Evaporation coating device

Abstract

The invention discloses an evaporation coating device which comprises a reaction container with a vacuum cavity, a coating device and a coating device, the reaction container is internally provided with a support used for bearing a substrate, and the support is arranged close to the top of the vacuum cavity; a light-transmitting plate is hermetically arranged on the top wall of the reaction container, and a mounting hole is formed in the side wall of the reaction container; the light source assembly is arranged above the reaction container and comprises a halogen lamp and a first lens; the halogen lamp, the first lens and the light-transmitting plate are sequentially arranged from top to bottom in the first direction; the lighting assembly is arranged in the vacuum cavity and is positioned below the bracket; the lighting assembly comprises a prism, a second lens and an optical fiber, the prism, the second lens and the optical fiber are sequentially arranged in the second direction, and the optical fiber is close to the side wall of the reaction container; the optical fiber extends out of the vacuum cavity through the mounting hole and is hermetically connected with the mounting hole; the second direction is parallel to the coating surface of the substrate; the spectrograph is arranged outside the reaction container and is connected with one end, far away from the second lens, of the optical fiber.

Description

Technical Field

[0001] The present invention relates to the technical field of evaporation coating, and in particular to an evaporation coating device. Background Art

[0002] Evaporation coating is often called vacuum coating. It is one of the methods of physical vapor deposition. Its characteristic is that under vacuum conditions, the material evaporates and condenses into a film on the glass surface. The principle is to sublimate or sputter the film material through thermal evaporation or ion beam bombardment of the film material, and then shoot it toward the substrate in a vacuum environment, and finally deposit it on the substrate surface to form a solid film. The spectral characteristics of the film are determined by the thickness and refractive index of the film. There are two main ways to control the thickness of the film: quartz crystal oscillator monitoring and optical monitoring. The quartz crystal oscillator monitoring method is based on the detection of the vibration frequency of the crystal oscillator, and the relationship between the thickness and the frequency is calculated to control the current thickness; the optical monitoring method is to directly measure the optical properties of the film system. According to the measurement method, it is divided into direct light control and indirect light control, and according to the test wavelength, it is divided into white light control and laser light control.

[0003] At present, optical monitoring has higher control accuracy than other methods. Because the product is directly detected, direct light control is more direct than indirect light control. Existing direct light control systems generally only have white light control or laser light control. During the processing and preparation process, the monitoring wavelength is relatively single. Under some special light intensity conditions, the thickness accuracy achieved by the existing light control algorithm is relatively low, resulting in continuous accumulation of processing errors and the inability to achieve high-precision film thickness control. Summary of the invention

[0004] The inventors have found that the evaporation coating process consists of materials with different refractive indices being deposited layer by layer on a substrate in sequence. For example, a material with a first refractive index is deposited on a substrate in a first layer with a target thickness (e.g., 100 nm), and a material with a second refractive index is deposited on the first layer in a second layer with a target thickness (e.g., 100 nm), and so on and so forth, layer by layer, until hundreds or even thousands of layers are deposited. Film thickness detection in the prior art includes collecting the light transmittance of a light signal through a film by a signal receiver, and calculating the optical thickness of the film by the light transmittance. The monitoring wavelength in the prior art is relatively single, and in some special light intensity conditions, the thickness accuracy achieved by the existing light control algorithm is relatively low, resulting in continuous accumulation of processing errors and the inability to achieve high-precision film thickness control.

[0005] In view of the deficiencies in the prior art, one object of this specification is to provide an evaporation coating device that can improve the film thickness measurement accuracy and achieve high-precision film thickness control.

[0006] To achieve the above-mentioned purpose, the embodiment of this specification provides an evaporation coating device, comprising: A reaction container with a vacuum chamber, wherein a support for carrying a substrate is provided in the reaction container, and the support is arranged near the top of the vacuum chamber; a light-transmitting plate is sealed on the top wall of the reaction container, and a mounting hole is provided on the side wall of the reaction container; A light source assembly installed above the reaction container comprises a halogen lamp and a first lens; the halogen lamp, the first lens and the light-transmitting plate are arranged in sequence from top to bottom in a first direction; the first direction is perpendicular to the coating surface of the substrate placed on the bracket; A light-collecting component is installed in the vacuum chamber, and the light-collecting component is located below the bracket; the light-collecting component includes a prism, a second lens, and an optical fiber, and the prism, the second lens, and the optical fiber are arranged in sequence in the second direction, and the optical fiber is arranged close to the side wall of the reaction container; the optical fiber extends out of the vacuum chamber through the mounting hole, and the optical fiber and the mounting hole are sealed and connected; the second direction is parallel to the coating surface of the substrate; the light emitted by the halogen lamp is converged into parallel light by the first lens, passes through the substrate vertically, and then is reflected by the prism and converged into the optical fiber through the second lens; A spectrometer is arranged outside the reaction container, and the spectrometer is connected to an end of the optical fiber away from the second lens.

