A sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle

Abstract

The present invention relates to the technical field of semiconductor carriers, and particularly relates to a sealing structure for the air inlet and outlet of a semiconductor inflatable carrier, which includes a nozzle bracket and a sealing nozzle. The semiconductor inflatable carrier includes an air inlet component. The sealing nozzle includes a sealing ring and an abutting ring. The sealing ring includes a mounting surface and an abutting surface. The abutting ring includes a connecting end, a contact surface, a fitting surface, and a stretching surface. The present invention prevents air leakage by providing the clamping ring and the clamping step. And by providing the umbrella-shaped structure of the abutting ring, when the air inlet component is pressed down, the abutting ring will undergo elastic deformation to ensure and maintain the sealing effect. Also, by adding a high-temperature resistant enhancer and a tear-resistant material to the manufacturing process of the sealing nozzle, its mechanical properties and thermal stability are significantly improved, and by providing a lubricating coating on the surface of the sealing nozzle, the influence of dust on the sealing effect is prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and in particular to a sealing structure for air inlets and outlets of semiconductor gas-filled carriers. Background Art

[0002] Wafer carriers, a type of semiconductor carrier, are precision carriers designed specifically for semiconductor wafers. They are designed to meet strict clean room standards to ensure the physical safety and chemical purity of wafers throughout the manufacturing process. Wafers are the basis of semiconductor devices, and are covered with thousands or even millions of tiny integrated circuits. Any slight contamination or damage may cause a large number of chips to fail, so the importance of wafer carriers is self-evident.

[0003] There is a semiconductor inflatable vehicle that needs to be inflated through a gas source when in use, and inert gas (such as nitrogen) is input to reduce the harm of harmful gases. However, the inflation port of the semiconductor inflatable vehicle does not have a structure for installing a sealing ring, and is only pressed on the gas nozzle of the gas source by gravity, so a sealing ring is needed to seal the inflation structure. Conventional sealing rings are usually structures such as O-rings and V-rings, which are used to maintain the precise connection of connecting parts, but are not suitable for the contact sealing requirements of the inflatable vehicle.

[0004] In addition, conventional silicone sealing rings are prone to aging in high temperature environments, and their sealing performance will decrease accordingly. At the same time, they are prone to tearing, fatigue and other problems during repeated loading and unloading. Therefore, it is necessary to design a sealing structure with superior performance and optimized structure that is suitable for the above-mentioned inflatable vehicle. Summary of the invention

[0005] In view of this, the present invention provides a sealing structure for the gas inlet and outlet of a semiconductor inflatable carrier to solve the above technical problems.

[0006] A sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle, which is used when the semiconductor inflatable vehicle is inflated. It includes a nozzle bracket and a sealing nozzle arranged on the nozzle bracket. The semiconductor inflatable vehicle includes an air inlet component. The sealing nozzle includes a sealing ring and an abutting ring arranged on the sealing ring. The sealing ring is a circular ring structure and includes a mounting surface on one side and an abutting surface on the other side. Both the mounting surface and the abutting surface are planes of the sealing ring in the radial direction. The mounting surface contacts and fits with the nozzle bracket. The abutting surface is located on the side close to the air inlet component. The abutting ring includes a connecting end connected to the abutting surface, a contact surface at the free end of the abutting ring, a fitting surface arranged on one side of the abutting ring, and a stretching surface arranged on the other side of the abutting ring. The contact surface is located at the end of the abutting ring away from the abutting surface and is an annular plane parallel to the abutting surface. When the air inlet component contacts the abutting ring, it first contacts and fits with the contact surface. The fitting surface is located on the side of the abutting ring close to the central axis of the sealing nozzle. The fitting surface and the contact surface can form a plane when pressed against the air inlet component. The fitting surface is inclined with respect to the abutting surface, and the included angle between the fitting surface and the abutting surface is angle α. The complementary angle of angle α is angle β. The stretching surface is located on the other side of the abutting ring away from the central axis of the sealing nozzle. The stretching surface is inclined with respect to the abutting surface, and the included angle between the stretching surface and the abutting surface is angle θ. In the extreme state, angle θ is 0°, that is, the stretching surface and the abutting surface are completely coincident. Angle β is less than angle θ. The thickness of the abutting ring at the connecting end is greater than that at the free end. The fitting surface and the stretching surface are two non-parallel planes. In the axial section of the abutting ring, the length of the fitting surface is greater than that of the stretching surface. The sealing nozzle is made of modified silicone material with a Shore hardness of 55 to 65 degrees.

