Silicon carbide ingot slicing equipment

Abstract

The present invention discloses a silicon carbide crystal rod slicing device, which relates to the technical field of silicon carbide crystal rod slicing; it comprises a base, a crystal rod fixing frame, a winding frame and a cutting frame, a rotating three-jaw chuck is installed on the crystal rod fixing frame, a winding roller and a take-up roller are rotatably installed on the winding frame, and a cutting wire breaking clamping device, a tensioning wheel device, a guide wheel device and a slicing cooling device are provided on the cutting frame. The present invention can clamp the diamond wire at the moment when the diamond wire is disconnected, which is convenient for operators to find and reinstall the wire, and reduce downtime and maintenance time. In addition, the position of the silicon carbide crystal rod can be rotated and adjusted during slicing, which reduces the contact area and cutting resistance of the diamond wire cutting, reduces the wear of the diamond wire, and when the silicon carbide crystal rod adjusts the cutting angle, the slicing cooling device cooperates and links to achieve precise liquid spraying. During the slicing process, the tension of the diamond wire can be monitored and adjusted in real time to reduce the risk of wire breaking.

Description

Technical Field

[0001] The invention relates to the technical field of silicon carbide crystal rod slicing, and in particular to a silicon carbide crystal rod slicing device. Background Art

[0002] The manufacture of semiconductor devices requires cutting silicon carbide crystal rods into thin slices. The product obtained after slicing is the wafer. Then a series of processes such as photolithography, etching, and doping are carried out on the wafer to manufacture various semiconductor devices. Currently, the equipment used for slicing silicon carbide crystal rods includes diamond wire cutting equipment, laser cutting equipment, and mortar wire cutting equipment. Among them, diamond wire cutting equipment is widely used in the batch slicing production of silicon carbide crystal rods.

[0003] Existing diamond wire cutting equipment mainly drives the diamond wire to reciprocate by the high-speed rotation and reciprocating motion of the winding roller. The diamond wire is tensioned by two tensioning wheels, and two guide wheels are added to ensure the cutting accuracy and surface shape. Then, by controlling the diamond wire control console to continuously feed in the direction of the silicon carbide crystal rod, a relative grinding motion is formed between the diamond wire and the silicon carbide crystal rod, thereby achieving cutting.

[0004] Diamond wire is a key component in diamond wire cutting equipment. If the diamond wire breaks, the equipment will be shut down for maintenance. The main reasons for the breakage of diamond wire we know are as follows: First, the quality of the diamond wire or excessive wear of the diamond wire; Second, the tension is too large. During the cutting process, the diamond wire needs to maintain a certain tension to ensure the cutting accuracy. If the tension exceeds the limit that the wire can withstand, the wire will break. However, if the tension is too small, the cutting force of the diamond wire will be insufficient; Third, the coolant is insufficiently covered or of poor quality. The coolant plays a role of cooling and lubrication during the cutting process. If the coolant is insufficient, the friction heat between the wire and the cutting material cannot be dissipated in time, which will cause the wire temperature to be too high and the strength to be reduced;

[0005] After the diamond wire breaks, the operator needs to find the broken wire end, then remove the scrapped diamond wire and reinstall a new one. Since the diamond wire is very thin (diameter is between 70μm-350μm) and very light, it will generally float away from its original position after breaking. Therefore, the operator has to spend time looking for the wire end, and must wear gloves during the process of finding the wire end, otherwise there is a risk of scratches if the diamond wire is accidentally touched. The broken diamond wire is easy to be entangled in nearby components, affecting the normal operation of the components and the subsequent handling of the diamond wire. Based on the above reasons, we want to design a silicon carbide crystal rod slicing equipment that is easy for operators to find and install wires and can reduce the risk of wire breakage. Summary of the invention

[0006] The purpose of the present invention is to solve the problems raised in the background technology and to propose a silicon carbide crystal rod slicing device.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] A silicon carbide crystal rod slicing device comprises: a base, a crystal rod fixing frame, a winding frame and a cutting frame, wherein a rotating three-jaw chuck is installed on the crystal rod fixing frame, and the rotating three-jaw chuck is used to fix the silicon carbide crystal rod, and the bottom of the crystal rod fixing frame is fixed on a cross slide module composed of an X-axis slide module and a Y-axis slide module, and the cross slide module is fixedly installed on the base;

[0009] A winding roller and a take-up roller are rotatably mounted on the winding frame, diamond wire is wound on the winding roller and the take-up roller, the bottom of the winding frame is fixed on a linear slide module, and the linear slide module is fixedly mounted on the base;

[0010] The cutting frame is fixedly mounted on a base, and is provided with a cutting wire breaking clamping device, a tensioning wheel device, a guide wheel device and a slice cooling device. A wire inlet and a wire outlet are provided at the side of the cutting frame at positions corresponding to the winding roller and the take-up roller, and the wire inlet and the wire outlet are provided with a cutting wire breaking clamping device. The head end of the diamond wire is fixed on the winding roller and is wound around the winding roller for several turns. The diamond wire passes through the wire inlet, the tensioning wheel device, the guide wheel device and the wire outlet in sequence, and the end is fixed on the take-up roller.

[0011] As a further solution of the present invention: the cutting line breaking clamping device comprises an upper and lower clamping assembly and a left and right clamping assembly, and the upper and lower clamping assembly and the left and right clamping assembly are in different planes;

[0012] The inlet and outlet have upper and lower mounting grooves on their upper and lower sides for installing upper and lower clamping components, and the inlet and outlet have left and right mounting grooves on their left and right sides for installing left and right clamping components.

