High-temperature-resistant packaging structure of MEMS optical fiber vibration sensor

Abstract

The invention belongs to the technical field of MEMS optical fiber vibration sensor high-temperature testing, and discloses an MEMS optical fiber vibration sensor high-temperature-resistant packaging structure which comprises a bottom shell, an upper cover is fixedly installed at the top end of the bottom shell through screws, and an MEMS optical fiber vibration sensitive element is bonded in the bottom shell. And the bottom end of the upper cover is provided with a multi-surface synchronous clamping mechanism for fixing the MEMS optical fiber vibration sensitive element. The four sides of the MEMS optical fiber vibration sensitive element are synchronously subjected to multi-point synchronous pressing in an automatic mode, so that the MEMS optical fiber vibration sensitive element is fixed more stably, the problem that the MEMS optical fiber vibration sensitive element slides along the interior of the bottom shell in the high-temperature detection process of the MEMS optical fiber vibration sensitive element is prevented, and the detection accuracy of the MEMS optical fiber vibration sensitive element is improved. Therefore, the detection precision of the MEMS optical fiber vibration sensitive element at high temperature is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of high temperature testing of MEMS optical fiber vibration sensors, and in particular relates to a high temperature resistant packaging structure of a MEMS optical fiber vibration sensor. Background Art

[0002] MEMS sensors are an important branch of MEMS devices. As an important component of micro-electromechanical systems, MEMS sensors are functional devices that realize micro-electromechanical system perception and signal processing. MEMS sensors work based on the special effects of their sensitive materials. Their manufacturing process is realized by combining today's advanced IC microelectronics processing technology and MEMS micro-machining manufacturing technology. Through micro-machining of materials, stable structural devices (such as single or composite structures such as beams, membranes, forks, etc.) that can sense various parameters such as pressure, temperature, magnetic field, acceleration, etc. are manufactured, thereby realizing the perception, testing and conversion of various related parameters.

[0003] High temperature vibration test of optical fiber vibration sensor based on MEMS vibration sensitive element. Since the MEMS optical fiber vibration sensor sensitive element is mainly composed of silicon-based materials and is small in size, it cannot be directly installed on the surface of the structure under test. Therefore, the MEMS optical fiber vibration sensor sensitive element needs to be packaged to resist high temperature.

[0004] If adhesives are introduced into the packaging structure and method, the physical and chemical properties of the adhesives will change under high temperature conditions, causing the performance to fail under high temperature, causing the MEMS vibration sensitive element to slip in the packaging shell cavity, changing the overall structure of the sensor and affecting the sensor performance. Summary of the invention

[0005] The present invention aims at the problem that in the prior art, due to the change of the physical and chemical properties of the adhesive in a high temperature environment, the performance fails at high temperature, causing the MEMS vibration sensitive element to slip in the cavity of the packaging shell, the overall structure of the sensor changes, and the performance of the sensor is affected. The following technical solutions are proposed:

[0006] A high temperature resistant packaging structure of a MEMS optical fiber vibration sensor, comprising a bottom shell, an upper cover is fixedly mounted on the top of the bottom shell by screws, and a MEMS optical fiber vibration sensitive element is bonded inside the bottom shell;

[0007] The bottom end of the upper cover is equipped with a multi-faceted synchronous clamping mechanism for fixing the MEMS optical fiber vibration sensitive element, and the multi-faceted synchronous clamping mechanism includes a mounting plate fixedly mounted at the center of the bottom end of the upper cover, the bottom end of the mounting plate is symmetrically embedded with a positioning sleeve, a T-shaped column is slidably connected to the inside of the positioning sleeve up and down, a spring rod is embedded with the top end of the T-shaped column, and a moving part slidably connected to the inside of the positioning sleeve is clamped and installed between the top ends of the two spring rods, a screw rod rotatably connected to the bottom end of the mounting plate is threadedly connected inside the moving part, a rectangular plate is fixedly mounted between the bottom ends of two adjacent T-shaped columns, an L-shaped bar is fixedly mounted in the middle of the four end faces of the rectangular plate, eight limit bars are symmetrically fixedly mounted on the bottom end of the upper cover with respect to the center of the four end faces of the rectangular plate, a rotating shaft is rotatably connected between two of the limit bars, a gear is fixedly mounted in the middle of the outer surface of the rotating shaft, and the outer side of the gear is meshed with an end face of the L-shaped bar, a flip rod is slidably connected to the outer side of the rotating shaft, and a high-temperature resistant rubber pad is bonded to one end face of the flip rod.

