Protection circuit and mass spectrometer

Abstract

The invention provides a protection circuit and a mass spectrometer. The protection circuit comprises a first acquisition module, a first comparison module and a turbo molecular pump power supply module, the first collection module collects the air pressure value of the environment where the turbo molecular pump is located and transmits a generated first air pressure signal to the first comparison module. When the voltage value corresponding to the first air pressure signal is greater than a first voltage threshold value, the first comparison module stops transmitting the generated first comparison signal to the turbo molecular pump power supply module; and when the turbo-molecular pump power supply module does not receive the first comparison signal, the turbo-molecular pump power supply module stops outputting the first power supply signal to the turbo-molecular pump power supply module, so that the turbo-molecular pump power supply module disconnects a loop with the power supply. When the voltage value corresponding to the first air pressure signal is greater than the first voltage threshold value, the loop between the power supply and the turbo molecular pump is disconnected, so that the turbo molecular pump is ensured to stop working under the vacuum condition higher than 10mbr, and the service life of the turbo molecular pump is prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of mass spectrometry analysis, and in particular to a protection circuit and a mass spectrometer. Background Art

[0002] At present, mass spectrometer technology plays an irreplaceable role and a pivotal position in the fields of life sciences, materials sciences, food safety, environmental monitoring, medical care and health, and is the most widely used measurement technology in the fields of modern chemical analysis and biological analysis.

[0003] The turbomolecular pump in the mass spectrometer is mainly responsible for removing the gas in the mass spectrometer from the high vacuum system to maintain a constant low-pressure environment. Before the turbomolecular pump works, a diaphragm pump is required to establish a vacuum condition of less than 10mbr, otherwise the life of the turbomolecular pump will be affected. Therefore, how to ensure that the turbomolecular pump works under a vacuum condition of 10mbr to increase the life of the turbomolecular pump is an urgent problem to be solved.

[0004] The above contents are only used to assist in understanding the technical solution of the present invention and do not constitute an admission that the above contents are prior art. Summary of the invention

[0005] The main purpose of the present invention is to provide a protection circuit and a mass spectrometer, aiming to solve the technical problem of low life of a turbomolecular pump in the prior art.

[0006] To achieve the above object, the present invention provides a protection circuit, which includes: a first acquisition module, a first comparison module and a turbomolecular pump power supply module;

[0007] Wherein, the first comparison module is connected to the first acquisition module and the turbomolecular pump power supply module respectively, the turbomolecular pump power supply module is also connected to the turbomolecular pump power supply module of the turbomolecular pump, and the turbomolecular pump power supply module is also connected to a power supply;

[0008] The first acquisition module is used to acquire the air pressure value of the environment in which the turbomolecular pump is located, and transmit the generated first air pressure signal to the first comparison module;

[0009] The first comparison module is used to stop transmitting the generated first comparison signal to the turbomolecular pump power supply module when the voltage value corresponding to the first air pressure signal is greater than a first voltage threshold;

[0010] The turbomolecular pump power supply module is used to stop outputting the first power supply signal to the turbomolecular pump power supply module when the first comparison signal is not received, so that the turbomolecular pump power supply module disconnects the loop between the power supply and the turbomolecular pump power supply module.

[0011] Optionally, the protection circuit further includes: a first isolation module;

[0012] Wherein, the first isolation module is respectively connected to the first comparison module and the turbomolecular pump power supply module;

[0013] The first isolation module is used to isolate the first comparison signal and transmit the isolated first comparison signal to the turbomolecular pump power supply module.

[0014] Optionally, the protection circuit further includes: a first working detection module;

[0015] Wherein, the first working detection module is connected to the first acquisition module and the first isolation module respectively;

[0016] The first isolation module is used to stop transmitting the isolated first comparison signal to the turbomolecular pump power supply module when the first working detection module fails to detect the first air pressure signal.

[0017] Optionally, the protection circuit further includes: a second acquisition module, a second comparison module and a diaphragm pump speed adjustment module;

[0018] Wherein, the second comparison module is connected to the second acquisition module and the diaphragm pump speed adjustment module respectively, and the diaphragm pump speed adjustment module is also connected to the diaphragm pump;

[0019] The second acquisition module is used to acquire the speed value of the turbomolecular pump and transmit the generated turbomolecular pump speed signal to the second comparison module;

[0020] The second comparison module is used to transmit the generated second comparison signal to the diaphragm pump speed regulation module when the voltage value corresponding to the turbomolecular pump speed signal is greater than a second voltage threshold, so that the diaphragm pump speed regulation module adjusts the speed of the diaphragm pump.

[0021] Optionally, the protection circuit further includes: a voltage conversion module;

[0022] Wherein, the voltage conversion module is connected to the second comparison module and the diaphragm pump speed adjustment module respectively;

[0023] The voltage conversion module is used to perform voltage conversion on the second comparison signal and transmit the converted second comparison signal to the diaphragm pump speed adjustment module.

[0024] Optionally, the protection circuit further includes: a third acquisition module, a third comparison module, a second isolation module and a power supply module;

[0025] Wherein, the third comparison module is respectively connected to the third acquisition module and the second isolation module, the power supply module is also respectively connected to the second isolation module, the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module, and the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module are all connected to the power supply;

[0026] The third acquisition module is used to collect the air pressure value in the sampling pipeline and transmit the generated second air pressure signal to the third comparison module;

[0027] The third comparison module is used to transmit the generated third comparison signal to the second isolation module when the voltage value corresponding to the second air pressure signal is less than a third voltage threshold;

[0028] The second isolation module is used to isolate the third comparison signal and transmit the isolated third comparison signal to the power supply module;

[0029] The power supply module is used to output a second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module when receiving the isolated third comparison signal, so that the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module are all connected to the circuit between the power supply.

[0030] Optionally, the protection circuit further includes: a second working detection module;

[0031] Wherein, the second working detection module is connected to the third acquisition module and the second isolation module respectively;

[0032] The second isolation module is used to stop transmitting the isolated third comparison signal to the power supply module when the second working detection module fails to detect the second air pressure signal.

[0033] Optionally, the protection circuit further includes: an injection button module, a signal holding module, a third isolation module, a vacuum gauge power supply module and an acquisition module power supply module;

[0034] The signal holding module is connected to the injection button module and the third isolation module respectively, the third isolation module is also connected to the vacuum gauge power supply module, the vacuum gauge power supply module is connected to the acquisition module power supply module, and the acquisition module power supply module is also connected to the power supply and the third acquisition module respectively;

[0035] The injection button module is used to transmit the injection signal generated during injection to the third isolation module through the signal holding module;

[0036] The third isolation module is used to isolate the injection signal and transmit the isolated injection signal to the vacuum gauge power supply module;

[0037] The vacuum gauge power supply module is used to output a power-off signal to the acquisition module power supply module when receiving the isolated injection signal, so that the acquisition module power supply module disconnects the loop between the power supply and the third acquisition module.

[0038] Optionally, the protection circuit further comprises: an unlocking and holding module;

[0039] Wherein, the unlocking and holding module is connected to the signal holding module;

[0040] The signal holding module is used to stop transmitting the injection signal to the third isolation module when the unlock holding module generates an unlock signal.

[0041] In addition, to achieve the above object, the present invention also provides a mass spectrometer, which includes the above protection circuit.

