A carrier for seed crystal separation

Abstract

The application discloses a bearing frame for seed crystal separation and relates to the technical field of semiconductors. The bearing frame comprises a support frame and a suspension unit installed on the support frame and used for bearing the combination of a crucible cover and a seed crystal and suspending the combination. The suspension unit is arranged, so that the seed crystal is in a suspended state. When the seed crystal is knocked, the vibration caused by the knocking can directly act on the bonding interface, the impact force is more concentrated, and the rapid separation of the crucible cover and the seed crystal is facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a bearing frame for seed crystal separation. BACKGROUND

[0002] Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, and high chemical stability, and can be made into high-frequency and high-power electronic and optoelectronic devices that work under high temperature and strong radiation conditions, which has great application value in the fields of national defense, high technology, industrial production, power supply, and power transformation, and is considered as a third-generation wide-bandgap semiconductor material with great development prospects.

[0003] At present, in the preparation of silicon carbide crystals, a seed crystal is usually needed as a starting crystal to provide a template for the growth of a new crystal, and in actual installation, most of the seed crystals are bonded to the crucible cover by high-temperature glue. After the crystal preparation is completed, a knocking method is generally used to knock the crucible cover to break the bonding layer and separate the seed crystal from the crucible cover.

[0004] When the seed crystal is separated from the crucible cover by the knocking method, a bearing frame (used to bear the combination of the seed crystal and the crucible cover) and a knocking rod are needed. Since the bearing frame is placed on the installation table, when the knocking rod knocks the crucible cover on the bearing frame, part of the energy is lost due to the effect of vibration conduction (contact between the crucible cover and the bearing frame), which reduces the damage effect of knocking on the bonding layer and is not conducive to the rapid separation of the seed crystal from the crucible cover. Therefore, the present application provides a bearing frame for seed crystal separation to meet the needs. SUMMARY

[0005] The present application aims to provide a bearing frame for seed crystal separation to solve the technical problems raised in the above background.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solution: a bearing frame for seed crystal separation, comprising a support frame, further comprising a suspension unit installed on the support frame, used to bear the combination of the crucible cover and the seed crystal and make the combination suspended.

[0007] As a preferred embodiment in the present embodiment, the suspension unit comprises an upper outer ring and a lower outer ring arranged above and below the support frame, and an upper inner ring and a lower inner ring arranged corresponding to the upper outer ring and the lower outer ring, respectively, the upper ends of the upper outer ring, the lower outer ring, the upper inner ring, and the lower inner ring are all relatively provided with arc-shaped baffles, and the upper ends of the arc-shaped baffles of the upper outer ring and the lower outer ring are both fixed with limit blocks;

[0008] The lower end of the upper inner ring is installed with a second magnetic ring, the upper end of the upper outer ring is installed with a first magnetic ring, and the opposite end poles of the first magnetic ring and the second magnetic ring are the same.

[0009] The upper end of the lower outer ring is circumferentially provided with a plurality of first magnetic blocks, and the lower end of the lower inner ring is correspondingly provided with a plurality of second magnetic blocks, the plurality of first magnetic blocks and the opposite end of the corresponding second magnetic blocks have the same magnetic pole;

[0010] The inner wall of the two arc-shaped baffles on the upper outer ring and the lower outer ring is circumferentially provided with not less than two first limiting magnets, and the inner wall of the two arc-shaped baffles on the upper inner ring and the lower inner ring is circumferentially provided with not less than two second limiting magnets, the plurality of second limiting magnets and the plurality of first limiting magnets are one-to-one corresponding, and the opposite end magnetic poles are the same.

[0011] As a preferred embodiment in the present embodiment, it further comprises an automatic adjusting unit, which can automatically adapt to the suspension separation of the seed crystal and the crucible cover with different lengths.

