Light source and debugging method of light source
By setting a uniform light member in the laser-driven white light source, the problem that the laser beam is difficult to maintain at the center of the plasma is solved, the uniformity and stability of the white light output is achieved, and the reliability of the light source is improved.
Patent Information
- Application Number
- CN202411478510.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-02-21
Smart Images
Figure CN119495555A_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of light sources, and in particular, relates to a light source and a method for debugging a light source. Background Art
[0002] Laser Driven Light Source (LDLS) is an ultra-bright wide-spectrum light source that uses a high-energy focused laser beam to drive xenon plasma. It is gradually being widely used in various industries due to its high brightness and wide spectral distribution. However, since LDLS uses plasma to absorb laser energy and maintain it in a thermodynamic equilibrium state to maintain high-brightness white light, it is difficult to keep the laser beam at the center of the plasma, which in turn affects the stability of the white light output power. Summary of the invention
[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a light source and a method for debugging the light source, which improves the uniformity of white light output and enhances the reliability and quality of the light source by setting a light homogenizing member between the xenon lamp and the light output member.
[0004] In a first aspect, the present application provides a light source, comprising:
[0005] A light source, characterized in that it comprises:
[0006] Lasers;
[0007] A xenon lamp, used for receiving the laser light output by the laser device and outputting white light;
[0008] A light emitting element, arranged on a side of the xenon lamp away from the laser;
[0009] The light homogenizer is arranged between the xenon lamp and the light outputting member, and is used for making the white light output by the xenon lamp form a light spot with uniform illumination on the light outputting member after passing through the light homogenizer.
[0010] According to the light source of the present application, the white light output by the xenon lamp first passes through the light uniforming member and then is emitted from the light output member. The light uniforming member is used to form a light spot with uniform illumination on the light output member, thereby reducing the uneven light output caused by the black reflection formed by the filament of the xenon lamp itself when outputting white light. The white light is corrected and made uniform before being emitted to the light output member, thereby ensuring that the white light output from the light output member is uniform and stable, thereby improving the stability of the light source and the reliability of use.
[0011] According to one embodiment of the present application, the light homogenizer includes a plurality of first lenses distributed in an array.
[0012] According to one embodiment of the present application, it also includes:
[0013] A debugging structure, on which the laser is arranged, and the debugging structure is used to adjust the position and posture of the laser.
[0014] According to one embodiment of the present application, it also includes:
[0015] A camera module, disposed on a side of the light emitting element away from the xenon lamp, for obtaining image information of the xenon lamp;
[0016] A control module is electrically connected to the camera module and the debugging structure respectively, and is used to adjust the debugging structure based on the image information.
[0017] According to one embodiment of the present application, it also includes:
[0018] A processing display is electrically connected to the camera module and the control module respectively. The processing display comprises an integrated processing module and a display module. The processing module is used to process the image information; and the display module is used to display the image information.
[0019] According to one embodiment of the present application, it also includes:
[0020] A lens assembly, disposed between the laser and the xenon lamp, for irradiating the received laser light into the center between the cathode and the anode of the xenon lamp;
[0021] The reflector is located between the xenon lamp and the light homogenizer, and is used to receive and reflect the white light output by the xenon lamp to the light homogenizer.
[0022] According to one embodiment of the present application, the reflector includes one of a concave reflector, an ellipsoidal reflector and a parabolic reflector.
[0023] According to an embodiment of the present application, the reflective mirror surface of the reflector is coated with an anti-reflection film.
[0024] According to one embodiment of the present application, it also includes:
[0025] The light absorbing member is arranged on a side of the xenon lamp away from the laser and is used for absorbing the laser emitted after passing through the xenon lamp.
[0026] In a second aspect, the present application provides a debugging method applied to the above-mentioned light source, and the debugging method of the light source comprises:
[0027] Acquire multiple sets of image information, where the multiple sets of image information correspond to laser focal points at multiple different positions, and the laser focal points at multiple different positions are acquired by adjusting the position and posture of the laser;
[0028] Determine the spot center position information corresponding to each group of image information;
[0029] Based on the light spot center position information, the target position of the laser is determined.
[0030] According to the light source debugging method of the present application, the target position of the laser is determined by obtaining multiple groups of images corresponding to the laser focus at different positions, so as to adjust the position of the laser so that the actual focus of the laser can coincide with the center of the plasma as much as possible, thereby providing stability in the output of white light.
