Energy-saving temperature adjusting device for clean gas

Abstract

The invention provides a clean gas energy-saving temperature adjusting device, and relates to the technical field of gas temperature adjusting devices, the clean gas energy-saving temperature adjusting device comprises a temperature adjusting tank body, the two ends of the temperature adjusting tank body are open, an airflow channel is formed in the temperature adjusting tank body, and airflow can circulate in the airflow channel; the first heating piece is connected with the peripheral side of the temperature adjusting tank body; the temperature adjusting pipe is connected with the peripheral side of the temperature adjusting tank body, the temperature adjusting pipe is spirally arranged around the temperature adjusting tank body, the temperature adjusting pipe is communicated with the first water pump, and constant-temperature water can be continuously introduced into the temperature adjusting pipe; and the first temperature measuring piece is located in the airflow channel and fixedly connected with the temperature adjusting tank body, and the first temperature measuring piece is electrically connected with the first heating piece. According to the heating device, the problem of resource waste caused by the fact that the heating device is too long and the heat loss per unit length is large in the using process in the prior art is solved, and the purpose of saving energy can be achieved while the temperature is adjusted.

Description

Technical Field

[0001] The present application relates to the technical field of gas temperature control devices, and in particular to a clean gas energy-saving temperature control device. Background Art

[0002] In the semiconductor manufacturing process, in order to ensure repeatability and accuracy, there are usually certain requirements for cleanliness, gas flow rate and temperature. Semiconductor production needs to be carried out under high cleanliness, specific gas flow rate and specific temperature conditions. For example, in the semiconductor pipeline purge process, clean gas needs to be used to purge the pipeline, and in order to avoid process variations caused by temperature changes of the clean gas, the clean gas in the purge pipeline needs to be kept at a constant temperature.

[0003] When using electric heating devices for heating, the temperature rises quickly locally at conventional intervals, and the temperature rise inside the airflow is uneven. By reducing the power and temperature of the electric heating devices and evenly arranging a long section of heating devices during the heating process, the airflow is slowly and evenly mixed in the long and uniform heating device.

[0004] However, if a long and evenly arranged heating device is damaged at one point during use, the entire heating device will be unusable, making it difficult to repair the damaged part. In addition, since the heating device is too long, the heat loss per unit length is large, resulting in a waste of resources. Summary of the invention

[0005] The purpose of the present application is to provide a clean gas energy-saving temperature control device, which is used to solve the problem of a long and uniformly arranged heating device in the related art. During use, damage at a certain point will cause the entire heating device to be unusable, making it difficult to repair the damaged part. In addition, since the heating device is too long, the heat loss per unit length is large, resulting in a waste of resources.

[0006] The clean gas energy-saving temperature regulating device provided in this application adopts the following technical solution: A clean gas energy-saving temperature regulating device, comprising A temperature regulating tank body, wherein both ends of the temperature regulating tank body are open, and an air flow channel is formed inside the temperature regulating tank body, and air flow can flow in the air flow channel; A first heating element, the first heating element is connected to the peripheral side of the temperature regulating tank body; A thermostatic tube, the thermostatic tube being connected to the peripheral side of the thermostatic tank body, the thermostatic tube being spirally arranged around the thermostatic tank body, the thermostatic tube being connected to the first water pump, and the thermostatic tube being capable of continuously flowing with constant temperature water; A first temperature measuring component is located in the air flow channel and is fixedly connected to the temperature regulating tank body. The first temperature measuring component is electrically connected to the first heating component.

[0007] By adopting the above technical scheme, an airflow with uneven and low temperature is introduced from one end of the temperature regulating tank body. The first temperature measuring component detects that the temperature of the airflow is low. The first temperature measuring component transmits a signal to the first heating component. The first heating component is heated to increase the temperature of the airflow. At this time, constant temperature water is continuously introduced into the temperature regulating tube 30, so that the airflow in the temperature regulating tank body uses this temperature as the reference temperature. When the first detection component detects that the airflow temperature is lower than the required temperature, the first detection component heats the first heating component. When the first heating component locally heats the airflow around the first heating component, the water in the temperature regulating tube 30 can play a certain buffering and heat preservation effect, driving the locally heated airflow along the spiral temperature regulating tube 30 to mix with the airflow with a smaller local temperature change, so that the airflows with uneven temperatures are mixed with each other, thereby making the temperature of the airflow flowing out of the temperature regulating tank body uniform.

