Amorphous alloy rotating shaft and multi-range torque sensor based on same

Abstract

The invention provides an amorphous alloy rotating shaft, which comprises a cylindrical elastic body, an amorphous alloy rotating shaft, an amorphous alloy rotating shaft, an amorphous alloy rotating shaft, an amorphous alloy rotating shaft and an amorphous alloy rotating shaft, and is characterized in that the elastic body is twisted and deformed under the acting force of transmission equipment; a strain area is arranged in the middle of the elastic body, and the strain area twists and deforms under the acting force of transmission equipment; the connecting end is used for connecting the rotating shaft with transmission equipment; the shaft sleeve is used for fixing the rotating shaft; wherein the elastic body, the connecting end and the shaft sleeve are all made of amorphous alloy materials, the amorphous alloy materials comprise Zr, Co, Cu, Nb, Al or Ti or Fe, and when Al or Ti is adopted, the atomic component percentage of the amorphous alloy materials is 0%-8%; when Fe is adopted, the atomic component percentage is 0-5%. Based on the scheme of the invention, the response performance of the prepared rotating shaft is improved on the basis of maintaining high strength, the sensitivity can be obviously improved, the total volume is greatly reduced, and the dual purposes of structure compactness and performance enhancement are realized.

Description

Technical Field

[0001] The present invention relates to the field of sensors, in particular to the field of a novel rotating shaft and a multi-range torque sensor, and more particularly to an amorphous alloy transmission shaft and a multi-range torque sensor based thereon. Background Art

[0002] The torque sensor is also called a torque sensor, a torque sensor, or a torque meter. Its function is to detect the output torque on various rotating or non-rotating mechanical parts. Through the circuit, the torque sensor can convert the physical change of torque into an accurate electrical signal.

[0003] Torque sensors are divided into two categories: dynamic and static. Dynamic torque sensors on the market generally consist of components such as a housing, a rotating shaft (elastic body), a bushing and a strain gauge. They are often used to detect situations where torque needs to be measured and power needs to be calculated in mechanical transmission equipment such as automotive power steering and drilling torsion bars. When the rotating shaft is subjected to torque, the resistance strain gauge on the shaft deforms and causes the resistance value of the built-in resistance grid to change, and the electrical signal corresponding to the torque is output through the imbalance of the bridge. Among them, the main type of dynamic torque sensor is the metal resistance strain gauge type.

[0004] As a key device in modern precision measurement technology, the core goal of dynamic torque sensors is to achieve accurate and efficient measurement of various torque ranges in rotating systems. Compared with traditional single-range torque sensors, the design of such sensors must take into account wider applicability and higher flexibility while ensuring measurement accuracy.

[0005] Sensors are usually designed and calibrated according to a certain sensitivity under the calibration range. However, due to the mechanical properties of the material and the structural design, the torque sensor with a single elastic shaft structure often has a contradiction between sensitivity and range adaptability when dealing with large and small range torque measurements: considering the high speed of the adaptable motor and the stiffness and fatigue life requirements of the sensor, the rotating shaft is usually made of high-strength stainless steel, but its high Young's modulus leads to insufficient sensitivity under small ranges. Although low Young's modulus materials such as aluminum alloy can improve sensitivity, it is difficult to meet the measurement requirements of high strength and large range torque. In addition, the sensor may be damaged due to elastic deformation when used under the overload range, and the detection of small range torque cannot be accurately measured due to the small output signal. In response to the above problems, some existing patents have proposed innovative solutions. For example, patent application CN 202814610U proposes a dual-range and multi-range torque sensor structure. Its innovation lies in the combination design of at least one sheet elastomer and at least one columnar elastomer, which enables the sensor to flexibly switch under different ranges and effectively respond to the corresponding elastomer requirements; another patent application CN 206399568U designs a new structure composed of a first elastic shaft and a second elastic shaft superimposed and fixedly connected to each other, and is equipped with two limit devices to ensure that the sensor operates safely and stably under dual-range conditions and meet the needs of wide-range torque measurement. Although the existing technology has made certain breakthroughs in structural design, it still faces challenges such as complex preparation process, deep sensor structure, and high processing cost. The essence of this type of solution is to assemble two dynamic torque sensors together, and has not yet achieved a significant improvement in the accuracy of dual-range dynamic torque measurement.

[0006] In summary, due to the contradiction between the strength and elastic modulus of the existing rotating shaft materials, the existing dynamic torque sensors cannot have the characteristics of a large range, high sensitivity and small size.

[0007] It should be noted that this background technology is only used to introduce the relevant information of the present invention to help understand the technical solution of the present invention, but it does not mean that the relevant information is necessarily the prior art. If there is no evidence that the relevant information has been disclosed before the application date of the present invention, the relevant information shall not be regarded as the prior art. Summary of the invention

[0008] Therefore, the purpose of the present invention is to overcome the defects of the prior art and provide a new amorphous alloy rotating shaft and a multi-range torque sensor based thereon.

[0009] According to a first aspect of the present invention, an amorphous alloy rotating shaft is provided, the rotating shaft comprising: an elastomer, which is cylindrical and undergoes torsional deformation under the action of a transmission device; a strain zone is provided in the middle of the elastomer, and the strain zone undergoes torsional deformation under the action of the transmission device; a connecting end, used to connect the rotating shaft and the transmission device; a bushing, used to fix the rotating shaft; wherein the elastomer, the connecting end and the bushing are all made of an amorphous alloy material, and the amorphous alloy material contains Zr, Co, Cu, Nb, Al or Ti or Fe, wherein when Al or Ti is used, the atomic composition percentage is 0%-8%; when Fe is used, the atomic composition percentage is 0%-5%.

[0010] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr:Co:Cu:Nb:Al=(45-57):(8-18):(6-18:(6-17):(0-8).

[0011] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr 56.88%, Co 8%, Cu 15.12%, Nb 15%, Al 5%; or, Zr 47.25%, Co 15.75%, Cu 16.75%, Nb 16.25%, Al 4%.

[0012] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr:Co:Cu:Nb:Ti=(45-58):(8-18):(6-18):(6-19):(0-8).

[0013] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr 57%, Co 16%, Cu 12%, Nb 12%, Ti 3%; or, Zr 50%, Co 15%, Cu 11%, Nb 17%, Ti 7%.