[0031] According to an embodiment of the present application, determining the target position of the laser based on the spot center position information includes:
[0032] Based on the light spot center position information, obtaining the standard deviation corresponding to each group of image information;
[0033] Based on the standard deviation corresponding to each group of image information, the optimal point of the light spot overlap position is obtained;
[0034] Based on the optimal point of the light spot overlap position, the target debugging posture of the laser is determined.
[0035] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0036] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:
[0037] Figure 1 is a structural schematic diagram of a light homogenizing element provided in an embodiment of the present application;
[0038] Figure 2 is a schematic structural diagram of another light homogenizing element provided in an embodiment of the present application;
[0039] Figure 3 This is one of the structural schematic diagrams of the light source provided in the embodiment of the present application;
[0040] Figure 4 This is the second structural schematic diagram of the light source provided in the embodiment of the present application;
[0041] Figure 5 It is a flow chart of a method for debugging a light source provided in an embodiment of the present application.
[0042] Reference numerals:
[0043] 100. Laser;
[0044] 200, Xenon lamp;
[0045] 300. Light emitting parts;
[0046] 400, light homogenizer; 410, first lens;
[0047] 500, debug structure;
[0048] 600, camera module; 700, processing display;
[0049] 810, lens assembly; 820, reflector; 830, light absorbing element. DETAILED DESCRIPTION
[0050] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0051] Reference below Figure 1-Figure 5 The light source provided in the embodiment of the present application is described, and the light source includes a laser 100, a xenon lamp 200, a light emitting element 300 and a light homogenizing element 400.
[0052] The laser 100 is used to output laser light. The xenon lamp 200 is used to receive the laser light output by the laser 100 and output white light. The light output member 300 is arranged on a side of the xenon lamp 200 away from the laser 100 so as to guide the white light generated by the xenon lamp 200 to a designated position for output. The type of the laser 100 includes but is not limited to a pump laser 100.
[0053] It is understandable that after the xenon lamp 200 is excited to generate plasma, the plasma absorbs the laser light to output the desired white light with a wide spectrum characteristic, and then the white light is emitted from a specified direction to a specified position through the light emitting element 300 .
[0054] The light homogenizer 400 is disposed between the xenon lamp 200 and the light output member 300, and is used to form a light spot with uniform illumination on the light output member 300 after the white light outputted by the xenon lamp 200 passes through the light homogenizer 400. It should be noted that the distance between the light homogenizer 400 and the xenon lamp 200 can be designed according to actual needs, and this embodiment does not impose any specific restrictions on this.
[0055] It can be understood that the white light output by the xenon lamp 200 first passes through the light homogenizer 400 and then is emitted from the light output member 300. The light homogenizer 400 is used to form a light spot with uniform illumination for the light output member 300, thereby reducing the uneven light output caused by the black reflection formed by the filament of the xenon lamp 200 itself when outputting white light. The white light is corrected and made uniform before being emitted to the light output member 300, thereby ensuring that the white light output from the light output member 300 is uniform and stable, thereby improving the stability of the light source and the reliability of use.
[0056] According to the light source provided in the embodiment of the present application, by disposing a light homogenizing member 400 between the xenon lamp 200 and the light emitting member 300, the uniformity of white light output is improved, and the reliability and quality of the light source are enhanced.
[0057] In some embodiments, Figure 1 and Figure 2 As shown, the light homogenizer 400 includes a plurality of first lenses 410 distributed in an array. It should be noted that the shape, size, number and specific arrangement of the first lenses 410 can be designed according to actual needs, and this embodiment does not impose any specific restrictions on this.
[0058] It can be understood that the multiple first lenses 410 distributed in the array perform differentiation and integration on the incident white light, firstly dividing the incident white light into many sub-beams, and then these sub-beams are superimposed on the focal plane of the light output element 300 to form a uniform light spot. That is, the refraction principle and the division and superposition mechanism are used to effectively achieve the uniformity of white light.
[0059] In some embodiments, Figure 1 As shown, the structures of the multiple first lenses 410 are consistent, that is, the optical properties (such as focal length, aperture size) of each first lens 410 are the same, which not only allows the use of batch manufacturing processes (such as photolithography or injection molding, etc.), which helps to reduce production costs and improve manufacturing efficiency, but also ensures the uniformity of the optical properties of the entire light homogenizer 400.
