Perovskite cell preparation system

Abstract

The invention discloses a perovskite cell preparation system, and relates to the technical field of solar cells, and the system comprises a total reaction chamber which is of a cavity structure with an accommodation space, and the accommodation space of the total reaction chamber is used for forming vacuum; the sub reaction cavities are of cavity structures used for containing materials, the number of the sub reaction cavities is multiple, and all the sub reaction cavities are arranged in the total reaction cavity and communicate with the total reaction cavity; and the rotary tray is arranged in the total reaction chamber in a manner of rotating around the axis of the rotary tray, the sample wafer is placed on the rotary tray, and the sample wafer is switched among the sub-reaction chambers by rotating the rotary tray, so that the sample wafer is subjected to different process treatments. According to the perovskite cell preparation system provided by the invention, the sample wafer is conveyed in each sub-reaction cavity by rotating the rotating tray around the axis of the rotating tray, and the whole process treatment is always carried out in one vacuum cavity, so that the sample wafer is prevented from being polluted in the whole transportation process.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cells, and in particular to a perovskite cell preparation system. Background Art

[0002] The traditional material preparation method consists of a complete process flow consisting of multiple discrete process equipment. Between the process flows, the cavity is converted through the transportation process of the sample. However, in the process of preparing perovskite solar cells, the organic metal halides in the perovskite are greatly affected by water and oxygen and are easily decomposed under natural conditions, which will cause the battery efficiency to decay rapidly or even fail. Therefore, the research on perovskite materials needs to be isolated from the pollution of water, oxygen and air impurities. As a result, the traditional material preparation method requires users to design and build a complete vacuum system by themselves to realize the automatic transmission of samples in a high vacuum environment between different chambers.

[0003] One of the existing technical solutions is the glove box transmission system, but on the one hand, this solution is expensive due to the complex vacuum system and the transmission system in the vacuum. On the other hand, the threshold for the user to integrate the discrete equipment through design is very high, and a professional team must be required to complete the design, installation and maintenance. The other is the cluster process preparation equipment, but each process station in this solution is still an independent operating system, including its own independent vacuum system. In addition, the traditional cluster equipment uses a manipulator to transfer samples between the central transmission room and each chamber. The transmission process is prone to fragmentation, so the transmission efficiency and stability of the manipulator are required to be high. In addition, since the tray must pass through the transfer chamber every time it is transferred between the chambers, it not only increases the workload of the manipulator, reduces the service life of the manipulator, but also increases the transmission time (10s to 20s). In addition, it is difficult to maintain a high vacuum degree during the manipulator transmission process, which is easy to affect the thin film interface of the sample, and has a high cost and is not easy to maintain.

[0004] Therefore, how to achieve efficient preparation of perovskite solar cells while reducing production costs is a technical problem that technicians in this field currently need to solve. Summary of the invention

[0005] The object of the present invention is to provide a perovskite battery preparation system, which can achieve efficient preparation of perovskite solar cells while reducing production costs.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] A perovskite battery preparation system, comprising:

[0008] The total reaction chamber is a cavity structure having a containing space, and the containing space of the total reaction chamber is used to form a vacuum;

[0009] The sub-reaction chamber is a chamber structure for holding materials. There are multiple sub-reaction chambers, and each of the sub-reaction chambers is arranged in the main reaction chamber and communicated with the main reaction chamber;

[0010] A rotating tray is rotatable around its own axis and is arranged in the main reaction chamber, and the sample is placed on the rotating tray. By rotating the rotating tray, the sample is switched between the sub-reaction chambers, so that the sample is subjected to different process treatments.

[0011] Optionally, the first end of the sub-reaction chamber is connected to the bottom of the main reaction chamber, the second end of the sub-reaction chamber is provided with a connecting hole connecting the main reaction chamber with the inner cavity of the sub-reaction chamber, the rotating tray is arranged at the top of the second end of the sub-reaction chamber, and the rotating tray is provided with a sample placement groove for placing the sample, and the bottom of the sample placement groove is provided with a through hole matching the connecting hole.

