Cover opening structure and semiconductor device

Abstract

A cover opening structure and a semiconductor device, the cover opening structure is connected with a cover body and is used for enabling the cover body to open or close an opening of a cavity, and the cover opening structure comprises a fixing structure fixedly arranged at the edge of the cover body; the first base is located on the side wall of the cavity, and a positioning hole is formed in the first base; the rotating shaft is fixedly connected with the fixing structure and is in running fit with the first base; the rotating arm is fixedly connected with the rotating shaft and used for driving the cover body to open or close the opening, a through hole is formed in the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extending direction; and the positioning structure is used for penetrating through the through hole and entering the positioning hole of the first base. The opening is usually located at the top of the cavity, the corresponding rotating shaft is horizontally arranged, so that the cover body is easier to open and close, and the through hole, the positioning hole and the rotating shaft have the same extension direction, so that the positioning structure can be horizontally inserted or taken out from the side surface, and the space required during operation is reduced.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of semiconductor equipment, and in particular to an opening cover structure and a semiconductor equipment. Background Art

[0002] In the field of semiconductor manufacturing, processes such as coating and etching are key production steps. These processes are usually carried out in specific equipment, such as a process chamber. The process chamber consists of a chamber body and an upper cover. In order to ensure the stability of the process and the long-term reliable operation of the equipment, the equipment needs to be maintained regularly. This requires the equipment to have a structure that is easy to open the upper cover so that the staff can easily inspect, clean and replace the internal parts.

[0003] Existing semiconductor equipment is usually equipped with an opening cover structure. In the working state, the opening cover structure makes the upper cover fit tightly with the cavity, and the interior can be vacuumed to provide a suitable process environment. When maintenance is required, the upper cover is opened through the opening cover structure to expose the interior of the cavity and the parts of the upper cover, which is convenient for disassembly and maintenance.

[0004] However, during operation, the existing cover opening structure requires a large operating space for positioning or releasing the cover, which not only affects the efficiency of the equipment, but may also threaten the safety of the operator and the equipment, such as damaging parts. Therefore, an improved cover opening structure is urgently needed to solve these problems. Summary of the invention

[0005] The problem solved by the embodiments of the present invention is to provide a cover opening structure and a semiconductor device, which are used to reduce the operation space in the process of opening or closing the opening of a cavity.

[0006] To solve the above problems, an embodiment of the present invention provides a cover opening structure, which is connected to the cover body and is used to enable the cover body to open or close the opening of the cavity. The cover opening structure includes: a fixing structure, which is fixedly arranged on the edge of the cover body; a first base, which is located on the side wall of the cavity, and a positioning hole is provided on the first base; a rotating shaft, which is fixedly connected to the fixing structure and rotatably cooperates with the first base; a rotating arm, which is fixedly connected to the rotating shaft and is used to drive the cover body to open or close the opening, and a through hole is provided on the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extension direction; a positioning structure, which is used to pass through the through hole and enter the positioning hole of the first base.

[0007] Optionally, the positioning hole is located on a side of the first base facing the rotating arm, and the positioning hole includes an open-to-position hole and a closed-to-position hole that are spaced apart from each other, the open-to-position hole being used to cooperate with the positioning structure when the opening is open; the closed-to-position hole being used to cooperate with the positioning structure when the opening is closed.

[0008] Optionally, the opening-to-position hole and the closing-to-position hole are located on the same arc with the rotation axis as the center.

[0009] Optionally, the first base further includes: a plurality of angle adjustment holes, which are arranged between the open position hole and the closed position hole, and the open position hole, the closed position hole and the plurality of angle adjustment holes are located on the same arc with the rotation axis as the center.

[0010] Optionally, the rotating arm has a square hole, the end of the rotating shaft is a square shaft, and the square shaft of the rotating shaft cooperates with the square hole to transmit torque; or, the rotating arm and the rotating shaft cooperate with each other via a key to transmit torque.

[0011] Optionally, a fan-shaped groove is provided on the side of the rotating arm facing the first base; the opening cover structure also includes: a cylindrical pin, which is fixedly arranged on the side of the first base facing the rotating arm, and the cylindrical pin protrudes from the surface of the first base, and the cylindrical pin is slidably arranged in the fan-shaped groove.

[0012] Optionally, the cover opening structure further includes: a second base, located on a side of the fixed structure away from the first base, the second base being fixedly disposed on a side wall of the cavity; and the end of the rotating shaft away from the first base being rotatably connected to the second base.

[0013] Optionally, the positioning structure includes a knob plunger.

[0014] Optionally, the fixed structure has a through polygonal hole, and the portion where the rotating shaft is fixedly connected to the fixed structure is a polygonal shaft.