[0060] In other embodiments, Figure 2 As shown, the structure of the multiple first lenses 410 is non-periodic, which helps to reduce or correct specific optical aberrations (such as spherical aberration, chromatic aberration or field curvature, etc.), ensure the uniformity of white light output while reducing the loss of light energy, and provide higher manufacturing and assembly flexibility.
[0061] It should be noted that the geometric centers of the multiple first lenses 410 are randomly distributed away from the optical axis to present a non-periodic state, that is, the boundary and space distribution are arbitrary, and the radius of curvature, cone constant and aspheric coefficient of each microlens are variables. In addition, these variables are all vertical functions that mathematically represent the vertical profile, which conform to the probability distribution function of presenting a certain value probability within the allowable range, ensuring its superiority in terms of uniform light effect and light energy utilization.
[0062] In some embodiments, Figure 4 As shown, the light source further includes a debugging structure 500 , on which the laser 100 is disposed, and the debugging structure 500 is used to adjust the position and posture of the laser 100 .
[0063] It is understandable that the position of the laser 100 is adjusted by the debugging structure 500, thereby changing the focal position of the laser shooting at the plasma to improve the stability and intensity of the output white light power. Exemplarily, the debugging structure 500 includes but is not limited to a multi-axis adjustment platform to achieve the optical path change of the laser in translation (up and down and left and right movement) and rotation (pitch and deflection).
[0064] In some embodiments, Figure 4 As shown, the light source further includes a camera module 600 and a control module (not shown). The camera module 600 is disposed on a side of the light emitting member 300 away from the xenon lamp 200, and is used to obtain image information of the xenon lamp 200. The control module is electrically connected to the camera module 600 and the debugging structure 500, respectively, and is used to adjust the debugging structure 500 based on the image information. The image information includes but is not limited to pictures or videos.
[0065] It is understandable that the camera module 600 is arranged on the side of the light emitting member 300 away from the xenon lamp 200 to capture the image information of the white light emitted by the xenon lamp 200, so as to observe the jitter of the plasma and the parameters such as the distribution and intensity of the white light. Considering that the plasma has a convective plume oscillation effect at high density, that is, it is easy to cause plasma flow and oscillation due to factors such as density gradient, temperature gradient or magnetic field, which affects the stability of the white light output, the control module receives the image information to control the debugging structure 500, and adjusts the plasma maintenance conditions by changing the focal position of the laser to reduce or eliminate the influence of the convective plume oscillation effect on the stability of the white light output, thereby improving the stability and accuracy of the light source.
[0066] In some embodiments, Figure 4 As shown, the light source also includes a processing display 700, which is electrically connected to the camera module 600 and the control module respectively. The processing display 700 includes an integrated processing module and a display module. The processing module is used to process image information; the display module is used to display image information.
[0067] It is understood that the processing module processes the image information obtained by the camera module 600, including but not limited to image enhancement, filtering, feature extraction and data analysis, so as to realize the decision-making process of the control module. The display module is used to display at least one of the image information before processing and the image information after processing, so as to provide a user with an intuitive and easy-to-operate interface for monitoring the output of the light source and the state of the plasma, etc. Exemplarily, the display module can be a touch screen to interact with the operator, such as adjusting parameters in the processing process, etc.
[0068] In some embodiments, Figure 3 and Figure 4As shown, the light source also includes a lens assembly 810 and a reflector 820. The lens assembly 810 is arranged between the laser 100 and the xenon lamp 200, and is used to emit the received laser into the center between the cathode of the xenon lamp 200 and the anode of the xenon lamp 200; the xenon lamp 200 is located between the reflector 820 and the light homogenizer 400, and the reflector 820 is used to receive and reflect the white light output by the xenon lamp 200 to the light homogenizer 400.
[0069] It is understandable that the lens assembly 810 is used to shape the laser to ensure that the laser output by the laser 100 can be accurately focused and guided to the center between the cathode of the xenon lamp 200 and the anode of the xenon lamp 200, so that the focus of the laser and the center of the plasma coincide as much as possible, ensuring that the energy of the laser is absorbed by the plasma as efficiently as possible, thereby outputting stable white light. The reflector 820 is arranged outside the xenon lamp 200 and away from the light output portion of the xenon lamp 200, so that part of the white light generated by the xenon lamp 200 is reflected and then directed to the light homogenizer 400 again, which helps to improve the lighting efficiency and output power of the light source.
