Vacuum atmosphere protection method for thermalization of three-dimensional electrode foil and control system thereof

Abstract

The invention belongs to the technical field of electrode foil production, particularly relates to a vacuum atmosphere protection method for three-dimensional electrode foil thermalization and a control system thereof, and solves the problems of poor thermalization treatment effect and low quality of a thermalized finished product. The vacuum atmosphere protection method for three-dimensional electrode foil thermalization comprises the following steps that S1, a three-dimensional electrode foil roll is placed in a thermalization furnace; s2, controlling the thermalization furnace to be vacuum; s3, introducing a protective atmosphere; s4, the thermalization furnace is heated, and heating and protective atmosphere supply are stopped when thermalization is conducted for preset time c and the temperature reaches a preset range d1; s5, controlling the thermalization furnace to be vacuum again; s6, introducing a protective atmosphere; s7, the thermalization furnace is heated, and heating and protective atmosphere supply are stopped when thermalization is conducted for preset time c and the temperature reaches a preset range d2; and S8, completing thermalization. Through initial vacuum and at least one process vacuum, the content of residual air in the furnace is reduced, impurity gas and dust generated by reaction are discharged, and the quality of a finished product is optimized.

Description

Technical Field

[0001] The invention belongs to the technical field of electrode foil production, and in particular relates to a vacuum atmosphere protection method for heating a three-dimensional electrode foil and a control system thereof. Background Art

[0002] The thermal treatment during the preparation of aluminum foil has multiple effects, which together affect the final performance and quality of the aluminum foil. Specifically, it can improve the mechanical properties of the aluminum foil, improve the corrosion resistance of the aluminum foil, adjust the shape and size of the aluminum foil, and improve the processing performance of the aluminum foil.

[0003] However, among the thermal treatment methods of aluminum foil in the current existing technology, although some methods also require a vacuum environment for thermal treatment, due to equipment conditions or vacuum cost considerations, the vacuum environment cannot be completely vacuum, that is, there is still a certain amount of residual air in it, and as the thermal reaction proceeds, the thermal reaction may produce some impurity gases or impurity dust. The residual air and impurity components may cause oxidation and other effects on the aluminum foil, which will affect product quality and cause unnecessary losses. Summary of the Invention

[0004] The purpose of the present invention is to address the above-mentioned problems existing in the prior art and to propose a vacuum atmosphere protection method for thermalizing a three-dimensional electrode foil.

[0005] In order to achieve the purpose of the innovation of the present invention, the following technical solutions can be used:

[0006] A vacuum atmosphere protection method for heating a three-dimensional electrode foil comprises the following steps:

[0007] S1. placing the three-dimensional electrode foil roll in a thermal furnace;

[0008] S2, start the vacuum pump group, control the thermal furnace to vacuum, and the absolute vacuum degree is less than the preset value a;

[0009] S3, introduce protective atmosphere and control the pressure in the furnace within the preset range b;

[0010] S4, heating the thermal furnace, and when the temperature reaches the preset range d1 after the preset heating time c, stopping the heating and supplying the protective atmosphere;

[0011] S5, start the vacuum pump group again, control the thermal furnace to vacuum, and the absolute vacuum degree is less than the preset value a;

[0012] S6, introduce protective atmosphere; control the pressure in the furnace within the preset range b;

[0013] S7, heating the thermal furnace, and when the temperature reaches the preset range d2 after the preset heating time c, stopping the heating and supplying the protective atmosphere;

[0014] S8. The three-dimensional electrode foil coil is heated.

[0015] The vacuum atmosphere protection method of the present invention is used to control the environmental conditions during the thermal treatment of the composite three-dimensional electrode foil. The thermal treatment of the foil roll is carried out in a thermal furnace. Before the thermal treatment begins, the original air in the furnace is discharged, the furnace environment is adjusted to a vacuum state, and a protective atmosphere that does not react with the foil roll is introduced to ensure that the foil roll is heated evenly while also preventing the foil roll from being oxidized by the original air in the furnace. In addition, during the thermal treatment, at least one process vacuum treatment is specially added, that is, after a period of thermal treatment, the vacuum treatment and the introduction of the protective atmosphere are performed again. This treatment can further discharge the residual air in the furnace and the impurity gas and solid small particles generated during the heating process of the foil roll, thereby optimizing the thermal treatment effect of the foil roll.