[0012] Optionally, in the above-mentioned perovskite battery preparation system, the sample placement groove is configured as a step hole structure to form the through hole, and the edge of the sample is supported on the step of the step hole structure.

[0013] Optionally, in the above-mentioned perovskite battery preparation system, the multiple sub-reaction chambers are evenly distributed on the same circumference with the axis of the rotating tray as the center, the center of the circumference where the through hole is located and the center of the circumference where the connecting hole is located are both located on the axis of the rotating tray and the diameters of the two circles are the same.

[0014] Optionally, in the above-mentioned perovskite battery preparation system, the number of the sample placement slots is set to one, or the number of the sample placement slots is the same as the number of the sub-reaction chambers, and one sample placement slot corresponds to one sub-reaction chamber.

[0015] Optionally, in the above-mentioned perovskite battery preparation system, the sub-reaction chamber includes a first sub-reaction chamber, a second sub-reaction chamber, a third sub-reaction chamber and a fourth sub-reaction chamber, and the first sub-reaction chamber can be used for a spraying process, the second sub-reaction chamber can be used for an atomic deposition process, the third sub-reaction chamber can be used for a thermal evaporation process, and the fourth sub-reaction chamber can be used for a physical vapor deposition process.

[0016] Optionally, in the above-mentioned perovskite battery preparation system, the sub-reaction chamber is detachably mounted on the main reaction chamber via a flange structure.

[0017] Optionally, in the above-mentioned perovskite battery preparation system, a material platform for containing materials is provided in the inner cavity of the sub-reaction chamber.

[0018] Optionally, in the above perovskite battery preparation system, the overall reaction chamber comprises:

[0019] A cavity, wherein the top of the cavity has an opening;

[0020] A chamber cover is hinged to the main reaction chamber so as to cover the opening by rotating the chamber cover.

[0021] Optionally, in the above-mentioned perovskite battery preparation system, a pressing plate is also provided, one end of which is rotatably connected to the rotating tray, so as to press and fix or release the sample on the rotating tray by rotating the pressing plate.

[0022] In the perovskite battery preparation system provided by the present invention, each sub-reaction chamber for completing the preparation of different functional layer films and a rotating tray for placing samples are arranged in the main reaction chamber, and by rotating the rotating tray around its own axis, the samples placed on the rotating tray can be switched between the sub-reaction chambers, thereby realizing the transportation of the samples and completing different process processing of the samples. The main reaction chamber is in a vacuum state after vacuum treatment, and the sub-reaction chamber is connected to the main reaction chamber, so that the entire process treatment and the transportation of the samples are always operated in a vacuum chamber, and the whole process maintains a high vacuum degree, effectively isolating water and oxygen, and preventing the samples from being contaminated during the entire transportation process. Compared with the glove box transmission system in the prior art, the perovskite battery preparation system provided by the present invention has a simple and efficient overall structural design, is easy to install, use and maintain, and significantly reduces production costs. Compared with the existing cluster process preparation equipment equipped with a manipulator, the perovskite battery preparation system provided by the present invention can realize the switching of samples between various sub-reaction chambers through a rotating rotating tray, and does not need to use a manipulator to clamp the samples for transfer between different process chambers and the intermediate transmission chamber. The rotating tray has a fast operation response, saves transfer time, improves preparation efficiency, has good protection capabilities for the samples, is not easy to cause fragments, and has high reliability and stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0024] Figure 1 A schematic diagram of the structure of a perovskite battery preparation system disclosed in an embodiment of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of the cavity cover disclosed in an embodiment of the present invention.

[0026] Reference numerals:

[0027] 100 is the main reaction chamber, 110 is the chamber body, 120 is the chamber cover, and 130 is the telescopic support rod;

[0028] 200 is a sub-reaction chamber, 210 is a first sub-reaction chamber, 220 is a second sub-reaction chamber, 230 is a third sub-reaction chamber, 240 is a fourth sub-reaction chamber, and 250 is a material platform;

[0029] 300 is a rotating tray, and 310 is a sample placement slot;

[0030] 10 is a sample. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0034] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by the terms "up", "down", "front", "back", "left", "right", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] The core of the present invention is to provide a perovskite battery preparation system, which can achieve efficient preparation of perovskite solar cells while reducing production costs.