[0070] In some embodiments, the lens assembly 810 includes two second lenses spaced apart along the transmission direction of the laser, and the convex surfaces of the two second lenses are arranged opposite to each other. It should be noted that the distance between the two second lenses can be designed according to actual needs, and this embodiment does not impose specific restrictions on this.
[0071] It can be understood that the relative arrangement of the convex surfaces of the two second lenses helps to focus the laser into a small light spot so as to control the light spot and the center of the plasma to coincide as much as possible, which is very important for improving the uniformity of white light output.
[0072] In some embodiments, Figure 3 As shown, the reflector 820 includes one of a concave reflector, an ellipsoidal reflector and a parabolic reflector, so that the white light output by the xenon lamp 200 has different divergence angles, which is used in conjunction with the subsequent fiber coupling design. It should be noted that the specific type of the reflector 820 can be designed according to the actual required light output parameters (such as light output aperture, etc.), and this embodiment does not impose specific restrictions on this.
[0073] In some embodiments, the reflective surface of the reflector 820 is coated with an anti-reflection film to improve the reflection efficiency of white light and provide brightness and uniformity of the light source.
[0074] It should be noted that the anti-reflection film, also known as a high-reflection film, is a film used to improve the reflectivity of optical components. It uses the principle of constructive interference generated when light is reflected on the upper and lower surfaces of the film to enhance the reflected light.
[0075] In some embodiments, Figure 3As shown, the light source further includes a light absorbing member 830 , which is disposed on a side of the xenon lamp 200 away from the laser 100 , and is used to absorb the laser light emitted after passing through the xenon lamp 200 .
[0076] It can be understood that the light absorbing element 830 and the laser 100 are respectively arranged on both sides of the xenon lamp 200 to effectively absorb the part of the laser that is not absorbed by the xenon lamp 200, thereby reducing the impact of the heat of the laser on the plasma, improving the stability of the white light power output by the xenon lamp 200, and reducing the potential damage or interference of excess laser to other components of the light source, thereby improving the brightness and stability of the light source.
[0077] The embodiment of the present application also provides a debugging method applied to the above-mentioned light source.
[0078] like Figure 5 As shown, the light source debugging method includes steps 910 , 920 and 930 .
[0079] Step 910: Acquire multiple sets of image information, which correspond to laser focal points at multiple different positions, and the laser focal points at multiple different positions are acquired by adjusting the position of the laser 100. It should be noted that the number of laser focal points at different positions can be designed according to actual needs, and this embodiment does not impose any specific restrictions on this.
[0080] It is understandable that the laser 100 is debugged at different positions by the debugging structure 500 to obtain image information corresponding to the laser 100 at different positions. Exemplarily, the image information includes a video of a preset duration. It should be noted that the preset duration can be designed according to actual needs, and this embodiment does not impose specific restrictions on this.
[0081] Step 920: Determine the spot center position information corresponding to each group of image information.
[0082] It is understandable that, considering that the plasma may vibrate, each set of captured image information is analyzed to determine the center position of the light spot in each frame. It should be noted that the time period can be designed according to actual needs.
[0083] Step 930: Determine the target position of the laser 100 based on the spot center position information.
[0084] It can be understood that the target position of the laser 100 is calculated by the processing module based on the information of the center position of the light spot, and the debugging structure 500 is controlled to make the focal position of the light spot coincide with the optimal center position of the light spot, thereby reducing the amplitude of plasma jitter as much as possible and providing stability in the output of white light.
[0085] According to the debugging method of the light source provided in the embodiment of the present application, the target position of the laser 100 is determined by obtaining multiple groups of images corresponding to the laser focus at different positions, so as to adjust the position of the laser 100 so that the actual focus of the laser can coincide with the center of the plasma as much as possible, thereby providing stability in the output of white light.
[0086] In some embodiments, step 930 determines the target position of the laser 100 based on the spot center position information, including:
[0087] Step 931: based on the spot center position information, obtain the standard deviation corresponding to each group of image information;
[0088] Step 932: based on the standard deviation corresponding to each group of image information, obtain the optimal point of the light spot overlap position;
[0089] Step 933: Determine the target debugging posture of the laser 100 based on the optimal point of the light spot overlap position.