[0016] In the above-mentioned vacuum atmosphere protection method for thermally heating a three-dimensional electrode foil, in step S1, the three-dimensional electrode foil is placed in a thermal furnace in a horizontal posture.

[0017] Since there may be stratification in the furnace atmosphere, such as the protective atmosphere concentrated in the lower part and the original air concentrated in the upper part, placing the foil roll in a horizontal position is beneficial to controlling the environmental conditions at both ends of the foil roll to be consistent or similar, thereby improving the consistency of the heating effect.

[0018] In the above-mentioned vacuum atmosphere protection method for thermally treating a three-dimensional electrode foil, the preset value a is less than or equal to 0.5 mbar.

[0019] In the above-mentioned vacuum atmosphere protection method for thermally heating a three-dimensional electrode foil, the protective atmosphere includes nitrogen or argon, and the preset range b includes 80 to 120 mbar.

[0020] In the above-mentioned vacuum atmosphere protection method for thermally treating a three-dimensional electrode foil, the preset time c is 1 to 2 hours.

[0021] In the above-mentioned vacuum atmosphere protection method for thermally heating a three-dimensional electrode foil, the preset range d1 includes 250-280°C; and the preset range d2 includes 350-380°C.

[0022] Since the atmosphere conditions in the furnace after process vacuum are better than those after initial vacuum, the concentration of the protective atmosphere is higher at this time, that is, the atmosphere conditions after process vacuum are more suitable for high-quality thermal treatment. Therefore, the temperature conditions after process vacuum are higher than those after initial vacuum, which improves the thermal efficiency.

[0023] In the above-mentioned vacuum atmosphere protection method for heating the three-dimensional electrode foil, step S7.5 is further included after step S7, and step S7.5 includes repeating the process of steps S5 to S7 at least once.

[0024] The process vacuum can be repeated at least once to further reduce the original air content in the furnace, while also discharging impurities generated during the thermalization process and improving the thermalization quality.

[0025] Another object of the present invention is to address the above-mentioned problems in the prior art and to propose a vacuum atmosphere control system for thermalization of three-dimensional electrode foil.

[0026] In order to achieve the purpose of the innovative present invention, the following technical solutions can be used:

[0027] A vacuum atmosphere control system for heating three-dimensional electrode foil includes a heating furnace, which is suitable for the above-mentioned vacuum atmosphere protection method. The heating furnace is connected to a vacuum pump group through a vacuum pipeline and is connected to a protective atmosphere introduction device through an inflation pipeline. A temperature sensing component and a pressure sensing component are provided in the heating furnace. The temperature sensing component, pressure sensing component, vacuum pump group and protective atmosphere introduction device are all electrically connected to a control panel.

[0028] The vacuum atmosphere control system for the thermal treatment of the three-dimensional electrode foil provided by the present invention is used to implement the thermal treatment of the composite three-dimensional electrode foil, and can realize the control of the atmosphere conditions during the thermal treatment process to ensure the efficient and high-quality implementation of the thermal treatment. The thermal furnace, as the main component of the thermal treatment, has a sealed cavity that can be switched on and off. The foil roll is placed in the sealed cavity for corresponding treatment. The thermal furnace has a heating function and can provide the temperature conditions required for thermal treatment. The thermal furnace is also connected to a vacuum pump group and a protective atmosphere introduction device. The vacuum pump group is used to extract internal air, and the protective atmosphere introduction device is used to introduce inert gas that does not react with the foil roll into the furnace body. Corresponding switch valves are provided between the vacuum pump group and the protective atmosphere introduction device and the thermal furnace to control the on and off of the corresponding pipelines. A sensor component is also provided in the furnace body. The temperature sensor component is used to detect the temperature in the furnace, and the pressure sensor component is used to detect the air pressure in the furnace. These two sensors transmit corresponding detection data to the control panel, and the control panel adjusts the start and stop actions of the vacuum pump group and the protective atmosphere introduction device according to the environmental conditions in the furnace, with a high degree of automation. Among them, the thermal furnace 、 Vacuum pump unit 、 Protective atmosphere introduction device 、 The temperature sensor assembly, pressure sensor assembly and control panel are existing technologies and will not be described in detail here.

