Gas driving device capable of being adjusted in grading mode and sintering equipment applying gas driving device

By designing a step-by-step adjustable air drive device, the problems of cumbersome adjustment of dynamic pressure head systems and limited sintering pressure range in the prior art are solved, and flexible pressure adjustment and high flexibility operation are achieved.

CN119457072AInactive Publication Date: 2025-02-18SUZHOU BOSCHMAN SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Application Number
CN202510072509.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-17
Publication Date
2025-02-18
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

In the prior art, the dynamic head system needs to be adjusted according to the product, and the sintering pressure range provided by the piston module is limited and cannot be adjusted, resulting in troublesome operation and poor flexibility.

Method used

A stepwise adjustable air drive device is designed, including a base, a first drive assembly, a reset assembly and a thrust rod assembly, and the stepwise adjustment of pressure is achieved through a nested multiple drive pistons and reset pistons.

Benefits of technology

The device can meet the pressurization needs of different scenarios, improve application flexibility, reduce deployment costs, facilitate operation and strong flexibility.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a gas driving device capable of being adjusted in a grading mode and sintering equipment applying the gas driving device. The gas driving device comprises a base, a first driving assembly, a reset assembly and a thrust rod assembly. The first driving assembly comprises a plurality of driving pistons which are arranged in a nested mode, the reset assembly comprises a plurality of sets of reset pistons corresponding to the driving pistons, the thrust rod assembly comprises a plurality of sets of thrust rods corresponding to the driving pistons, and one set of thrust rods corresponding to each driving piston and one set of reset pistons are arranged in a staggered mode. The pressure corresponding to each driving piston can be adjusted, the pressure of each driving piston can be transmitted through the corresponding thrust rod, and each driving piston is reset through the corresponding reset assembly, so that the pressurization requirements of different products and the pressurization requirements of the same product in different steps can be met, the application flexibility of the device is improved, and the application range of the device is widened. Deployment cost is reduced, operation is convenient, and flexibility is high.
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Description

Technical Field

[0001] The invention relates to the technical field of pneumatic drive devices and pressure sintering, and in particular to a gas drive device capable of being adjusted in stages and sintering equipment using the same. Background Art

[0002] With the increasing demand in the electronics industry, electronic products are developing in the direction of light weight, thin thickness, small size, low power consumption, multiple functions and high reliability. This requires the power module to have excellent thermal and electrical conductivity and long-term working reliability both in transient and steady state. The reduction in the size of the power module has caused the increase in module and chip current, terminal voltage and input power, which has brought a series of problems such as temperature drift and high temperature, which will seriously affect the reliability of power devices and accelerate the aging of devices. In order to solve the problems faced by high-temperature and high-power devices, nanosilver sintering technology has received more and more research and attention in recent years, resulting in the corresponding pressure sintering process and sintering equipment.

[0003] Pressure sintering technology mainly refers to the process of sintering electronic components such as chips and sensors onto AMB (Active Metal Brazing) circuit boards, DBC (Direct Bonded Copper) or lead frames using nanosilver or copper as a bonding layer at a suitable temperature, pressure and time. The products to be sintered often have several chips or electronic components of different thicknesses. Even if the same chips or electronic components are used, there will be height differences due to processing, patching and other reasons. In order to eliminate the height difference and enable each product to obtain a stable and accurate sintering pressure, dynamic pressure head technology came into being.

[0004] The main implementation method of dynamic pressure head technology is to set a floating pressure head on each product. The front end of the pressure head directly contacts the chip or sensor, and the back end of the pressure head contacts soft film silicone, elastic film, spring or cylinder piston and other components to compensate for the height difference between electronic components, and also transmit sintering pressure. Using a cylinder piston as a driving element can obtain a more stable and easy-to-calculate sintering pressure, and has inherent advantages in operating life and maintenance difficulty.

