Electron beam control device and method and scanning electron microscope

Abstract

The invention discloses an electron beam control device and method, and a scanning electron microscope, and the device comprises a diaphragm piece which is provided with a plurality of diaphragm holes which are disposed at intervals, and the aperture sizes of the diaphragm holes are different; the worm gear assembly comprises a worm gear and a worm matched with the worm gear, and the diaphragm piece is placed on the upper surface of the worm gear; the first driving device is connected with the worm gear and drives the worm gear to advance or retreat in the first direction, and the first direction is parallel to the extending direction of the worm; and the second driving device is connected with the worm and drives the worm to rotate, so that the worm gear drives the diaphragm piece to rotate. According to the scheme, the worm gear is driven to move through the first driving device, so that the electron beam is aligned with the diaphragm piece, then the worm is driven to rotate through the second driving device, the worm gear is further driven to rotate, and the diaphragm hole meeting imaging and analysis conditions can be quickly positioned. The scheme is simple to operate and high in efficiency.

Description

Technical Field

[0001] The present application generally relates to the field of scanning electron microscope technology. More specifically, the present application relates to an electron beam control device. Further, the present application also relates to an electron beam control method. Further, the present application also relates to a scanning electron microscope. Background Art

[0002] With the rapid development of semiconductor technology, electron beam inspection technology is widely used in wafer inspection equipment on the market. This technology uses the high-resolution characteristics of electron beams to accurately identify microscopic defects on wafers. In order to achieve high-definition imaging in electron beam inspection, it is necessary to set an aperture device between the electron beam source and the wafer to be inspected to screen the electron beam. In other words, the aperture device only allows the most concentrated and finest part of the electron beam to pass through, while intercepting other peripheral electron beams. This can reduce the scattering and diffraction of the electron beam, thereby improving the resolution and accuracy of the inspection.

[0003] In the field of scanning electron microscopy, the use of multi-aperture diaphragms plays a vital role in optimizing imaging effects. At present, the existing technologies are mainly divided into mechanical linear and variable optical axis solutions. In the mechanical linear multi-aperture diaphragm solution, the position of the diaphragm is usually adjusted by linear movement to achieve the selection of different apertures. However, this method is relatively complicated in operation, and it is difficult to accurately match the aperture hole. In practical applications, it may be necessary to make multiple adjustments to find the right aperture, which not only wastes time, but also may affect the efficiency and accuracy of the experiment. Although the multi-aperture diaphragm solution with variable optical axis has improved flexibility to a certain extent, it also has some problems. For example, its structure is relatively complex, the manufacturing cost is high, and it has high requirements for operating technology in actual use. At the same time, due to the variability of its optical axis, the stability of the imaging may be affected to a certain extent. The variable optical axis solution has high requirements for the stability of the environment, and even slight vibrations or temperature changes may have adverse effects on the imaging effect.

[0004] In view of this, there is an urgent need to provide an electron beam control device and method, and a scanning electron microscope, so as to improve the convenience of operation and the accuracy of matching the aperture, thereby improving the efficiency of operation. Summary of the invention

[0005] In order to at least solve the technical problems mentioned above, the present application proposes an electron beam control device and method, and a scanning electron microscope solution.

[0006] In a first aspect, an electron beam control device is provided, comprising: an aperture member having a plurality of aperture holes arranged at intervals, wherein the aperture sizes of the aperture holes are different; a worm gear assembly comprising a worm gear and a worm matched with the worm gear, the aperture member being placed on the upper surface of the worm gear; a first driving device connected to the worm gear and driving the worm gear to move forward or backward in a first direction, wherein the first direction is parallel to an extension direction of the worm gear; and a second driving device connected to the worm gear and driving the worm gear to rotate, so that the worm gear drives the aperture member to rotate.

[0007] In some embodiments, the electron beam control device further includes a bellows assembly, the bellows assembly including: a bellows having a hollow cavity inside; a first end plate fixedly connected to a first end of the bellows, a first drive shaft on the first drive device and a second drive shaft on the second drive device passing through the first end plate and extending into the bellows; A second end plate, which is fixedly connected to the second end of the bellows, and a second drive shaft passes through the second end plate and is connected to the worm gear; an extended end of the first drive shaft is connected to the inner surface of the second end plate, wherein the inner surface of the second end plate is configured toward the first end plate; and an aperture rod, which is fixedly connected to the outer surface of the second end plate, and the worm gear is mounted on the aperture rod.

[0008] In some embodiments, the aperture rod has a support shaft rotatably connected thereto, and one end of the support shaft away from the aperture rod is fixedly connected to the worm gear, wherein the worm gear is spaced apart from the aperture rod.

[0009] In some embodiments, a sealing assembly is further connected to the outer surface of the second end plate, the sealing assembly has a through hole, and the central axis of the through hole coincides with the central axis of the through hole on the second end plate.

[0010] In some embodiments, the sealing assembly includes a fixing portion, a first diameter section, a diameter-reducing section, and a second diameter section, which are connected in sequence and have outer diameters that decrease in sequence.