[0015] An embodiment of the present invention also provides a semiconductor device, comprising: a cavity having an opening; a cover body, which is disposed on the opening; and the aforementioned opening cover structure, which is connected to the cavity and the cover body at the same time, and is used to enable the cover body to be flipped to open or close the opening of the cavity.

[0016] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0017] The cover opening structure provided by the embodiment of the present invention is connected with the cover body, and is used to make the cover body open or close the opening of the cavity. The cover opening structure includes: a fixed structure, fixedly arranged at the edge of the cover body; a first base, located on the side wall of the cavity, and a positioning hole is arranged on the first base; a rotating shaft, fixedly connected with the fixed structure, and rotatably matched with the first base; a rotating arm, fixedly connected with the rotating shaft, and used to drive the cover body to open or close the opening, and a through hole is arranged on the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extension direction; a positioning structure, which is used to penetrate the through hole and connect with the positioning hole on the first base. When the cover opening structure is used to open the opening of the cavity, the positioning structure is taken out from the through hole and the positioning hole; a force is applied to the rotating arm, so that the rotating shaft rotates relative to the first base under the drive of the rotating arm, and then the fixed structure fixedly connected with the rotating shaft also rotates accordingly, and finally the cover body is flipped relative to the cavity to open the opening of the cavity. When the opening of the cavity is closed by using the cover opening structure, the positioning structure is taken out from the through hole and the positioning hole; a force is applied to the rotating arm, so that the rotating shaft rotates relative to the first base under the drive of the rotating arm, and then the fixed structure fixedly connected to the rotating shaft also rotates accordingly, and finally the cover body is flipped relative to the cavity to close the opening of the cavity. Because the opening is usually located at the top of the cavity, in order to facilitate the operation of flipping the cover body to open or close the cavity opening, the rotating shaft is arranged horizontally, and because the through hole on the rotating arm and the positioning hole on the first base have the same extension direction as the rotating shaft, the corresponding positioning structure is inserted into the through hole and the positioning hole from the side or taken out from the through hole and the positioning hole in a horizontal state when it is installed or removed, thereby reducing the operating space in the process of opening or closing the cavity opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the cover opening structure of an embodiment of the present invention;

[0019] Figure 2 is a schematic structural diagram of a rotating arm according to an embodiment of the present invention;

[0020] Figure 3 is a schematic structural diagram of a first base according to an embodiment of the present invention;

[0021] Figure 4 is a schematic structural diagram of a rotating shaft according to an embodiment of the present invention;

[0022] Figure 5 and Figure 6 It is a schematic structural diagram of an opening of a chamber closed by an opening cover structure in a semiconductor device according to an embodiment of the present invention;

[0023] Figure 7 yes Figure 6 Sectional view at the middle BB;

[0024] Figure 8 yes Figure 7 The local method diagram at A in the middle;

[0025] Fig. 9 is a schematic structural diagram of an opening of a chamber by a cover opening structure in a semiconductor device according to an embodiment of the present invention;

[0026] Fig.10 It is a schematic structural diagram of the cover body in the flipping process according to an embodiment of the present invention. DETAILED DESCRIPTION

[0027] As can be seen from the background technology, the existing cover opening structure still has the following problems during operation. First, when the cover opening structure is used, the operating space required for positioning or releasing the cover is relatively large; second, when the cover body is rotated at an angle that is too large, it is easy to cause harm to personnel or equipment. These problems not only affect the efficiency of the equipment, but may also threaten the safety of the operator. Therefore, an improved cover opening structure is urgently needed to solve these problems.

[0028] In order to solve the technical problem, the cover opening structure provided by the embodiment of the present invention is connected with the cover body, and is used to make the cover body open or close the opening of the cavity. The cover opening structure includes: a fixed structure, fixedly arranged at the edge of the cover body; a first base, located on the side wall of the cavity, and a positioning hole is arranged on the first base; a rotating shaft, fixedly connected with the fixed structure, and rotatingly matched with the first base; a rotating arm, fixedly connected with the rotating shaft, and used to drive the cover body to open or close the opening, and a through hole is arranged on the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extension direction; a positioning structure, which is used to penetrate the through hole and is connected with the positioning hole on the first base. When the cover opening structure is used to open the opening of the cavity, the positioning structure is taken out from the through hole and the positioning hole; a force is applied to the rotating arm, so that the rotating shaft rotates relative to the first base under the drive of the rotating arm, and then the fixed structure fixedly connected with the rotating shaft also rotates, and finally the cover body is flipped relative to the cavity to open the opening of the cavity. When the opening of the cavity is closed by using the cover opening structure, the positioning structure is removed from the through hole and the positioning hole; a force is applied to the rotating arm, so that the rotating shaft is driven by the rotating arm to rotate relative to the first base, and then the fixed structure fixedly connected to the rotating shaft also rotates accordingly, and finally the cover body is flipped relative to the cavity to close the opening of the cavity. Because the opening is usually located at the top of the cavity, in order to facilitate the operation of flipping the cover body to open or close the cavity opening, the rotating shaft is horizontally arranged, and because the through hole on the rotating arm and the positioning hole on the first base have the same extension direction as the rotating shaft, the corresponding positioning structure is inserted into the through hole and the positioning hole from the side or removed from the through hole and the positioning hole in a horizontal state when installed or removed, which greatly reduces the required operating space.