[0005] However, the existing technology requires the calculation and design of the corresponding pressure head and piston module according to the corresponding product. Once the size of the component is adjusted, the entire dynamic pressure head system needs to be adjusted. In addition, the sintering pressure range that the piston module can provide in the existing technology is limited and cannot be adjusted during the sintering process. If the same product needs to be sintered in multiple steps, the mold needs to be replaced between each step, which is cumbersome to operate and has poor flexibility. Summary of the invention

[0006] One purpose of the present invention is to solve the shortcomings of the prior art and to propose a gas drive device with graded adjustment to achieve flexible adjustment of pressure to meet the pressurization requirements of different scenarios.

[0007] The second purpose of the present invention is to solve the shortcomings of the prior art and propose a sintering equipment. The sintering equipment uses the above-mentioned graded adjustable gas drive device to meet the sintering requirements of different products and the sintering requirements of different steps of the same product, and is easy to operate and highly flexible.

[0008] To achieve the above object, the present invention adopts the following technical solutions: According to a first aspect of the present invention, there is provided a gas-driven device that can be adjusted in stages, the gas-driven device that can be adjusted in stages comprising a base, a first driving assembly, a reset assembly and a thrust rod assembly.

[0009] The base includes a first mounting seat and a second mounting seat which are arranged in sequence along the pressure direction.

[0010] The first driving assembly includes a plurality of driving pistons which are nested and are respectively arranged in the first mounting seat so as to be movable along a pressure direction.

[0011] The reset assembly includes a plurality of reset pistons corresponding to the plurality of driving pistons. The plurality of reset pistons are respectively arranged in the second mounting seat so as to be movable along the pressure direction, and the plurality of reset pistons are respectively facing the first mounting seat.

[0012] The thrust rod assembly comprises a plurality of groups of thrust rods corresponding to a plurality of driving pistons, and the plurality of groups of thrust rods are respectively movably disposed in the second mounting seat along the pressure direction.

[0013] A group of thrust rods and a group of reset pistons corresponding to each driving piston are staggered, wherein the group of thrust rods corresponding to each driving piston is used to transmit the pressure provided by the driving piston, and the corresponding group of reset pistons is used to reset the driving piston.

[0014] Preferably, the step-adjustable air drive device also includes a second drive assembly, the second drive assembly includes an independent piston and a return spring, the independent piston is movably arranged in the second mounting seat along the pressure direction, and the independent piston faces the side of the second mounting seat away from the first mounting seat; the return spring is sleeved on the independent piston; the independent piston and the thrust rod and the return piston are all staggered.

[0015] Preferably, a accommodating chamber is provided in the second mounting seat, and the independent piston is movably provided in the accommodating chamber along the pressure direction; the second driving assembly also includes an air drive interface, which is provided on the side of the second mounting seat, and an air drive channel is provided in the second mounting seat, and the air drive interface is connected with the accommodating chamber through the air drive channel.

[0016] Preferably, the first mounting seat is provided with a plurality of first mounting cavities corresponding to the plurality of driving pistons, and each driving piston can be sealingly and slidably disposed in the corresponding first mounting cavity; the second mounting seat is provided with a plurality of second mounting cavities corresponding to the plurality of reset pistons, and each group of reset pistons can be sealingly and slidably disposed in the corresponding second mounting cavity.

[0017] Preferably, the first driving component also includes a plurality of driving input interfaces, which are respectively arranged on the side of the first mounting seat; a plurality of driving gas channels are correspondingly arranged in the first mounting seat, and the plurality of driving gas channels are isolated from each other, and each driving input interface is connected to the corresponding first mounting cavity through the corresponding driving gas channel.

[0018] Preferably, the reset component also includes multiple reset input interfaces, which are respectively arranged on the side of the second mounting seat; multiple reset gas channels are correspondingly arranged in the second mounting seat, and each reset input interface is connected to the corresponding second mounting cavity through the corresponding reset gas channel.

[0019] Preferably, a guide ring and a sealing ring are respectively provided between each driving piston and the side wall of the corresponding first installation cavity; a guide ring and a sealing ring are respectively provided between each reset piston and the side wall of the corresponding second installation cavity.

[0020] Preferably, the multiple driving pistons include a cylindrical driving piston arranged in the middle of the first mounting seat and other annular driving pistons nested in sequence on the outside of the cylindrical driving piston, and the cross-sectional areas of the multiple driving pistons increase sequentially from the inside to the outside.

