Integrated circuit high-resolution microscopic leakage point positioning equipment and positioning method thereof

Abstract

The invention relates to the technical field of integrated circuit component performance detection, and discloses an integrated circuit high-resolution microcosmic leakage point positioning device and a positioning method thereof.The integrated circuit high-resolution microcosmic leakage point positioning device comprises a discharging unit provided with a sample containing cavity, a temperature control unit arranged on the discharging unit, an illumination unit arranged on the discharging unit and an amplification detection unit; fluorine oil is injected into the sample placing cavity; the amplification detection unit comprises an adjustable supporting structure, an angle adjusting structure and an amplification display device connected with the angle adjusting structure. The height and the position of the amplification display device are adjusted through the adjustable supporting structure, it is guaranteed that integrated circuits of different sizes and positions can be detected, position blind areas are prevented, and the angle adjusting structure is used for adjusting the angle and the height of the amplification display device. It is ensured that the amplification display device can turn to all parts of the integrated circuit according to needs, definition adjustment of the amplification display device is ensured by adjusting the height, double adjustment is achieved, and detection comprehensiveness is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit performance detection, and in particular to an integrated circuit high-resolution microscopic leakage point positioning device and a positioning method thereof. Background Art

[0002] Integrated circuits are components of electronic components and small machines and instruments. They themselves are often composed of several parts, including semiconductor devices, integrated circuits, printed circuits, etc.

[0003] Military integrated circuits have high reliability and long service life requirements, and the sealing state of the integrated circuit is an important guarantee for the reliability of the integrated circuit. Airtightness testing is the process of testing the sealing performance of integrated circuits. It aims to detect whether electronic components have good sealing performance and prevent harmful substances such as external gases and liquids from entering the components, thereby protecting internal electronic components from damage and ensuring the long-term stable operation of the product. Therefore, it is very critical to check whether the integrated circuit has leaks.

[0004] The sealing status of integrated circuits is usually judged by the helium tracing effect and the action principle of fluorine oil. Among them, the helium tracing effect can determine whether the sealing standard is met, but it cannot determine the specific location of the leak. The role of fluorine oil, by using the presence or absence of bubbles, can determine whether the sealing standard is met, but can only roughly determine the leak point (hereinafter referred to as the "leak point").

[0005] Some existing leak detection devices are equipped with a magnifying device to find the specific location of the leak by magnifying the point where the bubble appears. However, the existing magnifying devices are fixed on the corresponding leak detection device and cannot be adjusted and moved. Different integrated circuits have different sizes. An oversized integrated circuit may cause part of the position to be beyond the irradiation range of the magnifying device, affecting the accuracy of leak detection. Summary of the invention

[0006] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to provide an integrated circuit high-resolution microscopic leak location device and a location method thereof to solve the problem of limitations in the use of leak detection equipment.

[0007] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide an integrated circuit high-resolution microscopic leakage point positioning device including a discharge unit, a temperature control unit arranged on the discharge unit, a lighting unit arranged on the discharge unit and an amplification detection unit, wherein a sample placement cavity is formed on the discharge unit, and fluorine oil is filled in the sample placement cavity, the temperature control unit is used for heating and constant temperature control of the fluorine oil, and the lighting unit is used for providing lighting to the sample placement cavity, the amplification detection unit includes an adjustable support structure, an angle adjustment structure arranged on a free end of the adjustable support structure and an amplification display device connected to the angle adjustment structure, the adjustable support structure is used to adjust the position of the amplification display device relative to the sample placement cavity, the angle adjustment structure is used to adjust the angle and height of the amplification display device relative to the sample placement cavity, and the amplification display device has a magnification of 10 to 100, so as to cooperate with the adjustable support structure to perform dual height adjustment and position adjustment, so as to be able to comprehensively detect electrical components of different sizes according to needs, and ensure the comprehensiveness of leakage detection.

[0008] Furthermore, the adjustable supporting structure includes a base, a first connecting arm whose first end is rotatably connected to the base via a first rotating member, and a second connecting arm whose first end is rotatably connected to the second end of the first connecting arm via a second rotating member. The discharging unit is within the movable range of the second connecting arm, and both the first rotating member and the second rotating member are provided with limiting members for locking or unlocking the rotation of the first connecting arm and the second connecting arm, so as to ensure that the adjustable supporting structure can adjust the height position of the angle adjustment structure and the magnification limiting device, so that the magnified display device can reach any position of the discharging unit.

[0009] Furthermore, the angle adjustment structure includes an outer shell connected to the adjustable supporting structure, an inner shell arranged in the outer shell, and a transmission part arranged on the outer shell, the inner shell is transmission-engaged with the transmission part so as to move the inner shell in the vertical direction by rotation, and the magnifying display device is installed at the bottom of the inner shell to drive the magnifying display device to move vertically to adjust the height.

[0010] Furthermore, the transmission parts are provided in two and are respectively arranged on both sides of the inner shell, and the two transmission parts each include a first rack fixedly connected to the outer shell in the vertical direction and meshed with the gear, a second rack slidably provided on the other side of the outer shell in the vertical direction, and a gear coaxially connected to the outer side wall of the inner shell, and the gears are respectively meshed with the first rack and the second rack to drive the inner shell to move in the vertical direction through the meshing between the gear and the rack.

