Laser collimation device and processing system

Abstract

The embodiment of the invention provides a laser collimation device and a processing system. The laser collimation device comprises a shielding assembly and a diaphragm. The shielding assembly is provided with an incident port, an emergent port and a collimation channel extending in the first direction, the incident port and the emergent port are formed in the two opposite ends of the collimation channel and communicate with the collimation channel, and a light path passing through the collimation channel is formed between the incident port and the emergent port. At least one of the incident port and the emergent port is provided with a diaphragm, the diaphragm is provided with a light through hole for laser to pass through, and the light through hole is communicated with the collimation channel. The laser collimation device provided by the embodiment of the invention is good in collimation effect.

Description

Technical Field

[0001] The present application relates to the technical field of ray collimation, and in particular to a laser collimation device and a processing system. Background Art

[0002] The research on photon injection, dose determination and value transfer technology of quasi-monoenergetic X-ray can solve the problem of value traceability of X-ray radiation monitoring equipment. The current ionizing radiation metrology technology system does not yet have quasi-monoenergetic X-ray reference radiation and metrology standard devices, which cannot meet the traceability needs of ionizing radiation metrology equipment.

[0003] The method of obtaining quasi-monoenergetic X-rays in the related art is to use an X-ray machine to generate X-rays with a continuous energy spectrum. Quasi-monoenergetic X-rays can be generated through the Bragg diffraction spectrometry of the crystal. X-rays need to be incident on the Si crystal in the form of a collimated beam, and then emitted from the silicon crystal in a collimated beam. Through the principle of Bragg diffraction, the continuous X-rays are filtered into monoenergetic rays. However, the collimation effect of the laser collimator in the related art is poor. Summary of the invention

[0004] In view of this, the main purpose of the embodiments of the present application is to provide a laser alignment device and processing system with good alignment effect.

[0005] To achieve the above purpose, the technical solution of the embodiment of the present application is implemented as follows:

[0006] An embodiment of the present application provides a laser alignment device, comprising:

[0007] A shielding component, wherein the shielding component has an incident port, an exit port, and a collimating channel extending along a first direction, wherein the incident port and the exit port are arranged at opposite ends of the collimating channel, the incident port and the exit port are respectively connected to the collimating channel, and an optical path passing through the collimating channel is formed between the incident port and the exit port;

[0008] An aperture is provided at least one of the incident port and the exit port, the aperture has a light-through hole for laser to pass through, and the light-through hole is connected to the collimating channel.

[0009] In one embodiment, the shielding assembly includes a first fixed layer, a second fixed layer and a shielding layer, the shielding layer has the collimation channel, the first fixed layer is arranged on the inner surface of the shielding layer, the second fixed layer is arranged on the outer surface of the shielding layer, and the first fixed layer and the second fixed layer both extend along the first direction.

[0010] In one embodiment, the laser alignment device includes a support frame, the support frame includes a first frame and a second frame, the second frame is arranged on the first frame and can move along the first direction, the shielding assembly is arranged on the second frame and can move along the height direction of the second frame, and the first direction is perpendicular to the height direction.

[0011] In one embodiment, the movement range of the second frame along the first direction is -6 cm to 6 cm; and / or,

[0012] The movement range of the shielding component along the height direction is -12 cm to 12 cm.

[0013] In one embodiment, the laser collimation device includes a laser collimator and a collimator mounting portion, the collimator mounting portion is arranged at the incident port, the aperture is arranged at the exit port, the collimation device mounting portion has a accommodating cavity, one end of the accommodating cavity is connected to the outside, and the other end is connected to the collimation channel through the incident port, and the laser collimator is arranged in the accommodating cavity.

[0014] In one embodiment, a threaded hole is formed in the cavity wall of the accommodating cavity, and the laser collimator device includes a fixed top screw, and the fixed top screw can be movably disposed in the threaded hole to fix the laser collimator.

[0015] In one embodiment, an extension length of the shielding assembly along the first direction is greater than or equal to 1 m and less than or equal to 1.5 m.

[0016] In one embodiment, the material of the first fixing layer is stainless steel; and / or,

[0017] The thickness of the first fixing layer is 1 mm; and / or,

[0018] The material of the shielding layer is lead metal; and / or,

[0019] The thickness of the shielding layer is 3 mm; and / or,

[0020] The material of the second fixing layer is stainless steel; and / or,

[0021] The thickness of the second fixing layer is 3 mm.

