Shock absorber

Abstract

The invention discloses a shock absorber, and relates to the technical field of shock absorption, the shock absorber comprises a base, the base is provided with a first cavity and a second cavity, and the first cavity communicates with the second cavity; the leveling valve is communicated with the second chamber; the gas film part covers the opening of the first cavity in a sealing manner; the air floating seat is arranged at the opening of the first chamber and is connected with the air film piece; the damping device is arranged in the first cavity and connected with the air floatation seat; and the trigger is used for triggering the leveling valve. The air floating seat is in a suspended state after the first chamber and the second chamber are filled with air; when vibration is generated, the trigger makes contact with the leveler, an external gas source is communicated with the second cavity, gas firstly enters the second cavity and then enters the first cavity, and the situation that the sudden-increasing gas is inflated to impact the gas film, so that the air floating seat generates sudden-increasing height change is prevented; and a force opposite to the vibration direction is generated to suppress the vibration amplitude, so that resonance is prevented.

Description

Technical Field

[0001] The present application relates to the technical field of shock absorption, and in particular to a shock absorber. Background Art

[0002] Air-floating shock absorbers are divided into two types: airbag and diaphragm. Due to their low manufacturing cost, large load capacity and good low-frequency characteristics, air-floating shock absorbers are widely used in semiconductor processing, medical testing, biomedical ultra-precision processing and measurement equipment and other industries. However, since they are elastic bodies, their defects are also obvious: First, there is a process of energy storage and energy release under the impact of vibration energy, so the amplitude cannot be suppressed but will increase the amplitude of vibration; second, the actual vibration environment is not a simple vertical or horizontal movement, but a six-degree-of-freedom compound movement. Since the air-floating shock absorber itself has low stiffness and good elasticity, it cannot control the posture of the load; third, when there are moving parts in the upper mechanism of chip lithography, wafer inspection, precision machining, precision testing, etc., the movement energy cannot be quickly absorbed in the micro-seismic environment, resulting in (too long tuning time) The mechanism cannot be quickly adjusted and affects efficiency and quality.

[0003] In order to suppress horizontal movement, some airbag shock absorbers have an oil cup and a rocker arm installed inside. The oil cup is filled with viscous oil, which has a certain suppressing effect on horizontal vibration, but has no effect on vertical movement, and has very demanding requirements on the transportation, installation and use environment.

[0004] Although some diaphragm air-floating shock absorbers use an aluminum alloy cylinder and a double-chamber design with an additional damping air chamber to reduce the impact of the leveling valve when inflating and deflating, and have a certain effect on vertical improvement, there are still serious problems in the horizontal direction.

[0005] Although the existing air bag shock absorbers and diaphragm air floating shock absorbers are equipped with level adjustment valves to control the vertical height, they cannot meet the use requirements in the micro-vibration environment of precision manufacturing and precision measurement due to the lack of dampers to consume vibration energy. In the pulse vibration environment, they cannot suppress the vibration pulse and cause damage to other accessories such as the leveling valve contact rod. Summary of the invention

[0006] The present application aims to solve one of the above technical problems in the prior art. To this end, an embodiment of the present application provides a shock absorber.

[0007] The shock absorber provided in the embodiment of the present application includes a base, the base has a first chamber and a second chamber, the second chamber is a closed space, and the first chamber is connected to the second chamber; a leveling valve fixed to the outside of the base, the leveling valve is connected to the second chamber; an air film member sealing the opening of the first chamber; an air floating seat, arranged at the opening of the first chamber and connected to the air film member; a damping device, arranged in the first chamber, the damping device is connected to the air floating seat; a trigger, installed on the air floating seat, the trigger is used to trigger the leveling valve.

[0008] The above-mentioned shock absorber has at least the following beneficial effects: the base serves as a support, the air floating seat is used to connect with the equipment that needs shock absorption, and in the loaded state, the leveling valve is connected to the external air source, the trigger is not in contact with the leveling valve, and the air floating seat is in a suspended state after the first chamber and the second chamber are filled with gas; when the ground vibrates or the equipment vibrates, the trigger follows the air floating seat to descend and contacts the leveler, the external air source is connected to the second chamber, and the gas first enters the second chamber and then enters the first chamber, so as to prevent the shock wave generated by the sudden increase of high-pressure gas from impacting the air film and causing the air floating seat to produce a drastic height change, so that the filling and deflating process of the shock absorber of the present application is smooth and does not produce greater vibration, effectively reducing the natural frequency of the shock absorber, so that the shock absorber has a larger isolation frequency range, and the damping device arranged in the first chamber generates a force opposite to the vibration direction to suppress the vibration amplitude and interfere with the vibration frequency when the air floating seat vibrates in the vertical direction and / or horizontal direction, so as to prevent resonance.

