Cassette transport

Abstract

A cassette conveying device is adapted to convey a cassette loaded with wafers, and includes a moving module, a first clamping module and a second clamping module. The moving module includes a rotating shaft capable of moving in four axes. The first clamping module and the second clamping module are connected with the rotating shaft and respectively located at opposite sides of the rotating shaft and move with the rotating shaft. The first clamping module is used to clamp the cassette to move the wafers in a substantially horizontal arrangement. The second clamping module is used to clamp and rotate the cassette to move the wafers from a horizontal arrangement to a substantially vertical arrangement. A user can select to use the first clamping module or the second clamping module to convey the cassette according to process requirements, which can reduce the space occupied by the conveying device in a clean room.

Description

Technical Field

[0001] The present invention relates to a cassette conveying device, in particular to a cassette conveying device which can transport wafers in a horizontal or vertical position in the cassette. Background Art

[0002] Currently, semiconductor manufacturing processes often require wafers (substrates) to be placed in baking equipment for drying, heat treatment, or curing. Some process steps require the wafers to be placed horizontally within the baking equipment, while others require them to be placed vertically. Furthermore, to increase production efficiency, cassettes are often used to accommodate multiple wafers and transport them in batches.

[0003] Currently, two types of transport machines are used in the production area of ​​cleanrooms to transport cassettes from the buffer zone to the bakeout equipment. One type of machine is used to position the wafers in the cassettes horizontally, suitable for horizontal placement in the bakeout equipment; the other type of machine is used to position the wafers in the cassettes vertically, suitable for vertical placement in the bakeout equipment. However, using two types of machines to transport cassettes within the cleanroom requires a significant amount of space, impacting cleanroom space utilization. Summary of the Invention

[0004] An object of the present invention is to provide a cassette transport device that can transport wafers in a cassette in a horizontal or vertical position.

[0005] In some embodiments, the cassette transport device of the present invention is suitable for transporting a cassette loaded with wafers. The cassette comprises a bottom wall, a top wall opposite the bottom wall, two opposing side walls connecting the bottom wall and the top wall, a rear wall connecting the bottom wall and the top wall, and a plurality of fixed clamping ears disposed on the top wall. The fixed clamping ears are divided into two groups and disposed on the top wall near the side walls. The cassette transport device includes a moving module, a first clamping module, and a second clamping module. The moving module includes a base and a rotating shaft disposed on the base. The base can be driven to move horizontally in a first direction. The rotating shaft can be driven to move horizontally in a second direction perpendicular to the first direction, to rise and fall vertically, and to rotate about its own axis. The first clamping module is used to clamp the cassette so that the wafers are moved in a generally horizontal position. The first clamping module includes a first connecting unit fixedly connected to the rotating shaft, and two clamping arms that are opposite to each other and movably connected to the first connecting unit. The clamping arms can be driven to transition between a clamping position, in which they are relatively close together to clamp the cassette, and a release position, in which they are relatively far apart to release the cassette. Each clamping arm includes a top arm portion for abutting the top wall and a side arm portion for abutting the corresponding side wall. The top arm portion is provided with a plurality of first positioning portions that interact with the fixed clamping ears. The second clamping module is configured to clamp and rotate the cassette to move the wafer from a horizontal position to a substantially vertical position. The second clamping module includes a second connecting unit fixedly connected to the rotating shaft and located on an opposite side of the first clamping module, and two clamping members movably connected to the second connecting unit. The second connecting unit includes a fixed frame connected to the rotating shaft and a rotating mechanism pivotally connected to the fixed frame. The clamping members are connected to the rotating mechanism and can be driven to transition between a clamping position, in which they are relatively close together to clamp the cassette, and a release position, in which they are relatively far apart to release the cassette. Each clamping member has a top abutting wall for abutting against the top wall and a side abutting wall for abutting against the corresponding side wall, and the top abutting wall is provided with a plurality of second positioning portions respectively corresponding to the fixed clamping ears.