[0011] In some embodiments, the aperture member is also covered with an aperture cap, and the aperture cap includes: a groove structure, which includes a circular top wall and a sleeve, one end of the sleeve is connected to the top wall, and the top wall has a circular light-transmitting hole; an extension portion, the extension portion is connected to the other end of the sleeve, and is extended away from the sleeve along the radial direction of the sleeve.

[0012] In some embodiments, the upper surface of the worm wheel has a first groove for limiting the aperture member, and a second groove is arranged on the periphery of the first groove for limiting the extension portion on the aperture cap, and the second groove is annular.

[0013] In some embodiments, the electron beam control device also includes a connecting piece that cooperates with the scanning electron microscope, and the connecting piece has a through hole in the middle; the end face of the connecting piece close to the bellows assembly includes a first sealing surface and a second sealing surface, and there is an annular limiting groove extending away from the bellows assembly between the first sealing surface and the second sealing surface; the first sealing surface is fixedly connected to the outer surface of the first end plate away from the second end plate, the second sealing surface abuts against the shell on the scanning electron microscope, and the annular limiting groove is clamped with the limiting piece on the scanning electron microscope.

[0014] In the second aspect, an electron beam control method is provided, using the above-mentioned electron beam control device, the method comprising: operating a first driving device to drive the worm wheel to move forward or backward in a first direction, so that the aperture member on the worm wheel is aligned with the electron beam; operating a second driving device to drive the worm to rotate, so that the worm wheel drives the aperture member to rotate, and drives the aperture member to rotate by a predetermined angle.

[0015] In a third aspect, the present application provides a scanning electron microscope, which includes the above-mentioned electron beam control device.

[0016] Through the electron beam control device provided above, the embodiment of the present application drives the worm wheel forward or backward in the first direction through the first drive device, thereby being able to accurately adjust the position of the aperture member to ensure that the aperture member on the worm wheel is aligned with the electron beam. The second drive device drives the worm to rotate, so that the worm wheel drives the aperture member to rotate, thereby being able to quickly locate the aperture hole that meets the imaging and analysis conditions. This solution is easy to operate and has high precision. Furthermore, in some embodiments, an aperture cap is also installed on the aperture member, which helps to reduce the scattering and reflection of the electron beam when passing through the aperture member, thereby improving the concentration of the electron beam and the clarity of the imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By reading the detailed description below with reference to the accompanying drawings, the above and other purposes, features and advantages of the exemplary embodiments of the present application will become easy to understand. In the accompanying drawings, several embodiments of the present application are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein: Figure 1 A schematic diagram of the structure of an electron beam control device according to an embodiment of the present application is shown; Figure 2 A schematic structural diagram of the electron beam control device according to another embodiment of the present application is shown; Figure 3 A cross-sectional view of the electron beam control device according to an embodiment of the present application in the horizontal direction is shown; Figure 4A schematic diagram showing the structure of a worm gear of an electron beam control device according to an embodiment of the present application is shown; Figure 5 A schematic diagram showing the structure of an aperture cap of an electron beam control device according to an embodiment of the present application is shown; Figure 6 A schematic diagram of the structure of an aperture member of an electron beam control device according to an embodiment of the present application is shown.

[0018] In the figure: 100, electron beam control device; Aperture member; 102, aperture cap; 103, worm gear assembly; 104, first drive device; 105, second drive device; 106, bellows assembly; 107, sealing assembly; 108, connector; 109, first mounting plate; 110, second mounting plate; 111, protective cover; 1011, aperture hole; 1021, mounting hole; 1022, top wall; 1023, sleeve; 1024, light transmission hole; 1025, extension; 1031, worm gear; 1032, worm; 1033, first groove; 1034, second groove ; 1041, first motor; 1042, first coupling; 1043, first drive shaft; 1051, second motor; 1052, second coupling; 1053, second drive shaft; 1061, bellows; 1062, first end plate; 1063, second end plate; 1064, aperture rod; 1065, support shaft; 1071, fixing portion; 1072, first diameter section; 1073, reducing section; 1074, second diameter section; 1081, first sealing surface; 1082, second sealing surface; 1083, annular limit groove. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0020] It should be understood that the terms "include" and "comprising" used in the specification and claims of the present application indicate the presence of described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or collections thereof.

[0021] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in this application specification and claims, unless the context clearly indicates otherwise, the singular forms of "a", "an" and "the" are intended to include plural forms. It should also be further understood that the term "and / or" used in this application specification and claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0022] As used in this specification and claims, the term "if" can be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrases "if it is determined" or "if [described condition or event] is detected" can be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0023] The specific implementation of the present application is described in detail below with reference to the accompanying drawings.

[0024] like Figure 1-Figure 3 As shown, the present application provides an electron beam control device 100, which includes: an aperture member 101, the aperture member 101 has a plurality of aperture holes 1011 arranged at intervals, wherein the aperture sizes of the aperture holes 1011 are different; a worm gear assembly 103, which includes a worm wheel 1031 and a worm 1032 adapted to the worm wheel 1031, and the aperture member 101 is placed on the upper surface of the worm wheel 1031; a first driving device 104, which is connected to the worm wheel 1031 and drives the worm wheel 1031 to move forward or backward in a first direction, wherein the first direction is parallel to the extension direction of the worm 1032; and a second driving device 105, which is connected to the worm 1032 and drives the worm 1032 to rotate, so that the worm wheel 1031 drives the aperture member 101 to rotate.