[0014] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr:Co:Cu:Nb:Fe=(45-58):(8-18):(6-18):(6-19):(0-5).

[0015] Preferably, the amorphous alloy material includes components and the atomic composition percentage of each component is: Zr 56%, Co 12%, Cu 14%, Nb 15%, Fe 3%; or, Zr 58%, Co 10%, Cu 16%, Nb 14%, Fe 2%.

[0016] Preferably, the Young's modulus of the elastomer is 80 GPa-100 GPa; the yield strength of the elastomer is 1600 MPa-2400 MPa; and the sensitivity of the elastomer is 1 mV / N·m-1.8 mV / N·m.

[0017] According to a second aspect of the present invention, a multi-range torque sensor is provided, the sensor comprising: an amorphous alloy rotating shaft as described in the first aspect of the present invention, a plurality of resistance strain gauges, a housing, a signal processing module, and an external interface, wherein: the plurality of resistance strain gauges are installed in the strain zone of the amorphous alloy rotating shaft to generate an electrical signal according to the torsional deformation of the amorphous alloy rotating shaft and transmit it to the signal processing module; the housing is used to fix the amorphous alloy rotating shaft; the signal processing module is used to process the signal transmitted by the resistance strain gauge to obtain the torque of the amorphous alloy rotating shaft; the external interface is used to transmit the amorphous alloy rotating shaft torque data obtained by the signal processing module to an external display.

[0018] Preferably, the amorphous alloy rotating shaft has a diameter of 38 mm and a length of 328 mm.

[0019] Compared with the prior art, the advantages of the present invention are: 1. The rotating shaft of the multi-range torque sensor of the present invention is prepared by a new type of amorphous alloy material. Compared with traditional elastomer materials, it shows significant improvement in mechanical properties: the yield strength of the new alloy is significantly improved, and at the same time, the Young's modulus decreases significantly, and has a lighter weight characteristic. Thanks to this, the prepared rotating shaft improves the response performance on the basis of maintaining high strength, the sensitivity can be significantly improved, and the total volume is greatly reduced, achieving the dual goals of compact structure and performance enhancement. The problem of the difficulty in reconciling the sensitivity and stiffness of the multi-range torque sensor is successfully solved. There is no need to design a complicated structure for the existing sensor, but the isotropy and unique microstructure of the amorphous alloy are used to make the sensor more accurate in the multi-range mode. 2. The amorphous alloy rotating shaft of the present invention has unique machinability characteristics, and can realize high-precision mass production of elastomers through special processing technologies such as die casting, blow molding, and casting. This preparation technology not only ensures the processing accuracy of the elastomer, but also greatly reduces the production cost and production cycle, which is a unique advantage of amorphous alloys. 3. The multi-range torque sensor technology proposed in the present invention breaks through the traditional single range limitation, realizes continuous and accurate measurement in a wide torque measurement range, and effectively avoids the cumbersome operation of frequently replacing or superimposing multiple sensors when facing different range requirements in the past. 4. The multi-range torque sensor of the present invention has a wide range of range coverage and significant range scalability. It can seamlessly adapt to torque measurement tasks of various amplitudes from low to high in the same sensing unit, greatly improving the flexibility and practicality of the torque measurement system. 5. The multi-range torque sensor of the present invention has high sensitivity and resolution, can quickly and accurately capture extremely subtle torque changes, and presents high-resolution measurement output characteristics. 6. The multi-range torque sensor of the present invention maintains high precision in the entire range, ensuring that the torque sensor can achieve high-precision measurement standards within the entire range, showing excellent consistency and reliability. 7. The multi-range torque sensor of the present invention has long-term stability. After experiencing long-term, complex and even extreme cyclic loading, it can still maintain stable measurement performance, reflecting excellent durability and environmental adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The embodiments of the present invention are further described below with reference to the accompanying drawings, in which:

[0021] Figure 1 is a schematic diagram of a rotating shaft structure according to an embodiment of the present invention;

[0022] Figure 2 is a schematic diagram of the appearance of a torque sensor according to an embodiment of the present invention;

[0023] Figure 3A schematic diagram of the internal structure of a torque sensor according to an embodiment of the present invention;

[0024] Figure 4 Schematic diagram of X-ray diffraction of multiple embodiments of the present invention;

[0025] Figure 5 A schematic diagram of mechanical properties according to an embodiment of the present invention;

[0026] Figure 6 Schematic diagram of X-ray diffraction of multiple comparative examples of the present invention;

[0027] Figure 7 Schematic diagram of a multi-range torque sensor performance testing device according to an embodiment of the present invention.

[0028] Description of reference numerals:

[0029] 1. Connection end; 2. Bushing; 3. New material elastomer; 4. Housing; 5. Interface; 6. Resistance strain gauge; 7. Motor; 8. Coupling; 9. Display instrument; 21. Bearing; 61. Signal line; 62. Signal processing module; 63. Circuit board. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0031] As mentioned in the background technology section, due to the contradiction between the strength and elastic modulus of existing rotating shaft materials, existing torque sensors cannot meet the requirements of large range, high sensitivity and small size.

[0032] As we all know, the key to the rotating shaft lies in the elastic shaft material. The existing dynamic torque sensor cannot meet the requirements of large range, high sensitivity and small volume due to the material used. Therefore, the present invention aims to develop a new generation of multi-range torque sensor that can not only simplify the structure and reduce production costs, but also effectively improve the dual-range measurement accuracy, so as to meet the diversified and refined needs of industrial production and scientific research. In the scheme of the present invention, a new amorphous alloy material is used to prepare the rotating shaft. As a new alloy with novel structure and excellent performance, amorphous alloy often shows mechanical properties, corrosion resistance, magnetism, electrical properties, etc. that are superior to traditional alloys due to its unique structural characteristics. Amorphous alloys are also called metallic glasses, which are usually obtained by rapid cooling and solidification of alloy melts. Due to their unique disordered structure, amorphous alloys have mechanical properties far exceeding those of crystalline materials, such as high strength, low Young's modulus, low thermal expansion coefficient and good wear resistance. At the same time, due to the glass properties of amorphous alloys, precise devices can be prepared by superplastic forming in the supercooled liquid phase. Not only can the surface roughness reach the nanometer level after forming, but it is also not easy to form casting defects such as shrinkage cavities, shrinkage porosity, and pores. In the scheme of the present invention, the unique advantages of amorphous alloys with high strength and low Young's modulus can be used to solve the contradiction between the sensitivity and range adaptability of torque sensors with a single elastic shaft structure in dealing with large and small range torque measurements, and realize the precise measurement of torque sensors in multiple ranges.