[0007] Further, the nozzle bracket includes a bracket body, an air passage arranged in the bracket body, an air outlet end arranged at one end of the air passage, and a clamping ring arranged on the edge of the air outlet end.

[0008] Further, an air inlet is also arranged on the bracket body, and the air inlet is connected to the air outlet of an air pump through a trachea.

[0009] Further, the air passage penetrates through the bracket body and communicates the air inlet to the air outlet end. The air outlet end is located at the end of the air passage. The clamping ring is an annular protrusion arranged on the outer side wall of the air outlet end, and its diameter is greater than that of the air outlet end and is located at the free end away from the bracket body.

[0010] Further, the sealing nozzle is integrally injection-molded from a modified silicone material, and a lubricating coating is provided on the surface of the sealing nozzle.

[0011] Further, the abutting ring is disposed on the abutting surface of the sealing ring and is an annular umbrella-shaped structure with a free end facing the air inlet component.

[0012] Further, the sealing nozzle further includes a clamping step provided on the sealing ring. The clamping step is a step provided in the inner diameter direction of the sealing ring and is located at one end close to the abutting surface.

[0013] Compared with the prior art, the sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle provided by the present invention fixes the sealing nozzle on the nozzle bracket by providing the clamping ring and the clamping step, thereby preventing the sealing nozzle from displacing relative to the nozzle bracket when the air inlet component presses on the sealing nozzle, resulting in air leakage. And by providing the umbrella-shaped structure of the abutting ring, when the air inlet component is pressed down, the abutting ring will undergo elastic deformation, and since the inclination of the fitting surface is smaller than the inclination of the stretching surface, during the pressing-down process, the stretching surface will be stretched accordingly, ensuring that the air inlet component always contacts the contact surface and the fitting surface, guaranteeing and maintaining the sealing effect. Also, by adding a high-temperature resistant strengthening agent and a tear-resistant material to the manufacturing process of the sealing nozzle, its mechanical properties and thermal stability are significantly improved, and by providing a lubricating coating on the surface of the sealing nozzle, the influence of dust on the sealing effect is prevented. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 FIG. 1 is a schematic structural diagram of a sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle provided by the present invention.

[0015] Figure 2 FIG. Figure 1 2 is a schematic cross-sectional view of the sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle in a vertical cross-section.

[0016] Figure 3 FIG. Figure 1 3 is a schematic structural diagram of the sealing nozzle 20 of the sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle.

[0017] Figure 4 FIG. Figure 3 4 is a schematic cross-sectional view of the sealing nozzle 20 of the sealing structure for the air inlet and outlet of a semiconductor inflatable vehicle in a vertical cross-section.

[0018] Figure 5 FIG. Figure 4Enlarged view of the sealing nozzle 20 of the sealing structure for the air inlet / outlet of the semiconductor inflatable vehicle at location A.

[0019] Description of reference numerals: nozzle support 10, support body 11, air passage 12, outlet end 13, clamping ring 14, air inlet 15, sealing nozzle 20, sealing ring 21, mounting surface 211, abutting surface 212, clamping step 22, abutting ring 23, connecting end 231, contact surface 232, fitting surface 233, stretching surface 234, air inlet component 30. Detailed implementation manners

[0020] The following further elaborates on specific embodiments of the present invention. It should be understood that the description of the embodiments of the present invention herein does not limit the protection scope of the present invention.

[0021] As Figures 1 to 5 shown, it is a schematic structural view of the sealing structure for the air inlet / outlet of the semiconductor inflatable vehicle provided by the present invention. The sealing structure for the air inlet / outlet of the semiconductor inflatable vehicle includes a nozzle support 10 and a sealing nozzle 20 disposed on the nozzle support 10. It can be conceived that the sealing structure for the air inlet / outlet of the semiconductor inflatable vehicle further includes some other functional modules such as a gas source, a gas pipe, etc., which are well-known technologies to those skilled in the art and will not be elaborated herein one by one.