[0007] As a preferred implementation, the light source assembly further includes: A first mounting plate arranged horizontally and fixedly connected to the top wall of the reaction container; the first mounting plate is provided with a first through hole; A second mounting plate disposed vertically, wherein the bottom end of the second mounting plate is fixedly connected to the upper surface of the first mounting plate; a third mounting plate arranged vertically, the third mounting plate being connected to the second mounting plate, the halogen lamp being mounted on the third mounting plate; the position of the third mounting plate relative to the second mounting plate in the first direction being adjustable; A fourth mounting plate is arranged horizontally, the fourth mounting plate is fixedly connected to the upper surface of the first mounting plate, a lens barrel is fixedly provided on the fourth mounting plate, and the opening of the lens barrel is arranged toward the halogen lamp; the third mounting plate is provided with a second through hole; the first lens is installed in the lens barrel, the halogen lamp, the first lens, the second through hole, the first through hole and the light-transmitting plate are arranged in sequence in the first direction; the size of the first through hole is larger than the size of the second through hole.

[0008] As a preferred embodiment, the halogen lamp is fixedly connected to the third mounting plate via a first mounting bracket, and the first mounting bracket and the third mounting plate are fixedly connected via a plurality of first fasteners; the plurality of first fasteners are spaced apart along the first direction; and the length of the fixing portion of the first fastener is adjustable.

[0009] As a preferred implementation, the angle adjustment range between the halogen lamp and the second mounting plate is 10°.

[0010] As a preferred embodiment, the position of the second mounting plate relative to the first mounting plate in a third direction is adjustable, and the third direction is parallel to the horizontal plane; the position of the third mounting plate relative to the first mounting plate in the third direction is adjustable.

[0011] As a preferred embodiment, a plurality of adjusting members are provided at intervals on the circumference of the lens barrel, the adjusting members fix the first lens in the lens barrel, and the position of the adjusting members relative to the lens barrel in the first direction is adjustable.

[0012] As a preferred embodiment, the evaporation coating device further includes: a fan assembly fixedly arranged on the top wall of the reaction container, the fan assembly being arranged toward the halogen lamp and being used for dissipating heat from the halogen lamp; A baffle is fixedly arranged on the top wall of the reaction container, and the baffle surrounds the light source assembly.

[0013] As a preferred embodiment, the lighting assembly further includes: a fifth mounting plate disposed vertically and fixedly connected to a side wall of the reaction container; A second mounting frame located in the vacuum chamber, the second mounting frame being fixedly connected to the fifth mounting plate; the second mounting frame having a connected working portion and a connecting portion, the working portion being arranged opposite to the bracket, and the connecting portion being fixedly connected between the working portion and the fifth mounting plate; A housing portion, the housing portion is disposed around the prism, the second lens and the optical fiber and integrates the prism, the second lens and the optical fiber into one body; A sixth mounting plate adjustably fixedly connects the shell portion and the working portion, wherein the sixth mounting plate is fixedly connected to the shell portion, and the sixth mounting plate is fixedly connected to the working portion via a plurality of second fasteners, wherein the length of the fixing portion of the second fasteners is adjustable.

[0014] As a preferred implementation, the angle adjustment range of the prism relative to the working part is 5°.

[0015] As a preferred embodiment, the evaporation coating device also includes a detector, an acquisition card and a computer arranged outside the reaction container; the detector is connected to the spectrometer for collecting light quantity signals; the acquisition card is connected to the detector for receiving photoelectric signals from the detector; the computer is connected to the acquisition card for analyzing changes in the amount of light received by the optical fiber and calculating the specific film thickness. Beneficial Effects

[0016] The evaporation coating device provided in this embodiment is provided with a reaction container, a light source component, a lighting component and a spectrometer. The light emitted by the halogen lamp is converged into parallel light by the first lens and then passes through the substrate vertically. After being reflected by the prism, it is converged into the optical fiber by the second lens. The optical fiber collects the total reflected light to the spectrometer, and the spectrometer can adjust the collection wavelength. The light source of the present application is a halogen lamp, which is a full-spectrum light source. Any wavelength can be selected for collection through the spectrometer. For film layers of different materials or different thicknesses, different wavelengths can be selected for monitoring, thereby improving the film thickness measurement accuracy and realizing high-precision film thickness control. It can also directly monitor the film growth during the preparation of optical thin films, that is, real-time monitoring of the coating film thickness. At the same time, it can be adjusted at different coating wavelengths to obtain the desired film thickness. In addition, the positions of various components are arranged reasonably. The parallel light emitted by the light source component directly enters the vacuum chamber through the light-transmitting plate, and the optical fiber extends out of the vacuum chamber through the mounting hole, which can simplify the overall structure of the device and realize the light control function.