[0021] Preferably, each group of thrust rods includes at least two thrust rods, and the at least two thrust rods are arranged at intervals along the circumference of the corresponding driving piston; each group of reset pistons includes at least two reset pistons, and the at least two reset pistons are arranged at intervals along the circumference of the corresponding driving piston.

[0022] According to a second aspect of the present invention, there is provided a sintering device, the sintering device comprising the step-adjustable gas drive device as described above.

[0023] Preferably, the sintering equipment also includes a pressure head assembly, which is arranged on a side of the second mounting seat away from the first mounting seat; the pressure head assembly includes a plurality of nested pressure heads, and adjacent pressure heads are slidably fitted together, and each pressure head corresponds to at least one group of thrust rod assemblies in the steplessly adjustable gas drive device.

[0024] Compared with the prior art, the present invention has the following beneficial effects: In the gas-driven device with graded adjustment of the present invention, multiple driving pistons in the first driving assembly are nested, each driving piston corresponds to a group of thrust rod assemblies and a group of reset assemblies, the pressure corresponding to each driving piston can be adjusted separately, the pressure of each driving piston can be transmitted through the corresponding thrust rod, and each driving piston is reset through the corresponding reset assembly, thereby being able to meet the pressurization requirements of different scenarios, improving the application flexibility of the device, reducing deployment costs, facilitating operation, and having strong flexibility.

[0025] The sintering equipment of the present invention adopts the above-mentioned gas drive device with graded adjustment, which can meet the sintering requirements of different products and the sintering requirements of different steps of the same product, improve the application flexibility of the equipment, reduce the deployment cost, facilitate operation, and have strong flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of a gas drive device with graded adjustment according to some embodiments of the present invention.

[0027] Figure 2 It is a three-dimensional diagram of a gas drive device with graded adjustment according to some embodiments of the present invention.

[0028] Figure 3 Schematic diagram of the structure of a first drive assembly, a reset assembly, a thrust rod assembly and a second drive assembly in some embodiments of the present invention.

[0029] Figure 4 It is a schematic structural diagram of the first driving assembly, the reset assembly, the thrust rod assembly and the second driving assembly in some embodiments of the present invention from another perspective.

[0030] Figure 5 Schematic diagram of the split structure of multiple driving pistons in some embodiments of the present invention.

[0031] Figure 6 Schematic diagram of the installation structure of the driving piston in some embodiments of the present invention.

[0032] Figure 7 Schematic diagram of the structure of the second mounting base in some embodiments of the present invention.

[0033] Figure 8 Schematic diagram of the installation structure of the reset piston in some embodiments of the present invention.

[0034] Fig. 9 Schematic diagram of the installation structure of the second drive assembly in some embodiments of the present invention.

[0035] Fig.10 It is a schematic diagram of the structure of sintering equipment according to some embodiments of the present invention.

[0036] Fig.11 Schematic diagram of the structure of the pressure head assembly in some embodiments of the present invention.

[0037] Fig.12 Schematic diagram of the matching structure of the pressure head assembly, the independent piston and the thrust rod assembly in some embodiments of the present invention.

[0038] In the figure, 10-base, 11-first mounting seat, 111-first mounting cavity, 112-driving gas channel, 12-second mounting seat, 121-accommodating cavity, 122-gas drive channel, 123-second mounting cavity, 124-reset gas channel, 20-first driving assembly, 21-driving piston, 22-driving input interface, 23-guide ring, 24-sealing ring, 30-reset assembly, 31-reset piston, 32-reset input interface, 33-guide ring, 34-sealing ring, 40-thrust rod assembly, 41-thrust rod, 50-second driving assembly, 51-independent piston, 52-reset spring, 53-gas drive interface, 60-pressure head assembly, 61-pressure head. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0040] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. In addition, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0041] In the description of the present specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the present invention include a specific feature, structure or characteristic described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0042] According to a first aspect of the present invention, a gas drive device with graded adjustment is provided to achieve graded adjustment of pressure to meet the pressurization requirements of different scenarios. The gas drive device with graded adjustment can be applied to various fields such as pressure sintering, stamping, plastic sealing, welding, etc.

