Measuring device for consumption depth of sputtering machine target material

Abstract

The invention provides a sputtering machine target material consumption depth measuring device, which is applied to the technical field of target material detection, and comprises a measuring device, a marking device and a moving plate, and the moving plate is clamped with a carrier plate for loading a workpiece; the measuring device comprises an auxiliary plate, a measuring rod and a distance measuring mechanism, and the measuring rod is inserted into the auxiliary plate and limited by a limiting plate; when the measuring device is in an initial state, the distance between each measuring rod and the distance measuring mechanism is the same, and when the carrier plate drives the workpiece to move upwards until the measuring rods are jacked up, the distance measuring mechanism measures the distance between the measuring rods and the distance measuring mechanism so as to measure the surface consumption depth of the workpiece; the marking device is used for marking the measuring result of the measuring device on the surface of the workpiece. The concave-convex state of the surface of the workpiece is prominently reflected through the distance change of the multiple measuring rods, the deepest consumed position of the surface of the target material is obtained through accurate data measured by the distance measuring mechanism, and the marking device is used for marking, so that a worker can determine the final position conveniently.

Description

Technical Field

[0001] The invention belongs to the technical field of target material detection, and in particular relates to a device for measuring the consumption depth of a sputtering machine target material. Background Art

[0002] The coating target is a sputtering source that forms various functional thin films on the substrate through magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions. The target material is the target material bombarded by high-speed energetic particles. It is used in high-energy laser weapons. When lasers with different power densities, different output waveforms, and different wavelengths interact with different target materials, different killing and destructive effects will be produced.

[0003] After the target has been used for a period of time, its surface flatness needs to be tested to check the degree of surface consumption. The current method of measuring the consumption of sputtering machine targets is to place a metal rod on the upper surface of the target and then measure it with a vernier caliper or needle thickness gauge to calculate the thickness of the target consumption. This method requires point-by-point measurement, which is not only time-consuming and labor-intensive, but also difficult to find the location with the deepest consumption. Summary of the invention

[0004] In view of the above-mentioned problems in the prior art, the purpose of the present invention is to provide a device for measuring the consumption depth of a sputtering machine target material, which can highlight the concave and convex state of the surface of the workpiece through the distance change of multiple measuring rods, and obtain the position of the deepest consumption on the target surface through accurate data measured by the distance measuring mechanism, and mark it through a marking device to facilitate the staff to determine the final position.

[0005] A device for measuring the consumption depth of a sputtering target material comprises a measuring station and a marking station, wherein the measuring station is provided with a measuring device, and the marking station is provided with a marking device, wherein a movable plate driven by a driving mechanism to reciprocate is provided between the measuring station and the marking station, wherein a carrier plate capable of moving up and down is clamped on the movable plate, and the carrier plate is used to load a test workpiece; the measuring device comprises an auxiliary plate, a measuring rod and a distance measuring mechanism, wherein the measuring rod is plugged into the auxiliary plate and limited by a limit plate, and the distance measuring mechanism is located above the measuring rod; a plurality of measuring rods are provided, and the plurality of measuring rods are arranged in an array on the auxiliary plate. The measuring rods distributed in an array divide the surface of the test workpiece into a number of grid areas, and each grid area corresponds to a measuring rod; when the measuring device is in an initial state, the distance between each measuring rod and the distance measuring mechanism is the same. When the carrier plate drives the test workpiece to move upward to contact the measuring rod and lifts the measuring rod upward, the measuring rod changes position on the auxiliary plate accordingly due to the unevenness of the test workpiece surface, and the distance measuring mechanism measures the distance from the measuring rod to the distance measuring mechanism to achieve the measurement of the consumed depth of the test workpiece surface; the marking device is used to mark the measurement result of the measuring device on the surface of the corresponding test workpiece.

[0006] Preferably, it includes a workbench, which has four workstations from left to right, namely the first workstation, the second workstation, the third workstation and the fourth workstation, wherein the first workstation and the fourth workstation are measuring workstations, and the second workstation and the third workstation are marking workstations; a movable plate that reciprocates between the first workstation and the second workstation is arranged between the first workstation and the second workstation, and a movable plate that reciprocates between the third workstation and the fourth workstation is also arranged between the third workstation and the fourth workstation, and the two movable plates are driven by a driving mechanism to move toward or away from each other.

[0007] Preferably, a carrier plate that is driven by a telescopic rod to move up and down is clamped on the movable plate, and a receiving groove for clamping the test workpiece is arranged on the carrier plate. The movable plate is provided with a slot with a stepped cross-section. The stepped slot ensures that when the carrier plate is clamped on the movable plate, the surface of the carrier plate is flush with the surface of the movable plate.

