Vacuum valve and vacuum system

Abstract

The invention provides a vacuum valve and a vacuum system. The vacuum valve comprises a valve body, a valve plate assembly and a driving part. The valve body is provided with a valve port. The valve plate assembly comprises a connecting rod and a valve plate body. One end of the connecting rod is rotatably connected with the valve body around a first rotating axis, and the other end of the connecting rod is connected with the valve plate body; the first rotation axis is parallel to the plane where the valve plate body is located. The driving piece is provided with a driving output end and a supporting end; the supporting end is connected with the valve body, and the driving output end is connected with the connecting rod. The driving piece is configured to drive the valve plate to turn over so as to close or open the valve port. The vacuum valve drives the valve plate assembly to turn over through the driving piece, so that the valve plate body is tightly attached to the edge of the valve port, and the sealing performance of the vacuum valve in a closed state is improved. And the structure of the vacuum valve is simplified. In addition, the valve plate is basically kept in the plane perpendicular to the direction of the valve body in the moving process, and therefore occupied space is reduced.

Description

Technical Field

[0001] The present application relates to the field of vacuum technology, and in particular to a vacuum valve and a vacuum system. Background Art

[0002] Vacuum technology plays an important role in modern scientific research and industrial production, and is widely used in semiconductor manufacturing, material science, aerospace, chemical industry, medical equipment and other fields. One of the core components of the vacuum system is the vacuum valve, whose main function is to accurately control the flow of gas in a vacuum environment to ensure the airtightness and stability of the system.

[0003] The commonly used vacuum valves at present usually include a valve body, a valve plate and a drive device. The valve body is usually a shell with an inlet and an outlet, and the valve plate is used to close or open the gas channel. The drive device can be manual, electric or pneumatic, and is used to control the movement of the valve plate. Among them, the movement mode of the valve plate is usually linear motion or rotational motion along the plane where it is located.

[0004] However, in the vacuum valves commonly used at present, the movement mode of the valve plate is linear motion or rotational motion along the plane where the valve plate is located, so the structure of the valve plate is more complicated and occupies more space. Summary of the invention

[0005] The purpose of the present application is to provide a vacuum valve and a vacuum system, which drives the valve plate assembly to flip through a driving member so that the valve plate body is close to the edge of the valve port, thereby improving the sealing of the vacuum valve in a closed state, simplifying the structure of the vacuum valve, and reducing space occupancy.

[0006] In the first aspect, the present application provides a vacuum valve, comprising a valve body, a valve plate assembly and a driving member; the valve body has a valve port; the valve plate assembly comprises a connecting rod and a valve plate body; one end of the connecting rod is rotatably connected to the valve body around a first rotation axis, and the other end of the connecting rod is connected to the valve plate body; wherein the first rotation axis is parallel to the plane where the valve plate body is located; the driving member has a driving output end and a supporting end; the supporting end is connected to the valve body, and the driving output end is connected to the connecting rod; the driving member is configured to drive the valve plate to flip so as to close or open the valve port.

[0007] The above-mentioned vacuum valve is connected to one end of the connecting rod through the valve plate body, and the other end of the connecting rod is rotatably connected to the valve body around a first rotation axis parallel to the plane where the valve plate body is located, so as to realize the reversible connection of the valve plate assembly on the valve body, and the valve plate assembly is driven by the driving member to realize the reversal movement of the valve plate assembly, thereby opening or closing the valve port. And the valve plate assembly can be driven by the driving member so that the valve plate body is close to the edge of the valve port to improve the sealing of the vacuum valve in the closed state. The structure of the vacuum valve is simplified. In addition, compared with the vacuum valve of this type in which the valve plate performs linear motion or rotational motion along the plane where the valve plate itself is located, in the vacuum valve provided by the present application, the valve plate is basically kept within the plane perpendicular to the direction of the valve body during the movement process, thereby reducing the space occupied.

[0008] In combination with the first aspect, optionally, the number of the driving members is at least two; the number of the connecting rods is equal to the number of the driving members; and the connecting rods are arranged along the direction where the first rotation axis is located.

[0009] The above-mentioned vacuum valve, no matter what material the valve plate body is made of, will usually deform to a certain extent under the action of the inside. Therefore, with respect to a single connecting rod and a driving member, when the valve plate body is in close contact with the edge of the valve port under the action of the driving member, the close contact between the part close to the connection with the connecting rod and the edge of the valve port is usually greater, and conversely, the close contact is smaller. By configuring a plurality of driving members and a corresponding number of connecting rods for the vacuum valve, there are more connections between the valve plate body and the connecting rod, that is, more parts of the valve plate body can be subjected to the driving force applied by the driving member, so that the driving force from the driving member to the valve plate body is more evenly distributed. Furthermore, by distributing the connecting rods along the first rotation axis, the distribution uniformity of the driving force from the driving member to the valve plate body is further improved. As a result, the degree of close contact between the parts of the valve plate body and the edge of the valve port is smaller, and then the close contact between the valve plate body and the edge of the valve port can be improved by uniformly controlling the driving force of the driving member. On the basis of improving the air tightness of the vacuum valve, the method of improving the air tightness of the vacuum valve is also simplified.