[0013] As a further solution of the present invention: the upper and lower clamping assemblies and the left and right clamping assemblies are composed of a clamping block, a fixed cylinder, a telescopic cylinder and a spring. Two telescopic cylinders are fixedly installed on the clamping block. The telescopic cylinders are slidably sleeved on the fixed cylinder. At the same time, springs are arranged inside the fixed cylinder and the telescopic cylinder. One end of the spring is fixedly connected to the fixed cylinder, and the other end is fixedly connected to the telescopic cylinder.

[0014] The telescopic cylinder is provided with a magnetic block at the position connected to the spring, the fixed cylinder is provided with an electromagnet at the position connected to the spring, and the fixed cylinders of the upper and lower clamping assemblies and the left and right clamping assemblies are respectively fixed in the upper mounting groove, the lower mounting groove, the left mounting groove, and the right mounting groove.

[0015] As a further solution of the present invention: the upper and lower clamping assemblies and the left and right clamping assemblies are both composed of a clamping block and an automatic telescopic rod, two automatic telescopic rods are fixedly installed on the clamping block, and the automatic telescopic rods of the upper and lower clamping assemblies and the left and right clamping assemblies are respectively fixed in the upper mounting groove, the lower mounting groove, the left mounting groove, and the right mounting groove.

[0016] As a further solution of the present invention: the cutting frame is in the shape of a shell, and the cutting frame is provided with a processing opening at a position corresponding to the rotary three-jaw chuck, and the cutting frame is provided with a waist-shaped hole above the processing opening for fixing and installing a slice cooling device;

[0017] The slice cooling device consists of an automatic adjustment rod, a rotating seat and a liquid spraying pipe. The head end of the automatic adjustment rod is fixedly mounted on the waist-shaped hole through a fixed seat. The tail end of the automatic adjustment rod is fixedly mounted on a rotating motor. The rotating seat is fixedly mounted on the rotating motor and driven to rotate by the rotating motor. The liquid spraying pipe is fixedly mounted on the rotating seat, and the liquid spraying pipe is a universal tube.

[0018] As a further solution of the present invention: the tension wheel device is provided with two groups, which are symmetrically arranged on the cutting frame, and the tension wheel device comprises a tension wheel and a primary adjustment component, the tension wheel is located on the inner side of the cutting frame, and the primary adjustment component is located on the outer side of the cutting frame;

[0019] The first-level adjustment assembly includes a sliding rod, a slider, a screw rod, a polished rod and a side plate. The tension wheel is rotatably mounted on the end of the sliding rod. A long strip-shaped adjustment slot is provided on the cutting frame. The sliding rod passes through the adjustment slot and is fixed to the slider.

[0020] Two side panels are provided and fixedly mounted on the outer surface of the cutting machine frame. The head and tail ends of the light rod are fixedly connected to the two side panels respectively. Two light rods are also provided and the two light rods are fixed in parallel between the two side panels. The head and tail ends of the lead screw are rotatably connected to the two side panels, and the end of the lead screw passes through the side panel and is connected to the driving member. The slider is penetrated by the lead screw and the light rod, and the slider is threadedly connected to the lead screw, and the slider is slidably connected to the light rod.

[0021] As a further solution of the present invention: the guide wheel device is provided with three groups, which are arranged in a triangular shape on the cutting frame, and two groups of the guide wheel devices are respectively located on the upper side and the lower side of the processing opening, and the guide wheel device includes a guide wheel and a secondary adjustment component, and the guide wheel and the secondary adjustment component are located on the inner side of the cutting frame;

[0022] The secondary adjustment assembly includes a fixed adjustment seat, a transverse push block and a vertical fine-tuning block. The guide wheel is rotatably mounted on the vertical fine-tuning block. The fixed adjustment seat is fixed on the inner surface of the cutting frame. The fixed adjustment seat is U-shaped. The bottom of the transverse push block is slidably mounted on the fixed adjustment seat. The top of the transverse push block is an inclined surface. The bottom of the vertical fine-tuning block is also an inclined surface, and the bottom of the vertical fine-tuning block is fitted with the top of the transverse push block. The two sides of the vertical fine-tuning block are slidably connected to the fixed adjustment seat. The right side of the transverse push block is fixedly connected to the fine-tuning spring. The right side of the fine-tuning spring is fixedly connected to the fixed adjustment seat. The transverse push block is magnetic, and a fine-tuning electromagnet is arranged at the connection position of the fixed adjustment seat with the fine-tuning spring.

[0023] As a further solution of the present invention: the tension wheel is a single-groove guide wheel, the guide wheel is a multi-groove guide wheel, the guide wheel is provided with a tension sensor, and a controller is fixedly installed on the outer surface of the cutting frame, and the data measured by the tension sensor is displayed on the controller.

[0024] Compared with the prior art, the present invention has the following advantages:

[0025] 1. The wire-breaking clamping device for cutting wire can clamp the diamond wire instantly when the diamond wire is broken, so that the operator can quickly find the two broken wire ends, and then remove the wire from the broken part to the take-up roller as waste wire. Since the wire-breaking clamping device for cutting wire can also prevent the wire wound on the winding roller from unraveling, there is no need to re-install the wire and wind it. The wire end at the broken part of one end of the winding roller can be directly passed through the tensioning wheel device, the guide wheel device, and the wire outlet in sequence and finally fixed on the take-up roller, and then the diamond wire can be restarted for subsequent cutting operations, which reduces the time required for downtime maintenance and reduces the difficulty of repairing the broken diamond wire.

[0026] 2. The tensioning wheel device and the guide wheel device are designed to be in a two-level adjustment form. The tensioning wheel device gives the diamond wire an initial tension to ensure the smooth start of the cutting operation. In the subsequent cutting process, the tension of the diamond wire itself will change slightly when it is routed. At this time, the guide wheel device can monitor and adjust the tension of the diamond wire in real time through automatic micro-adjustment to keep it within an appropriate range at all times, avoiding wire breakage due to excessive tension or insufficient cutting force due to insufficient tension.

