Photoresist filtering device capable of automatically cleaning filtering plate

Abstract

The invention discloses a photoresist filtering device capable of automatically cleaning a filtering plate. The photoresist filtering device comprises a filtering box, a plurality of supporting legs are installed at the lower end of the filtering box, a liquid inlet pipe is installed at the upper end of the filtering box, a liquid outlet pipe is installed at the lower end of the filtering box, a filtering mechanism is installed on the filtering box, and a cleaning mechanism is arranged on one side of the filtering box; the filtering mechanism comprises a cleaning box, a supporting rod, an inlet / outlet, a filtering plate and a driving frame; and the cleaning mechanism comprises a solution box, a sprayer, a water sprayer and a dryer. The device has the beneficial effects that the double-layer filter plate is arranged, photoresist can be filtered through the other filter plate when one filter plate is cleaned, the working efficiency can be improved, the device can automatically replace the filter plates, the filter plates are washed through photoresist removing liquid, the photoresist and impurities can be conveniently washed away, and after washing is completed, the photoresist can be removed through the photoresist removing liquid. And the photoresist is washed with clear water and then dried, so that the quality of the photoresist can be ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of photoresist processing equipment, and more specifically to a photoresist filtering device capable of automatically cleaning a filter plate. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that is resistant to corrosion and whose solubility changes when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. There will be more impurities inside the photoresist during manufacturing, so it needs to be filtered. After a period of time, there will be more impurities on the filter screen, which needs to be cleaned.

[0003] In the prior art, when cleaning the filter, it is generally necessary to remove the filter from the filter box for cleaning, but this will increase the workload of the staff, the degree of automation is low, and there is some glue on the filter for filtering the photoresist, which will stick impurities to the filter, making it inconvenient to clean.

[0004] It should be noted that the above contents belong to the technical knowledge of the inventor and do not necessarily constitute prior art. Summary of the invention

[0005] The purpose of the present invention is to solve the above problems and to design a photoresist filtering device which can automatically clean the filter plate.

[0006] The technical solution of the present invention to achieve the above-mentioned purpose is a photoresist filtering device capable of automatically cleaning a filter plate, comprising a filter box, a plurality of supporting legs are installed at the lower end of the filter box, a liquid inlet pipe is installed at the upper end of the filter box, a liquid outlet pipe is installed at the lower end of the filter box, a filtering mechanism is installed on the filter box, and a cleaning mechanism is provided on one side of the filter box; The filtering mechanism comprises a cleaning box installed on one side of the upper end of the filter box, a plurality of supporting rods are installed on one side of the lower end of the cleaning box, an inlet and outlet are provided between the cleaning box and the filter box, two filter plates are provided in the filter box, the two filter plates are distributed up and down in the cleaning box, the filter plates can be moved into the filter box through the inlet and outlet, a driving frame is installed in the cleaning box, the driving frame can drive the filter plates to move between the cleaning box and the filter box, and the two filter plates can also exchange positions up and down when moving between the cleaning box and the filter box; The cleaning mechanism includes a solution box installed on the ground at one side of the cleaning box, a degumming solution is placed in the solution box, a sprayer is installed at the upper end of the cleaning box, the inlet end of the sprayer extends into the solution box, the outlet end of the sprayer extends into the cleaning box, a water sprayer is installed at the upper end of the cleaning box, the outlet end of the water sprayer extends into the cleaning box, and a dryer installed on the cleaning box is provided on one side of the water sprayer.

[0007] Furthermore, the filter plate includes a first U-shaped frame and a second U-shaped frame, connecting sleeves are installed on both sides of the first U-shaped frame, connecting rods are installed on both sides of the second U-shaped frame, one end of the connecting rod can extend into the connecting sleeve, a connecting plate is installed on one side of the first U-shaped frame, the connecting rod and the connecting plate are connected by a connecting spring, an inclined filter screen is installed on the inner side of the first U-shaped frame and the second U-shaped frame, retractable limiting wheels are installed on both sides of the first U-shaped frame and the second U-shaped frame, a first limiting groove is opened on both sides of the cleaning box, and a first A second limiting groove is provided below the limiting groove, a third limiting groove is opened on both sides of the filter box, a fourth limiting groove is provided below the third limiting groove, the first limiting groove and the third limiting groove are connected, the second limiting groove and the fourth limiting groove are connected, the fourth limiting groove is shallower than the third limiting groove, the depths of the first limiting groove, the second limiting groove and the third limiting groove are the same, an inclined block is installed at the connection position of the second limiting groove and the fourth limiting groove, the limiting wheel can move between the first limiting groove, the second limiting groove, the third limiting groove and the fourth limiting groove, and a pulling handle is installed on the surface of one side of the first U-shaped frame.