[0022] It should be noted that the semiconductor inflatable vehicle includes an air inlet component 30. The air inlet component 30 can be an air inlet of a product such as a semiconductor inflatable vehicle. It contacts the sealing nozzle 20 through gravity or pressure action to fill the semiconductor inflatable vehicle with gas through the sealing nozzle 20. The semiconductor inflatable vehicle itself is a prior art and will not be elaborated herein.

[0023] The nozzle support 10 is a connection structure disposed at the outlet of the gas source, and is an integrally formed structure for fixing and connecting the sealing nozzle 20. The nozzle support 10 includes a support body 11, an air passage 12 disposed inside the support body 11, an outlet end 13 disposed at one end of the air passage 12, and a clamping ring 14 disposed on the edge of the outlet end 13.

[0024] An air inlet 15 can also be provided on the bracket body 11. The air inlet 15 is connected to the air outlet of an air pump through a trachea to supply gas. The air duct 12 is a gas flow path penetrating through the bracket body 11. Specifically, it is connected to communicate the air inlet 15 to the air outlet end 13 for gas flow. The air outlet end 13 is located at the end of the air duct 12 and is a hollow columnar protrusion for connecting the sealing nozzle 20. The clamping ring 14 is an annular protrusion provided on the outer side wall of the air outlet end 13. Its diameter is larger than that of the air outlet end 13 and is located at the free end away from the bracket body 11 to clamp the sealing nozzle 20 when connecting with the sealing nozzle 20, thereby ensuring reliable connection between the bracket body 11 and the sealing nozzle 20.

[0025] The sealing nozzle 20 can be integrally formed by injection molding of modified silicone material to ensure the sealing performance of the sealing nozzle 20. At the same time, since the sealing nozzle 20 is made of silicone material, the sealing nozzle 20 has a certain elasticity and can be deformed and rebound during installation. High-temperature resistant reinforcing agents and tear-resistant materials can also be added to the silicone material to significantly improve its mechanical properties and thermal stability. A lubricating coating is provided on the surface of the sealing nozzle 20 to prevent dust particles from adhering during static state, resulting in incomplete fitting on the product during use. For example, in an embodiment of the present invention, the sealing nozzle 20 is made of modified silicone material with a Shore hardness of 55 to 65 degrees, so that the sealing nozzle 20 has a higher hardness, thereby preventing elastic fatigue due to long-term use of the product and affecting the sealing effect.

[0026] The sealing nozzle 20 includes a sealing ring 21, a clamping step 22 provided on the sealing ring 21, and an abutting ring 23 provided on the sealing ring 21.

[0027] The sealing ring 21 is a circular ring structure for sleeving on the air outlet end 13. The sealing ring 21, as the main part of the sealing nozzle 20, is provided between the nozzle bracket 10 and the intake component 30 to play a sealing role. The sealing ring 21 includes an installation surface 211 on one side and an abutting surface 212 on the other side. Both the installation surface 211 and the abutting surface 212 are planes in the radial direction of the sealing ring 21. The installation surface 211 is a plane in contact and fitting with the nozzle bracket 10, and the abutting surface 212 is located on the side close to the intake component 30.

[0028] The clamping step 22 is a step provided in the inner diameter direction of the sealing ring 21 and is located at one end close to the abutting surface 212. When the sealing ring 21 is sleeved on the air outlet end 13, the clamping ring 14 will be clamped into the clamping step 22, so as to be clamped together with each other, preventing the sealing nozzle 20 from detaching from the nozzle bracket 10.

[0029] The abutting ring 23 is provided on the abutting surface 212 of the sealing ring 21 and is an annular umbrella-shaped structure with a free end facing the intake component 30. The abutting ring 23 includes a connecting end 231 connected to the abutting surface 212, a contact surface 232 located at the free end of the abutting ring 23, a fitting surface 233 provided on one side of the abutting ring 23, and a stretching surface 234 provided on the other side of the abutting ring 23.

[0030] The connecting end 231 is integrally formed with the abutting surface 212. The contact surface 232 is located at the end of the abutting ring 23 far from the abutting surface 212 and is an annular plane parallel to the abutting surface 212. When the intake component 30 contacts the abutting ring 23, it first contacts and fits with the contact surface 232.