[0008] As a preferred embodiment of the above technical solution, a moving block is slidably connected inside the L-shaped bar, and a support plate that fits with the top of the MEMS optical fiber vibration sensitive element is fixedly installed at the bottom of the moving block. A bolt is threadedly connected to the outside of the flip rod and one end face of the bolt and the outer surface of the rotating shaft fit together.

[0009] As a preferred embodiment of the above technical solution, cylinders are symmetrically embedded and installed on both end surfaces of the flip rod, the outer side is rotatably connected to a flip frame, the bottom end of the flip frame is movably connected to a movable frame, and the inside of the movable frame is rotatably connected to a pressure roller.

[0010] As a preferred embodiment of the above technical solution, a round sleeve is symmetrically embedded and installed at the bottom end of the flip frame, one of the round sleeves is slidably connected to a column, and the other round sleeve is threadedly connected to a threaded rod, the threaded rod is rotatably connected to the inside of the mobile frame, and the column is fixedly installed on the top of the mobile frame.

[0011] As a preferred embodiment of the above technical solution, an arc-shaped piston rod is symmetrically embedded and installed on one end surface of the flip frame, a piston sleeve is sleeved on the outer side of the arc-shaped piston rod, a rectangular block is fixedly installed on one end surface of the piston sleeve, and the rectangular block is fixedly installed on one end surface of the flip rod.

[0012] As a preferred embodiment of the above technical solution, the shape of the piston sleeve is arc-shaped, and the centers of the piston sleeve and the arc-shaped piston rod coincide with each other.

[0013] As a preferred embodiment of the above technical solution, a directional connection mechanism is fixedly installed on both sides of the mounting plate, and the directional connection mechanism includes plug-in columns equidistantly and symmetrically embedded and installed at one end of the mounting plate, a return sleeve is fixedly installed between the two plug-in columns, a spring rod 2 is embedded and installed on one end surface of the return sleeve, a clamping block is fixedly installed on one end of the spring rod 2, and the bottom end of the clamping block is slidably connected to the inside of the return sleeve.

[0014] As a preferred embodiment of the above technical solution, a connecting rope is embedded in one end face of the clamping block, a synchronous linkage block is fixedly installed between the two connecting ropes and the synchronous linkage block is slidably connected to the outside of the screw rod, and the bottom end of the outer side of the clamping block is fitted with a trapezoidal plate fixedly connected to the top of the rectangular plate.

[0015] As a preferred embodiment of the above technical solution, vertical rods and threaded columns are respectively embedded and installed on both sides of the bottom end of the synchronous linkage block, and the vertical rods and threaded columns are slidably connected to the inside of the moving part. The outer side of the threaded column is located at the bottom end of the moving part and is threadedly connected with a nut.

[0016] The beneficial effects of the present invention are:

[0017] (1) The MEMS fiber optic vibration sensitive element is pressed together at multiple points on four sides in an automated manner, so that the MEMS fiber optic vibration sensitive element is fixed more stably, and the problem of the MEMS fiber optic vibration sensitive element sliding along the inside of the bottom shell during high-temperature detection is prevented, thereby improving the detection accuracy of the MEMS fiber optic vibration sensitive element at high temperatures;

[0018] (2) By adjusting the squeezing force of the rectangular plate on the top of the MEMS fiber vibration sensitive element, the MEMS fiber vibration sensitive element can be ensured to be in an optimal working state, which can not only improve the overall sensitivity of the sensor, but also improve its long-term stability, avoiding performance degradation caused by changes in the external environment or long-term use. In addition, performing such manual adjustment and calibration from time to time can help maintain the accuracy and reliability of the MEMS fiber vibration sensitive element.