[0033] Before specifically introducing the embodiments of the present invention, some of the terms used therein are explained as follows:

[0034] "Amorphous alloy": solidified by ultra-rapid cooling. When the alloy solidifies, the atoms do not have time to arrange themselves in order and crystallize. The resulting solid alloy has a long-range disordered structure. The molecules (or atoms, ions) that make up the material do not have regular periodicity in space, and there are no grains or grain boundaries of crystalline alloys.

[0035] As mentioned above, the purpose of the present invention is to overcome the defects in the prior art and provide a rotating shaft and a multi-range torque sensor of a new material. The key to the design of the multi-range torque sensor of the new material of the present invention is that the present invention uses a new amorphous alloy material to prepare the rotating shaft, ensuring that the torque sensor has accurate and reliable torque sensing capability and sufficient rigidity when transmitting torque in a wide range, while taking into account the sensitivity requirements of detecting small torque changes under a smaller range, and realizing a balanced enhancement of measurement performance under multiple ranges. Compared with other dual-range torque sensor technologies, the range torque of the present invention has higher dynamic and static accuracy, a more optimized sensor structure, lower production cost, and greatly simplifies the manufacturing cycle of dual-range and multi-range torque sensors. The embodiment of the present invention mainly prepares the elastomer by the suction casting process, wherein, in summary, the process of preparing the amorphous alloy elastomer by the suction casting process is as follows: (1) placing the alloy raw material in a vacuum environment for induction melting or arc melting. The vacuum condition helps to reduce oxidation and gas dissolution and ensure the purity of the material; (2) sucking the molten alloy into a pre-prepared water-cooled mold under the action of vacuum to achieve rapid cooling of the alloy. The cooling rate usually needs to reach several thousand to several million degrees per second, depending on the composition and size of the alloy. Rapid cooling inhibits the orderly arrangement of atoms and prevents the formation of a crystal structure, thus forming an amorphous structure; (3) The amorphous alloy rod prepared by suction casting is processed into the designed structure and size.

[0036] According to one embodiment of the present invention, the present invention provides an amorphous alloy rotating shaft, the rotating shaft comprising: an elastic body, which is cylindrical and undergoes torsion deformation under the force of a transmission device; a strain zone is provided in the middle of the elastic body, and the strain zone undergoes torsion deformation under the force of the transmission device; a connecting end, used to connect the rotating shaft with the transmission device; a sleeve, used to fix the rotating shaft; wherein the elastic body, the connecting end, and the sleeve are all made of an amorphous alloy material, and the amorphous alloy material contains Zr, Co, Cu, Nb, Al or Ti or Fe, wherein when Al or Ti is used, the atomic composition percentage is 0%-8%; when Fe is used, the atomic composition percentage is 0%-5%. In summary, each part of the rotating shaft in the scheme of the present invention is made of a new amorphous alloy material, the amorphous alloy material is mainly composed of Zr-Co-Cu-Nb, 0%-8% Al or 0%-8% Ti or 0%-5% Fe as the fifth element, and the atomic ratio of each component when the fifth element is different is:

[0037] Zr:Co:Cu:Nb:Al=(45-57):(8-18):(6-18):(6-17):(0-8);

[0038] Zr:Co:Cu:Nb:Ti=(45-58):(8-18):(6-18):(6-19):(0-8);

[0039] Zr:Co:Cu:Nb:Fe=(45-58):(8-18):(6-18):(6-19):(0-5).

[0040] In order to better understand the structure of the rotating shaft and the new multi-range torque sensor, the structure of the rotating shaft and the multi-range torque sensor will be first introduced below with reference to the accompanying drawings.

[0041] like Figure 1 As shown, it shows the rotating shaft based on the new amorphous alloy material in the scheme of the present invention. The structure of the rotating shaft is mainly determined by the parameters such as the structural dimensions of the connecting end 1, the sleeve 2, and the elastomer 3. The structure and type of the connecting end are determined according to the connection method between the rotating shaft and the transmission equipment, and the main purpose is to ensure that the connection between the rotating shaft and the transmission component is stable and reliable during operation; the structure and type of the sleeve are determined by the internal structure of the sensor, and the main function is to cooperate with bearings, couplings and other parts for positioning the rotating shaft relative to the housing; the structural dimensions of the elastomer 3 are determined according to the use scenario of the sensor, the performance requirements of the sensor, the material properties, and the pasting position of the resistance strain gauge, combined with finite element simulation. The elastomer in the scheme of the present invention is selected from amorphous alloys, which need to have excellent elastic limit, high yield strength, low elastic modulus, vibration resistance, corrosion resistance and other properties.

[0042] The multi-range torque sensor of the rotating shaft based on the solution of the present invention is as follows Figure 5 and 6 As shown, Figure 5 The external effect diagram of the sensor is shown. Figure 6 The internal structure of the sensor is shown. Based on the rotating shaft of the scheme of the present invention, a suitable type of resistance strain gauge 6 is selected and pasted on the preset strain area of ​​the rotating shaft, and a Wheatstone bridge circuit structure is constructed through the signal line 61. The rotating shaft sleeve end 2 is fixed to the housing 4 by means of gear connection or bearing 21. When the multi-range dynamic torque is working, the resistance of the multiple resistance strain gauges 6 changes linearly with the stress, the Wheatstone bridge composed of them is unbalanced, and the generated electrical signal is transmitted to the signal processing module 62 for a series of processing such as filtering, amplification, and conditioning. The processed analog signal is transmitted to the circuit board 63 for a series of processing such as compensation and amplification to be converted into a standard signal, and finally outputted to the outside through the interface 5. Since the structure of the multi-range torque sensor is known to those skilled in the art, it is only briefly introduced in the embodiment of the present invention for easy understanding, and no detailed description is given.