[0025] The electron beam control device 100 in this embodiment includes an aperture member 101, a worm gear assembly 103, a first driving device 104 and a second driving device 105. Figure 6As shown, specifically, the aperture member 101 is a cylindrical structure with a preset thickness, and a circle of aperture holes 1011 of different sizes are evenly distributed on its end face, and the centers of each aperture hole 1011 are located on the same circumference. Such a design not only provides aperture holes of various apertures to adapt to different imaging and analysis conditions. Moreover, through scientific calculation and reasonable layout, the spacing and distribution between each aperture hole can meet the imaging requirements under a variety of different experimental conditions. Compared with the traditional square or other shapes, the circular aperture member 101 in this scheme exhibits better mechanical stability and uniformity during rotation, and can effectively reduce the positional deviation that may be caused by irregular shape. In addition, the circular porous aperture member 101 has a low cost and relatively low processing difficulty during the processing process, which not only reduces the production cost, but also improves the processing efficiency and precision, making the circular aperture an economical and efficient solution.

[0026] The worm gear assembly 103 in this solution includes a worm wheel 1031 and a worm 1032 adapted to the worm wheel 1031, and the aperture member 101 is fixed on the upper surface of the worm wheel. The first driving device 104 is connected to the worm wheel 1031, driving the worm wheel 1031 to move forward or backward along a first direction, wherein the first direction is parallel to the extension direction of the worm 1032. This linear motion setting allows the aperture member 101 to be accurately adjusted in a direction parallel to the worm 1032. In addition, the second driving device 105 is directly connected to the worm 1032, and its main function is to drive the worm 1032 to rotate. When the worm 1032 rotates, through the meshing action between the worm wheel and the worm, it can drive the worm wheel 1031 to rotate, thereby realizing the rotation of the aperture member 101, and driving the aperture member to rotate a predetermined angle.

[0027] When in use, the first drive device 104 is controlled to drive the worm gear to move forward or backward along the first direction parallel to the extension direction of the worm 1032. During this process, the image on the scanning electron microscope is closely observed. As the aperture rod moves, the image will show obvious changes in light and dark, and these changes are direct feedback of the aperture member 101 aligning the electron beam. At the beginning of the operation, the aperture hole 1011 on the aperture member 101 is not completely aligned with the path of the electron beam. At this time, the electron beam may not be able to pass through the aperture hole smoothly, resulting in a darker image of the scanning electron microscope. When the operator controls the first drive device 104 to make the worm gear 1031 drive the aperture member 101 to move in the direction of the electron beam, the aperture hole 1011 begins to align with the path of the electron beam. As the alignment improves, more electron beams can pass through the aperture hole, and the image will change from dark to bright. At this time, it indicates that the aperture member 101 has been accurately aligned with the electron beam, and the operator can control the first drive device 104 to stop moving.

[0028] Then, the operator controls the second driving device 105 to rotate the worm 1032. The rotation of the worm 1032 drives the worm wheel to rotate through the gear meshing mechanism, thereby driving the aperture member 101 to rotate and quickly locate the aperture hole 1011 matching the imaging and analysis conditions.

[0029] It is understood by those skilled in the art that, in the application of the electron beam control device, the size of the aperture 1011 has an important influence on the adaptability of the imaging and analysis conditions. Each aperture 1011 of different sizes is designed to meet specific imaging and analysis requirements. Therefore, in actual use, the operator can select and align the corresponding aperture 1011 by rotating the aperture member 101 according to the required imaging and analysis conditions.

[0030] Specifically, the operator needs to determine the size and characteristics of the required aperture 1011 according to the imaging and analysis objectives. Then, through precise calculation, the angle and position of the aperture member 101 that needs to be rotated are determined so as to align the required aperture 1011 with the path of the electron beam. The operator uses the second drive device 105 of the electron beam control device to precisely control the rotation of the worm 1032, thereby driving the worm wheel to rotate, driving the aperture member 101 to rotate a predetermined angle, so that the electron beam is set correspondingly to the aperture 1011 that matches the imaging and analysis conditions.

[0031] Furthermore, if the operator is initially unsure of which size of aperture hole 1011 is most suitable for the current imaging and analysis conditions, the operator can try different aperture holes 1011 one by one by gradually rotating the aperture member 101. During the rotation process, by observing the changes in the image of the scanning electron microscope, the operator can identify the aperture hole 1011 that best matches the current conditions. When the image quality reaches the best state, it indicates that the appropriate aperture hole 1011 has been found.