[0012] As a preferred embodiment in the present embodiment, the automatic adjusting unit comprises two sliding sleeves slidingly arranged on the support frame, two transverse plates mounted on the outer wall of the lower outer ring, and two pulley blocks arranged at the upper end of the support frame, and the two sliding sleeves are fixedly arranged at the end of the corresponding transverse plate.

[0013] The upper end of the two transverse plates is connected with a pull rope, and the two pull ropes are assembled on the corresponding pulley block, one end of the pull rope away from the transverse plate penetrates the support frame and is connected with a weight, and a blocking ring is fixedly arranged on the two pull ropes. At the beginning, under the action of the gravity of the weight, the blocking ring is in contact with the support frame to form a block.

[0014] As a preferred embodiment in the present embodiment, it further comprises a blocking and slowing unit, which blocks and slows the downward movement of the lower outer ring carrying the separated seed crystal.

[0015] As a preferred embodiment in the present embodiment, the blocking and slowing unit comprises a cylinder body with an elastic sealing diaphragm inside, an umbrella-shaped gear rotatingly arranged on a plate body through a rotating shaft, and a toothed rod slidingly arranged in a U-shaped groove.

[0016] The toothed rod is in gear connection with the umbrella-shaped gear through a transmission gear rotatingly arranged on the plate body, an elastic extrusion column is rotatingly arranged on the end of the toothed rod close to the sliding sleeve, and the elastic extrusion column is located in the opening inner cavity provided on the sliding sleeve, and the U-shaped groove is fixedly connected with the transverse plate.

[0017] The upper end of the bevel gear is provided with a long strip-shaped vertical rod, and a push rod is rotationally arranged on the front end of the vertical rod, and the end of the push rod is located in the cavity of a long strip-shaped driving ring, the side end of the driving ring is fixed with a movable rod, and the end of the movable rod away from the driving ring is sealingly and slidingly arranged in the inner cavity of a hollow tube which is communicated with the inner cavity of the cylinder body;

[0018] The cylinder body is mounted on the lower end of the lower outer ring, the upper end of the elastic sealing diaphragm is fixed with a pressing column, and the upper end of the pressing column slidingly penetrates the lower outer ring, and the outer wall of the arc-shaped baffle on the lower inner ring is provided with a contact plate matched with the pressing column.

[0019] The plate body is fixed on the cross plate.

[0020] As a preferred embodiment in the present embodiment, a magnetic shielding structure is further included, which is used for shielding the magnetic field action between the first magnetic block and the second magnetic block when the separated seed crystal is carried on the lower inner ring, so that the weight of the seed crystal acts on the pressing column.

[0021] As a preferred embodiment in the present embodiment, the magnetic shielding structure includes two arc-shaped rods which are connected by a connecting rod and are circumferentially arranged, and a pressing rod which is arranged on the outer wall of the arc-shaped baffle on the lower inner ring.

[0022] The lower end of one of the arc-shaped rods is provided with an arc-shaped sliding block which is slidingly arranged in an arc-shaped groove arranged on the upper end of the lower outer ring, and the inner wall of the arc-shaped groove and the arc-shaped sliding block are connected by a reset spring in an arc-shaped structure, and a plurality of magnetic shielding plates are arranged on each of the two arc-shaped rods.

[0023] One of the arc-shaped rods is provided with a block body with a driving inclined surface, and the block body is located below the pressing rod.

[0024] In summary, the technical effects and advantages of the present application are as follows:

[0025] 1. The structure of the present application is reasonable, and by arranging the suspension unit, the seed crystal can be in a suspended state, and when the seed crystal is knocked, the vibration generated by the knocking can directly act on the bonding interface, so that the impact force is more concentrated, which is beneficial to the rapid separation of the crucible cover and the seed crystal.

[0026] 2. In the present application, an automatic adjusting unit is arranged, so that the present carrier frame can be suitable for the suspension bearing of the combination of seed crystals and crucible covers with different lengths.