[0017] With reference to the following description and the accompanying drawings, the specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope thereby.

[0018] Features described and / or illustrated with respect to one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0019] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, integers, steps or components, but does not exclude the presence or addition of one or more other features, integers, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figure 1 A schematic diagram of the three-dimensional structure of an evaporation coating device provided in this embodiment; Figure 2 A schematic diagram of the three-dimensional structure of a light source assembly and a fan assembly provided in this embodiment; Figure 3is a schematic diagram of a three-dimensional structure of a light source assembly provided in this embodiment; Figure 4 for Figure 3 A schematic diagram of a three-dimensional structure from another perspective; Figure 5 A schematic diagram of the three-dimensional structure of a lighting assembly provided in this embodiment; Figure 6 This is a structural schematic diagram of a fifth mounting plate and a connecting block provided in this embodiment; Figure 7 Schematic diagram of the arrangement structure of the prism, the second lens and the optical fiber provided in this embodiment.

[0022] Description of reference numerals: 1. Reaction container; 11. Vacuum chamber; 12. Top wall; 13. Side wall; 14. Bracket; 15. Light-transmitting plate; 2. Light source assembly; 21. First mounting plate; 211. First through hole; 22. Second mounting plate; 23. Fourth mounting plate; 231. Second through hole; 24. Lens barrel; 25. Third mounting plate; 251. First threaded hole; 26. First mounting bracket; 27. First fastener; 28. Adjustment member; 29. ​​Halogen lamp; 3. Lighting assembly; 31. Prism; 311. First right-angled surface; 312. Second right-angled surface; 313. Inclined surface; 32. Second lens; 33. Optical fiber; 34. Housing; 35. Fifth mounting plate; 36. Second mounting frame; 361. Working portion; 201. Second threaded hole; 362. Connecting portion; 37. Sixth mounting plate; 38. Second fastener; 39. Connecting block; 391. Notch; 4. Fan assembly; 5. Baffle; X, first direction; Y, second direction; M, third direction; N, fourth direction; Z, vertical direction. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0024] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0026] See also Figures 1 to 7 The embodiment of the present application provides an evaporation coating device, comprising: a reaction container 1, a light source component 2, a lighting component 3 and a spectrometer (not shown).

[0027] Among them, Figure 1 As shown, the reaction vessel 1 has a vacuum chamber 11. A bracket 14 for carrying a substrate is provided in the reaction vessel 1, and the bracket 14 is arranged near the top of the vacuum chamber 11. The shape of the bracket 14 is preferably an umbrella shape. Compared with a flat plate, the umbrella-shaped bracket 14 can accommodate more substrates, thereby improving the coating efficiency. The top wall 12 of the reaction vessel 1 is sealed with a light-transmitting plate 15 for light from the light source assembly 2 to pass through. The material of the light-transmitting plate 15 can be made of high-purity silicon dioxide crystal to have good light transmittance. The side wall 13 of the reaction vessel 1 is provided with a mounting hole (not shown).

[0028] like Figure 1 and Figure 2 As shown, the light source assembly 2 is installed above the reaction container 1, and includes a halogen lamp 29 and a first lens. The halogen lamp 29, the first lens and the light-transmitting plate 15 are arranged in sequence from top to bottom in a first direction X. The first direction X is perpendicular to the coating surface of the substrate placed on the bracket 14. Since the bracket 14 is umbrella-shaped, the first direction X is not perpendicular to the horizontal plane, and the first direction X has a predetermined angle with the vertical direction Z.

[0029] like Figure 1 , Figure 5 and Figure 7As shown, the lighting assembly 3 is installed in the vacuum chamber 11, and the lighting assembly 3 is located below the bracket 14. The lighting assembly 3 includes a prism 31, a second lens 32 and an optical fiber 33. The prism 31, the second lens 32 and the optical fiber 33 are arranged in sequence in the second direction Y, and the optical fiber 33 is arranged close to the side wall 13 of the reaction container 1. The optical fiber 33 extends out of the vacuum chamber 11 through the mounting hole, and the optical fiber 33 and the mounting hole are sealed and connected. The second direction Y is parallel to the coating surface of the substrate. Since the bracket 14 is umbrella-shaped, the second direction Y is inclined, that is, the second direction has a predetermined angle with the horizontal plane. The light emitted by the halogen lamp 29 is converged into parallel light by the first lens and then passes through the substrate vertically, and then is reflected by the prism 31 and then converged into the optical fiber 33 through the second lens 32. The spectrometer is arranged outside the reaction container 1, and the spectrometer is connected to the end of the optical fiber 33 away from the second lens 32.