[0010] In combination with the first aspect, optionally, one of the connecting rods is arranged close to one end of the valve plate body in the direction of the first rotation axis; another of the connecting rods is arranged close to the other end of the valve plate body in the direction of the first rotation axis; and a plurality of the connecting rods are evenly distributed in the direction of the first rotation axis.

[0011] The above-mentioned vacuum valve is evenly distributed on the valve plate body along the first rotation axis through multiple connecting rods, and two of the connecting rods are located at the two ends of the valve plate body in the direction of the first rotation axis, which increases the distribution range of the connecting rods on the valve plate body, thereby further improving the uniformity of the driving force exerted on the valve plate body from the driving member, and ultimately further improving the airtightness of the vacuum valve.

[0012] In combination with the first aspect, optionally, the valve plate assembly also includes a connecting plate and bolts; the connecting plate is attached to and connected to the valve plate body; the bolts penetrate into the connecting plate from a side of the connecting plate facing away from the valve plate body, and the bolts penetrate out from a side of the connecting plate facing the valve plate and abut against the valve plate body.

[0013] In the above-mentioned vacuum valve, the connecting rod is connected to the valve plate body through a connecting plate, and bolts are arranged on the connecting plate. When the valve plate body is fitted with the edge of the valve port, if a large gap appears in some positions, the gap at the position can be reduced by adjusting the bolts at the corresponding positions to increase the force of the bolts on the valve plate body, thereby further improving the sealing performance of the vacuum valve.

[0014] In combination with the first aspect, optionally, the valve plate assembly also includes a movable part; the movable part has an abutment surface facing the bolt and a movable surface facing away from the bolt; the bolt abuts against the abutment surface; the movable surface is a rotating curved surface, and the rotation center line of the rotating curved surface is not parallel to at least one of the straight lines determined by any two of the bolts; the valve plate body is provided with a curved groove for accommodating the movable part on one side facing the bolt; the shape of the curved groove is adapted to the movable surface.

[0015] The above-mentioned vacuum valve is achieved by setting a movable part with a rotating curved surface in a curved groove on the valve plate body, and the bolt passing through the connecting plate abuts the movable part, and then the movable part transmits the pressure applied by the bolt to the valve plate body. Since the rotating curved surface on the movable part can rotate in the receiving groove, when the valve plate body is pushed toward the valve body by the bolt, the inclination of the surface at a part of the valve plate body is offset by the rotation of the movable part, thereby ensuring that the abutting surface between the bolt and the movable part always remains in an almost vertical state. Finally, the force of the bolt on the valve plate body can avoid the influence of the lateral force (that is, the component force perpendicular to the plane where the bolt is located), and completely act on the valve plate body, ensuring the adjustment effect of the bolt.

[0016] In combination with the first aspect, optionally, the connecting rod is rotatably connected to the valve plate body around a second rotation axis; wherein the second rotation axis is parallel to the plane where the valve plate body is located.

[0017] The vacuum valve mentioned above, through the rotational connection between the connecting rod and the valve plate body, offsets the torque generated at the connection caused by the local deformation of the valve plate body during the process of applying the force to the valve plate body through the adjustment bolt. The specific effects brought by this torque are as follows: first, this torque opposes the force applied by the bolt to the valve plate body, and it is necessary to overcome this torque when increasing the force of the bolt on the valve plate body, thereby increasing the force required for adjusting the bolt; second, this torque causes the two parts connected by hard connection to bear stress at the connection, thereby affecting the stability of the connection. Therefore, by offsetting this torque, the above-mentioned effects brought by this torque are overcome.

[0018] In combination with the first aspect, optionally, at least one of the straight lines defined by any two of the bolts is not parallel to the second rotation axis; the connecting rod is rotatably connected to the connecting plate at a position between any two of the bolts on the connecting plate.

[0019] The vacuum valve is provided with the connection between the connection plate and the connection rod in the middle of the range covered by the bolt distribution, so that when the bolts on both sides of the connection need to be adjusted at the same time to apply the force to the valve plate body to improve the sealing performance, the bolts on both sides of the connection can be adjusted to achieve balance at both ends of the connection plate to a certain extent, thereby reducing the torque generated at the connection.