[0008] The invention solves the problem that a long section of uniformly arranged heating device in the related art is that damage at one place during use will render the entire heating device unusable, making it difficult to repair the damaged part, and since the heating device is too long, the heat loss per unit length is large, resulting in a waste of resources. The invention can also achieve the purpose of energy saving while adjusting the temperature.

[0009] Optionally, the outer cover of the temperature regulating tank body is provided with an insulation layer, and a first mounting groove is opened around the axis on the temperature regulating tank body, the first mounting groove is spirally arranged in the axial direction of the temperature regulating tank body, the temperature regulating tube is fixedly connected to the first mounting groove, the first heating element is fixedly connected to the first mounting groove, and a plurality of the first heating elements are evenly distributed along the axial direction of the temperature regulating tank body.

[0010] By adopting the above technical solution, the first heating element is sectionally arranged in the first installation groove, which can locally heat the airflow in the airflow channel; constant temperature water is passed into the temperature regulating tube to transfer heat to the airflow, which can buffer the local airflow temperature change caused by the heating element, make the airflow change uniform, and prevent the local airflow temperature change from being too fast to cause airflow disturbance.

[0011] Optionally, a first through groove is provided on the outer wall surface of the temperature regulating tank, and the temperature regulating pipe is connected to the first water pump through the first through groove.

[0012] By adopting the above technical solution, the temperature regulating pipe is connected to the first water pump through the first through groove, constant temperature water is continuously introduced into the temperature regulating pipe, and the constant temperature has a buffering effect on the temperature rise of the airflow in the airflow channel.

[0013] Optionally, the first temperature measuring component is fixedly connected to the inner wall of the temperature regulating tank body, a plurality of the first temperature measuring components are evenly distributed in the air flow channel along the axial direction of the temperature regulating tank body, and the first temperature measuring component and the first heating component are spaced apart.

[0014] By adopting the above technical solution, the first temperature measuring element and the first heating element are arranged at an interval, and the first temperature measuring element detects the air flow temperature and can transmit a signal to the first heating element for heating.

[0015] Optionally, a guide plate is also included, wherein the guide plate is located in the air flow channel and is fixedly connected to the inner wall of the temperature regulating tank.

[0016] By adopting the above technical solution, the guide plate is fixedly connected to the inner wall of the temperature regulating tank, and the airflow plate can play a role in balancing the temperature and flow rate of the edge airflow and the middle airflow to a certain extent.

[0017] Optionally, a first guide block is provided on the temperature regulating tank body toward the air flow channel, a first branch pipe groove is provided on the first guide block, the first branch pipe groove is connected with the first installation groove, the temperature regulating pipe is in the first installation groove and returns to the first installation groove after passing through the first branch pipe groove.

[0018] By adopting the above technical solution, the thermostatic pipe bypasses the first branch pipe groove, so that the constant temperature water in the thermostatic pipe is close to the airflow around the first guide block through the first branch pipe groove. The constant temperature water in the thermostatic pipe can buffer the airflow passing through the first guide block.

[0019] Optionally, it also includes a connecting block and a central tank body, the central tank body is located at the center of the temperature regulating tank body, both ends of the central tank body are opened, the connecting block connects the temperature regulating tank body and the central tank body, a first through hole is opened on the connecting block, a second through hole is opened on the temperature regulating tank body, a second mounting groove is opened on the wall of the central tank body, the second through hole, the first through hole and the second mounting groove are connected in sequence, the temperature regulating pipe is connected to the second water pump, and the temperature regulating pipe passes through the second through hole, the first through hole and the second mounting groove.

[0020] By adopting the above technical solution, the water in the second water pump enters the second installation groove through the second through hole and the first through hole at the air flow inlet. The continuously flowing constant temperature water keeps the temperature in the thermostatic tube 30 constant at all times, and the constant temperature has a buffering effect on the temperature rise of the air flow in the air flow channel.

[0021] Optionally, it also includes a second heating element, the second mounting groove is in the central tank body, the second mounting groove is spirally arranged in the axial direction of the central tank body, the second heating element is fixedly connected to the second mounting groove, and a plurality of the second heating elements are evenly distributed along the axial direction of the central tank body.

[0022] By adopting the above technical solution, the plurality of second heating elements are evenly distributed along the axial direction of the central tank body, so that the airflow can be heated and heated.