[0030] The evaporation coating device provided in this embodiment is provided with a reaction container 1, a light source component 2, a lighting component 3 and a spectrometer. The light emitted by the halogen lamp 29 is converged into parallel light by the first lens and then passes vertically through the substrate. After being reflected by the prism 31, it is gathered into the optical fiber 33 by the second lens 32. The optical fiber 33 collects the total reflected light to the spectrometer, and the spectrometer can adjust the collection wavelength. The light source of the present application is a halogen lamp 29, which is a full-spectrum light source. Any wavelength can be selected for collection through the spectrometer. For films of different materials or different thicknesses, different wavelengths can be selected for monitoring, thereby improving the film thickness measurement accuracy and realizing high-precision film thickness control. It can also directly monitor the film growth during the preparation of optical films, that is, real-time monitoring of the coating film thickness. At the same time, it can be adjusted at different coating wavelengths to obtain the desired film thickness. In addition, the positions of each component are arranged reasonably. The parallel light emitted by the light source component 2 directly enters the vacuum chamber 11 through the light-transmitting plate 15, and the optical fiber 33 extends out of the vacuum chamber 11 through the mounting hole, which can simplify the overall structure of the device and realize the light control function.

[0031] In this embodiment, if Figure 2 , Figure 3 and Figure 4As shown, the light source assembly 2 also includes: a first mounting plate 21, a second mounting plate 22, a third mounting plate 25 and a fourth mounting plate 23. The first mounting plate 21 and the fourth mounting plate 23 are arranged horizontally, and the second mounting plate 22 and the third mounting plate 25 are arranged vertically. The first mounting plate 21 is fixedly connected to the top wall 12 of the reaction container 1. The first mounting plate 21 is provided with a first through hole 211 for light to pass through. The bottom end of the second mounting plate 22 is fixedly connected to the upper surface of the first mounting plate 21. The third mounting plate 25 is connected to the second mounting plate 22, and the halogen lamp 29 is installed on the third mounting plate 25, and the angle between the halogen lamp 29 and the third mounting plate 25 is adjustable. The position of the third mounting plate 25 relative to the second mounting plate 22 in the first direction X is adjustable. The second mounting plate 22 can be provided with a plurality of mounting positions for mounting the third mounting plate 25 at intervals in the first direction X, so that the third mounting plate 25 can select different mounting positions for installation, thereby realizing position adjustment in the first direction X, so that the position of the halogen lamp 29 in the first direction X (i.e., the distance between the halogen lamp 29 and the substrate) can be adjusted as needed.

[0032] The fourth mounting plate 23 is fixedly connected to the upper surface of the first mounting plate 21, and a lens barrel 24 is fixedly arranged on the fourth mounting plate 23, and the opening of the lens barrel 24 is arranged toward the halogen lamp 29. The third mounting plate 25 is provided with a second through hole 231 for light to pass through. The first lens is installed in the lens barrel 24, and the halogen lamp 29, the first lens, the second through hole 231, the first through hole 211 and the light-transmitting plate 15 are arranged in sequence in the first direction X.

[0033] By setting the first mounting plate 21, the second mounting plate 22, the third mounting plate 25 and the fourth mounting plate 23, a mounting position is provided for the light source, so that the light source assembly 2 is stably and reliably mounted on the top wall 12 of the reaction vessel 1. The halogen lamp 29 is used as the light source, so that the light source can be a full-spectrum light source, so that the monitoring wavelength can be arbitrarily selected. For film layers of different materials or different thicknesses, different wavelengths can be selected for monitoring, thereby improving the thickness measurement accuracy and achieving high-precision film thickness control. In addition, the angle between the halogen lamp 29 and the third mounting plate 25 is adjustable, which can ensure that the light emitted by the halogen lamp 29 can pass vertically through the surface of the coated sample after being converged into parallel light by the lens, thereby improving the thickness measurement accuracy.

[0034] like Figure 3 and Figure 4As shown, the halogen lamp 29 is fixedly connected to the third mounting plate 25 via a first mounting bracket 26. The halogen lamp 29 is fixedly connected to the first mounting bracket 26. The first mounting bracket 26 and the third mounting plate 25 are fixedly connected via a plurality of first fasteners 27. The plurality of first fasteners 27 are spaced apart along the first direction X. The length of the fixing portion of the first fastener 27 is adjustable, so as to facilitate adjustment of the angle between the halogen lamp 29 and the second mounting plate 22.