[0029] In order to make the above-mentioned purposes, features and advantages of the embodiments of the present invention more obvious and understandable, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] Combination Figures 1 to 4 ,refer to Figures 5 to 10 The embodiment of the present invention provides a cover opening structure 100 (such as Figure 1 As shown), and the cover body 10 (as Figure 5 ) is connected to enable the cover 10 to open or close the cavity 20 (as shown Figure 5 The opening 11 (as shown) Fig. 9 As shown), the cover opening structure 100 includes: a fixing structure 101 (as shown Figure 1 ), fixedly arranged at the edge of the cover body 10; the first base 102 (as shown Figure 1 ), located on the side wall of the cavity 20, and a positioning hole 103 (as shown in Figure 3 As shown); rotating shaft 104 (as Figure 1 ), is fixedly connected to the fixed structure 101, and is connected to the first base 102 (as shown Figure 1 Rotating arm 105 (as shown) Figure 1 ), which is fixedly connected to the rotating shaft 104 and is used to drive the cover 10 to open or close the opening 11. The rotating arm 105 is provided with a through hole 106 (as shown in FIG. Figure 2 As shown), the through hole 106, the positioning hole 103 and the rotating shaft 104 have the same extension direction; the positioning structure 107 (as shown Figure 1 As shown), it is used to penetrate the through hole 106 and connect with the positioning hole 103 on the first base 102.

[0031] When the opening 11 of the cavity 20 is opened by using the cover opening structure 100 in the embodiment of the present invention, the positioning structure 107 is firstly taken out from the through hole 106 and the positioning hole 103; a force is applied to the rotating arm 105, so that the rotating shaft 104 is driven by the rotating arm 105 to rotate relative to the first base 102, and then the fixed structure 101 fixedly connected to the rotating shaft 104 also rotates accordingly, and finally the cover 10 is turned over relative to the cavity 20, so that the opening 11 of the cavity 20 is opened. When the opening 11 of the cavity 20 is closed by using the cover opening structure 100, the positioning structure 107 is firstly taken out from the through hole 106 and the positioning hole 103; a force is applied to the rotating arm 105, so that the rotating shaft 104 is driven by the rotating arm 105 to rotate relative to the first base 102, and then the fixed structure 101 fixedly connected to the rotating shaft 104 also rotates accordingly, and finally the cover 10 is turned over relative to the cavity 20, so that the opening 11 of the cavity 20 is closed. Because the opening 11 is usually located at the top of the cavity 20, in order to facilitate the operation of flipping the cover body 10 to open or close the opening 11 of the cavity 20, the rotating shaft 104 is arranged horizontally. Because the through hole 106 on the rotating arm 105 and the positioning hole 103 on the first base 102 have the same extension direction as the rotating shaft 104, the corresponding positioning structure 107 is inserted into the through hole 106 and the positioning hole 103 from the side or taken out from the through hole 106 and the positioning hole 103 in a horizontal state when being installed or removed, which greatly reduces the required operating space.

[0032] The fixing structure 101 is fixedly arranged on the edge of the cover body 10 .

[0033] The fixing structure 101 is used to firmly connect the cover opening structure 100 with the cover body 10, so that the cover body 10 can be opened and closed by the cover opening structure 100. When the opening 11 of the cavity 20 needs to be opened or closed, the rotating arm 105 drives the rotating shaft 104 to rotate. Since the fixing structure 101 is fixedly connected to the rotating shaft 104, it will move with the rotation of the rotating shaft 104. This movement is directly transmitted to the cover body 10, so that the cover body 10 turns over relative to the cavity 20, thereby achieving the purpose of opening or closing the opening 11 of the cavity 20. In addition, the fixing structure 101 is arranged at the edge of the cover body 10 to provide a stable support point when the cover body 10 is opened.

[0034] In this embodiment, the fixing structure 101 is fixedly connected to the edge of the cover body 10 by screws. In other embodiments, the fixing structure and the cover body may also be fixed in other ways.