[0009] According to the shock absorber described in the embodiment of the present application, the damping device includes a rocking member and a first damping structure. The rocking member arranged in the vertical direction passes through the air film member and is fixedly connected to the air floating seat. The first damping structure includes a sliding cavity and a sliding member. The sliding member can slide in the sliding cavity. The rocking member passes through the sliding member, and the sliding member can follow the rocking member to move in any direction in the horizontal direction.

[0010] According to the shock absorber described in the embodiment of the present application, the gap between the sliding member and the sliding cavity is filled with a damping layer.

[0011] According to the shock absorber described in the embodiment of the present application, the damping layer includes a high-resilience sponge, and the high-resilience sponge absorbs damping oil.

[0012] According to the shock absorber described in the embodiment of the present application, the damping device also includes a second damping structure, the second damping structure includes a third chamber, the third chamber is filled with damping oil, and the rocking member is connected to a piston arranged in the third chamber.

[0013] According to the shock absorber described in the embodiment of the present application, the base has a concave cavity with one side open, and a partition is arranged in the concave cavity to form the first chamber and the second chamber.

[0014] According to the shock absorber described in the embodiment of the present application, the damping device also includes a first shell, the first shell cover is arranged on a side of the partition member in the first chamber to form the sliding cavity, and the first shell has a through hole to avoid the rocking arm.

[0015] According to the shock absorber described in the embodiment of the present application, the damping device also includes a second shell, and the second shell is arranged on a side of the partition member in the second chamber to form the third chamber.

[0016] According to the shock absorber described in the embodiment of the present application, the trigger includes an extension rod whose extension length can be adjusted, the end of the extension rod has a trigger head, and the trigger rod of the leveling valve is located on the movement path of the trigger head.

[0017] According to the shock absorber described in the embodiment of the present application, the base is also provided with a pressure relief valve, and the trigger rod of the pressure relief valve is connected to the air floating seat through a connecting piece.

[0018] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present application is further described below with reference to the accompanying drawings and embodiments;

[0020] Figure 1 This is a schematic diagram of the structure of the embodiment of the present application. Figure 1 ;

[0021] Figure 2 This is a schematic diagram of the structure of the embodiment of the present application. Figure 2

[0022] Figure 3 This is a schematic diagram of the structure of the embodiment of the present application. Figure 3 .

[0023] Figure markings: connecting plate 110, limiting ring 120, floating plug 130, base 200, second chamber 201, first chamber 202, second air inlet 210, second air outlet 220, third air inlet 230, pressure relief valve 240, connecting piece 250, first pressure ring 260, partition 270, leveling valve 300, first air outlet 301, first air inlet 302, valve body 310, valve stem 320, trigger 400, fixing seat 410, extension rod 420, nut 430, air film part 500, damping device 600, rocking piece 610, sliding piece 620, piston 630, sliding chamber 640, third chamber 650, damping layer 660, first shell 670. DETAILED DESCRIPTION

[0024] This section will describe in detail the specific embodiments of the present application. The preferred embodiments of the present application are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present application, but it cannot be understood as a limitation on the scope of protection of the present application.

[0025] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0026] In the description of this application, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0027] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0028] Reference Figures 1 to 3 An embodiment of the present application provides a shock absorber, which includes a base 200, a leveling valve 300, an air floating seat, a damping device 600 and a trigger 400.

[0029] The base 200 is used as a reference for installation and for installing other components. The base 200 has a first chamber 202 and a second chamber 201 . The second chamber 201 is a closed space. The first chamber 202 is connected to the second chamber 201 .

[0030] The leveling valve 300 is fixed to the outside of the base 200. The leveling valve 300 includes a valve body 310 and a valve stem 320. The valve body 310 of the leveling valve 300 is connected to the second chamber 201. The leveling valve 300 is connected to an external gas source. When the leveling valve 300 is triggered, the external gas source is connected to the second chamber 201, so that the external gas source can pass high-pressure gas into the second chamber 201.

[0031] The air film 500 covers the open portion of the first chamber 202 to form a closed space in the first chamber 202, thereby ensuring that the gas injected into the first chamber 202 will not leak.