[0006] In some embodiments, the first connecting unit has a carrier connected to the rotating shaft, a mounting frame pivotally connected to the carrier, and a tilting drive mechanism provided on the carrier and used to drive the mounting frame to swing at an inclination angle. The clamping arm is connected to the mounting frame and is linked by the mounting frame to be able to switch between a horizontal picking and placing state in which the clamping arm is in a horizontal state and a carrying state in which the clamping arm is in a tilted state. When the clamping arm clamps the cassette and is in the carrying state, the wafer in the cassette can be slightly tilted against the rear wall.

[0007] In some embodiments, the mounting frame has a main frame connected to the clamping arm, a pivotal seat connected to the main frame, and a linkage plate connected to the main frame. The pivotal seat has a pivot pivoted to the supporting frame, and the linkage plate is located below the pivot and connected to the tilt drive mechanism. The tilt drive mechanism drives the linkage plate, so that the mounting frame can swing up and down at the inclination angle with the pivot as the axis.

[0008] In some embodiments, the rotating mechanism can be controlled to drive the clamping member to switch between a horizontal state and a near vertical state. The clamping member clamps the cassette and when in the horizontal state, the wafers in the cassette are placed horizontally. The clamping member clamps the cassette and when in the near vertical state, the rear wall of the cassette is located below and is lower than the side close to the bottom wall and lower than the side close to the top wall, so that the wafers in the cassette are placed in a roughly vertical state and lean against the bottom wall to avoid collisions between the wafers.

[0009] In some embodiments, the rotating mechanism has a supporting frame connected to the clamping member, a connecting frame connected to the supporting frame and pivotally connected to the fixed frame, a connecting rod pivotally connected to the connecting frame, and an electric cylinder connected to the connecting rod, wherein the connecting rod is driven by the electric cylinder to drive the supporting frame to rotate and control the supporting frame to be slightly tilted when it is in the nearly vertical state.

[0010] In some embodiments, the connecting frame has a first axis pivotally connected to the fixing frame, and a second axis pivotally connected to the connecting rod, wherein the second axis is located above the first axis.

[0011] In some embodiments, the first clamping module further includes two first sensors respectively provided on the side arm portions of the clamping arm, and the first sensors are used to detect whether the clamping arm actually clamps the cartridge. The second clamping modules further include two second sensors respectively provided on the side abutment walls of the clamping member, and the second sensors are used to detect whether the clamping member actually clamps the cartridge.

[0012] In some implementations, the first sensor and the second sensor are air lock pressure sensors.

[0013] In some embodiments, the top arm portion of each clamping arm has an inner edge facing the other clamping arm and an outer edge connected to the side arm portion, and each first positioning portion is a notch recessed from the inner edge toward the outer edge.

[0014] In some embodiments, each second positioning portion is a gourd-shaped hole penetrating the top abutment wall and has a small diameter section and a large diameter section with a hole diameter larger than the small diameter section, and the small diameter section is closer to the side abutment wall than the large diameter section.

[0015] The present invention offers the following benefits: users can choose to use either the first or second clamping module to transport the cassette, depending on process requirements, allowing wafers in the cassette to be placed in either a horizontal or vertical position within the baking apparatus. Compared to existing technologies that require two machines to transport the cassette, this reduces the space occupied by the transport equipment in the cleanroom, thereby increasing the available cleanroom space. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Other features and effects of the present invention will be more clearly seen in the following embodiments with reference to the accompanying drawings, in which:

[0017] Figure 1 is a side view schematic diagram of a first clamping module clamping a cassette in an embodiment of a cassette transport device of the present invention;

[0018] Figure 2 is a perspective view of the cassette;

[0019] Figure 3 is a three-dimensional diagram of a partial structure of the first clamping module;

[0020] Figure 4 is a partial perspective view illustrating the relationship between the two clamping arms of the first clamping module and the cassette in the release position;