[0023] Optionally, a second guide block is provided on the central tank body toward the air flow channel, a second branch pipe groove is opened on the second guide block, the second branch pipe groove is connected with the second installation groove, the temperature regulating pipe is in the second installation groove and returns to the second installation groove after passing through the second branch pipe groove.

[0024] By adopting the above technical solution, the thermostatic pipe bypasses the second branch pipe groove, so that the constant temperature water in the thermostatic pipe is close to the airflow around the second guide block through the second branch pipe groove. The constant temperature water in the thermostatic pipe can have a buffering effect on the airflow passing through the second guide block.

[0025] Optionally, it also includes a second temperature measuring component, which is fixedly connected to the inner wall of the central tank body, and is electrically connected to the second heating component. A plurality of second temperature measuring components are evenly distributed in the air flow channel along the axial direction of the central tank body, and the second temperature measuring component and the second heating component are spaced apart.

[0026] By adopting the above technical solution, the second temperature measuring element and the second heating element are spaced apart, and the second temperature measuring element detects the air flow temperature and can transmit a signal to the second heating element for heating.

[0027] In summary, the present application includes at least one of the following beneficial technical effects: 1. The first water pump continuously introduces water of a constant temperature reaching the required air flow temperature, passes through the first through groove on the temperature regulating tank body, and flows into the temperature regulating tube fixedly connected to the first mounting groove. The temperature regulating tube is spirally installed along the spiral first mounting groove arranged along the axial direction of the temperature regulating tank body. The first mounting groove is provided with a first heating element and a first temperature measuring element. An air flow channel is formed in the middle of the temperature regulating tank body. The first temperature measuring element detects the temperature of the air flow passing through the air flow channel and transmits the information to the first heating element. The first heating element heats and heats the air flow. At the same time, the water of the constant required temperature introduced into the temperature regulating tube can buffer the rapid temperature rise caused by the first heating element heating the air flow, so that the air flow in the air flow channel is evenly heated. The guide plate can play a role in balancing the temperature and flow rate of the edge air flow and the middle air flow to a certain extent.

[0028] The invention solves the problem that a long section of uniformly arranged heating device in the related art is that damage at one place during use will render the entire heating device unusable, making it difficult to repair the damaged part, and since the heating device is too long, the heat loss per unit length is large, resulting in a waste of resources. The invention can also achieve the purpose of energy saving while adjusting the temperature.

[0029] 2. The first guide block and the second guide block are respectively installed in the air flow channel between the inner wall of the temperature regulating tank body and the outer wall of the central tank body, and in the air flow channel inside the central tank body, which act as guide seats for the air flow to prevent the viscosity effect of the air flow. The first guide block and the second guide block are respectively provided with the first branch pipe groove and the second branch pipe groove. The temperature regulating pipes in the temperature regulating tank body and the central tank body respectively bypass the first branch pipe groove and the second branch pipe groove, so that the constant temperature water in the temperature regulating pipe has a buffering effect on the air flow passing through the first guide block and the second guide block, further reducing the difference in air flow temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of the structure of Example 1 of the present application; Figure 2 is a cross-sectional schematic diagram of a first viewing angle of Example 1 of the present application; Figure 3 for Figure 2 A partial enlarged schematic diagram of part A; Figure 4 is a cross-sectional schematic diagram of a second viewing angle of Example 1 of the present application; Figure 5 for Figure 4 A partial enlarged schematic diagram of part B; Figure 6 This is a schematic diagram of the structure of Example 2 of the present application; Figure 7 is a cross-sectional schematic diagram of a first viewing angle of embodiment 2 of the present application; Figure 8 is a cross-sectional schematic diagram of a second viewing angle of embodiment 2 of the present application; Fig. 9 for Figure 7 A partial enlarged schematic diagram of part C in the middle; Fig.10 for Figure 8 A partial enlarged schematic diagram of part D in the middle.

[0031] In the figure: 10. Temperature regulating tank body; 11. First mounting groove; 12. First through groove; 13. Second through groove; 14. Second through hole; 20. a first heating element; 21. a first heating wire; 30. Thermostatic tube; 40. a first temperature measuring element; 41. a first thermocouple; 50. Guide plate; 60. Central tank body; 61. Second mounting slot; 70. connecting block; 71. first through hole; 80. second heating element; 81. second heating wire; 90. a second temperature measuring element; 91. a second thermocouple; 100, first guide block; 101, first branch pipe slot; 110. second guide block; 111. second branch pipe slot; 120. Air flow channel. DETAILED DESCRIPTION

[0032] The following is combined with Figure 1 -Attached Fig.10 , further details of this application are given.