[0043] It should be noted that in the scheme of the present invention, the proportion of each element in the amorphous alloy material has a significant impact on the performance of the final amorphous alloy material. If the content of Ti or Fe is too high, the alloy processing performance will deteriorate, which is specifically manifested as a decrease in room temperature plasticity, and the material is more likely to undergo brittle fracture during machining. In addition, too high a Ti content will also lead to poor fluidity of the alloy melt, different cooling rates at various parts of the alloy during the casting process, uneven mass distribution, and eventually crystallization or defects such as shrinkage and shrinkage cavities will occur, which will reduce the sensitivity of the prepared tension and pressure sensor. In addition, if the Al content is too high, the glass forming ability and yield strength of the material will be reduced, which may not only cause the cast-formed material to crystallize, but also limit the range and volume of the sensor prepared therefrom. Therefore, the present invention has specially designed the components of each element to obtain a rotating shaft that best meets the needs of the present invention.

[0044] The following uses a number of embodiments and comparative examples to illustrate the effects of amorphous alloys with different compositions and contents on the rotating shaft.

[0045] Example 1

[0046] In this example, a zirconium-titanium-copper-niobium-aluminum amorphous alloy rods are prepared by suction casting. The rods are used to prepare amorphous alloy rotating shaft elastomers.

[0047] The suction casting steps and characterization steps of zirconium-titanium-copper-niobium-aluminum amorphous alloy rods are as follows: First, the specific composition of the zirconium-titanium-copper-niobium-aluminum amorphous alloy system, Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy, is selected. The alloy has good forming ability, high yield strength and low Young's modulus. The copper mold is cleaned, and according to the mass ratio of the alloy elements, the accurately weighed alloy element raw materials are treated to remove the surface oxide layer and then placed in the crucible of the vacuum arc furnace. Then, the vacuum arc furnace cavity is evacuated to a temperature of not less than 3×10 -3 The vacuum is then applied, and the raw materials are heated by an electric arc to melt evenly into an alloy ingot. While the alloy ingot is melting, argon is filled into the cavity to control the negative pressure environment. The molten alloy is sucked into a Φ5*18 mm mold by a mechanical pump to achieve rapid filling. Under the action of water cooling, the alloy is rapidly cooled, and its structure gradually stabilizes to an amorphous state, forming a rod-shaped material. Finally, the amorphous state of the rod is confirmed by X-ray diffraction, such as Figure 4 As shown, a Rigaku X-ray diffractometer equipped with a Cu-Kα radiation source is used to perform X-ray diffraction on the cross section of the amorphous alloy rod. If there is no diffuse diffraction peak, the amorphous structure of the material has no obvious crystallization. If there is a sharp Bragg diffraction peak, the structure of the material is crystallized. Figure 4 It can be seen that there is no crystallization in the structure of the material; and the mechanical properties of the material are evaluated by compression test. The mechanical properties are as follows Figure 5As shown, it can be seen that the yield strength of the Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy is 1880 MPa, the Young's modulus is 87.3 GPa, and the Poisson's ratio is 0.377. Thus, the preparation and characterization of the Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy rod is completed.

[0048] Example 2

[0049] In this example, a zirconium-titanium-copper-niobium-aluminum amorphous alloy rod is prepared by suction casting, and the rod is used to prepare an amorphous alloy rotating shaft elastic body. The amorphous alloy material is composed of the following elements in atomic proportions: Zr 47.25%, Co 15.75%, Cu 16.75%, Nb 16.25% and Al 4%.

[0050] The preparation and characterization steps of the amorphous alloy rod in this embodiment refer to those in Example 1, and the X-ray diffraction pattern is still as follows: Figure 4 As shown, no further description is given here.

[0051] Example 3

[0052] In this example, a zirconium-titanium-copper-niobium-cobalt amorphous alloy rod is prepared by suction casting, and the rod is used to prepare an amorphous alloy rotating shaft elastic body. The amorphous alloy material is composed of the following elements in atomic proportions: Zr 57%, Co 16%, Cu 12%, Nb 12% and Ti 3%.

[0053] The preparation and characterization steps of the amorphous alloy rod in this embodiment refer to those in Example 1, and the X-ray diffraction pattern is still as follows: Figure 4 As shown, no further description is given here.

[0054] Example 4

[0055] In this example, a zirconium-titanium-copper-niobium-cobalt amorphous alloy rod is prepared by suction casting, and the rod is used to prepare an amorphous alloy rotating shaft elastic body. The amorphous alloy material is composed of the following elements in atomic proportions: Zr 50%, Co 15%, Cu 11%, Nb 17% and Ti 7%.

[0056] The preparation and characterization steps of the amorphous alloy rod in this embodiment refer to those in Example 1, and the X-ray diffraction pattern is still as follows: Figure 4 As shown, no further description is given here.

[0057] Example 5

[0058] In this example, a zirconium-titanium-copper-niobium-iron amorphous alloy rod is prepared by suction casting, and the rod is used to prepare an amorphous alloy rotating shaft elastic body. The amorphous alloy material is composed of the following elements in atomic percentages: Zr 56%, Co 12%, Cu 14%, Nb 15% and Fe 3%.

[0059] The preparation and characterization steps of the amorphous alloy rod in this embodiment refer to those in Example 1, and the X-ray diffraction pattern is still as follows: Figure 4 As shown, no further description is given here.

[0060] Example 6

[0061] In this example, a zirconium-titanium-copper-niobium-iron amorphous alloy rod is prepared by suction casting, and the rod is used to prepare an amorphous alloy rotating shaft elastic body. The amorphous alloy material is composed of the following elements in atomic proportions: Zr 58%, Co 10%, Cu 16%, Nb 14% and Fe 2%.

[0062] The preparation and characterization steps of the amorphous alloy rod in this embodiment refer to those in Example 1, and the X-ray diffraction pattern is still as follows: Figure 4 As shown, no further description is given here.

[0063] Comparative Example 1

[0064] The raw material for the preparation of this comparative example is 17-4PH stainless steel, and its preparation process is as follows: (1) The alloy is melted by vacuum induction melting, and the chemical composition is adjusted by adding alloying elements (such as chromium, nickel, copper, niobium, etc.) to ensure that the standard requirements of 17-4PH are met. (2) The molten steel is cooled and solidified to form an ingot or billet. (3) The ingot or billet is hot rolled or forged to form a plate of the required shape and size. (4) The material is heated to 950℃-1050℃ (solution treatment) and then rapidly cooled (air cooling or oil cooling) to dissolve carbides and improve the hardness and toughness of the material. (4) The plate after solution treatment is heated to 480℃-550℃ (aging treatment) and maintained for more than 4 hours to promote the formation of precipitation phase and further improve the strength of the material. (5) The stainless steel bar is processed by turning, milling, drilling, etc. to finally achieve the structure and size of the elastomer.