[0027] 3. In the present application, a resistance slowing unit is arranged, which can automatically slow down seed crystals 42 with different lengths to different degrees, and form good protection for the seed crystals.

[0028] 4、The invention, provided with a magnetic shielding structure, can shield the first magnetic block, and the weight of the seed crystal is basically completely borne on the two extrusion columns, thereby increasing the friction between the elastic extrusion column and the support frame and enhancing the blocking effect on the lower outer ring. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0030] Figure 1 is a schematic diagram of the three-dimensional structure of the present application;

[0031] Figure 2 is Figure 1 is a schematic diagram of the partial split structure in the middle;

[0032] Figure 3 is Figure 2 is a schematic diagram of the upper and lower inner ring structures in the middle;

[0033] Figure 4 is Figure 1 is a schematic diagram of the front view structure in the middle;

[0034] Figure 5 is Figure 2 is a schematic diagram of the blocking unit amplification structure in the middle;

[0035] Figure 6 is Figure 5 is a schematic diagram of the cross-sectional structure of the cylinder in the middle;

[0036] Figure 7 is Figure 2 is a magnetic shielding structure diagram.

[0037] In the figure: 1, support frame; 2, upper outer ring; 3, lower outer ring; 4, upper inner ring; 401, arc-shaped baffle; 5, lower inner ring; 51, contact plate; 6, limiting block; 7, first limiting magnet; 8, second limiting magnet; 9, first magnetic ring; 10, second magnetic ring; 11, first magnetic block; 12, second magnetic block; 13, cross plate; 14, sliding sleeve; 15, opening; 16, pulley block; 17, pull rope; 18, weight; 19, blocking ring; 20, plate body; 21, vertical rod; 22, umbrella-shaped gear; 23, push rod; 24, driving ring; 25, transmission gear; 26, U-shaped groove; 27, toothed rod; 28, elastic extrusion column; 29, movable rod; 30, hollow tube; 31, barrel; 32, extrusion column; 33, elastic sealing diaphragm; 34, arc-shaped rod; 35, block body; 36, driving slope; 37, magnetic shielding plate; 38, arc-shaped sliding block; 39, return spring; 40, pressing rod; 41, crucible cover; 42, seed crystal. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0039] Embodiment: Referring to Figure 1 The bearing frame for seed crystal separation shown in the figure comprises a support frame 1, further comprises a suspension unit installed on the support frame 1, used for bearing the combination of the crucible cover 41 and the seed crystal 42 and suspending the combination.

[0040] By arranging the suspension unit, the seed crystal can be in a suspended state, and the vibration caused by knocking can directly act on the bonding interface when the seed crystal is knocked, so that the impact force is more concentrated, which is beneficial to the rapid separation of the crucible cover 41 and the seed crystal 42.

[0041] As a preferred embodiment in the present embodiment, as shown in the figure, Figures 1-3 The suspension unit comprises an upper outer ring 2 and a lower outer ring 3 arranged on the support frame 1 in an up-down manner, and an upper inner ring 4 and a lower inner ring 5 arranged correspondingly with the upper outer ring 2 and the lower outer ring 3, respectively, the upper ends of the upper outer ring 2, the lower outer ring 3, the upper inner ring 4 and the lower inner ring 5 are oppositely provided with arc-shaped baffles 401, and the upper ends of the arc-shaped baffles 401 of the upper outer ring 2 and the lower outer ring 3 are fixed with limiting blocks 6;

[0042] The lower end of the upper inner ring 4 is provided with a second magnetic ring 10, and the upper end of the upper outer ring 2 is provided with a first magnetic ring 9, the opposite ends of the first magnetic ring 9 and the second magnetic ring 10 have the same magnetic pole;

[0043] The upper end of the lower outer ring 3 is circumferentially provided with a plurality of first magnetic blocks 11, and the lower end of the lower inner ring 5 is correspondingly provided with a plurality of second magnetic blocks 12, the relative end magnetic poles of the plurality of first magnetic blocks 11 and the corresponding second magnetic blocks 12 are the same;

[0044] The inner wall of the two arc-shaped baffles 401 on the upper outer ring 2 and the lower outer ring 3 is circumferentially provided with no less than two first limiting magnets 7, and the inner wall of the two arc-shaped baffles 401 on the upper inner ring 4 and the lower inner ring 5 is circumferentially provided with no less than two second limiting magnets 8, the plurality of second limiting magnets 8 are correspondingly provided with the plurality of first limiting magnets 7, and the relative end magnetic poles are the same.