[0019] (3) The installation between the multi-sided synchronous clamping mechanism and the upper cover changes the installation difficulty, and the process does not require manual precise alignment, which saves operation time and reduces operation difficulty. At the same time, it ensures the stability and consistency of the multi-sided synchronous clamping mechanism and improves installation efficiency and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The structure diagram of a high temperature resistant packaging structure of a MEMS optical fiber vibration sensor in Example 1 is shown;

[0021] Figure 2The cross-sectional view of a high temperature resistant packaging structure of a MEMS optical fiber vibration sensor in Example 1 is shown;

[0022] Figure 3 What is shown is a schematic structural diagram of the multi-faceted synchronous clamping mechanism in Example 1;

[0023] Figure 4 The figure shows a schematic diagram of the installation structure of the support plate in Example 1;

[0024] Figure 5 The figure shows the installation structure diagram of the piston sleeve in the embodiment 1;

[0025] Figure 6 What is shown is a schematic structural diagram of the directional connection mechanism in Example 1.

[0026] In the figure: 1, bottom shell; 2, upper cover; 3, MEMS optical fiber vibration sensitive element; 4, multi-faceted synchronous clamping mechanism; 41, mounting plate; 42, positioning sleeve; 43, screw rod; 44, moving part; 45, spring rod one; 46, T-shaped column; 47, rectangular plate; 48, L-shaped bar; 49, moving block; 410, support plate; 411, limit bar; 412, rotating shaft; 413, gear; 414, flip rod; 415, bolt; 416, high temperature resistant rubber pad; 4 17. Cylinder; 418. Turning frame; 419. Round sleeve; 420. Vertical column; 421. Threaded rod; 422. Moving frame; 423. Pressing roller; 424. Rectangular block; 425. Piston sleeve; 426. Arc piston rod; 5. Directional connection mechanism; 51. Synchronous linkage block; 52. Vertical column; 53. Threaded column; 54. Nut; 55. Connecting rope; 56. Snap-in block; 57. Spring rod II; 58. Return sleeve; 59. Plug-in column; 510. Trapezoidal plate. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0028] Embodiment 1: The present invention provides a MEMS optical fiber vibration sensor high temperature resistant packaging structure, such as Figures 1 to 6 As shown, it comprises: a bottom shell 1, a top cover 2 is fixedly mounted on the top of the bottom shell 1 by screws, and a MEMS optical fiber vibration sensitive element 3 is bonded inside the bottom shell 1;

[0029] The bottom of the upper cover 2 is provided with a multi-faceted synchronous clamping mechanism 4 for fixing the MEMS optical fiber vibration sensitive element 3. The multi-faceted synchronous clamping mechanism 4 includes a mounting plate 41 fixedly mounted at the center of the bottom of the upper cover 2. A positioning sleeve 42 is symmetrically embedded and mounted at the bottom of the mounting plate 41. A T-shaped column 46 is slidably connected to the inside of the positioning sleeve 42. A spring rod 45 is embedded and mounted at the top of the T-shaped column 46. A moving part 44 slidably connected to the inside of the positioning sleeve 42 is clamped and mounted between the tops of the two spring rods 45. The inside of the moving part 44 is connected to a rotating part between the bottom of the mounting plate 41 through a thread. A rectangular plate 47 is fixedly installed between the bottom ends of two adjacent T-shaped columns 46, and an L-shaped bar 48 is fixedly installed in the middle of the four end surfaces of the rectangular plate 47. Eight limit bars 411 are fixedly installed at the bottom end of the upper cover 2 with the center of the four end surfaces of the rectangular plate 47 symmetrically. A rotating shaft 412 is rotatably connected between two relatively limit bars 411, a gear 413 is fixedly installed in the middle of the outer surface of the rotating shaft 412, and the outer side of the gear 413 is meshingly connected with one end surface of the L-shaped bar 48, and a flip rod 414 is slidably connected to the outer side of the rotating shaft 412, and a high-temperature resistant rubber pad 416 is bonded to one end surface of the flip rod 414.