[0065] Comparative Example 2

[0066] This comparative example shows a zirconium-titanium-copper-niobium-aluminum amorphous alloy rod for preparing a rotating shaft elastomer, wherein the composition of the amorphous alloy material is not within the scope of the present invention and is composed of the following elements in atomic percentages: Zr 52%, Co 15%, Cu 10%, Nb 12% and Al 11%.

[0067] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1, and the X-ray diffraction pattern of the rod is confirmed by X-ray diffraction as shown in Figure 6As shown, it can be seen that the structure has obvious diffraction peaks. The yield strength of the Zr52Co15Cu10Nb12Al11 amorphous alloy in this comparative example is 1100 MPa and the Young's modulus is 240 GPa. Its microstructure is crystallized, the forming ability is limited, and there may be defects such as crystal planes and phase changes. The sensitivity of the elastic shaft can be obtained by applying positive and reverse linear torques to the rotating shaft elastomer through standard calibration equipment.

[0068] Comparative Example 3

[0069] This comparative example shows a zirconium-titanium-copper-niobium-cobalt amorphous alloy rod for preparing a rotating shaft elastomer, wherein the composition of the amorphous alloy material is not within the scope of the present invention and is composed of the following elements in atomic percentages: Zr 56.5%, Co 16.5%, Cu 8%, Nb 8% and Ti 11%.

[0070] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1, and the X-ray diffraction pattern of the rod is confirmed by X-ray diffraction. Figure 6 As shown, it can be seen that the structure has obvious diffraction peaks. The Zr56.5Co16.5Cu8Nb8Ti11 amorphous alloy in this comparative example has a yield strength of 1300 MPa and a Young's modulus of 220 GPa. Its microstructure is crystallized, its forming ability is limited, and there may be defects such as crystal planes and phase changes. The sensitivity of the elastic shaft can be obtained by applying positive and reverse linear torques to the rotating shaft elastomer through standard calibration equipment.

[0071] Comparative Example 4

[0072] This comparative example shows a zirconium-titanium-copper-niobium-iron amorphous alloy rod for preparing a rotating shaft elastomer, wherein the composition of the amorphous alloy material is not within the scope of the present invention and is composed of the following elements in atomic percentages: Zr 47%, Co 16%, Cu 16%, Nb 14% and Fe 7%.

[0073] The structure and preparation method of the rotating shaft in this comparative example refer to those in Example 1, and the X-ray diffraction pattern of the rod is confirmed by X-ray diffraction. Figure 6 As shown, it can be seen that the structure has obvious diffraction peaks. The yield strength of the Zr47Co16Cu16Nb14Fe7 amorphous alloy in this comparative example is 1200 MPa and the Young's modulus is 235 GPa. Its microstructure is crystallized, the forming ability is limited, and there may be defects such as crystal planes and phase changes. The sensitivity of the elastic shaft can be obtained by applying positive and reverse linear torques to the rotating shaft elastomer through standard calibration equipment.

[0074] The material properties and sensitivity properties of the multi-range torque sensor elastomer prepared using the rods prepared in Examples 1-6 of the present invention and Comparative Examples 1-4 are shown in Table 1.

[0075] Table 1

[0076]

[0077] It can be seen from Table 1 that the yield strength of the rotating shaft made of the amorphous alloy material according to the embodiment of the present invention is much higher than that of the comparative example, the Young's modulus is much lower than that of the comparative example, and the sensitivity is also much higher than that of the comparative example, which can better meet the requirements of large range, high sensitivity and small volume.

[0078] Therefore, based on the amorphous alloy material in the above embodiment, a rotating shaft for a multi-range torque sensor can be prepared. As described in the above embodiment, the rotating shaft includes an amorphous alloy elastomer, a connecting end and a sleeve, wherein the amorphous alloy elastomer is prepared by suction casting or die casting; the connecting end can be connected to the rotating shaft and a rotating device such as a motor by key connection, coupling connection, pin connection, etc.; the sleeve can be used in conjunction with bearings, couplings and other parts for positioning the rotating shaft relative to the housing; and it should be noted that the connecting end and the sleeve belong to the structural components of the specific position of the amorphous alloy elastomer, that is, the amorphous alloy rotating shaft is a single entity, and the division into three parts is to more clearly explain the content of the invention.

[0079] Through the rotating shaft of the scheme of the present invention, a multi-range torque sensor can be prepared. The torque sensor includes: a rotating shaft, a housing, a resistance strain gauge, and a signal processing module. It can be prepared by the following steps: First, according to the use range of the sensor, the full-scale sensitivity requirements, the use temperature, etc., the amorphous alloy material in the embodiment of the present invention is selected, and according to its performance parameters such as modulus, density, Poisson's ratio and the design specifications of the sensor, the requirements such as the structure, size, and thickness of the strain gauge pasting area of ​​the rotating shaft are determined in combination with finite element analysis. The amorphous alloy rod prepared by suction casting or die casting is processed to obtain a new material rotating shaft. Then, a resistance strain gauge of a suitable type is selected and pasted on the preset strain area of ​​the rotating shaft, and a Wheatstone bridge circuit structure is constructed. Finally, the sleeve end of the rotating shaft is fixed to the housing by means of gear connection or bearing. When the multi-range dynamic torque is working, the electrical signal generated by the resistance strain gauge is transmitted to the signal processing module for a series of processing such as filtering, amplification, and conditioning, and finally outputted from the interface. Through calibration test, the static performance of the multi-range sensor in each range can be obtained, including sensitivity, linearity, repeatability, hysteresis, zero output, overload range, and creep characteristics. Connect the connection end of the multi-range torque sensor to the motor, record the output signal of the sensor at each speed, ensure that the output accuracy in the entire working range is within 0.5% FS, and obtain the safe speed range of the multi-range torque sensor.

[0080] The full-scale sensitivity and operating temperature of the multi-range torque sensor of the present invention have different requirements, and the large range also has different torque ranges. According to one embodiment of the present invention, the sensitivity range is 1.0 mV / V-4.0 mV / V, preferably 2.0 mV / V-3.0 mV / V; the temperature range is -50℃-150℃, preferably -20℃-100℃; the torque range is 10N·m-1000 N·m. Among them, the small range of the multi-range torque sensor is usually determined according to the signal output value under the range. According to one embodiment of the present invention, the signal output value range is 0.8 mV / V-1.5 mV / V.