[0045] In use, the seed crystal of the combination is inserted from top to bottom, so that the lower end of the crucible cover 41 contacts the upper end of the upper inner ring 4 to form a support, and the upper end of the seed crystal contacts the upper end of the lower inner ring 5, most of the weight acts on the upper inner ring 4 (at this time the upper inner ring 4 is suspended in the inner cavity of the upper outer ring 2 and does not contact the limiting block 6), and a small part of the weight acts on the lower inner ring 5 (at this time the lower inner ring 5 is suspended in the inner cavity of the lower outer ring 3 and does not contact the limiting block 6), so that the seed crystal forms an integral whole with the upper inner ring 4 and the lower inner ring 5 and is suspended (which is suspended by the repulsive force between the first magnetic ring 9 and the second magnetic ring 10 and the repulsive force between the first magnetic block 11 and the second magnetic block 12, and the upper inner ring 4 and the lower inner ring 5 are limited by the repulsive force between the first limiting magnet 7 and the second limiting magnet 8), at this time the upper end of the crucible cover 41 is knocked by the knocking device, which can effectively reduce the energy damage caused by vibration conduction, is conducive to the destruction of the bonding interface, and speeds up the separation of the crucible cover 41 and the seed crystal 42, and when separating, the seed crystal 42 will automatically fall onto the lower inner ring 5 by the action of gravity.

[0046] It should be noted that, first, most of the weight acts on the upper inner ring 4, and a small part of the weight acts on the lower inner ring 5, so that the gravity of the seed crystal 42 is very small, and the seed crystal 42 has a downward gravitational force on the bonding interface, which is conducive to speeding up the separation of the crucible cover 41 and the seed crystal 42; second, when the seed crystal 42 falls, the repulsive force between the first magnetic block 11 and the second magnetic block 12 can slow down the falling speed, prevent the seed crystal 42 from being damaged by relatively violent collision, and finally make the lower inner ring 5 contact the lower outer ring 3 under the action of the gravity of the seed crystal 42, and an elastic pad can be further arranged on the upper end of the lower outer ring 3 to reduce the buffer; third, the arrangement of the arc-shaped baffles 401 can ensure that the crucible cover 41 and the seed crystal 42 can be stably stopped on the corresponding upper inner ring 4 and lower inner ring 5 respectively; fourth, the limiting block 6 can prevent the upper inner ring 4 and the lower inner ring 5 from moving out of the inner cavities of the corresponding upper outer ring 2 and lower outer ring 5 under the action of the repulsive force; fifth, two notches can be arranged on the upper inner ring 4 and the lower inner ring 5, and the notches are not arranged on the side with the arc-shaped baffles 401, and the purpose is to facilitate the taking and placing of the crucible cover 41 or the seed crystal 42.

[0047] As a preferred embodiment in the present embodiment, an automatic adjusting unit is further included, which can automatically adapt to the suspension separation of the seed crystal 42 and the crucible cover 41 with different lengths.

[0048] Since the length of the seed crystal produced varies according to the actual situation during the production of the seed crystal, the length of the seed crystal produced by the company varies in the range of 12 to 21 cm. In order to ensure that the carrier frame can be applicable to the suspension carrying of the combination of the seed crystal and the crucible cover with different lengths, an automatic adjusting unit is arranged, which can change the distance between the upper outer ring 2 and the lower outer ring 3.