[0043] Reference Figure 1 In some embodiments, the step-by-step adjustable gas drive device includes a base 10, a first drive assembly 20, a reset assembly 30 and a thrust rod assembly 40. The base 10 is a mounting platform for the first drive assembly 20, the reset assembly 30 and the thrust rod assembly 40. The first drive assembly 20 is used to provide pressure, the thrust rod assembly 40 is used to transmit the pressure of the first drive assembly 20, and the reset assembly 30 is used to reset the first drive assembly 20.

[0044] Specifically, the base 10 includes a first mounting seat 11 and a second mounting seat 12 arranged in sequence along a pressure direction X. According to conventional settings, the pressure direction X may correspond to a vertical direction or a horizontal direction. In a preferred embodiment of the present invention, the pressure direction X corresponds to a vertical direction, and the first mounting seat 11 is located above the second mounting seat 12.

[0045] The first driving assembly 20 includes a plurality of driving pistons 21 arranged in a nested manner, and the plurality of driving pistons 21 are respectively arranged in the first mounting seat 11 so as to be movable along the pressure direction X. It should be noted that the driving pistons 21 are installed in isolation from each other in the first mounting seat 11, and each driving piston 21 can be controlled individually.

[0046] Combined with reference Figure 1 and Figure 3 The reset assembly 30 includes a plurality of reset pistons 31 corresponding to the plurality of driving pistons 21 . The plurality of reset pistons 31 are respectively movably disposed in the second mounting seat 12 along the pressure direction X, and the plurality of reset pistons 31 are respectively facing the first mounting seat 11 .

[0047] The thrust rod assembly 40 includes a plurality of thrust rods 41 corresponding to the plurality of driving pistons 21 . The plurality of thrust rods 41 are movably disposed in the second mounting seat 12 along the pressure direction X, respectively.

[0048] A set of thrust rods 41 and a set of reset pistons 31 corresponding to each driving piston 21 are staggered to avoid mutual interference between the thrust rods 41 and the reset pistons 31. The set of thrust rods 41 corresponding to each driving piston 21 is used to transmit the pressure provided by the driving piston 21, and the corresponding set of reset pistons 31 is used to reset the driving piston 21.

[0049] In application, the pressure corresponding to each driving piston 21 can be adjusted separately, and the pressure of each driving piston 21 can be transmitted downward through the corresponding thrust rod 41 to achieve pressurization. After the pressurization is completed, each driving piston 21 can be reset by the corresponding reset piston 31, so as to meet the pressurization requirements of different products and the pressurization requirements of different steps of the same product, improve the application flexibility of the device, reduce deployment costs, facilitate operation, and have strong flexibility.

[0050] It should be noted that the number of the above-mentioned drive pistons 21 and the shape and cross-sectional area of ​​each drive piston 21 can be reasonably set according to actual conditions. In a preferred embodiment of the present invention, the multiple drive pistons 21 include a cylindrical drive piston arranged in the middle of the first mounting seat 11 and other annular drive pistons sequentially nested outside the cylindrical drive piston, and the cross-sectional areas of the multiple drive pistons 21 increase from the inside to the outside. Furthermore, the increase multiple of the cross-sectional area of ​​adjacent drive pistons 21 can be 6 to 10 times.

[0051] Correspondingly, the number of each group of reset pistons 31 and the number of each group of thrust rods 41 can be reasonably set according to actual conditions. In a preferred embodiment of the present invention, each group of thrust rods 41 includes at least two thrust rods 41, and at least two thrust rods 41 are arranged at intervals along the circumference of the corresponding driving piston 21; each group of reset pistons 31 includes at least two reset pistons 31, and at least two reset pistons 31 are arranged at intervals along the circumference of the corresponding driving piston 21. It should be understood that the at least two thrust rods 41 corresponding to each driving piston 21 and the at least two reset pistons 31 are staggered to avoid mutual interference between each thrust rod 41 and each reset piston 31, so as to ensure the operational reliability of the gas drive device.