[0032] The solution provided by the present application is that the first driving device 104 drives the worm wheel 1031 to make a linear motion, so that the aperture member 101 is aligned with the electron beam. Compared with other solutions, this solution is not only easy to operate, but also can improve efficiency and accuracy. In addition, due to the precise matching of the worm wheel 1031 and the worm 1032, not only can the aperture member 101 on the worm wheel not shake or get stuck during rotation, ensuring the accuracy and stability of the operation of matching the aperture hole, but also can achieve high-precision control of the rotation angle. That is, whether it is fine-tuning a small angle to meet delicate needs, or performing a rapid large-angle rotation to improve operational efficiency, the mechanism can ensure that the aperture is accurately positioned at the target aperture position. This high-precision motion control technology greatly improves the matching efficiency and accuracy, making the entire operation process more reliable and efficient.

[0033] In the above solution, in order to better fix the first driving device 104 and the second driving device 105, a mounting plate is specially provided, wherein the mounting plate includes a first mounting plate 109 and a second mounting plate 110 connected to each other. Specifically, the first mounting plate 109 is arranged horizontally, the second mounting plate 110 is arranged vertically to the first mounting plate 109, and a through hole is arranged in the middle of the second mounting plate 110.

[0034] like Figure 3 As shown in the horizontal cross-sectional view of the control device, the first driving device 104 in this solution is arranged on the first mounting plate 109, and includes a first motor 1041, a first shaft coupling 1042 and a first driving shaft 1043 connected in sequence, and the first driving shaft 1043 passes through the through hole on the second mounting plate 110 and is connected to the worm gear 1031. The second driving device 105 is also arranged on the first mounting plate 109, and includes a second motor 1051, a second shaft coupling 1052 and a second driving shaft 1053 connected in sequence, and the second driving shaft 1053 passes through the through hole on the second mounting plate 110 and is connected to the worm 1032.

[0035] like Figure 1 As shown, in this solution, in order to improve the safety and stability of the first driving device 104 and the second driving device 105, a protective cover 111 is specially provided on the mounting plate, and the protective cover is respectively in contact with the first mounting plate 109 and the second mounting plate 110 to form a receiving chamber. The protective cover 111 can prevent the intrusion of dust, liquid and other pollutants, and prevent these pollutants from interfering with the normal operation of the driving device.

[0036] In addition, the protective cover 111 also provides an important safety protection function. It can prevent the operator from accidentally contacting the moving parts during operation, thereby significantly reducing the risk of injury. This design not only ensures the safety of the operator, but also makes the electron beam control device 100 more suitable for use in various environments, including those application scenarios with high requirements for cleanliness and safety.

[0037] like Figure 2 and Figure 3As shown, in a specific embodiment, the electron beam control device 100 further includes a bellows assembly 106, and the bellows assembly 106 includes: a bellows 1061 having a hollow cavity inside; a first end plate 1062 fixedly connected to a first end of the bellows 1061, a first drive shaft 1043 on the first drive device 104 and a second drive shaft 1053 on the second drive device 105 pass through the first end plate 1062 and extend into the bellows 1061; a second An end plate 1063, which is fixedly connected to the second end of the bellows 1061, and a second drive shaft 1053 passes through the second end plate 1063 and is connected to the worm 1032; an extended end of the first drive shaft 1043 is connected to the inner surface of the second end plate 1063, wherein the inner surface of the second end plate 1063 is configured toward the first end plate 1062; and an aperture rod 1064, which is fixedly connected to the outer surface of the second end plate 1063, and the worm gear 1031 is mounted on the aperture rod 1064.

[0038] The electron beam control device 100 provided in the present solution also includes a bellows assembly 106. Specifically, the bellows assembly 106 includes a bellows 1061, a first end plate 1062 and a second end plate 1063 respectively arranged at both ends of the bellows 1061, and an aperture rod 1064 arranged on the second end plate 1063. More specifically, the bellows 1061 is a tubular member with a preset extension length, and has a hollow cavity inside. The bellows 1061 can be extended and retracted in the length direction. One end of the bellows 1061 in the length direction is fixedly connected to the first end plate 1062, and the first end plate 1062 is provided with two through holes, which are respectively provided for the first drive shaft 1043 of the first drive device 104 and the second drive shaft 1053 of the second drive device 105 to pass through, and extend into the bellows 1061. The through holes play a role in ensuring the stable guidance and protection of the drive shafts.

[0039] The other end of the bellows 1061 in the length direction is fixedly connected to the second end plate 1063, and a through hole is provided on the second end plate 1063 for the second drive shaft 1053 to pass through and connect with the worm 1032 to achieve power transmission. The extended end of the first drive shaft 1043 is connected to the inner surface of the second end plate 1063, wherein the inner surface of the second end plate 1063 refers to the side surface facing the first end plate 1062. In other words, the extended end of the first drive shaft 1043 in this solution is located inside the bellows 1061 and connected to the second end plate 1063, while the extended end of the second drive shaft 1053 passes through the bellows 1061 and is connected to the worm 1032.