[0042] The present invention proposes a protection circuit and a mass spectrometer, which include: a first acquisition module, a first comparison module and a turbomolecular pump power supply module; wherein the first comparison module is connected to the first acquisition module and the turbomolecular pump power supply module respectively, the turbomolecular pump power supply module is also connected to the turbomolecular pump power supply module of the turbomolecular pump, and the turbomolecular pump power supply module is also connected to a power supply; the first acquisition module is used to acquire the air pressure value of the environment in which the turbomolecular pump is located, and transmit the generated first air pressure signal to the first comparison module; the first comparison module is used to stop transmitting the generated first comparison signal to the turbomolecular pump power supply module when the voltage value corresponding to the first air pressure signal is greater than the first voltage threshold; the turbomolecular pump power supply module is used to stop outputting the first power supply signal to the turbomolecular pump power supply module when the first comparison signal is not received, so that the turbomolecular pump power supply module disconnects the loop between the power supply and the turbomolecular pump power supply module. The present invention collects the air pressure value of the environment in which the turbomolecular pump is located through the first acquisition module to obtain the first air pressure signal, and when the voltage value corresponding to the first air pressure signal is greater than the first voltage threshold, disconnects the circuit between the power supply and the turbomolecular pump power supply module to ensure that the turbomolecular pump stops working under a vacuum condition higher than 10mbr, thereby improving the life of the turbomolecular pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0044] Figure 1 A schematic diagram of the structure of a first embodiment of a protection circuit proposed in an embodiment of the present invention;

[0045] Figure 2 A circuit schematic diagram of a protection circuit in a first embodiment of a protection circuit according to an embodiment of the present invention;

[0046] Figure 3 A schematic diagram of the structure of a second embodiment of a protection circuit proposed in an embodiment of the present invention;

[0047] Figure 4 A circuit schematic diagram of a protection circuit in a second embodiment of a protection circuit proposed in an embodiment of the present invention;

[0048] Figure 5 A schematic diagram of the structure of a third embodiment of a protection circuit provided by an embodiment of the present invention;

[0049] Figure 6 A circuit schematic diagram of a protection circuit in a third embodiment of a protection circuit according to an embodiment of the present invention;

[0050] Figure 7 A schematic diagram of the structure of a fourth embodiment of a protection circuit proposed in an embodiment of the present invention;

[0051] Figure 8 This is a circuit schematic diagram of a protection circuit in a fourth embodiment of a protection circuit proposed in an embodiment of the present invention.

[0052] Description of Figure Numbers:

[0053]

[0054] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0055] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0056] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0058] In addition, the descriptions of "first", "second", etc. in the present invention are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0059] Reference Figure 1 , Figure 1 This is a schematic structural diagram of a first embodiment of a protection circuit proposed in an embodiment of the present invention.

[0060] based on Figure 1 , a first embodiment of the protection circuit of the present invention is proposed.

[0061] In this embodiment, the protection circuit includes: a first acquisition module 11, a first comparison module 12 and a turbomolecular pump power supply module 14;

[0062] The first comparison module 12 is connected to the first acquisition module 11 and the turbomolecular pump power supply module 14 respectively, the turbomolecular pump power supply module 14 is also connected to a turbomolecular pump power supply module of the turbomolecular pump, and the turbomolecular pump power supply module is also connected to a power supply.

[0063] It should be noted that the protection circuit provided in this embodiment can be applied to any scenario where a turbomolecular pump is working, and of course can also be applied to other scenarios where air pressure is required, and this embodiment is not limited. The turbomolecular pump can be a device used to establish and maintain a high vacuum environment in a mass spectrometer, and it can be mainly responsible for exhausting the gas in the mass spectrometer from the high vacuum system to maintain a constant low-pressure environment.

[0064] It is understandable that the turbomolecular pump may also be provided with a turbomolecular pump power module, which may be connected to a power source and used to transmit the power provided by the power source to various circuits of the turbomolecular pump so as to operate the turbomolecular pump. The power source may be the power source required for the operation of the turbomolecular pump, and the specific voltage value is not limited in this embodiment.

[0065] It should be emphasized that the turbomolecular pump power supply module may be a module composed of a MOS tube or a triode, which is not limited in this embodiment.

[0066] The first acquisition module 11 is used to acquire the air pressure value of the environment where the turbomolecular pump is located, and transmit the generated first air pressure signal to the first comparison module 12;

[0067] The first comparison module 12 is used to stop transmitting the generated first comparison signal to the turbomolecular pump power supply module 14 when the voltage value corresponding to the first air pressure signal is greater than a first voltage threshold;

[0068] The turbomolecular pump power supply module 14 is used to stop outputting the first power supply signal to the turbomolecular pump power supply module when the first comparison signal is not received, so that the turbomolecular pump power supply module disconnects the loop between the turbomolecular pump power supply module and the power supply.

[0069] It is understandable that in order to ensure that the air pressure in the environment in which the turbomolecular pump is located is less than 10mbr before the turbomolecular pump works, the present embodiment can collect the air pressure value of the environment through the above-mentioned first acquisition module 11. The above-mentioned first acquisition module 11 can be a module for collecting air pressure values. In the present embodiment, a Pirani vacuum gauge is used as the above-mentioned first acquisition module 11 for illustration. Of course, other pressure acquisition modules can also be used, and the present embodiment is not limited.

[0070] It should be understood that the first voltage threshold may be a voltage value corresponding to a gas pressure of 10 mbar, such as Figure 1 As shown, in this embodiment, the first reference signal can also be provided by the first reference module 15 and transmitted to the first comparison module 12, wherein the first reference module 15 is connected to the first comparison module 12, and the voltage value corresponding to the first reference signal can be the above-mentioned first voltage threshold.

[0071] It should also be noted that, when the air pressure value of the environment in which the turbomolecular pump is located is greater than 10mbr, the voltage value corresponding to the first air pressure signal may be greater than the first voltage threshold, and the first comparison module 12 may stop transmitting the generated first comparison signal to the turbomolecular pump power supply module 14; when the air pressure value of the environment in which the turbomolecular pump is located is less than 10mbr, the voltage value corresponding to the first air pressure signal may be less than the first voltage threshold, and the first comparison module 12 may transmit the generated first comparison signal to the turbomolecular pump power supply module 14.

[0072] In a specific implementation, the air pressure value of the environment in which the turbomolecular pump is located is collected by a Pirani vacuum gauge, and the generated first air pressure signal is transmitted to the first comparison module 12, and at the same time, the first reference module 15 transmits the generated first reference signal to the first comparison module 12; when the air pressure value of the environment in which the turbomolecular pump is located is less than 10mbr, the voltage value corresponding to the first air pressure signal may be less than the first voltage threshold value corresponding to the first reference signal, and the first comparison module 12 may output the first comparison signal to the above-mentioned turbomolecular pump power supply module 14. When the turbomolecular pump power supply module 14 receives the first comparison signal, it may output the first power supply signal to the turbomolecular pump power supply module, so that the turbomolecular pump power supply module The loop between the turbomolecular pump and the power supply is turned on, and the turbomolecular pump starts to work; when the air pressure value of the turbomolecular pump environment is greater than 10mbr, the voltage value corresponding to the first air pressure signal may be greater than the first voltage threshold corresponding to the first reference signal, and the first comparison module 12 may stop outputting the first comparison signal to the turbomolecular pump power supply module 14. When the turbomolecular pump power supply module 14 does not receive the first comparison signal, it may stop outputting the first power supply signal to the turbomolecular pump power supply module, so that the turbomolecular pump power supply module disconnects the loop between the power supply and the turbomolecular pump, and the turbomolecular pump stops working; thus, this embodiment can ensure that the turbomolecular pump starts working only when the air pressure is less than 10mbr, thereby improving the service life.