[0033] The embodiment of the present application discloses a clean gas energy-saving temperature regulating device. Example

[0034] Reference Figure 1 , Figure 2 and Figure 3 A clean gas energy-saving temperature control device includes a first water pump, a temperature control tank body 10, a first heating element 20, a temperature control tube 30, a first temperature measuring element 40 and a guide plate 50. The temperature control tank body 10 has openings at both ends, and an air flow channel 120 is formed inside the temperature control tank body 10. The air flow can flow in the air flow channel 120 along the axial direction of the temperature control tank body 10. The first heating element 20 is located in the wall surface of the temperature control tank body 10. The first heating element 20 is connected to the peripheral side of the temperature control tank body 10. The tube 30 is connected to the peripheral side of the temperature regulating tank body 10, and the temperature regulating tube 30 is spirally arranged around the temperature regulating tank body 10 along the axial direction of the temperature regulating tank body 10. One end of the temperature regulating tube 30 is connected to the first water pump, and the other end is connected to the drain pipe. Constant temperature water can be continuously introduced into the temperature regulating tube 30, and is introduced by the first water pump and discharged from the drain pipe. The first temperature measuring component 40 is located in the air flow channel 120 and is fixedly connected to the temperature regulating tank body 10. The first temperature measuring component 40 is electrically connected to the first heating component 20.

[0035] The first heating element 20 may be a first heating wire 21, and the first temperature measuring element 40 may be a first thermocouple 41. When the required temperature of the clean gas is 25 degrees Celsius, an airflow with uneven temperature and low temperature is introduced from one end of the temperature regulating tank 10. The first temperature measuring element 40 detects that the temperature of the airflow is lower than 25 degrees Celsius. The first temperature measuring element 40 transmits a signal to the first heating element 20. The first heating element 20 is heated to increase the temperature of the airflow. At this time, 25 degrees Celsius water is continuously introduced into the temperature regulating tube 30, so that the airflow in the temperature regulating tank 10 takes 25 degrees Celsius as the reference temperature. When the first detection element detects that the airflow temperature is lower than the required temperature, the first detection element causes the first heating element 20 to heat the first heating element 20. When the hot element 20 is heated and the first heating element 20 locally heats the airflow around the first heating element 20, the water in the 25-degree Celsius temperature regulating tube 30 can play a certain buffering and heat-insulating effect, driving the locally heated airflow to mix with the airflow with a smaller local temperature change along the spiral temperature regulating tube 30, so that the airflows with uneven temperatures are mixed with each other, thereby making the temperature of the airflow flowing out of the temperature regulating tank body 10 uniform. This can solve the problem of increasing the length of the electric heating device, resulting in large heat loss, large energy consumption and waste of resources, by reducing the power and temperature of the first heating element 20 and increasing the length of the electric heating device to slowly and evenly mix the airflow with uneven temperatures in the electric heating device.

[0036] Reference Figure 2 and Figure 3 The outside of the temperature regulating tank body 10 is covered with an insulation layer. A first mounting groove 11 is opened on the temperature regulating tank body 10 along the axial direction of the temperature regulating tank body 10. The first mounting groove 11 is spirally arranged. The temperature regulating tube 30 is located in the first mounting groove 11 and is fixedly connected to the first mounting groove 11. The first heating element 20 is fixedly connected to the first mounting groove 11. Multiple first heating elements 20 are evenly distributed along the axial direction of the temperature regulating tank body 10.

[0037] The outer side of the temperature regulating tank body 10 is covered with a heat-insulating layer, which can prevent the heat of the first heating element 20 and the temperature regulating tube 30 from being lost into the air through the side wall of the temperature regulating tank body 10 .

[0038] The first mounting groove 11 is spirally opened on the peripheral side of the temperature regulating tank body 10, and the first heating element 20 is segmentedly arranged in the first mounting groove 11, which can locally heat the airflow in the airflow channel 120. At this time, a constant temperature water body is passed into the temperature regulating tube 30 fixed in the spiral first mounting groove 11, and 25 degrees Celsius of heat is transferred to the airflow, which can buffer the local airflow temperature change caused by the first heating element 20, make the airflow change uniform, and prevent the local airflow temperature change from being too fast to cause airflow disturbance.