[0021] Figure 5 is a partial perspective view illustrating the relationship between the two clamping arms of the first clamping module and the cassette in the clamping position;

[0022] Figure 6 It corresponds to Figure 4 A partial side view of

[0023] Figure 7 It corresponds to Figure 5 A partial side view of

[0024] Figure 8 is a partial side view of the second clamping module of the embodiment, showing the clamping member clamping the cassette in a horizontal position;

[0025] Figure 9 is a partial side view schematic diagram of the second clamping module clamping the cassette in a nearly vertical position;

[0026] Figure 10 is a perspective view of a partial structure of the second clamping module;

[0027] Figure 11 is a partial perspective view illustrating the relationship between the two clamping members of the second clamping module and the cassette in the release position;

[0028] Figure 12 is a partial perspective view illustrating the relationship between the two clamping members of the second clamping module and the cassette in the clamping position;

[0029] Figure 13 It corresponds to Figure 11 A partial side view of

[0030] Figure 14 It corresponds to Figure 12 Partial side view of . DETAILED DESCRIPTION

[0031] See Figure 1 and Figure 2 An embodiment of the cassette transport device of the present invention is suitable for transporting a cassette 1 loaded with wafers W, for example, transporting multiple cassettes 1 loaded with wafers W placed in a buffer zone within a workspace one by one to one of multiple baking equipment (not shown) within the workspace. The cassette 1 comprises a bottom wall 11, a top wall 12 opposite the bottom wall 11, two side walls 13 connecting the bottom wall 11 and the top wall 12 and opposing each other, a rear wall 14 connecting the bottom wall 11 and the top wall 12, and a plurality of fixing ears 15 disposed on the top wall 12. The fixing ears 15 are divided into two groups and disposed on the top wall 12 near the side walls 13. In this embodiment, the fixing ears 15 are arranged in two groups, that is, two fixing ears 15 are disposed on each side of the top wall 12 near the side walls 13. Each fixing ear 15 comprises a column 151 connected to the top wall 12 and a head 152 connected to the top end of the column 151 and having an outer diameter larger than that of the column 151. The cassette transport device includes a moving module 2 , a first clamping module 3 and a second clamping module 4 .

[0032] The mobile module 2 includes a base 21 and a rotating shaft 22 provided on the base 21. The base 21 can be driven to move horizontally in a first direction D1. The rotating shaft 22 can be driven to move horizontally in a second direction D2 perpendicular to the first direction D1, to move up and down in a vertical direction D3, and to rotate around its own axis. In other words, the rotating shaft 22 can move in four axes. In this embodiment, the base 21 is provided along the first direction D1 (e.g. Figure 1 The rotating shaft 22 is arranged on the base 21 so as to be movable in the second direction D2 (shown as the left and right direction). Figure 1 The base 21 and the rotating shaft 22 can be driven by the existing technology and thus will not be described in detail.

[0033] See Figure 1 、 Figure 3 and Figure 8The first clamping module 3 is used to clamp the cassette 1 so that the wafer W is moved in a generally horizontal position. The first clamping module 3 includes a first connection unit 31 fixedly connected to the rotating shaft 22, two clamping arms 32 facing each other and movably connected to the first connection unit 31, and two first sensors 33 respectively provided on the clamping arms 32.