[0029] In the above-mentioned vacuum atmosphere control system for heating of three-dimensional electrode foil, the heating furnace is provided with at least one opening, the opening being controlled to open and close by a furnace door hinged on the furnace body; one or more groups of material racks are provided in the heating furnace; the material racks are fixed in the heating furnace, or the material racks are arranged in the heating furnace through a rotating structure and can move close to or away from the opening.

[0030] An opening is provided on the thermal furnace for placing or taking out the foil rolls to be processed. The furnace door is used to control the opening and closing of the opening. When closed, the furnace cavity is in a sealed state. The material rack in the thermal furnace is used to place the foil rolls. One foil roll corresponds to a group of material racks. Each group of material racks includes two frames, which are respectively connected to the two ends of the foil roll. The material rack can be fixed in the thermal furnace and installed firmly. In order to facilitate the placement or removal of foil rolls, a rotating structure is also provided between the material rack and the thermal furnace. Each material rack can be moved close to or away from the opening. For example, when loading, after placing the foil roll on a group of material racks, the material rack is pushed deep into the furnace body, and the second foil roll can be placed on the second group of material racks in front, which conveniently achieves the effect of placing multiple foil rolls in a straight line. When unloading after processing, the reverse operation can be performed.

[0031] In the above-mentioned vacuum atmosphere control system for thermalization of three-dimensional electrode foil, the rotary structure includes at least two horizontal rotating shafts rotatably connected to the bottom of the thermalization furnace in parallel with each other, an annular rotary belt is rotatably connected to the horizontal rotating shaft, and a plurality of fixing parts are distributed along the length direction on both sides of the rotary belt, and the material rack is detachably fixed to the fixing parts;

[0032] A horizontal sliding surface is provided in the thermal furnace. The horizontal sliding surface is located between the two horizontal rotating shafts and has a rotating belt through hole below. The first horizontal section of the lower part of the rotating belt passes through the rotating belt through hole, and the second horizontal section of the upper part slides on the horizontal sliding surface.

[0033] The material rack is in an inverted T-shape, comprising a vertical supporting section and a horizontal anti-falling section, wherein the anti-falling section slides on the horizontal sliding surface, the middle portion of the anti-falling section is detachably connected to the fixing portion, and the upper end of the supporting section is provided with a V-shaped mounting portion;

[0034] Limit bars are provided at both ends of the second horizontal section, and the limit bars are fixed in the thermal furnace to limit the material rack from sliding out of the horizontal sliding surface;

[0035] The opening is located in the length direction of the horizontal sliding surface.

[0036] The rotating structure specifically controls the movement of the material rack using a rotating belt and a horizontal sliding surface. The rotating belt is elliptical in shape, with both ends pivotally connected to the thermal furnace via horizontal shafts. A second horizontal section at its upper portion slides on the horizontal sliding surface, which also supports and slides the material rack. The rack is fixedly connected to a fixed portion on the rotating belt, and the rotation of the rotating belt drives the rack's sliding movement. The rack and the fixed portion are detachably connected, for example, by bolts, allowing for easy installation when loading and removal when unloading, ensuring smooth rotation of the rotating belt. The material rack is an inverted T-shaped rack, with a V-shaped support section on its supporting section used to support the ends of the foil roll. An anti-fall section slides on the horizontal sliding surface, ensuring the vertical orientation of the support section. To prevent the rack from sliding off the horizontal sliding surface and tipping over, limit bars are provided at both ends of the second horizontal section. These limit bars are fixed within the thermal furnace and located above the ends of the second horizontal section to block the rack. Of course, the details of the fixing portion and its coordination with the material rack are common knowledge and will not be elaborated in detail.

[0037] Furthermore, two racks of a set of racks are connected by a cross bar to form a U-shaped stable structure.

[0038] As an optimization, the rotary belt can be a chain belt body, both sides of which have a basically synchronous movement state in the length direction, so as to avoid the problem that the corresponding set of fixed parts are twisted and cause the end of the foil roll to slip.