[0035] Preferably, the first fastener 27 is provided with an external thread, and the third mounting plate 25 is provided with a first threaded hole 251 for the fastener to cooperate with. The first threaded holes 251 are arranged at intervals in the first direction X, and the number of the first threaded holes 251 is equal to the number of the first fasteners 27, which facilitates quick installation and avoids waste.

[0036] In this embodiment, the angle adjustment range between the halogen lamp 29 and the second mounting plate 22 is 10°, which avoids the waste of debugging time caused by the adjustable range being too large, and also avoids the inability of the adjustable range being too small to make the light emitted by the halogen lamp 29 converge into parallel light through the first lens and then pass vertically through the surface of the coated sample.

[0037] In a preferred embodiment, there are two first fasteners 27 , and the lengths of the two first fasteners 27 extending into the first threaded hole 251 are the same or different, so that the angle between the halogen lamp 29 and the second mounting plate 22 can be adjusted to a desired value.

[0038] In this embodiment, the position of the second mounting plate 22 relative to the first mounting plate 21 in the third direction M is adjustable, and the third direction M is parallel to the horizontal plane. Specifically, the first mounting plate 21 may be provided with a plurality of mounting positions for mounting the second mounting plate 22 at intervals in the third direction M, so that the second mounting plate 22 can be installed in different mounting positions to achieve position adjustment in the third direction M, so that the position of the halogen lamp 29 in the third direction M can be adjusted as needed.

[0039] In addition, the position of the third mounting plate 25 relative to the first mounting plate 21 in the third direction M is adjustable. Specifically, the first mounting plate 21 may be provided with a plurality of mounting positions for mounting the third mounting plate 25 at intervals in the third direction M, so that the third mounting plate 25 can be installed in different mounting positions to achieve position adjustment in the third direction M, so that the position of the first lens in the third direction M can be adjusted as needed.

[0040] like Figure 2 and Figure 3As shown, a plurality of adjusting members 28 are provided at intervals in the circumferential direction of the lens barrel 24, and the adjusting members 28 fix the first lens in the lens barrel 24. The position of the adjusting member 28 relative to the lens barrel 24 in the first direction X is adjustable, so that the position of the first lens in the first direction X can be adjusted as needed. The lens barrel 24 can be provided with a plurality of through holes in the axial direction for the adjusting members 28 to pass through, and the positions of the plurality of adjusting members 28 in the axial direction can be the same or different, so that the angle of the lens can be adjusted. The axial direction of the lens barrel 24 is parallel to the first direction X.

[0041] like Figure 4 As shown, the second through hole 231 is only used for light transmission, while the first through hole 211 is not only used for light transmission, but also needs to meet the requirement that the second through hole 231 will not be hindered from transmitting light when the fourth mounting plate 23 is adjusted to any position in the third direction M. Therefore, the size of the first through hole 211 is set to be larger than the size of the second through hole 231.

[0042] Continue reading Figure 1 The evaporation coating device further includes a fan assembly 4 and a baffle 5. The fan assembly 4 is fixedly arranged on the top wall 12 of the reaction container 1. The fan assembly 4 is arranged toward the halogen lamp 29, and is used to dissipate heat from the halogen lamp 29 to extend its service life and prevent the halogen lamp 29 from being overheated and damaged. The baffle 5 is fixedly arranged on the top wall 12 of the reaction container 1, and the baffle 5 surrounds the light source assembly 2, which can not only protect the light source assembly 2, but also prevent the light of the halogen lamp 29 from leaking out.

[0043] like Figure 5As shown, the lighting assembly 3 also includes: a fifth mounting plate 35, a second mounting frame 36, a housing portion 34 and a sixth mounting plate 37. The fifth mounting plate 35 is vertically arranged and fixedly connected to the side wall 13 of the reaction container 1. The second mounting frame 36 is located in the vacuum chamber 11, and the second mounting frame 36 is fixedly connected to the fifth mounting plate 35. The second mounting frame 36 has a connected working portion 361 and a connecting portion 362, the working portion 361 is arranged opposite to the bracket 14, and the connecting portion 362 is fixedly connected between the working portion 361 and the fifth mounting plate 35. The housing portion 34 is arranged outside the prism 31, the second lens 32 and the optical fiber 33 and integrates the prism 31, the second lens 32 and the optical fiber 33 into one, and the housing portion 34 is used for shading and protection. The sixth mounting plate 37 adjustably fixes the housing portion 34 and the working portion 361. The sixth mounting plate 37 is fixedly connected to the housing portion 34, and the sixth mounting plate 37 is fixedly connected to the working portion 361 via a plurality of second fasteners 38, and the length of the fixing portion of the second fasteners 38 is adjustable, so that the angle of the prism 31 relative to the working portion 361 is adjustable. By adjusting the length of the fixing portion of different second fasteners 38, the angle between the sixth mounting plate 37 and the working portion 361 can be changed, and the sixth mounting plate 37 and the housing portion 34 are always fixed, so that the angle between the prism 31 and the working portion 361 can be changed, and the angle between the prism 31 and the working portion 361 can be adjusted as needed to optimize the lighting effect of the lighting assembly 3.