[0008] Furthermore, the driving frame includes a servo motor installed on one side of the upper end of the filter box, the rotating end of the servo motor is connected to a rotating screw through a coupling, one end of the rotating screw is installed with a screw bearing, the screw bearing is installed on the inner surface of the filter box, the outer side of the rotating screw is connected to a moving platform through a thread, pushing plates are installed on both sides of the lower end of the moving platform, the pushing plate can push the filter box, a first spring ejector is installed at the lower end of the moving platform, a pulley is installed at the lower end of the first spring ejector, an inclined surface is provided at the front end of the pulling handle, the pulley can be moved to the inside of the pulling handle, a guide block is installed at the upper end of the moving platform, a guide groove is opened at the upper end of the filter box, and the upper end of the guide block extends into the guide groove.

[0009] Furthermore, two through openings are provided between the first limit groove and the second limit groove, a rotating plate is hinged at one end of the through opening, a fixed plate installed in the through opening is provided below the rotating plate, the fixed plate and the rotating plate are connected by a telescopic spring, an intercepting plate is installed on one side of the upper end of the through opening, the limiting wheel can move from the first limit groove to the second limit groove through the through opening, two connecting openings are provided between the third limit groove and the fourth limit groove, the limiting wheel can move from the fourth limit groove to the third limit groove through the connecting opening, two arc grooves are opened at the lower end of the fourth limit groove, the arc grooves are located below the connecting opening, two limiting blocks are installed at the lower end of the third limit groove, the limiting blocks are located on one side of the connecting opening, a pushing frame is installed in the filter box, and the pushing frame can push the filter box upward.

[0010] Furthermore, the pushing frame includes eccentric wheels located on both sides below the filter box, a rotating shaft is installed on one side surface of the eccentric wheel, first rolling bearings are installed on both side surfaces of the filter box, one end of the rotating shaft passes through the first rolling bearing and extends to the outside of the filter box, a first sprocket is installed on the end of the rotating shaft located on the outside of the filter box, second rolling bearings are installed on both side surfaces of the cleaning box, a rotating rod is installed through the second rolling bearing, a second sprocket is installed on the end of the rotating rod located on the outside of the cleaning box, the first sprocket and the second sprocket are connected by a transmission chain, a first gear is installed on the end of the rotating rod located on the inside of the cleaning box, and a first movable rack is installed on the upper end of the first U-shaped frame, and the first movable rack can mesh with the first gear.

[0011] Furthermore, a second gear is installed at one end of the rotating rod located on the outside of the cleaning box, a second movable rack is meshed with one end of the second gear, a limiting slide is opened on one side of the second movable rack, a limiting slide is provided in the limiting slide, one end of the limiting bar is installed on the outside of the cleaning box, and a reset plate installed on the cleaning box is provided on one side of the second movable rack, and the reset plate and the second movable rack are connected by a reset spring.

[0012] Furthermore, the limiting wheel includes a second spring pin installed on the two side surfaces of the first U-shaped frame and the second U-shaped frame, a moving block is installed on the telescopic end of the second spring pin, a first universal ball is installed on the lower end of the moving block, and a second universal ball is installed on the side surface of the moving block away from the first U-shaped frame and the second U-shaped frame.

[0013] Furthermore, the dryer includes a heating box installed at the upper end of the cleaning box, a blower is installed at the upper end of the heating box, the blower outlet end extends into the heating box, a plurality of partitions are installed in the heating box, a heater is installed in the heating box, an air outlet pipe is installed at the lower end of the heating box, and the lower end of the air outlet pipe extends into the cleaning box.

[0014] Furthermore, the wind drawn by the blower is filtered clean air, the water sprayed by the sprinkler is purified clean water, liquid outlets are opened on both sides of the lower end of the cleaning box, a baffle is provided between the two liquid outlets, and a collection box placed on the ground is provided below the liquid outlet.

[0015] Furthermore, a avoidance opening is provided on one side of the upper end of the first U-shaped frame, and interception rods are installed on both sides of the upper end of the cleaning box. The interception rods can intercept the second U-shaped frame, and the avoidance opening can avoid the interception rods.