[0073] Furthermore, in order to reduce the interference between signals, continue as follows Figure 1 As shown, in this embodiment, the protection circuit further includes: a first isolation module 13;

[0074] Wherein, the first isolation module 13 is connected to the first comparison module 12 and the turbomolecular pump power supply module 14 respectively;

[0075] The first isolation module 13 is used to isolate the first comparison signal and transmit the isolated first comparison signal to the turbomolecular pump power supply module 14 .

[0076] It should be noted that a photoelectric isolator may be provided in the first isolation module 13 , and signal isolation may be achieved through the photoelectric isolator. Of course, other photoelectric isolation devices may also be used, and this embodiment is not limited thereto.

[0077] Furthermore, when the Pirani vacuum gauge is not powered on or cannot sense the air pressure due to other reasons, in order to prevent the turbomolecular pump from being damaged, the power supply and the turbomolecular pump need to be disconnected, and then the pressure can be sensed. Figure 1 As shown, in this embodiment, the protection circuit further includes: a first working detection module 16;

[0078] Wherein, the first working detection module 16 is connected to the first acquisition module 11 and the first isolation module 13 respectively;

[0079] The first isolation module 13 is used to stop transmitting the isolated first comparison signal to the turbomolecular pump power supply module 14 when the first working detection module 16 fails to detect the first air pressure signal.

[0080] It can be understood that when the above-mentioned Pirani vacuum gauge works normally, the first air pressure signal is output, and when the first working detection module 16 can detect the first air pressure signal, the first isolation module 13 transmits the isolated first comparison signal to the turbomolecular pump power supply module 14; when the above-mentioned Pirani vacuum gauge cannot sense the air pressure, there is no first air pressure signal output, and then the above-mentioned first working detection module 16 does not detect the first air pressure signal, and the first isolation module 13 can stop transmitting the isolated first comparison signal to the turbomolecular pump power supply module 14.

[0081] Further, refer to Figure 2 , Figure 2 A circuit schematic diagram of a protection circuit in a first embodiment of a protection circuit according to an embodiment of the present invention;

[0082] like Figure 2 As shown, the first comparison module 12 includes: a first comparator U1 and a first resistor R1;

[0083] The first pin of the first comparator U1 is connected to the first end of the first resistor R1, the second end of the first resistor R1 is connected to the first isolation module 13, the second pin of the first comparator U1 is connected to the first reference module 15, the third pin of the first comparator U1 is connected to the first acquisition module 11, and the fourth pin of the first comparator U1 is connected to the power supply ( Figure 2 +24V) connection, and the fifth pin of the first comparator U1 is grounded.

[0084] It should be understood that the second pin of the first comparator U1 may be a non-inverting input terminal, and the third pin of the first comparator U1 may be an inverting input terminal.

[0085] It should be emphasized that the first comparator U1 can be replaced by an amplifier or other components with similar functions, which is not limited in this embodiment.

[0086] In a specific implementation, the third pin of the first comparator U1 receives the first air pressure signal output by the first acquisition module 11, the second pin of the first comparator U1 receives the first reference signal output by the first reference module 15, and compares the voltage value corresponding to the first air pressure signal with the first voltage threshold corresponding to the first reference signal. When the voltage value corresponding to the first air pressure signal is less than the first voltage threshold corresponding to the first reference signal, the first pin of the first comparator U1 outputs the first comparison signal; when the voltage value corresponding to the first air pressure signal is greater than the first voltage threshold corresponding to the first reference signal, the first pin of the first comparator U1 stops outputting the first comparison signal.

[0087] Further, continue to refer to Figure 2 , the first reference module 15 comprises: a first voltage regulator TL1 and second to fourth resistors R4;

[0088] The third pin of the first voltage regulator TL1 is connected to the second pin of the first comparator U1, and the third pin of the first voltage regulator TL1 is also connected to the second end of the second resistor R2 and the first end of the third resistor R3 respectively, and the first end of the second resistor R2 is connected to the power supply ( Figure 2 +24V), the second end of the third resistor R3 is connected to the first pin of the first voltage regulator TL1, the second pin of the first voltage regulator TL1 is grounded, the first pin of the first voltage regulator TL1 is also connected to the first end of the fourth resistor R4, and the second end of the fourth resistor R4 is connected to the second pin of the first voltage regulator TL1.

[0089] It should be noted that the model of the first voltage regulator TL1 may be TL431, and of course may be other models, which is not limited in this embodiment.

[0090] In a specific implementation, after the first reference module 15 stabilizes the 24V voltage, the first reference signal is transmitted to the second pin of the first comparator U1 through the first voltage stabilizer TL1.

[0091] Further, continue to refer to Figure 2 , the first isolation module 13 comprises: a first photoelectric isolator OC1;

[0092] Among them, the first pin of the first photoelectric isolator OC1 is connected to the second end of the first resistor R1, the second pin of the first photoelectric isolator OC1 is grounded, the third pin of the first photoelectric isolator OC1 is connected to the first working detection module 16, and the fourth pin of the first photoelectric isolator OC1 is connected to the turbomolecular pump power supply module 14.

[0093] It is understandable that the first isolation module 13 may also be provided with a triode or a MOS tube instead of the first photoelectric isolator OC1, which is not limited in this embodiment.

[0094] In a specific implementation, when the first pin of the first photoelectric isolator OC1 receives the first comparison signal, the first comparison signal is isolated and the isolated first comparison signal is transmitted to the turbomolecular pump power supply module 14 through the fourth pin of the first photoelectric isolator OC1.

[0095] Further, continue to refer to Figure 2 The turbomolecular pump module includes: a fifth resistor R5, a sixth resistor R6 and a first MOS tube MOS1;

[0096] The first end of the fifth resistor R5 is connected to the fourth pin of the first photoelectric isolator OC1, the second end of the fifth resistor R5 is connected to the second end of the sixth resistor R6 and the gate of the first MOS transistor MOS1 respectively, and the first end of the sixth resistor R6 is connected to the power supply ( Figure 2 +24V), a first end of the sixth resistor R6 is also connected to the source of the first MOS transistor MOS1, and a drain of the first MOS transistor MOS1 is connected to the turbomolecular pump power supply module.

[0097] It should be understood that the first MOS transistor may be a P-channel MOS transistor.

[0098] In a specific implementation, when the first photoelectric isolator OC1 receives the first comparison signal, the third pin and the fourth pin of the first photoelectric isolator OC1 are connected and grounded, the level of the fourth pin of the first photoelectric isolator OC1 is low, and then the gate of the first MOS tube MOS1 is low, the source and the drain of the first MOS tube MOS1 are connected and transmit the generated first power supply signal to the turbomolecular pump power supply module, so that the turbomolecular pump power supply module is connected to the loop between the power supply, and the turbomolecular pump starts working; when the first photoelectric isolator OC1 does not receive the first comparison signal, the third pin and the fourth pin of the first photoelectric isolator OC1 are disconnected, and then the source and the drain of the first MOS tube MOS1 are disconnected, and the turbomolecular pump power supply module stops receiving the first power supply signal, so that the turbomolecular pump power supply module is disconnected from the power supply, and then the turbomolecular pump stops working.

[0099] Further, continue to refer to Figure 2 , the first working detection module 16 comprises: a seventh resistor R7 and a first transistor Q1;

[0100] Among them, the first end of the seventh resistor R7 is connected to the third pin of the first comparator U1, the second end of the seventh resistor R7 is connected to the base of the first transistor Q1, the collector of the first transistor Q1 is connected to the third pin of the first photoisolator OC1, and the emitter of the first transistor Q1 is grounded.