[0011] Furthermore, the inner shell has a rotating cavity with a bottom opening, and the angle adjustment structure also includes an angle adjustment part arranged in the rotating cavity; the angle adjustment part includes a connecting shell that is coaxial with the gear and one side of which is rotatably connected to the inner wall of one side of the rotating cavity, a rotating rod and a meshing wheel fixedly connected to the inner shell, the connecting shell is hollow inside and the other side is axially penetrated, the meshing wheel is located on the side of the inner shell facing the open side of the connecting shell and is coaxially arranged with the connecting shell, the outer side of the meshing wheel is sequentially provided with tooth-shaped meshing grooves around one circle, and a connecting plate is provided on one end of the rotating rod, and the connecting plate is A conical rod with a conical end should be formed by extending along the axial direction of the rotating rod at the position of the engaging groove. A guide rod is fixedly provided in the connecting shell and slides through the connecting plate along its axial direction. A spring is sleeved on the guide rod and presses against the connecting plate toward the side of the engaging wheel. The magnifying display device is connected to the bottom of the connecting shell. The conical end of the conical rod is inserted into any engaging groove under the pressure of the spring. Pressing the rotating rod toward one side of the connecting shell can make the conical end disengage from the engaging groove and rotate the connecting shell, so that the height adjustment and angle adjustment of the magnifying display device can be respectively achieved by rotating the rotating rod.

[0012] Furthermore, the discharge unit includes a supporting frame and an observation chamber arranged on the top of the supporting frame. The observation chamber protrudes from the top of the supporting frame and is made of high-transparency tempered glass. The sample prevention cavity is formed in the observation chamber and has a supporting table surface for placing integrated circuits, so as to facilitate the immersion of electrical components and facilitate intuitive viewing of the situation in the observation chamber.

[0013] Furthermore, the top of the observation bin is open and covered with a cover plate made of a transparent high-temperature resistant material to block one side of the opening of the observation bin and prevent other objects from entering therein.

[0014] Furthermore, the temperature control unit includes a heating module arranged on a support frame to heat the fluorine oil in the observation chamber, a heating switch electrically connected to the heating module, and a temperature control module arranged on the support frame and used to detect and control the temperature of the fluorine oil in the observation chamber. The temperature control module is electrically connected to the heating module and the heating switch, respectively, to heat the fluorine oil when necessary and maintain a constant temperature of the fluorine oil.

[0015] Furthermore, the lighting unit includes two lighting lamps connected to the top of the support frame and a lighting switch arranged on the support frame and electrically connected to the lighting lamps. The two lighting lamps are arranged on two opposite sides of the observation chamber and both emit light toward one side of the observation chamber. The support table is within the illumination range of the two lighting lamps to provide brightness to facilitate finding leaks.

[0016] The present invention also provides a method for locating a high-resolution microscopic leak in an integrated circuit, comprising the following steps:

[0017] (1) Turn on the lighting switch and heating switch to heat the fluorine oil and keep it at 125°C;

[0018] (2) Open the cover and use a tool to slowly place the integrated circuit on the support table of the observation chamber so that all the electrical components to be inspected are immersed in the fluorine oil. The immersion time shall not exceed 20 minutes;

[0019] (3) Use the adjustable support structure to adjust the magnifying display device to the top of the support table and then lock it with the limiter. Use the angle adjustment structure to adjust the angle and height of the magnifying display device so that the distance between the magnifying display device and the integrated circuit is 70 mm to 130 mm. Adjust the magnification to obtain a clear field of view. After waiting for 1 to 5 minutes, observe and find out whether there is a leak. For the part with bubbles, adjust the focal length of the magnifying display device to find out the leak.

[0020] (4) After the test is completed, turn off the lighting switch and the heating switch and remove the integrated circuit.

[0021] After using the above method, the air tightness of various parts of the integrated circuit can be detected more comprehensively. Through the bubbles and the magnifying display device, the leakage point can be found more comprehensively and conveniently, reducing the possibility of missed detection.

[0022] The integrated circuit high-resolution microscopic leakage point positioning device and the positioning method thereof of the present invention have at least the following beneficial effects: by setting the magnifying detection unit, the height and position of the magnifying display device can be adjusted through the adjustable support structure, so that the magnifying display device can be moved above any position in the discharge unit, ensuring that integrated circuits of different sizes and positions can be detected to prevent the occurrence of position blind spots, and the angle adjustment structure is used to adjust the angle and height of the magnifying display device to ensure that the magnifying display device can be turned to various parts of the integrated circuit as needed, and the clarity adjustment of the magnifying display device is ensured by adjusting the height, thereby realizing double adjustment and ensuring the comprehensiveness of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0024] Figure 1 It is a front structural schematic diagram of the integrated circuit high-resolution microscopic leak location device of the present invention;

[0025] Figure 2 for Figure 1 An enlarged view of section A is shown;

[0026] Figure 3is a side cross-sectional view of the angle adjustment structure of the present invention;

[0027] Figure 4 It is a partial matching schematic diagram of the rotating rod and the meshing wheel of the present invention;

[0028] Figure 5 It is a side view of the rotating rod and the meshing wheel of the present invention.