[0032] The damping device 600 is disposed in the first chamber 202 , and the damping device 600 is connected to the air floating seat.

[0033] The trigger 400 is disposed on the air floating seat. When the air floating seat moves up and down, the trigger 400 can move to press against the valve stem 320 of the leveling valve 300 .

[0034] Specifically, when in use, the base 200 is used as a support, and the air floating seat is used to connect with the equipment that needs shock absorption. In the loaded state, the leveling valve 300 is connected to the external air source, the trigger 400 is not in contact with the leveling valve 300, and the air floating seat is in a suspended state after the first chamber 202 and the second chamber 201 are filled with gas.

[0035] When the ground vibrates or the equipment vibrates, the trigger 400 follows the air float seat down and contacts the leveler. The leveler opens, so that the external air source is connected to the second chamber 201. The gas first enters the second chamber 201 and then enters the first chamber 202, preventing the shock wave generated by the sudden increase in high-pressure gas from impacting the air film and causing a sharp change in the height of the air float seat. This makes the inflation and deflation process of the shock absorber of the present application smooth and does not produce greater vibrations, effectively reducing the natural frequency of the shock absorber and at the same time giving the shock absorber a larger isolation frequency range.

[0036] When the air-floating seat vibrates in the vertical direction and / or horizontal direction, the damping device 600 disposed in the first chamber 202 generates a force opposite to the vibration direction to suppress the vibration amplitude, interfere with the vibration frequency, and prevent resonance. On the one hand, the damping device 600 can reduce the vibration acting on the air-floating seat, and on the other hand, the damping device 600 can also consume the vibration energy to reduce the impact of the vibration on the equipment.

[0037] It can play an effective role in both strong earthquake environment and micro-earthquake environment. The coordination of the damping device 600, the leveling valve 300, the trigger 400, the first strong force and the second chamber 201 can respond quickly and perform energy-consuming actions to reduce the impact of vibration, which can greatly improve the accuracy and efficiency of the equipment.

[0038] The working process of the shock absorber of this application is:

[0039] The compressed air enters the leveling valve 300 through the first air inlet 302 outside the leveling valve 300. Since the leveling valve 300 is in a normally closed state under normal conditions, the air float seat is pressed down at this time, so that the trigger 400 follows the air float seat and descends, and presses against the valve stem 320 of the leveler. At this time, the leveling valve 300 is opened in one direction in the inflation direction, and the leveling valve 300 is opened. Since the first air outlet 301 of the leveling valve 300 is connected to the second air inlet 210 arranged on the outside of the base 200 through the air pipe, the second air inlet 210 is connected to the second chamber 201. The gas from the external air source can smoothly enter the second chamber 201. Since the second air outlet 220 of the second chamber 201 is connected to the third air inlet 230 through the air pipe, and the third air inlet 230 is connected to the first chamber 202, the compressed air can enter the first chamber 202. Due to the sealing effect of the air film part 500, the compressed air in the first chamber 202 lifts the air film part 500. The air floating seat is arranged on the top of the air film part 500, so the air floating seat can be lifted, so that the load fixed on the air floating seat is lifted and floated.

[0040] When the lifting height of the air float seat exceeds the position set by the trigger 400, the leveling valve 300 starts to deflate until the leveling valve 300 stops deflation; when the lifting height is lower than the position set by the trigger 400, the leveling valve 300 starts to inflate the first chamber 202. During inflation, the compressed air first enters the first chamber 202 and then enters the second chamber 201 to prevent shock waves generated when high-pressure gas is charged. A damping valve is provided at the second air outlet 220, and the flow rate is adjusted by the damping valve to make the filling and deflation process of the chamber smooth without generating greater vibration. The chamber can be set larger. A larger chamber will reduce the natural frequency of the shock absorber, so that the shock absorber has a larger isolation frequency range.

[0041] In some specific embodiments, the shock absorber further includes a first pressure ring 260, which is used to press against the edge of the air film 500 so that the air film 500 can seal the first chamber 202, and the first pressure ring 260 is connected to the base 200 by bolts.

[0042] The air floating seat includes a floating plug 130, a connecting plate 110 and a limiting ring 120. The connecting plate 110 is arranged on the top of the floating plug 130. The connecting plate 110 is used to connect with the equipment that needs shock absorption. The limiting ring 120 is fixed on the connecting plate 110. The limiting ring 120 is used to limit the downward pressure of the air floating seat to prevent the air floating seat from being excessively pressed down and driving the trigger component to damage the leveling valve 300.