[0081] The preparation method of the rotating shaft in the multi-range torque sensor of the present invention is composed of different processes, generally selected from one or more of the following: CNC milling, turning, drilling, boring, hot pressing, water jet processing, wire cutting, casting, forging, powder processing. Preferably, selected from one or more of the following: CNC milling, turning, hot pressing, drilling, casting, water jet processing, further preferably, selected from one or more of the following: CNC milling, turning, drilling, hot pressing.

[0082] The resistance strain gauges in the multi-range torque sensor of the present invention have different types according to the usage scenarios, and generally use strain gauges, T-type strain gauges, V-type strain gauges, double-bridge strain gauges, three-grid strain gauges, and full-bridge gauges. Preferably, strain gauges, T-type strain gauges, V-type strain gauges, double-bridge strain gauges, three-grid strain gauges, and full-bridge gauges are used. Among them, there are different options for the pasting area of ​​the resistance strain gauge, depending on the choice of the surface with the largest strain amount of the rotating shaft, the surface with the most uniform strain distribution of the rotating shaft, and the specific groove of the rotating shaft. More preferably, it is chosen on the surface with the most uniform strain distribution of the rotating shaft, and in the specific groove of the rotating shaft. In one embodiment of the present invention, in the scheme of the present invention, the surface with the largest strain amount of the rotating shaft is set as the strain zone.

[0083] The structure of the connection end in the multi-range torque sensor of the present invention is determined according to the connection method between the rotating shaft and the transmission device, wherein the connection method is selected from one or more of the following: key connection, pin connection, coupling connection, bearing connection, threaded connection, and adhesive connection. These connection methods are not used in isolation, and are often used in combination according to actual application conditions to ensure that the connection between the rotating shaft and the transmission component is stable and reliable during operation, while also being able to cope with complex stress conditions and temperature changes. Preferably, the key connection is selected from one or more of the following: spline connection, flat key connection, wedge key connection, tangential key connection, and semicircular key connection; preferably, the pin connection is selected from one or more of the following: cylindrical pin, conical pin, groove pin, cotter pin, and safety pin; preferably, the coupling is selected from one or more of the following: flange coupling, slider coupling, elastic pin coupling, gear coupling, universal coupling, and bellows coupling; preferably, the bearing connection is selected from one or more of the following: fixed bearing seat connection, shoulder fixing, axial retaining ring, and sleeve connection.

[0084] The resistance strain gauge and the signal processing module in the multi-range torque sensor of the present invention have different options for transmission mode. Preferably, the signal is transmitted through the alternating magnetic field generated by the coil element through the signal line connection.

[0085] The linearity of the multi-range torque sensor of the present invention has a required range, preferably, the linearity is 0.01% FS-0.5% FS, more preferably, 0.01% FS-0.3% FS; the repeatability of the sensor in the multi-range torque sensor of the present invention has a required range, preferably, the repeatability is 0.01% FS-0.5% FS, more preferably, 0.01% FS-0.3% FS; the hysteresis of the multi-range torque sensor of the present invention has a required range, preferably, the hysteresis is 0.01% FS-0.5% FS, more preferably, 0.01% FS-0.3% FS; the zero point output of the multi-range torque sensor of the present invention has a required range, preferably, the range is 0.01% FS-0.1% FS; the creep characteristics of the multi-range torque sensor of the present invention have a required range, preferably, the creep characteristics are defined as the output signal fluctuation range of the sensor after full-scale loading and maintaining for 30 minutes is 0.01% FS-1.0% Within FS.

[0086] The motors connected to the multi-range torque sensor of the present invention are of different types, preferably, a servo motor, a stepper motor, a torque motor, or a switched reluctance motor.

[0087] In order to better understand the process of preparing a multi-range torque sensor using different amorphous alloy materials according to the solution of the present invention, the process of preparing a multi-range torque sensor is illustrated below using several of the previous embodiments as examples.

[0088] When the amorphous alloy material in Example 1 is used to prepare a multi-range torque sensor, the preparation method of the elastomer is as follows:

[0089] First, a specific component with good forming ability and excellent mechanical properties in the zirconium-cobalt-copper-niobium-aluminum amorphous alloy system, Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy, was selected, and a cylindrical rod with a diameter of 10 mm and a length of 160 mm was prepared by die casting technology and rapid cooling technology. The Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy in the embodiment of the present invention has a yield strength of 1880 MPa, a Young's modulus of 87.3 GPa, a Poisson's ratio of 0.377, and a density of 6.7 g·cm -3 . refer to Figure 1 , the connection end 1 is connected with a flat key, which has the advantages of simple structure, convenient assembly and disassembly, good centering, and can ensure the stable and reliable connection between the rotating shaft and the transmission parts during operation; the sleeve 2 is matched with the housing through the bearing, which is used for positioning and rotating the elastomer 3. According to the above material properties and the requirement that the full-scale sensitivity of the sensor is below 2 mV / V, the structure and specific size of the elastomer are determined by combining finite element analysis, and the amorphous alloy elastomer 3 is obtained after machining. The Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy elastomer obtained by this preparation method does not require annealing or other heat treatment methods to improve the strength, hardness and other properties. The mechanical properties of the amorphous alloy elastomer 3 prepared after machining are consistent with the raw material Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy cylindrical rod.

[0090] Secondly, refer to Figure 2 , four V-shaped resistance strain gauges 6 for measuring the torque direction are pasted on the specific surface of the Zr56.88Co8Cu15.12Nb15Al5 amorphous alloy elastomer 3 prepared above, and a Wheatstone bridge circuit structure is constructed through the signal line 61. The rotating shaft sleeve end 2 is fixed to the housing 4 through the bearing 21. When the multi-range dynamic torque is working, the resistance value of the resistance strain gauge 6 changes linearly with the stress, the Wheatstone bridge composed of it is unbalanced, and the generated electrical signal is transmitted to the signal processing module 62 for a series of processing such as filtering, amplification, and conditioning. The processed analog signal is transmitted to the circuit board 63 for a series of processing such as compensation and amplification to be converted into a standard signal, and finally outputted from the interface 5.