[0039] As an optimization, at least one horizontal rotating shaft can also be connected to a corresponding rotation drive assembly to drive the rotation of the rotary belt. The rotation drive assembly and the transmission details between it and the horizontal rotating shaft are common knowledge and will not be elaborated in detail.

[0040] Compared with the prior art, the present invention has the following advantages:

[0041] 1. The vacuum atmosphere protection method of the present invention specifically adds at least one process vacuum treatment. That is, after a period of heating, the vacuum is again evacuated and the protective atmosphere is filled. This treatment can further expel residual air in the furnace as well as impurity gases and small solid particles generated during the foil heating process, thereby optimizing the foil heating effect.

[0042] 2. The vacuum atmosphere control system for thermal treatment of the three-dimensional electrode foil of the present invention is used to implement thermal treatment of the composite three-dimensional electrode foil, which can control the atmosphere conditions during the thermal treatment process and ensure efficient and high-quality thermal treatment.

[0043] 3. In order to facilitate the placement or removal of foil rolls, a rotary structure is provided between the material rack and the heating furnace, so that the material rack can be moved closer to or away from the opening.

[0044] 4. The material rack can be pulled to slide and move by rotating the rotary belt. The material rack and the fixed part are detachably connected, so that the corresponding material rack can be installed when loading is required, and can be removed in time when unloading is required to ensure the smooth rotation of the rotary belt. Limiting bars are also provided at both ends of the second horizontal section, which can be used to block the material rack to prevent it from sliding out of the horizontal sliding surface and tipping over. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 This is a schematic flow chart of the vacuum atmosphere protection method for heating a three-dimensional electrode foil provided by the present invention;

[0046] Figure 2 Schematic diagram of a vacuum atmosphere control system for heating a three-dimensional electrode foil provided by the present invention (Example 1);

[0047] Figure 3 Schematic diagram of the thermal furnace provided by the present invention (Example 2);

[0048] Figure 4 Schematic diagram of the structure of the material rack provided by the present invention (Example 2).

[0049] In the figure, there are thermal furnace 1, opening 11, furnace door 12, horizontal sliding surface 13, rotary belt through hole 14, limit bar 15, vacuum pump group 2, vacuum pipeline 21, protective atmosphere introduction device 3, inflation pipeline 31, control panel 4, material rack 5, support section 51, anti-falling section 52, mounting part 53, rotary structure 6, horizontal rotating shaft 61, rotary belt 62, first horizontal section 63, second horizontal section 64, fixing part 65, and foil roll 7. DETAILED DESCRIPTION

[0050] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.

[0051] Example 1

[0052] Regarding the specific implementation of the protection method, for example Figure 1As shown, first, the prepared composite three-dimensional foil roll 7 is placed horizontally on the material rack 5 in the 1-ton thermal furnace 1. After closing the furnace door 12, the vacuum pump group 2 is controlled by the control panel 4 to start extracting the air in the furnace until the absolute vacuum value in the furnace is less than 0.5mbar. At this time, the vacuum extraction is stopped; the protective atmosphere is controlled to be filled with nitrogen or argon or other protective gases through the protective atmosphere introduction device 3, and the pressure is controlled at 80-120mbar to ensure that the foil roll is heated evenly and the foil roll 7 is not oxidized; then the thermal furnace 1 starts heating. After heating for 1-2 hours, and the temperature in the furnace is When the temperature reaches 250-280°C, heating furnace 1 stops heating and the protective atmosphere supply is also stopped. Vacuum pump group 2 starts operating and draws air for 1-2 hours. When the absolute vacuum degree is less than 0.5 mbar, it stops operating and the atmosphere supply of protective atmosphere introduction device 3 is restored. When the furnace pressure reaches 80-120 mbar, heating furnace 1 restarts heating. When the temperature reaches 350-380°C, the above process is repeated once until the heating is completed. This reduces the loss of foil roll 7 caused by oxidation and impurities after heating and ensures uniform heating and consistent performance of the entire foil roll 7.