[0049] As a preferred embodiment in the present embodiment, as shown in Figures 2-4 the automatic adjusting unit includes two sliding sleeves 14 slidingly sleeved on the support frame 1, two transverse plates 13 installed on the outer wall of the lower outer ring 3, and two pulley sets 16 arranged at the upper end of the support frame 1, and the two sliding sleeves 14 are fixedly arranged at the end of the corresponding transverse plate 13.

[0050] The upper end of each of the two transverse plates 13 is connected with a pull rope 17, and the two pull ropes 17 are assembled on the corresponding pulley set 16. The end of the pull rope 17 away from the transverse plate 13 penetrates through the support frame 1 and is connected with a weight 18. The two pull ropes 17 are each fixedly provided with a blocking ring 19. Initially, under the action of the gravity of the weight 18, the blocking ring 19 is in contact with the support frame 1 to form a blockage.

[0051] In the initial state, the contact between the blocking ring 19 and the support frame 1 causes the lower outer ring 3 to maintain a certain height (the lower outer ring 3 has a tendency to move upward, i.e., when the blockage of the blocking ring 19 is removed, the lower outer ring 3 moves upward). The seed crystal is inserted from top to bottom, and the lower end of the seed crystal 42 will be in contact with the upper end of the lower inner ring 5. As the seed crystal 42 continues to move downward, the repulsive force between the magnetic blocks will cause the lower outer ring 3 to overcome the gravitational action of the weight 18 and move downward, and finally the crucible cover 41 will be in contact with the upper end of the upper inner ring 4. At this time, the combination is in a suspended state (at this time, the upper inner ring 4 and the lower inner ring 5 are not in contact with the limiting block 6, and they are in a suspended state), and the lower outer ring 3 remains stationary. When the seed crystal 42 is separated and falls, the seed crystal 42 drives the lower inner ring 5 to move downward and come into contact with the upper end of the lower outer ring 3. At this time, the entire gravitational force of the seed crystal acts on the lower outer ring 3, which can drive the lower outer ring 3 to move downward. When the upper end of the weight 18 comes into contact with the support frame 1, the lower outer ring 3 stops moving. At this time, the seed crystal 42 can be removed. After the seed crystal 42 is removed, the gravitational action of the weight 18 will drive the lower outer ring 3 to move upward to restore the original position (the lower inner ring 5 is also automatically reset under the action of the magnetic force). The automatic adjusting unit can automatically adjust the distance between the upper outer ring 2 and the lower outer ring 3 according to the length of the seed crystal 42, so as to adapt to the suspension separation of the seed crystal 42 and the crucible cover 41 with different lengths, and also has an automatic reset function.

[0052] It should be noted that, firstly, the sum of the gravity of the weights is greater than the sum of the total gravity of the sliding sleeve 14, the horizontal plate 13 and the lower outer ring 3 (including the components thereon) and the frictional resistance of the movement of the sliding sleeve 14; secondly, the structure (owing to its downward movement) can provide a sufficient operation space for taking the seed crystal 42 off the lower outer ring 3.

[0053] As a preferred embodiment in the present embodiment, a retarding unit is further included to retard the downward movement of the lower outer ring 3 carrying the separated seed crystal.

[0054] When the seed crystal 42 drives the lower outer ring 3 to move downward, the lower outer ring 3 will be suddenly stationary after the weight 18 contacts the support frame 1 to form a barrier, which will cause a great impact on the seed crystal (and the seed crystal 42 is prone to unstable and falling after the collision), and the seed crystal 42 is prone to be damaged and is not conducive to the stability of the seed crystal 42 on the lower outer ring 3.

[0055] As a preferred embodiment in the present embodiment, as shown in Figure 2 , Figure 5 and Figure 6 , the retarding unit includes a cylinder 31 with an elastic sealing diaphragm 33 inside, an umbrella-shaped gear 22 rotatably arranged on the plate body 20, and a toothed rod 27 slidingly arranged in a U-shaped groove 26.