[0037] like Figure 1 As shown, an embodiment of the present invention discloses a perovskite battery preparation system, including a total reaction chamber 100, a sub-reaction chamber 200 and a rotating tray 300. The total reaction chamber 100 is a cavity structure with a storage space, and the total reaction chamber 100 is connected to a vacuum system, so that the storage space of the entire total reaction chamber 100 is in a vacuum state, and the sub-reaction chamber 200 and the rotating tray 300 are both arranged in the total reaction chamber 100 in a vacuum state, and the sub-reaction chamber 200 is also a cavity structure with a storage space and is connected to the total reaction chamber 100. The materials required for different process treatments are placed in the inner cavity of the sub-reaction chamber 200, and the rotating tray 300 for carrying the sample 10 can be rotatably arranged around its own axis in the total reaction chamber 100, and the rotating tray 300 can be rotated around its own axis through a rotating mechanism (such as The rotary tray 300 is connected to a motor to realize the rotation of the rotary tray 300 in the horizontal plane, so that the sample 10 can be quickly transported between the sub-reaction chambers 200 through the rotation of the rotary tray 300, and different process treatments of the sample 10 are completed. Each process treatment and the transportation of the sample 10 are always operated in the same vacuum chamber environment. The whole process maintains a high vacuum degree, effectively isolates water and oxygen, prevents the sample 10 from being contaminated during the whole transportation process, shortens the transportation process time of the sample 10, and is conducive to ensuring the stability of the surface physical properties of the sample 10. The full vacuum one-time automated preparation of the entire perovskite battery process is realized through programming, which effectively reduces manual operation and environmental pollution.

[0038] like Figure 1As shown, the first end of the sub-reaction chamber 200 is installed at the bottom of the main reaction chamber 100, so that each sub-reaction chamber 200 is stably fixed in the main reaction chamber 100. The second end of the sub-reaction chamber 200 is provided with a connecting hole, and the inner cavity of the sub-reaction chamber 200 is connected with the inner cavity of the main reaction chamber 100 through the connecting hole, so that the inner cavity of the sub-reaction chamber 200 is also in a vacuum state, and the rotating tray 300 is arranged on the top of the second end of the sub-reaction chamber 200, and the rotating tray 300 is arranged on the top of the second end of the sub-reaction chamber 200. 0 is provided with a sample placement groove 310, and the sample is placed in the sample placement groove 310, so that the rotating tray 300 can carry the sample 10, so that the sample 10 has good stability during the rotation of the rotating tray 300. At the same time, a through hole is provided at the bottom of the sample placement groove 310, so that when the rotating tray 300 is rotated so that the through hole of the sample placement groove 310 corresponds to the connecting hole of the sub-reaction chamber 200, the material in the sub-reaction chamber 200 is placed and the surface process of the sample 10 is processed. Of course, it can be understood that the diameter of the through hole needs to be smaller than the diameter of the sample 10 to prevent the sample 10 from falling through the through hole.

[0039] In a specific embodiment, the sample placement groove 310 of the rotating tray 300 is a step hole structure. When the sample 10 is placed in the sample placement groove 310, the edge of the sample 10 is attached to the step to support the sample 10, and the surrounding walls of the step hole groove can radially position the sample 10, thereby improving the accuracy and stability of the installation position of the sample 10.