[0044] By providing the fifth mounting plate 35, the second mounting frame 36 and the sixth mounting plate 37, the lighting assembly 3 can be fixed in the vacuum chamber 11 of the reaction vessel 1, and the structure is simple and reliable; by providing the lighting assembly 3 with the prism 31, the lens and the optical fiber 33, the light passing through the substrate can be well collected, thereby improving the measurement accuracy of the film thickness. In addition, by providing the sixth mounting plate 37 and the working part 361 to be adjustably fixedly connected, the angle of the prism 31 relative to the working part 361 can be adjusted, further optimizing the lighting effect and improving the measurement accuracy of the film thickness.

[0045] In a preferred embodiment, the angle adjustment range of the prism 31 relative to the working portion 361 is 5°, so as to avoid a waste of debugging time due to an adjustable range that is too large, and to avoid a failure to collect all light due to an adjustable range that is too small.

[0046] Preferably, the second fastener 38 is provided with an external thread, and the second fastener 38 can be selected from screws, bolts and other components. The working portion 361 is provided with a plurality of second threaded holes 201 for the second fastener 38 to cooperate with. The angle of the prism 31 is adjusted by adjusting the length of the second fastener 38 screwed into the second threaded hole 201. The second threaded holes 201 are arranged at intervals in the second direction Y, and the number of the second threaded holes 201 is greater than the number of the second fasteners 38, so that the position of the prism 31 in the second direction Y can be adjusted so that the position of the prism 31 in the second direction Y meets the requirements.

[0047] Specifically, there are four second fasteners 38, which are respectively located at the four vertices of the rectangle. The adjacent sides of the rectangle extend along the second direction Y and the fourth direction N respectively. Figure 5 As shown, the two rows of the second threaded holes 201 are spaced apart in the fourth direction N. When adjusting the angle of the prism 31, the two second fasteners 38 spaced apart in the fourth direction N are regarded as a group and keep the same extension length; the extension lengths of the two second fasteners 38 spaced apart in the second direction Y can be adjusted to be different.

[0048] In this embodiment, in the fourth direction N, the size of the working portion 361 is larger than the size of the connecting portion 362 , in order to provide reliable support for the prism 31 , the second lens 32 and the optical fiber 33 .

[0049] In order not to affect other components in the reaction container 1 , the lighting assembly 3 is arranged to be led out from the side wall 13 of the reaction container 1 , so that the fifth mounting plate 35 is arranged vertically, that is, the fifth mounting plate 35 is parallel to the vertical direction Z.

[0050] To ensure the stability of the connection, Figure 6 As shown, a connecting block 39 is fixedly connected to the inner side of the fifth mounting plate 35, and the connecting block 39 is provided with a notch 391 for accommodating part of the connecting portion 362. One end of the connecting portion 362 away from the working portion 361 is fixedly connected to the connecting block 39.

[0051] Preferably, the portion where the connecting portion 362 is fixed to the connecting block 39 is arranged horizontally, that is, the portion where the connecting portion 362 is fixed to the connecting block 39 is perpendicular to the fifth mounting plate 35, so as to ensure reliable connection and easy installation.

[0052] like Figure 7As shown, the prism 31 has a first right-angled surface 311, a second right-angled surface 312 and a bevel 313 that surround each other. The first right-angled surface 311 is arranged opposite to the bracket 14, and the first right-angled surface 311 is not blocked by the shell portion 34, and is used to receive parallel light passing through the coating sample on the coating rack. The bevel 313 totally reflects the parallel light received by the first right-angled surface 311. The second right-angled surface 312 is arranged facing the lens, and is used to transmit the parallel light reflected by the bevel 313 to the second lens 32. The prism 31, the second lens 32 and the optical fiber 33 are spaced apart in the second direction Y. One end of the optical fiber 33 away from the second lens 32 passes through the side wall 13 of the reaction container 1 and extends out of the vacuum chamber 11, and is connected to the spectrometer.