[0034] The first connecting unit 31 includes a carrier 311 connected to the rotating shaft 22, a mounting frame 312 pivotally connected to the carrier 311, and a tilt drive mechanism 313 disposed on the carrier 311 and configured to drive the mounting frame 312 to swing at an inclination angle α. The mounting frame 312 includes a main frame 314 connected to the clamping arm 32, a pivoting base 315 connected to the main frame 314, and a linkage plate 316 connected to the main frame 314. The main frame 314 is provided with two first slide rails 314a and two pneumatic cylinders 314b located on the left and right sides of the pivoting base 315. The first slide rails 314a are respectively mounted on the clamping arms 32, allowing them to slide along the first slide rails 314a. The pneumatic cylinders 314b are configured to drive the clamping arms 32. The pivoting base 315 has a pivot 315a pivotally connected to the carrier 311. The linkage plate 316 is located below the pivot 315a and is connected to the tilt drive mechanism 313. In this embodiment, the tilt drive mechanism 313 comprises a pneumatic cylinder 313a, an adjustment bolt assembly 313b connecting the pneumatic cylinder 313a and the linkage plate 316, and two tension springs 313c connecting the support frame 311 and the linkage plate 316 (only the one located on the front side of the support frame 311 is shown; there is also one located on the rear side). The pneumatic cylinder 313a drives the adjustment bolt assembly 313b to push against the linkage plate 316. The tension springs 313c tightly pull the linkage plate 316, keeping it firmly against the bottom side of the support frame 311. The tilt drive mechanism 313 drives the linkage plate 316, allowing the mounting frame 312 to swing up and down at an inclination angle α about the pivot 315a. In this embodiment, the inclination angle α is about 5-7 degrees.

[0035] The clamping arm 32 is connected to the mounting bracket 312 and is linked to the mounting bracket 312 so as to be able to be placed in a horizontal position (such as Figure 4 、 5 As shown) and the clamping arm 32 is in a tilted carrying state (as shown Figure 1When the clamping arms 32 clamp the cassette 1 and are in the carrying state, the wafer W in the cassette 1 can be slightly tilted against the rear wall 14. This ensures that the wafer W will not fall out of the cassette 1 during the movement of the cassette 1. The clamping arms 32 can be driven to a clamping position (as shown) that is relatively close to each other to clamp the cassette 1. Figure 5 ) and a release position (as shown) relatively far away from each other to release the cartridge 1. Figure 4 Each clamping arm 32 has a top arm portion 321 for abutting against the top wall 12, and a side arm portion 322 for abutting against the corresponding side wall 13. The top arm portion 321 is provided with a plurality of first positioning portions 323 corresponding to the fixed clamping ears 15. In this embodiment, the top arm portion 321 of each clamping arm 32 has an inner edge 321a facing the other clamping arm 32, and an outer edge 321b connected to the side arm portion 322. Each first positioning portion 323 is a notch recessed from the inner edge 321a to the outer edge 321b. Figure 4 and Figure 5 Each first positioning portion 323 is used to accommodate the column 151 of the corresponding fixed clamping ear 15, and to make the head 152 of the corresponding fixed clamping ear 15 be located above the top arm portion 321. Figure 5 When the cartridge 1 is positioned as shown in FIG2 , the side arm portions 322 of the clamping arm 32 respectively abut against the corresponding side walls 13 of the cartridge 1, and the first positioning portions 323 of the clamping arm 32 respectively receive the columns 151 of the fixed clamping ears 15, thereby positioning the cartridge 1 in the front-to-back and left-to-right directions. Simultaneously, the top arm portion 321 of the clamping arm 32 abuts against the top wall 12 of the cartridge 1 and is positioned between the top wall 12 and the head portion 152 of the fixed clamping ear 15, thereby positioning the cartridge 1 in the vertical direction. Thus, the clamping arm 32 can stably clamp the cartridge 1, preventing it from moving relative to the clamping arm 32.

[0036] See Figure 3 、 Figure 6 and Figure 7 The first sensors 33 are respectively provided on the side arm portions 322 of the clamping arms 32 to detect whether the clamping arms 32 are actually clamping the cartridge 1. In this embodiment, the first sensors 33 are air plug pressure sensors, and each has a first air plug nozzle 331. The first air plug nozzles 331 of the first sensors 33 are respectively located on the inner side of the side arm portions 322. Figure 6 and Figure 7As shown, when the clamping arm 32 is indeed located at the clamping position to clamp the cartridge 1, the first air plug nozzle 331 of the first sensor 33 respectively abuts against the two side walls 13 of the cartridge 1, thereby generating a pressure difference, thereby confirming that the clamping arm 32 is exactly against the cartridge 1.