[0039] Reference Figure 2 and Figure 3The first temperature measuring element 40 is located in the air flow channel 120 and is fixedly connected to the inner wall of the temperature regulating tank body 10 . A plurality of first temperature measuring elements 40 are evenly distributed along the circumference of the temperature regulating tank body 10 . The first temperature measuring element 40 and the first heating element 20 are spaced apart.

[0040] The first temperature measuring component 40 is spaced apart from the first heating component 20, and the first temperature measuring component 40 can detect the air flow temperature. When the first temperature measuring component 40 located at the front end of the air flow direction of the air flow channel 120 detects that the air flow temperature is lower than the required temperature, the first heating component 20 located at the rear end of the air flow direction of the air flow channel 120, which is electrically connected, is driven to heat up, so that the air flow monitored by the first temperature measuring component 40 can be heated and heated when it flows to the rear end.

[0041] Reference Figure 1 , Figure 4 and Figure 5 The outer wall of the temperature regulating tank body 10 is provided with a first through groove 12 and a second through groove 13 , the temperature regulating pipe 30 passes through the first through groove 12 and is connected to the first water pump, and the temperature regulating pipe 30 can pass through the second through groove 13 and communicate with the outside.

[0042] The first water pump can continuously supply clean gas at the required temperature of 25 degrees Celsius into the thermostatic tube 30. After the thermostatic tube 30 passes through the spiral first installation groove 11, it flows out of the thermostatic tube 30 from the second through groove 13 and flows to the outside, so that the water entering the thermostatic tube 30 is always maintained at about 25 degrees Celsius. The constant temperature has a buffering effect on the temperature rise of the airflow in the airflow channel 120.

[0043] Reference Figure 2 The guide plate 50 is located in the air flow channel 120 , the guide plate 50 is fixedly connected to the inner wall of the temperature regulating tank body 10 , and the guide plate 50 is arranged in an arc surface toward the air flow direction.

[0044] The airflow plate can prevent the airflow from passing through the airflow channel 120 in parallel, with the airflow velocity near the wall of the temperature regulating tank 10 being slow and the airflow velocity in the middle of the airflow channel 120 being fast, resulting in different airflow velocities, thus causing unstable airflow and non-uniform airflow temperature. The airflow temperature at the edge is heated up under the action of the first heating element 20, while the airflow in the middle of the airflow channel 120 passes through the airflow channel 120 faster, and the temperature increase of the edge airflow is not timely transmitted to the middle airflow entering the airflow channel 120 synchronously, and the temperature of the middle airflow cannot reach the required temperature. The airflow plate can play a certain role in balancing the temperature and velocity of the edge airflow and the middle airflow.

[0045] The implementation principle of a clean gas energy-saving temperature control device in this embodiment is as follows: a constant amount of water reaching the required temperature of the airflow is continuously introduced into the first water pump, and the water passes through the first through groove 12 on the temperature control tank body 10 and flows into the temperature control tube 30 fixedly connected to the first installation groove 11. The temperature control tube 30 is spirally installed along the spiral first installation groove 11 arranged along the axial direction of the temperature control tank body 10. A first heating element 20 and a first temperature measuring element 40 are arranged in the first installation groove 11. An airflow channel 120 is formed in the middle of the temperature control tank body 10. The first temperature measuring element 40 detects the temperature of the airflow passing through the airflow channel 120 and transmits the information to the first heating element 20. The first heating element 20 heats and heats the airflow. At the same time, the water at the constant required temperature introduced into the temperature control tube 30 can buffer the rapid temperature increase caused by the first heating element 20 heating the airflow, so that the airflow in the airflow channel 120 is evenly heated. The guide plate 50 can play a role in balancing the temperature and flow rate of the edge airflow and the middle airflow to a certain extent.

[0046] It can solve the problem that the power and temperature of the first heating element 20 need to be reduced and the length of the electric heating device increased so as to slowly and evenly mix the airflow with uneven temperature in the electric heating device, which leads to the increase of the length of the electric heating device, resulting in large heat loss, high energy consumption and waste of resources. Example

[0047] Reference Figure 6 , Figure 7 and Figure 8 , including a second water pump, the difference between this embodiment and embodiment 1 is that it includes a central tank body 60, a connecting block 70, a second heating element 80, a second temperature measuring element 90, a first guide block 100 and a second guide block 110. The second heating element 80 can be a second heating wire 81, and the second temperature measuring element 90 can be a second thermocouple 91.