[0053] The prism 31, the second lens 32 and part of the optical fiber 33 are located in the vacuum chamber 11, the spectrometer is arranged outside the vacuum chamber 11, and the optical fiber 33 passes through the side wall 13 of the evaporation coating device and is sealed with the side wall 13. Such an arrangement can reasonably arrange the positions of various lighting components without affecting other components of the evaporation coating device to perform other processes.

[0054] Specifically, the evaporation coating device further includes a detector, an acquisition card and a computer arranged outside the reaction container 1. The detector is connected to the spectrometer and is used to collect light quantity signals. The acquisition card is connected to the detector and is used to receive the photoelectric signal of the detector. The computer is connected to the acquisition card and is used to analyze the change in the amount of light received by the optical fiber 33 and calculate the specific film thickness.

[0055] In this embodiment, the distance between the halogen lamp 29 and the prism 31 (or the optical fiber 33 ) is 400 mm to 500 mm, thereby ensuring that the light emitted by the halogen lamp 29 can be collected by the optical fiber 33 after passing through a series of intermediate components.

[0056] In a specific application scenario, when a substrate is being coated in the vacuum chamber 11 of the evaporation coating device, the bracket 14 is rotated so that the light source (the light emitted by the halogen lamp 29 is converged into parallel light by the first lens) can irradiate through the substrate at regular intervals, and the amount of light A1 collected by the optical fiber 33 before coating is recorded; before completing the first layer of coating, the amount of light A1 collected by the optical fiber 33 will change due to the light source irradiating through the combination of "substrate + first layer of film", and the acquisition card will sensitively capture the real-time change in light quantity An, and the thickness of the coating can be specifically analyzed through the change An. When the thickness reaches the preset value, the coating of this layer is stopped and the next layer of coating is started.

[0057] It should be noted that, in the description of this specification, the terms "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects. There is no order of precedence between the two, and they cannot be understood as indicating or implying relative importance. In addition, in the description of this specification, unless otherwise specified, the meaning of "plurality" is two or more.

[0058] Any numerical value cited herein includes all values ​​of lower and upper values ​​that increase by one unit from the lower limit to the upper limit, and there is at least a two-unit interval between any lower value and any higher value. For example, if the value of the quantity of a component or a process variable (such as temperature, pressure, time, etc.) is set forth to be from 1 to 90, preferably from 20 to 80, and more preferably from 30 to 70, the purpose is to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32 are also explicitly listed in the specification. For values ​​less than 1, one unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples that are intended to be clearly expressed, and it can be considered that all possible combinations of numerical values ​​listed between the lowest value and the highest value are clearly set forth in the specification in a similar manner.

[0059] Unless otherwise indicated, all ranges include the endpoints and all numbers between the endpoints. "About" or "approximately" used with a range applies to both endpoints of the range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30", including at least the specified endpoints.

[0060] All articles and references disclosed, including patent applications and publications, are incorporated herein by reference for all purposes. The term "consisting essentially of..." to describe a combination should include the identified elements, ingredients, parts or steps and other elements, ingredients, parts or steps that do not substantially affect the basic novel characteristics of the combination. The use of the terms "comprising" or "including" to describe a combination of elements, ingredients, parts or steps herein also contemplates embodiments that consist essentially of these elements, ingredients, parts or steps. By using the term "may", it is intended to indicate that any attribute described that "may" include is optional.

[0061] Multiple elements, ingredients, parts or steps can be provided by a single integrated element, ingredient, part or step. Alternatively, a single integrated element, ingredient, part or step can be divided into separate multiple elements, ingredients, parts or steps. The disclosure "one" or "an" used to describe an element, ingredient, part or step is not intended to exclude other elements, ingredients, parts or steps.

[0062] It should be understood that the above description is for illustration and not for limitation. Many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but should be determined with reference to the appended claims and the full scope of equivalents possessed by such claims. For the purpose of comprehensiveness, all articles and references, including disclosures of patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended to be a waiver of the subject matter, nor should it be considered that the inventors did not consider the subject matter to be part of the disclosed inventive subject matter.