[0030] like Figure 2 and Figure 3 As shown, a moving block 49 is slidably connected inside the L-shaped bar 48, a supporting plate 410 is fixedly installed at the bottom of the moving block 49 and is in contact with the top of the MEMS optical fiber vibration sensitive element 3, a bolt 415 is threadedly connected to the outside of the flip rod 414, and one end surface of the bolt 415 and the outer surface of the rotating shaft 412 are in contact with each other;

[0031] When the moving block 49 moves along the inside of the L-shaped bar 48, it drives the support plate 410 to move, so that the support plate 410 is located at different positions of the top of the MEMS optical fiber vibration sensitive element 3, thereby changing the force position of the top of the MEMS optical fiber vibration sensitive element 3, preventing the problem of long-term squeezing of the same part of the MEMS optical fiber vibration sensitive element 3, which may easily cause the surface of the MEMS optical fiber vibration sensitive element 3 to be damaged, thereby protecting the MEMS optical fiber vibration sensitive element 3 and increasing the service life of the MEMS optical fiber vibration sensitive element 3;

[0032] When the bolt 415 is rotated, the bolt 415 rotates and moves along the inside of the flip rod 414. The bolt 415 after movement fits with the outside of the rotating shaft 412, so that the flip rod 414 and the rotating shaft 412 are squeezed and fixed by the bolt 415, which changes the difficulty of fixing the flip rod 414, thereby making the installation of the flip rod 414 more stable.

[0033] like Figure 3 and Figure 4As shown, cylinders 417 are symmetrically embedded and installed on both ends of the flip rod 414, and a flip frame 418 is rotatably connected to the outer side, and a moving frame 422 is movably connected to the bottom of the flip frame 418, and a pressure roller 423 is rotatably connected to the inside of the moving frame 422;

[0034] The cylinder 417 can drive the flip rod 414 to rotate, and when the flip rod 414 rotates, it drives the moving frame 422 to rotate, and when the moving frame 422 rotates, it drives the pressure roller 423 to rotate, so that the pressure roller 423 and the outer side of the MEMS optical fiber vibration sensitive element 3 fit together and move, so that the pressure roller 423 is used to squeeze the outer side of the MEMS optical fiber vibration sensitive element 3, thereby achieving the purpose of squeezing and fixing the surrounding of the MEMS optical fiber vibration sensitive element 3.

[0035] like Figure 4 and Figure 5 As shown, a round sleeve 419 is symmetrically embedded and installed at the bottom of the flip frame 418, wherein a column 420 is slidably connected inside one of the round sleeves 419, and a threaded rod 421 is threadedly connected inside the other round sleeve 419, and the threaded rod 421 is rotatably connected to the inside of the moving frame 422, and the column 420 is fixedly installed on the top of the moving frame 422;

[0036] By rotating the threaded rod 421, the threaded rod 421 rotates and moves along the inside of the circular sleeve 419, thereby driving the movable frame 422 to move. When the movable frame 422 moves, it drives the column 420 to move inside the circular sleeve 419, thereby changing the distance between the movable frame 422 and the flip frame 418, thereby changing the difficulty of adjusting the distance between the movable frame 422 and the flip frame 418, and further facilitating the fitting of the pressure roller 423 inside the movable frame 422 and the MEMS optical fiber vibration sensitive element 3, thereby improving the fitting efficiency of the pressure roller 423 and the MEMS optical fiber vibration sensitive element 3.