[0040] like Figure 1 As shown, each sub-reaction chamber 200 is evenly spaced and arranged on the same circumference, the center of the circumference where the sub-reaction chamber 200 is located is located on the axis of the rotating tray 300, and each sub-reaction chamber 200 is symmetrically distributed with the center of the circle as the symmetry center, and at the same time, the center of the circumference where the through hole is located and the center of the circumference where the connecting hole is located are both located on the axis of the rotating tray 300, and the diameter of the circumference where the through hole is located is the same as the diameter of the circumference where the connecting hole is located, so that the connecting hole of the sub-reaction chamber 200 and the through hole of the sample placement groove 310 are matched through the rotation of the rotating tray 300, and the efficiency of the rotating tray 300 in transporting the sample 10 between each sub-reaction chamber 200 is improved through the uniform and symmetrical arrangement.

[0041] In another specific embodiment, the number of sample placement slots 310 on the rotating tray 300 can be set to one, and the rotating tray 300 can be rotated to allow one sample 10 to be transported between each sub-reaction chamber 200 to complete different process treatments. Alternatively, multiple sample placement slots 310 are provided, and the number of sample placement slots 310 is the same as the number of sub-reaction chambers 200, and one sample placement slot 310 corresponds to one sub-reaction chamber 200, so that multiple samples 10 can be carried on one rotating tray 300 at the same time, and each sample 10 is transported in turn between each sub-reaction chamber 200, so that the process treatment of multiple samples 10 can be completed at one time, which significantly improves the preparation efficiency of solar cells.

[0042] like Figure 1 As shown, the perovskite battery preparation system provided in this embodiment is provided with a first sub-reaction chamber 210, a second sub-reaction chamber 220, a third sub-reaction chamber 230 and a fourth sub-reaction chamber 240, a total of four sub-reaction chambers 200. Among them, the first sub-reaction chamber 210 is a spraying process for the preparation of the absorption layer perovskite film, the second sub-reaction chamber 220 is an atomic deposition process (ALD, Atomic Layer Deposition) that can achieve atomic layer precision film thickness control, and can be used for the preparation of functional layers such as charge transport layers and insulating layers, the third sub-reaction chamber 230 is a thermal evaporation process, which is used for the traditional process of preparing charge transport layers and metal electrode layers, and the fourth sub-reaction chamber 240 is a physical vapor deposition process (Physical Vapor Deposition, PVD), which can meet the needs of the process for the preparation of various thin films, such as transparent electrodes, metal electrodes, etc.

[0043] In some embodiments, each sub-reaction chamber 200 is connected to the main reaction chamber 100 through the same interface flange structure, so that the sub-reaction chamber 200 is detachable, thereby facilitating later replacement and maintenance. The same interface flange structure improves the convenience of installation and maintenance, and also has the benefit of reducing the production cost of the entire equipment.

[0044] like Figure 1 As shown, a material platform 250 is also provided in the inner cavity of each sub-reaction chamber 200, so that during process treatment, materials required for the relevant process can be placed on the material platform 250 to ensure that the materials are stably placed in the sub-reaction chamber 200, thereby ensuring the smooth and efficient implementation of each process, which is beneficial to improving the reliability and stability of process treatment.

[0045] like Figure 1 and Figure 2As shown, the main reaction chamber 100 includes a chamber body 110 and a chamber cover 120. The top of the chamber body 110 has an opening. The rotating tray 300 and the sub-reaction chamber 200 can be installed in the chamber body 110 of the main reaction chamber 100 through the opening, and are arranged in a ring surrounded by the opening to facilitate the operation of the rotating tray 300 and each sub-reaction chamber 200. The chamber cover 120 is hingedly mounted on the main reaction chamber 100 so that it can be flipped. The flipping of the chamber cover 120 can realize the rotation of the main reaction chamber 100. The opening and sealing of the opening of the total reaction chamber 100, the placement and removal of the components in the cavity 110, and the sealing of the cavity 110 of the total reaction chamber 100 maintain a vacuum state, and a telescopic support rod 130 is also arranged between the cavity cover 120 and the total reaction chamber 100. After the cavity cover 120 is flipped open, the support of the telescopic support rod 130 makes the cavity cover 120 in a stable open state, and there is no need for the worker to hold the cavity cover 120 by hand, which facilitates the operation of the worker. In addition, the heating component that generates heat for the process can be arranged on the inner wall of the cavity cover 120 to heat the sample 10 on the rotating tray 300. By arranging the heating component on the inner wall of the cavity cover 120, the compactness of the structure is improved and the integration is high. Of course, the heating component can also be arranged at other positions of the total reaction chamber 100, as long as it can achieve heating of the sample 10 and the sub-reaction cavity 200.