[0040] In addition, the bellows assembly 106 also includes an aperture rod 1064, which is fixedly connected to the outer surface of the second end plate 1063 and has a worm gear 1031 mounted thereon. When the first motor 1041 is working, the first drive shaft 1043 applies a force to the bellows 1061, causing the bellows 1061 to expand and contract. This expansion and contraction movement is transmitted to the aperture rod 1064 through the second end plate 1063, causing the aperture rod 1064 to move forward or backward accordingly. Such a design allows the bellows assembly 106 to protect the internal drive shaft while controlling the position of the aperture rod 1064 through the expansion and contraction movement of the first drive shaft 1043, thereby accurately adjusting the position of the worm gear 1031 and achieving accurate control of the aperture member 101.

[0041] It will be appreciated by those skilled in the art that in the above solution, two through holes are designed on the first end plate 1062, and the size of each through hole is precisely designed to fit the diameter of the corresponding drive shaft, ensuring that the first drive shaft 1043 and the second drive shaft 1053 can pass through smoothly and extend into the interior of the bellows 1061. In other embodiments, the first end plate 1062 may be designed as an annular member with a large cylindrical through hole in the middle. This design allows the large through hole to accommodate the first drive shaft 1043 and the second drive shaft 1053 at the same time, providing a more space-efficient solution. Such a design not only simplifies the structure of the first end plate 1062, but also may reduce the complexity and cost of the manufacturing process, while ensuring the smooth passage of the drive shaft and the functional realization of the device.

[0042] Combination Figure 1 and Figure 4 As shown, in a specific embodiment, the aperture rod 1064 has a support shaft 1065 rotatably connected thereto, and one end of the support shaft 1065 away from the aperture rod 1064 is fixedly connected to the worm gear 1031, wherein the worm gear 1031 is spaced apart from the aperture rod.

[0043] In this solution, a support shaft 1065 is mounted on the aperture rod 1064, and the support shaft 1065 is rotatably connected to the aperture rod 1064 to provide a stable support point. The other end of the support shaft 1065, that is, the end away from the aperture rod 1064, is fixedly connected to the worm gear 1031 to ensure the stability and accuracy of the worm gear 1031 during operation. In addition, the worm gear 1031 and the support shaft 1065 in this solution are connected through the support shaft 1065. This arrangement enables the worm gear 1031 to rotate freely on the support shaft 1065 while maintaining an appropriate distance to reduce friction and wear with the aperture rod 1064, thereby improving the operating efficiency and life of the entire device.

[0044] It is worth noting that the aperture rod 1064 in this embodiment has an upper bearing surface and a lower bearing surface which are parallel and arranged at the end away from the connection with the second end plate 1063 . The upper bearing surface and the lower bearing surface are arranged to facilitate the installation of the support shaft 1065 .

[0045] like Figure 2 As shown, in a specific embodiment, the electron beam control device 100 also includes a connector 108 that cooperates with the scanning electron microscope, and the middle of the connector 108 has a through hole; the end face of the connector 108 close to the bellows assembly 106 includes a first sealing surface 1081 and a second sealing surface 1082, and there is an annular limiting groove 1083 extending away from the bellows assembly 106 between the first sealing surface 1081 and the second sealing surface 1082; the first sealing surface 1081 is fixedly connected to the outer surface of the first end plate 1062 away from the second end plate 1063, the second sealing surface 1082 abuts against the shell on the scanning electron microscope, and the annular limiting groove 1083 is clamped with the limiting member on the scanning electron microscope.

[0046] In this solution, in order to enable the electron beam control device 100 and the scanning electron microscope to be connected to form a sealed cavity. To this end, this device is specially designed and integrated with a connector 108. The core function of this connector 108 is to establish a sealed interface between the two devices, so as to ensure the sealing effect during the use of the connector. Specifically, the connector 108 is a cylindrical structure with a preset thickness, in which a through hole is provided, and the through hole is coaxially arranged with the through hole on the second mounting plate 110. In addition, one end face of the connector 108 is fixedly connected to the second mounting plate 110, and two sealing surfaces are provided on the other end face, namely a first sealing surface 1081 and a second sealing surface 1082. Between the first sealing surface 1081 and the second sealing surface 1082, an annular limit groove 1083 is designed, and the annular limit groove 1083 extends in a direction away from the bellows assembly 106. Such a design allows the connector 108 to fit tightly with the housing of the scanning electron microscope during installation.

[0047] More specifically, the first sealing surface 1081 is fixedly connected to the outer surface of the first end plate 1062, wherein the outer surface of the first end plate 1062 refers to the surface away from the second end plate 1063. The second sealing surface 1082 directly abuts against the housing of the scanning electron microscope to form a sealed cavity.

[0048] In addition, the annular limiting groove 1083 on the connecting member 108 is engaged with the limiting member on the scanning electron microscope, and this design not only ensures the correct positioning of the connecting member 108, but also enhances the stability of the device. Through this precise matching, the connecting member 108 plays a key role in connecting and protecting the electron beam control device 100 and the scanning electron microscope, ensuring the efficient operation and long-term stability of the electron beam control device 100.

[0049] like Figure 1 and Figure 2 As shown, in a specific embodiment, a sealing assembly 107 is also connected to the outer surface of the second end plate 1063 , and the sealing assembly 107 has a through hole, and the central axis of the through hole coincides with the central axis of the through hole on the second end plate 1063 .