[0031] The fitting surface 233 is located on one side of the abutting ring 23 close to the central axis of the sealing nozzle 20. The fitting surface 233 is inclined with respect to the abutting surface 212, and the included angle between the fitting surface and the abutting surface is an α angle, and this α angle is an obtuse angle and will become larger when the pressure applied by the intake component 30 to the abutting ring 23 continuously increases. In the limit state, the α angle is infinitely close to 180°. In addition, the complementary angle of the α angle is a β angle, that is, α angle + β angle = 180°.

[0032] The stretching surface 234 is located on the other side of the abutting ring 23 far from the central axis of the sealing nozzle 20. The stretching surface 234 is inclined with respect to the abutting surface 212, and the included angle between the stretching surface and the abutting surface is a θ angle, and this θ angle is an acute angle and will become smaller when the pressure applied by the intake component 30 to the abutting ring 23 continuously increases. In the limit state, the θ angle is 0°, that is, the stretching surface 234 coincides completely with the abutting surface 212. In the free state, the θ angle is greater than the β angle, so that the stretching surface 234 is not parallel to the fitting surface 233. In the cross-section along the central axis of the sealing nozzle 20, the included angle between the contour line of the stretching surface 234 and the contour line of the abutting surface 212 is an obtuse angle.

[0033] In order to achieve a fully sealed effect during inflation, it is optimal that the fitting surface 233 and the contact surface 232 form a plane when the intake component 30 is pressed tightly. Therefore, it is necessary to design the magnitudes of the β angle and the θ angle such that when the intake component 30 presses tightly against the abutting ring 23, the fitting surface 233 and the contact surface 232 can form a plane.

[0034] In the above structure, the β angle is smaller than the θ angle, that is, the thickness of the abutting ring 23 at the connecting end 231 is greater than that at the free end, so that the fitting surface 233 and the stretching surface 234 are two non-parallel planes, and thus in the axial section of the abutting ring 23, the length of the fitting surface 233 is greater than the length of the stretching surface 234. During use, when the intake component 30 is placed on the abutting ring 23, it will first contact the contact surface 232, and when it continues to be pressed down under the action of gravity or other pressures, the annular radius of the contact surface 232 will continuously increase, the distance from the contact surface 232 to the abutting surface 212 will continuously decrease, and at the same time, both the β angle and the θ angle will continuously decrease. At this time, since the length of the fitting surface 233 is greater than the length of the stretching surface 234, the stretching surface 234 will be stretched and distorted towards the contact surface 232, so that the contact surface 232 always fits the surface of the intake component 30. During the process that the intake component 30 continuously applies pressure to the abutting ring 23, when both the β angle and the θ angle continuously decrease, the β angle will reach the limit relative to the θ angle first. When the β angle reaches the limit value, the contact surface 232 and the fitting surface 233 are in the same plane, and the fitting surface 233 fits the surface of the intake component 30. If the intake component 30 continues to be pressed down, before the stretching surface 234 and the abutting surface 212 are completely fitted, due to the thickness of the connecting end 231, a greater elastic deformation will be generated due to the extrusion of the intake component 30, and there will be a stronger elastic reaction force, so as to ensure that the fitting surface 233 and the intake component 30 always fit and no air leakage will occur.

[0035] Compared with the prior art, the sealing structure for the air inlet and outlet of the semiconductor inflatable vehicle provided by the present invention fixes the sealing nozzle 20 on the nozzle bracket 10 by setting the clamping ring 14 and the clamping step 22, so as to prevent the sealing nozzle 20 from displacing relative to the nozzle bracket 10 when the air inlet component 30 presses on the sealing nozzle 20, resulting in air leakage. By setting the umbrella-shaped structure of the abutting ring 23, when the air inlet component 30 is pressed down, the abutting ring 23 will undergo elastic deformation, and since the inclination of the fitting surface 233 is smaller than that of the stretching surface 234, the stretching surface 234 will be stretched accordingly during the pressing process, ensuring that the air inlet component 30 is always in contact with the contact surface 232 and the fitting surface 233, ensuring and maintaining the sealing effect. Also, by adding a high-temperature resistant enhancer and a tear-resistant material to the manufacturing process of the sealing nozzle 20, its mechanical properties and thermal stability are significantly improved, and by setting a lubricating coating on the surface of the sealing nozzle 20, the influence of dust on the sealing effect is prevented.