[0052] Reference Figures 2 to 5In some embodiments, three drive pistons 21 are provided, including a cylindrical drive piston 211 located in the middle, an annular drive piston 212 nested outside the cylindrical drive piston 211, and an annular drive piston 213 nested outside the annular drive piston 212, and the cross-sectional area of ​​the annular drive piston 212 is larger than that of the cylindrical drive piston 211, and the cross-sectional area of ​​the annular drive piston 213 is larger than that of the annular drive piston 212. The cylindrical drive piston 211 is provided with three reset pistons 311 and three thrust rods 411 at intervals in the circumferential direction, and the three reset pistons 311 and the three thrust rods 411 are arranged alternately. The annular drive piston 212 is provided with four reset pistons 312 and four thrust rods 412 at intervals in the circumferential direction, and the four reset pistons 312 and the four thrust rods 412 are arranged in a staggered manner. The annular drive piston 213 is provided with four reset pistons 313 and four thrust rods 413 at intervals in the circumferential direction, and the four reset pistons 313 and the four thrust rods 413 are arranged in a staggered manner. In this way, the three driving pistons 21 can provide different levels of pressure respectively, and transmit the pressure through the corresponding thrust rods 41, so as to realize the pressure graded adjustment of the gas drive device, meet the pressurization requirements of various scenarios, and improve the application flexibility and operation convenience. After the pressurization is completed, each driving piston 21 can be reset by pushing upward through the corresponding reset piston 31.

[0053] Combined with reference Figure 1 , Figure 2 and Figure 6 The first mounting seat 11 is provided with a plurality of first mounting cavities 111 corresponding to the plurality of driving pistons 21, and each driving piston 21 can be sealed and slidably disposed in the corresponding first mounting cavity 111. Further, the first driving assembly 20 also includes a plurality of driving input interfaces 22, and the plurality of driving input interfaces 22 are respectively disposed on the side of the first mounting seat 11. The first mounting seat 11 is correspondingly provided with a plurality of driving gas channels 112, and the plurality of driving gas channels 112 are isolated from each other, and each driving input interface 22 is connected to the corresponding first mounting cavity 111 through the corresponding driving gas channel 112.

[0054] In application, each driving input interface 22 can be fed with driving high-pressure gas adjustable within the range of 6 bar to 70 bar (pressure unit, bar), and the driving high-pressure gas enters the corresponding first installation cavity 111 from the corresponding driving gas channel 112, thereby pushing the corresponding driving piston 21 to move downward along the pressure direction X, and then transmitting the pressure downward through the corresponding thrust rod 41 to achieve a pressurization effect.

[0055] Combined with reference Figure 2 , Figure 7 and Figure 8, multiple groups of second mounting cavities 123 corresponding to multiple groups of reset pistons 31 are provided in the second mounting seat 12, and each group of reset pistons 31 can be sealed and slidably provided in the corresponding second mounting cavity 123. Further, the reset assembly 30 also includes multiple reset input interfaces 32, and the multiple reset input interfaces 32 are respectively provided on the side of the second mounting seat 12. Multiple reset gas channels 124 are correspondingly provided in the second mounting seat 12, and each reset input interface 32 is connected to the corresponding second mounting cavity 123 through the corresponding reset gas channel 124. It should be understood that the reset gas channels 124 are isolated from each other.

[0056] In application, each reset input interface 32 can be fed with reset high-pressure gas adjustable within the range of 5 bar to 6 bar. The reset high-pressure gas enters the corresponding second installation cavity 123 from the corresponding reset gas channel 124, thereby pushing the corresponding reset piston to move upward along the pressure direction X, and then pushing the corresponding drive piston 21 to move upward to achieve the reset effect.

[0057] In some preferred embodiments, a guide ring 23 and a sealing ring 24 are respectively provided between each driving piston 21 and the side wall of the corresponding first installation cavity 111, and the guide ring 23 and the sealing ring 24 protrude from the side wall of the corresponding driving piston 21. Figure 5 and Figure 6 The outer wall of the cylindrical driving piston 211 is embedded with a guide ring 23 and a sealing ring 24, which protrude outward from the outer wall of the cylindrical driving piston 211. The inner and outer walls of the annular driving piston 212 and the inner and outer walls of the annular driving piston 213 are both embedded with a guide ring 23 and a sealing ring 24, wherein the guide ring 23 and the sealing ring 24 at the inner wall protrude inward, and the guide ring 23 and the sealing ring 24 at the outer wall protrude outward. When each driving piston 21 is installed in the corresponding first installation cavity 111, the corresponding guide ring 23 and the sealing ring 24 can play a supporting, guiding and sealing role, preventing each driving piston 21 from directly contacting and rubbing with the side wall of the corresponding first installation cavity 111, thereby extending the service life of each driving piston 21.