Claims

1. An evaporation coating device, characterized in that: include: A reaction container with a vacuum chamber, wherein a support for carrying a substrate is provided in the reaction container, and the support is arranged near the top of the vacuum chamber; a light-transmitting plate is sealed on the top wall of the reaction container, and a mounting hole is provided on the side wall of the reaction container; A light source assembly installed above the reaction container comprises a halogen lamp and a first lens; the halogen lamp, the first lens and the light-transmitting plate are arranged in sequence from top to bottom in a first direction; the first direction is perpendicular to the coating surface of the substrate placed on the bracket; A light-collecting component is installed in the vacuum chamber, and the light-collecting component is located below the bracket; the light-collecting component includes a prism, a second lens, and an optical fiber, and the prism, the second lens, and the optical fiber are arranged in sequence in the second direction, and the optical fiber is arranged close to the side wall of the reaction container; the optical fiber extends out of the vacuum chamber through the mounting hole, and the optical fiber and the mounting hole are sealed and connected; the second direction is parallel to the coating surface of the substrate; the light emitted by the halogen lamp is converged into parallel light by the first lens, passes through the substrate vertically, and then is reflected by the prism and converged into the optical fiber through the second lens; A spectrometer is arranged outside the reaction container, and the spectrometer is connected to an end of the optical fiber away from the second lens.

2. The evaporation coating device according to claim 1, characterized in that: The light source assembly further comprises: A first mounting plate arranged horizontally and fixedly connected to the top wall of the reaction container; the first mounting plate is provided with a first through hole; A second mounting plate arranged vertically, wherein the bottom end of the second mounting plate is fixedly connected to the upper surface of the first mounting plate; a third mounting plate arranged vertically, the third mounting plate being connected to the second mounting plate, the halogen lamp being mounted on the third mounting plate; the position of the third mounting plate relative to the second mounting plate in the first direction being adjustable; A fourth mounting plate is arranged horizontally, the fourth mounting plate is fixedly connected to the upper surface of the first mounting plate, a lens barrel is fixedly provided on the fourth mounting plate, and the opening of the lens barrel is arranged toward the halogen lamp; the third mounting plate is provided with a second through hole; the first lens is installed in the lens barrel, the halogen lamp, the first lens, the second through hole, the first through hole and the light-transmitting plate are arranged in sequence in the first direction; the size of the first through hole is larger than the size of the second through hole.

3. The evaporation coating device according to claim 2, characterized in that: The halogen lamp is fixedly connected to the third mounting plate via a first mounting bracket, and the first mounting bracket and the third mounting plate are fixedly connected via a plurality of first fasteners; the plurality of first fasteners are spaced apart and distributed along the first direction; and the length of the fixing portion of the first fastener is adjustable.

4. The evaporation coating device according to claim 3, characterized in that: The angle adjustment range between the halogen lamp and the second mounting plate is 10°.

5. The evaporation coating device according to claim 2, characterized in that: The position of the second mounting plate relative to the first mounting plate in a third direction is adjustable, and the third direction is parallel to the horizontal plane; the position of the third mounting plate relative to the first mounting plate in the third direction is adjustable.

6. The evaporation coating device according to claim 2, characterized in that: A plurality of adjusting members are arranged at intervals in the circumferential direction of the lens barrel, and the adjusting members fix the first lens in the lens barrel. The position of the adjusting members relative to the lens barrel in the first direction is adjustable.

7. The evaporation coating device according to claim 1, characterized in that: The evaporation coating device also includes: a fan assembly fixedly arranged on the top wall of the reaction container, the fan assembly being arranged toward the halogen lamp and being used for dissipating heat from the halogen lamp; A baffle is fixedly arranged on the top wall of the reaction container, and the baffle surrounds the light source assembly.

8. The evaporation coating device according to claim 1, characterized in that: The lighting assembly also includes: a fifth mounting plate disposed vertically and fixedly connected to a side wall of the reaction container; A second mounting frame located in the vacuum chamber, the second mounting frame being fixedly connected to the fifth mounting plate; the second mounting frame having a connected working portion and a connecting portion, the working portion being arranged opposite to the bracket, and the connecting portion being fixedly connected between the working portion and the fifth mounting plate; A housing portion, the housing portion is disposed around the prism, the second lens and the optical fiber and integrates the prism, the second lens and the optical fiber into one body; A sixth mounting plate adjustably fixedly connects the shell portion and the working portion, wherein the sixth mounting plate is fixedly connected to the shell portion, and the sixth mounting plate is fixedly connected to the working portion via a plurality of second fasteners, wherein the length of the fixing portion of the second fasteners is adjustable.

9. The evaporation coating device according to claim 8, characterized in that: The angle adjustment range of the prism relative to the working part is 5°.

10. The evaporation coating device according to claim 1, characterized in that: The evaporation coating device also includes a detector, an acquisition card and a computer arranged outside the reaction container; the detector is connected to the spectrometer for collecting light quantity signals; the acquisition card is connected to the detector for receiving the photoelectric signal of the detector; the computer is connected to the acquisition card for analyzing the change in the amount of light received by the optical fiber and calculating the specific film thickness.

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