[0043] In the embodiment of the present application, the damping device 600 includes a rocking member 610 and a first damping structure. The rocking member 610 arranged in the vertical direction passes through the air film member 500 and is fixedly connected to the air floating seat. The first damping structure includes a sliding cavity 640 and a sliding member 620. The sliding member 620 can slide in the sliding cavity 640. The rocking member 610 passes through the sliding member 620. The sliding member 620 can follow the rocking member 610 to move in any direction in the horizontal direction.

[0044] The friction between the sliding member 620 and the sliding cavity 640 can reduce and absorb the vibration in the horizontal direction acting on the air floating seat, and consume the kinetic energy generated by the vibration in the horizontal direction through friction.

[0045] Specifically, when horizontal vibration or impact occurs, the air floating seat drives the rocking member 610 to move in the horizontal direction, and the rocking member 610 drives the sliding member 620 to slide in the sliding cavity 640. The sliding member 620 and the cavity wall of the sliding cavity 640 interact to form a reverse damping to suppress vibration or impact.

[0046] In some embodiments, in order to improve energy consumption efficiency, the gap between the sliding member 620 and the sliding cavity 640 is filled with a damping layer 660. When horizontal vibration or impact occurs, the air floating seat drives the rocking member 610 to move in the horizontal direction, and the rocking member 610 drives the sliding member 620 to slide in the sliding cavity 640. The sliding friction between the sliding member 620, the damping layer 660 and the cavity wall of the sliding cavity 640 acts to form a reverse damping to suppress vibration or impact.

[0047] In the embodiment of the present application, the damping layer 660 includes a high-resilience sponge, and the high-resilience sponge absorbs damping oil. The high-resilience sponge and the damping oil can effectively reduce the impact caused by the vibration, and can also effectively consume the kinetic energy caused by the vibration during the friction process.

[0048] Because the rocking member 610 is arranged in the vertical direction, and the rocking member 610 and the sliding member 620 are not fixedly connected, that is, when vibration occurs, the air floating seat can drive the rocking member 610 to move up and down in the vertical direction when it rises and falls and vibrates. In order to solve the vertical vibration of the air floating seat, the damping device 600 of the present application also includes a second damping structure, and the second damping structure includes a third chamber 650, and the third chamber 650 is filled with damping oil. The rocking member 610 is connected to the piston 630 arranged in the third chamber 650.

[0049] After the shock absorber is loaded, the vibration of the ground and the vibration generated when the air floating seat is loaded form an all-round vibration environment with six degrees of freedom. During vertical vibration, the air floating seat drives the piston 630 to vibrate through the rocking member 610. The piston 630 generates a force opposite to the vibration direction under the action of the high-viscosity damping oil to suppress the vibration amplitude, interfere with the vibration frequency, prevent resonance, and effectively reduce the vibration in the vertical direction.

[0050] In summary, the damping device 600 of the shock absorber of the present application can generate a resistance in any vertical and horizontal direction to suppress the amplitude and interfere with the vibration frequency to prevent resonance when vibration occurs; the damping device 600 of the present application has high sensitivity and nonlinear characteristics, and can effectively play a role in both strong earthquake environment and micro-earthquake environment, especially in semiconductor processing and testing, CT, nuclear magnetic resonance and other equipment with moving parts on the load, which greatly shortens the tuning and setting time and can greatly improve the accuracy and efficiency of the equipment.

[0051] In some specific embodiments, the base 200 has a concave cavity with one side open, and a separator 270 is arranged in the concave cavity to form a first chamber 202 and a second chamber 201. Specifically, a connecting boss is arranged in the concave cavity, and the separator 270 is located on the connecting boss and connected by bolts. To improve air tightness, a sealing gasket can be arranged between the separator 270 and the connecting boss.

[0052] In some embodiments, a second air inlet 210 , a second air outlet 220 , and a third air inlet 230 are provided on the outer side of the base 200 through a joint, the second air inlet 210 and the second air outlet 220 are both connected to the second chamber 201 , and the third air inlet 230 is connected to the first chamber 202 .

[0053] In some specific embodiments, Figure 3 As shown, the damping device 600 also includes a first shell 670, which is concave. The first shell 670 covers the partition 270 on one side of the first chamber 202 to form a sliding chamber 640. The first shell 670 has a through hole for avoiding the rocking arm so that the rocking arm can be plugged and connected with the sliding member 620, so that the rocking arm can pass through the sliding member 620 to connect to the piston 630 of the third chamber 650.