[0058] Reference Figure 8 A guide ring 33 and a sealing ring 34 are respectively provided between each reset piston 31 and the side wall of the corresponding second installation cavity 123. The guide ring 33 and the sealing ring 34 can play a supporting, guiding and sealing role, preventing the reset piston 31 from directly contacting and rubbing with the side wall of the corresponding second installation cavity 123, thereby extending the service life of each reset piston 31.

[0059] Reference Figure 1 , Figure 2 and Fig. 9In some preferred embodiments, the step-adjustable gas drive device further includes a second drive assembly 50, which includes an independent piston 51 and a return spring 52. The independent piston 51 is movably disposed in the second mounting seat 12 along the pressure direction X, and the independent piston 51 faces the side of the second mounting seat 12 away from the first mounting seat 11. The return spring 52 is sleeved on the independent piston 51. The independent piston 51 is staggered with the thrust rod 41 and the return piston 31.

[0060] Furthermore, a receiving chamber 121 is provided in the second mounting seat 12, and the independent piston 51 is movably provided in the receiving chamber 121 along the pressure direction X. The second driving assembly 50 further includes an air drive interface 53, which is provided on the side of the second mounting seat 12, and an air drive channel 122 is provided in the second mounting seat 12, and the air drive interface 53 is connected with the receiving chamber 121 through the air drive channel 122. Furthermore, a guide ring and a sealing ring may also be provided between the independent piston 51 and the side wall of the corresponding receiving chamber 121 to play a supporting, guiding and sealing role, so as to prevent the independent piston 51 from directly contacting and rubbing with the side wall of the receiving chamber 121, thereby extending the service life of the independent piston 51.

[0061] It should be noted that the number and position of the second drive components 50 can be reasonably set according to actual needs, and the number and position of the accommodating chambers 121 and the air drive channels 122 in the second mounting seat 12 can be matched therewith. It should be understood that when multiple sets of second drive components 50 are set, each independent piston 51 and each thrust rod 41 and each reset piston 31 should be staggered, and each air drive channel 122 and each reset gas channel 124 should be isolated from each other to avoid interference with each other and ensure the reliability of the air drive device.

[0062] In application, each air drive interface 53 can be fed with high-pressure gas adjustable within the range of 6 bar to 70 bar, and the high-pressure gas enters the corresponding accommodating chamber 121 from the corresponding air drive channel 122, thereby pushing the corresponding independent piston 51 to move downward, so as to directly pressurize the object below the second mounting seat 12. After the pressurization is completed, the high-pressure gas is removed, and the elastic force of the reset spring 52 can push the independent piston 51 to move upward, thereby realizing the reset of the independent piston 51. The setting of the second drive assembly 50 increases the adjustable range of the air drive device and further improves the flexibility of the use of the air drive device.

[0063] During the operation of the above-mentioned step-by-step adjustable gas drive device, when the first drive assembly 20, the thrust rod assembly 40 and the reset assembly 30 cooperate to work, the drive input interface 22 is fed with the driving high-pressure gas, and the driving high-pressure gas enters the corresponding first installation cavity 111 along the corresponding driving gas channel 112, pushing the corresponding driving piston 21 to move downward along the pressure direction X, and then transmitting the pressure downward through the corresponding thrust rod 41 to achieve the pressurization effect; after the pressurization is completed, the reset input interface 32 is fed with the reset high-pressure gas, and the reset high-pressure gas enters the corresponding second installation cavity 123 along the corresponding reset gas channel 124, pushing the corresponding reset piston 31 to move upward along the pressure direction X, and then pushing the corresponding driving piston 21 to move upward to achieve the reset effect. When the second drive assembly 50 is working, the gas drive interface 53 is fed with high-pressure gas, and the high-pressure gas enters the corresponding accommodating cavity 121 from the corresponding gas drive channel 122, thereby pushing the corresponding independent piston 51 to move downward, so as to directly pressurize the object below the second mounting seat 12. After the pressurization is completed, the high-pressure gas is removed, and the elastic force of the return spring 52 can push the independent piston 51 to move upward, thereby achieving the return of the independent piston 51.