[0053] Specifically, this vacuum atmosphere protection method is used to control the environmental conditions during the thermal treatment of the composite three-dimensional electrode foil. The thermal treatment of the foil roll is carried out in a thermal furnace 1. Before the thermal treatment begins, the original air in the furnace is discharged, the furnace environment is adjusted to a vacuum state, and a protective atmosphere that does not react with the foil roll is introduced to ensure that the foil roll is heated evenly while also preventing the foil roll from being oxidized by the original air in the furnace. In addition, during the thermal treatment process, two process vacuum treatments are specially added, that is, after a period of thermal treatment, the vacuum treatment and the introduction of the protective atmosphere are performed again. This treatment can further discharge the residual air in the furnace and the impurity gases and small solid particles generated during the heating process of the foil roll, thereby optimizing the thermal treatment effect of the foil roll.

[0054] Regarding the specific implementation of the control system, for example Figure 2 As shown, the vacuum atmosphere control system for thermalization of the three-dimensional electrode foil includes a thermalization furnace 1, which is applicable to the above-mentioned vacuum atmosphere protection method. The thermalization furnace 1 is connected to the vacuum pump group 2 through a vacuum pipeline 21, and is connected to the protective atmosphere introduction device 3 through an inflation pipeline 31. A temperature sensing component and a pressure sensing component are provided in the thermalization furnace 1. The temperature sensing component, the pressure sensing component, the vacuum pump group 2 and the protective atmosphere introduction device 3 are all electrically connected to the control panel 4.

[0055] Specifically, the vacuum atmosphere control system for thermal treatment of the three-dimensional electrode foil is used to implement the thermal treatment of the composite three-dimensional electrode foil. It can control the atmosphere conditions during the thermal treatment process to ensure efficient and high-quality thermal treatment. The thermal furnace 1, as the main component of the thermal treatment, has a sealed cavity that can be opened and closed. The foil roll is placed in the sealed cavity for corresponding treatment. The thermal furnace 1 has a heating function and can provide the temperature conditions required for thermal treatment. The thermal furnace 1 is also connected to a vacuum pump group 2 and a protective atmosphere introduction device 3. The vacuum pump group 2 is used to extract internal air, and the protective atmosphere introduction device 3 is used to introduce an inert gas that does not react with the foil roll into the furnace. Corresponding switch valves are provided between the vacuum pump group 2 and the protective atmosphere introduction device 3 and the thermal furnace 1 to control the opening and closing of the corresponding pipelines. A sensor component is also provided in the furnace body. The temperature sensor component is used to detect the temperature in the furnace, and the pressure sensor component is used to detect the air pressure in the furnace. These two sensors transmit the corresponding detection data to the control panel 4, which adjusts the start and stop actions of the vacuum pump group 2 and the protective atmosphere introduction device 3 according to the environmental conditions in the furnace, with a high degree of automation.

[0056] In this embodiment, the thermal furnace 1 is provided with an opening 11 , which is opened and closed by a furnace door 12 hinged to the furnace body. A plurality of material racks 5 are provided in the thermal furnace 1 , and the material racks 5 are fixed in the thermal furnace 1 .

[0057] Specifically, an opening 11 is provided on the thermal furnace 1 for placing or taking out the foil roll to be processed. The furnace door 12 is used to control the opening and closing of the opening 11. When closed, the furnace cavity is in a sealed state. The material rack 5 in the thermal furnace 1 is used to place the foil roll. One foil roll corresponds to a group of material racks 5. Each group of material racks 5 includes two frames, which are respectively connected to the two ends of the foil roll. The material rack 5 can be fixed in the thermal furnace 1 and is firmly installed.

[0058] Example 2

[0059] The specific working principle of this embodiment is basically the same as that of embodiment 1, and the difference lies in the setting method of the material rack 5.