[0022] Another aspect of an embodiment of the present application provides a processing system, which includes a processing device and any of the above-mentioned laser alignment devices.

[0023] In one embodiment, the processing system includes a plurality of the laser alignment devices, which include a first laser alignment device and a second laser alignment device. The first laser alignment device and the second laser alignment device are respectively arranged on opposite sides of the processing device along the first direction. The processing device is used to receive X-rays from the first laser alignment device to monochromatize the X-rays, and the second laser alignment device is used to collimate the X-rays after monochromatization.

[0024] The embodiment of the present application provides a laser collimation device and a processing system, wherein the laser collimation device includes a shielding component and an aperture. The shielding component has an incident port, an exit port, and a collimation channel extending along a first direction, wherein the incident port and the exit port are arranged at opposite ends of the collimation channel, wherein the incident port and the exit port are respectively connected to the collimation channel, and an optical path passing through the collimation channel is formed between the incident port and the exit port. At least one of the incident port and the exit port is provided with an aperture, wherein the aperture has a light-through hole for the laser to pass through, and the light-through hole is connected to the collimation channel. Thus, on the one hand, by arranging the incident port, the exit port, and the collimation channel in the shielding component, it is ensured that the laser is collimated in a relatively closed environment, the influence of external factors on the laser beam is reduced, the accuracy and stability of the laser collimation are improved, and thus the collimated laser has the characteristics of narrow energy, strong directionality, and high stability, and thus the collimation effect is good. On the other hand, the setting of the aperture can control the size and shape of the laser beam, remove stray light and scattered light, improve the quality of the laser, and thus obtain a clearer and more accurate imaging result, which can further improve the collimation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic structural diagram of a laser alignment device according to an embodiment of the present application;

[0026] Figure 2 for Figure 1 A schematic diagram of the structure of the middle shielding component;

[0027] Figure 3 for Figure 2 A cross-sectional view of the shield assembly;

[0028] Figure 4 for Figure 1 The structural diagram at A in the middle;

[0029] Figure 5 It is a schematic structural diagram of a shielding assembly support according to another embodiment of the present application.

[0030] Description of Reference Numerals

[0031] 10. Shielding assembly; 10a. Incident port; 10b. Exit port; 11. First fixed layer; 12. Second fixed layer; 13. Shielding layer; 13a. Collimation channel; 20. Aperture; 30. Support frame; 31. First frame; 32. Second frame; 321. Shielding assembly support; 40. Laser collimator; 50. Collimator mounting portion; 51. Fixed top screw; 60. Processing device. DETAILED DESCRIPTION

[0032] In this application, the orientation or position relationship between the "first direction" and the "height direction" is based on the attached Figure 1 It should be understood that these directional terms are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application.

[0033] An embodiment of the present application provides a laser alignment device. Figure 1 , Figure 2 and Figure 3 The laser collimation device includes a shielding component 10 and an aperture 20.

[0034] The shielding assembly 10 has an incident port 10a, an exit port 10b and a collimating channel 13a extending along a first direction. The incident port 10a and the exit port 10b are arranged at opposite ends of the collimating channel 13a. The incident port 10a and the exit port 10b are respectively connected to the collimating channel 13a, and an optical path passing through the collimating channel 13a is formed between the incident port 10a and the exit port 10b.

[0035] At least one of the incident port 10a and the exit port 10b is provided with an aperture 20, and the aperture 20 has a light-through hole for the laser to pass through, and the light-through hole is communicated with the collimating channel 13a.

[0036] Specifically, the laser collimator is a device used to make the laser beam propagate along a specific direction so as to make the laser beam more parallel and focused.

[0037] The shielding assembly 10 refers to a component that prevents external light from interfering with the propagation of the laser beam and protects the user from laser radiation.

[0038] The incident port 10a refers to the entrance of the laser into the collimating device.

[0039] The emission port 10 b refers to the outlet through which the collimated laser is emitted.

[0040] The collimation channel 13a refers to an internal channel of the shielding assembly 10, which is used to guide the laser beam to propagate in a specific direction and reduce the divergence of the beam.

[0041] The extension length of the collimating channel 13a can be set according to the propagation characteristics of the laser beam and the size of the device. For example, the extension length of the collimating channel 13a is 1.2 m.

[0042] The type of laser is not limited. For ease of description, the laser in the embodiment of the present application is X-ray.

[0043] The aperture 20 has a light hole for controlling the intensity and size of the X-rays passing therethrough.

[0044] The shape and size of the light aperture can be set according to actual conditions to control the intensity and divergence angle of the X-rays.