[0064] In addition, in the above-mentioned gas-driven device with graded adjustment, each driving piston 21 can work alone, or two or more driving pistons 21 can work at the same time, and the independent piston 51 can work alone or work together with several driving pistons 21. Therefore, the gas-driven device can meet the use requirements of various application scenarios, is easy to adjust, and has strong flexibility in use.

[0065] According to a second aspect of the present invention, a sintering device is provided, which includes a gas drive device with graded adjustment as described above, which can meet the sintering requirements of different products and the sintering requirements of different steps of the same product, improve the application flexibility of the equipment, reduce deployment costs, facilitate operation, and have strong flexibility.

[0066] Reference Figures 10 to 12 The sintering equipment further includes a pressure head assembly 60, which is arranged on a side of the second mounting seat 12 away from the first mounting seat 11, that is, the pressure head assembly 60 is arranged below the second mounting seat 12. The pressure head assembly 60 includes a plurality of nested pressure heads 61, and adjacent pressure heads 61 are slidably matched, and each pressure head 61 corresponds to at least one group of thrust rod assemblies 40 in the gas drive device that can be adjusted in stages. In this way, one or more pressure heads 61 can be controlled to pressurize according to different pressure sintering requirements, thereby improving the flexibility of use.

[0067] Specifically, in some embodiments, the plurality of press heads 61 include a press head 611, a press head 612, and a press head 613 which are nested in sequence from the inside to the outside, and the adjacent press heads 61 are slidably matched. In the pressure direction X, the upper part of the press head 611 corresponds to the three thrust rods 411, the upper part of the press head 612 corresponds to the four thrust rods 412 and a part of the four thrust rods 413, and the upper part of the press head 613 corresponds to another part of the four thrust rods 413. In other words, the pressure on the thrust rod 411 can completely act on the press head 611, the pressure on the thrust rod 412 can completely act on the press head 612, a part of the pressure of the thrust rod 413 acts on the press head 612, and the other part of the pressure acts on the press head 613.

[0068] Furthermore, an independent piston 51 is correspondingly disposed above the pressure head 611, and the pressure of the independent piston 51 can directly act on the pressure head 611. In some small-area or low-pressure sintering scenarios, the independent piston 51 can be used alone to drive the pressure head 611 to move downward to achieve pressure sintering.

[0069] In summary, the present invention provides a gas-driven device with graded adjustment and a sintering device using the same. In the gas-driven device with graded adjustment, multiple driving pistons in the first driving assembly are nested, and the pressure corresponding to each driving piston can be adjusted separately. Each driving piston corresponds to a group of thrust rod assemblies and a group of reset assemblies. The pressure of each driving piston can be transmitted through the corresponding thrust rod, and each driving piston is reset through the corresponding reset assembly, so as to meet the pressurization requirements of different products and the pressurization requirements of different steps of the same product, improve the application flexibility of the device, reduce deployment costs, facilitate operation, and have strong flexibility. The sintering equipment of the present invention adopts the above-mentioned gas-driven device with graded adjustment, which can meet the sintering requirements of different products and the sintering requirements of different steps of the same product, improve the application flexibility of the equipment, reduce deployment costs, facilitate operation, and have strong flexibility.

[0070] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, changes and modifications made without departing from the spirit and scope of the present invention are all within the scope of patent protection of the present invention.