[0020] In combination with the first aspect, optionally, the valve plate assembly further includes a sealing ring; a sealing groove is provided on an edge of a side of the valve plate body facing away from the connecting rod; and the sealing ring is disposed in the sealing groove.

[0021] The vacuum valve further improves the air tightness of the vacuum valve in the closed state by arranging a sealing ring on the valve plate body.

[0022] In combination with the first aspect, optionally, the driving member includes a linear driving member; the supporting end of the linear driving member is rotatably connected to the valve body around a third rotation axis, and the driving output end of the linear driving member is rotatably connected to the middle part of the connecting rod around a fourth rotation axis; wherein the third rotation axis and the fourth rotation axis are respectively parallel to the first rotation axis.

[0023] The above-mentioned vacuum valve uses a linear drive member as a drive member and realizes the driving of the valve plate body to flip through the connection with the middle part of the connecting rod. Compared with the driving methods such as motor and gear, linear drive member and gear rack, the layout of the linear drive member is simpler and more convenient, thereby simplifying the structure of the vacuum valve.

[0024] In a second aspect, the present application provides a vacuum system, including a vacuum pump, a vacuum chamber, and the vacuum valve described in the first aspect.

[0025] The above-mentioned vacuum system, based on the vacuum valve included therein, has the same beneficial effects as the first aspect, which will not be described in detail here.

[0026] In summary, the vacuum valve and vacuum system provided by the present application drive the valve plate assembly to flip through the driving member, so that the valve plate body is close to the edge of the valve port to improve the sealing of the vacuum valve in the closed state. The structure of the vacuum valve is simplified. In addition, the valve plate is basically kept in a plane perpendicular to the valve body during the movement process, thereby reducing the space occupation. By configuring a plurality of driving members and a corresponding number of connecting rods for the vacuum valve, and distributing the connecting rods along the first rotation axis, the distribution uniformity of the driving force from the driving member to the valve plate body is improved, and on the basis of improving the air tightness of the vacuum valve, the method of improving the air tightness of the vacuum valve is simplified. The connecting rod is connected to the valve plate body through a connecting plate, and bolts are arranged on the connecting plate, which further improves the sealing of the vacuum valve. By arranging a movable member with a rotating curved surface in a curved groove on the valve plate body, and the bolts passing through the connecting plate abut against the movable member, and then the movable member transmits the pressure applied by the bolt to the valve plate body, so that the force of the bolt on the valve plate body can avoid the influence of the lateral force, and completely act on the valve plate body, ensuring the adjustment effect of the bolt. The rotational connection between the connecting rod and the valve plate body offsets the torque generated at the connection caused by the local deformation of the valve plate body during the process of applying force to the valve plate body through the adjusting bolt, thereby overcoming the influence of the torque on the increase in the force required for the adjusting bolt and the influence on the stability of the connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A three-dimensional diagram of a vacuum valve provided in an embodiment of the present application;

[0029] Figure 2 A three-dimensional diagram of a valve body in a vacuum valve provided in an embodiment of the present application;

[0030] Figure 3 A top view of a vacuum valve provided in an embodiment of the present application;

[0031] Figure 4 for Figure 3 The cross-section along the A-A plane;

[0032] Figure 5A three-dimensional diagram of a movable part in a vacuum valve provided in an embodiment of the present application;

[0033] Figure 6 A three-dimensional diagram of a valve plate body in a vacuum valve provided in an embodiment of the present application;

[0034] Figure 7 A top view of a valve plate body in a vacuum valve provided in an embodiment of the present application;

[0035] Figure 8 for Figure 7 Sectional view along the B-B plane;

[0036] Fig. 9 and Fig.10 A graph showing the results of testing the sealing effect of a vacuum valve provided in an embodiment of the present application.

[0037] Icons: 100, vacuum valve; 110, valve body; 111, valve port; 120, valve plate assembly; 121, connecting rod; 122, valve plate body; 1221, curved groove; 1222, sealing groove; 123, connecting plate; 124, bolt; 125, movable part; 1251, abutment surface; 1252, movable surface; 126, sealing ring; 130, driving part. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0040] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0041] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invented product is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0042] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0043] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] Please refer to Figure 1 and Figure 2 , Figure 1 is a three-dimensional diagram of a vacuum valve 100 provided in an embodiment of the present application; Figure 2 1 is a three-dimensional diagram of a valve body 110 in a vacuum valve 100 provided in an embodiment of the present application. The vacuum valve 100 provided in an embodiment of the present application may include a valve body 110, a valve plate assembly 120, and a driving member 130. The valve body 110 may have a valve port 111. The valve plate assembly 120 may include a connecting rod 121 and a valve plate body 122. One end of the connecting rod 121 may be rotatably connected to the valve body 110 around a first rotation axis, and the other end of the connecting rod 121 may be connected to the valve plate body 122. The first rotation axis may be parallel to the plane where the valve plate body 122 is located. The driving member 130 may have a driving output end and a supporting end. The supporting end may be connected to the valve body 110, and the driving output end may be connected to the connecting rod 121. The driving member 130 may be configured to drive the valve plate to flip to close or open the valve port 111.