[0101] It should be noted that the first transistor Q1 may be an NPN transistor.

[0102] In a specific implementation, when the first acquisition module 11 works normally, the base of the first transistor Q1 can receive a high level, and then the collector and emitter of the first transistor Q1 are connected to ground, so that the third pin of the first photoelectric isolator OC1 is at a low level; when the first acquisition module 11 is abnormal, the voltage value of the first air pressure signal output by the first acquisition module 11 is 0V, and then the collector and emitter of the first transistor Q1 are disconnected, the third pin of the first photoelectric isolator OC1 is disconnected from the ground, and the fourth pin of the first photoelectric isolator OC1 stops transmitting the isolated first comparison signal to the gate of the first MOS tube MOS1, so that when the first acquisition module 11 is abnormal, the turbomolecular pump does not work, thereby further improving the working life.

[0103] In this embodiment, the air pressure value of the environment in which the turbomolecular pump is located is collected by a Pirani vacuum gauge, and the generated first air pressure signal is transmitted to the first comparison module 12, and at the same time, the first reference module 15 transmits the generated first reference signal to the first comparison module 12; when the air pressure value of the environment in which the turbomolecular pump is located is greater than 10mbr, the voltage value corresponding to the first air pressure signal may be greater than the first voltage threshold corresponding to the first reference signal, and the first comparison module 12 may stop outputting the first comparison signal to the first isolation module 13, and the first isolation module 13 stops outputting the isolated first comparison signal to the above-mentioned turbomolecular pump power supply module 14. When the turbomolecular pump power supply module 14 does not receive the first comparison signal, it may stop outputting the first power supply signal to the turbomolecular pump power supply module, so that the turbomolecular pump power supply module disconnects the loop between the power supply and the turbomolecular pump, and the turbomolecular pump stops working; therefore, this embodiment can ensure that the turbomolecular pump starts working only when the air pressure is less than 10mbr, thereby improving the working life.

[0104] Reference Figure 3 , Figure 3 A schematic diagram of the structure of a second embodiment of a protection circuit proposed in an embodiment of the present invention;

[0105] like Figure 3As shown, in this embodiment, the turbomolecular pump can cooperate with the diaphragm pump to establish and maintain a high vacuum environment in the mass spectrometer. When the turbomolecular pump and the diaphragm pump are at high speed, the delivery speed of the diaphragm pump will increase, but more heat will be generated. At this time, it is necessary to ensure that the diaphragm pump is sufficiently cooled to avoid overheating damage. In this embodiment, the protection circuit also includes: a second acquisition module 21, a second comparison module 22 and a diaphragm pump speed adjustment module 24;

[0106] Wherein, the second comparison module 22 is connected to the second acquisition module 21 and the diaphragm pump speed adjustment module 24 respectively, and the diaphragm pump speed adjustment module 24 is also connected to the diaphragm pump;

[0107] The second acquisition module 21 is used to acquire the speed value of the turbomolecular pump and transmit the generated turbomolecular pump speed signal to the second comparison module 22;

[0108] The second comparison module 22 is used to transmit the generated second comparison signal to the diaphragm pump speed regulation module 24 when the voltage value corresponding to the turbomolecular pump speed signal is greater than a second voltage threshold, so that the diaphragm pump speed regulation module 24 adjusts the speed of the diaphragm pump.

[0109] It should be noted that the second acquisition module 21 may be a module for acquiring the rotation speed value of the turbomolecular pump, such as a photoelectric encoder, a Hall element, etc., which is not specifically limited in this embodiment.

[0110] It is understandable that the present embodiment further includes a second reference module 25 which is connected to the second comparison module 22 and can generate a second reference signal to the second comparison module 22 . The voltage value corresponding to the second reference signal can be the second voltage threshold.

[0111] It should be understood that the diaphragm pump speed regulating module 24 may be a module for regulating the speed of the diaphragm pump, such as an adjustable resistor, etc., which is not specifically limited in this embodiment.

[0112] In a specific implementation, the second acquisition module 21 can collect the rotational speed of the turbomolecular pump and transmit the generated turbomolecular pump rotational speed signal to the second comparison module 22. At the same time, the second reference module 25 can transmit the generated second reference signal to the second comparison module 22. The second comparison module 22 compares the voltage value corresponding to the turbomolecular pump rotational speed signal with the second voltage threshold corresponding to the second reference signal. When the voltage value corresponding to the turbomolecular pump rotational speed signal is greater than the second voltage threshold corresponding to the second reference signal, it indicates that the rotational speed of the turbomolecular pump is too high. The second comparison module 22 transmits the generated second comparison signal to the diaphragm pump adjustment module, so that the diaphragm pump adjustment module reduces the rotational speed of the diaphragm pump, thereby preventing the diaphragm pump from overheating.

[0113] Furthermore, in order to make the voltage value of the transmitted second comparison signal meet the voltage value required by the diaphragm pump speed regulating module 24, in this embodiment, the protection circuit further includes: a voltage conversion module 23;

[0114] Wherein, the voltage conversion module 23 is connected to the second comparison module 22 and the diaphragm pump speed adjustment module 24 respectively;

[0115] The voltage conversion module 23 is used to perform voltage conversion on the second comparison signal and transmit the converted second comparison signal to the diaphragm pump speed adjustment module 24 .

[0116] It should be noted that the voltage conversion module 23 can be used to convert the voltage value of the second comparison signal.

[0117] Further, refer to Figure 4 , Figure 4 A circuit schematic diagram of a protection circuit in a second embodiment of a protection circuit proposed in an embodiment of the present invention;

[0118] like Figure 4 As shown, the second comparison module 22 includes: a second comparator U2;

[0119] The voltage conversion module 23 includes: eighth to tenth resistors R10 and a second transistor Q2;

[0120] The first pin of the second comparator U2 is connected to the first end of the eighth resistor R8, the second pin of the second comparator U2 is connected to the second acquisition module 21, the third pin of the second comparator U2 is connected to the second reference module 25, the fourth pin of the second comparator U2 is grounded, and the fifth pin of the second comparator U2 is connected to the power supply ( Figure 4+24V), the second end of the eighth resistor R8 is connected to the base of the second transistor Q2, the emitter of the second transistor Q2 is grounded, the collector of the second transistor Q2 is connected to the second end of the ninth resistor R9, the first end of the ninth resistor R9 is respectively connected to the second end of the tenth resistor R10 and the diaphragm pump speed adjustment module 24, and the first end of the tenth resistor R10 is connected to the second reference module 25.

[0121] It should be noted that the above-mentioned second transistor Q2 can be an NPN transistor, the second pin of the above-mentioned second comparator U2 can be a non-phase input terminal to receive the turbomolecular pump speed signal transmitted by the second acquisition module 21, and the third pin of the second comparator U2 can be a reverse input terminal to receive the second reference signal transmitted by the second reference module 25.

[0122] It should be emphasized that the second comparator U2 can be replaced by an amplifier or other components with similar functions, and this embodiment is not limited thereto.

[0123] In a specific implementation, the second comparator U2 compares the voltage value corresponding to the received turbomolecular pump speed signal with the second voltage threshold corresponding to the received second reference signal. When the voltage value corresponding to the turbomolecular pump speed signal is greater than the second voltage threshold corresponding to the second reference signal, it indicates that the speed of the turbomolecular pump is too high. The first pin of the second comparator U2 outputs a second comparison signal, and then the collector and emitter of the second transistor Q2 are turned on. The second comparison signal is converted into voltage through the resistance value of the tenth resistor R10 and the resistance value of the ninth resistor R9, and the converted second comparison signal is transmitted to the diaphragm pump speed adjustment module 24 through the connection between the tenth resistor R10 and the ninth resistor R9.