[0046] In some embodiments, in order to improve the stability of the sample 10 placed on the rotating tray 300, a pressing sheet is provided on the rotating tray 300, and one end of the pressing sheet can be rotatably mounted on the rotating tray 300. Before placing the sample 10 or when taking out the sample 10, the pressing sheet is rotated to the inside of the rotating tray 300. After placing the sample 10, the pressing sheet is rotated to the top of the sample 10 for pressing and fixing. During the process of transporting the sample 10 by rotating the rotating tray 300, the sample 10 is ensured to have good stability.

[0047] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0048] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A perovskite battery preparation system, characterized in that: include: The total reaction chamber is a cavity structure having a containing space, and the containing space of the total reaction chamber is used to form a vacuum; The sub-reaction chamber is a chamber structure for holding materials. There are multiple sub-reaction chambers, and each of the sub-reaction chambers is arranged in the main reaction chamber and communicated with the main reaction chamber; A rotating tray is rotatable around its own axis and is arranged in the main reaction chamber, and the sample is placed on the rotating tray. By rotating the rotating tray, the sample is switched between the sub-reaction chambers, so that the sample is subjected to different process treatments.

2. The perovskite battery preparation system according to claim 1, characterized in that: The first end of the sub-reaction chamber is connected to the bottom of the main reaction chamber, and the second end of the sub-reaction chamber is provided with a connecting hole connecting the main reaction chamber with the inner cavity of the sub-reaction chamber. The rotating tray is arranged on the top of the second end of the sub-reaction chamber, and the rotating tray is provided with a sample placement groove for placing the sample, and the bottom of the sample placement groove is provided with a through hole matching the connecting hole.

3. The perovskite battery preparation system according to claim 2, characterized in that: The sample placement groove is configured as a stepped hole structure to form the through hole, and the edge of the sample is supported on the step of the stepped hole structure.

4. The perovskite battery preparation system according to claim 2, characterized in that: The plurality of sub-reaction chambers are evenly distributed on the same circumference with the axis of the rotating tray as the center, the center of the circle where the through hole is located and the center of the circle where the connecting hole is located are both located on the axis of the rotating tray and the diameters of the two circles are the same.

5. The perovskite battery preparation system according to claim 4, characterized in that: The number of the sample placement slots is set to one, or the number of the sample placement slots is the same as the number of the sub-reaction chambers, and one sample placement slot corresponds to one sub-reaction chamber.

6. The perovskite battery preparation system according to claim 1, characterized in that: The sub-reaction chamber includes a first sub-reaction chamber, a second sub-reaction chamber, a third sub-reaction chamber and a fourth sub-reaction chamber, and the first sub-reaction chamber can be used for a spraying process, the second sub-reaction chamber can be used for an atomic deposition process, the third sub-reaction chamber can be used for a thermal evaporation process, and the fourth sub-reaction chamber can be used for a physical vapor deposition process.

7. The perovskite battery preparation system according to claim 1, characterized in that: The sub-reaction chamber is detachably mounted on the main reaction chamber via a flange structure.

8. The perovskite battery preparation system according to claim 1, characterized in that: A material platform for containing materials is arranged in the inner cavity of the sub-reaction cavity.

9. The perovskite battery preparation system according to any one of claims 1 to 8, characterized in that: The overall reaction chamber comprises: A cavity, wherein the top of the cavity has an opening; A chamber cover is hinged to the main reaction chamber so as to cover the opening by rotating the chamber cover.

10. The perovskite battery preparation system according to any one of claims 1 to 8, characterized in that: A pressing sheet is also provided, one end of which is rotatably connected to the rotating tray, so that the sample on the rotating tray can be pressed and fixed or released by rotating the pressing sheet.

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