[0029] The meanings of the symbols in the accompanying drawings are:

[0030] Integrated circuit-a; unloading unit-1; support stand-11; working surface-111; observation chamber-12; support table-121; cover-122; temperature control unit-2; heating switch-21; temperature control module-22; lighting unit-3; lighting lamp-31; lighting switch-32; magnification detection unit-4; adjustable support structure-41; base-411; first connecting arm-412; first rotating member-413; second connecting arm-414; second rotating member-415; angle adjustment structure-42; housing-421; movable slot-4211; swing Movable opening-4212; inner shell-422; boss-4221; rotating cavity-4222; through hole-4223; transmission part-423; first rack-4231; second rack-4232; gear-4233; slider-4234; angle adjustment part-424; connecting shell-4241; rotating rod-4242; grip head-42421; meshing wheel-4243; meshing groove-42431; connecting plate-4244; tapered rod-4245; guide rod-4246; spring-4247; connecting rod-425; magnifying display device-43. DETAILED DESCRIPTION

[0031] The present invention will be further described below in conjunction with the accompanying drawings.

[0032] like Figures 1 to 5 As shown, the integrated circuit high-resolution microscopic leakage point positioning device of the present invention includes a discharge unit 1, a temperature control unit 2 arranged on the discharge unit 1, a lighting unit 3 arranged on the discharge unit 1 and an amplification detection unit 4. A sample placement cavity is formed on the discharge unit 1, and fluorine oil is injected into the sample placement cavity for storing and containing the fluorine oil, thereby providing a detection environment; the temperature control unit 2 is used to heat the fluorine oil and maintain the constant temperature of the fluorine oil after the fluorine oil is heated to a certain temperature; the lighting unit 3 is used to provide light to the sample placement cavity to provide sufficient light intensity to facilitate clear observation of the airtightness of the electronic component to be inspected-the integrated circuit, and avoid missed detection due to insufficient light; the amplification detection unit 4 is used to magnify and inspect each position of the integrated circuit a, and improve the accuracy and reliability of the detection by adjusting the position, angle and height.

[0033] In this embodiment, the discharge unit 1 includes a support frame 11 and an observation chamber 12 disposed on the top of the support frame 11. The support frame 11 is used to support the observation chamber 12, and the observation chamber 12 is used to install fluorine oil and integrated circuit a, so that the magnification detection unit 4 can detect the integrated circuit a in the observation chamber 12, so as to detect the airtightness of the integrated circuit a, so as to repair it in time to ensure the performance of the integrated circuit a. It should be noted that the discharge unit 1 is not limited to this embodiment, and can also be replaced by a structure, such as the discharge unit 1 can include a bottom plate, side plates fixedly arranged on each side of the bottom plate, and the top of the side plate is open and is arranged together with the bottom plate to form a sample placement cavity.

[0034] In the content defined in this embodiment, the support frame 11 is a geometric three-dimensional structure, and an installation space is provided in the support frame 11, and parts of the temperature control unit 2 and the lighting unit 3 can be arranged in the installation space. A working surface 111 is provided on the top of the support frame 11, and the observation chamber 12 is installed on the working surface 111 and contacts the working surface 111, so that the observation chamber 12 is convex on the top of the support frame 11. The observation chamber 12 can be in a cube shape for easy production. The observation chamber 12 is made of highly transparent tempered glass and is hollow inside to form a sample placement cavity. The observation chamber 12 can also be made of other organic glass. The top of the observation chamber 12 is open to facilitate the placement of the integrated circuit a from its top in the sample placement cavity, and the transparent material observation chamber 12 can directly observe the integrated circuit a in the sample placement cavity through its top and each side, ensuring a wider field of view, and also facilitating more people or magnifying detection devices to see the situation in the sample placement cavity from different angles. A horizontal support table 121 is formed in the sample placement cavity for the integrated circuit a to be placed horizontally thereon. It should be noted that the depth of the sample placement cavity should be much higher than the height of the conventional integrated circuit a, and the liquid level of the fluorine oil in the sample placement cavity should also be higher than the top surface height of the conventional sample when placed on the support table 121, so as to ensure that the integrated circuit a can be completely immersed, thereby facilitating the observation of bubbles. The fluorine oil uses a high-boiling point fluorine oil such as perfluorotributylamine, which has a boiling point of 170-180°C, much higher than 125°C, is transparent and colorless, and has a residue of less than 50μg / g. In order to prevent irrelevant items from entering the sample placement cavity after the fluorine oil is installed in the sample placement cavity, a cover plate 122 made of a transparent high-temperature resistant material is provided on the top of the observation chamber 12 to cover the sample placement cavity. The cover plate 122 can also be made of highly transparent tempered glass to ensure that the situation in the sample placement cavity can be clearly seen through the cover plate 122, so that the integrated circuit a in the fluorine oil can be detected as needed when the cover plate 122 is provided, and the water vapor that may exist in the air in the sample placement cavity after the fluorine oil is heated is blocked to prevent the vapor from floating onto the amplifying detection device and affecting the observation, and also prevent irrelevant items from falling into it during the detection and affecting the detection or damaging the integrated circuit a; and the cover plate 122 forms a sealed space in the sample placement cavity to a certain extent, which can reduce the volatilization of the fluorine oil at high temperature and avoid the waste of the fluorine oil. When detecting leaks, the cover plate 122 may not be provided.