[0035] The first base 102 is located on the side wall of the cavity 20 .

[0036] The first base 102 provides stable rotation and support for the rotating shaft 104 , and provides a stable rotation fulcrum for the rotating shaft 104 , thereby improving the accuracy and reliability of the cover body 10 during the opening and closing process.

[0037] In this embodiment, the first base 102 and the side wall of the cavity 20 are fixed by screws to ensure stability during the process of opening and closing the cover 10. In other embodiments, the first base and the cavity can also be welded or riveted. In other embodiments, the first base can also be a component of the cavity, that is, the first base and the cavity are an integrated structure and are processed as a whole.

[0038] In this embodiment, the first base 102 is fixedly arranged on the side wall of the cavity 20 in an area close to the opening 11. The first base 102 and the rotating arm 105 are both connected to the rotating shaft 104. The position of the first base 102 affects the movement track and range of the rotating arm 105. The first base 102 is fixed on the side wall of the cavity 20 in an area close to the opening 11, which is conducive to reducing the torque when opening and closing the cover, making the operation of flipping the cover 10 easier.

[0039] In this embodiment, an open-to-position hole 108 and a closed-to-position hole 109 are provided at intervals on the side of the first base 102 facing the rotating arm 105. The open-to-position hole 108 is used to cooperate with the positioning structure 107 when the opening 11 is opened; the closed-to-position hole 109 is used to cooperate with the positioning structure 107 when the opening 11 is closed.

[0040] It should also be noted that a positioning hole 103 is provided on the first base 102. The positioning hole 103 is used to cooperate with the positioning structure 107. When the position of the cover body 10 needs to be fixed during the process of opening or closing the cover body 10, the position of the cover body 10 is locked by the cooperation of the positioning hole 103 and the positioning structure 107. In addition, the positioning hole 103 is also used to prevent the cover body 10 from being accidentally opened or closed, thereby improving the safety of the device operation.

[0041] In this embodiment, the positioning hole 103 is located on the side of the first base 102 facing the rotating arm 105. After the positioning structure 107 passes through the through hole 106 on the rotating arm 105, it can be inserted into the positioning hole 103, so that the cover body 10 can be locked or released at a specific position, thereby improving the safety and reliability of the entire opening structure 100.

[0042] In this embodiment, the positioning hole 103 includes an open-to-position hole 108 and a closed-to-position hole 109 spaced apart, wherein the open-to-position hole 108 is used to cooperate with the positioning structure 107 when the opening 11 is opened; and the closed-to-position hole 109 is used to cooperate with the positioning structure 107 when the opening 11 is closed. The positioning hole 103 cooperates with the open-to-position hole 108 and the closed-to-position hole 109 to achieve the locking function of the cover body 10 in the process of opening or closing the chamber opening 11. The open-to-position hole 108 and the closed-to-position hole 109 are provided to limit the rotation angle of the rotating arm 105, and compared with the prior art, the technical problem that excessive rotation angles are likely to cause harm to personnel or equipment is solved.

[0043] In this embodiment, the opening hole 108 and the closing hole 109 are located on the same arc with the rotating shaft 104 as the center.

[0044] When the cover 10 opens or closes the opening 11 of the cavity 20, the rotating arm 105 drives the rotating shaft 104 to rotate. Because the opening hole 108 and the closing hole 109 are located on the same arc with the rotating shaft 104 as the center, when the cover 10 reaches the predetermined position during the opening or closing process, the positioning structure 107 can be selectively inserted into the opening hole 108 or the closing hole 109 through the through hole 106 on the rotating arm 105, which helps to simplify the complexity of the cover opening structure 100.

[0045] It should be noted that the first base 102 also includes: a plurality of angle adjustment holes 110, which are arranged between the open hole 108 and the closed hole 109, and the open hole 108, the closed hole 109 and the plurality of angle adjustment holes 110 are located on the same arc with the rotating shaft 104 as the center.

[0046] When the cover 10 opens or closes the opening 11 of the cavity 20, the positioning structure 107 is inserted into different angle adjustment holes 110, so that the cover 10 can be locked at different angles, which can meet the equipment maintenance requirements at specific angles. In addition, the opening hole 108, the closing hole 109 and the multiple angle adjustment holes 110 are located on the same arc with the rotating shaft 104 as the center, so that the positioning structure 107 can be selectively inserted into the opening hole 108 or the closing hole 109 through the through hole 106 on the rotating arm 105, which is conducive to simplifying the complexity of the cover opening structure 100.

[0047] The rotating shaft 104 is fixedly connected to the fixed structure 101 and rotatably cooperates with the first base 102 .

