Bearing device of detection system

Abstract

A bearing device of a detection system comprises a connecting frame, a bearing frame and a supporting frame. The bearing frame comprises a main frame body for arranging the lens module, and a swing arm for providing a plurality of cables for routing. The main frame body can be driven to move up and down relative to the connecting frame. The swing arm is pivoted with the main frame body, is positioned above the connecting frame and is provided with a free end part far away from the main frame body; the supporting frame comprises a supporting column for supporting the free end part and a cable fixing seat for fixing the cable. The cable passes through the wire fixing seat from the free end portion along the swing arm to the lens module arranged on the main frame body, and the swing arm can swing along with the up-and-down movement of the main frame body. Compared with the existing routing mode using a cable chain, the bearing device utilizes the routing mode of the swing arm, so that the flexibility of the cable can be reduced, the reserved length of the cable can be reduced, the manufacturing cost can be reduced, and the influence on the moving precision and stability of the main frame body and the lens module in the vertical direction can be reduced.

Description

Technical Field

[0001] The invention relates to a bearing device of a detection system, in particular to a bearing device of a detection system capable of reducing the deflection of a cable. Background Art

[0002] There is an existing automated optical inspection (AOI) probe that is mainly used to check manufacturing defects and defects on the surface of printed circuit boards (PCBs) or chips. AOI probes use optical systems and image processing technology to automatically detect various problems in the semiconductor manufacturing process. AOI probes usually contain a high-resolution camera and a special light source system that can capture images of the object to be tested at different angles and lighting conditions. These images are transmitted to a computer system and analyzed and compared using image processing algorithms to detect any anomalies or defects.

[0003] The AOI probe has a moving mechanism to control the probe to detect the object to be tested at different angles and positions. Since the AOI probe needs to be connected to multiple cables to transmit power, light source, image signal, control signal, etc., the cables will be affected when the AOI probe moves. Currently, AOI probes are commonly routed using cable chains, but this routing method will cause the cable to bend significantly and a certain line length needs to be reserved. Especially when the accuracy of the AOI probe is improved to the nanometer level, the existing routing method will affect the movement accuracy and stability of the AOI probe in the Z axis due to the weight and high deflection of the cable. Summary of the invention

[0004] One object of the present invention is to provide a bearing device of a detection system which can reduce the cable deflection by using a swing arm to route the cable.

[0005] The bearing device of the detection system of the present invention is suitable for being arranged on a machine to bear the detection system, and the detection system includes a lens module and a plurality of cables connected to the lens module. The bearing device includes: a connecting frame for being arranged on the machine, a bearing frame and a supporting frame for being arranged on the machine. The connecting frame has a slide rail extending in the up-down direction. The bearing frame includes a main frame body for the lens module to be arranged, and a swing arm for providing the cable routing. The main frame body has a slide seat connected to the connecting frame and slidingly cooperating with the slide rail and can be driven to move up and down relative to the connecting frame. The swing arm is pivotally connected to the main frame body and is located above the connecting frame, and has a free end away from the main frame body. The supporting frame includes a support column located below the free end to support the free end, and a cable fixing seat adjacent to the free end for fixing the cable, so that the cable is routed from the free end to the lens module arranged on the main frame body through the cable fixing seat along the swing arm, and the swing arm can swing with the up-down movement of the main frame body.

[0006] In some implementations, the top of the support column is arc-shaped.

[0007] In some implementations, the support column has a universal ball in contact with the free end.

[0008] In some implementations, the swing arm also has a limiting hole that cooperates with the universal ball.

[0009] In some embodiments, the swing arm includes an arm body formed with the free end and extending along a first direction, and a wire-carrying sliding module arranged on the upper surface of the arm body, the wire-carrying sliding module includes a track seat fixed to the arm body and extending along a second direction perpendicular to the first direction, and a wire-carrying seat slidably arranged on the track seat along the second direction, and the wire-carrying seat is used to fix the cable.

[0010] In some implementations, the wire-carrying sliding module is located in a middle area of ​​the arm in the first direction.

[0011] In some embodiments, the swing arm includes an arm body and a hinge, the arm body having a free end and a pivot end opposite to the free end, the hinge is disposed on the lower surface of the pivot end and connected to the main frame so that the swing arm is pivotally connected to the main frame.