[0035] In this embodiment, the temperature control unit 2 includes a heating module arranged on the support stand 11 to heat the fluorine oil in the observation chamber 12, a heating switch 21 electrically connected to the heating module, and a temperature control module 22 arranged on the support stand 11 and used to detect and control the temperature of the fluorine oil in the observation chamber 12. The heating module is arranged in the installation cavity and contacts the bottom of the observation chamber 12 or directly extends into the sample placement cavity. The heating module can be a device that can heat up, such as a heating wire, so as to heat the fluorine oil by heating the observation chamber 12 or directly heat the fluorine oil. The heating switch 21 is installed on the outer wall of the support stand 11 for easy touch. The temperature control module 22 includes a temperature display screen, a controller and a temperature sensor. The temperature sensor is installed on the working surface 111 and contacts the bottom of the observation chamber 12 or directly extends into the sample placement cavity for temperature detection. The heating module, the heating switch 21, the temperature display screen and the temperature sensor are all electrically connected to the controller, and the controller controls the use of each device so that the temperature control module 22 is electrically connected to the heating module and the heating switch 21 respectively. Among them, the heating temperature of the heating module for the fluorine oil is set to 125°C, and the temperature sensor detects the temperature in real time. When the temperature reaches 125°C, the temperature signal is sent to the controller, and the controller controls the heating module to stop heating, and controls the heating module to continue heating when the temperature drops so that the temperature can be constant at 125°C. The temperature display screen displays the temperature in real time. It should be noted that the temperature control unit 2 is not limited to this embodiment, and other devices can also be used to replace it. In another embodiment, the temperature control unit 2 includes a thermostat, a temperature sensor, a cooling medium circulation system and a control circuit. The thermostat is used to receive data from the temperature sensor and compare the temperature, control the signal output, and the cooling medium is cooled by the cooling tower, and the water pump circulates through the pipeline to transfer heat to the fluorine oil. The control circuit adjusts the retention and temperature of the cooling medium according to the instructions of the thermostat to achieve precise temperature control.

[0036] In this embodiment, the lighting unit 3 includes two lighting lamps 31 connected to the top of the support stand 11 and a lighting switch 32 arranged on the support stand 11 and electrically connected to the lighting lamps 31. The two lighting lamps 31 are arranged outside the two opposite sides of the observation chamber 12 and both illuminate the observation chamber 12. The support table 121 is within the illumination range of the two lighting lamps 31, so that the integrated circuit a can be illuminated when it is placed on the support table 121 and the lighting lamps 31 are turned on, ensuring that there is enough light to observe the surface of the integrated circuit a. The lighting switch 32 controls the opening and closing of the lighting lamps 31. In another embodiment, the lighting unit 3 has more than four lighting lamps 31 and is arranged around the observation chamber 12 to illuminate the integrated circuit a from all directions.

[0037] In this embodiment, the magnifying detection unit 4 includes an adjustable supporting structure 41, an angle adjustment structure 42 arranged on a free end of the adjustable supporting structure 41, and a magnifying display device 43 connected to the angle adjustment structure 42. The adjustable supporting structure 41 is used to adjust the height and position of the magnifying display device 43 relative to the sample placement cavity to ensure that the magnifying display device 43 can be moved to the top or side of any position of the integrated circuit a, so as to more comprehensively detect various parts of the integrated circuit a and ensure the comprehensiveness and accuracy of the detection; the angle adjustment structure 42 is used to adjust the angle and height of the magnifying display device 43 relative to the sample placement cavity, and cooperate with the transparent observation chamber 12 to ensure that the magnifying display device 43 can always face the position where the electronic component needs to be detected and magnify and observe it after adjustment, so as to make the detection more accurate and comprehensive.

[0038] In the content defined in this embodiment, the adjustable support structure 41 includes a base 411, a first connecting arm 412, a first rotating member 413, a second connecting arm 414 and a second rotating member 415. The first end of the first connecting arm 412 is connected to the first rotating member 413, the second end of the first connecting arm 412 is connected to the second rotating member 415, the first end of the second connecting arm 414 is connected to the second rotating member 415, and the second end of the second connecting arm 414 is connected to the angle adjustment structure 42. The discharge unit 1 is within the range of movement of the second connecting arm 414. The first rotating member 413 enables the first connecting arm 412 to rotate freely relative to the base 411, and the second rotating member 415 is connected to the second rotating member 415. 15 enables the first connecting arm 412 and the second connecting arm 414 to rotate relative to each other. The first rotating member 413 and the second rotating member 415 are both universal joints. The end of the second connecting arm 414 away from the first connecting arm 412 can be adjusted in all directions through the first rotating member 413 and the second rotating member 415. The first rotating member 413 and the second rotating member 415 are both provided with a stopper for locking or unlocking the rotation of the first connecting arm 412 and the second connecting arm 414. The stopper can be a bolt. By tightening or loosening the bolts on the first connecting arm 412 and the second connecting arm 414 or the first connecting arm 412 and the base 411, they can rotate or be fixed. The first connecting arm 412 and the second connecting arm 414 are both made of aluminum alloy, and the surface is hard anodized with sulfuric acid.