[0091] Finally, the standard calibration equipment is used to apply torque to the multi-range torque sensor with a fixed step length until the full scale, and then the torque is unloaded with the same step length. The above steps are repeated three times, and the sensor output signal under each load is recorded. In addition, the multi-range torque sensor is applied with reverse torque in the same steps to evaluate the measurement accuracy of the multi-range torque sensor in both positive and negative directions. The test results are shown in Table 2. After calculation, the sensitivity of the sensor is -1.5 mV / V, the linearity is less than 0.15% FS, the repeatability is less than 0.1% FS, the hysteresis is less than 0.1% FS, and the return to zero is less than 0.15% FS under the excitation voltage of 10 V, positive and negative bidirectional, and full-scale torque of 10 N·m.

[0092] Table 2

[0093]

[0094] According to the performance of the above-mentioned calibration measurement, the multi-range torque sensor of the present invention is not only suitable for ranges below 10 N·m, but also does not lose accuracy in multi-range use. In contrast, the multi-range torque sensor of the same specification on the market has a sensitivity of only -0.9 mV / V at the 10 N·m range, and a measurement signal of only 0.3 mV at the 1 N·m range. The signal linearity is poor and it is difficult to meet the needs of multi-range applications. Therefore, the sensor in this example provides high signal response within a small range by virtue of its excellent linearity, repeatability and hysteresis, as well as multiple calibration measurement data with high consistency, which is significantly better than the existing sensors of the same type on the market.

[0095] When the amorphous alloy material in Example 4 is used to prepare a multi-range torque sensor, the preparation method of the elastomer is as follows:

[0096] First, we selected the specific component with good forming ability and excellent mechanical properties in the zirconium-cobalt-copper-niobium-titanium amorphous alloy system, namely Zr50Co15Cu11Nb17Ti7 amorphous alloy, and prepared cylindrical bars with a diameter of 48 mm and a length of 328 mm by die casting and rapid cooling technology. The Zr50Co15Cu11Nb17Ti7 amorphous alloy in this example has a yield strength of 1800 MPa, a Young's modulus of 94.9 GPa, a Poisson's ratio of 0.352, and a density of 6.12 g·cm -3 . refer to Figure 1, the connection end 1 is connected with a flat key, which has the advantages of simple structure, convenient assembly and disassembly, good centering, and can ensure the stable and reliable connection between the rotating shaft and the transmission parts during operation; the sleeve 2 is matched with the housing through the bearing, which is used for positioning and rotating the elastomer 3. According to the above material properties and the requirement that the full-scale sensitivity of the sensor is below 3 mV / V, the structure and specific size of the elastomer are determined by combining finite element analysis, and the amorphous alloy elastomer 3 is obtained after machining. The Zr50Co15Cu11Nb17Ti7 amorphous alloy elastomer obtained by this preparation method does not require annealing or other heat treatment methods to improve the strength, hardness and other properties. The mechanical properties of the amorphous alloy elastomer 3 prepared after machining are consistent with the raw material Zr50Co15Cu11Nb17Ti7 amorphous alloy cylindrical rod.

[0097] Secondly, refer to Figure 2 , four V-shaped resistance strain gauges 6 for measuring the torque direction are pasted on the specific surface of the Zr50Co15Cu11Nb17Ti7 amorphous alloy elastomer 3 prepared above, and a Wheatstone bridge circuit structure is constructed through the signal line 61. The rotating shaft sleeve end 2 is fixed to the housing 4 through the bearing 21. When the multi-range dynamic torque is working, the resistance value of the resistance strain gauge 6 changes linearly with the stress, the Wheatstone bridge composed of it is unbalanced, and the generated electrical signal is transmitted to the signal processing module 62 for a series of processing such as filtering, amplification, and conditioning. The processed analog signal is transmitted to the circuit board 63 for a series of processing such as compensation and amplification to be converted into a standard signal, and finally outputted from the interface 5.

[0098] Finally, the standard calibration equipment is used to apply torque to the multi-range torque sensor with a fixed step length until the full scale, and then the torque is unloaded with the same step length. The above steps are repeated three times, and the sensor output signal under each load is recorded. In addition, the multi-range torque sensor is applied with reverse torque in the same steps to evaluate the measurement accuracy of the multi-range torque sensor in both positive and negative directions. The test results are shown in Table 3. According to calculations, the sensitivity of the sensor is 2.2 mV / V, the linearity is less than 0.05% FS, the repeatability is less than 0.1% FS, and the hysteresis is less than 0.1% FS under the excitation voltage of 12 V, positive and negative bidirectional, and full-scale torque of 4000 N·m.

[0099] According to the performance of the above calibration measurements, the multi-range torque sensor in this example can reach 2.2 mV / V at a range of 4000 N·m, while the multi-range torque sensors of the same specifications on the market can only reach a maximum range of 1000 N·m and a sensitivity of 1.0 mV / V. It is worth noting that in order to achieve a range of 4000 N·m, the existing technology relies on a rotating shaft design of at least 75 mm diameter and 396 mm length. In comparison, the sensor in this example not only breaks through the limitations of range and sensitivity, but also realizes the miniaturization of the equipment, thereby providing an optimized solution that combines high load capacity, high measurement sensitivity and compact size.

[0100] In addition, the multi-range torque sensor of zirconium-cobalt-copper-niobium-titanium amorphous alloy of this example was calibrated and tested at 0-100 N·m, 100-400 N·m, 800-1200 N·m, and 2000-3200 N·m, and all achieved an accuracy of 0.1% FS. Therefore, the multi-range torque sensor of this example can be used in multiple ranges without losing accuracy.

[0101] In order to better understand the performance test of the multi-range torque sensor of the present invention, it is described in detail below with reference to a figure.

[0102] like Figure 7 As shown, it shows a schematic diagram of a multi-range torque sensor performance test device of the present invention. Figure 7 As shown, the calibration test process is as follows: Through the standard calibration test, the static performance of the sensitivity, linearity, repeatability, hysteresis, zero output, overload range, and creep characteristics of the multi-range sensor in each range can be obtained. The connecting end of the multi-range torque sensor is connected to the motor 7 through the coupling 8, and the output signal of the sensor at each speed is output to the display instrument 9 through the interface 5. Under no-load conditions, the motor speed is increased gradually, and it runs at a speed of 1000rpm / 3000rpm / 6000rpm for 30 minutes under no-load conditions, and the output signal of the display instrument 9 is recorded to ensure that the output accuracy in the entire working range is within 0.5%FS, and the safe speed range of the multi-range torque sensor is obtained. If there is no deformation of the rotating shaft, the safe speed range of the multi-range torque sensor is 6000rpm.