[0124] Further, continue to refer to Figure 4 , the second reference module 25 comprises: eleventh to fifteenth resistors R15 and a second voltage regulator TL2;

[0125] The second end of the eleventh resistor R11 is connected to the third pin of the second comparator U2, the second end of the eleventh resistor R11 is also connected to the first end of the twelfth resistor R12, the second end of the twelfth resistor R12 is grounded, the first end of the eleventh resistor R11 is connected to the third pin of the second voltage regulator TL2, the third pin of the second voltage regulator TL2 is also respectively connected to the first end of the thirteenth resistor R13 and the second end of the fourteenth resistor R14, the first end of the fourteenth resistor R14 is connected to the power supply ( Figure 4+24V), the second end of the thirteenth resistor R13 is connected to the first pin of the second voltage regulator TL2, the first pin of the second voltage regulator TL2 is also connected to the first end of the fifteenth resistor R15, the second end of the fifteenth resistor R15 is connected to the second pin of the second voltage regulator TL2, and the second pin of the second voltage regulator TL2 is grounded.

[0126] It is understandable that the model of the second voltage regulator TL2 may be TL431, and of course may be other models, which is not limited in this embodiment.

[0127] In a specific implementation, after the fourteenth resistor R14 stabilizes the 24V voltage through the second voltage regulator TL2, the second voltage regulator TL2 transmits the second reference signal to the third pin of the second comparator U2. At the same time, the second voltage regulator TL2 can also provide voltage to the voltage conversion module 23 so that the second conversion module performs voltage conversion on the second comparison signal.

[0128] In this embodiment, the speed value of the turbomolecular pump is collected by the second acquisition module 21, and the generated turbomolecular pump speed signal is transmitted to the second pin of the second comparator U2. At the same time, the second reference module 25 transmits the generated second reference signal to the third pin of the second comparison signal. When the voltage value corresponding to the turbomolecular pump speed signal is greater than the second voltage threshold corresponding to the second reference signal, it means that the speed of the turbomolecular pump is too high. The first pin of the second comparator U2 outputs the second comparison signal to the voltage conversion module 23, and the voltage conversion module 23 then converts the second comparison signal into voltage. Finally, the converted second comparison signal is transmitted to the diaphragm pump speed adjustment module 24, so that the diaphragm pump speed adjustment module 24 reduces the speed of the diaphragm pump, thereby preventing the diaphragm pump from overheating.

[0129] Reference Figure 5 , Figure 5 A schematic diagram of the structure of a third embodiment of a protection circuit provided by an embodiment of the present invention;

[0130] like Figure 5 As shown, considering that the above-mentioned mass spectrometer may also include an EI ion source module, a high-voltage pulse module and a microchannel plate module, the EI ion source module may be used to use high-speed electrons to impact gaseous molecules to ionize gaseous molecules and generate positively charged ions, the high-voltage pulse module may be used to generate a high-voltage pulse module, and the microchannel plate module may be used to enhance ion flow. However, the above-mentioned EI ion source module, high-voltage pulse module and microchannel plate module all need to work under high vacuum conditions. When the vacuum degree is insufficient, the EI ion source module is easily damaged, the high-voltage pulse module is prone to air ionization reaction, and the microchannel plate is prone to generate large noise, which will affect the lifespan. In this embodiment, the protection circuit also includes: a third acquisition module 31, a third comparison module 32, a second isolation module 33 and a power supply module 34;

[0131] Among them, the third comparison module 32 is respectively connected to the third acquisition module 31 and the second isolation module 33, and the power supply module 34 is also respectively connected to the second isolation module 33, the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module, and the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module are all connected to the power supply.

[0132] It should be noted that the above-mentioned EI ion source power supply module is respectively connected to the power supply and the EI ion source module, and the EI ion source power supply module can be used to connect or disconnect the circuit between the EI ion source module and the power supply; the above-mentioned high-voltage pulse power supply module is respectively connected to the power supply and the high-voltage pulse module, and the high-voltage pulse power supply module can be used to connect or disconnect the circuit between the high-voltage pulse module and the power supply; the above-mentioned microchannel plate power supply module is respectively connected to the power supply and the microchannel plate module, and the microchannel plate power supply module can be used to connect or disconnect the circuit between the microchannel plate module and the power supply.

[0133] It should be emphasized that the above-mentioned power supply can be set according to actual conditions, and this embodiment does not limit it. The above-mentioned EI ion source power supply module, high-voltage pulse power supply module and microchannel plate power supply module can all be modules composed of MOS tubes or triodes, and this embodiment does not limit it.

[0134] The third acquisition module 31 is used to collect the air pressure value in the sampling pipeline and transmit the generated second air pressure signal to the third comparison module 32;

[0135] The third comparison module 32 is used to transmit the generated third comparison signal to the second isolation module 33 when the voltage value corresponding to the second air pressure signal is less than a third voltage threshold;

[0136] The second isolation module 33 is used to isolate the third comparison signal and transmit the isolated third comparison signal to the power supply module 34;

[0137] The power supply module 34 is used to output a second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module when receiving the isolated third comparison signal, so that the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module are all connected to the circuit between the power supply.

[0138] It can be understood that the above-mentioned third acquisition module 31 can be used to collect the air pressure value in the sampling pipe. The above-mentioned sampling pipe can be a pipe for the mass spectrometer to receive gaseous molecules. The specific embodiment is not limited to this. In this embodiment, an inverted magnetron vacuum gauge can be used as the above-mentioned third acquisition module 31. When the air pressure is 3.16*10^-6mpa, the voltage value corresponding to the second air pressure signal output by the inverted magnetron vacuum gauge is approximately 6V.

[0139] It should be understood that a third reference module 35 may also be provided in the present embodiment. The third reference module 35 may be used to generate a third reference signal. The voltage value corresponding to the third reference signal may be the third voltage threshold. The third voltage threshold may be a voltage threshold corresponding to the gas pressure in the sampling pipeline when the EI ion source module, the high-voltage pulse module and the microchannel plate module are working.

[0140] In a specific implementation, the air pressure value in the sampling pipeline is collected by an inverted magnetron vacuum gauge, and the generated second air pressure signal is transmitted to the third comparison module 32. At the same time, the third reference module 35 can generate a third reference signal to the third comparison module 32. The third comparison module 32 compares the voltage value corresponding to the second air pressure signal with the third voltage threshold corresponding to the third reference signal. When the voltage value corresponding to the second air pressure signal is less than the third voltage threshold corresponding to the third reference signal, it can be said that the air pressure value in the sampling pipeline meets the requirement at this time, and then the third comparison signal can be output to the power supply module 34. The power supply module 34 outputs the second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module, so that the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module are all connected to the circuit between the power supply to start working, thereby improving the service life.

[0141] Furthermore, considering that when the inverted magnetron vacuum gauge is not powered on or other reasons cause the inverted magnetron vacuum gauge to be unable to sense the vacuum pressure in the sample inlet pipe, in order to prevent the EI ion source module, the high voltage pulse module and the microchannel plate module from being misconnected, and then continue as Figure 5 As shown, in this embodiment, the protection circuit further includes: a second working detection module 36;

[0142] Wherein, the second working detection module 36 is connected to the third acquisition module 31 and the second isolation module 33 respectively;

[0143] The second isolation module 33 is used to stop transmitting the isolated third comparison signal to the power supply module 34 when the second working detection module 36 fails to detect the second air pressure signal.