[0050] The sealing assembly 107 includes a fixing portion 1071 , a first diameter section 1072 , a diameter-reducing section 1073 , and a second diameter section 1074 , which are connected in sequence and have outer diameters that decrease in sequence.

[0051] In this solution, the electron beam control device 100 further includes a sealing component 107, which has a through hole in the middle, and the central axis of the through hole coincides with the central axis of the through hole on the second end plate 1063, thereby ensuring that the through hole and the through hole of the second end plate 1063 can be perfectly connected during installation. In order to enhance the sealing effect, a sealing ring is specially provided inside the through hole of this solution.

[0052] Specifically, the sealing assembly 107 includes a fixing portion 1071, a first diameter section 1072, a reducing section 1073, and a second diameter section 1074, which are connected in sequence and have decreasing outer diameters in sequence. More specifically, the fixing portion 1071 is an annular member with a preset thickness, and the annular member has fixing holes arranged at intervals, and screws or other fasteners pass through the fixing holes to fix the sealing assembly 107 on the outer surface of the second end plate 1063. The first diameter section 1072 is a cylindrical structure, one end of which is connected to the fixing portion 1071, and the other end is connected to the reducing section 1073. The reducing section 1073 is in a bell-mouth shape, and its large diameter end is connected to the first diameter section 1072, and its small diameter end is connected to the second diameter section 1074.

[0053] For the connection position between the second drive shaft 1053 and the worm 1032, this solution provides a flexible design to adapt to different installation and operation requirements. It can be understood by those skilled in the art that the extended end of the second drive shaft 1053 has two possible configurations, depending on the specific application scenario and design requirements. In one embodiment, the extended end of the second drive shaft 1053 can be completely located inside the sealing assembly 107. Such a design can ensure that the drive shaft runs in a sealed environment, thereby providing better protection and reducing the impact of the external environment on the drive shaft. In another embodiment, the extended end of the second drive shaft 1053 can also extend out of the second diameter section 1074 of the sealing assembly 107 and be connected to the worm 1032. This design allows the drive shaft to be connected to the worm 1032 outside the sealing assembly 107, which may be convenient for installation and maintenance, and is also suitable for those situations where more frequent adjustments or inspections are required at the connection.

[0054] The design of the sealing assembly 107 provided in this solution not only provides a sealed environment for the second drive shaft 1053, but also provides stable support and protection for the second drive shaft 1053, thereby improving the reliability and durability of the entire device.

[0055] In a specific embodiment, the aperture member 101 is also covered with an aperture cap 102, and the aperture cap 102 includes: a groove structure, which includes a circular top wall 1022 and a sleeve 1023, one end of the sleeve 1023 is connected to the top wall 1022, and the top wall 1022 has a circular light-transmitting hole 1024; an extension portion 1025, the extension portion 1025 is connected to the other end of the sleeve 1023, and is extended away from the sleeve 1023 along the radial direction of the sleeve 1023.

[0056] In this embodiment, an aperture cap 102 is provided above the aperture member 101. Figure 1 and Figure 5 As shown, the aperture cap 102 includes a groove structure and an extension portion 1025. Specifically, the groove structure includes a circular top wall 1022 and a sleeve 1023 connected to the top wall 1022, and a plurality of circular light-transmitting holes 1024 are designed on the top wall 1022, and the number of the light-transmitting holes 1024 is the same as the number of the aperture holes 1011, and the positions of the two are relatively set. The light-transmitting holes 1024 in this solution allow the electron beam to pass through the aperture cap 102 and irradiate the aperture member 101 below. Such a design ensures that the electron beam can be accurately aligned with the aperture hole 1011 on the aperture member 101, thereby achieving accurate control of the electron beam path.

[0057] The extension 1025 on the aperture cap 102 is connected to one end of the sleeve 1023 away from the top wall 1022, and extends radially outwardly of the sleeve 1023 away from the sleeve 1023 itself. In addition, a plurality of mounting holes 1021 are provided on the extension 1025, and fasteners pass through the mounting holes 1021 to fix the aperture cap 102 on the worm gear 1031. Therefore, the extension 1025 on the aperture cap 102 can not only provide additional mechanical support for the aperture member 101, but also can be connected to the worm gear 1031 as a connecting portion, thereby enhancing the stability of the aperture cap 102.

[0058] The aperture cap 102 in this solution helps to reduce the scattering and reflection of the electron beam when passing through the aperture member 101, thereby improving the concentration of the electron beam and the clarity of the image. In addition, the aperture cap 102 also has the function of shielding stray light. During the electron beam control process, the stray light will be shielded after being irradiated on the aperture cap 102, thereby ensuring that only the electron beam passing through the specific aperture hole 1011 can participate in the imaging, effectively preventing the stray light from affecting the contrast and clarity of the image.

[0059] like Figure 4 As shown, in a specific embodiment, the upper surface of the worm wheel 1031 has a first groove 1033 for limiting the aperture member 101, and a second groove 1034 is arranged on the periphery of the first groove 1033 to limit the extension portion 1025 on the aperture cap 102, and the second groove 1034 is annular.