[0045] The valve body 110 may be a shell or a solid body having an outlet and an inlet. The outlet and the inlet constitute a valve port 111 of the valve body 110. The valve port 111 allows gas to pass through. The valve plate body 122 may be used to cover and expose the valve port 111 to achieve closing and opening of the valve port 111.

[0046] The valve plate body 122 is connected to one end of the connecting rod 121, and the other end of the connecting rod 121 is rotatably connected to the valve body 110 around the first rotation axis. Since the first rotation axis is parallel to the plane where the valve plate body 122 is located, the valve plate assembly 120 and the valve body 110 are flippably connected.

[0047] The supporting end of the driving member 130 may be a housing of the driving member 130, etc., for fixing the parts of the driving member 130. The driving output end may be an output shaft of the driving member 130. Taking a cylinder as an example, the supporting end may be a housing constituting a cylinder body, and the power output end may be a piston rod of the cylinder. The connecting rod 121 may be a straight rod or a curved rod, for example, an "L"-shaped rod or a "C"-shaped rod.

[0048] The driving member 130 can be electric or startable, such as a motor, a cylinder, etc. Taking a motor as an example, since the motor outputs torque in general, and the valve plate assembly 120 can move on the valve body 110 in a flipping motion, the valve plate assembly 120 can directly receive and respond to the torque output by the motor without the need for a transmission assembly to convert the motion mode. In other words, the drive output end of the motor can be directly connected to the connecting rod 121, or it can be connected to the connecting rod 121 through a transmission assembly that receives and outputs torque, such as a gear or a gear set. Taking a cylinder as an example again, since the cylinder outputs thrust and pulling force for the target to perform linear motion, the power output end of the cylinder needs to be connected to the connecting rod 121 through a transmission assembly such as a gear rack that can convert linear motion and rotational motion. Alternatively, the power output end of the cylinder needs to be directly connected to the connecting rod 121, wherein the distance between the connection portion and the portion where the connecting rod 121 is rotatably connected to the valve body 110 is not zero, and the thrust and pull directions output by the cylinder are not parallel to the first rotation axis, but are preferably perpendicular. In this way, the motion form can also be converted through a specific connection method between the cylinder and the connecting rod 121.

[0049] In the above implementation process, the valve plate body 122 is connected to one end of the connecting rod 121, and the other end of the connecting rod 121 is rotatably connected to the valve body 110 around a first rotation axis parallel to the plane where the valve plate body 122 is located, so that the valve plate assembly 120 can be flipped on the valve body 110, and the valve plate assembly 120 is driven by the driving member 130 to realize the flipping movement of the valve plate assembly 120, thereby opening or closing the valve port 111. And the valve plate body 122 can be driven by the driving member 130 to close the edge of the valve port 111 to improve the sealing of the vacuum valve 100 in the closed state. The structure of the vacuum valve 100 is simplified. In addition, compared with vacuum valves in which the valve plate performs linear motion or rotational motion along the plane where the valve plate is located, in the vacuum valve 100 provided in the embodiment of the present application, the valve plate is basically kept in a plane perpendicular to the valve body 110 during the movement process, thereby reducing space occupation.

[0050] Please combine Figure 1 Reference Figure 3 , Figure 3 1 is a top view of the vacuum valve 100 provided in the embodiment of the present application. In some optional embodiments, the number of the driving members 130 may be at least two. The number of the connecting rods 121 may be equal to the number of the driving members 130. The connecting rods 121 may be arranged along the direction where the first rotation axis is located.

[0051] The number of the driving members 130 may be 2, 3, 4, 5, etc. Figure 3 There are five driving members 130 shown in the figure. Those skilled in the art can determine the specific number of driving members 130 according to actual application requirements. This embodiment of the application does not limit this.

[0052] Taking the valve plate body 122 as an example, the first rotation axis is parallel to the direction of the long side of the rectangle. Then, the connecting rod 121 can be arranged along the direction of the long side of the rectangle. Correspondingly, the driving member 130 can also be arranged along the direction of the long side of the rectangle.