[0037] See Figures 8 to 10 The second clamping module 4 is used to clamp and rotate the cassette 1 to move the wafer W from a horizontal position to a substantially vertical position. The second clamping module 4 includes a second connecting unit 41 fixedly connected to the rotating shaft 22 and located on the opposite side of the first clamping module 3, two clamping members 42 facing each other and movably connected to the second connecting unit 41, and two second sensors 43 respectively provided on the clamping members 42.

[0038] The second connecting unit 41 has a fixing frame 411 connected to the rotating shaft 22, and a rotating mechanism 412 pivotally connected to the fixing frame 411. The rotating mechanism 412 can be controlled to drive the clamping member 42 in a horizontal state (such as Figure 8 As shown) and a nearly vertical state (as Figure 9 The rotating mechanism 412 comprises a supporting frame 413 connected to the clamping member 42, a connecting frame 414 connected to the supporting frame 413 and pivotally connected to the fixing frame 411, a connecting rod 415 pivotally connected to the connecting frame 414, and an electric cylinder 416 connected to the connecting rod 415. The connecting frame 414 comprises a first shaft 414a pivotally connected to the fixing frame 411, and a second shaft 414b pivotally connected to the connecting rod 415, wherein the second shaft 414b is located above the first shaft 414a. The connecting rod 415 is driven by the electric cylinder 416 to drive the supporting frame 413 to rotate and control the supporting frame 413 to tilt slightly when in the nearly vertical state. Figure 8 The clamping member 42 clamps the cassette 1 and when in the horizontal state, the wafers W in the cassette 1 are placed horizontally. Figure 9 The clamping member 42 clamps the cassette 1 and in the nearly vertical position, the rear wall 14 of the cassette 1 is located at the bottom and the side close to the bottom wall 11 is lower than the side close to the top wall 12, so that the wafers W in the cassette 1 are placed in a roughly vertical position and lean against the side close to the bottom wall 11 to prevent the wafers W from colliding with each other. Figure 10 In this embodiment, the support frame 413 has two second slide rails 413a and two pneumatic cylinders 413b located on the left and right sides of the connecting frame 414. The second slide rails 413a are respectively provided for the clamping members 42 to slide along the second slide rails 413a. The pneumatic cylinders 413b are used to drive the clamping members 42.

[0039] See Figures 10 to 12The clamping member 42 is connected to the rotating mechanism 412 and can be driven to a clamping position (such as Figure 12 ) and a release position (as shown) relatively far away from each other to release the cartridge 1. Figure 11 (as shown) conversion. Each clamping member 42 has a top abutting wall 421 for abutting against the top wall 12, and a side abutting wall 422 for abutting against the corresponding side wall 13, and the top abutting wall 421 is provided with a plurality of second positioning portions 423 corresponding to the fixed clip ears 15. In this embodiment, each second positioning portion 423 is a gourd-shaped hole passing through the top abutting wall 421 and has a small diameter section 423a and a large diameter section 423b with a hole diameter larger than the small diameter section 423a. The small diameter section 423a is closer to the side abutting wall 422 than the large diameter section 423b. The large diameter section 423b is used for allowing the head 152 of the corresponding fixed clip ear 15 to pass through, and the small diameter section 423a is used to accommodate the column 151 of the corresponding fixed clip ear 15. See Figure 11 When the clamping member 42 is in the released position, the large diameter sections 423b of the second positioning portion 423 are positioned corresponding to the fixing ears 15, allowing the heads 152 of the fixing ears 15 to pass through. When the abutting wall 421 of the clamping member 42 abuts against the top wall 12 of the cartridge 1, the heads 152 of the fixing ears 15 can completely pass through the large diameter sections 423b of the second positioning portion 423 and extend out of the abutting wall 421 of the clamping member 42. Figure 12 , and then the clamping members 42 are moved toward each other to the clamping position. When the clamping members 42 are in this clamping position, the side abutment walls 422 of the clamping members 42 respectively abut the corresponding side walls 13 of the cassette 1, and the small-diameter sections 423a of the second positioning portions 423 of the clamping members 42 respectively accommodate the columns 151 of the fixed clamping ears 15, thereby positioning the cassette 1 in the front-to-back and left-to-right directions. Simultaneously, the top abutment walls 421 of the clamping members 42 abut against the top wall 12 of the cassette 1 and are located between the top wall 12 and the heads 152 of the fixed clamping ears 15, thereby positioning the cassette 1 in the vertical direction. Thus, the clamping members 42 can stably clamp the cassette 1, preventing it from moving relative to the clamping members 42.