[0008] Preferably, a top plate is installed on the telescopic rod, and magnetic suction parts are embedded and installed at corresponding positions of the top of the top plate and the bottom of the carrier plate, so that the telescopic rod can drive the carrier plate to move through the top plate through the magnetic attraction between the magnetic suction parts.

[0009] Preferably, the auxiliary plate is mounted above the measuring station via a mounting frame, a distance measuring mechanism is installed at a position of the mounting frame corresponding to the auxiliary plate, the measuring rod is installed through a through hole on the auxiliary plate, and a limit plate is installed at one end of the measuring rod.

[0010] Preferably, the driving mechanism is installed inside the workbench, and the driving mechanism includes a gear, a rack 1, a rack 2 and a driving motor. The rack 1 and the rack 2 are respectively arranged on both sides of the gear and mesh with the gear. A slide groove 1 is provided on the workbench, and balls sliding in the slide groove 1 are provided at the bottom of the rack 1 and the rack 2; one of the two movable plates is connected to the rack 1 through a connecting rod, and the other movable plate is connected to the rack 2 through a connecting rod; a slide groove 2 is provided at a position corresponding to the slide groove 1 inside the workbench, and a sliding rod sliding in the slide groove 2 is installed on the movable plate; the driving motor drives the gear to rotate and drives the rack 1 and the rack 2 to drive the two movable plates to move toward or away from each other.

[0011] Preferably, the heights of the connecting rod and the sliding rod are adapted to make the surface of the movable plate horizontal.

[0012] Preferably, the area formed by the distribution of the plurality of measuring rods in an array is larger than the area of ​​the test workpiece.

[0013] Preferably, the marking device includes a projection device, which determines the position of the deepest consumption on the surface of the measured workpiece according to the measurement result of the measuring device, and projects the determined position of the deepest consumption on the surface of the measured workpiece onto the test workpiece through the projection device.

[0014] Preferably, the marking device comprises a robotic arm, which is driven by a main control module and is used to directly mark the deepest position of the surface of the workpiece, determined according to the measurement result of the measuring device, on the workpiece.

[0015] The beneficial effects of the present invention are as follows: the device for measuring the depth of target material consumption of the sputtering machine can prominently reflect the concave-convex state of the surface of the measured workpiece through the distance change of multiple measuring rods, and obtain the position of the deepest consumption on the target surface through accurate data measured by the distance measuring mechanism, and mark it through the marking device to facilitate the staff to determine the final position.

[0016] In addition, the first to fourth stations are set, and the driving mechanism is used to drive the two movable plates to move back and forth between the first station and the second station and between the third station and the fourth station, respectively, to achieve the measurement and marking operations of the workpiece surface, which can improve the work efficiency. Furthermore, through the reasonable setting of the first to fourth stations and the reasonable allocation of the internal space of the workbench, there is no dynamic line interference between the up and down movement and the left and right movement of the movable plate.

[0017] For the measuring device, the surface of the workpiece is divided into multiple grid areas by multiple measuring rods, and the distance between each measuring rod and the distance measuring mechanism reflects the consumption depth at the corresponding grid area. While performing quantitative measurement, it is convenient to locate the deepest consumption position.

[0018] The structure of using a carrier plate to drive the workpiece to lift the measuring rod upwards can realize the position change of the measuring rod due to the unevenness of the workpiece surface, and at the same time, the measuring rod can automatically reset by its own gravity after the distance measurement is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 It is a schematic diagram of the structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure of the measuring device of the present invention;

[0022] Figure 3 It is a structural schematic diagram of the measuring device of the present invention in a test state;

[0023] Figure 4 It is a schematic diagram of the structure inside the workbench of the present invention;

[0024] Figure 5 It is a schematic diagram of the structure of the meshing of the gear and the rack of the present invention;

[0025] Figure 6 It is a structural schematic diagram of a marked test workpiece involved in the present invention.

[0026] The markings in the figure are: 100, test workpiece; 1, workbench; 101, slide 1; 102, slide 2; 2, through slot; 3, measuring device; 301, mounting frame; 302, distance measuring mechanism; 303, auxiliary plate; 304, measuring rod; 305, limit plate; 4, marking device; 5, moving plate; 501, connecting rod; 502, sliding rod; 6, carrier plate; 7, telescopic rod; 8, top plate; 9, gear; 10, rack 1; 11, rack 2; 12, ball bearing; 13, driving motor. DETAILED DESCRIPTION

[0027] Embodiment 1

[0028] like Figure 1 As shown, a device for measuring the consumption depth of a sputtering machine target material comprises a workbench 1. The workbench 1 is provided with four workstations from left to right, namely a first workstation, a second workstation, a third workstation and a fourth workstation. The first workstation and the fourth workstation are measuring workstations, and the measuring workstations are provided with a measuring device 3. The second workstation and the third workstation are marking workstations, and the marking workstations are provided with a marking device 4.