[0053] In the above implementation process, no matter what material the valve plate body 122 is made of, it will usually deform to a certain extent under the action of the inside. Therefore, with respect to a single connecting rod 121 and a driving member 130, under the action of the driving member 130, when the valve plate body 122 is in close contact with the edge of the valve port 111, the area close to the connection with the connecting rod 121 is usually in close contact with the edge of the valve port 111, and conversely, the close contact is small. By configuring the vacuum valve 100 with a plurality of driving members 130 and a corresponding number of connecting rods 121, there are more connections between the valve plate body 122 and the connecting rod 121, that is, more areas on the valve plate body 122 can be subjected to the driving force applied by the driving member 130, so that the driving force from the driving member 130 applied to the valve plate body 122 is more evenly distributed. Furthermore, by distributing the connecting rods 121 along the first rotation axis, the distribution uniformity of the driving force from the driving member 130 applied to the valve plate body 122 is further improved. As a result, the difference in the degree of close contact between the valve plate body 122 and the edge of the valve port 111 is smaller, and the close contact between the valve plate body 122 and the edge of the valve port 111 can be improved by uniformly controlling the driving force of the driving member 130. On the basis of improving the airtightness of the vacuum valve 100, the method of improving the airtightness of the vacuum valve 100 is also simplified.

[0054] Please continue to refer to Figure 3 In some optional embodiments, one of the connecting rods 121 may be close to one end of the valve plate body 122 in the direction of the first rotation axis. Another connecting rod 121 may be close to the other end of the valve plate body 122 in the direction of the first rotation axis. Multiple connecting rods 121 may be evenly distributed in the direction of the first rotation axis.

[0055] That is to say, the multiple connecting rods 121 are distributed in the direction of the first rotation axis, substantially covering the valve plate body 122. The multiple connecting rods 121 are evenly distributed on the first rotation axis, and the spacing between any two adjacent connecting rods 121 can be equal. Accordingly, when the connection between all the driving members 130 and the connecting rods 121, that is, the transmission mode is the same, the driving members 130 can also be evenly distributed along the first rotation axis.

[0056] In the above implementation process, multiple connecting rods 121 are evenly distributed on the valve plate body 122 along the first rotation axis, and two of the connecting rods 121 are located at both ends of the valve plate body 122 in the direction of the first rotation axis. This increases the distribution range of the connecting rods 121 on the valve plate body 122, thereby further improving the uniformity of the driving force exerted on the valve plate body 122 by the driving member 130, and ultimately further improving the airtightness of the vacuum valve 100.

[0057] Please combine Figure 3 Reference Figure 4 , Figure 4 yes Figure 3 In some optional embodiments, the valve plate assembly 120 may further include a connecting plate 123 and bolts 124. The connecting plate 123 may be attached to and connected to the valve plate body 122. The bolts 124 may penetrate the connecting plate 123 from the side of the connecting plate 123 facing away from the valve plate body 122, and the bolts 124 may penetrate from the side of the connecting plate 123 facing the valve plate and abut against the valve plate body 122.

[0058] The connection between the connecting plate 123 and the valve plate body 122 can be screwed, welded, etc. However, the distribution of the connecting parts between the connecting plate 123 and the valve plate body 122 does not cover the entire connecting plate 123. The position where the bolt 124 penetrates the connecting plate 123 can be located outside the coverage of the distribution of the connecting part. In this way, an adjustable gap can be provided between the connecting plate 123 and the valve plate body 122.

[0059] As mentioned above, the valve plate body 122 will usually deform to a certain extent under the action of force. Such deformation is usually that when the valve plate body 122 is subjected to the driving force, the part directly subjected to the force will be more concave toward the valve body 110 than the part directly subjected to the driving force. In other words, the part of the valve plate body 122 that does not directly receive the driving force will be relatively tilted, thereby affecting the fit between the valve plate body 122 and the edge of the valve port 111, and ultimately affecting the air tightness. In this case, as an exemplary operation method, the size of the entire gap can be observed when the edge of the entire valve plate body 122 fits the edge of the valve port 111. If there is a position with a larger gap, the bolt 124 corresponding to the position can be adjusted to increase the force of the bolt 124 on the valve plate body 122 through abutment, so that the gap at this position can be reduced.

[0060] During the above implementation process, the connecting rod 121 is connected to the valve plate body 122 through the connecting plate 123, and a bolt 124 is arranged on the connecting plate 123, so that when the valve plate body 122 is fitted with the edge of the valve port 111, if a large gap appears in some positions, the gap at the position can be reduced by adjusting the bolt 124 at the corresponding position to increase the force of the bolt 124 on the valve plate body 122, thereby further improving the sealing performance of the vacuum valve 100.

