A spin coating chamber device with a synchronous shadow mask lift function in a spin coating process

Abstract

The application discloses a spin coating chamber device with synchronous cover lifting function in a spin coating process, which comprises a rotating disc and a synchronous cover. A metal ring is inlaid on the bottom surface of the synchronous cover, and electromagnets are uniformly fixed on the bottom surface of the synchronous cover along the circumference. The electromagnets can reduce the attraction force in the rotating process, and at this time, the synchronous cover and the rotating disc can be separated in the rotating process through the upward movement of the linear module, the chamber is opened, and then the solution volatilization speed is improved, and the rotation stop is not needed to wait. The centrifugal force exists in the rotating process, at this time, the solution volatilization and solidification speed is improved, which is helpful to avoid the fluid backflow of the substrate edge, reduce the edge effect influence area, and improve the utilization rate of the substrate. After the chamber is opened, the permanent magnet can generate an induced current in the metal ring, the induced current generates a torque between the synchronous cover and the rotating disc, the rotating disc speed fluctuation can be avoided, the rotating stability is high, and the film uniformity is helpful to be maintained.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of wet film forming equipment, in particular to a spin coating chamber device with synchronous cover lifting function in spin coating process. BACKGROUND

[0002] Spin coating technology is a common technology in the field of wet film forming. In the spin coating process, the solution on the substrate gradually thins to the target film thickness under the action of centrifugal force. After the rotation stops, a circle of film thickness is formed on the edge of the substrate due to the accumulation of fluid retraction, which is called edge effect. The area affected by the edge effect on the substrate cannot be used due to the thick film thickness, which reduces the utilization rate of the substrate and increases the manufacturing cost.

[0003] In the spin coating process, a synchronous cover and a turntable can be used to form a closed spin coating chamber to reduce air flow disturbance and improve film uniformity. For volatile solutions such as photoresist, after the spin coating film reaches the target film thickness, the synchronous cover is lifted to open the spin coating chamber during rotation, which can accelerate the volatilization of the solution before the centrifugal force disappears completely and the viscosity increases rapidly, which helps to reduce the solution backflow and reduce the area affected by the edge effect on the substrate.

[0004] In the spin coating process, the synchronous cover and the turntable that make up the chamber rotate as a whole. If the chamber is opened, the moment of inertia of the turntable will change suddenly due to the separation of the synchronous cover and the turntable, resulting in rotation speed fluctuations, which is not conducive to maintaining the uniformity of film formation. In order to reduce the negative impact of liquid film fluctuation caused by rotation speed fluctuation at the moment of chamber opening, a spin coating chamber is needed that does not have a sudden change in the moment of inertia of the turntable when the synchronous cover is lifted.

[0005] In the current published patents related to spin coating chambers, the synchronous cover can be lifted in the designs disclosed in Chinese patents CN214021741U and CN219073451U. Among them, the synchronous cover of the former realizes synchronous rotation with the glue coating cavity through the action of friction or positioning lock, and the latter only mentions that the synchronous cover can rotate synchronously with the bearing table, without mentioning the connection method. If the synchronous cover and the rotating disc are connected through positioning lock, the positioning lock must be opened after the rotation stops to open the chamber, which cannot be opened during rotation. If the synchronous cover and the rotating disc are only connected through friction, on the one hand, in order to generate sufficient friction, the synchronous cover needs to be pressurized or the weight of the synchronous cover needs to be increased, and on the other hand, when the synchronous cover is opened during rotation, the rotational inertia of the shaft system changes suddenly because the synchronous cover and the rotating disc are separated at the moment, and the rotating speed of the rotating disc fluctuates, which may cause the uniformity of the spin coating film to decrease. In the glue uniformizing device disclosed in Chinese patent CN118444531A, the cover plate and the cavity form a closed space, and the cover plate includes a ring-shaped scale that can move up and down, but the ring-shaped scale can only adjust the height and cannot open the chamber. Therefore, a spin coating chamber that can be opened during the spin coating process is needed, and when the chamber is opened, the lifting of the synchronous cover will not cause the sudden change of the rotational inertia of the rotating disc. SUMMARY

[0006] To solve the above problems existing in the prior art, the present application designs a spin coating chamber device with synchronous cover lifting function during spin coating process, which can realize synchronous cover lifting during spin coating process and does not cause sudden change of rotational inertia of rotating disc.