[0040] See Figure 10 、 Figure 13 and Figure 14 The second sensors 43 are respectively provided on the side walls 422 of the clamping member 42 to detect whether the clamping member 42 is actually clamping the cartridge 1. In this embodiment, the second sensors 43 are air plug pressure sensors, and each has a second air plug nozzle 431. The second air plug nozzles 431 of the second sensors 43 are respectively located on the inner side of the side walls 422. Figure 13 and Figure 14When the clamping member 42 is indeed located at the clamping position to clamp the cassette 1, the second air plug nozzles 431 of the second sensor 43 respectively abut against the two side walls 13 of the cassette 1, so as to generate a pressure difference, thereby confirming that the clamping member 42 has indeed abutted against the cassette 1.

[0041] The first clamping module 3 and the second clamping module 4 are connected with the rotating shaft 22, and can be displaced in four directions. According to the process requirement, the user can select to use the first clamping module 3 or the second clamping module 4 to transport the cassette 1, so as to place the wafer W in the cassette 1 in a horizontal or vertical state in the baking equipment.

[0042] In summary, the cassette transporting device of the present application can select to use the first clamping module 3 or the second clamping module 4 to transport the cassette 1 according to the process requirement, so as to place the wafer W in the cassette 1 in a horizontal or vertical state in the baking equipment. Compared with the prior art which needs to use two machines to transport the cassette 1, the space occupied by the transporting device in the clean room can be reduced, so as to increase the available space in the clean room.

[0043] The above description is only an embodiment of the present application, and cannot limit the scope of the present application. Any simple equivalent change and modification made according to the claims and description of the present application still belongs to the scope of the present application.

Claims

1. A cassette transport device suitable for transporting a cassette loaded with wafers, the cassette comprising a bottom wall, a top wall opposite the bottom wall, two side walls connecting the bottom wall and the top wall and opposing each other, a rear wall connecting the bottom wall and the top wall, and a plurality of fixing ears provided on the top wall, the fixing ears being divided into two groups and disposed on the top wall near the side walls, characterized in that: The cassette transport device comprises: The mobile module includes a base and a rotating shaft provided on the base, wherein the base can be driven to move horizontally in a first direction, and the rotating shaft can be driven to move horizontally in a second direction perpendicular to the first direction, to rise and fall in a vertical direction, and to rotate about its own axis; A first clamping module is configured to clamp the cassette so that the wafers are moved in a generally horizontal position. The first clamping module includes a first connecting unit fixedly connected to the rotating shaft, and two clamping arms that are opposite to each other and movably connected to the first connecting unit. The clamping arms can be driven to switch between a clamping position in which they are relatively close to each other to clamp the cassette and a release position in which they are relatively far apart to release the cassette. Each clamping arm has a top arm portion for abutting against the top wall and a side arm portion for abutting against a corresponding side wall. The top arm portion is provided with a plurality of first positioning portions that respectively correspond to the fixed clamping ears. and The second clamping module is used to clamp and rotate the cassette so that the wafer can be moved from a horizontal placement state to a roughly vertical placement state. The second clamping module includes a second connection unit fixedly connected to the rotating shaft and located on the opposite side of the first clamping module, and two clamping members that are opposite to each other and movably connected to the second connection unit. The second connection unit has a fixed frame connected to the rotating shaft and a rotating mechanism pivotally connected to the fixed frame. The clamping members are connected to the rotating mechanism and can be driven to switch between a clamping position relatively close to each other to clamp the cassette and a release position relatively away from each other to release the cassette. Each clamping member has a top abutting wall for abutting the top wall and a side abutting wall for abutting the corresponding side wall, and the top abutting wall is provided with a plurality of second positioning portions that respectively correspond to the fixed clamping ears.