[0048] Reference Fig. 9 and Fig.10 The central tank body 60 is arranged in the temperature regulating tank body 10, and the central tank body 60 and the temperature regulating tank body 10 are connected by a connecting block 70. Both ends of the central tank body 60 are opened, and an air flow channel 120 is formed between the inner wall of the temperature regulating tank body 10 and the outer wall of the central tank body 60 and the middle of the central tank body 60; a first through hole 71 is provided on the connecting block 70, a second through hole 14 is provided on the temperature regulating tank body 10, and a second mounting groove 61 is provided on the wall surface of the central tank body 60. The second mounting groove 61 is spirally arranged in the axial direction of the central tank body 60, the second through hole 14, the first through hole 71 and the second mounting groove 61 are connected in sequence, the temperature regulating pipe 30 is connected to the second water pump and passes through the second through hole 14, the first through hole 71 and the second mounting groove 61 in sequence, and a second heating element 80 and a second temperature measuring element 90 are also provided in the second mounting groove 61.

[0049] The second water pump continuously introduces water of constant temperature reaching the required air flow temperature, flows into the second through hole 14 on the front end of the temperature regulating tank body 10, enters the first through hole 71 on the connecting block 70 at the front end, and then flows into the temperature regulating tube 30 fixedly connected to the second mounting groove 61. The temperature regulating tube 30 is installed along the second mounting groove 61. The second mounting groove 61 is provided with a second heating element 80 and a second temperature measuring element 90, and the first mounting groove is provided with a second heating element 80 and a second temperature measuring element 90. The first temperature measuring element 40 and the second temperature measuring element 90 detect the temperature of the air flow passing through the air flow channel 120, and transmit the information to the first heating element 20 and the second heating element 80 respectively. The first heating element 20 and the second heating element 80 are heated accordingly to heat the air flow. At the same time, the water of constant temperature required temperature introduced into the temperature regulating tube 30 in the temperature regulating tank body 10 and the central tank body 60 can buffer the rapid temperature rise caused by the first heating element 20 and the second heating element 80 heating the air flow, so that the air flow in the air flow channel 120 is evenly heated.

[0050] Reference Fig. 9 and Fig.10 The second installation groove 61 is spirally arranged in the axial direction of the central tank body 60. The thermostat tube 30 is fixedly connected to the second installation groove 61. The spiral arrangement of the thermostat tube 30 enables the water in the thermostat tube 30 to be evenly contacted with the airflow around the central tank body 60, which is more convenient for the airflow temperature to change evenly.

[0051] The connecting block 70 is provided with two blocks, one at the air flow inlet and the other at the air flow outlet. The water in the second water pump enters the second mounting groove 61 through the second through hole 14 and the first through hole 71 at the air flow inlet, enters the first through hole 71 at the air flow outlet through the spiral second mounting groove 61, and is discharged from the second through hole 14. The continuously flowing constant temperature water keeps the water entering the temperature regulating tube 30 at about 25 degrees Celsius at all times, and the constant temperature has a buffering effect on the temperature rise of the air flow in the air flow channel 120.

[0052] Reference Fig. 9 The second heating element 80 is fixedly connected to the second mounting groove 61, and multiple second heating elements 80 are evenly distributed along the axial direction of the central tank body 60. The second temperature measuring element 90 is fixedly connected to the inner wall of the central tank body 60, and the second temperature measuring element 90 is electrically connected to the second heating element 80. Multiple second temperature measuring elements 90 are evenly distributed in the air flow channel 120 along the axial direction of the central tank body 60, and the second temperature measuring element 90 and the second heating element 80 are spaced apart.

[0053] The second heating element 80 is arranged in sections in the second installation groove 61, and can locally heat the airflow in the airflow channel 120; the second temperature measuring element 90 is arranged at an interval from the second heating element 80, and the second temperature measuring element 90 can detect the airflow temperature. When the second temperature measuring element 90 located at the front end of the airflow direction of the airflow channel 120 detects that the airflow temperature is lower than the required temperature, the second heating element 80 located at the rear end of the airflow direction of the airflow channel 120, which is electrically connected, is driven to heat, so that the airflow monitored by the second temperature measuring element 90 can be heated and heated when it flows to the rear end.