Claims

1. A gas drive device with graded adjustment, characterized in that: The step-by-step adjustable air drive device comprises a base, a first drive assembly, a reset assembly and a thrust rod assembly; The base includes a first mounting seat and a second mounting seat arranged in sequence along the pressure direction; The first driving assembly comprises a plurality of driving pistons arranged in a nested manner, and the plurality of driving pistons are respectively arranged in the first mounting seat so as to be movable along the pressure direction; The reset assembly comprises a plurality of reset pistons corresponding to the plurality of driving pistons, the plurality of reset pistons are respectively arranged in the second mounting seat so as to be movable along the pressure direction, and the plurality of reset pistons are respectively facing the first mounting seat; The thrust rod assembly comprises a plurality of thrust rods corresponding to the plurality of driving pistons, and the plurality of thrust rods are respectively movably disposed in the second mounting seat along the pressure direction; A group of thrust rods and a group of reset pistons corresponding to each driving piston are staggered, wherein the group of thrust rods corresponding to each driving piston is used to transmit the pressure provided by the driving piston, and the corresponding group of reset pistons is used to reset the driving piston.

2. The step-adjustable gas drive device according to claim 1, characterized in that: The step-adjustable air drive device also includes a second drive component, which includes an independent piston and a return spring. The independent piston is movably arranged in the second mounting seat along the pressure direction, and the independent piston faces the side of the second mounting seat away from the first mounting seat; the return spring is sleeved on the independent piston; the independent piston, the thrust rod, and the return piston are all staggered.

3. The step-adjustable gas drive device according to claim 2, characterized in that: A accommodating chamber is provided in the second mounting seat, and the independent piston is movably provided in the accommodating chamber along the pressure direction; the second driving assembly also includes an air drive interface, which is provided on the side of the second mounting seat, and an air drive channel is provided in the second mounting seat, and the air drive interface is connected to the accommodating chamber through the air drive channel.

4. The step-adjustable gas drive device according to claim 1, characterized in that: The first mounting seat is provided with a plurality of first mounting cavities corresponding to the plurality of driving pistons, and each driving piston can be sealingly and slidably arranged in the corresponding first mounting cavity; the second mounting seat is provided with a plurality of second mounting cavities corresponding to the plurality of reset pistons, and each group of reset pistons can be sealingly and slidably arranged in the corresponding second mounting cavity.

5. The step-adjustable gas drive device according to claim 4, characterized in that: The first driving component also includes multiple driving input interfaces, which are respectively arranged on the side of the first mounting seat; multiple driving gas channels are correspondingly arranged in the first mounting seat, and the multiple driving gas channels are isolated from each other, and each driving input interface is connected to the corresponding first mounting cavity through the corresponding driving gas channel.

6. The step-adjustable gas drive device according to claim 4, characterized in that: The reset component also includes multiple reset input interfaces, which are respectively arranged on the side of the second mounting seat; the second mounting seat is correspondingly provided with multiple reset gas channels, and each reset input interface is connected to the corresponding second mounting cavity through the corresponding reset gas channel.

7. The step-adjustable gas drive device according to claim 4, characterized in that: A guide ring and a sealing ring are respectively provided between each driving piston and the side wall of the corresponding first installation cavity; a guide ring and a sealing ring are respectively provided between each reset piston and the side wall of the corresponding second installation cavity.

8. The step-adjustable gas drive device according to claim 1, characterized in that: The multiple driving pistons include a cylindrical driving piston arranged in the middle of the first mounting seat and other annular driving pistons sequentially nested outside the cylindrical driving piston, and the cross-sectional areas of the multiple driving pistons increase sequentially from the inside to the outside.

9. The step-adjustable gas drive device according to claim 1, characterized in that: Each group of thrust rods includes at least two thrust rods, and the at least two thrust rods are arranged at intervals along the circumference of the corresponding driving piston; each group of reset pistons includes at least two reset pistons, and the at least two reset pistons are arranged at intervals along the circumference of the corresponding driving piston.

10. A sintering device, characterized in that: The sintering equipment includes a pressure head assembly and a step-by-step adjustable gas drive device as described in any one of claims 1 to 9, wherein the pressure head assembly is arranged on a side of a second mounting seat in the step-by-step adjustable gas drive device away from a first mounting seat; the pressure head assembly includes a plurality of nested pressure heads, adjacent pressure heads are slidably fitted together, and each pressure head corresponds to at least one group of thrust rod assemblies in the step-by-step adjustable gas drive device.

Citation Information

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