[0048] The rotating shaft 104 is fixedly connected to the fixed structure 101, firmly combining the opening structure 100 and the cover body 10 together, playing the role of transmitting torque, so that the rotating shaft 104 can drive the cover body 10 to flip; at the same time, the rotating shaft is rotatably connected to the first base 102, so that the rotating shaft 104 can rotate relative to the cavity 20, providing a rotating fulcrum for the opening and closing action of the cover body 10.

[0049] In this embodiment, the fixed structure 101 has a through polygonal hole 111a, and the portion where the rotating shaft 104 is fixedly connected to the fixed structure 101 is a polygonal shaft 112a (eg, Figure 4 The polygonal hole 111a includes but is not limited to a square hole and a pentagon, and the corresponding polygonal shaft 112a includes but is not limited to a square shaft, a pentagon shaft or a plum blossom shaft. The polygonal hole 111a cooperates with the polygonal shaft 112a to achieve a rigid connection between the fixed structure 101 and the rotating shaft 104, effectively transmit torque, facilitate the stability and accuracy of the cover body 10 opening or closing the opening 11 of the cavity 20, and prevent relative sliding or rotation between the fixed structure 101 and the rotating shaft 104.

[0050] It should be noted that the part of the rotating shaft 104 that rotates with the first base 102 is a round shaft 118. The round shaft 118 allows the rotating shaft 104 to be evenly stressed during rotation, reduces friction and wear, and improves the service life and operation smoothness of the cover opening structure 100.

[0051] The cover opening structure 100 further includes: a bushing (not shown in the figure), which is arranged between the rotating shaft 104 and the fixed structure 101. The bushing is arranged between the rotating shaft 104 and the fixed structure 101, which can significantly reduce the direct friction between the rotating shaft 104 and the fixed structure 101, thereby reducing the resistance in the process of opening or closing the cover body 10, and reducing the shaking or deviation that may occur during the rotation of the rotating shaft 104; in addition, it can effectively extend the service life of the rotating shaft 104 and the fixed structure 101.

[0052] It should be noted that the bushing is usually designed to be cylindrical, the inner diameter of the bushing matches the outer diameter of the rotating shaft 104 , and the outer diameter of the bushing matches the inner diameter of the corresponding hole in the fixed structure 101 .

[0053] In this embodiment, the bushing may be installed in the fixed structure 101 by interference fit to ensure that it will not loosen or fall off during use. The bushing and the rotating shaft 104 may be slidably fitted to allow the rotating shaft 104 to rotate freely.

[0054] The rotating arm 105 is fixedly connected to the rotating shaft 104 and is used to drive the cover body 10 to open or close the opening 11 .

[0055] The rotating arm 105 is a driving component that provides power for opening or closing the cover 10. Specifically, the rotating arm 105 is fixedly connected to the rotating shaft 104 to convert the applied force into a rotational motion of the cover 10, so that the applied force is effectively transmitted, thereby realizing the opening or closing of the opening 11 of the cavity 20.

[0056] In this embodiment, the rotating arm 105 is a rod-shaped structure, one end of the rotating arm 105 is fixedly connected to the rotating shaft 104, and the other end of the rotating arm 105 is in a shape that is easy to hold by hand to improve operational convenience.

[0057] In this embodiment, the rotating arm 105 has a square hole 111b, and the end of the rotating shaft 104 is a square shaft 112b (such as Figure 4 As shown in the figure, the square shaft 112b of the rotating shaft 104 cooperates with the square hole 111b to transmit torque, so that when the cover body 10 opens or closes the opening 11 of the cavity 20, the rotational movement of the rotating arm 105 can be transmitted to the rotating shaft 104, thereby driving the entire cover body 10 to perform a stable and controllable opening and closing action. In other embodiments, the rotating arm and the rotating shaft can also cooperate to transmit torque through a key.

[0058] It should be noted that the rotating arm 105 is provided with a through hole 106, and the through hole 106, the positioning hole 103 and the rotating shaft 104 have the same extension direction. The through hole 106, the positioning hole 103 and the rotating shaft 104 have the same extension direction, so that the positioning structure 107 can pass through the through hole 106 of the rotating arm 105 and the positioning hole 103 of the first base 102 at the same time, thereby realizing reliable locking and convenient release of the cover body 10 at a specific position. Moreover, the through hole 106, the positioning hole 103 and the rotating shaft 104 have the same extension direction, which simplifies the insertion and removal operation of the positioning structure 107 and improves the efficiency of the entire opening process.

[0059] like Figure 2 As shown, the rotating arm 105 includes a first end 105a and a second end 105b, and the first end 105a is rotatably connected to the rotating shaft 104; the opening cover structure 100 also includes: an assisting structure 112, and the assisting structure 112 is rotatably connected to the second end 105b of the rotating arm 105.