[0054] Reference Fig. 9 A first guide block 100 is provided on the temperature regulating tank body 10 facing the air flow channel 120. The first guide block 100 is arranged in an arc surface facing the air flow direction. A first branch groove 101 is provided on the first guide block 100. The first branch groove 101 is connected to the first installation groove 11. The temperature regulating pipe 30 is in the first installation groove 11 and bypasses the first branch groove 101.

[0055] After the temperature regulating pipe 30 is connected to the first water pump at the air flow inlet, the temperature regulating pipe 30 enters the first installation groove 11, then enters the first branch groove 101, then goes out from the first branch groove 101 and enters the first installation groove 11, is installed along the first installation groove 11 to the air flow outlet, and then communicates with the outside world from the second through groove 13 at the air flow outlet.

[0056] The thermostatic tube 30 bypasses the first branch pipe groove 101, so that the constant temperature water in the thermostatic tube 30 passes through the first branch pipe groove 101 and is close to the airflow around the first guide block 100. When the airflow flows along the first guide block 100 to reduce the instability and non-uniformity of the airflow temperature, the constant temperature water in the thermostatic tube 30 has a buffering effect on the airflow passing through the first guide block 100, further reducing the difference in airflow temperature.

[0057] Reference Fig. 9 A second guide block 110 is provided on the central tank body 60 facing the airflow channel 120. The second guide block 110 is arranged in an arc surface facing the airflow direction. A second branch groove 111 is provided on the second guide block 110. The second branch groove 111 is connected to the second installation groove 61. The temperature regulating pipe 30 is in the second installation groove 61 and bypasses the second branch groove 111.

[0058] The second guide block 110 is fixedly connected to the outer wall and the inner wall of the central tank body 60, respectively, and is located in the air flow channel 120 inside the central tank body 60. The temperature of the air flow close to the wall of the central tank body 60 is heated up under the action of the heating element, while the air flow in the middle of the air flow channel 120 passes through the air flow channel 120 faster, and the temperature increase of the edge air flow is not timely transmitted to the middle air flow that enters the air flow channel 120 synchronously, and the temperature of the middle air flow cannot reach the required temperature. The second guide block 110 can play a certain role in balancing the temperature and flow rate of the edge air flow and the middle air flow.

[0059] After the thermostatic tube 30 is connected to the second water pump at the air flow inlet, the thermostatic tube 30 enters the second installation groove 61, then enters the second branch groove 111, then goes out from the second branch groove 111 and enters the second installation groove 61, is installed along the second installation groove 61 to the air flow outlet, and then communicates with the outside world from the second through hole 14 at the air flow outlet.

[0060] The thermostatic tube 30 bypasses the second branch groove 111, so that the constant temperature water in the thermostatic tube 30 passes through the second branch groove 111 and approaches the airflow around the second guide block 110. When the airflow flows along the second guide block 110 to reduce the instability and non-uniformity of the airflow temperature, the constant temperature water in the thermostatic tube 30 has a buffering effect on the airflow passing through the second guide block 110, further reducing the difference in airflow temperature.

[0061] The implementation principle of a clean gas energy-saving temperature regulating device in this embodiment is as follows: a first guide block 100 and a second guide block 110 are respectively installed in the air flow channel 120 between the inner wall of the temperature regulating tank body 10 and the outer wall of the central tank body 60, and in the air flow channel 120 inside the central tank body 60, which act as guide seats for the air flow to prevent the viscosity effect of the air flow. A first branch pipe groove 101 and a second branch pipe groove 111 are respectively provided in the first guide block 100 and the second guide block 110. The temperature regulating pipe 30 in the temperature regulating tank body 10 and the central tank body 60 bypasses the first branch pipe groove 101 and the second branch pipe groove 111 respectively, so that the constant temperature water in the temperature regulating pipe 30 has a buffering effect on the air flow passing around the first guide block 100 and the second guide block 110, further reducing the difference in air flow temperature.

[0062] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A clean gas energy-saving temperature control device, comprising a first water pump and a second water pump, characterized in that: Also includes A temperature regulating tank body (10), wherein both ends of the temperature regulating tank body (10) are open, and an air flow channel (120) is formed inside the temperature regulating tank body (10), and air flow can flow in the air flow channel (120); A first heating element (20), the first heating element (20) being connected to the peripheral side of the temperature regulating tank body (10); a temperature regulating pipe (30), the temperature regulating pipe (30) being connected to the peripheral side of the temperature regulating tank body (10), the temperature regulating pipe (30) being arranged in a spiral shape around the temperature regulating tank body (10), the temperature regulating pipe (30) being connected to the first water pump, and the temperature regulating pipe (30) being capable of continuously flowing water at a constant temperature; A first temperature measuring element (40), the first temperature measuring element (40) is located in the air flow channel (120) and is fixedly connected to the temperature regulating tank body (10), and the first temperature measuring element (40) is electrically connected to the first heating element (20).