[0061] Please combine Figure 4 , refer to Figures 5 to 8 , Figure 5 is a three-dimensional diagram of a movable part 125 in a vacuum valve 100 provided in an embodiment of the present application; Figure 6 is a three-dimensional diagram of the valve plate body 122 in the vacuum valve 100 provided in the embodiment of the present application; Figure 7 is a top view of the valve plate body 122 in the vacuum valve 100 provided in the embodiment of the present application; Figure 8 yes Figure 7 A cross-sectional view along the B-B plane in the figure. In some optional embodiments, the valve plate assembly 120 may further include a movable part 125. The movable part 125 may have an abutment surface 1251 facing the bolt 124 and a movable surface 1252 facing away from the bolt 124. The bolt 124 may abut against the abutment surface 1251. The movable surface 1252 may be a rotational curved surface, and the rotation center line of the rotational curved surface may not be parallel to at least one of the straight lines determined by any two bolts 124. A curved groove 1221 for accommodating the movable part 125 may be provided on one side of the valve plate body 122 facing the bolt 124. The shape of the curved groove 1221 may be adapted to the movable surface 1252.

[0062] The active surface 1252 is a rotational curved surface, which can be a curved surface formed by rotating a geometric line around a rotation axis. For example, if the geometric line is a line segment parallel to the rotation axis, then the curved surface formed by the rotation is a cylindrical surface. For another example: if the geometric line is a circular arc, and the circular arc is coplanar with the rotation axis, then the curved surface formed by the rotation is a spherical surface.

[0063] When the valve plate body 122 is provided with a curved groove 1221 adapted to the movable surface 1252 , the movable member 125 can rotate in the curved groove 1221 .

[0064] Theoretically, the straight line in the length direction of the bolt 124 and the plane in which the valve plate body 122 is located should be perpendicular. Therefore, in the manufactured vacuum valve 100, the bolt 124 and the valve plate body 122 are also almost perpendicular. In the process where the bolt 124 applies pressure to the movable part 125 through abutment and transmits it to the valve plate body 122, since the valve plate body 122 is deformed to a certain extent, the section at the deformation site is no longer perpendicular to the bolt 124. In this case, the rotation of the movable part 125 in the curved groove 1221 can play a role of adjustment, thereby ensuring that the abutment surface 1251 of the movable part 125 and the bolt 124 remain almost perpendicular.

[0065] In the above implementation process, the movable member 125 with a rotating curved surface is arranged in the curved groove 1221 on the valve plate body 122, and the bolt 124 passing through the connecting plate 123 abuts against the movable member 125, and then the movable member 125 transmits the pressure applied by the bolt 124 to the valve plate body 122. Since the rotating curved surface on the movable member 125 can rotate in the receiving groove, when the valve plate body 122 is pushed toward the valve body 110 by the bolt 124, the inclination of the surface of a part of the valve plate body 122 is offset by the rotation of the movable member 125, thereby ensuring that the abutting surface 1251 of the bolt 124 and the movable member 125 always maintains an almost vertical state. Finally, the force of the bolt 124 on the valve plate body 122 can avoid the influence of the lateral force (that is, the component force perpendicular to the plane where the bolt 124 is located), and completely acts on the valve plate body 122, ensuring the adjustment effect of the bolt 124.

[0066] Please continue to refer to Figure 1 In some optional embodiments, the connecting rod 121 may be rotatably connected to the valve plate body 122 around a second rotation axis, wherein the second rotation axis may be parallel to the plane where the valve plate body 122 is located.

[0067] In combination with the above description, in the process of applying the force to the valve plate body 122 by adjusting the bolt 124, the valve plate body 122 will usually be partially deformed. This deformation is transmitted to the connection between the connecting rod 121 and the valve plate body 122 (in combination with the above embodiment, the connecting rod 121 can be connected to the valve plate body 122 through the connecting plate 123) and will be converted into torque. In order to offset this torque, the connecting rod 121 and the valve plate body 122 can be rotatably connected.

[0068] In the above implementation process, the torque generated at the connection point due to the local deformation of the valve plate body 122 during the process of applying the force to the valve plate body 122 through the adjustment bolt 124 is offset by the rotational connection between the connecting rod 121 and the valve plate body 122. The specific effects brought by this torque are as follows: first, this torque opposes the force applied by the bolt 124 to the valve plate body 122. When increasing the force of the bolt 124 on the valve plate body 122, it is necessary to overcome this torque, thereby increasing the force required for adjusting the bolt 124; second, this torque causes the two parts connected by hard connection to bear stress at the connection point, thereby affecting the stability of the connection. Therefore, by offsetting this torque, the above-mentioned effects brought by this torque are overcome.

[0069] Please continue to refer to Figure 3In some optional embodiments, at least one of the straight lines defined by any two bolts 124 may not be parallel to the second rotation axis. The connecting rod 121 may be rotatably connected to the connecting plate 123 at a position between any two bolts 124 on the connecting plate 123 .