[0103] Table 3

[0104]

[0105] Compared with the prior art, the multi-range torque sensor of the present invention can have but is not limited to the following beneficial results:

[0106] 1. The rotating shaft of the multi-range torque sensor of the present invention is made of a new type of amorphous alloy material. Compared with traditional elastomeric materials, it shows significant improvements in mechanical properties: the yield strength of the new alloy is significantly improved, while the Young's modulus is significantly reduced, and it has a lighter weight characteristic. Thanks to this, the prepared rotating shaft improves the response performance while maintaining high strength, the sensitivity can be significantly improved, and the total volume is greatly reduced, achieving the dual goals of compact structure and performance enhancement. The problem of the difficulty in reconciling the sensitivity and stiffness of the multi-range torque sensor has been successfully solved. There is no need to design a complicated structure for the existing sensor, but the isotropy and unique microstructure of the amorphous alloy are utilized to make the sensor more accurate in the multi-range mode.

[0107] 2. The amorphous alloy rotating shaft of the present invention has unique machinability characteristics, and can realize high-precision mass production of elastomers through special processing technologies such as die casting, blow molding, and casting. This preparation technology not only ensures the processing accuracy of the elastomer, but also greatly reduces the production cost and production cycle, which is a unique advantage of amorphous alloys.

[0108] 3. The multi-range torque sensor technology proposed in the present invention breaks through the traditional single-range limitation and realizes continuous and accurate measurement within a wide torque measurement range, effectively avoiding the tedious operation of frequently replacing or superimposing multiple sensors when facing different range requirements in the past.

[0109] 4. The multi-range torque sensor of the present invention has a wide range coverage and significant range scalability. It can seamlessly adapt to torque measurement tasks of various amplitudes from low to high within the same sensing unit, greatly improving the flexibility and practicality of the torque measurement system.

[0110] 5. The multi-range torque sensor of the present invention has high sensitivity and resolution, can quickly and accurately capture extremely subtle torque changes, and presents high-resolution measurement output characteristics.

[0111] 6. The multi-range torque sensor of the present invention maintains high precision throughout the entire range, ensuring that the torque sensor can achieve high-precision measurement standards within the entire range and demonstrate excellent consistency and reliability.

[0112] 7. The multi-range torque sensor of the present invention has long-term stability and can maintain stable measurement performance after long-term, complex or even extreme cyclic loading, reflecting excellent durability and environmental adaptability.

[0113] Although the present invention has been described to a certain extent, it is obvious that appropriate changes in various conditions can be made without departing from the spirit and scope of the present invention. It will be understood that the present invention is not limited to the embodiments described, but falls within the scope of the claims, which include equivalent replacements for each of the factors described. The embodiments of the present invention have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Without departing from the scope and spirit of the described embodiments, many modifications and changes are obvious to those of ordinary skill in the art. The choice of terms used herein is intended to best explain the principles of the embodiments, practical applications, or technical improvements in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. An amorphous alloy rotating shaft, characterized in that: The rotating shaft comprises: The elastic body is cylindrical and undergoes torsion deformation under the force of the transmission device; a strain zone is provided in the middle of the elastic body, and the strain zone undergoes torsion deformation under the force of the transmission device; A connecting end, used to connect the rotating shaft and the transmission equipment; A bushing, used to fix the rotating shaft; Among them, the elastomer, the connecting end and the sleeve are all made of amorphous alloy materials. The amorphous alloy material includes Zr, Co, Cu, Nb, Al or Ti or Fe, wherein when Al or Ti is used, the atomic composition percentage thereof is 0%-8%; when Fe is used, the atomic composition percentage thereof is 0%-5%.

2. The amorphous alloy rotating shaft according to claim 1, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr:Co:Cu:Nb:Al=(45-57):(8-18):(6-18:(6-17):(0-8).

3. The amorphous alloy rotating shaft according to claim 2, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr 56.88%, Co 8%, Cu 15.12%, Nb 15%, Al 5%; or, Zr 47.25%, Co 15.75%, Cu 16.75%, Nb 16.25%, Al 4%.

4. The amorphous alloy rotating shaft according to claim 1, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr:Co:Cu:Nb:Ti=(45-58):(8-18):(6-18):(6-19):(0-8).

5. The amorphous alloy rotating shaft according to claim 4, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr 57%, Co 16%, Cu 12%, Nb 12%, Ti 3%; or, Zr 50%, Co 15%, Cu 11%, Nb 17%, Ti 7%.

6. The amorphous alloy rotating shaft according to claim 1, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr:Co:Cu:Nb:Fe=(45-58):(8-18):(6-18):(6-19):(0-5).

7. The amorphous alloy rotating shaft according to claim 6, characterized in that: The components of the amorphous alloy material and the atomic composition percentage of each component are: Zr 56%, Co 12%, Cu 14%, Nb 15%, Fe 3%; or, Zr 58%, Co 10%, Cu 16%, Nb 14%, Fe 2%.

8. The amorphous alloy rotating shaft according to any one of claims 1 to 7, characterized in that: The Young's modulus of the elastomer is 80 GPa-100 GPa; the yield strength of the elastomer is 1600 MPa-2400 MPa; and the sensitivity of the elastomer is 1 mV / N·m-1.8 mV / N·m.

9. A multi-range torque sensor, characterized in that: The sensor comprises: The amorphous alloy rotating shaft, a plurality of resistance strain gauges, a housing, a signal processing module, and an external interface according to any one of claims 1 to 8, wherein: The plurality of resistance strain gauges are installed in the strain region of the amorphous alloy rotating shaft to generate electrical signals according to the torsional deformation of the amorphous alloy rotating shaft and transmit the electrical signals to the signal processing module; The housing is used to fix the amorphous alloy rotating shaft; The signal processing module is used to process the signal transmitted by the resistance strain gauge to obtain the torque of the amorphous alloy rotating shaft; The external interface is used to transmit the amorphous alloy rotating shaft torque data obtained by the signal processing module to the outside for display.

10. The torque sensor according to claim 9, characterized in that: The amorphous alloy rotating shaft has a diameter of 38 mm and a length of 328 mm.

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