[0060] In this solution, the upper surface of the worm wheel 1031 is specially designed with two grooves, namely the first groove 1033 and the second groove 1034. Specifically, the first groove is arranged in the middle area of ​​the worm wheel 1031, and is mainly used to limit the aperture member 101 to prevent the aperture member 101 from being displaced during the rotation process. The second groove 1034 is an annular groove, which is located on the outer periphery of the first groove 1033. The function of this annular groove is to cooperate with the extension portion 1025 on the aperture cap 102 to limit the extension portion 1025. In addition, the second groove 1034 is also provided with an assembly position corresponding to the mounting hole 1021 on the extension portion 1025, which is used to fix the fastener passing through the mounting hole 1021.

[0061] In this solution, the aperture member 101 is limited in the first groove 1033 and the aperture cap 102 is limited in the second groove 1034, so that the two will not deviate from the predetermined position when rotating.

[0062] The electron beam control device 100 provided by the present solution provides great convenience for operators with its simple design and operation process. First, the structural design of the device is simple and intuitive, and no complicated mechanical adjustment or optical calibration is required, which greatly reduces the operating threshold, allowing operators to quickly become familiar with and easily complete the operation of matching the aperture. In addition, since the first groove 1033 and the second groove 1034 are provided on the worm gear, the aperture member 101 and the aperture cap 102 can still maintain good stability when facing slight vibrations, ensuring the reliability of the experimental results.

[0063] In some embodiments, the present application also provides an electron beam control method, using the above-mentioned electron beam control device, the method comprising: operating the first driving device 104 to drive the worm gear 1031 to move forward or backward in a first direction, so that the aperture member 101 on the worm gear 1031 is aligned with the electron beam; operating the second driving device 105 to drive the worm 1032 to rotate, so that the worm gear 1031 drives the aperture member 101 to rotate, and drives the aperture member to rotate a predetermined angle.

[0064] This solution provides an innovative electron beam control method, which uses the electron beam control device 100 to achieve precise control of the electron beam. The operation flow of this method is divided into two main steps. The first step ensures that the aperture member 101 can accurately align the electron beam to receive the electron beam. The second step accurately controls the rotation angle of the worm 1032 to align the electron beam with the aperture hole 1011 that meets the imaging and analysis conditions.

[0065] Specifically, the first step is the linear alignment of the aperture member 101: first, operate the first driving device 104, and then drive the second end plate 1063 on the bellows assembly 106 to move forward or backward in the first direction (the extension direction of the aperture rod), and then drive the worm gear 1031 to move forward or backward in the first direction. During this process, closely observe the image on the scanning electron microscope. When the image changes from dark to bright, it indicates that the aperture member 101 has been accurately aligned with the electron beam, and at this time the operator needs to control the first driving device 104 to stop moving.

[0066] The second step is to align the aperture 1011 and the electron beam adapted to the imaging and analysis requirements. Specifically, the operation process is to operate the second driving device 105 to drive the worm 1032 to rotate, and the rotation of the worm 1032 is transmitted through the worm gear assembly 103, so that the worm gear 1031 drives the aperture member 101 to rotate, and the aperture member stops rotating after rotating a predetermined angle.

[0067] At this time, the electron beam can be aligned with the aperture 1011 adapted to the imaging and analysis requirements. More specifically, the operator first determines the angle and position to which the aperture member 101 should be rotated by calculation according to the specific requirements of imaging and analysis. Then, by controlling the second driving device 105, the rotation angle of the worm 1032 is accurately adjusted, thereby driving the turbine to rotate and driving the aperture member 101 to rotate to the calculated position. In this process, the operator can confirm whether the aperture 1011 has been correctly aligned by observing the image changes of the scanning electron microscope.

[0068] Those skilled in the art will appreciate that if the operator is initially unsure of which size of aperture 1011 is most suitable for current imaging and analysis conditions, the operator may not pre-calculate the rotation angle, but may try different apertures 1011 one by one by gradually rotating the aperture member 101. During the rotation process, by observing the image changes of the scanning electron microscope, the operator may identify the aperture 1011 that best matches the current conditions. When the image quality reaches the best state, it indicates that a suitable aperture 1011 has been found.

[0069] By using the control method provided by the present application, the operator can quickly and accurately locate the desired aperture by accurately calculating and optimizing key parameters such as the rotation angle and position, thereby shortening the adjustment time. In addition, the method also introduces a real-time feedback mechanism, that is, during the process of rotating the aperture member and matching the aperture, the system can monitor the imaging effect in real time. This instant feedback allows the user to make necessary adjustments and optimizations based on the information provided by the system during the process of matching the aperture, ensuring that the optimal aperture position can be accurately found.

[0070] In some embodiments, the present application provides a scanning electron microscope, which includes the electron beam control device 100 described above.

[0071] Since the scanning electron microscope in this embodiment is provided with the electron beam control device 100, it is possible to easily and quickly find the aperture 1011 matching the current imaging and analysis conditions when in use, which is simple to operate and highly efficient.