[0060] The first end 105a of the rotating arm 105 is rotatably connected to the rotating shaft 104, so that the rotating arm 105 can rotate with the rotating shaft 104, thereby driving the cover body 10 to open or close the opening 11 of the cavity 20, and the connection between the second end 105b and the assisting structure 112 provides additional force support during the opening or closing process.

[0061] In this embodiment, the second end 105 b of the rotating arm 105 is rotatably connected to the assisting structure 112 , so that the assisting structure 112 changes position as the rotating arm 105 rotates during the process of opening the cover.

[0062] It should be noted that the second end 105 b of the rotating arm 105 is provided with a cylindrical protrusion 113 , and the assisting structure 112 is provided with a circular hole for rotationally cooperating with the cylindrical protrusion 113 of the second end 105 b of the rotating arm 105 .

[0063] It should also be noted that a support structure 116 is provided at the bottom of the cavity 20. The end of the assisting structure 112 away from the rotating arm 105 is connected to the support structure 116. As an example, the support structure 116 is a support leg.

[0064] In this embodiment, the assisting structure 112 includes a nitrogen spring. The nitrogen spring can provide a large thrust in the initial stage of opening the cover 10. As the opening angle of the cover 10 increases, the thrust gradually decreases, thereby achieving a smooth opening process of the cover 10. In other embodiments, the assisting structure includes a telescopic rod, a cylinder or a hydraulic cylinder.

[0065] In this embodiment, the through hole 106 is a circular hole, and its diameter is slightly larger than the diameter of the positioning structure 107 to ensure that the positioning structure 107 can pass through smoothly.

[0066] In this embodiment, a fan-shaped groove 114 is provided on the side of the rotating arm 105 facing the first base 102. The cover opening structure 100 further includes: a cylindrical pin 115, which is fixedly arranged on the side of the first base 102 facing the rotating arm 105, and the cylindrical pin 115 protrudes from the surface of the first base 102, and the cylindrical pin 115 is slidably arranged in the fan-shaped groove 114.

[0067] The fan-shaped groove 114 and the cylindrical pin 115 are arranged opposite to each other, so that the fan-shaped groove 114 on the rotating arm 105 and the cylindrical pin 115 on the first base 102 together constitute a limiting mechanism. Through the curvature design of the fan-shaped groove 114, the maximum rotation angle of the rotating arm 105 can be controlled, thereby accurately controlling the maximum rotation angle of the cover body 10 to prevent excessive opening; while the cylindrical pin 115 is fixed to the first base 102, it slides in the fan-shaped groove 114 to limit the movement trajectory of the rotating arm 105. When the cover is opened, the cylindrical pin 115 is located at the end of the fan-shaped groove 114, which can prevent the cover body 10 from continuing to rotate, thereby playing a self-locking role.

[0068] In this embodiment, the curvature of the fan-shaped groove 114 determines the maximum rotation angle of the rotating arm 105 .

[0069] It should be noted that the width of the fan-shaped groove 114 is slightly larger than the diameter of the cylindrical pin 115 , so as to ensure smooth sliding of the cylindrical pin 115 in the fan-shaped groove 114 .

[0070] In this embodiment, the cylindrical pin 115 is fixed to the first base 102 by welding, threaded connection or other forms, so that the cylindrical pin 115 and the first base 102 are firmly connected.

[0071] The cover opening structure 100 further includes: a second base 117 located at a side of the fixed structure 101 away from the first base 102 ; and an end of the rotating shaft 104 away from the first base 102 is rotatably connected to the second base 117 .

[0072] The first base 102 provides a support point for one end of the rotating shaft 104 , and the second base 117 provides a support point for the rotating shaft 104 away from the end of the first base 102 , so that both ends of the rotating shaft 104 are supported, allowing the rotating shaft 104 to rotate stably.

[0073] In this embodiment, the second base 117 is fixed to the cavity 20 by bolt connection or welding. In other embodiments, the second base can also be a component of the cavity, that is, the second base and the cavity are an integrated structure and are processed as a whole.

[0074] It should be noted that the first base 102, a fixed structure 101 and a rotating shaft 104 serve as a cover opening unit, and the cover opening structure 100 may include 1 to 3 cover opening units, 2 being the best embodiment, and the two cover opening units are symmetrically arranged.

[0075] The two cover opening units are symmetrically arranged, which can evenly distribute the force when the cover body 10 opens or closes the opening 11 of the cavity 20, reduce the possibility of deflection or jamming, and thus improve the stability of the operation of the cover opening structure 100. Moreover, the two cover opening units work together to withstand a greater load.