[0056] The toothed rod 27 is in gear connection with the umbrella-shaped gear 22 through a transmission gear 25 rotatably arranged on the plate body 20, and an elastic extrusion column 28 is rotatably arranged on the end of the toothed rod 27 close to the sliding sleeve 14, and the elastic extrusion column 28 is located in the inner cavity of the opening 15 provided on the sliding sleeve 14, and the U-shaped groove 26 is fixedly connected with the horizontal plate 13.

[0057] The upper end of the umbrella-shaped gear 22 is provided with an elongated vertical rod 21, and a push rod 23 is rotatably arranged on the front end of the vertical rod 21, and the end of the push rod 23 is located in the cavity of an elongated driving ring 24, and the side end of the driving ring 24 is fixed with a movable rod 29, and the end of the movable rod 29 away from the driving ring 24 is sealingly and slidingly arranged in the inner cavity of a hollow pipe 30, and the hollow pipe 30 is communicated with the inner cavity of the cylinder 31.

[0058] The cylinder 31 is installed at the lower end of the lower outer ring 3, the upper end of the elastic sealing diaphragm 33 is fixed with an extrusion column 32, and the upper end of the extrusion column 32 slidingly penetrates the lower outer ring 3, and the outer wall of the arc-shaped baffle 401 on the lower inner ring 5 is provided with a contact plate 51 matched with the extrusion column 32.

[0059] The plate body 20 is fixed on the horizontal plate 13.

[0060] When the combination is in a suspended state, the lower inner ring 5 does not contact the upper end of the lower outer ring 3. When the seed crystal 42 is separated from the crucible cover 41, the contact plate 51 on the lower inner ring 5 will contact the extrusion column 32, and the extrusion column 32 will move downward, causing the elastic sealing diaphragm 33 to deform downward, extruding the gas in the cylinder 31 and causing the movable rod 29 to drive the driving ring 24 to move outward, pushing the push rod 23 to move, and then causing the umbrella-shaped gear 22 to rotate around the shaft, driving the toothed rod 27 to move outward through the transmission gear 25, and then causing the elastic extrusion column 28 to tightly contact the outer wall of the support frame 1, thereby increasing the frictional resistance and reducing the downward speed of the lower outer ring 3. In the above process, due to the blocking of the elastic sealing diaphragm 33, the lower end of the lower inner ring 5 is always not in contact with the upper end of the lower outer ring 3, so that the blocking unit can automatically block the seed crystal 42 of different lengths to different degrees (i.e., the blocking effect is proportional to the weight of the seed crystal 42). When the seed crystal 42 is removed, the elastic sealing diaphragm 33 drives the movable rod 29 to return to the original position, and finally the elastic extrusion column 28 is in contact with the support frame 1. Under the action of the gravity of the weight 18, the lower outer ring 3 moves upward to return to the original position.

[0061] It should be noted that the length of the plate body 20 is greater than the radius of the umbrella-shaped gear 22, thereby forming a force-saving lever, which is conducive to further improving the blocking effect of the lower outer ring 3.

[0062] As a preferred embodiment in this embodiment, a magnetic shielding structure is further included. When the separated seed crystal is carried on the lower inner ring 5, the magnetic shielding structure is used to shield the magnetic field action between the first magnetic block 11 and the second magnetic block 12, so that the weight of the seed crystal acts on the extrusion column 32.

[0063] Due to the existence of magnetic repulsive force, the weight of the seed crystal 42 cannot completely act on the extrusion column 32, and the blocking effect of the lower outer ring 3 is weakened, so the magnetic shielding mechanism is set to solve this problem.

[0064] As a preferred embodiment in this embodiment, as shown in Figure 1 and Figure 7 The magnetic shielding structure includes two arc-shaped rods 34 connected by a connecting rod and circumferentially arranged, and a downward pressing rod 40 arranged on the outer wall of the arc-shaped baffle 401 on the lower inner ring 5.