[0037] like Figure 4 and Figure 5 As shown, an arc-shaped piston rod 426 is symmetrically embedded and installed on one end surface of the flip frame 418, and a piston sleeve 425 is sleeved on the outer side of the arc-shaped piston rod 426. A rectangular block 424 is fixedly installed on one end surface of the piston sleeve 425, and the rectangular block 424 is fixedly installed on one end surface of the flip rod 414. The shape of the piston sleeve 425 is arc-shaped, and the centers of the piston sleeve 425 and the arc-shaped piston rod 426 coincide with each other.

[0038] After the pressure roller 423 and the MEMS optical fiber vibration sensitive element 3 are fitted together, the flip frame 418 is still flipped, and the abutment force between the pressure roller 423 and the MEMS optical fiber vibration sensitive element 3 causes the flip frame 418 to flip. When the flip frame 418 flips, it drives the arc piston rod 426 to move inside the piston sleeve 425, so that the gas inside the piston sleeve 425 is compressed, and the driving force of the compressed gas is used to make the pressure roller 423 squeeze the MEMS optical fiber vibration sensitive element 3, so that the MEMS optical fiber vibration sensitive element 3 is installed more stably due to the squeezing.

[0039] like Figure 2 and 3 As shown, the directional connection mechanism 5 is fixedly installed on both sides of the mounting plate 41, and the directional connection mechanism 5 includes plug-in columns 59 equidistantly and symmetrically embedded and installed at one end of the mounting plate 41, and a return sleeve 58 is fixedly installed between the two plug-in columns 59, and a spring rod 2 57 is embedded and installed on one end surface of the return sleeve 58, and a clamping block 56 is fixedly installed on one end of the spring rod 2 57, and the bottom end of the clamping block 56 is slidably connected to the inside of the return sleeve 58, and an inclined angle is provided on the top edge of the clamping block 56, and positioning grooves are symmetrically provided on both sides of the cover plate 2, and placement grooves are provided on both sides of the cover plate 2 on one side of the positioning groove, one end of the return sleeve 58 and one end surface of the positioning groove fit each other, and one end of the clamping block 56 is movably installed in the placement groove;

[0040] When the return sleeve 58 is installed, the return sleeve 58 drives the mounting plate 41 and the bottom end of the upper cover 2 to fit together through the plug-in column 59, and at this time, the clamping block 56 is convenient to enter the positioning groove due to the action of the tilt angle. At the same time, due to the action of the tilt angle of the clamping block 56, it first contacts with the upper cover 2, thereby driving the clamping block 56 to move inside the return sleeve 58. Since the clamping block 56 drives the spring rod 2 57 to be compressed when it moves, when the return sleeve 58 completely enters the positioning groove, the tension of the spring rod 2 57 drives the clamping block 56 to enter the placement groove. At this time, the mounting plate 41 is positioned up and down through the clamping block 56, and is positioned left and right under the action of the mounting plate 41, the plug-in column 59 and the return sleeve 58, so that the mounting plate 41 is positioned up and down, left and right after installation, thereby making the installation of the mounting plate 41 more stable.

[0041] like Figure 3 and 6As shown, a connecting rope 55 is embedded and installed on one end face of the clamping block 56, a synchronous linkage block 51 is fixedly installed between the two connecting ropes 55, and the synchronous linkage block 51 is slidably connected to the outside of the screw rod 43, and the bottom end of the outer side of the clamping block 56 is fitted with a trapezoidal plate 510 fixedly connected to the top of the rectangular plate 47, and the two sides of the bottom end of the synchronous linkage block 51 are respectively embedded and installed with a vertical rod 52 and a threaded column 53, and the vertical rod 52 and the threaded column 53 are both slidably connected to the inside of the moving member 44, and the outer side of the threaded column 53 is located at the bottom end of the moving member 44. The nut 54 is threadedly connected;