[0076] In this embodiment, the number of the second base 117 is one, and the second base 117 is disposed between the two cover opening units.

[0077] The second base 117 is disposed between the two cover opening units, so that the cover opening structure 100 is symmetrically disposed, which is beneficial to balancing the force of the entire cover opening structure 100 and ensuring the synchronous movement of the cover opening units on both sides.

[0078] Specifically, the rotating shaft 104 is rotatably arranged in the second base 117. The second base 117 serves as a support point for the rotating shaft 104, thereby enhancing the stability of the rotating shaft 104 and facilitating the reliable operation of the cover opening structure 100.

[0079] As an example, the rotating shaft 104 is rotatably disposed in the second base 117 via a bearing, or is rotatably disposed in the second base 117 via a bushing.

[0080] In this embodiment, the end of the rotating shaft 104 away from the fixed structure 101 is exposed outside the first base 102; the rotating arm 105 is fixedly connected to the end of the rotating shaft 104 away from the fixed structure 101. The rotating shaft 104 is exposed outside the first base 102, so that the rotating arm 105 is directly connected to the exposed end of the rotating shaft 104, so that force can be directly applied to the rotating arm 105, which is convenient for transmission.

[0081] The positioning structure 107 is used to penetrate the through hole 106 and enter the positioning hole 103 of the first base 102. The positioning structure 107 controls the opening and closing state of the cover 10 by penetrating the through hole 106 and entering the positioning hole 103 of the first base 102, thereby positioning and locking the cover 10 at a specific position to prevent accidental opening or closing.

[0082] In this embodiment, the positioning structure 107 includes a knob plunger. The knob plunger can be inserted into the positioning hole 103 on the first base 102 to lock the position of the cover 10 and prevent the cover 10 from being accidentally opened or closed. Specifically, the knob plunger can be inserted into or withdrawn from the positioning hole 103 when needed through a rotating action to lock or release the cover 10.

[0083] like Figure 3 As shown, the positioning hole 103 includes an opening hole 108, a closing hole 109 and multiple angle adjustment holes 110. Through the cooperation of the positioning structure 107 with the opening hole 108, the closing hole 109 and multiple angle adjustment holes 110, the cover body 10 can be opened at multiple angles as needed.

[0084] The process of opening and closing the cover body 10 by the cover opening structure 100 will be described below.

[0085] When the cover opening structure 100 opens the cover body 10, the positioning structure 107 is first removed from the closing hole 109 to release the locked state of the cover body 10; a positive force is applied to the rotating arm 105. Since the rotating arm 105 is fixedly connected to the rotating shaft 104, the rotating shaft 104 drives the fixed structure 101 fixedly connected thereto to rotate positively, thereby driving the cover body 10 to open; during the opening process, the fan-shaped groove 114 on the rotating arm 105 cooperates with the cylindrical pin 115 on the first base 102 to limit the rotation range of the cover body 10 and prevent excessive opening. Fig.10 As shown, if it is necessary to stop at the middle position, the positioning structure 107 can be inserted into the angle adjustment hole 110 on the first base 102 to achieve multi-angle positioning of the cover body 10. Fig. 9 As shown, if it is necessary to stay at the maximum open position, the operator inserts the positioning structure 107 into the opening hole 108 of the first base 102 to lock the position of the cover body 10 to be fixed.

[0086] When the cover opening structure 100 closes the cover body 10, the positioning structure 107 is removed from the opening hole 108 to release the locked state of the cover body 10, and a reverse force is applied to the rotating arm 105, so that the rotating shaft 104 drives the fixing structure 101 to rotate, thereby driving the cover body 10 to close. During the closing process, the fan-shaped groove 114 and the cylindrical pin 115 are slidably matched to ensure that the cover body 10 closes smoothly. If it is necessary to stay in the middle position, the positioning structure 107 can be inserted into the angle adjustment hole 110 on the first base 102 to achieve multi-angle positioning of the cover body 10. Figure 5 As shown, if the opening 11 of the cavity 20 needs to be completely closed, the operator inserts the positioning structure 107 into the closing hole 109 of the first base 102 to lock the position of the cover body 10.

[0087] refer to Figures 5 to 10 The present invention also provides a semiconductor device. The semiconductor device includes: a cavity 20, the cavity 20 having an opening 11; a cover 10, which is disposed on the opening 11; and an opening structure 100, which is connected to the cavity 20 and the cover 10 at the same time, and is used to enable the cover 10 to flip to open or close the opening 11 of the cavity 20.