2. The cassette transport device according to claim 1, wherein: The first connecting unit has a carrier connected to the rotating shaft, a mounting frame pivotally connected to the carrier, and a tilting drive mechanism provided on the carrier and used to drive the mounting frame to swing at an inclination angle. The clamping arm is connected to the mounting frame and is linked by the mounting frame to be able to switch between a horizontal picking and placing state in which the clamping arm is horizontal and a tilted carrying state in which the clamping arm is tilted. When the clamping arm clamps the cassette and is in the carrying state, the wafer in the cassette can be slightly tilted against the rear wall.

3. The cassette transport device according to claim 2, wherein: The mounting frame includes a main frame connected to the clamping arm, a pivotal seat connected to the main frame, and a linkage plate connected to the main frame. The pivotal seat has a pivot pivotally connected to the supporting frame. The linkage plate is located below the pivot and connected to the tilting drive mechanism. The tilting drive mechanism drives the linkage plate, so that the mounting frame can swing up and down at the inclination angle with the pivot as the axis.

4. The cassette transport device according to claim 1, wherein: The rotating mechanism can be controlled to drive the clamping member to switch between a horizontal state and a nearly vertical state. The clamping member clamps the cassette and when in the horizontal state, the wafers in the cassette are placed horizontally. The clamping member clamps the cassette and when in the nearly vertical state, the rear wall of the cassette is located below and is lower than the side close to the bottom wall and lower than the side close to the top wall, so that the wafers in the cassette are placed roughly vertically and lean against the bottom wall to avoid collision between the wafers.

5. The cassette transport device according to claim 4, wherein: The rotating mechanism includes a supporting frame connected to the clamping member, a connecting frame connected to the supporting frame and pivotally connected to the fixing frame, a connecting rod pivotally connected to the connecting frame, and an electric cylinder connected to the connecting rod. The connecting rod is driven by the electric cylinder to drive the supporting frame to rotate and control the supporting frame to tilt slightly when it is in the nearly vertical state.

6. The cassette transport device according to claim 5, wherein: The connecting frame body has a first axis pivotally connected to the fixing frame, and a second axis pivotally connected to the connecting rod, wherein the second axis is located above the first axis.

7. The cassette transport device according to claim 1, wherein: The first clamping module also includes two first sensors respectively arranged on the side arm parts of the clamping arm, and the first sensors are used to detect whether the clamping arm actually clamps the cartridge. The second clamping module also includes two second sensors respectively arranged on the side walls of the clamping member, and the second sensors are used to detect whether the clamping member actually clamps the cartridge.

8. The cassette transport device according to claim 7, wherein: The first sensor and the second sensor are air lock pressure sensors.

9. The cassette transport device according to claim 1, wherein: The top arm portion of each clamping arm has an inner edge facing the other clamping arm and an outer edge connected to the side arm portion, and each first positioning portion is a notch recessed from the inner edge toward the outer edge.

10. The cassette transport device according to claim 1, wherein: Each second positioning portion is a gourd-shaped hole penetrating the top abutment wall and has a small diameter section and a large diameter section with a hole diameter larger than the small diameter section. The small diameter section is closer to the side abutment wall than the large diameter section.

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