[0072] Although multiple embodiments of the present application have been shown and described herein, it is obvious to those skilled in the art that such embodiments are provided only by way of example. Those skilled in the art can think of many changes, modifications and alternatives without departing from the thought and spirit of the present application. It should be understood that in the process of practicing the present application, various alternatives to the embodiments of the present application described herein can be adopted. The attached claims are intended to limit the scope of protection of the present application, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. An electron beam control device, characterized in that: The electron beam control device (100) comprises: An aperture member (101), wherein the aperture member (101) has a plurality of aperture holes (1011) arranged at intervals, wherein the aperture sizes of the aperture holes (1011) are different; A worm gear assembly (103), comprising a worm gear (1031) and a worm (1032) adapted to the worm gear (1031), wherein the aperture member (101) is placed on an upper surface of the worm gear (1031); a first driving device (104), connected to the worm wheel (1031), and driving the worm wheel (1031) to move forward or backward in a first direction, wherein the first direction is parallel to an extension direction of the worm (1032); and A second driving device (105) is connected to the worm (1032) and drives the worm (1032) to rotate, so that the worm wheel (1031) drives the aperture member (101) to rotate.

2. The electron beam control device according to claim 1, characterized in that: The electron beam control device (100) further comprises a bellows assembly (106), wherein the bellows assembly (106) comprises: A bellows (1061) having a hollow cavity therein; a first end plate (1062) fixedly connected to a first end of the bellows (1061); a first drive shaft (1043) on the first drive device (104) and a second drive shaft (1053) on the second drive device (105) passing through the first end plate (1062) and extending into the interior of the bellows (1061); a second end plate (1063) fixedly connected to the second end of the bellows (1061), the second drive shaft (1053) passing through the second end plate (1063) and connected to the worm (1032); an extended end of the first drive shaft (1043) connected to the inner surface of the second end plate (1063), wherein the inner surface of the second end plate (1063) is arranged toward the first end plate (1062); and An aperture rod (1064) is fixedly connected to the outer surface of the second end plate (1063), and the worm gear (1031) is mounted on the aperture rod (1064).

3. The electron beam control device according to claim 2, characterized in that: The aperture rod (1064) has a support shaft (1065) rotatably connected thereto, and one end of the support shaft (1065) away from the aperture rod (1064) is fixedly connected to the worm gear (1031), wherein the worm gear (1031) and the aperture rod (1064) are spaced apart.

4. The electron beam control device according to claim 2, characterized in that: A sealing component (107) is also connected to the outer surface of the second end plate (1063), and the sealing component (107) has a through hole, and the central axis of the through hole coincides with the central axis of the through hole on the second end plate (1063).

5. The electron beam control device according to claim 4, characterized in that: The sealing assembly (107) comprises a fixing portion (1071), a first diameter section (1072), a diameter-reducing section (1073), and a second diameter section (1074) which are connected in sequence and whose outer diameters decrease in sequence.

6. The electron beam control device according to any one of claims 1 to 5, characterized in that: The aperture member (101) is also covered with an aperture cap (102), and the aperture cap (102) comprises: A groove structure, comprising a circular top wall (1022) and a sleeve (1023), one end of the sleeve (1023) being connected to the top wall (1022), and the top wall (1022) having a circular light-transmitting hole (1024); An extension portion (1025), the extension portion (1025) being connected to the other end of the sleeve (1023) and extending away from the sleeve (1023) along the radial direction of the sleeve (1023).

7. The electron beam control device according to claim 6, characterized in that: The upper surface of the worm wheel (1031) is provided with a first groove (1033) for limiting the aperture member (101), and a second groove (1034) is arranged on the outer periphery of the first groove (1033) for limiting the extension portion (1025) on the aperture cap (102), and the second groove (1034) is annular.

8. The electron beam control device according to claim 2, characterized in that: The electron beam control device (100) further comprises a connecting piece (108) that cooperates with the scanning electron microscope, wherein the connecting piece (108) has a through hole in the middle; The end surface of the connecting piece (108) close to the bellows assembly (106) comprises a first sealing surface (1081) and a second sealing surface (1082), and an annular limiting groove (1083) extending in a direction away from the bellows assembly (106) is provided between the first sealing surface (1081) and the second sealing surface (1082); The first sealing surface (1081) is fixedly connected to the outer surface of the first end plate (1062) away from the second end plate (1063), the second sealing surface (1082) abuts against the shell of the scanning electron microscope, and the annular limiting groove (1083) is clamped with the limiting member on the scanning electron microscope.

9. An electron beam control method, using the electron beam control device according to any one of claims 1 to 8, the method comprising: operating the first driving device (104) to drive the worm gear (1031) to move forward or backward in a first direction, so that the aperture member (101) on the worm gear (1031) is aligned with the electron beam; The second driving device (105) is operated to drive the worm (1032) to rotate, so that the worm wheel (1031) drives the aperture member (101) to rotate, thereby driving the aperture member (101) to rotate by a predetermined angle.

10. A scanning electron microscope, characterized in that: It comprises the electron beam control device (100) according to any one of claims 1 to 8.

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