[0088] In the semiconductor device provided by the embodiment of the present invention, the through hole 106, the positioning hole 103 and the rotating shaft 104 have the same extension direction, and the positioning structure 107 is used to penetrate the through hole 106 and enter the positioning hole 103. Because the opening 11 is usually located at the top of the cavity 20, in order to facilitate the operation of flipping the cover 10 to open or close the opening 11 of the cavity 20, the rotating shaft 104 is arranged horizontally, because the through hole 106 on the rotating arm 105, the positioning hole 103 on the first base 102 and the rotating shaft 104 have the same extension direction, the corresponding positioning structure 107 is inserted into the through hole 106 and the positioning hole 103 from the side or removed from the through hole 106 and the positioning hole 103 in a horizontal state when being installed or removed, which greatly reduces the required operating space.

[0089] In addition, the cover opening structure 100 adopts a double insurance mechanism, namely, the cooperation between the cylindrical pin 115 and the fan-shaped groove 114 and the cooperation between the knob plunger and the positioning hole 103, which can reduce the risk of damage to personnel or equipment due to misoperation during the opening or closing of the semiconductor device. Even if the knob plunger is forgotten to be installed, the cooperation between the fan-shaped groove 114 and the cylindrical pin 115 can still effectively prevent the cover body 10 from being over-opened.

[0090] When the cover 10 is disposed on the opening 11 of the cavity 20 , the cavity 20 provides a closed space for wafer processing, serving as a reaction chamber for a vapor deposition process or a plasma etching process.

[0091] It should be noted that the cover opening structure 100 is located on one side of the cover body 10 , and a handle 119 is provided on the side of the cover body 10 away from the cover structure 100 .

[0092] The handle 119 is disposed on the cover body 10 at a side away from the cover structure 100 , which is helpful to reduce the torque during opening and closing of the cover body 10 , so that the operator can easily grasp the cover body 10 to open and close the cover body 10 .

[0093] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A cover opening structure, connected to a cover body, used to enable the cover body to open or close the opening of a cavity, characterized in that: The cover opening structure comprises: A fixing structure, fixedly arranged at the edge of the cover body; A first base, located on the side wall of the cavity, and a positioning hole is provided on the first base; A rotating shaft, fixedly connected to the fixed structure and rotatably matched with the first base; A rotating arm, fixedly connected to the rotating shaft, for driving the cover to open or close the opening, wherein a through hole is provided on the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extension direction; A positioning structure is used to penetrate the through hole and enter the positioning hole of the first base.

2. The cover opening structure according to claim 1, characterized in that: The positioning hole is located on a side of the first base facing the rotating arm, and the positioning hole includes an open-to-position hole and a closed-to-position hole spaced apart from each other, and the open-to-position hole is used to cooperate with the positioning structure when the opening is opened; The closing hole is used to cooperate with the positioning structure when the opening is closed.

3. The cover opening structure according to claim 2, characterized in that: The opening hole and the closing hole are located on the same arc with the rotating shaft as the center.

4. The cover opening structure according to claim 2, characterized in that: The first base also includes: A plurality of angle adjustment holes are arranged between the opening hole and the closing hole, and the opening hole, the closing hole and the plurality of angle adjustment holes are located on the same arc with the rotating shaft as the center.

5. The cover opening structure according to claim 1, characterized in that: The rotating arm has a polygonal hole, the end of the rotating shaft is a polygonal shaft, and the square shaft of the rotating shaft cooperates with the square hole to transmit torque; Alternatively, the rotating arm and the rotating shaft are matched to transmit torque via a key.

6. The cover opening structure according to claim 1, characterized in that: A fan-shaped groove is provided on one side of the rotating arm facing the first base; The cover opening structure further includes: a cylindrical pin fixedly arranged on a side of the first base facing the rotating arm, the cylindrical pin protruding from a surface of the first base, and the cylindrical pin slidably arranged in the fan-shaped groove.

7. The cover opening structure according to claim 1, characterized in that: The cover opening structure further comprises: A second base, located on a side of the fixed structure away from the first base, and the second base is fixedly disposed on a side wall of the cavity; The end of the rotating shaft away from the first base is rotatably connected to the second base.

8. The cover opening structure according to claim 1, characterized in that: The positioning structure includes a knob plunger.

9. The cover opening structure according to claim 1, characterized in that: The fixed structure has a through polygonal hole, and the portion where the rotating shaft is fixedly connected to the fixed structure is a polygonal shaft.

10. A semiconductor device, characterized in that: include: a cavity having an opening; A cover body, which is arranged on the opening; The cover opening structure according to any one of claims 1 to 16, wherein the cover opening structure is connected to the cavity and the cover at the same time, and is used to enable the cover to be flipped to open or close the opening of the cavity.

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