[0036] The above are only the preferred embodiments of the present invention and are not used to limit the protection scope of the present invention. Any modifications, equivalent replacements or improvements within the spirit of the present invention are covered by the claims of the present invention.

Claims

1. A sealing structure for the gas inlet and outlet of a semiconductor inflatable vehicle, used when the semiconductor inflatable vehicle is inflated, characterized in that: The sealing structure for the air inlet and outlet of a semiconductor gas-filled carrier comprises a gas nozzle bracket and a sealing gas nozzle arranged on the gas nozzle bracket, the semiconductor gas-filled carrier comprises an air intake component, the sealing gas nozzle comprises a sealing ring and an abutment ring arranged on the sealing ring, the sealing ring is a circular ring-shaped structure, and comprises a mounting surface located on one side thereof, and an abutment surface located on the other side, the mounting surface and the abutment surface are both planes of the sealing ring in the radial direction, the mounting surface contacts and fits with the gas nozzle bracket, the abutment surface is located on a side close to the air intake component, the abutment ring comprises a connecting end connected to the abutment surface, a contact surface located on the free end of the abutment ring, a fitting surface arranged on one side of the abutment ring, and a stretching surface arranged on the other side of the abutment ring, the contact surface is located at the end of the abutment ring away from the abutment surface, and is an annular plane parallel to the abutment surface, When the contact ring contacts, it first contacts and fits with the contact surface, the fitting surface is located on the side of the abutting ring close to the central axis of the sealing air nozzle, the fitting surface and the contact surface can become a plane when pressed against the air intake component, the fitting surface and the abutting surface are inclined, and the angle between the fitting surface and the abutting surface is angle α, the supplementary angle of angle α is angle β, the stretching surface is located on the other side of the abutting ring away from the central axis of the sealing air nozzle, the stretching surface and the abutting surface are inclined. The stretching surface is inclined, and the angle between the stretching surface and the abutting surface is θ, and the θ angle is 0° under the limit state, that is, the stretching surface and the abutting surface are completely overlapped, the β angle is smaller than the θ angle, the thickness of the abutting ring at the connecting end is greater than the thickness of the free end, the fitting surface and the stretching surface are two non-parallel planes, and the length of the fitting surface in the axial section of the abutting ring is greater than the length of the stretching surface, and the sealing gas nozzle is made of modified silicone material with a Shore hardness of 55 to 65 degrees.

2. The sealing structure for the gas inlet and outlet of a semiconductor inflatable carrier according to claim 1, characterized in that: The air nozzle bracket comprises a bracket body, an air channel arranged in the bracket body, an air outlet end arranged at one end of the air channel, and a clamping ring arranged on the edge of the air outlet end.

3. The sealing structure for the gas inlet and outlet of a semiconductor inflatable carrier as claimed in claim 2, characterized in that: The support body is also provided with an air inlet, which is connected to an air outlet of an air pump through an air pipe.

4. The sealing structure for the gas inlet and outlet of a semiconductor gas-filled carrier as claimed in claim 3, characterized in that: The air passage passes through the bracket body and connects the air inlet to the air outlet, the air outlet is located at the end of the air passage, and the clamping ring is an annular protrusion arranged on the outer wall of the air outlet, with a diameter larger than the diameter of the air outlet, and is located on the free end away from the bracket body.

5. The sealing structure for the gas inlet and outlet of a semiconductor gas-filled carrier according to claim 1, characterized in that: The sealing air nozzle is integrally formed by injection molding of modified silicone material, and a lubricating coating is provided on the surface of the sealing air nozzle.

6. The sealing structure for the gas inlet and outlet of a semiconductor gas-filled carrier as claimed in claim 1, characterized in that: The abutment ring is arranged on the abutment surface of the sealing ring and is an annular umbrella-shaped structure with a free end facing the air intake component.

7. The sealing structure for the gas inlet and outlet of a semiconductor gas-filled carrier according to claim 1, characterized in that: The sealing gas nozzle also includes a clamping step arranged on the sealing ring. The clamping step is a step arranged in the inner diameter direction of the sealing ring and is located at one end close to the abutting surface.

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