[0045] It is understandable that the aperture 20 can be designed to be adjustable, and the size of the light hole can be changed through mechanical structure or electronic control to adapt to different X-ray parameters and application requirements.

[0046] The material type of the aperture 20 is not limited. For example, the material type of the aperture 20 is lead metal.

[0047] That at least one of the incident port 10a and the exit port 10b is provided with the diaphragm 20 means that the diaphragm 20 may be provided only at the incident port 10a, only at the exit port 10b, or both at the incident port 10a and the exit port 10b.

[0048] The light-through hole on the aperture 20 is connected to the collimating channel 13 a , and X-rays can enter or exit the collimating channel 13 a through the light-through hole.

[0049] Specifically, the X-ray enters from the incident port 10a, passes through the collimating channel 13a, and is emitted from the emission port 10b.

[0050] Another embodiment of the present application provides a processing system, which includes a processing device 60 and a laser alignment device.

[0051] Specifically, the processing device 60 can receive the collimated X-rays and perform monochromatic processing on the collimated X-rays.

[0052] In a specific embodiment, the laser collimator includes a monitoring module, which is disposed in the collimation channel 13a to monitor the collimation and intensity of the X-rays in real time, and to feed back the parameters to the control system for adjustment, thereby obtaining a better collimation effect.

[0053] The laser collimation device of the embodiment of the present application includes a shielding component 10 and an aperture 20. The shielding component 10 has an incident port 10a, an exit port 10b, and a collimation channel 13a extending along a first direction. The incident port 10a and the exit port 10b are arranged at opposite ends of the collimation channel 13a. The incident port 10a and the exit port 10b are respectively connected to the collimation channel 13a, and an optical path passing through the collimation channel 13a is formed between the incident port 10a and the exit port 10b. At least one of the incident port 10a and the exit port 10b is provided with an aperture 20, and the aperture 20 has a light hole for laser light to pass through, and the light hole is connected to the collimation channel 13a. Thus, on the one hand, by setting the inlet 10a, the outlet 10b and the collimation channel 13a in the shielding component 10, it is ensured that the laser is collimated in a relatively closed environment, reducing the influence of external factors on the laser beam, improving the accuracy and stability of laser collimation, and thus making the collimated laser have the characteristics of narrow energy, strong directionality and high stability, so that the collimation effect is good. On the other hand, the setting of the aperture 20 can control the size and shape of the laser beam, remove stray light and scattered light, improve the quality of the laser, and obtain clearer and more accurate imaging results, which can further improve the collimation effect.

[0054] In one embodiment, please refer to Figure 3 The shielding assembly includes a first fixed layer 11, a second fixed layer 12 and a shielding layer 13, the shielding layer 13 has a collimating channel 13a, the first fixed layer 11 is arranged on the inner surface of the shielding layer 13, the second fixed layer 12 is arranged on the outer surface of the shielding layer 13, and the first fixed layer 11 and the second fixed layer 12 both extend along the first direction.

[0055] Specifically, the first fixing layer 11 refers to a layer of structure located on the inner surface of the shielding layer 13, which supports and fixes the shielding layer 13. The first fixing layer 11 is tightly fitted with the shielding layer 13, which can ensure the stability of the inner surface of the shielding layer 13 and prevent the internal structure of the shielding layer 13 from deformation or damage.

[0056] The length of the first fixed layer 11 extending along the first direction is not limited. For example, the length of the first fixed layer 11 extending along the first direction is equal to the length of the shielding layer 13 extending along the first direction. For another example, the length of the first fixed layer 11 extending along the first direction is less than the length of the shielding layer 13 extending along the first direction.

[0057] The material type of the first fixing layer 11 is not limited, as long as it can play the role of supporting and fixing the shielding layer 13. For example, the material of the first fixing layer is stainless steel.

[0058] The thickness of the first fixing layer 11 is not limited. For example, the thickness of the first fixing layer 11 is 1 mm.

[0059] The second fixing layer 12 refers to a layer structure located on the outer surface of the shielding layer 13, and is arranged on two opposite sides of the shielding layer 13 with the first fixing layer 11. The second fixing layer 12 protects the outer surface of the shielding layer 13 to prevent external factors from damaging the shielding layer 13. On the other hand, it supports and fixes the shielding layer 13.