[0029] A movable plate 5 is arranged between the first station and the second station to reciprocate between the first station and the second station. A movable plate 5 is also arranged between the third station and the fourth station to reciprocate between the third station and the fourth station. The two movable plates 5 are driven by a driving mechanism to move toward or away from each other. The movable plates 5 are loaded with test workpieces 100.

[0030] like Figure 2 As shown, a carrier plate 6 driven by a telescopic rod 7 to move up and down is clamped on the movable plate 5, and a receiving groove for clamping the test workpiece 100 is arranged on the carrier plate 6. Among them, a clamping groove 503 with a stepped cross section is opened on the movable plate 5, and the stepped clamping groove 503 makes the surface of the carrier plate 6 flush with the surface of the movable plate 5 when the carrier plate 6 is clamped on the movable plate 5.

[0031] The measuring device 3 is used to measure the depth of target consumption, such as Figure 2 , Figure 3 As shown, the measuring device 3 includes an auxiliary plate 303, a measuring rod 304 and a distance measuring mechanism 302, wherein the auxiliary plate 303 is mounted above the measuring station through a mounting frame 301, and a distance measuring mechanism 302 is installed at a position of the mounting frame 301 corresponding to the auxiliary plate 303. The distance measuring mechanism 302 includes a distance measuring sensor, and its distance measuring principle is the existing technology, which is used to measure the distance from the top of the measuring rod 304 to the distance measuring mechanism 302.

[0032] Specifically, the auxiliary plate 303 is provided with a plurality of measuring rods 304 distributed in an array. The measuring rods 304 penetrate through the through holes installed on the auxiliary plate 303 and can move up and down along the through holes. A limit plate 305 is installed at one end of the measuring rods 304. Figure 6 As shown, the area formed by the array distribution of multiple measuring rods 304 is larger than the area of ​​the test workpiece 100, ensuring that the measuring rods 304 can measure every part of the surface of the test workpiece 100. The array-distributed measuring rods 304 divide the surface of the test workpiece 100 into a plurality of grid areas, each grid area corresponds to a measuring rod 304, and the distance from the top of each measuring rod 304 to the distance measuring mechanism 302 can reflect the consumption degree of the corresponding grid area on the test workpiece 100.

[0033] The initial state of the measuring rod 304 is as follows: Figure 2 As shown in the structural diagram on the left, the measuring rod 304 naturally droops on the auxiliary plate 303 due to gravity, and the position of the measuring rod 304 on the auxiliary plate 303 is fixed by the limiting plate 305. At this time, the distance between each measuring rod 304 and the distance measuring mechanism 302 is the same.

[0034] When the carrier plate 6 loaded with the test workpiece 100 is driven by the telescopic rod 7 to move upward to contact the measuring rod 304 and lift the measuring rod 304, the positions of the plurality of measuring rods 304 distributed in an array on the auxiliary plate 303 change accordingly due to the uneven surface of the test workpiece 100, as shown in FIG. Figure 2 The right side shows the uneven distribution, at this time, the relative distance between each measuring rod 304 and the distance measuring mechanism 302 changes. By measuring the position change of each measuring rod 304 by the distance measuring mechanism 302, the consumption degree of the relative position of the test workpiece 100 corresponding to each measuring rod 304 can be measured.

[0035] The loss degree of the test workpiece 100 is reflected by the position change of the measuring rod 304 , and the concavo-convex condition of the surface of the test workpiece 100 is accurately reflected by the value measured by the distance measuring mechanism 302 , so as to achieve the purpose of measuring the target material loss.

[0036] Further, such as Figure 3 As shown, a top plate 8 is installed on the telescopic rod 7, and magnetic suction parts are embedded and installed at the corresponding positions of the top of the top plate 8 and the bottom of the carrier plate 6. Through the magnetic attraction between the magnetic suction parts, the telescopic rod 7 can drive the carrier plate 6 to move through the top plate 8, and can effectively improve the stability of the telescopic rod 7 when driving the carrier plate 6 to move, thereby avoiding the displacement of the carrier plate 6 and affecting the subsequent marking operation.