[0065] The lower end of one of the arc-shaped rods 34 is provided with an arc-shaped sliding block 38, and the arc-shaped sliding block 38 is slidingly arranged in an arc-shaped groove arranged on the upper end of the lower outer ring 3. The arc-shaped groove inner wall and the arc-shaped sliding block 38 are connected by an arc-shaped reset spring 39. A plurality of magnetic shielding plates 37 are arranged on each of the two arc-shaped rods 34.

[0066] One of the arc-shaped rods 34 is provided with a block 35 with a driving inclined surface 36, and the block 35 is located below the downward pressing rod 40.

[0067] When the seed crystal 42 falls to the upper and lower inner rings 5 and drives the lower inner ring 5 to move downward, the lower pressing rod 40 will contact and press the driving slope 36 on the upper end of the block 35, and make the arc-shaped rod 34 rotate around the axis of the lower outer ring 3 and shield the first magnetic block 11 through the shielding plate 37. Finally, the lower pressing rod 40 will be separated from the driving slope 36. At this time, as the lower inner ring 5 continues to move downward, the weight of the seed crystal 42 will be basically completely borne on the two pressing columns 32, thereby increasing the friction between the elastic pressing column 28 and the support frame 1 and enhancing the blocking effect. After the seed crystal 42 is taken off, the arc-shaped rod 34 is automatically restored to the original position (the blocking of the first magnetic block 11 by the shielding plate 37 is released) through the elastic force of the reset spring 39.

[0068] It should be noted that the shielding plate 37 is a magnetic shielding material.

[0069] Finally, it should be pointed out that the above description is only the preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacements to some technical features, as long as they are within the spirit and principles of the present application. Any modification, equivalent replacement, improvement, etc. made within the scope of the present application should be included in the protection scope of the present application.

Claims

1. A carrier for seed crystal separation comprising a support frame (1) characterised in that: The suspension unit is installed on the support frame (1) and used for carrying and suspending the combination of the crucible cover (41) and the seed crystal (42); The suspension unit comprises an upper outer ring (2) and a lower outer ring (3) arranged on the support frame (1) in a top-to-bottom manner, and an upper inner ring (4) and a lower inner ring (5) arranged correspondingly to the upper outer ring (2) and the lower outer ring (3), respectively, and the upper ends of the upper outer ring (2), the lower outer ring (3), the upper inner ring (4) and the lower inner ring (5) are relatively provided with arc-shaped baffles (401), and the upper ends of the arc-shaped baffles (401) of the upper outer ring (2) and the lower outer ring (3) are fixed with limit blocks (6); The lower end of the upper inner ring (4) is provided with a second magnetic ring (10), the upper end of the upper outer ring (2) is provided with a first magnetic ring (9), and the opposite end magnetic poles of the first magnetic ring (9) and the second magnetic ring (10) are the same; The upper end of the lower outer ring (3) is circumferentially provided with a plurality of first magnetic blocks (11), and the lower end of the lower inner ring (5) is correspondingly provided with a plurality of second magnetic blocks (12), and the opposite end magnetic poles of the plurality of first magnetic blocks (11) and the corresponding second magnetic blocks (12) are the same; The inner walls of the two arc-shaped baffles (401) on the upper outer ring (2) and the lower outer ring (3) are circumferentially provided with no less than two first limit magnets (7), and the inner walls of the two arc-shaped baffles (401) on the upper inner ring (4) and the lower inner ring (5) are circumferentially provided with no less than two second limit magnets (8), and the plurality of second limit magnets (8) and the plurality of first limit magnets (7) are one-to-one corresponding and have the same opposite end magnetic poles.

2. A carrier for seed crystal separation according to claim 1, wherein: The automatic adjusting unit is further provided, which can automatically adapt to the suspension and separation of the seed crystal (42) and the crucible cover (41) with different lengths.