[0060] The length of the second fixed layer 12 extending along the first direction is not limited. For example, the length of the second fixed layer 12 extending along the first direction is equal to the length of the shielding layer 13 extending along the first direction. For another example, the length of the second fixed layer 12 extending along the first direction is less than the length of the shielding layer 13 extending along the first direction.

[0061] The material type of the second fixing layer 12 is not limited, as long as it can protect, support and fix the shielding layer 13. For example, the material of the second fixing layer is stainless steel.

[0062] The thickness of the first fixing layer 11 is not limited. For example, the thickness of the second fixing layer 12 is 3 mm.

[0063] The shielding layer 13 refers to a component that shields external interfering light and prevents leakage of scattered light generated during the collimation process of X-rays.

[0064] The material type of the shielding layer 13 is not limited. For example, the material of the shielding layer 13 is lead metal.

[0065] The thickness of the shielding layer 13 is not limited. For example, the thickness of the shielding layer 13 is 3 mm.

[0066] In one embodiment, please refer to Figure 1 and Figure 5 The laser alignment device includes a support frame 30, and the support frame 30 includes a first frame 31 and a second frame 32. The second frame 32 is arranged on the first frame 31 and can move along a first direction. The shielding assembly 10 is arranged on the second frame 32 and can move along the height direction of the second frame 32. The first direction is perpendicular to the height direction. Therefore, on the one hand, the laser alignment device can be flexibly adjusted according to different usage scenarios and needs to adapt to different incident angles, working distances and other requirements, thereby improving the versatility and adaptability of the device. On the other hand, it can ensure that the X-rays propagate along a predetermined path, reduce the divergence of the light beam, and improve the alignment accuracy.

[0067] Specifically, the support frame 30 refers to a structure for supporting and fixing the laser alignment device to ensure the stability of the laser alignment device.

[0068] The first frame 31 provides a supporting foundation for the second frame 32 .

[0069] The second frame 32 is installed on the first frame 31 and can move along the first direction on the first frame 31 to adjust the distance between the laser alignment device and the processing device 60 .

[0070] The movement range of the second frame 32 along the first direction is not limited. For example, the movement range of the second frame 32 along the first direction is -6 cm to 6 cm.

[0071] It can be understood that, with the center position of the second frame 32 at the first frame 31 as the starting point of movement, the direction in which the second frame 32 moves toward the processing device 60 along the first direction is the positive direction, and the direction in which the second frame 32 moves away from the processing device 60 is the negative direction. The range in which the second frame 32 moves toward the processing device 60 is 0 cm to 6 cm, for example, the second frame 32 moves toward the processing device 60 by 0 cm, 3 cm, or 6 cm. The range in which the second frame 32 moves away from the processing device 60 is -6 cm to 0 cm, for example, the second frame 32 moves away from the processing device 60 by -6 cm, -3 cm, or 0 cm.

[0072] The second frame 32 supports and fixes the shielding assembly 10 . The shielding assembly 10 can move along the height direction to adjust the height of the shielding assembly 10 relative to the processing device 60 .

[0073] The movement range of the shielding assembly 10 along the height direction is not limited. For example, the movement range of the shielding assembly 10 along the height direction is -12 cm to 12 cm.

[0074] It can be understood that, with the center position of the shielding assembly 10 at the second frame 32 as the starting point of movement, the direction in which the shielding assembly 10 moves away from the first frame 31 along the height direction is the positive direction, and the direction in which the shielding assembly 10 moves toward the first frame 31 is the negative direction. The range in which the shielding assembly 10 moves away from the first frame 31 is 0 cm to 12 cm, for example, the shielding assembly 10 moves away from the first frame 31 by 0 cm, 6 cm, or 12 cm. The range in which the shielding assembly 10 moves toward the first frame 31 is -12 cm to 0 cm, for example, the shielding assembly 10 moves toward the first frame 31 by -12 cm, -6 cm, or 0 cm.

[0075] In a specific embodiment, please refer to Figure 5 The first frame 31 includes a base, the second frame 32 includes a support frame 30 body and a dovetail slide module, the support frame 30 body includes a support panel, one of the support frame 30 body and the base has a slide rail, and the other has a sliding member, and the slide rail and the sliding member are slidably matched. The dovetail slide module includes a shielding component support 321, and the shielding component 10 is placed on the shielding component support 321. The support panel is set on the side of the support frame 30 body away from the base, and the dovetail slide module is set on the support plate.