[0042] When the trapezoidal plate 510 rises, it drives the clamping block 56 to move, so that the clamping block 56 enters the positioning groove, further increasing the stability between the clamping block 56 and the upper cover 2, and in this process, the synchronous linkage block 51 is driven to rise through the connecting rope 55, and when the synchronous linkage block 51 rises along the outer side of the screw rod 43, it simultaneously drives the vertical rod 52 and the threaded column 53 to rise inside the moving part 44, at this time, the synchronous linkage block 51 rises more stably, and when the synchronous linkage block 51 moves downward, it drives the two clamping blocks 56 to move relative to each other, and then the clamping block 56 is separated along the inside of the upper cover 2, thereby facilitating the disassembly of the multi-sided synchronous clamping mechanism 4 and changing the difficulty of disassembly of the multi-sided synchronous clamping mechanism 4.

[0043] Working principle: During the actual use of the device, the user installs the MEMS optical fiber vibration sensitive element 3 between the bottom shell 1, and then installs the mounting plate 41 and the upper cover 2. During this process, the return sleeve 58 and the upper cover 2 are installed. At this time, the return sleeve 58 drives the mounting plate 41 and the bottom end of the upper cover 2 to fit together through the plug-in column 59. Due to the action of the inclination angle of the clamping block 56, it first contacts the upper cover 3, thereby driving the clamping block 56 to move inside the return sleeve 58. As the clamping block 56 moves, it drives the spring rod 2 57 to be compressed. When the return sleeve 58 completely enters the positioning groove, the tension of the spring rod 2 57 drives the clamping block 56 to enter the placement groove, thereby completing the installation between the multi-faceted synchronous clamping mechanism 4 and the upper cover 2, changing the installation difficulty. In addition, the process does not require manual precise alignment, saving operation time and reducing the operation difficulty. At the same time, it ensures the stability and consistency of the multi-faceted synchronous clamping mechanism 4, and improves the installation efficiency and reliability.

[0044] Then the personnel install the upper cover 2 and the bottom shell 1. At this time, since the rectangular plate 47 is in contact with the top of the MEMS fiber optic vibration sensitive element 3, and at the same time, the support plate 410 at the top of the L-shaped bar 48 is in contact with the top of the MEMS fiber optic vibration sensitive element 3, before this process, the position of the moving block 49 inside the L-shaped bar 48 can be adjusted. When the position of the moving block 49 is adjusted, the position of the support plate 410 is changed, so that the support plate 410 enters the top edge of the MEMS fiber optic vibration sensitive element 3, and then squeezes and fits different positions of the top of the MEMS fiber optic vibration sensitive element 3, thereby preventing the problem of damage to the top of the MEMS fiber optic vibration sensitive element 3 due to the same force position on the top of the MEMS fiber optic vibration sensitive element 3;

[0045] At the same time, during the above process, personnel can rotate the screw rod 43. When the screw rod 43 rotates, it drives the moving part 44 to move inside the positioning sleeve 42. When the moving part 44 moves, it drives the spring rod 45 to move. When the spring rod 45 moves, it drives the T-shaped column 46 to move. When the T-shaped column 46 moves, it drives the rectangular plate 47 to move, thereby changing the distance between the bottom end of the rectangular plate 47 and the top end of the MEMS fiber optic vibration sensitive element 3, thereby changing the squeezing force of the rectangular plate 47 on the top end of the MEMS fiber optic vibration sensitive element 3. By adjusting the squeezing force of the rectangular plate 47 on the top end of the MEMS fiber optic vibration sensitive element 3, it can be ensured that the MEMS fiber optic vibration sensitive element 3 is in an optimal working state, which can not only improve the overall sensitivity of the sensor, but also improve its long-term stability, avoid performance degradation due to changes in the external environment or long-term use, and irregularly perform this manual adjustment and calibration, which can help maintain the accuracy and reliability of the MEMS fiber optic vibration sensitive element 3.