[0070] That is to say, illustratively, if the connecting plate 123 is rectangular, the number of bolts 124 is 2. The two bolts 124 can be distributed at both ends in the direction of the long side of the rectangle. The connection between the connecting rod 121 and the connecting plate 123 can be located at the middle end in the direction of the long side of the rectangle. Another illustrative example, if the number of bolts 124 is 3, one of the bolts 124 can be located at one end in the direction of the long side of the rectangle, and the other two bolts 124 can be located at the other end in the direction of the long side of the rectangle. The connection between the connecting rod 121 and the connecting plate 123 can be located at the middle end in the direction of the long side of the rectangle. Another illustrative example, if the number of bolts 124 is 3, two of the bolts 124 can be located at one end in the direction of the long side of the rectangle, and the other two bolts 124 can be located at the other end in the direction of the long side of the rectangle. The connection between the connecting rod 121 and the connecting plate 123 can be located at the middle end in the direction of the long side of the rectangle.

[0071] In the above implementation process, by setting the connection between the connection plate 123 and the connection rod 121 in the middle of the distribution coverage of the bolts 124, when the bolts 124 are adjusted to apply force to the valve plate body 122 to improve the sealing performance, when it is necessary to adjust the bolts 124 on both sides of the connection at the same time, the bolts 124 on both sides of the connection can be adjusted to achieve balance at both ends of the connection plate 123 to a certain extent, thereby reducing the torque generated at the connection.

[0072] Please continue to refer to Figure 4 and Figure 8 In some optional embodiments, the valve plate assembly 120 may further include a sealing ring 126. A sealing groove 1222 may be provided on the edge of the valve plate body 122 facing away from the connecting rod 121. The sealing ring 126 may be provided in the sealing groove 1222.

[0073] The material of the sealing ring 126 can be metal, alloy or the like.

[0074] In the above implementation process, by providing a sealing ring 126 on the valve plate body 122, the air tightness of the vacuum valve 100 in the closed state is further improved.

[0075] Please continue to refer to Figure 1In some optional embodiments, the driving member 130 may include a linear driving member 130. The supporting end of the linear driving member 130 may be rotatably connected to the valve body 110 around the third rotation axis, and the driving output end of the linear driving member 130 may be rotatably connected to the middle of the connecting rod 121 around the fourth rotation axis. The third rotation axis and the fourth rotation axis may be parallel to the first rotation axis respectively.

[0076] The linear drive member 130 may be a cylinder. The support end of the linear drive member 130 may be a cylinder body, and the drive output end may be a piston rod. The drive output end is connected to the middle of the connecting rod 121. Since there is a certain distance between the end of the connecting rod 121 connected to the valve body 110 and the middle of the connecting rod 121, the distance constitutes a lever arm, thereby realizing the conversion of the push and pull force of the linear drive member 130 into torque.

[0077] In the above implementation process, the linear drive member 130 is used as the drive member 130, and the valve plate body 122 is driven to flip through the connection with the middle part of the connecting rod 121. Compared with the driving methods such as motor and gear, linear drive member 130 and gear rack, the layout of the linear drive member 130 is simpler and more convenient, thereby simplifying the structure of the vacuum valve 100.

[0078] Please refer to Fig. 9 and Fig.10 , Fig. 9 and Fig.10 1 is a diagram showing the results of testing the sealing effect of the vacuum valve 100 provided in the embodiment of the present application. The vacuum valve 100 provided in the embodiment of the present application is tested for air tightness. Specifically, the bolt 124 on the connecting plate 123 adjacent to the position where the gap between the valve plate body and the edge of the valve port 111 is larger is adjusted to increase the pressure on the movable part 125 on the valve plate body 122, thereby reducing the gap at this position. Fig. 9 and Fig.10 As can be seen from the figure, the vacuum system constructed by the embodiment of the present application can achieve a vacuum degree of 1.0×10 - 10 Pa.m3 / S, 3.3×10 -11 Pa.m3 / S.

[0079] Based on the same concept, an embodiment of the present application provides a vacuum system, which may include a vacuum pump, a vacuum chamber, and the vacuum valve 100 described above.

[0080] The vacuum chamber may include a chamber housing, on which a vacuum valve 100 is disposed.

[0081] The above implementation process may be the same as the vacuum valve 100 described above, and will not be described again here.