[0007] In order to achieve the above-mentioned purpose, the technical scheme of the present application is as follows: a spin coating chamber device with synchronous cover lifting function during spin coating process, comprising a rotating disc and a synchronous cover. A sealing groove is provided on the upper surface of the rotating disc, and a sealing ring is installed in the sealing groove;

[0008] A metal ring is embedded on the bottom surface of the synchronous cover, and the inner diameter of the metal ring is larger than the outer diameter of the sealing ring; permanent magnets are embedded on the upper surface of the rotating disc along the circumference and do not contact each other, and the polarity of adjacent permanent magnets is opposite, and the average value of the inner diameter and the outer diameter of the circular ring formed by the permanent magnets is the same as the average value of the inner diameter and the outer diameter of the metal ring;

[0009] Electromagnets are uniformly fixed on the bottom surface of the synchronous cover along the circumference, and the inner diameter of the circular ring formed by the electromagnets is larger than the outer diameter of the sealing ring;

[0010] Conductive magnetic material blocks are uniformly embedded on the surface of the rotating disc along the circumference, and the number of conductive magnetic material blocks is the same as the number of electromagnets, and the positions of the conductive magnetic material blocks correspond to the positions of the electromagnets;

[0011] The rotating disc is connected to the rotating disc shaft system bearing seat through the rotating disc shaft system, and the rotating disc shaft system bearing seat is fixed on the spin coating machine base;

[0012] The synchronous cover is connected to a synchronous cover shaft bearing seat through a synchronous cover shaft system, the synchronous cover shaft bearing seat is fixed on a lifting device moving in a vertical direction, the lifting device is fixed on a support, and the support is fixed on a spin coater base;

[0013] The closing step of the spin coating chamber device is as follows:

[0014] A1, the lifting device moves downward to contact the synchronous cover bottom surface with the rotating disc surface;

[0015] A2, the electromagnet is powered on;

[0016] The opening step of the spin coating chamber device is as follows:

[0017] B1, gradually reduce the electromagnet current;

[0018] B2, the lifting device moves upward.

[0019] Further, the number of electromagnets is 6-10.

[0020] Further, the installation positions of the electromagnets and the magnetic conductive material blocks are interchanged, that is, the electromagnets are fixed on the rotating disc surface, and the magnetic conductive material blocks are inlaid on the synchronous cover bottom surface.

[0021] Further, the installation positions of the permanent magnets and the metal rings are interchanged, that is, the permanent magnets are inlaid on the synchronous cover bottom surface, and the metal rings are inlaid on the rotating disc surface.

[0022] Further, the material of the metal ring is copper or aluminum.

[0023] Compared with the prior art, the present application has at least the following beneficial effects:

[0024] 1, when the electromagnet is powered on, the suction force between the electromagnet and the magnetic conductive material block makes the synchronous cover and the rotating disc form a whole synchronous rotation, which can improve the uniformity of spin coating film as a closed chamber; the electromagnet can reduce the suction force during rotation, at this time, through the upward movement of the linear module, the synchronous cover and the rotating disc can be separated during rotation to realize the opening of the chamber, thereby improving the evaporation speed of the solution without waiting for the rotation to stop. There is a centrifugal force during rotation, which can improve the evaporation and solidification speed of the solution, help to avoid the backflow of fluid at the edge of the substrate, reduce the edge effect area, and improve the utilization rate of the substrate.

[0025] 2, after the chamber is opened, the permanent magnet can generate an induced current in the metal ring, and the induced current can generate a torque between the synchronous cover and the rotating disc. The torque drives the synchronous cover to rotate, and at the same time acts as a load of the rotating disc, so that the moment of inertia of the rotating disc does not change suddenly when the synchronous cover is separated, which can avoid the speed fluctuation of the rotating disc and has high rotation stability, which helps to maintain the uniformity of film formation. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of the chamber in this invention when it is open.

[0027] Figure 2 This is a schematic diagram of the chamber structure when the chamber is closed in this invention.

[0028] Figure 3 It is a cross-sectional view of the chamber when it is closed.

[0029] Figure 4 This is a front view of the top surface of the turntable.

[0030] Figure 5 This is a front view of the bottom surface of the synchronization cover.

[0031] In the diagram: 1. Spin coater base, 2. Turntable, 3. Synchronous cover, 4. Synchronous cover shaft system, 5. Synchronous cover shaft system bearing seat, 6. Lifting device, 7. Support, 8. Turntable shaft system, 9. Turntable shaft system bearing seat, 21. Sealing ring, 22. Magnetic material block, 23. Permanent magnet, 31. Electromagnet, 32. Metal ring. Detailed Implementation

[0032] The invention will now be further described with reference to the accompanying drawings. Figures 1-5 As shown, a spin coating chamber device with a synchronous cover lifting function during spin coating includes a turntable 2 and a synchronous cover 3; a sealing groove is provided on the upper surface of the turntable 2, and a sealing ring 21 is installed in the sealing groove;

[0033] The bottom surface of the synchronization cover 3 is inlaid with a metal ring 32, the inner diameter of the metal ring 32 is larger than the outer diameter of the sealing ring 21; the upper surface of the turntable 2 is inlaid with non-contact permanent magnets 23 along the circumference, and the polarities of adjacent permanent magnets 23 are opposite. The average value of the inner and outer diameters of the ring formed by the permanent magnets 23 is the same as the average value of the inner and outer diameters of the metal ring 32.

[0034] Electromagnets 31 are uniformly fixed along the circumference on the bottom surface of the synchronization cover 3, and the inner diameter of the ring formed by the electromagnets 31 is larger than the outer diameter of the sealing ring 21.