[0016] The beneficial effects of the present invention are as follows: a double-layer filter plate is provided, and when one filter plate is being cleaned, the photoresist can be filtered through the other filter plate, which can improve work efficiency; the two filter plates can be exchanged up and down, and when the filter plate is cleaning the photoresist, the photoresist can be prevented from splashing out from the inlet and outlet; the device can automatically replace the filter plate, and rinse the filter plate with a degumming liquid, which can be convenient for rinsing away the glue and impurities; after rinsing, it is rinsed with clean water, and then dried, thereby ensuring the quality of the photoresist; and no staff participation is required throughout the process, which reduces the labor intensity of the staff and improves the degree of automation; The filter plate can be separated from the middle and is equipped with an inclined filter screen, which can make the impurities fall from the middle of the filter plate when the filter plate is flushed, preventing the impurities from accumulating on the filter plate; After one filter plate is moved out of the filter box, another filter plate can be pushed upward through gear transmission, thereby preventing photoresist from splashing out. When one filter plate is cleaned, it can be moved to the bottom of another filter plate, which makes it easier to replace. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a photoresist filtering device capable of automatically cleaning a filter plate according to the present invention; Figure 2 yes Figure 1 A partial enlarged view of the middle A; Figure 3 yes Figure 1 A partial enlarged view of point B in the middle; Figure 4 yes Figure 1 A partial enlarged view of point C in the middle; Figure 5 It is a partial cross-sectional schematic diagram of a photoresist filtering device capable of automatically cleaning a filter plate according to the present invention, viewed from the side; Figure 6 is a schematic diagram of the connection relationship between the first sprocket and the second sprocket of the present invention; Figure 7 It is a partial schematic diagram of the pushing frame of the present invention; Figure 8 is a schematic diagram of the connection relationship between the first U-shaped frame and the second U-shaped frame of the present invention; Fig. 9 is a schematic diagram of the connection relationship between the third limiting groove and the fourth limiting groove of the present invention; In the figure, 1, filter box; 2, support leg; 3, liquid inlet pipe; 4, liquid outlet pipe; 5, cleaning box; 6, support rod; 7, inlet and outlet; 8, filter plate; 9, drive frame; 10, solution box; 11, sprayer; 12, sprinkler; 13, dryer; 14, first U-shaped frame; 15, second U-shaped frame; 16, connecting sleeve; 17, connecting rod; 18, connecting plate; 19, connecting spring; 20, tilting Filter; 21, limit wheel; 22, first limit slot; 23, second limit slot; 24, third limit slot; 25, fourth limit slot; 26, tilt block; 27, pull handle; 28, servo motor; 29, rotating screw; 30, screw bearing; 31, moving platform; 32, push plate; 33, first spring ejector; 34, pulley; 35, guide block; 36, guide slot; 37, through port; 38, rotating plate; 39. Fixed plate; 40. Telescopic spring; 41. Interceptor plate; 42. Connecting port; 43. Arc groove; 44. Stop block; 45. Pushing frame; 46. Eccentric wheel; 47. Rotating shaft; 48. First rolling bearing; 49. First sprocket; 50. Second rolling bearing; 51. Rotating rod; 52. Second sprocket; 53. Transmission chain; 54. First gear; 55. First moving rack; 56. Second gear; 57 , the second movable rack; 58, the limiting slide; 59, the limiting strip; 60, the reset plate; 61, the reset spring; 62, the second spring ejector; 63, the moving block; 64, the first universal ball; 65, the second universal ball; 66, the heating box; 67, the blower; 68, the partition; 69, the heater; 70, the air outlet; 71, the liquid outlet; 72, the baffle; 73, the collection box; 74, the avoidance; 75, the intercepting rod. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0020] The present invention provides Figure 1-9 The photoresist filtering device shown in the figure can automatically clean the filter plate, comprising a filter box 1, a plurality of supporting legs 2 are installed at the lower end of the filter box 1, a liquid inlet pipe 3 is installed at the upper end of the filter box 1, a liquid outlet pipe 4 is installed at the lower end of the filter box 1, a filtering mechanism is installed on the filter box 1, and a cleaning mechanism is provided on one side of the filter box 1; the filtering mechanism comprises a cleaning box 5 installed on one side of the upper end of the filter box 1, a plurality of supporting rods 6 are installed on one side of the lower end of the cleaning box 5, an inlet and outlet 7 is provided between the cleaning box 5 and the filter box 1, two filter plates 8 are provided in the filter box 1, and the two filter plates 8 are distributed up and down in the cleaning box 5, and the filter plates 8 can be moved into the filter box 1 through the inlet and outlet 7, A driving frame 9 is installed in the cleaning box 5, and the driving frame 9 can drive the filter plate 8 to move between the cleaning box 5 and the filter box 1. The two filter plates 8 can also exchange positions up and down when moving between the cleaning box 5 and the filter box 1; the cleaning mechanism includes a solution box 10 installed on the ground at one side of the cleaning box 5, and a degumming liquid is placed in the solution box 10. A sprayer 11 is installed at the upper end of the cleaning box 5, and the inlet end of the sprayer 11 extends into the solution box 10, and the outlet end of the sprayer 11 extends into the cleaning box 5. A water sprayer 12 is installed at the upper end of the cleaning box 5, and the outlet end of the water sprayer 12 extends into the cleaning box 5. A dryer 13 installed on the cleaning box 5 is provided on one side of the water sprayer 12; The process of filtering the photoresist by this device is as follows: under normal conditions, one filter plate 8 is located in the filter box 1, the other filter plate 8 is located in the cleaning box 5, and the first filter plate 8 is located above the second filter plate 8. The photoresist is added to the filter box 1 through the liquid inlet pipe 3, and after being filtered by the filter plate 8, it is discharged through the liquid outlet pipe 3. After a period of time, the filter plate 8 is full of impurities. At this time, the feeding is stopped first, and the second filter plate 8 is moved to the filter box 1 through the driving frame 9, and the second filter plate 8 is located directly below the first filter plate 8, and then the first filter plate 8 is pulled out of the filter box 1 through the driving frame 9. After being pulled out, the second filter plate 8 is moved upward, and then material is added through the liquid inlet pipe 8, and filtering is continued. The driving frame 9 pulls the first filter plate 8 to the top of the sprayer 11, and the sprayer 11 can spray the degumming liquid in the solution tank 10 onto the top of the filter plate 8, so that the glue can be dissolved and the impurities can be cleaned. After cleaning, the first filter plate 8 is moved downward, and then moved to the top of the water sprayer 12, and then the filter plate 8 can be rinsed by the water sprayer 12, and then the filter plate 8 is dried by the dryer 13. After waiting for a period of time, the above process is repeated, and the filter plate 8 is replaced again.