[0046] When the rectangular plate 47 and the top of the MEMS fiber optic vibration sensitive element 3 are fitted together, the rectangular plate 47 is squeezed by the MEMS fiber optic vibration sensitive element 3, causing the spring rod 45 to be compressed, and in the process, the rectangular plate 47 is driven to rise, and when the rectangular plate 47 rises, the L-shaped bar 48 is driven to rise, and when the L-shaped bar 48 rises, the gear 413 is driven to rotate, and when the gear 413 rotates, the shaft 412 is driven to rotate inside the limit bar 411, and when the shaft 412 rotates, the flip rod 414 is driven to rotate, and when the flip rod 414 rotates, the high-temperature resistant rubber pad 416 is fitted with the side wall of the MEMS fiber optic vibration sensitive element 3. In this process, the pressure roller 423 of the movable frame 422 first fits with the side wall of the MEMS fiber optic vibration sensitive element 3, and when the flip rod 414 continues to flip, the pressure roller 423 moves along the outside of the MEMS fiber optic vibration sensitive element 3, causing the pressure roller 423 to The angle of the pressure roller 423 changes. When the angle of the pressure roller 423 changes, the turning frame 418 is driven to rotate outside the cylinder 417 through the moving frame 422, the turning frame 418, the circular sleeve 419, the column 420 and the threaded rod 421, and in the process, the arc piston rod 426 is driven to move inside the piston sleeve 425, thereby compressing the gas inside the piston sleeve 425, and the driving force of the compressed gas is used to make the pressure roller 423 squeeze the side of the MEMS fiber optic vibration sensitive element 3, and the MEMS fiber optic vibration sensitive element 3 is synchronously pressed at multiple points on four sides in an automated manner, so that the MEMS fiber optic vibration sensitive element 3 is fixed more stably, and the MEMS fiber optic vibration sensitive element 3 is prevented from sliding along the inside of the bottom shell 1 during the high-temperature detection process, thereby improving the detection accuracy of the MEMS fiber optic vibration sensitive element 3 at high temperatures;

[0047] Finally, the personnel slides the flip rod 414, and the position of the flip rod 414 outside the rotating shaft 412 is adjusted when the flip rod 414 moves, and then the bolt 415 is used to squeeze and fix it, thereby changing the position of the high-temperature resistant rubber pad 416. Then the personnel rotates the threaded rod 421, and the position of the threaded rod 421 inside the circular sleeve 419 is adjusted, so that the movable frame 422 drives the column 420 to slide inside the circular sleeve 419, so that the position of the pressure roller 423 is adjusted, and then the squeezing position of the pressure roller 423 on the MEMS optical fiber vibration sensitive element 3 is changed, and the squeezing force on the MEMS optical fiber vibration sensitive element 3 can be changed, so that the MEMS optical fiber vibration sensitive element 3 is more stable after installation.

[0048] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them.

Claims

1. A high temperature resistant packaging structure of a MEMS optical fiber vibration sensor, characterized in that: include: A bottom shell (1), wherein an upper cover (2) is fixedly mounted on the top of the bottom shell (1) by screws, and a MEMS optical fiber vibration sensitive element (3) is bonded inside the bottom shell (1); a multi-faceted synchronous clamping mechanism (4) for fixing the MEMS optical fiber vibration sensitive element (3) is mounted on the bottom of the upper cover (2), and the multi-faceted synchronous clamping mechanism (4) comprises a mounting plate (41) fixedly mounted at the center of the bottom end of the upper cover (2), a positioning sleeve (42) is symmetrically embedded and mounted on the bottom end of the mounting plate (41), a T-shaped column (46) is slidably connected to the inside of the positioning sleeve (42), a spring rod (45) is embedded and mounted on the top end of the T-shaped column (46), a moving part (44) slidably connected to the inside of the positioning sleeve (42) is clamped and mounted between the top ends of the two spring rods (45), and the moving part (44) slidably connected to the inside of the positioning sleeve (42) is clamped and mounted between the top ends of the two spring rods (45), and the moving part (44) is slidably connected to the inside of the positioning sleeve (42). A screw rod (43) is connected to the bottom end of the mounting plate (41) through a threaded connection inside the component (44), a rectangular plate (47) is fixedly installed between the bottom ends of two adjacent T-shaped columns (46), an L-shaped strip (48) is fixedly installed in the middle of the four end faces of the rectangular plate (47), eight limit strips (411) are fixedly installed at the bottom end of the upper cover (2) symmetrically around the four end faces of the rectangular plate (47), a rotating shaft (412) is rotatably connected between two of the limit strips (411), a gear (413) is fixedly installed in the middle of the outer surface of the rotating shaft (412), and the outer side of the gear (413) is meshedly connected to one end face of the L-shaped strip (48), a flip rod (414) is slidably connected to the outer side of the rotating shaft (412), and a high-temperature resistant rubber pad (416) is bonded to one end face of the flip rod (414).

2. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 1, characterized in that: A moving block (49) is slidably connected inside the L-shaped bar (48), a supporting plate (410) is fixedly installed at the bottom end of the moving block (49) and is in contact with the top end of the MEMS optical fiber vibration sensitive element (3), and a bolt (415) is threadedly connected to the outside of the flip rod (414), and one end face of the bolt (415) and the outer surface of the rotating shaft (412) are in contact with each other.

3. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 1, characterized in that: The two end surfaces of the flip rod (414) are symmetrically embedded with cylinders (417), the outer side is rotatably connected to a flip frame (418), the bottom end of the flip frame (418) is movably connected to a moving frame (422), and the inside of the moving frame (422) is rotatably connected to a pressure roller (423).

4. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 3, characterized in that: A round sleeve (419) is symmetrically embedded and installed at the bottom end of the flip frame (418), wherein one of the round sleeves (419) is slidably connected to a column (420), and the other round sleeve (419) is threadedly connected to a threaded rod (421), and the threaded rod (421) is rotatably connected to the inside of the moving frame (422), and the column (420) is fixedly installed on the top of the moving frame (422).

5. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 3, characterized in that: An arc-shaped piston rod (426) is symmetrically embedded and installed on one end surface of the flip frame (418), a piston sleeve (425) is sleeved on the outer side of the arc-shaped piston rod (426), a rectangular block (424) is fixedly installed on one end surface of the piston sleeve (425), and the rectangular block (424) is fixedly installed on one end surface of the flip rod (414).

6. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 5, characterized in that: The piston sleeve (425) is in an arc shape, and the centers of the piston sleeve (425) and the arc-shaped piston rod (426) coincide with each other.

7. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 2, characterized in that: Directional connection mechanisms (5) are fixedly installed on both sides of the mounting plate (41), and the directed connection mechanisms (5) include plug-in columns (59) symmetrically embedded and installed at one end of the mounting plate (41), a return sleeve (58) is fixedly installed between the two plug-in columns (59), a spring rod 2 (57) is embedded and installed on one end surface of the return sleeve (58), a clamping block (56) is fixedly installed on one end of the spring rod 2 (57), and the bottom end of the clamping block (56) is slidably connected to the inside of the return sleeve (58).

8. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 7, characterized in that: A connecting rope (55) is embedded and installed on one end surface of the clamping block (56), a synchronous linkage block (51) is fixedly installed between the two connecting ropes (55), and the synchronous linkage block (51) is slidably connected to the outside of the screw rod (43), and the outer bottom end of the clamping block (56) is fitted and connected with a trapezoidal plate (510) fixedly connected to the top of the rectangular plate (47).

9. The high temperature resistant packaging structure of the MEMS optical fiber vibration sensor according to claim 7, characterized in that: A vertical rod (52) and a threaded column (53) are respectively embedded and installed on both sides of the bottom end of the synchronous linkage block (51); the vertical rod (52) and the threaded column (53) are both slidably connected to the inside of the moving member (44); and a nut (54) is threadedly connected to the outside of the threaded column (53) at the bottom end of the moving member (44).

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