[0027] 3. The rotating three-jaw chuck used to fix the silicon carbide crystal rod can be rotated to adjust the cutting position of the silicon carbide crystal rod during the cutting process, reducing the contact area between the cutting part of the silicon carbide crystal rod and the diamond wire, thereby reducing the cutting resistance and reducing the wear on the diamond wire. More importantly, in the process of rotating the silicon carbide crystal rod to adjust the cutting angle, the slicing cooling device can work in conjunction with it to automatically adjust the spraying angle of the coolant to ensure that the coolant is always accurately sprayed on the cutting part, avoiding the problem of insufficient coolant coverage, affecting the strength of the diamond wire, resulting in wire breakage and increased surface roughness of the cutting surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the three-dimensional structure of the front side of the present invention;

[0029] Figure 2 It is a schematic diagram of the three-dimensional structure of the back side of the present invention;

[0030] Figure 3 It is a three-dimensional structural schematic diagram of the cutting frame of the present invention;

[0031] Figure 4 This is a schematic diagram of the single-wire cutting routing structure of the diamond wire of the present invention;

[0032] Figure 5 This is a schematic diagram of the multi-wire cutting routing structure of the diamond wire of the present invention;

[0033] Figure 6 It is a front structural schematic diagram of the cutting frame of the present invention;

[0034] Figure 7 It is a schematic diagram of the installation structure of the left and right clamping assemblies of the present invention;

[0035] Figure 8 It is a schematic diagram of the installation structure of the upper and lower clamping components of the present invention;

[0036] Fig. 9 It is a structural schematic diagram of the cutting wire breaking clamping device of the present invention;

[0037] Fig.10 It is a structural schematic diagram of one solution of the left and right clamping components and the upper and lower clamping components of the present invention;

[0038] Fig.11 It is a structural schematic diagram of another solution of the left and right clamping components and the upper and lower clamping components of the present invention;

[0039] Fig.12 It is a structural schematic diagram of the slice cooling device of the present invention;

[0040] Fig.13 It is a schematic diagram of the direction of the liquid spray pipe when cutting the silicon carbide crystal rod of the present invention;

[0041] Fig.14 It is a schematic structural diagram of the tensioning wheel device of the present invention when the driving member is a hand wheel;

[0042] Fig.15 It is a structural schematic diagram of the tensioning wheel device of the present invention when the driving member is a motor;

[0043] Fig.16 It is a structural schematic diagram of the guide wheel device of the present invention;

[0044] Fig.17 for Figure 3 A schematic diagram of the enlarged structure at A in the middle;

[0045] Fig.18 for Figure 3 A schematic diagram of the enlarged structure at B in the middle;

[0046] Fig.19 for Figure 7 Schematic diagram of the enlarged structure at C in the middle;

[0047] Fig. 20 for Figure 8 Schematic diagram of the enlarged structure at D in the middle.

[0048] In the figure: 100, base; 200, crystal rod fixing frame; 210, rotary three-jaw chuck; 220, cross slide module; 221, X-axis slide module; 222, Y-axis slide module; 300, winding frame; 310, winding roller; 320, take-up roller; 330, diamond wire; 340, linear slide module; 400, cutting frame; 401, wire inlet; 4011, upper Mounting slot; 4012, lower mounting slot; 4013, left mounting slot; 4014, right mounting slot; 402, outlet; 403, processing port; 404, waist-shaped hole; 405, adjustment slot; 410, cutting line break clamping device; 411, upper and lower clamping components; 4111, clamping block; 4112, fixing cylinder; 4113, telescopic cylinder; 4114, spring; 4115, magnetic block ; 4116, electromagnet; 4117, automatic telescopic rod; 412, left and right clamping components; 420, tension wheel device; 421, tension wheel; 422, primary adjustment component; 4221, sliding rod; 4222, slider; 4223, screw rod; 4224, light rod; 4225, side plate; 4226, driving member; 430, guide wheel device; 431, guide wheel; 432, secondary adjustment component; 4321, fixed adjustment seat; 4322, horizontal push block; 4323, vertical fine-tuning block; 4324, fine-tuning spring; 4325, fine-tuning electromagnet; 440, slice cooling device; 441, automatic adjustment rod; 4411, fixed seat; 4412, rotating motor; 442, rotating seat; 443, spray pipe; 500, silicon carbide crystal rod; 600, controller. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] Reference Figure 1 - Fig. 20 A silicon carbide crystal rod slicing device includes a base 100, a crystal rod fixing frame 200, a winding frame 300 and a cutting frame 400, wherein the cutting frame 400 is fixedly installed on the base 100, and is provided with a cutting wire breaking clamping device 410, a tensioning wheel device 420, a guide wheel device 430 and a slicing cooling device 440.

[0051] A rotating three-jaw chuck 210 is installed on the crystal rod fixing frame 200. The rotating three-jaw chuck 210 is driven to rotate by a motor. The silicon carbide crystal rod 500 is fixed on the rotating three-jaw chuck 210. Therefore, the rotating three-jaw chuck 210 can rotate with the silicon carbide crystal rod 500, and rotates with the silicon carbide crystal rod 500 as the rotation center.

[0052] The bottom of the crystal rod fixing frame 200 is fixed on a cross slide module 220 composed of an X-axis slide module 221 and a Y-axis slide module 222. The cross slide module 220 is fixedly installed on the base 100. The crystal rod fixing frame 200 can be controlled to move in the X-axis and Y-axis directions through the cross slide module 220. The movement in the X-axis direction controls the cutting depth of the silicon carbide crystal rod 500, and the movement in the Y-axis direction controls the feeding distance of the silicon carbide crystal rod 500 toward the cutting frame 400.