[0039] In the content defined in this embodiment, the angle adjustment structure 42 includes an outer shell 421 connected to the adjustable support structure 41, an inner shell 422 arranged in the outer shell 421, a transmission part 423 arranged on the outer shell 421 and an angle adjustment part 424 arranged in the inner shell 422, the inner shell 422 is transmission-engaged with the transmission part 423, the magnified display device 43 is connected to the bottom of the angle adjustment part 424 in the inner shell 422 through a connecting rod 425, and the magnified display device 43 is located at a lower position on the outer side of the outer shell 421. The outer shell 421 provides support for the inner shell 422, the transmission part 423 and the angle adjustment part 424 so that they can be moved to any position above the sample placement cavity under the adjustment of the adjustable support structure 41. The inner shell 422 is used to support the angle adjustment part 424 and the magnifying display device 43. The transmission part 423 engages with the inner shell 422 to realize the movement of the inner shell 422 in the vertical direction after the inner shell 422 is rotated. The angle adjustment part 424 has two usage states. In the first usage state, rotating the angle adjustment part 424 can make the inner shell 422 cooperate with the transmission part 423 to adjust the height position of the inner shell 422. In the second usage state, after rotating the angle adjustment part 424, the inner shell 422 will not rotate but will only drive the magnifying display device 43 to rotate, so as to facilitate the height adjustment or angle adjustment of the magnifying display device 43 alone. In another embodiment, the angle adjustment structure 42 includes an outer shell 421 rotatably connected to the second connecting arm 414, an inner shell 422 arranged in the outer shell 421, a transmission part 423 arranged on the outer shell 421 and a third rotating member. The structures of the outer shell 421, the inner shell 422 and the transmission part 423 are consistent with the aforementioned structures. The third rotating member is a hinge seat and a bolt, and the angle adjustment of the outer shell 421 is achieved by the principle of bolt tightening.

[0040] In this embodiment, the housing 421 is fixedly connected to the second end of the second connecting arm 414. The interior of the housing 421 is hollow and has a rectangular parallelepiped structure. A square movable groove 4211 is provided on the front side wall of the housing 421. The movable groove 4211 is connected to the inner cavity of the housing 421 and its length direction is arranged along the height direction of the housing 421. In this embodiment, the height direction of the housing 421 is defined as the vertical direction. A swing opening 4212 is provided on the bottom side wall of the housing 421, which is connected to the inner cavity of the housing 421 and allows the magnifying and limiting device to swing. The two sides of the swing opening 4212 facing away from each other can be opened to the two side walls of the housing 421, so that the magnifying and displaying device 43 can swing to a sufficiently large angle.

[0041] In the content defined in this embodiment, the inner shell 422 can be a cubic or cylindrical structure, and is set to be a cubic shape in this embodiment. The line between the center points of the front and rear sides of the inner shell 422 is used as the axis of the inner shell 422. On both sides of one of the inner shells 422, cylindrical convex columns 4221 are convexly provided in the opposite direction, and the two convex columns 4221 are coaxial with the axis of the inner shell 422. There is a rotating cavity 4222 with a bottom opening in the inner shell 422. The rotating cavity 4222 is preferably a cylindrical cavity and is coaxial with the inner shell 422. The bottom opening of the inner shell 422 is arranged opposite to the swing opening 4212 in the vertical direction.

[0042] In the content defined in this embodiment, the transmission parts 423 are provided in two and are respectively provided on the front and rear sides of the inner shell 422, one of the transmission parts 423 is connected to the left and right inner walls of the outer shell 421, and the other transmission part 423 is connected to the left and right sides of the movable groove 4211. Both transmission parts 423 include a first rack 4231 fixedly connected to the outer shell 421 in the vertical direction and meshed with the gear 4233, a second rack 4232 slidably provided on the other side of the outer shell 421 in the vertical direction, and a gear 4233 coaxially connected to the outer side wall of the inner shell 422, and the gear 4233 is meshed with the first rack 4231 and the second rack 4232 respectively. Specifically, the first rack 4231 connected in the movable groove 4211 is directly connected to the side wall of the movable groove 4211, and the first rack 4231 connected to the inner wall of the shell 421 is connected to the first rack 4231 through a pad block, so that the two first racks 4231 are aligned in the front-to-back direction, and a slide rail is arranged in the vertical direction on the side of the movable groove 4211 opposite to the first rack 4231, and a pad is also arranged on the inner wall of the shell 421 opposite to the first rack 4231 of the shell 421, and a slide rail is arranged on the pad in the vertical direction, and the two slide rails are aligned in the front-to-back direction, and sliders 4234 are slidably arranged on the two slide rails, and the two second racks 4232 are shorter than the first rack 4231 and are respectively fixedly connected to the two sliders 4234, so that the two second racks 4232 can slide in the vertical direction. The two gears 4233 are respectively fixedly sleeved on the two convex columns 4221 and coaxially distributed. The opposite sides of the gear 4233 located at the front side are respectively meshed with the first rack 4231 and the second rack 4232 in the movable groove 4211, and the opposite sides of the gear 4233 located at the rear side are respectively meshed with the first rack 4231 and the second rack 4232 located in the inner cavity of the outer shell 421. The arrangement of the two transmission parts 423 can keep the inner shell 422 stable, so that the inner shell 422 can be kept stable in the vertical direction when the inner shell 422 is rotated. Since the friction resistance between the gear 4233 and the first rack 4231 and the second rack 4232 is large, when the inner shell 422 is no longer rotated, the meshing between the gear 4233, the first rack 4231 and the second rack 4232 can prevent the inner shell 422 from continuing to move to a certain extent. In order to further prevent slipping, the tooth grooves on the first rack 4231, the second rack 4232 and the gear 4233 can be knurled.