[0144] It should be noted that when the above-mentioned inverted magnetron vacuum gauge works normally, a second air pressure signal is output, and when the second working detection module 36 can detect the second air pressure signal, the second isolation module 33 transmits the isolated third comparison signal to the power supply module 34; when the above-mentioned inverted magnetron vacuum gauge cannot sense the air pressure, no second air pressure signal is output, and then the above-mentioned second working detection module 36 does not detect the second air pressure signal, and the second isolation module 33 can stop transmitting the isolated third comparison signal to the power supply module 34.

[0145] Further, refer to Figure 6 , Figure 6 A circuit schematic diagram of a protection circuit in a third embodiment of a protection circuit according to an embodiment of the present invention;

[0146] like Figure 6 As shown, in this embodiment, the third comparison module 32 includes: a third comparator U3 and a sixteenth resistor R16;

[0147] Among them, the first pin of the third comparator U3 is connected to the first end of the sixteenth resistor R16, the second end of the sixteenth resistor R16 is connected to the second isolation module 33, the second pin of the third comparator U3 is connected to the third acquisition module 31, the third pin of the third comparator U3 is connected to the third reference module 35, and the fourth pin of the third comparator U3 is connected to the power supply ( Figure 6 +24V) and the fifth pin of the third comparator U3 is grounded.

[0148] It is understandable that the second pin of the third comparator U3 is an inverting input terminal, and the second pin of the third comparator U3 is a non-inverting input terminal.

[0149] In a specific implementation, the second pin of the third comparator U3 can receive the second air pressure signal output by the third acquisition module 31, and receive the third reference signal output by the third reference module 35, and when the voltage value corresponding to the second air pressure signal is less than the third voltage threshold corresponding to the third reference signal, the first pin of the third comparator U3 outputs a third comparison signal.

[0150] Further, continue to refer to Figure 6 In this embodiment, the third reference module 35 includes: seventeenth to nineteenth resistors R19 and a third voltage regulator TL3;

[0151] The third pin of the third voltage regulator TL3 is connected to the third pin of the third comparator U3, and the third pin of the third voltage regulator TL3 is also connected to the second end of the seventeenth resistor R17 and the first end of the eighteenth resistor R18 respectively, and the first end of the seventeenth resistor R17 is connected to the power supply ( Figure 6+24V), the first pin of the third voltage regulator TL3 is connected to the second end of the eighteenth resistor R18, the first pin of the third voltage regulator TL3 is also connected to the first end of the nineteenth resistor R19, the second pin of the third voltage regulator TL3 is connected to the second end of the nineteenth resistor R19, and the second pin of the third voltage regulator TL3 is also grounded.

[0152] It is understandable that the model of the third voltage regulator TL3 may be TL431, and of course may be other models, which is not limited in this embodiment.

[0153] In a specific implementation, after the third voltage stabilizer TL3 stabilizes the 24V voltage, the third reference signal is transmitted to the third comparator U3 through the third voltage stabilizer TL3.

[0154] Further, continue to refer to Figure 6 In this embodiment, the second isolation module 33 includes: a second photoelectric isolator OC2;

[0155] Among them, the first pin of the second photoelectric isolator OC2 is connected to the second end of the sixteenth resistor R16, the second pin of the second photoelectric isolator OC2 is grounded, the third pin of the second photoelectric isolator OC2 is connected to the second working detection module 36, and the fourth pin of the second photoelectric isolator OC2 is connected to the power supply module 34.

[0156] It should be understood that the second isolation module 33 may also be provided with a triode or a MOS tube instead of the second photoelectric isolator OC2, which is not limited in this embodiment.

[0157] In a specific implementation, after the first pin of the second optoelectronic isolator OC2 receives the third comparison signal, the third pin and the fourth pin of the second optoelectronic isolator OC2 are connected, and the fourth pin of the second optoelectronic isolator OC2 outputs the isolated second comparison signal to the power supply module 34, thereby reducing interference between signals.

[0158] Further, continue to refer to Figure 6 In this embodiment, the second working detection module 36 includes: a twentieth resistor R20 and a third transistor Q3;

[0159] Among them, the first end of the twentieth resistor R20 is connected to the second pin of the third comparator U3, the second end of the twentieth resistor R20 is connected to the base of the third transistor Q3, the collector of the third transistor Q3 is connected to the third pin of the second photoelectric isolator OC2, and the emitter of the third transistor Q3 is grounded.

[0160] It should be noted that when the third acquisition module 31 outputs the second air pressure signal normally, the base of the third transistor Q3 receives a high level, and the collector and emitter of the third transistor Q3 are turned on, so that the fourth pin of the second photoelectric isolator OC2 outputs the isolated third comparison signal; when the third acquisition module 31 is not powered on or other reasons make it impossible to sense the vacuum pressure, there is no second air pressure signal, and the collector and emitter of the third transistor Q3 are disconnected, so that the fourth pin of the second photoelectric isolator OC2 has no isolated third comparison signal output.

[0161] Further, continue to refer to Figure 6 In this embodiment, the power supply module 34 includes: twenty-first to twenty-sixth resistors R26 and second to fourth MOS tubes MOS4;

[0162] The first end of the twenty-first resistor R21 is connected to the fourth pin of the second photoelectric isolator OC2, the second end of the twenty-first resistor R21 is respectively connected to the second end of the twenty-second resistor R22 and the gate of the second MOS transistor MOS2, and the first end of the twenty-second resistor R22 is respectively connected to the power supply ( Figure 6 +24V) and the source of the second MOS tube MOS2, and the drain of the second MOS tube MOS2 is connected to the EI ion source power supply module;

[0163] The first end of the twenty-third resistor R23 is connected to the fourth pin of the second photoelectric isolator OC2, the second end of the twenty-third resistor R23 is respectively connected to the second end of the twenty-fourth resistor R24 ​​and the gate of the third MOS transistor MOS3, and the first end of the twenty-fourth resistor R24 ​​is respectively connected to the power supply ( Figure 6 +24V) and the source of the third MOS tube MOS3, and the drain of the third MOS tube MOS3 is connected to the high-voltage pulse power supply module;

[0164] The first end of the twenty-fifth resistor R25 is connected to the fourth pin of the second photoelectric isolator OC2, the second end of the twenty-fifth resistor R25 is respectively connected to the second end of the twenty-sixth resistor R26 and the gate of the fourth MOS transistor MOS4, and the first end of the twenty-sixth resistor R26 is respectively connected to the power supply ( Figure 6 +24V) and the source of the fourth MOS tube MOS4, and the drain of the fourth MOS tube MOS4 is connected to the above-mentioned microchannel plate power module.

[0165] It is understandable that the second MOS transistor MOS2, the third MOS transistor MOS3 and the fourth MOS transistor MOS4 can all be P-channel MOS transistors.

[0166] In a specific implementation, when the fourth pin of the second optoelectronic isolator OC2 outputs the isolated third comparison signal, the fourth pin of the second optoelectronic isolator OC2 is grounded and is at a low level, and then the second MOS tube MOS2, the third MOS tube MOS3 and the fourth MOS tube MOS4 are all turned on and output the second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module.

[0167] In this embodiment, the air pressure value in the sampling pipeline is collected by an inverted magnetron vacuum gauge, and the generated second air pressure signal is transmitted to the third comparison module 32. At the same time, the third reference module 35 can generate a third reference signal to the third comparison module 32. The third comparison module 32 compares the voltage value corresponding to the second air pressure signal with the third voltage threshold corresponding to the third reference signal. When the voltage value corresponding to the second air pressure signal is less than the third voltage threshold corresponding to the third reference signal, it can be said that the air pressure value in the sampling pipeline meets the requirement at this time, and then the third comparison signal can be output to the second isolation module 33 for isolation. The second isolation module 33 transmits the isolated third comparison signal to the power supply module 34, and the power supply module 34 outputs the second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module, so that the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module are all connected to the circuit between the power supply to start working, thereby improving the service life.