[0076] In one embodiment, please refer to Figure 4The laser collimator device includes a laser collimator 40 and a collimator mounting part 50. The collimator mounting part 50 is arranged at the incident port 10a, and the aperture 20 is arranged at the exit port 10b. The collimator mounting part has a housing cavity, one end of which is connected to the outside, and the other end is connected to the collimation channel 13a through the incident port 10a. The laser collimator 40 is arranged in the housing cavity. Therefore, the laser collimator 40 is used to adjust the laser collimator device to the best working state in advance, which provides an accurate reference and basis for the subsequent alignment of the X-rays, thereby greatly improving the alignment accuracy.

[0077] Specifically, the laser collimator 40 is first installed in the accommodating cavity, and the laser collimator device is pre-adjusted. Through the pre-adjustment of the laser collimator 40, the laser collimator device can be in the best working state. After the pre-adjustment of the laser collimator device is completed, the laser collimator 40 is removed from the accommodating cavity, and then the laser collimator device is placed at the X-ray to collimate the X-ray.

[0078] The laser collimator 40 refers to a component capable of emitting laser light.

[0079] The collimator mounting portion 50 refers to a portion for mounting and fixing the laser collimator 40 .

[0080] The collimator mounting portion 50 is disposed at the incident port 10 a of the laser collimator device to ensure that the position of the laser collimator 40 is accurate and stable.

[0081] The connection method between the collimator mounting portion 50 and the shielding assembly 10 is not limited.

[0082] For example, matching threads are respectively provided on the contact surfaces of the collimator mounting portion 50 and the shielding assembly 10 so that the collimator mounting portion 50 is threadedly connected to the shielding assembly 10, thereby ensuring that the connection between the collimator mounting portion 50 and the shielding assembly 10 is stable and reliable.

[0083] For another example, the collimator mounting portion 50 is connected to the shielding assembly 10 by bolts, which facilitates the installation and removal of the collimator mounting portion 50 .

[0084] In a specific embodiment, an adapter flange is provided at the incident port 10a of the shielding assembly 10, and a first bolt hole is opened in the adapter flange. A second bolt hole is opened on the side of the collimator mounting portion 50 close to the shielding assembly 10, and the first bolt hole corresponds to the second bolt hole one by one. Bolts are inserted into the first bolt hole and the second bolt hole to fasten the collimator mounting portion 50 to the shielding assembly 10.

[0085] In one embodiment, please refer to Figure 4The cavity wall of the accommodating cavity is provided with a threaded hole, and the laser alignment device includes a fixed top screw 51, which can be movably arranged in the threaded hole to fix the laser collimator 40. Therefore, on the one hand, through the cooperation between the fixed top screw 51 and the threaded hole, a stable fixing force can be provided for the laser collimator 40, ensuring that the laser collimator 40 will not shake or move in the accommodating cavity, thereby ensuring the alignment accuracy and stability of the laser alignment device. On the other hand, it is convenient to remove the laser collimator 40 from the accommodating cavity after pre-adjusting the laser collimator 40.

[0086] Specifically, the number of threaded holes is not limited and may be one or more. The multiple threaded holes are arranged at different positions of the cavity wall of the accommodating cavity to provide a more uniform fixing force and ensure that the laser collimator 40 can be stably fixed in all directions.

[0087] The number of the fixing screws 51 corresponds to the number of the threaded holes.

[0088] In one embodiment, please refer to Figure 2 and Figure 3 , the extension length of the shielding assembly 10 along the first direction is greater than or equal to 1m, and less than or equal to 1.5m. For example, the extension length of the shielding assembly 10 along the first direction is 1m, 1.2m or 1.5m. Therefore, on the one hand, it is convenient to install and layout the laser alignment device in various working environments, and the convenience of using the laser alignment device is improved. On the other hand, it can provide sufficient shielding area and improve the shielding effect.

[0089] In one embodiment, please refer to Figure 1 The processing system includes a plurality of laser alignment devices, the plurality of laser alignment devices include a first laser alignment device and a second laser alignment device, the first laser alignment device and the second laser alignment device are respectively arranged on opposite sides of the processing device 60 along the first direction, the processing device 60 is used to receive X-rays from the first laser alignment device to monochromatize the X-rays, and the second laser alignment device is used to collimate the monochromatized X-rays. Therefore, by using the second laser alignment device to collimate the monochromatized X-rays, the collimation degree and imaging quality of the X-ray beam can be further improved.

[0090] Specifically, the first laser alignment device is provided with collimator mounting parts 50 and apertures 20 on opposite sides thereof, and the second laser alignment device is provided with apertures 20 on opposite sides thereof. The first laser alignment device and the second laser alignment device are respectively located on opposite sides of the processing device 60 along the first direction.