[0053] The cross slide module 220 is used in conjunction with the rotary three-jaw chuck 210 to adjust the position of the silicon carbide crystal rod 500 in contact with the diamond wire 330 when cutting. Since the diamond wire 330 cuts from the edge of the silicon carbide crystal rod 500 to the inside, as the cutting deepens, the contact area between the diamond wire 330 and the silicon carbide crystal rod 500 becomes larger and larger, and the cutting resistance becomes larger and larger, especially when the diamond wire 330 cuts to the center of the cross section of the silicon carbide crystal rod 500. The contact area between the diamond wire 330 and the silicon carbide crystal rod 500 is the largest. At this time, not only is the cutting resistance the largest, but it is also difficult for the coolant to cover the entire contact area between the diamond wire 330 and the silicon carbide crystal rod 500. Therefore, the present application designs the mechanism for fixing the silicon carbide crystal rod 500 into a rotatable rotary three-jaw chuck 210, so that when cutting, by rotating the silicon carbide crystal rod 500, the diamond wire 330 can always be cut from the edge of the cutting surface.

[0054] This design has the following three advantages: first, it reduces the contact area between the diamond wire 330 and the cutting surface of the silicon carbide crystal rod 500, thereby reducing the cutting resistance; second, it reduces the wear effect on the diamond wire and reduces the probability of the diamond wire breaking; third, since the contact area between the diamond wire 330 and the silicon carbide crystal rod 500 becomes smaller, the area required to spray the coolant is also reduced, and the slicing cooling device 440 of the present application can cooperate with it to automatically adjust the spraying angle of the coolant and perform precise spraying. Therefore, the problem of accelerated wear of the diamond wire 330 and increased surface roughness of the silicon carbide crystal rod 500 due to insufficient coverage of the coolant can be avoided.

[0055] like Figure 3 - Fig. 20 As shown, the cutting frame 400 is in the shape of a shell, and a processing opening 403 is set at the corresponding position of the rotating three-jaw chuck 210 on the cutting frame 400, and the diamond wire 330 cuts the silicon carbide crystal rod 500 at the processing opening 403. The cutting frame 400 is provided with a waist-shaped hole 404 above the processing opening 403 for fixing and installing a slice cooling device 440.

[0056] like Fig.12 As shown, the slice cooling device 440 is composed of an automatic adjustment rod 441, a rotating seat 442 and a spray pipe 443. The automatic adjustment rod 441 is an electrically controlled telescopic rod that can be extended and retracted up and down. The head end of the automatic adjustment rod 441 is fixedly mounted on the waist-shaped hole 404 through a fixed seat 4411, and the end of the automatic adjustment rod 441 is fixedly mounted on a rotating motor 4412. The rotating seat 442 is fixedly mounted on the rotating motor 4412, and the rotating seat 442 is driven to rotate by the rotating motor 4412. The spray pipe 443 is fixedly mounted on the rotating seat 442, and the spray pipe 443 is a universal tube. The spray pipe 443 sprays cooling liquid.

[0057] When the rotary three-jaw chuck 210 controls the rotation of the silicon carbide crystal rod 500, the rotary motor 4412 rotates synchronously to adjust the direction of the liquid spray pipe 443 to face the cutting surface of the diamond wire 330 and the silicon carbide crystal rod 500 (such as Fig.13 As shown), the coolant can always be sprayed on the cutting surface of the diamond wire 330 and the silicon carbide crystal rod 500 to avoid the friction heat between the diamond wire 330 and the silicon carbide crystal rod 500 cannot be dissipated in time due to insufficient coolant coverage, resulting in excessive wire temperature, reduced strength, and wire breakage.

[0058] like Figure 1 - Fig. 20As shown, a winding roller 310 and a take-up roller 320 are rotatably mounted on the winding frame 300, and the winding roller 310 and the take-up roller 320 are driven to rotate by a motor, and a diamond wire 330 is wound around the winding roller 310 and the take-up roller 320. Here, it is necessary to first explain the overall installation state of the diamond wire 330. Before cutting, when installing the diamond wire 330, it is necessary to first fix the head end of the diamond wire 330 on the winding roller 310, and then neatly wind several circles on the winding roller 310. The end of the diamond wire 330 is then fixed on the take-up roller 320. Therefore, in the initial state, the diamond wire 330 is wound on the winding roller 310, and the take-up roller 320 does not have the diamond wire 330 wound around it. As the cutting proceeds, the winding roller 310 rotates continuously to release the diamond wire 330. At the same time, the take-up roller 320 rotates synchronously to reel in the diamond wire 330. Therefore, as the cutting proceeds, the wire on the winding roller 310 becomes less and less, and the wire on the take-up roller 320 becomes more and more.

[0059] The bottom of the winding frame 300 is fixed on the linear slide module 340, and the linear slide module 340 is fixedly installed on the base 100. The linear slide module 340 can move the winding frame 300 toward the cutting frame 400, that is, it can move with the winding roller 310 and the take-up roller 320. Because as the cutting proceeds, the winding roller 310 needs to move forward continuously to ensure that the position of the diamond wire 330 entering the cutting frame 400 remains unchanged.

[0060] A wire inlet 401 and a wire outlet 402 are provided on the side of the cutting frame 400 at positions corresponding to the winding roller 310 and the take-up roller 320. A cutting wire breaking clamping device 410 is provided in the wire inlet 401 and the wire outlet 402. The diamond wire 330 is released from the winding roller 310, and then passes through the wire inlet 401, the tensioning wheel device 420, the guide wheel device 430, and the wire outlet 402, and finally the end is fixed on the take-up roller 320.

