (112) arranged on one end of a plurality of reciprocating screw rods (111); The lower end of the adjusting screw rod (105) is rotatably connected to the upper end of the mounting plate (102); the upper end of the mounting plate (102) is connected to the telescopic rod (104) via a rotary bearing (103); and the telescopic rod (104) is mounted on the bracket (1); The lower end of the bracket (101) is slidably arranged on a slide rail.

3. A combined seed crystal separation device according to claim 2, characterized in that: It also includes an automatic adjustment unit that can automatically adapt to the suspension separation of seed crystals (42) of different lengths and the crucible cover (41).

4. A seed crystal separation carrier according to claim 3, characterized in that: The automatic adjustment unit comprises two sliding sleeves (14) slidably mounted on the support frame (1), two transverse plates (13) mounted on the outer wall of the lower outer ring (3), and two pulley blocks (16) arranged at the upper end of the support frame (1), the two sliding sleeves (14) being respectively fixedly mounted at the ends corresponding to the transverse plates (13); The upper ends of the two horizontal plates (13) are connected to a pull rope (17), and the two pull ropes (17) are mounted on the corresponding pulley blocks (16). The ends of the pull ropes (17) away from the horizontal plates (13) pass through the support frame (1) and are connected to the weight (18). The two pull ropes (17) are fixed with a retaining ring (19). At the beginning, under the action of the gravity of the weight (18), the retaining ring (19) contacts the support frame (1) to form a blockage.

5. The seed crystal separation carrier according to claim 4, characterized in that: It also comprises a slowing unit for slowing down the lower outer ring (3) carrying the separated seed crystals and moving downward.

6. The seed crystal separation carrier according to claim 5, characterized in that: The damping unit comprises a cylinder (31) with an elastic sealing diaphragm (33) inside, a bevel gear (22) rotatably arranged on a plate (20) via a rotating shaft, and a gear rod (27) slidably arranged in a U-shaped groove (26); The gear rod (27) is gear-connected with the bevel gear (22) by rotating a transmission gear (25) arranged on the plate body (20); an elastic extrusion column (28) is rotatably arranged on the end of the gear rod (27) close to the sliding sleeve (14); and the elastic extrusion column (28) is located in an inner cavity of an opening (15) provided on the sliding sleeve (14); and the U-shaped groove (26) is fixedly connected to the transverse plate (13); The upper end of the bevel gear (22) is provided with a long vertical rod (21), and a push rod (23) is rotatably provided on the front end of the vertical rod (21), and the end of the push rod (23) is located in the cavity of the long driving ring (24), and a movable rod (29) is fixed to the side end of the driving ring (24), and one end of the movable rod (29) away from the driving ring (24) is sealed and slidably arranged in the inner cavity of the hollow tube (30), and the hollow tube (30) is communicated with the inner cavity of the cylinder (31); The cylinder (31) is mounted on the lower end of the lower outer ring (3); an extrusion column (32) is fixed to the upper end of the elastic sealing diaphragm (33); and the upper end of the extrusion column (32) slides through the lower outer ring (3); and a contact plate (51) adapted to the extrusion column (32) is provided on the outer wall of the arc-shaped baffle (401) on the lower inner ring (5); The plate body (20) is fixed on the transverse plate (13).

7. A seed crystal separation carrier according to claim 6, characterized in that: It also includes a magnetic shielding structure, which is used to shield the magnetic field between the first magnetic block (11) and the second magnetic block (12) when the separated seed crystal is carried on the lower inner ring (5), so that the weight of the seed crystal acts on the extrusion column (32).

8. The seed crystal separation carrier according to claim 7, characterized in that: The magnetic shielding structure comprises two arc-shaped rods (34) connected by a connecting rod and arranged circumferentially, and a lower pressure rod (40) arranged on the outer wall of the arc-shaped baffle (401) on the lower inner ring (5); A curved slider (38) is provided at the lower end of one of the curved rods (34), and the curved slider (38) is slidably arranged in a curved groove arranged at the upper end of the lower outer ring (3), the inner wall of the curved groove and the curved slider (38) are connected via a return spring (39) with an arc structure, and a plurality of magnetic shielding plates (37) are provided on both of the two curved rods (34); One of the arc-shaped rods (34) is provided with a block (35) having a driving inclined surface (36), and the block (35) is located below the pressing rod (40).

9. The seed crystal separation carrier according to claim 7, characterized in that: It also includes a knocking intensity automatic variable unit, which can automatically change the knocking intensity of the impact ball (119) and the crucible cover (41) according to the needs of the knocking part during the knocking process.

10. The seed crystal separation carrier according to claim 7, characterized in that: The knocking intensity self-varying unit comprises a first gradual change area L1, a constant area L2, and a second gradual change area L3 which are arranged in sequence on the driving bar (110); The wave crests in the first gradient zone L1 become higher from right to left; The peaks and valleys in the constant region L2 remain unchanged, and the peak height of the constant region L2 is the highest peak height of the first gradual change region L1; The peak height in the second gradient zone L3 gradually decreases; The distances between the crests and troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent, and the heights of the troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent.

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