[0168] Reference Figure 7 , Figure 7 A schematic diagram of the structure of a fourth embodiment of a protection circuit proposed in an embodiment of the present invention;

[0169] like Figure 7 As shown, considering that when the mass spectrometer is injecting samples, the vacuum condition in the injection pipeline will be destroyed, and at this time the EI ion source module, the high-voltage pulse module and the microchannel plate module do not need to work, and then in this embodiment, the protection circuit also includes: an injection button module 41, a signal holding module 42, a third isolation module 43, a vacuum gauge power supply module 44 and an acquisition module power supply module;

[0170] The signal holding module 42 is connected to the injection button module 41 and the third isolation module 43 respectively, the third isolation module 43 is also connected to the vacuum gauge power supply module 44, the vacuum gauge power supply module 44 is connected to the acquisition module power supply module, and the acquisition module power supply module is also connected to the power supply and the third acquisition module 31 respectively;

[0171] The injection button module 41 is used to transmit the injection signal generated during injection to the third isolation module 43 through the signal holding module 42;

[0172] The third isolation module 43 is used to isolate the injection signal and transmit the isolated injection signal to the vacuum gauge power supply module 44;

[0173] The vacuum gauge power supply module 44 is used to output a power-off signal to the acquisition module power supply module when receiving the isolated injection signal, so that the acquisition module power supply module disconnects the circuit between the power supply and the third acquisition module 31.

[0174] It should be noted that, for ease of understanding, the above-mentioned inverted magnetic control vacuum gauge is described as the third acquisition module 31, and the above-mentioned acquisition module power supply module can be a module between the above-mentioned inverted magnetic control vacuum gauge and the power supply, which can be used to control the on-off of the circuit between the inverted magnetic control vacuum gauge and the power supply.

[0175] It is understandable that the power supply module of the acquisition module can be a MOS tube, a triode, etc., which is not limited in this embodiment.

[0176] It should be understood that the above power supply may be a power supply for the third acquisition module 31 to work, and this embodiment does not limit this.

[0177] In a specific implementation, when the mass spectrometer is injecting samples, the signal holding module 42 can transmit the injection signal generated by the injection button module 41 to the third isolation module 43 for isolation. The third isolation module 43 transmits the isolated injection signal to the vacuum gauge power supply module 44. The vacuum gauge power supply module 44 can output a power-off signal to the sampling module power supply module, so that the sampling module power supply module disconnects the circuit between the power supply and the inverted magnetic control vacuum gauge, thereby preventing the inverted magnetic control vacuum gauge from working during injection.

[0178] Furthermore, considering that when the injection is finished, the inverted magnetic control vacuum gauge needs to start working, in this embodiment, the protection circuit further includes: an unlocking and holding module 45;

[0179] Wherein, the unlocking and maintaining module 45 is connected to the signal maintaining module 42;

[0180] The signal holding module 42 is used to stop transmitting the injection signal to the third isolation module 43 when the unlock holding module 45 generates an unlock signal.

[0181] In a specific implementation, the unlocking and holding module 45 can generate an unlocking signal when the injection is completed, so that the signal holding module 42 stops transmitting the injection signal to the third isolation module 43, and then the loop between the power supply module of the acquisition module and the power supply is connected, and the inverted magnetic control vacuum gauge starts to work.

[0182] Further, refer to Figure 8 , Figure 8A circuit schematic diagram of a protection circuit in a fourth embodiment of a protection circuit according to an embodiment of the present invention;

[0183] like Figure 8 As shown, in this embodiment, the injection button module 41 includes: a twenty-seventh resistor R27, a first button SW1 and a first diode D1;

[0184] Wherein, the first end of the twenty-seventh resistor R27 is connected to the power supply ( Figure 8 +24V), the second end of the twenty-seventh resistor R27 is respectively connected to the cathode of the first diode D1 and the first end of the first button SW1, the second end of the first button SW1 is grounded, and the anode of the first diode D1 is connected to the signal holding module 42.

[0185] It should be understood that when the mass spectrometer is injecting a sample, the first button SW1 may be pressed, and then the circuit where the first button SW1 is located is connected to the ground, and the anode of the first diode D1 outputs an injection signal to the signal holding module 42 .

[0186] Further, continue as Figure 8 As shown, the signal holding circuit includes: twenty-eighth to thirtieth resistors R30, a fourth transistor Q4 and a fifth transistor Q5;

[0187] The second end of the twenty-eighth resistor R28 is respectively connected to the anode of the first diode D1 and the base of the fourth transistor Q4, the second end of the twenty-eighth resistor R28 is also connected to the first end of the twenty-ninth resistor R29, the second end of the twenty-ninth resistor R29 is connected to the collector of the fifth transistor Q5, the emitter of the fifth transistor Q5 is grounded, the base of the fifth transistor Q5 is connected to the unlocking and holding module 45, the first end of the twenty-eighth resistor R28 is respectively connected to the power supply ( Figure 8 +24V) and the emitter of the fourth transistor Q4, the collector of the fourth transistor Q4 is respectively connected to the third isolation module 43, the unlocking and holding module 45 and the first end of the thirtieth resistor R30, and the second end of the thirtieth resistor R30 is grounded.

[0188] In a specific implementation, when the anode of the first diode D1 outputs a sampling signal, the base of the fourth transistor Q4 is at a low level, and then the emitter and collector of the fourth transistor Q4 are turned on, and the collector of the fourth transistor Q4 transmits the sampling signal to the third isolation module 43 .

[0189] Further, continue as Figure 8 As shown, the third isolation module 43 includes: a third photoelectric isolator OC3 and a thirty-first resistor R31;

[0190] The first pin of the third photoelectric isolator OC3 is connected to the collector of the fourth transistor Q4, the second pin of the third photoelectric isolator OC3 is connected to the first end of the thirty-first resistor R31, the second end of the thirty-first resistor R31 is grounded, and the fourth pin of the third photoelectric isolator OC3 is connected to the power supply ( Figure 8 +24V), and the third pin of the third photoelectric isolator OC3 is connected to the vacuum gauge power supply module 44.

[0191] It is understandable that the third isolation module 43 may also be provided with a triode or a MOS tube instead of the third photoelectric isolator OC3, which is not limited in this embodiment.

[0192] In a specific implementation, when the first pin of the third photoelectric isolator OC3 receives the injection signal, the injection signal is isolated, the third pin and the fourth pin of the third photoelectric isolator OC3 are connected, and the third pin of the third photoelectric isolator OC3 outputs the isolated injection signal to the vacuum gauge power supply module 44.

[0193] Further, continue to refer to Figure 8 The vacuum gauge power supply module 44 includes: a thirty-second resistor R32, a thirty-third resistor R33 and a fifth MOS tube MOS5;

[0194] Wherein, the first end of the thirty-second resistor R32 is connected to the power supply ( Figure 8 +24V) and the source of the fifth MOS tube MOS5, the second end of the thirty-second resistor R32 is respectively connected to the third pin of the third photoelectric isolator OC3, the first end of the thirty-third resistor R33 and the gate of the fifth MOS tube MOS5, the second end of the thirty-third resistor R33 is grounded, and the drain of the fifth MOS tube MOS5 is connected to the vacuum gauge power supply module 44.