[0061] When the diamond wire 330 passes through the wire inlet 401 and the wire outlet 402, it also passes through the cutting wire breaking clamping device 410. The cutting wire breaking clamping device 410 includes an upper and lower clamping assembly 411 and a left and right clamping assembly 412, and the upper and lower clamping assembly 411 and the left and right clamping assembly 412 are in different planes (if they are set in the same plane, interference will occur).

[0062] The diamond wire 330 is basically disconnected at the part entering the cutting frame 400, that is, the part from the wire inlet 401 to the wire outlet 402, especially the part at the processing port 403 and the part below the processing port 403. This is because the diamond wire 330 in this part has cut the silicon carbide crystal rod 500 and has been worn, while the part above the processing port 403 has not cut the silicon carbide crystal rod 500 and has no wear, so it is stronger.

[0063] The diamond wire 330 passes through the wire inlet 401 and the wire outlet 402 to limit the path of the diamond wire 330 and prevent the diamond wire 330 from floating away after breaking. When the diamond wire 330 is broken, the cutting wire breaking clamping device 410 will clamp the diamond wire 330. When the operator is looking for the wire end, he only needs to directly pinch the diamond wire 330 at the wire inlet 401 and the wire outlet 402 to collect the broken wire end.

[0064] In addition, the cutting wire breaking clamping device 410 can also keep the diamond wire 330 on the winding roller 310 and the take-up roller 320 in a wound state. The current situation is that after the diamond wire 330 is disconnected, the diamond wire 330 wound on the winding roller 310 and the take-up roller 320 will spread out, and the operator will remove the waste wire on the take-up roller 320, and re-arrange and rewind the diamond wire 330 on the winding roller 310 (if there is less diamond wire 330 on the winding roller 310, it can also be directly removed and discarded, and then rewound with new wire). It should be noted here that the diamond wire 330 on the winding roller 310 must be wound neatly, because the feeding speed of the winding roller 310 is set, so as to keep the diamond wire 330 feeding. The position of the diamond wire 330 entering the cutting frame 400 remains unchanged. If the diamond wire 330 on the winding roller 310 is scattered, it is impossible to ensure that the position of the diamond wire 330 entering the cutting frame 400 remains unchanged, which will cause the stability and tension of the diamond wire 330 to be affected. The setting of the cutting wire breaking clamping device 410 can clamp the diamond wire 330 in time when the wire is broken, so it will not affect the diamond wire 330 wound on the winding roller 310 and the take-up roller 320. Subsequently, it is only necessary to pull out the broken wire end of the winding roller 310, pass it through the tensioning wheel device 420 and the guide wheel device 430 again, and fix the end to the take-up roller 320, so that the diamond wire 330 can be restarted for cutting operation, thereby shortening the time required for maintenance after the wire break.

[0065] like Figure 7 - Fig.11 As shown, the inlet 401 and the outlet 402 are provided with upper mounting grooves 4011 and lower mounting grooves 4012 on their upper and lower sides for installing upper and lower clamping components 411, and the inlet 401 and the outlet 402 are provided with left mounting grooves 4013 and right mounting grooves 4014 on their left and right sides for installing left and right clamping components 412;

[0066] The present application provides the following two structures of upper and lower clamping components 411 and left and right clamping components 412:

[0067] The first one, such as Fig.10As shown, the upper and lower clamping components 411 and the left and right clamping components 412 are composed of a clamping block 4111, a fixed cylinder 4112, a telescopic cylinder 4113 and a spring 4114. Two telescopic cylinders 4113 are fixedly installed on the clamping block 4111. The telescopic cylinder 4113 is slidably sleeved on the fixed cylinder 4112. The fixed cylinder 4112 is respectively fixed in the upper mounting groove 4011, the lower mounting groove 4012, the left mounting groove 4013 and the right mounting groove 4014; a spring 4114 is arranged inside the fixed cylinder 4112 and the telescopic cylinder 4113, one end of the spring 4114 is fixedly connected to the fixed cylinder 4112, and the other end is fixedly connected to the telescopic cylinder 4113; a magnetic block 4115 is arranged at the position where the telescopic cylinder 4113 is connected to the spring 4114, and an electromagnet 4116 is arranged at the position where the fixed cylinder 4112 is connected to the spring 4114;

[0068] When a wire break is detected (the tension sensor on the guide wheel 431 determines whether the wire is broken), the electromagnet 4116 is turned on, generating magnetism that repels the magnetic block 4115. The repulsive force generated will push the telescopic tube 4113 to extend. When the telescopic tubes 4113 of the upper and lower clamping assemblies 411 and the left and right clamping assemblies 412 extend inward at the same time, the clamping block 4111 will clamp the diamond wire 330.

[0069] The second type, such as Fig.11 As shown, the upper and lower clamping components 411 and the left and right clamping components 412 are composed of a clamping block 4111 and an automatic telescopic rod 4117. Two automatic telescopic rods 4117 are fixedly installed on the clamping block 4111. The automatic telescopic rods 4117 are respectively fixed in the upper mounting groove 4011, the lower mounting groove 4012, the left mounting groove 4013, and the right mounting groove 4014; the automatic telescopic rod 4117 is an electrically controlled telescopic rod, which automatically extends when the wire is broken, and pushes the clamping block 4111 to clamp the diamond wire 330.