[0035] The magnetic material blocks 22 are uniformly embedded along the circumference on the surface of the turntable 2. The number of magnetic material blocks 22 is the same as the number of electromagnets 31, and their positions correspond to the positions of the electromagnets 31.

[0036] The turntable 2 is connected to the turntable shaft bearing seat 9 via the turntable shaft system 8, and the turntable shaft bearing seat 9 is fixed to the spin coater base 1;

[0037] The synchronous cover 3 is connected to the synchronous cover shaft bearing seat 5 through the synchronous cover shaft system 4, the synchronous cover shaft bearing seat 5 is fixed on the lifting device 6 moving in the vertical direction, the lifting device 6 is fixed on the support 7, and the support 7 is fixed on the spin coater base 1;

[0038] The steps of closing the spin coating chamber device are as follows:

[0039] A1, the lifting device 6 moves downward to the bottom surface of the synchronous cover 3 being in contact with the surface of the rotating disc 2;

[0040] A2, the electromagnet 31 is powered on;

[0041] The steps of opening the spin coating chamber device are as follows:

[0042] B1, gradually reducing the current of the electromagnet 31;

[0043] B2, the lifting device 6 moves upward.

[0044] Further, the number of the electromagnet 31 is 6-10.

[0045] Further, the installation positions of the electromagnet 31 and the magnetic conductive material block 22 are interchanged, that is, the electromagnet 31 is fixed on the surface of the rotating disc 2, and the magnetic conductive material block 22 is inlaid on the bottom surface of the synchronous cover 3.

[0046] Further, the installation positions of the permanent magnet 23 and the metal ring 32 are interchanged, that is, the permanent magnet 23 is inlaid on the bottom surface of the synchronous cover 3, and the metal ring 32 is inlaid on the surface of the rotating disc 2.

[0047] Further, the material of the metal ring 32 is copper or aluminum.

[0048] The present application is not limited to the present embodiment, and any equivalent concept or change within the technical scope disclosed in the present application is included in the protection scope of the present application.

Claims

1. A spin coating chamber apparatus having a synchronous shield lift function in a spin coating process, characterized by: The application relates to a rotary disc (2) and a synchronous cover (3); a sealing groove is arranged on the upper surface of the rotary disc (2), and a sealing ring (21) is arranged in the sealing groove; A metal ring (32) is inlaid on the bottom surface of the synchronous cover (3), the inner diameter of the metal ring (32) is larger than the outer diameter of the sealing ring (21); permanent magnets (23) are inlaid on the upper surface of the rotary disc (2) and are not in contact with each other, the polarity of adjacent permanent magnets (23) is opposite, and the average value of the inner diameter and the outer diameter of a circular ring formed by the permanent magnets (23) is the same as the average value of the inner diameter and the outer diameter of the metal ring (32); Electromagnets (31) are uniformly fixed on the bottom surface of the synchronous cover (3) along the circumference, and the inner diameter of a circular ring formed by the electromagnets (31) is larger than the outer diameter of the sealing ring (21); Magnetic conductive material blocks (22) are uniformly inlaid on the surface of the rotary disc (2) along the circumference, the number of the magnetic conductive material blocks (22) is the same as that of the electromagnets (31), and the positions of the magnetic conductive material blocks (22) correspond to those of the electromagnets (31); The rotary disc (2) is connected to a rotary disc shaft system bearing seat (9) through a rotary disc shaft system (8), and the rotary disc shaft system bearing seat (9) is fixed on a spin coater base (1); The synchronous cover (3) is connected to a synchronous cover shaft system bearing seat (5) through a synchronous cover shaft system (4), the synchronous cover shaft system bearing seat (5) is fixed on a lifting device (6) moving in the vertical direction, the lifting device (6) is fixed on a support (7), and the support (7) is fixed on the spin coater base (1); The steps of closing the spin coating cavity device are as follows: A1. The lifting device (6) moves downwards until the bottom surface of the synchronous cover (3) is in contact with the surface of the rotary disc (2); A2. The electromagnets (31) are powered on; The steps of opening the spin coating cavity device are as follows: B1. The current of the electromagnets (31) is gradually reduced; B2. The lifting device (6) moves upwards.

2. The spin chamber device with the function of synchronous lift of the mask in the spin process according to claim 1, wherein: The number of the electromagnets (31) is 6-10.

3. The spin chamber apparatus with a synchronous lift function in a spin process according to claim 1, wherein: The installation positions of the electromagnets (31) and the magnetic conductive material blocks (22) are interchanged, that is, the electromagnets (31) are fixed on the surface of the rotary disc (2), and the magnetic conductive material blocks (22) are inlaid on the bottom surface of the synchronous cover (3).

4. The spin chamber apparatus with a synchronous lift function in a spin process according to claim 1, wherein: The installation positions of the permanent magnets (23) and the metal ring (32) are interchanged, that is, the permanent magnets (23) are inlaid on the bottom surface of the synchronous cover (3), and the metal ring (32) is inlaid on the surface of the rotary disc (2).

5. The spin chamber apparatus with a synchronous lift function in a spin process according to claim 1, wherein: The material of the metal ring (32) is copper or aluminum.

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