[0060] Specific implementation examples Figure 3 、 4As shown, the material rack 5 is arranged in the thermal furnace 1 through the rotary structure 6, and can be moved close to or away from the opening 11. The rotary structure 6 includes two horizontal rotating shafts 61 that are rotatably connected to the bottom of the thermal furnace 1 in parallel with each other. An annular rotary belt 62 is rotatably connected to the horizontal rotating shaft 61. A plurality of fixing parts 65 are distributed on both sides of the rotary belt 62 along the length direction. The material rack 5 and the fixing part 65 are detachably fixedly connected; a horizontal sliding surface 13 is provided in the thermal furnace 1. The horizontal sliding surface 13 is located between the two horizontal rotating shafts 61 and is provided with a rotary belt through hole 14 at the bottom. The first part of the lower part of the rotary belt 62 is fixed to the rotating belt 62. The horizontal section 63 is passed through a rotating belt through-hole 14, and the upper second horizontal section 64 slides on the horizontal sliding surface 13; the material rack 5 is in an inverted T shape, including a vertical support section 51 and a horizontal anti-fall section 52, the anti-fall section 52 slides on the horizontal sliding surface 13, the middle part of the anti-fall section 52 is detachably connected to the fixed part 65, and the upper end of the support section 51 is provided with a V-shaped mounting portion 53; limit bars 15 are provided at both ends of the second horizontal section 64, and the limit bars 15 are fixed in the thermal furnace 1 to limit the material rack 5 from sliding out of the horizontal sliding surface 13; the opening 11 is located in the length direction of the horizontal sliding surface 13.

[0061] Specifically, to facilitate the placement and removal of foil rolls 7 in an arranged manner, a rotary structure 6 is provided between the material racks 5 and the thermal furnace 1, allowing each material rack 5 to move toward or away from the opening 11. The rotary structure 6 specifically comprises a rotary belt 62 and a horizontal sliding surface 13 to control the movement of the material racks 5. The rotary belt 62 is elliptical in shape, with both ends rotatably connected to the thermal furnace 1 via a horizontal rotating shaft 61. A second horizontal section 64 on the upper portion of the rotary belt is slidably connected to the horizontal sliding surface 13, which is also used to support and slide the material racks 5. The material racks 5 are fixedly connected to a fixed portion 65 on the rotary belt. The rotation of the rotary belt 62 can pull the material racks 5 to slide. The material racks 5 and the fixed portion 65 are detachably connected by bolts, making it easy to install the corresponding material rack 5 when loading is required and to remove it in time when unloading is required to ensure smooth rotation of the rotary belt 62. The material rack 5 is an inverted T-shaped structure. The V-shaped mounting portion 53 on its support section 51 is used to support the ends of the foil roll 7. The anti-fall section 52 slides on the horizontal sliding surface 13 to ensure that the support section 51 remains vertical. To prevent the material rack 5 from sliding off the horizontal sliding surface 13 and tipping over, limit bars 15 are provided at both ends of the second horizontal section 64. These limit bars 15 are fixed within the thermalizing furnace 1 and located above the ends of the second horizontal section 64 to block the material rack 5.

[0062] In this embodiment, the rotary belt 62 is a chain belt body, and teeth are evenly arranged on the horizontal rotating shaft in the circumferential direction. The teeth and the side of the chain belt body are engaged and transmitted to ensure that the two sides of the rotary belt 62 have a basically synchronous movement state in the length direction, avoiding the problem of the corresponding set of fixed parts 65 twisting and causing the end of the foil roll 7 to slip.

[0063] As a further optimization, one of the horizontal rotating shafts 61 is connected to a corresponding rotation driving assembly for driving the rotation of the rotating belt 62 .

[0064] The specific working principle is as follows: when loading, the furnace door 12 is opened, and a group of material racks 5 are placed on the horizontal sliding surface 13 and fixed on the fixing portion 65 near the opening 11. After the foil rolls 7 are placed on the group of material racks 5, the material racks 5 are pushed deep into the furnace body. Then, the second group of material racks 5 are placed on the horizontal sliding surface 13 on the front side and fixed with the fixing portion 65 newly slid onto the horizontal sliding surface 13. Then, the second foil roll 7 can be placed. Similarly, multiple foil rolls 7 can be placed until the frontmost material rack 5 is blocked by the limit bar 15.

[0065] When the heat treatment is completed and the material is unloaded, open the furnace door 12, remove the foil roll 7 close to the opening 11, and remove the set of material racks 5. Pull the next foil roll 7 and the material rack 5 toward the opening 11 to remove the foil roll 7 and remove the corresponding material rack 5. Similarly, all the foil rolls 7 can be taken out and unloaded.

[0066] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope of the appended claims.