[0070] The structures of the above-mentioned upper and lower clamping components 411 and left and right clamping components 412 clamp the diamond wire 330 by driving the clamping block 4111 to move inward, and clamp inward from four directions simultaneously: top, bottom, left and right. This ensures that the clamped diamond wire 330 is located in the middle position, making it convenient for people to quickly find the diamond wire 330. The surface of the clamping block 4111 is provided with an anti-slip texture.

[0071] like Figure 1 - Fig. 20As shown, two groups of tensioning wheel devices 420 are provided, which are symmetrically arranged on the cutting frame 400. The tensioning wheel device 420 includes a tensioning wheel 421 and a first-level adjustment component 422. The tensioning wheel 421 is located on the inner side of the cutting frame 400, and the first-level adjustment component 422 is located on the outer side of the cutting frame 400. The position of the tensioning wheel 421 can be adjusted by the first-level adjustment component 422. After the diamond wire 330 is installed, the tensioning wheel 421 can be adjusted by the first-level adjustment component 422 to allow the initial tension of the diamond wire 330 to reach a predetermined range (the initial tension of the diamond wire 330 is measured by the tension sensor on the guide wheel 431).

[0072] The first-stage adjustment component 422 includes a sliding rod 4221, a slider 4222, a screw rod 4223, a light rod 4224 and a side plate 4225. The tension wheel 421 is rotatably mounted on the end of the sliding rod 4221. A long strip-shaped adjustment slot 405 is provided on the cutting frame 400. The sliding rod 4221 passes through the adjustment slot 405 and is fixed to the slider 4222. Two side plates 4225 are provided and fixedly mounted on the outer surface of the cutting frame 400. The head and tail ends of the light rod 4224 are respectively connected to the two side plates. 4225 is fixedly connected, and two light rods 4224 are also arranged. The two light rods 4224 are fixed in parallel between the two side plates 4225. The head and tail ends of the screw rod 4223 are rotationally connected with the two side plates 4225, and the end of the screw rod 4223 passes through the side plates 4225 and is connected with the driving member 4226. The slider 4222 is penetrated by the screw rod 4223 and the light rod 4224, and the slider 4222 is threadedly connected to the screw rod 4223, and the slider 4222 is slidingly connected to the light rod 4224.

[0073] The driving member 4226 can be configured as a hand wheel (eg Fig.14 As shown, the operator manually turns the hand wheel, and the slider 4222 and the tensioning wheel 421 move up and down to adjust the tension of the diamond wire 330; the driving member 4226 can also be set as a motor (such as Fig.15 As shown), the position of the tensioning wheel 421 can be automatically adjusted by the motor.

[0074] like Figure 4 - Figure 6 As shown, three groups of guide wheel devices 430 are provided, which are arranged in a triangular shape on the cutting frame 400, and two groups of guide wheel devices 430 are respectively located on the upper and lower sides of the processing port 403, and the guide wheel devices 430 include guide wheels 431 and secondary adjustment components 432, and the guide wheels 431 and the secondary adjustment components 432 are located on the inner side of the cutting frame.

[0075] Since the tension wheel 421 is a single-groove guide wheel (there is only one wire groove for installing the diamond wire 330 on the outer edge), and the guide wheel 431 is a multi-groove guide wheel (there are multiple wire grooves for installing the diamond wire 330 on the outer edge), when the diamond wire 330 passes through the tension wheel 421, it passes through the two sets of guide wheels 431 in sequence, and then passes through the wire outlet 402, then there is only one diamond wire 330 at the processing port 403, and single-wire cutting can be performed at this time (such as Figure 4 As shown in FIG. 4 ), if the diamond wire 330 passes through the tensioning wheel 421, passes through the three sets of guide wheels 431 in sequence, and is wound along the wire grooves of the three sets of guide wheels 431 for multiple turns, then there are only multiple parallel diamond wires 330 at the processing opening 403, and multi-wire cutting can be performed at this time (such as Figure 5 as shown).

[0076] During the cutting process, the diamond wire 330 is released by the winding roller 310 and reeled up by the take-up roller 320. Therefore, the reeling and releasing amounts of the winding roller 310 and the take-up roller 320 need to be kept consistent to stabilize the tension of the diamond wire 330. However, the winding diameter of the diamond wire 330 wound on the winding roller 310 and the take-up roller 320 and the position of the reeling and releasing wires change at any time. Therefore, it is difficult to ensure that the reeling and releasing amounts are completely consistent. This is also one of the reasons for the unstable tension of the diamond wire 330. However, this tension change is very small. Therefore, during the cutting process, micro-adjustment is required. The function of the secondary adjustment component 432 is to micro-adjust the tension of the diamond wire 330.

[0077] like Fig.16 As shown, the secondary adjustment assembly 432 includes a fixed adjustment seat 4321, a lateral push block 4322 and a vertical fine-tuning block 4323. The guide wheel 431 is rotatably mounted on the vertical fine-tuning block 4323. The fixed adjustment seat 4321 is fixed on the inner surface of the cutting frame 400. The fixed adjustment seat 4321 is U-shaped. The bottom of the lateral push block 4322 is slidably mounted with the fixed adjustment seat 4321. The top of the lateral push block 4322 is an inclined surface. The bottom of the vertical fine-tuning block 4323 is also Inclined surface, the bottom of the vertical fine-tuning block 4323 is fitted with the top of the horizontal pushing block 4322, the two sides of the vertical fine-tuning block 4323 are slidingly connected to the fixed adjustment seat 4321, the right side of the horizontal pushing block 4322 is fixedly connected to the fine-tuning spring 4324, the right side of the fine-tuning spring 4324 is fixedly connected to the fixed adjustment seat 4321, the horizontal pushing block 4322 is magnetic, and the fixed adjustment seat 4321 is provided with a fine-tuning electromagnet 4325 at the connection position with the fine-tuning spring 4324.