[0091] The steps in the processing system to collimate the X-rays include:

[0092] Step S1: Install the laser collimator 40 in the collimator mounting portion 50, and adjust the height and distance of the first laser collimator and the second laser collimator relative to the processing device 60 by adjusting the support frame 30, so as to debug the beam of the processing system. The laser collimator 40 uses a point laser, which can simulate the route of the X-ray beam during the debugging process.

[0093] Step S2: After the processing system is adjusted, remove the laser collimator 40 and use the processing system to collimate the X-rays.

[0094] Specifically, the first laser collimator transmits the X-rays to the processing device 60, and the processing device 60 performs monochromatic processing on the received X-rays, that is, converts the X-rays with different wavelengths into X-rays with a specific wavelength or a narrow wavelength range. The X-rays after monochromatic processing are then collimated by the second laser collimator to make them more parallel and concentrated. As a result, the monochromatic X-rays have the advantages of narrow energy, strong directionality and high stability.

[0095] In the description of the present application, the description with reference to the terms "in one embodiment", "in some embodiments", "in a specific embodiment", or "exemplary" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In the present application, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art may combine different embodiments or examples described in the present application and the features of different embodiments or examples without contradiction.

[0096] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application are included in the protection scope of the present application.

Claims

1. A laser alignment device, characterized in that: include: A shielding component, wherein the shielding component has an incident port, an exit port, and a collimating channel extending along a first direction, wherein the incident port and the exit port are arranged at opposite ends of the collimating channel, the incident port and the exit port are respectively connected to the collimating channel, and an optical path passing through the collimating channel is formed between the incident port and the exit port; An aperture is provided at least one of the incident port and the exit port, the aperture has a light-through hole for laser to pass through, and the light-through hole is connected to the collimating channel.

2. The laser alignment device according to claim 1, characterized in that: The shielding assembly includes a first fixed layer, a second fixed layer and a shielding layer, the shielding layer has the collimation channel, the first fixed layer is arranged on the inner surface of the shielding layer, the second fixed layer is arranged on the outer surface of the shielding layer, and the first fixed layer and the second fixed layer both extend along the first direction.

3. The laser alignment device according to claim 1, characterized in that: The laser alignment device includes a support frame, which includes a first frame and a second frame. The second frame is arranged on the first frame and can move along the first direction. The shielding assembly is arranged on the second frame and can move along the height direction of the second frame. The first direction is perpendicular to the height direction.

4. The laser alignment device according to claim 3, characterized in that: The movement range of the second frame along the first direction is -6 cm to 6 cm; and / or, The movement range of the shielding component along the height direction is -12 cm to 12 cm.

5. The laser alignment device according to any one of claims 1 to 4, characterized in that: The laser collimation device includes a laser collimator and a collimator mounting portion, the collimator mounting portion is arranged at the incident port, the diaphragm is arranged at the exit port, the collimation device mounting portion has a accommodating cavity, one end of the accommodating cavity is connected to the outside, and the other end is connected to the collimation channel through the incident port, and the laser collimator is arranged in the accommodating cavity.

6. The laser alignment device according to claim 5, characterized in that: A threaded hole is formed in the cavity wall of the accommodating cavity, and the laser collimator device comprises a fixed top screw, which is movably arranged in the threaded hole to fix the laser collimator.

7. The laser alignment device according to any one of claims 1 to 4, characterized in that: An extension length of the shielding assembly along the first direction is greater than or equal to 1 m and less than or equal to 1.5 m.

8. The laser alignment device according to claim 2, characterized in that: The material of the first fixing layer is stainless steel; and / or, The thickness of the first fixing layer is 1 mm; and / or, The material of the shielding layer is lead metal; and / or, The thickness of the shielding layer is 3 mm; and / or, The material of the second fixing layer is stainless steel; and / or, The thickness of the second fixing layer is 3 mm.

9. A processing system, characterized in that: The processing system comprises a processing device and the laser alignment device according to any one of claims 1 to 4.

10. The processing system according to claim 9, characterized in that The processing system includes a plurality of the laser alignment devices, which include a first laser alignment device and a second laser alignment device. The first laser alignment device and the second laser alignment device are respectively arranged on opposite sides of the processing device along the first direction. The processing device is used to receive X-rays from the first laser alignment device to monochromatize the X-rays, and the second laser alignment device is used to collimate the X-rays after the monochromatization process.

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