[0037] It should be noted that if Figure 2 , Figure 3As shown, when the workpiece 100 to be measured moves upward with the carrier plate 6, the workpiece 100 to be measured first contacts most of the measuring rods 304 and lifts them up. When the carrier plate 6 rises to contact the remaining measuring rods 304, the telescopic rod 7 can stop extending upward, and the distance measuring mechanism 302 starts to measure the distance. After the distance measurement is completed, the telescopic rod 7 drives the carrier plate 6 and the workpiece 100 to move downward. When the carrier plate 6 is located in the slot 503, the stepped slot 503 receives the carrier plate 6 and separates the magnetic attraction between the carrier plate 6 and the top plate 8. At this time, the measuring rod 304 falls by gravity and is fixed on the auxiliary plate 303 by the limit plate 305, so that the measuring rod 304 is automatically reset.

[0038] In addition, after the distance measuring mechanism 302 measures the distance of each measuring rod 304, the distance value of each grid area corresponding to the measuring rod 304 is recorded on the standard target image, and the deepest consumption of the target surface is found through the precise distance value.

[0039] The marking device 4 includes a projection device for projecting the position where the target surface is consumed at the deepest point onto the test workpiece 100. The projected image is as follows: Figure 6 As shown, it is convenient for staff to quickly locate and mark.

[0040] like Figure 4 , Figure 5 As shown, the driving mechanism is installed inside the workbench 1, and the driving mechanism includes a gear 9, a rack 10, a rack 2 11 and a driving motor 13. The rack 10 and the rack 2 11 are respectively arranged on both sides of the gear 9 and mesh with the gear 9, and the gear 9 is driven to rotate by the driving motor 13. When the gear 9 rotates, the rack 10 and the rack 2 11 move toward or away from each other. In order to improve the stability of the movement of the rack 10 and the rack 2 11, a slide groove 101 is provided on the workbench 1, and the bottom of the rack 10 and the rack 2 11 is also provided with a ball 12 sliding in the slide groove 101.

[0041] When the gear 9 rotates, the rack 1 10 and the rack 2 11 move toward or away from each other, so the two movable plates 5 are connected to the rack 1 10 and the rack 2 11 respectively through the connecting rod 501, so that the movement of the rack 1 10 and the rack 2 11 drives the two movable plates 5 to move.

[0042] like Figure 2 , Figure 4As shown, in order to improve the stability of the horizontal movement of the moving plate 5, a second slide groove 102 is provided at a position corresponding to the first slide groove 101 inside the workbench 1, and the first slide groove 101 and the second slide groove 102 are provided to be parallel to each other and not to interfere with each other. A slide bar 502 is installed on the moving plate 5 to slide in the second slide groove 102. In addition, a through groove 2 is provided on the workbench 1 for the connecting rod 501 and the slide rod 502 to pass through. It should be noted that the height of the connecting rod 501 and the slide rod 502 is adapted to ensure that the surface of the moving plate 5 is horizontal.

[0043] like Figure 4 As shown, the telescopic rod 7 is installed inside the workbench 1. By reasonably distributing the positions of the telescopic rod 7, the slide groove 101, the slide groove 2 102 and the driving mechanism, the internal space of the workbench 1 is fully utilized, and there will be no dynamic line interference between the left and right movement and the up and down movement of the movable plate 5.

[0044] Working principle: In the initial state, the two movable plates 5 are respectively located at the first and fourth stations of the sputtering machine target consumption depth. The test workpiece 100 is placed in the receiving groove of the carrier plate 6. The telescopic rod 7 is started to drive the top plate 8 and the carrier plate 6 to move upward, so that the test workpiece 100 lifts the measuring rod 304, and then the distance from each measuring rod 304 to the distance measuring mechanism 302 is measured by the distance measuring mechanism 302. After the measurement is completed, the carrier plate 6 is driven by the telescopic rod 7 to move downward to engage with the movable plate 5, so that the carrier plate 6 is separated from the top plate 8. Then, the drive motor 13 drives the gear 9 to rotate, so as to drive the rack 1 10 and the rack 2 11 to drive the two movable plates 5 to move relative to each other, and move to the second and third stations respectively.

[0045] During the movement of the moving plate 5, the data measured by the distance measuring mechanism 302 is processed, and the distance value of each grid area corresponding to the measuring rod 304 is recorded on the standard target image, and the deepest consumption of the target surface is found through the accurate distance value. Then, the position of the deepest consumption of the target surface is projected onto the test workpiece 100 through the projection device of the marking device 4, so that the staff can quickly locate and mark it.

[0046] Embodiment 2

[0047] like Figure 6 As shown, the structure of this embodiment is basically the same as that of the first embodiment, except that the marking device 4 of this embodiment includes a robotic arm, which is driven by a main control module and directly marks the result processed by the measuring device 3 on the measured workpiece 100 through a suitable marking liquid, thereby realizing automated measurement and marking operations and avoiding errors caused by manual marking.