[0078] By controlling the current of the fine-tuning electromagnet 4325, the strength of the magnetic field of the electromagnet 4325 can be controlled. For example, by increasing the current, the magnetic field of the fine-tuning electromagnet 4325 becomes stronger, and the repulsive force (or attractive force) on the lateral push block 4322 becomes larger, which will push the lateral push block 4322 to move left (or right) until it reaches a balance with the fine-tuning spring 4324. The leftward movement of the lateral push block 4322 will push the vertical fine-tuning block 4323 to move upward, thereby achieving the purpose of moving the guide wheel 431 upward.

[0079] The guide wheel 431 is provided with a tension sensor, and a controller 600 is fixedly installed on the outer surface of the cutting frame 400. The data measured by the tension sensor is displayed on the controller 600, so the controller 600 can display the tension of the diamond wire 330 in real time.

[0080] The use steps and working process of the present invention are as follows:

[0081] S1: Install the diamond wire 330, fix the head end of the diamond wire 330 on the winding roller 310, then rotate the winding roller 310 to neatly wind the diamond wire 330 on the winding roller 310, then pass the diamond wire 330 through the wire inlet 401, the tensioning wheel device 420, the guide wheel device 430, and the wire outlet 402 in sequence, and fix the end of the diamond wire 330 on the take-up roller 320;

[0082] S2: Adjust the tensioning wheel device 420 to make the initial tension of the diamond wire 330 reach a set value;

[0083] S3: Mount the silicon carbide crystal rod 500 on the rotary three-jaw chuck 210, and then feed the silicon carbide crystal rod 500 through the cross slide module 220 to bring the silicon carbide crystal rod 500 close to the diamond wire 330;

[0084] S4: Start the winding roller 310 and the take-up roller 320 to allow the diamond wire 330 to run and start the cutting operation. Meanwhile, the rotary three-jaw chuck 210 keeps rotating and feeding to adjust the cutting position of the silicon carbide crystal rod 500, and the slice cooling device 440 adjusts the spraying angle accordingly.

[0085] S5: During the cutting process, the tension sensor always monitors the tension of the diamond wire 330, and the guide wheel 431 automatically adjusts its position according to the monitored tension to keep the tension within a suitable range;

[0086] S6: When the tension sensor detects that the wire is broken, the winding roller 310, the take-up roller 320, the cross slide module 220, and the rotary three-jaw chuck 210 will stop immediately, and the cutting wire breaking clamping device 410 will clamp at the same time;

[0087] S7: The operator touches the diamond wire 330 at the wire outlet 402 and finds the wire end, and then removes the waste wire on the wire take-up roller 320;

[0088] S8: The operator touches the diamond wire 330 at the wire inlet 401 and finds the wire end, passes the found wire end through the tensioning wheel device 420, the guide wheel device 430, and the wire outlet 402 in sequence, and finally fixes it on the wire take-up roller 320. Then, the tensioning wheel device 420 is adjusted to make the tension of the diamond wire 330 reach the set value, and then the cutting operation can be continued.

[0089] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A silicon carbide ingot slicing device, comprising a base (100), an ingot fixing frame (200), a winding frame (300) and a cutting frame (400), characterized in that: A rotating three-jaw chuck (210) is installed on the crystal rod fixing frame (200), and the rotating three-jaw chuck (210) is used to fix the silicon carbide crystal rod (500). The bottom of the crystal rod fixing frame (200) is fixed on a cross slide module (220) composed of an X-axis slide module (221) and a Y-axis slide module (222), and the cross slide module (220) is fixedly installed on the base (100); A winding roller (310) and a take-up roller (320) are rotatably mounted on the winding frame (300), and a diamond wire (330) is wound around the winding roller (310) and the take-up roller (320). The bottom of the winding frame (300) is fixed on a linear slide module (340), and the linear slide module (340) is fixedly mounted on the base (100); The cutting frame (400) is fixedly mounted on the base (100), and is provided with a cutting wire breaking clamping device (410), a tensioning wheel device (420), a guide wheel device (430), and a slice cooling device (440). A wire inlet (401) and a wire outlet (402) are provided on the side of the cutting frame (400) at positions corresponding to the wire winding roller (310) and the wire take-up roller (320). The wire inlet (401) and the wire outlet (402) are provided with a cutting wire breaking clamping device (410). The head end of the diamond wire (330) is fixed on the wire winding roller (310) and is wound around the wire winding roller (310) for several turns. The diamond wire (330) passes through the wire inlet (401), the tensioning wheel device (420), the guide wheel device (430), and the wire outlet (402) in sequence, and the end end is fixed on the wire take-up roller (320); The guide wheel device (430) comprises a guide wheel (431), and the guide wheel (431) is provided with a tension sensor; The cutting line breaking clamping device (410) comprises an upper and lower clamping assembly (411) and a left and right clamping assembly (412), and the upper and lower clamping assembly (411) and the left and right clamping assembly (412) are located in different planes; The wire inlet (401) and the wire outlet (402) are provided with upper mounting grooves (4011) and lower mounting grooves (4012) at their upper and lower sides for mounting upper and lower clamping assemblies (411); the wire inlet (401) and the wire outlet (402) are provided with left mounting grooves (4013) and right mounting grooves (4014) at their left and right sides for mounting left and right clamping assemblies (412); The upper and lower clamping assemblies (411) and the left and right clamping assemblies (412) are composed of a clamping block (4111), a fixed cylinder (4112), a telescopic cylinder (4113) and a spring (4114); two telescopic cylinders (4113) are fixedly mounted on the clamping block (4111); the telescopic cylinders (4113) are slidably mounted on the fixed cylinder (4112); springs (4114) are arranged inside the fixed cylinder (4112) and the telescopic cylinder (4113); one end of the spring (4114) is fixedly connected to the fixed cylinder (4112), and the other end is fixedly connected to the telescopic cylinder (4113); The telescopic cylinder (4113) is provided with a magnetic block (4115) at a position where it is connected to the spring (4114); the fixed cylinder (4112) is provided with an electromagnet (4116) at a position where it is connected to the spring (4114); and the fixed cylinders (4112) of the upper and lower clamping assemblies (411) and the left and right clamping assemblies (412) are respectively fixed in the upper mounting groove (4011), the lower mounting groove (4012), the left mounting groove (4013), and the right mounting groove (4014).