[0021] Refer to the instruction manual Figure 1 , Instruction Manual Figure 2 And the instruction manual Figure 5, the filter plate 8 includes a first C-shaped frame 14 and a second C-shaped frame 15. Connecting sleeves 16 are installed on both side surfaces of the first C-shaped frame 14. Connecting rods 17 are installed on both side surfaces of the second C-shaped frame 15. One end of the connecting rod 17 can extend into the connecting sleeve 16. A connecting plate 18 is installed on one side of the first C-shaped frame 14. The connecting rod 17 and the connecting plate 18 are connected by a connecting spring 19. An inclined filter screen 20 is installed inside the first C-shaped frame 14 and the second C-shaped frame 15. Retractable limiting wheels 21 are installed on both side surfaces of the first C-shaped frame 14 and the second C-shaped frame 15. First limiting grooves 22 are formed on both sides inside the cleaning box 5. A second limiting groove 23 is provided below the first limiting groove 22. Third limiting grooves 24 are formed on both sides inside the filter box 1. A fourth limiting groove 25 is provided below the third limiting groove 24. The first limiting groove 22 communicates with the third limiting groove 24. The second limiting groove 23 communicates with the fourth limiting groove 25. The fourth limiting groove 25 is shallower than the third limiting groove 24 in depth. The first limiting groove 22, the second limiting groove 23, and the third limiting groove 24 have the same depth. An inclined block 26 is installed at the connecting position of the second limiting groove 23 and the fourth limiting groove 25. The limiting wheel 21 can move between the first limiting groove 22, the second limiting groove 23, the third limiting groove 24, and the fourth limiting groove 25. A pulling handle 27 is installed on one side surface of the first C-shaped frame 14. The driving frame 9 can grab the pulling wrench 27 and then drive the first C-shaped frame 14 to move. When the first C-shaped frame 14 moves, the second C-shaped frame 15 can be pulled through the connecting rod 17, the connecting spring 19, and the connecting plate 18, thereby enabling the filter plate 8 to move. The movement direction of the filter plate 8 can be ensured by the limiting wheel 21 and the first limiting groove 22, the second limiting groove 23, the third limiting groove 24, and the fourth limiting groove 25. When the limiting wheel 21 enters the fourth limiting groove 25 from the second limiting groove 23, the limiting wheel 21 can be compressed under the action of the inclined block 26.