[0082] In summary, the vacuum valve 100 and vacuum system provided in each embodiment of the present application drive the valve plate assembly 120 to flip through the driving member 130, so that the valve plate body 122 is close to the edge of the valve port 111, so as to improve the sealing of the vacuum valve 100 in the closed state. The structure of the vacuum valve 100 is simplified. In addition, the valve plate is basically kept in a plane perpendicular to the direction of the valve body 110 during the movement process, thereby reducing the space occupation. By configuring a plurality of driving members 130 and a corresponding number of connecting rods 121 for the vacuum valve 100, and distributing the connecting rods 121 along the first rotation axis, the distribution uniformity of the driving force from the driving member 130 on the valve plate body 122 is improved, and on the basis of improving the air tightness of the vacuum valve 100, the method of improving the air tightness of the vacuum valve 100 is also simplified. The connecting rod 121 is connected to the valve plate body 122 through the connecting plate 123, and a bolt 124 is provided on the connecting plate 123, so as to further improve the sealing of the vacuum valve 100. By setting the movable part 125 with a rotating curved surface in the curved groove 1221 on the valve plate body 122, and the bolt 124 passing through the connecting plate 123 abuts against the movable part 125, and then the movable part 125 transmits the pressure applied by the bolt 124 to the valve plate body 122, so that the force of the bolt 124 on the valve plate body 122 can avoid the influence of the lateral force, and completely act on the valve plate body 122, thereby ensuring the adjustment effect of the bolt 124. The rotational connection between the connecting rod 121 and the valve plate body 122 offsets the torque generated at the connection caused by the local deformation of the valve plate body 122 in the process of applying the force to the valve plate body 122 through the adjusting bolt 124. The torque is overcome to increase the influence of the force required for adjusting the bolt 124 and the influence on the stability of the connection.

[0083] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum valve, characterized in that: It includes a valve body, a valve plate assembly and a driving part; The valve body has a valve port; The valve plate assembly includes a connecting rod and a valve plate body; One end of the connecting rod is rotatably connected to the valve body around a first rotation axis, and the other end of the connecting rod is connected to the valve plate body; wherein the first rotation axis is parallel to the plane where the valve plate body is located; The driving member has a driving output end and a supporting end; The supporting end is connected to the valve body, and the driving output end is connected to the connecting rod; The driving member is configured to drive the valve plate to flip so as to close or open the valve port.

2. The vacuum valve according to claim 1, characterized in that: The number of the driving members is at least two; The number of the connecting rods is equal to the number of the driving members; The connecting rods are arranged along the direction where the first rotation axis is located.

3. The vacuum valve according to claim 2, characterized in that: One of the connecting rods is disposed close to one end of the valve plate body in the direction of the first rotation axis; the other of the connecting rods is disposed close to the other end of the valve plate body in the direction of the first rotation axis; The plurality of connecting rods are evenly distributed in the direction of the first rotation axis.

4. The vacuum valve according to claim 2 or 3, characterized in that: The valve plate assembly also includes a connecting plate and bolts; The connecting plate is attached to and connected to the valve plate body; The bolts penetrate into the connecting plate from a side of the connecting plate facing away from the valve plate body, and penetrate out from a side of the connecting plate facing the valve plate and abut against the valve plate body.

5. The vacuum valve according to claim 4, characterized in that: The valve plate assembly also includes a movable part; The movable member has an abutment surface facing the bolt and a movable surface facing away from the bolt; The bolt abuts against the abutment surface; The movable surface is a rotational curved surface, and the rotation center line of the rotational curved surface is not parallel to at least one of the straight lines defined by any two of the bolts; A curved groove for accommodating the movable part is provided on one side of the valve plate body facing the bolt; The shape of the curved groove is adapted to the active surface.

6. The vacuum valve according to claim 4, characterized in that: The connecting rod is rotatably connected to the valve plate body around a second rotation axis; wherein the second rotation axis is parallel to the plane where the valve plate body is located.

7. The vacuum valve according to claim 6, characterized in that: At least one of the straight lines defined by any two of the bolts is not parallel to the second rotation axis; The connecting rod is rotatably connected to the connecting plate at a position between any two of the bolts on the connecting plate.

8. The vacuum valve according to claim 1, characterized in that: The valve plate assembly also includes a sealing ring; A sealing groove is provided on the edge of the valve plate body facing away from the connecting rod; The sealing ring is arranged in the sealing groove.

9. The vacuum valve according to claim 1, characterized in that: The driving member comprises a linear driving member; The support end of the linear drive member is rotatably connected to the valve body around a third rotation axis, and the drive output end of the linear drive member is rotatably connected to the middle part of the connecting rod around a fourth rotation axis; wherein the third rotation axis and the fourth rotation axis are respectively parallel to the first rotation axis.

10. A vacuum system, characterized in that: The vacuum valve comprises a vacuum pump, a vacuum chamber and the vacuum valve as claimed in any one of claims 1 to 9.

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