2. The silicon carbide ingot slicing device according to claim 1, characterized in that: The upper and lower clamping components (411) and the left and right clamping components (412) may also be composed of a clamping block (4111) and an automatic telescopic rod (4117), wherein two automatic telescopic rods (4117) are fixedly mounted on the clamping block (4111), and the automatic telescopic rods (4117) of the upper and lower clamping components (411) and the left and right clamping components (412) are respectively fixed in the upper mounting groove (4011), the lower mounting groove (4012), the left mounting groove (4013), and the right mounting groove (4014).

3. The silicon carbide ingot slicing device according to claim 1, characterized in that: The cutting frame (400) is in the shape of a shell, and the cutting frame (400) is provided with a processing opening (403) at a position corresponding to the rotary three-jaw chuck (210), and the cutting frame (400) is provided with a waist-shaped hole (404) above the processing opening (403) for fixing and installing a slice cooling device (440); The slice cooling device (440) is composed of an automatic adjustment rod (441), a rotating seat (442) and a liquid spraying pipe (443); the head end of the automatic adjustment rod (441) is fixedly mounted on the waist-shaped hole (404) via a fixed seat (4411); the end of the automatic adjustment rod (441) is fixedly mounted on a rotating motor (4412); the rotating seat (442) is fixedly mounted on the rotating motor (4412) and driven to rotate by the rotating motor (4412); the liquid spraying pipe (443) is fixedly mounted on the rotating seat (442); and the liquid spraying pipe (443) is a universal tube.

4. The silicon carbide ingot slicing device according to claim 3, characterized in that: The tension wheel device (420) is provided in two groups and is symmetrically arranged on the cutting frame (400); the tension wheel device (420) comprises a tension wheel (421) and a primary adjustment component (422); the tension wheel (421) is located inside the cutting frame (400), and the primary adjustment component (422) is located outside the cutting frame (400); The primary adjustment component (422) comprises a sliding rod (4221), a slider (4222), a screw rod (4223), a polished rod (4224) and a side plate (4225); the tension wheel (421) is rotatably mounted on the end of the sliding rod (4221); a long strip-shaped adjustment slot (405) is provided on the cutting machine frame (400); the sliding rod (4221) passes through the adjustment slot (405) and is fixed to the slider (4222); Two side plates (4225) are provided and fixedly mounted on the outer surface of the cutting machine frame (400); the head and tail ends of the polished rod (4224) are respectively fixedly connected to the two side plates (4225); two polished rods (4224) are also provided, and the two polished rods (4224) are fixed in parallel between the two side plates (4225); the head and tail ends of the lead screw (4223) are rotatably connected to the two side plates (4225), and the end of the lead screw (4223) passes through the side plates (4225) and is connected to the driving member (4226); the slider (4222) is penetrated by the lead screw (4223) and the polished rod (4224), and the slider (4222) is threadedly connected to the lead screw (4223), and the slider (4222) is slidably connected to the polished rod (4224).

5. The silicon carbide ingot slicing device according to claim 4, characterized in that: The guide wheel devices (430) are provided in three groups and are arranged in a triangular shape on the cutting machine frame (400), and two groups of the guide wheel devices (430) are respectively located on the upper side and the lower side of the processing opening (403), and the guide wheel devices (430) include guide wheels (431) and secondary adjustment components (432), and the guide wheels (431) and the secondary adjustment components (432) are both located on the inner side of the cutting machine frame; The secondary adjustment assembly (432) comprises a fixed adjustment seat (4321), a lateral push block (4322) and a vertical fine-tuning block (4323); the guide wheel (431) is rotatably mounted on the vertical fine-tuning block (4323); the fixed adjustment seat (4321) is fixed on the inner surface of the cutting frame (400); the fixed adjustment seat (4321) is U-shaped; the bottom of the lateral push block (4322) is slidably mounted on the fixed adjustment seat (4321); the top of the lateral push block (4322) is an inclined surface; the bottom of the vertical fine-tuning block (4323) is also The vertical fine-tuning block (4323) is an inclined surface, and the bottom of the vertical fine-tuning block (4323) is in contact with the top of the horizontal pushing block (4322). Both sides of the vertical fine-tuning block (4323) are slidably connected to the fixed adjustment seat (4321). The right side of the horizontal pushing block (4322) is fixedly connected to the fine-tuning spring (4324). The right side of the fine-tuning spring (4324) is fixedly connected to the fixed adjustment seat (4321). The horizontal pushing block (4322) is magnetic, and the fixed adjustment seat (4321) is provided with a fine-tuning electromagnet (4325) at the connection position with the fine-tuning spring (4324).

6. The silicon carbide ingot slicing device according to claim 5, characterized in that: The tension wheel (421) is a single-groove guide wheel, the guide wheel (431) is a multi-groove guide wheel, the guide wheel (431) is provided with a tension sensor, and a controller (600) is fixedly mounted on the outer surface of the cutting frame (400), and data measured by the tension sensor is displayed on the controller (600).

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