[0012] In some embodiments, the main frame also has an upright base plate, a platform connected to the base plate for setting the lens module, and an extension plate connecting the base plate and the swing arm, the platform and the slide are respectively connected to opposite sides of the base plate, the extension plate and the slide are connected to the same side of the base plate and are located above the slide, and the hinge connects the pivot end and the extension plate.

[0013] The present invention has the following effects: the carrying device utilizes the routing method of the swing arm, which, compared with the existing routing method using a cable chain, can reduce the deflection of the cable, reduce the reserved line length, reduce the manufacturing cost, and reduce the impact on the movement accuracy and stability of the main frame and the lens module in the up and down directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, in which:

[0015] Figure 1 is a three-dimensional diagram of an embodiment of a carrying device of a detection system of the present invention;

[0016] Figure 2 is a stereogram of another viewing angle of the embodiment;

[0017] Figure 3 is a rear view of the embodiment;

[0018] Figure 4 is a front view of the embodiment;

[0019] Figure 5 is an incomplete stereogram of this embodiment;

[0020] Figure 6 is a partial stereogram of the embodiment;

[0021] Figure 7 is a partial stereogram of the embodiment;

[0022] Figure 8 is a partial side view of the embodiment;

[0023] Fig. 9 It is a partial cross-sectional view of this embodiment. DETAILED DESCRIPTION

[0024] See also Figure 1 and Figure 2 An embodiment of a carrying device 100 of a detection system of the present invention is suitable for being arranged on a machine (not shown) to carry a detection system 200, wherein the detection system 200 includes a lens module 201 and a plurality of cables 202 connected to the lens module 201. The carrying device 100 includes: a connecting frame 1, a carrying frame 2 and a supporting frame 3.

[0025] The connecting frame 1 is used to be installed on the machine platform and has a slide rail 11 extending along the up-down direction Z.

[0026] See also Figures 2 to 4 The carrier frame 2 includes a main frame body 21 for setting the lens module 201, and a swing arm 22 for providing the cable 202 for routing. The main frame body 21 has an upright base plate 211, a slide seat 212 connecting the base plate 211 and the connecting frame 1 and slidingly cooperating with the slide rail 11, a carrier 213 connected to the base plate 211 for setting the lens module 201, and an extension plate 214 connecting the base plate 211 and the swing arm 22. The carrier 213 and the slide seat 212 are respectively connected to opposite sides of the base plate 211. The carrier 213 is roughly in an inverted T shape, with the upright part connected to the base plate 211 and the bottom side lateral part carrying the lens module 201. The extension plate 214 and the slide seat 212 are connected to the same side of the base plate 211 and the extension plate 214 is located above the slide seat 212. The slide 212 can be driven to move up and down along the slide rail 11 relative to the connecting frame 1, and link the base plate 211 so that other components connected to the base plate 211 move up and down together. In this embodiment, the slide 212 is driven by a linear motor.

[0027] See also Figure 2 , Figures 5 to 7, the swing arm 22 is pivotally connected to the main frame 21 and is located above the connecting frame 1. In this embodiment, the swing arm 22 includes an arm 221 extending along a first direction X, a hinge 222, and a wire-carrying sliding module 223 disposed on the upper surface of the arm 221. The arm 221 has a free end 221a away from the main frame 21 and a pivoting end 221b opposite to the free end 221a. The hinge 222 is disposed on the lower surface of the pivoting end 221b and connected to the extension plate 214 of the main frame 21, so that the swing arm 22 is pivotally connected to the main frame 21. The wire-carrying sliding module 223 includes a track seat 224 fixed to the arm 221 and extending along a second direction Y perpendicular to the first direction X, and a wire-carrying seat 225 slidably disposed on the track seat 224 along the second direction Y. The wire-carrying sliding module 223 is located in the middle area of ​​the arm 221 in the first direction X, and the wire-carrying seat 225 is used to fix the cable 202, so that the middle section of the cable 202 on the swing arm 22 can move relative to the arm 221 in the second direction Y. In this way, the cable 202 can be slightly bent (the wire-carrying seat 225 is close to the side edge of the arm 221) or straightened (the wire-carrying seat 225 is close to the center line of the arm 221) when the swing arm 22 moves up and down, that is, the cable 202 has a margin to move with the swing arm 22, and there is no need to reserve too much cable length.