[0043] In the content defined in this embodiment, the angle adjustment part 424 includes a connecting shell 4241 coaxial with the gear 4233 and one side of which is rotatably connected to the inner wall of one side of the rotating chamber 422, a rotating rod 4242 with one end movably extending into the connecting shell 4241, and a meshing wheel 4243 fixedly connected to the inner shell 422. The connecting shell 4241 is a cylindrical structure and the rear side is rotatably connected to the inner shell 422 through a bearing fixedly connected to the inner wall of the rear side of the inner shell 422, and the bearing is arranged coaxially with the inner shell 422. The outer diameter of the connecting shell 4241 is smaller than the inner diameter of the inner cavity of the inner shell 422, so that the connecting shell 4241 can rotate relative to the inner shell 422. The connecting shell 4241 is hollow inside and the front side axially penetrates the front side of the connecting shell 4241. A through hole 4223 coaxial with the connecting shell 4241 is opened on the front side wall of the inner shell 422 along the axial direction, and the through hole 4223 penetrates the convex column 4221 located at the front side. The rotating rod 4242 is cylindrical, and one end of the rotating rod 4242 movably penetrates into the inner cavity of the connecting shell 4241 through the front side of the connecting shell 4241, and the other end of the rotating rod 4242 movably penetrates out of the outer shell 421 through the through hole 4223. A grip head 42421 having a diameter greater than that of the rotating rod 4242 is provided on the end of the rotating rod 4242 that penetrates out of the outer shell 421, and a flange is provided around the outer side of the grip head 42421 to facilitate gripping and rotating the grip head 42421. The meshing wheel 4243 is located on the open side of the inner shell 422 facing the connecting shell 4241 (i.e., on the inner wall of the front side of the inner shell 422) and is coaxially arranged with the connecting shell 4241. A secondary hole having the same diameter as the through hole 4223 and greater than the diameter of the rotating rod 4242 is formed on the meshing wheel 4243, and the rotating rod 4242 also movably passes through the secondary hole. A tooth-shaped meshing groove 42431 is sequentially arranged around the outer side of the meshing wheel 4243, and each meshing groove 42431 is distributed in a circular array and arranged adjacent to each other in sequence. A cylindrical connecting plate 4244 coaxial with the rotating rod 4242 is fixedly connected to one end of the rotating rod 4242 extending into the inner cavity of the connecting shell 4241, and the diameter of the connecting plate 4244 is smaller than the inner diameter of the connecting shell 4241, so that the connecting plate 4244 can move freely in the connecting shell 4241. A conical rod 4245 with a conical end is formed at a position corresponding to any meshing groove 42431 on the connecting plate 4244, extending along the axial direction of the rotating rod 4242 toward the front side, and the conical end of the conical rod 4245 is convenient for inserting into the meshing groove 42431. A guide rod 4246 is fixedly provided in the connection shell 4241 and slides through the connection plate 4244 along its axial direction. At least two guide rods 4246 are provided and distributed on the rear inner wall of the connection shell 4241 in a ring array.A spring 4247 is sleeved on each guide rod 4246 and is pressed against the connecting plate 4244 toward the meshing wheel 4243. When the rotating rod 4242 is not subjected to force, the entire angle adjustment structure 42 is in the first use state. In this state, the spring 4247 presses against the connecting plate 4244 toward the front side, so that the tapered end of the tapered rod 4245 of the connecting plate 4244 can penetrate into any meshing groove 42431, thereby limiting the rotation of the connecting plate 4244 relative to the meshing wheel 4243. When the rotating rod 4242 is pressed toward the side of the connecting shell 4241, the connecting plate 4244 is The plate 4244 squeezes the spring 4247 to shrink the spring 4247, and the guide rod 4246 guides the connecting plate 4244 so that the connecting plate 4244 and the rotating rod 4242 only move along the axial direction of the connecting shell 4241. When the connecting plate 4244 cannot continue to move backward, the conical end is separated from the meshing groove 42431. At this time, the connecting plate 4244 is no longer restricted by the meshing wheel 4243. At this time, the angle adjustment structure 42 is in the second use state. Due to the setting of the guide rod 4246, when the rotating rod 4242 is rotated, the connecting shell 4241 will rotate synchronously. It should be noted that the guide rod 4246 is always slidably arranged on the connecting plate 4244 along the axial direction of the connecting shell 4241 to ensure the guidance of the connecting plate 4244. Among them, the connecting shell 4241 is set corresponding to the bottom opening of the inner shell 422 and the swing opening 4212, one end of the connecting rod 425 passes through the swing opening 4212 and the bottom opening of the inner shell 422 and is fixedly connected to the bottom of the connecting shell 4241, and the other end of the connection is fixedly connected to the side wall of the magnifying display device 43, and the width of the connecting rod 425 is smaller than the width of the swing opening 4212.