2. A clean gas energy-saving temperature regulating device according to claim 1, characterized in that: The outer cover of the temperature regulating tank body (10) is provided with a heat-insulating layer. A first mounting groove (11) is provided on the temperature regulating tank body (10) around an axis. The first mounting groove (11) is arranged in a spiral shape in the axial direction of the temperature regulating tank body (10). The temperature regulating tube (30) is fixedly connected to the first mounting groove (11). The first heating element (20) is fixedly connected to the first mounting groove (11). A plurality of the first heating elements (20) are evenly distributed along the axial direction of the temperature regulating tank body (10).

3. A clean gas energy-saving temperature regulating device according to claim 2, characterized in that: The outer wall surface of the temperature regulating tank body (10) is provided with a first through groove (12), and the temperature regulating pipe (30) is connected to the first water pump through the first through groove (12).

4. A clean gas energy-saving temperature regulating device according to claim 3, characterized in that: The first temperature measuring element (40) is fixedly connected to the inner wall of the temperature regulating tank body (10); a plurality of the first temperature measuring elements (40) are evenly distributed in the air flow channel (120) along the axial direction of the temperature regulating tank body (10); and the first temperature measuring element (40) and the first heating element (20) are arranged at intervals.

5. A clean gas energy-saving temperature regulating device according to claim 4, characterized in that: It also comprises a guide plate (50), wherein the guide plate (50) is located in the air flow channel (120), and the guide plate (50) is fixedly connected to the inner wall of the temperature regulating tank body (10).

6. A clean gas energy-saving temperature regulating device according to claim 2, characterized in that: A first guide block (100) is provided on the temperature regulating tank body (10) facing the air flow channel (120); a first branch pipe groove (101) is provided on the first guide block (100); the first branch pipe groove (101) is communicated with the first installation groove (11); the temperature regulating pipe (30) is in the first installation groove (11) and returns to the first installation groove (11) after passing through the first branch pipe groove (101).

7. A clean gas energy-saving temperature regulating device according to claim 6, characterized in that: The invention also comprises a connecting block (70) and a central tank body (60), wherein the central tank body (60) is located at the center of the temperature regulating tank body (10), and the central tank body (60) is provided with openings at both ends. The connecting block (70) connects the temperature regulating tank body (10) and the central tank body (60), and the connecting block (70) is provided with a first through hole (71), and the temperature regulating tank body (10) is provided with a second through hole (14). A second mounting groove (61) is provided on the wall surface of the central tank body (60), and the second through hole (14), the first through hole (71) and the second mounting groove (61) are connected in sequence. The temperature regulating pipe (30) is connected with the second water pump, and the temperature regulating pipe (30) passes through the second through hole (14), the first through hole (71) and the second mounting groove (61).

8. The clean gas energy-saving temperature regulating device according to claim 7, characterized in that: The invention also comprises a second heating element (80), wherein the second installation groove (61) is in the central tank body (60), the second installation groove (61) is arranged in a spiral shape in the axial direction of the central tank body (60), the second heating element (80) is fixedly connected to the second installation groove (61), and a plurality of second heating elements (80) are evenly distributed along the axial direction of the central tank body (60).

9. A clean gas energy-saving temperature regulating device according to claim 8, characterized in that: A second guide block (110) is provided on the central tank body (60) towards the air flow channel (120); a second branch pipe groove (111) is provided on the second guide block (110); the second branch pipe groove (111) is communicated with the second installation groove (61); the temperature regulating pipe (30) is in the second installation groove (61) and returns to the second installation groove (61) after passing through the second branch pipe groove (111).

10. A clean gas energy-saving temperature regulating device according to claim 9, characterized in that: The invention also comprises a second temperature measuring component (90), wherein the second temperature measuring component (90) is fixedly connected to the inner wall of the central tank body (60), the second temperature measuring component (90) is electrically connected to the second heating component (80), a plurality of the second temperature measuring components (90) are evenly distributed in the air flow channel (120) along the axial direction of the central tank body (60), and the second temperature measuring component (90) and the second heating component (80) are arranged at intervals.

Images