[0090] It can be understood that based on the multiple spot center position information corresponding to each set of image information, the standard deviation corresponding to each set of image information is calculated. The standard deviation is usually a statistic used to measure the degree of discreteness of data distribution. A lower standard deviation indicates that the plasma jitter is smaller during this period of time, and the output stability of white light is better. Therefore, by comparing the sizes of multiple standard deviations, the spot center position corresponding to the minimum value in the multiple standard deviations can be selected, which can be regarded as the best point of the spot overlap position, that is, the focal position corresponding to the image information corresponding to the minimum value is the target focal position. Therefore, the position of the laser 100 is adjusted by controlling the debugging structure 500 until the laser focus emitted by the laser 100 is at the target focal position, so that the laser energy is always in the most stable position to maintain the plasma, so as to achieve uniformity and stability of white light output.
[0091] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.
[0092] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0093] In the description of this application, "first feature" or "second feature" may include one or more of the features.
[0094] In the description of the present application, “plurality” means two or more.
[0095] In the description of the present application, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.
[0096] In the description of the present application, “above”, “over” and “above” a first feature to a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.
[0097] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0098] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.
Claims
1. A light source, characterized in that: include: Laser (100); A xenon lamp (200) for receiving the laser light output by the laser (100) and outputting white light; A light emitting element (300) is arranged on a side of the xenon lamp (200) away from the laser (100); The light homogenizing member (400) is arranged between the xenon lamp (200) and the light output member (300) and is used to enable the white light output by the xenon lamp (200) to form a light spot with uniform illumination on the light output member (300) after passing through the light homogenizing member (400).
2. The light source according to claim 1, characterized in that The light homogenizer (400) comprises a plurality of first lenses (410) distributed in an array.
3. The light source according to claim 2, characterized in that Also includes: A debugging structure (500), the laser (100) being arranged on the debugging structure (500), and the debugging structure (500) being used to adjust the position and posture of the laser (100).
4. The light source according to claim 3, characterized in that Also includes: A camera module (600), arranged on a side of the light emitting element (300) away from the xenon lamp (200), and used for obtaining image information of the xenon lamp (200); A control module is electrically connected to the camera module (600) and the debugging structure (500) respectively, and is used to adjust the debugging structure (500) based on the image information.
5. The light source according to claim 4, characterized in that Also includes: A processing display (700) is electrically connected to the camera module (600) and the control module respectively, and the processing display (700) comprises an integrated processing module and a display module, wherein the processing module is used to process the image information; and the display module is used to display the image information.
6. The light source according to any one of claims 1 to 5, characterized in that: Also includes: a lens assembly (810) disposed between the laser (100) and the xenon lamp (200) and used for irradiating the received laser light into the center between the cathode of the xenon lamp (200) and the anode of the xenon lamp (200); A reflector (820), wherein the xenon lamp (200) is located between the reflector (820) and the light homogenizer (400), and is used to receive and reflect the white light output by the xenon lamp (200) to the light homogenizer (400).
7. The light source according to claim 6, characterized in that The reflector (820) includes one of a concave reflector, an ellipsoidal reflector and a parabolic reflector.
8. The light source according to claim 6, characterized in that The reflective mirror surface of the reflector (820) is coated with a reflection enhancement film.
9. The light source according to any one of claims 1 to 5, characterized in that: Also includes: The light absorbing member (830) is arranged on a side of the xenon lamp (200) away from the laser (100) and is used to absorb the laser light emitted after passing through the xenon lamp (200).
10. A debugging method for a light source as claimed in any one of claims 1 to 9, characterized in that: include: Acquiring multiple sets of image information, the multiple sets of image information corresponding to laser focal points at multiple different positions, the laser focal points at multiple different positions being acquired by adjusting the position and posture of the laser (100); Determine the spot center position information corresponding to each group of image information; Based on the light spot center position information, the target position and posture of the laser (100) is determined.
11. The light source debugging method according to claim 10, characterized in that: Determining the target position of the laser (100) based on the light spot center position information comprises: Based on the light spot center position information, obtaining the standard deviation corresponding to each group of image information; Based on the standard deviation corresponding to each group of image information, the optimal point of the light spot overlap position is obtained; Based on the optimal point of the light spot overlap position, the target debugging posture of the laser (100) is determined.