[0044] In the content defined in this embodiment, the magnifying display device 43 is a microscope lens with a magnification of 10 to 100 times to ensure that the location of the leak point can be clearly observed, combined with the adjustable support mechanism 41 and the angle adjustment structure 42 to achieve high resolution or minimum resolution.

[0045] The method for locating high-resolution microscopic leakage points of integrated circuits of the present invention comprises the following steps:

[0046] (1) Start the lighting switch 32 and the heating switch 21 to heat the fluorine oil and keep it at 125°C;

[0047] (2) Open the cover, use a tool to slowly place the integrated circuit a onto the support table 121 of the observation chamber 12 so that all the electrical components to be inspected are immersed in the fluorine oil, and the immersion time does not exceed 20 minutes;

[0048] (3) Use the adjustable support structure 41 to adjust the magnifying display device 43 to the position just above the support table 121 and then use the limiter to lock it. Use the angle adjustment structure 42 to adjust the angle and height of the magnifying display device 43 so that the distance between the magnifying display device 43 and the integrated circuit a is 70 mm to 130 mm. Adjust the magnification factor within the magnification factor range according to the actual situation to obtain a clear field of view. After waiting for 1 to 5 minutes, observe and find out whether there is a leak. For the part with bubbles, adjust the focal length of the magnifying display device 43 to find out the leak.

[0049] (4) After the detection is completed, turn off the lighting switch 32 and the heating switch 21, and take out the integrated circuit a.

[0050] In step (1), the control accuracy of the heating setting temperature in the heating state reaches ±0.5° C., and the stabilization time exceeds 1 minute, and the lighting switch 32 provides lighting for the observation chamber 12 .

[0051] In step (2), the cover plate 122 is placed on the observation chamber 12 during the leakage detection process, and the integrated circuit a fails in the detailed inspection and the leakage rate is greater than 1*10~5mbar.L / s, or it is a leakage circuit in the rough inspection; the sealing judgment is performed during the first inspection, and the time from the circuit to the most recent failure is no more than 20 minutes.

[0052] In step (3), firstly, the position of the magnifying display device 43 relative to the sample placement cavity is adjusted by the stopper, and after the spacing and position are appropriate, it is locked by the stopper, and then the rotating rod 4242 is pressed to make the rotating rod 4242 be located in the second use state, and after the rotating rod 4242 is rotated to adjust the magnifying display device 43 to a suitable angle, the rotating rod 4242 is released, and the rotating rod 4242 is reset under the rebound of the spring 4247, and the tapered end of the tapered rod 4245 is inserted into the opposite meshing groove 42431, so that it is located in the first use state; then the placement cavity can be adjusted. If the magnification and focal length of the large display device 43 are not suitable in height or not clear enough, the distance between the magnifying display device 43 and the integrated circuit a is adjusted by rotating the rotating rod 4242 until the local part of the integrated circuit to be analyzed is observed clearly enough to perform leakage detection. In this way, the position and height of the magnifying display device 43 can be controlled more accurately to ensure sufficient clarity and resolution during leakage detection, to ensure that the location where the bubbles are generated can be accurately found, to improve the accuracy and flexibility of leakage detection, to shorten the leakage detection time, to find the leakage point in the fastest time, and to complete the manual leakage detection work. When checking for leaks, wait for 1 to 5 minutes, observe and analyze the bubbles generated by the integrated circuit a, and obtain the approximate position. Then adjust the focal length of the microscope so that the location where the bubbles are generated can be clearly seen. In order to observe the location of the bubbles from different magnifications, the magnification of the microscope can be adjusted and focused again until the bubbles are focused, so as to more accurately determine the microscopic leakage point of the bubbles. It should be noted that it is necessary to ensure that the bubbles and leaks are clearly visible after adjustment, and the adjustment time of the magnifying display device 43 should be controlled and should not exceed the prescribed time range. During use, it can be determined whether to cover the cover 122 on the observation chamber 12 as needed.

[0053] Compared with the prior art, the integrated circuit high-resolution microscopic leakage point positioning device and the positioning method of the present invention have the following advantages: the determined microscopic leakage point can provide evidence support for front-line technicians, thereby providing important help for technicians to quickly determine the cause of the leakage, and the method can determine the leakage point within 2 minutes at the fastest, which can minimize the analysis time of technicians, effectively shorten the implementation time of improvement measures, and improve the continuity and reliability of the overall production; the fluorine oil can be heated and temperature controlled, and light can be irradiated; the integrated circuit a with a rough inspection sealing defect is placed in a fluorine oil container at a certain temperature (125 degrees), which can generate a series of bubbles, and the approximate position of the leakage point can be visually observed through the area where the fluorine oil bubbles are generated; the leakage point position of the integrated circuit a with sealing defects can be observed with the naked eye through the observation chamber 12; a microscope with multi-angle adjustment is designed outside the observation chamber 12, and the leakage point position can be magnified and observed by the microscope, and the maximum magnification can reach 100 times, so that the position of the fluorine oil bubble can be accurately located, and the maximum accuracy can reach 10um. According to the positioning position, the leakage point position is determined, thereby providing technical support for the reliability of integrated circuit sealing.