3. A carrier for seed crystal separation according to claim 2, wherein: The automatic adjusting unit comprises two sliding sleeves (14) slidingly sleeved on the support frame (1), two transverse plates (13) installed on the outer wall of the lower outer ring (3), and two pulley sets (16) arranged at the upper end of the support frame (1), and the two sliding sleeves (14) are fixedly arranged at the ends of the corresponding transverse plates (13), respectively. The upper ends of the two transverse plates (13) are connected with pull ropes (17), the two pull ropes (17) are assembled on the corresponding pulley sets (16), one end of the pull rope (17) away from the transverse plate (13) penetrates through the support frame (1) and is connected with a weight (18), and the two pull ropes (17) are fixedly provided with stop rings (19), and initially, under the action of the gravity of the weight (18), the stop ring (19) is in contact with the support frame (1) to form a block.

4. A carrier for seed crystal separation according to claim 3, wherein: The resistance and slowing unit is further provided, which resists and slows the downward movement of the lower outer ring (3) carrying the separated seed crystal.

5. A carrier for seed crystal separation according to claim 4, wherein: The resistance and slowing unit comprises a cylinder (31) internally provided with an elastic sealing diaphragm (33), an umbrella-shaped gear (22) rotatably arranged on a plate body (20), and a toothed rod (27) slidingly arranged in a U-shaped groove (26). The tooth bar (27) is toothed with the bevel gear (22) by rotating the transmission gear (25) arranged on the plate body (20), the elastic extrusion column (28) is arranged on the end of the tooth bar (27) close to the sliding sleeve (14), and the elastic extrusion column (28) is located in the opening (15) inner cavity arranged on the sliding sleeve (14), and the U-shaped groove (26) is fixedly connected with the horizontal plate (13); The upper end of the bevel gear (22) is provided with a long strip-shaped vertical rod (21), the front end of the vertical rod (21) is rotatably provided with a push rod (23), the end of the push rod (23) is located in the cavity of the long strip-shaped drive ring (24), the side end of the drive ring (24) is fixedly provided with a movable rod (29), and the end of the movable rod (29) away from the drive ring (24) is sealingly and slidably arranged in the inner cavity of the hollow pipe (30), and the hollow pipe (30) is communicated with the inner cavity of the cylinder (31); The cylinder (31) is arranged on the lower end of the lower outer ring (3), the upper end of the elastic sealing diaphragm (33) is fixedly provided with an extrusion column (32), the upper end of the extrusion column (32) is slidably arranged through the lower outer ring (3), and the outer wall of the arc-shaped baffle (401) on the lower inner ring (5) is provided with a contact plate (51) matched with the extrusion column (32). The plate body (20) is fixed on the horizontal plate (13).

6. A carrier for seed crystal separation according to claim 5, wherein: A magnetic shielding structure is further included, which is used for shielding the magnetic field action between the first magnetic block (11) and the second magnetic block (12) when the separated seed crystal is carried on the lower inner ring (5), so that the weight of the seed crystal acts on the extrusion column (32).

7. A carrier for seed crystal separation according to claim 6, wherein: The magnetic shielding structure includes two arc-shaped rods (34) connected by a connecting rod and arranged in a circle, and a pressing rod (40) arranged on the outer wall of the arc-shaped baffle (401) on the lower inner ring (5); The lower end of one of the arc-shaped rods (34) is provided with an arc-shaped sliding block (38), and the arc-shaped sliding block (38) is slidably arranged in an arc-shaped groove arranged on the upper end of the lower outer ring (3), and the arc-shaped groove inner wall and the arc-shaped sliding block (38) are connected by an arc-shaped reset spring (39), and a plurality of magnetic shielding plates (37) are arranged on the two arc-shaped rods (34). One of the arc-shaped rods (34) is provided with a block (35) with a driving inclined surface (36), and the block (35) is located below the pressing rod (40).

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