[0195] It should be understood that the fifth MOS transistor MOS5 may be a P-channel MOS transistor.

[0196] In a specific implementation, when the third pin of the third photoelectric isolator OC3 outputs the isolated sampling signal, the gate of the fifth MOS tube MOS5 is at a high level, and then the source and drain of the fifth MOS tube MOS5 are disconnected and output a power-off signal to the vacuum gauge power supply module 44, so that the vacuum gauge power supply module 44 disconnects the loop between the power supply and the third acquisition module 31.

[0197] Further, continue to refer to Figure 8 , the unlocking and maintaining module 45 comprises: a thirty-fourth resistor R34 and a sixth transistor Q6;

[0198] Among them, the first end of the thirty-fourth resistor R34 is respectively connected to the base of the fifth transistor Q5 and the collector of the sixth transistor Q6, the emitter of the sixth transistor Q6 is grounded, and the second end of the thirty-fourth resistor R34 is connected to the first end of the thirtieth resistor R30.

[0199] It should be noted that when the injection is completed, the base of the sixth transistor Q6 can receive an unlocking signal ( Figure 8 In K), the unlocking signal may be triggered by a user by pressing a button, or may be triggered by other methods, which are not limited in this embodiment.

[0200] In a specific implementation, when the base of the sixth transistor Q6 receives a high-level unlocking signal, the collector and emitter of the sixth transistor Q6 are turned on, and then the collector and emitter of the fifth transistor Q5 are disconnected, and the emitter and collector of the fourth transistor Q4 are disconnected, and then the collector of the fourth transistor Q4 has no sampling signal output.

[0201] In this embodiment, when the mass spectrometer is performing sample injection, the signal holding module 42 can transmit the injection signal generated by the injection button module 41 to the third isolation module 43 for isolation. The third isolation module 43 transmits the isolated injection signal to the vacuum gauge power supply module 44. The vacuum gauge power supply module 44 can output a power-off signal to the sampling module power supply module, so that the sampling module power supply module disconnects the circuit between the power supply and the inverted magnetic control vacuum gauge, thereby preventing the inverted magnetic control vacuum gauge from working during sample injection.

[0202] To achieve the above object, the present invention further proposes a mass spectrometer, which includes the protection circuit as described above. The specific structure of the protection circuit refers to the above embodiment. Since this mass spectrometer adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0203] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A protection circuit, characterized in that: The protection circuit includes: a first acquisition module, a first comparison module and a turbomolecular pump power supply module; Wherein, the first comparison module is connected to the first acquisition module and the turbomolecular pump power supply module respectively, the turbomolecular pump power supply module is also connected to the turbomolecular pump power supply module of the turbomolecular pump, and the turbomolecular pump power supply module is also connected to a power supply; The first acquisition module is used to acquire the air pressure value of the environment in which the turbomolecular pump is located, and transmit the generated first air pressure signal to the first comparison module; The first comparison module is used to stop transmitting the generated first comparison signal to the turbomolecular pump power supply module when the voltage value corresponding to the first air pressure signal is greater than a first voltage threshold; The turbomolecular pump power supply module is used to stop outputting the first power supply signal to the turbomolecular pump power supply module when the first comparison signal is not received, so that the turbomolecular pump power supply module disconnects the loop between the turbomolecular pump power supply module and the power supply.

2. The protection circuit according to claim 1, characterized in that: The protection circuit further includes: a first isolation module; Wherein, the first isolation module is respectively connected to the first comparison module and the turbomolecular pump power supply module; The first isolation module is used to isolate the first comparison signal and transmit the isolated first comparison signal to the turbomolecular pump power supply module.

3. The protection circuit according to claim 2, characterized in that: The protection circuit further includes: a first working detection module; Wherein, the first working detection module is connected to the first acquisition module and the first isolation module respectively; The first isolation module is used to stop transmitting the isolated first comparison signal to the turbomolecular pump power supply module when the first working detection module fails to detect the first air pressure signal.

4. The protection circuit according to any one of claims 1 to 3, characterized in that: The protection circuit also includes: a second acquisition module, a second comparison module and a diaphragm pump speed adjustment module; Wherein, the second comparison module is connected to the second acquisition module and the diaphragm pump speed adjustment module respectively, and the diaphragm pump speed adjustment module is also connected to the diaphragm pump; The second acquisition module is used to acquire the speed value of the turbomolecular pump and transmit the generated turbomolecular pump speed signal to the second comparison module; The second comparison module is used to transmit the generated second comparison signal to the diaphragm pump speed regulation module when the voltage value corresponding to the turbomolecular pump speed signal is greater than a second voltage threshold, so that the diaphragm pump speed regulation module regulates the speed of the diaphragm pump.

5. The protection circuit according to claim 4, characterized in that: The protection circuit also includes: a voltage conversion module; Wherein, the voltage conversion module is connected to the second comparison module and the diaphragm pump speed adjustment module respectively; The voltage conversion module is used to perform voltage conversion on the second comparison signal and transmit the converted second comparison signal to the diaphragm pump speed adjustment module.

6. The protection circuit according to claim 1, characterized in that: The protection circuit also includes: a third acquisition module, a third comparison module, a second isolation module and a power supply module; Wherein, the third comparison module is respectively connected to the third acquisition module and the second isolation module, the power supply module is also respectively connected to the second isolation module, the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module, and the EI ion source power module, the high-voltage pulse power module and the microchannel plate power module are all connected to the power supply; The third acquisition module is used to collect the air pressure value in the sampling pipeline and transmit the generated second air pressure signal to the third comparison module; The third comparison module is used to transmit the generated third comparison signal to the second isolation module when the voltage value corresponding to the second air pressure signal is less than a third voltage threshold; The second isolation module is used to isolate the third comparison signal and transmit the isolated third comparison signal to the power supply module; The power supply module is used to output a second power supply signal to the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module when receiving the isolated third comparison signal, so that the EI ion source power supply module, the high-voltage pulse power supply module and the microchannel plate power supply module are all connected to the circuit between the power supply.

7. The protection circuit according to claim 6, characterized in that: The protection circuit further includes: a second working detection module; Wherein, the second working detection module is connected to the third acquisition module and the second isolation module respectively; The second isolation module is used to stop transmitting the isolated third comparison signal to the power supply module when the second working detection module fails to detect the second air pressure signal.

8. The protection circuit according to claim 7, characterized in that: The protection circuit also includes: an injection button module, a signal holding module, a third isolation module, a vacuum gauge power supply module and an acquisition module power supply module; The signal holding module is connected to the injection button module and the third isolation module respectively, the third isolation module is also connected to the vacuum gauge power supply module, the vacuum gauge power supply module is connected to the acquisition module power supply module, and the acquisition module power supply module is also connected to the power supply and the third acquisition module respectively; The injection button module is used to transmit the injection signal generated during injection to the third isolation module through the signal holding module; The third isolation module is used to isolate the injection signal and transmit the isolated injection signal to the vacuum gauge power supply module; The vacuum gauge power supply module is used to output a power-off signal to the acquisition module power supply module when receiving the isolated injection signal, so that the acquisition module power supply module disconnects the loop between the power supply and the third acquisition module.

9. The protection circuit according to claim 8, characterized in that: The protection circuit further includes: an unlocking and holding module; Wherein, the unlocking and holding module is connected to the signal holding module; The signal holding module is used to stop transmitting the injection signal to the third isolation module when the unlock holding module generates an unlock signal.

10. A mass spectrometer, characterized in that: The mass spectrometer comprises the protection circuit according to any one of claims 1 to 9.

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