[0028] See also Figure 2 , Figure 8 and Fig. 9The support frame 3 is used to be arranged on the machine, and includes a support column 31 located below the free end 221a to support the free end 221a, and a cable fixing seat 32 adjacent to the free end 221a for fixing the cable 202. The cable 202 is routed from the free end 221a along the swing arm 22 to the lens module 201 arranged on the main frame 21 through the cable fixing seat 32, and the swing arm 22 can swing with the up and down movement of the main frame 21, thereby reducing the deflection of the cable 202. In this embodiment, the support column 31 has a universal ball 311 (drawn in a schematic manner in the figure) in contact with the free end 221a, so that the top of the support column 31 is in an arc shape. The arc shape of the top of the support column 31 can reduce the contact area with the swing arm 22, and the universal ball 311 can roll to reduce friction, thereby avoiding the generation of dust. In this embodiment, the arm 221 also has a limiting hole 221c matched with the universal ball 311 to position the arm 221 relative to the universal ball 311. The free end 221a of the swing arm 22 is supported by the support column 31 to support the weight of the cable 202, and the free end 221a of the swing arm 22 can move freely, thereby reducing the influence on the main frame 21 and the lens module 201 disposed on the main frame 21 in the vertical direction Z movement accuracy and stability.

[0029] In summary, the supporting device 100 utilizes the routing method of the swing arm 22, which can reduce the deflection of the cable 202, reduce the reserved line length, reduce the manufacturing cost, and reduce the impact on the main frame 21 and the lens module 201 in the up and down direction Z movement accuracy and stability compared to the existing routing method using a cable chain.

[0030] The above are merely embodiments of the present invention and should not be used to limit the scope of the present invention. That is, any simple equivalent changes and modifications made according to the claims and description of the present invention still fall within the scope of the present invention.

Claims

1. A carrying device of a detection system, suitable for being arranged on a machine platform to carry the detection system, the detection system comprising a lens module and a plurality of cables connecting the lens module, characterized in that: The carrying device comprises: A connecting frame, used to be arranged on the machine platform, and having a slide rail extending in the up-down direction; A carrier frame, comprising a main frame body for setting the lens module, and a swing arm for providing the cable routing, the main frame body having a slide seat connected to the connecting frame and slidingly cooperating with the slide rail and being driven to move up and down relative to the connecting frame, the swing arm being pivotally connected to the main frame body and located above the connecting frame, and having a free end away from the main frame body; and The support frame is used to be set on the machine, and includes a support column located below the free end to support the free end, and a cable fixing seat adjacent to the free end for fixing the cable, so that the cable is routed from the free end along the swing arm to the lens module set on the main frame through the cable fixing seat, and the swing arm can swing as the main frame moves up and down.

2. The carrying device of the detection system according to claim 1, characterized in that: The top end of the support column is in an arc shape.

3. The carrying device of the detection system according to claim 2, characterized in that: The support column has a universal ball in contact with the free end.

4. The carrying device of the detection system according to claim 3, characterized in that: The swing arm also has a limiting hole matched with the universal ball.

5. The carrying device of the detection system according to claim 1, characterized in that: The swing arm includes an arm body formed with the free end and extending along a first direction, and a wire-carrying sliding module arranged on the upper surface of the arm body. The wire-carrying sliding module includes a track seat fixed to the arm body and extending along a second direction perpendicular to the first direction, and a wire-carrying seat slidably arranged on the track seat along the second direction, and the wire-carrying seat is used to fix the cable.

6. The carrying device of the detection system according to claim 5, characterized in that: The wire-carrying sliding module is located in the middle area of ​​the arm body in the first direction.

7. The carrying device of the detection system according to claim 1, characterized in that: The swing arm comprises an arm body and a hinge, wherein the arm body has the free end and a pivot end opposite to the free end, and the hinge is arranged on the lower surface of the pivot end and connected to the main frame so that the swing arm is pivotally connected to the main frame.

8. The carrying device of the detection system according to claim 7, characterized in that: The main frame also has an upright base plate, a carrier connected to the base plate for setting the lens module, and an extension plate connecting the base plate and the swing arm. The carrier and the slide are respectively connected to opposite sides of the base plate, the extension plate and the slide are connected to the same side of the base plate and are located above the slide, and the hinge connects the pivot end and the extension plate.

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