Claims

1. An integrated circuit high-resolution microscopic leak location device, characterized in that: include: A material discharging unit, wherein a sample placement cavity is formed on the material discharging unit, and fluorine oil is filled in the sample placement cavity; The temperature control unit is arranged on the discharge unit and is used for heating and constant temperature control of the fluorine oil; An illumination unit, disposed on the discharging unit and used to provide illumination to the sample placement cavity; and A magnification detection unit, the magnification detection unit includes an adjustable support structure, an angle adjustment structure arranged on a free end of the adjustable support structure, and a magnification display device connected to the angle adjustment structure, the adjustable support structure is used to adjust the position of the magnification display device relative to the sample placement cavity, the angle adjustment structure is used to adjust the angle and height of the magnification display device relative to the sample placement cavity, and the magnification display device has a magnification factor of 10 to 100.

2. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 1, characterized in that: The adjustable supporting structure includes a base, a first connecting arm whose first end is rotatably connected to the base via a first rotating member, and a second connecting arm whose first end is rotatably connected to the second end of the first connecting arm via a second rotating member. The discharge unit is within the movable range of the second connecting arm, and limit members for locking or unlocking the rotation of the first connecting arm and the second connecting arm are provided on the first rotating member and the second rotating member.

3. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 1 or 2, characterized in that: The angle adjustment structure includes an outer shell connected to an adjustable support structure, an inner shell arranged in the outer shell, and a transmission part arranged on the outer shell. The inner shell is transmission-engaged with the transmission part so that the inner shell moves in a vertical direction by rotation. The magnified display device is installed at the bottom of the inner shell.

4. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 3, characterized in that: The transmission parts are provided in two and are respectively arranged on both sides of the inner shell, and the two transmission parts each include a first rack fixedly connected to the outer shell in the vertical direction and meshed with the gear, a second rack slidably arranged on the other side of the outer shell in the vertical direction, and a gear coaxially connected to the outer side wall of the inner shell, and the gears are respectively meshed with the first rack and the second rack.

5. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 3 or 4, characterized in that: The inner shell is provided with a rotation cavity with a bottom opening, and the angle adjustment structure further comprises an angle adjustment portion arranged in the rotation cavity; The cam is an angular channel formed between a pair of camming teeth and a pair of camming teeth which are linked together by a toothed box, the cam being arranged on a circle with the toothed end of the cam being oriented to the toothed box.

6. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 1, characterized in that: The discharge unit includes a support frame and an observation chamber arranged on the top of the support frame. The observation chamber protrudes from the top of the support frame and is made of high-transparency tempered glass. The sample prevention cavity is formed in the observation chamber and has a support table for placing integrated circuits.

7. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 6, characterized in that: The top of the observation chamber is open and covered with a cover plate made of a transparent high-temperature resistant material.

8. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 6, characterized in that: The temperature control unit includes a heating module arranged on a support frame to heat the fluorine oil in the observation chamber, a heating switch electrically connected to the heating module, and a temperature control module arranged on the support frame and used to detect and control the temperature of the fluorine oil in the observation chamber, and the temperature control module is electrically connected to the heating module and the heating switch respectively.

9. The high-resolution microscopic leak location device for integrated circuits as claimed in claim 6, characterized in that: The lighting unit includes two lighting lamps connected to the top of the support frame and a lighting switch arranged on the support frame and electrically connected to the lighting lamps. The two lighting lamps are arranged on two opposite sides of the observation warehouse and both emit light toward one side of the observation warehouse. The support table is within the illumination range of the two lighting lamps.

10. A method for locating high-resolution microscopic leaks in an integrated circuit using the high-resolution microscopic leak location device in an integrated circuit as claimed in any one of claims 1 to 9, characterized in that: The steps include: (1) Turn on the lighting switch and heating switch to heat the fluorine oil and keep it at 125°C; (2) Open the cover and use a tool to slowly place the integrated circuit on the support table of the observation chamber so that all the electrical components to be inspected are immersed in the fluorine oil. The immersion time shall not exceed 20 minutes; (3) Use the adjustable support structure to adjust the magnifying display device to the top of the support table and then lock it with the limiter. Use the angle adjustment structure to adjust the angle and height of the magnifying display device so that the distance between the magnifying display device and the integrated circuit is 70 mm to 130 mm. Adjust the magnification to obtain a clear field of view. After waiting for 1 to 5 minutes, observe and find out whether there is a leak. For the part with bubbles, adjust the focal length of the magnifying display device to find out the leak. (4) After the test is completed, turn off the lighting switch and the heating switch and remove the integrated circuit.

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