Claims

1. A vacuum atmosphere protection method for heating a three-dimensional electrode foil, characterized in that: The following steps are involved: S1. placing the three-dimensional electrode foil roll in a thermal furnace; S2, start the vacuum pump group, control the thermal furnace to vacuum, and the absolute vacuum degree is less than the preset value a; S3, introduce protective atmosphere and control the pressure in the furnace within the preset range b; S4, heating the thermal furnace, and when the preset heating time c and the temperature reaches the preset range d1, stopping the heating and supply of the protective atmosphere; S5, start the vacuum pump group again, control the thermal furnace to vacuum, and the absolute vacuum degree is less than the preset value a; S6, introduce protective atmosphere; control the pressure in the furnace within the preset range b; S7, heating the thermal furnace, and when the preset heating time c and the temperature reaches the preset range d2, stopping the heating and supplying the protective atmosphere; S8. The three-dimensional electrode foil roll is heated.

2. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: In the step S1, the three-dimensional electrode foil is placed in a thermal furnace in a horizontal position.

3. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: The preset value a is less than or equal to 0.5 mbar.

4. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: The protective atmosphere includes nitrogen or argon, and the preset range b includes 80-120 mbar.

5. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: The preset time c includes 1 to 2 hours.

6. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: The preset range d1 includes 250-280°C; The preset range d2 includes 350-380°C.

7. The vacuum atmosphere protection method for heating a three-dimensional electrode foil according to claim 1, characterized in that: The step S7 also includes a step S7.5 after the step S7, and the step S7.5 includes repeating the process of steps S5 to S7 at least once.

8. A vacuum atmosphere control system for heating a three-dimensional electrode foil, comprising a heating furnace (1), characterized in that: The vacuum atmosphere protection method according to any one of claims 1 to 7 is applicable, wherein the thermalization furnace (1) is connected to the vacuum pump group (2) through a vacuum pipeline (21), and is connected to the protective atmosphere introduction device (3) through an air charging pipeline (31), and a temperature sensing component and a pressure sensing component are provided in the thermalization furnace (1), and the temperature sensing component, pressure sensing component, vacuum pump group (2) and protective atmosphere introduction device (3) are all electrically connected to a control panel (4).

9. The vacuum atmosphere control system for heating a three-dimensional electrode foil according to claim 8, characterized in that: The thermalizing furnace (1) is provided with at least one opening (11), and the opening (11) is controlled to be opened and closed by a furnace door (12) hinged to the furnace body; The thermalizing furnace (1) is provided with one or more groups of material racks (5); The material rack (5) is fixed in the thermal furnace (1), or the material rack (5) is arranged in the thermal furnace (1) via a rotating structure (6) and can move closer to or away from the opening (11).

10. The vacuum atmosphere control system for heating a three-dimensional electrode foil according to claim 9, characterized in that: The rotating structure (6) comprises at least two horizontal rotating shafts (61) which are rotatably connected to the bottom of the thermal furnace (1) in parallel with each other, and an annular rotating belt (62) is rotatably connected to the horizontal rotating shaft (61). A plurality of fixing parts (65) are distributed on both sides of the rotating belt (62) along the length direction, and the material rack (5) is detachably fixedly connected to the fixing parts (65); The thermalizing furnace (1) is provided with a horizontal sliding surface (13), the horizontal sliding surface (13) is located between two horizontal rotating shafts (61), and a rotating belt through hole (14) is provided below, a first horizontal section (63) at the lower part of the rotating belt (62) passes through the rotating belt through hole (14), and a second horizontal section (64) at the upper part slides on the horizontal sliding surface (13); The material rack (5) is in an inverted T-shape, comprising a vertical supporting section (51) and a horizontal anti-falling section (52); the anti-falling section (52) slides on the horizontal sliding surface (13); the middle portion of the anti-falling section (52) is detachably connected to the fixing portion (65); and the upper end of the supporting section (51) is provided with a V-shaped mounting portion (53); Limiting bars (15) are provided at both ends of the second horizontal section (64), and the limiting bars (15) are fixed in the thermal furnace (1) and are used to limit the material rack (5) from sliding out of the horizontal sliding surface (13); The opening (11) is located in the length direction of the horizontal sliding surface (13).

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