[0048] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A device for measuring the consumption depth of a sputtering target, characterized in that: It includes a measuring station and a marking station, wherein the measuring station is provided with a measuring device, and the marking station is provided with a marking device. A moving plate driven by a driving mechanism to move back and forth is provided between the measuring station and the marking station, and a carrier plate capable of moving up and down is clamped on the moving plate, and the carrier plate is used to load the test workpiece; The measuring device comprises an auxiliary plate, a measuring rod and a distance measuring mechanism. The measuring rod is plugged into the auxiliary plate and limited by a limit plate. The distance measuring mechanism is located above the measuring rod. A plurality of measuring rods are provided. The plurality of measuring rods are distributed in an array on the auxiliary plate. The array-distributed measuring rods divide the surface of the test workpiece into a plurality of grid areas. Each grid area corresponds to a measuring rod. When the measuring device is in an initial state, the distance between each measuring rod and the distance measuring mechanism is the same. When the carrier plate drives the test workpiece to move upward to contact the measuring rod and lifts the measuring rod upward, the measuring rod undergoes a corresponding position change on the auxiliary plate due to the unevenness of the test workpiece surface. The distance measuring mechanism measures the distance from the measuring rod to the distance measuring mechanism to achieve measurement of the consumed depth of the test workpiece surface. The marking device is used to mark the measurement result of the measuring device on the surface of the corresponding test workpiece.

2. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The workbench includes four workstations from left to right, namely the first workstation, the second workstation, the third workstation and the fourth workstation, wherein the first workstation and the fourth workstation are measuring workstations, and the second workstation and the third workstation are marking workstations; A movable plate is arranged between the first station and the second station, and a movable plate is arranged between the third station and the fourth station. The two movable plates are driven by a driving mechanism to move toward or away from each other.

3. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The movable plate is clamped with a carrier plate that is driven by a telescopic rod to move up and down, and the carrier plate is provided with a receiving groove for clamping a test workpiece. The movable plate is provided with a slot with a stepped cross-section. The stepped slot ensures that when the carrier plate is clamped on the movable plate, the surface of the carrier plate is flush with the surface of the movable plate.

4. The device for measuring the consumption depth of a sputtering machine target according to claim 3, characterized in that: A top plate is installed on the telescopic rod, and magnetic suction parts are inlaid and installed at corresponding positions of the top of the top plate and the bottom of the carrier plate. The telescopic rod can drive the carrier plate to move through the top plate through the magnetic suction effect between the magnetic suction parts.

5. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The auxiliary plate is mounted above the measuring station through a mounting frame, a distance measuring mechanism is installed at a position of the mounting frame corresponding to the auxiliary plate, the measuring rod is installed through a through hole on the auxiliary plate, and a limit plate is installed at one end of the measuring rod.

6. The device for measuring the consumption depth of a sputtering machine target according to claim 2, characterized in that: The driving mechanism is installed inside the workbench, and the driving mechanism includes a gear, a rack 1, a rack 2 and a driving motor. The rack 1 and the rack 2 are respectively arranged on both sides of the gear and mesh with the gear. A slide groove 1 is provided on the workbench, and a ball sliding in the slide groove 1 is arranged at the bottom of the rack 1 and the rack 2; One of the two movable plates is connected to the rack 1 through a connecting rod, and the other movable plate is connected to the rack 2 through a connecting rod. A slide groove 2 is provided at a position corresponding to the slide groove 1 inside the workbench, and a slide rod sliding in the slide groove 2 is installed on the movable plate; The driving motor drives the gear to rotate and drives the first rack and the second rack to drive the two moving plates to move toward or away from each other.

7. The device for measuring the consumption depth of a sputtering machine target according to claim 6, characterized in that: The heights of the connecting rod and the sliding rod are adapted to make the surface of the moving plate horizontal.

8. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The area formed by the distribution of the plurality of measuring rods in an array is larger than the area of ​​the test workpiece.

9. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The marking device includes a projection device, which determines the position of the deepest consumption on the surface of the measured workpiece according to the measurement result of the measuring device, and projects the determined position of the deepest consumption on the surface of the measured workpiece onto the test workpiece through the projection device.

10. The device for measuring the consumption depth of a sputtering machine target according to claim 1, characterized in that: The marking device comprises a mechanical arm driven by a main control module, and the mechanical arm is used to directly mark the deepest position of the surface of the workpiece determined according to the measurement result of the measuring device on the workpiece.

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