[0054] In some embodiments, the damping device 600 further includes a second housing, which is disposed on one side of the partition 270 in the second chamber 201 to form a third chamber 650. The partition 270 is also provided with a through hole for the rocking rod to pass through and move.

[0055] By arranging the sliding chamber 640 and the third chamber 650 in the first chamber 202 and the second chamber 201 respectively, the entire shock absorber can be made more compact, and the situation where the sliding chamber 640 and the third chamber 650 are arranged in the same chamber at the same time and occupy too much inflation space is avoided.

[0056] In some embodiments, the trigger 400 includes an extension rod 420 whose extension length can be adjusted. The end of the extension rod 420 has a trigger head, and the trigger rod of the leveling valve 300 is located on the movement path of the trigger head.

[0057] Specifically, the trigger 400 also includes a fixing base 410 fixed to the connecting plate 110, and the extension rod 420 is a screw. The extension rod 420 is threadedly connected to the fixing base 410. The extension rod 420 can also be adjusted in length along the vertical direction. In order to lock the extension rod 420, a nut 430 is also sleeved on the outside of the extension rod 420.

[0058] The trigger head is plate-shaped and has a large coverage area, so that when the air-floating seat vibrates with a large amplitude in the horizontal direction, it can also move to press against the leveling valve 300 and trigger the leveling valve 300 .

[0059] In some embodiments, the base 200 is further provided with a pressure relief valve 240, and a trigger rod of the pressure relief valve 240 is connected to the air floating seat through a connector 250. Specifically, the trigger rod of the pressure relief valve 240 is connected to the connecting plate 110 of the air floating seat through a chain, and when the air floating seat vibrates in the vertical direction and rises or the leveling valve 300 fails, the height of the air floating seat can be effectively lowered through the pressure relief valve 240.

[0060] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present application.

Claims

1. A shock absorber, characterized in that: include A base, wherein the base has a first chamber and a second chamber, the second chamber is a closed space, and the first chamber is connected to the second chamber; a leveling valve, fixed to the outside of the base, the leveling valve being connected to the second chamber; An air film member, covering the open opening of the first chamber; An air flotation seat, disposed at the opening of the first chamber and connected to the air film member; A damping device is disposed in the first chamber, and the damping device is connected to the air floating seat; A trigger is installed on the air floating seat, and the trigger is used to trigger the leveling valve.

2. The shock absorber according to claim 1, characterized in that: The damping device includes a rocking member and a first damping structure. The rocking member arranged in the vertical direction passes through the air film member and is fixedly connected to the air floating seat. The first damping structure includes a sliding cavity and a sliding member. The sliding member can slide in the sliding cavity. The rocking member passes through the sliding member. The sliding member can follow the rocking member to move in any direction in the horizontal direction.

3. The shock absorber according to claim 2, characterized in that: The gap between the sliding member and the sliding cavity is filled with a damping layer.

4. The shock absorber according to claim 3, characterized in that: The damping layer comprises a high-resilience sponge, and the high-resilience sponge absorbs damping oil.

5. The shock absorber according to any one of claims 2 to 4, characterized in that: The damping device further comprises a second damping structure, wherein the second damping structure comprises a third chamber, wherein the third chamber is filled with damping oil, and the rocking member is connected to a piston disposed in the third chamber.

6. The shock absorber according to claim 5, characterized in that: The base has a concave cavity with one side open, and a partition is arranged in the concave cavity to form the first chamber and the second chamber.

7. The shock absorber according to claim 6, characterized in that: The damping device further comprises a first shell, wherein the first shell cover is arranged on a side of the partition member located in the first chamber to form the sliding chamber, and the first shell has a through hole for avoiding the rocking rod.

8. The shock absorber according to claim 6, characterized in that: The damping device further includes a second shell, which is disposed on a side of the partition member located in the second chamber to form the third chamber.

9. The shock absorber according to claim 1, characterized in that: The trigger comprises an extension rod with adjustable extension length, an end of the extension rod is provided with a trigger head, and the trigger rod of the leveling valve is located on the movement path of the trigger head.

10. The shock absorber according to claim 1, characterized in that: The base is also provided with a pressure relief valve, and a trigger rod of the pressure relief valve is connected to the air floating seat through a connecting piece.

Images