[0022] Refer to the attached drawings of the specification Figure 1 , the attached drawings of the specification Figure 2 and the attached drawings of the specification Figure 3 , the driving frame 9 includes a servo motor 28 installed on one side of the upper end inside the filter box 1. The rotating end of the servo motor 28 is connected by a coupling to a rotating screw 29. One end of the rotating screw 29 is installed with a screw bearing 30. The screw bearing 30 is installed on the inner side surface of the filter box 1. A moving table 31 is threadedly connected to the outside of the rotating screw 29. Push plates 32 are installed on both sides of the lower end of the moving table 31. The push plates 32 can push the filter box 1. A first spring ejector pin 33 is installed at the lower end of the moving table 31. A pulley 34 is installed at the lower end of the first spring ejector pin 33. The front end of the pulling handle 27 is provided with an inclined surface. The pulley 34 can move to the inside of the pulling handle 27. A guiding block 35 is installed at the upper end of the moving table 31. A guiding groove 36 is formed at the upper end inside the filter box 1. The upper end of the guiding block 35 extends into the guiding groove 36; The process of driving the filter plate 8 to move by the driving frame 9 is as follows: the servo motor 28 is started to rotate, and the servo motor 28 can drive the rotating screw 29 to rotate through the coupling. The rotating screw 29 and the moving platform 31 are connected by threads, so that the moving platform 31 can be moved. By changing the forward and reverse rotation of the servo motor 28, the moving platform 31 can be reciprocated. The guide groove 36 and the guide block 35 can ensure the moving direction of the moving platform 31. When the moving platform 31 moves toward the direction close to the filter box 1, the push plate 32 can be used to push the lower The filter plate 8 is pushed into the filter box 1. When the lower filter plate 8 enters the filter plate 1, the pulley 35 can contact the pulling handle 27 on the upper filter plate 8, and under the action of the inclined surface, the pulley 34 can move upward and compress the first spring ejector pin 33. When the pulley 35 moves to the inside of the pulling handle 27, the pulley 35 can move downward under the elastic force of the first spring ejector pin 33. Then, when the moving platform 31 moves in the opposite direction, the upper filter plate 8 can be pulled by pulling the handle 27.

[0023] Refer to the instruction manual Figure 1 , Instruction Manual Figure 2 And the instruction manual Figure 4 , two through openings 37 are provided between the first limiting groove 22 and the second limiting groove 23, one end of the through opening 37 is hinged with a rotating plate 38, a fixed plate 39 installed in the through opening 37 is provided below the rotating plate 38, the fixed plate 39 and the rotating plate 38 are connected by a telescopic spring 40, and an intercepting plate 41 is installed on one side of the upper end of the through opening 37, the limiting wheel 21 can move from the first limiting groove 22 to the second limiting groove 23 through the through opening 37, two connecting openings 42 are provided between the third limiting groove 24 and the fourth limiting groove 25, the limiting wheel 21 can move from the fourth limiting groove 25 to the third limiting groove 24 from the connecting opening 42, the lower end of the fourth limiting groove 25 is provided with two arc grooves 43, the arc groove 43 is located below the connecting opening 42, and two limiting blocks 44 are installed at the lower end of the third limiting groove 24, and the limiting blocks 44 are located on one side of the connecting opening 42, and a pushing frame 45 is installed in the filter box 1, and the pushing frame 45 can push the filter box 1 upward; The process of moving the filter plate 8 is as follows: when the filter plate 8 is located at the upper end of the filter box 1, the limit block 44 can limit the limit wheel 21, thereby preventing the filter plate 8 from shaking. When the filter plate 8 moves from the filter box 1 to the cleaning box 5, the limit wheel 21 can move from the third limit groove 24 to the first limit groove 22. When the limit wheel 21 moves to the rotating plate 38, the rotating plate 38 can be pushed downward, and the intercepting plate 41 can support the rotating plate 38 so that the rotating plate 38 rotates and avoids the limit wheel 21. When the rotating plate 38 rotates, the telescopic spring 40 can be compressed. When the limit wheel 21 passes through the rotating plate 38, it can return to its original position under the elastic force of the telescopic spring 40. At this time, the filter plate 8 can be rinsed. After rinsing, the filter plate 8 is pushed in the direction close to the filter box 1. When the limiting wheel 21 moves to the through port 37, the limiting wheel 21 can fall downward and move into the second limiting groove 23. After the filter plate 8 moves downward, the pulley 34 can move to the outside of the pulling handle 27. When the filter plate 8 is pushed into the filter box 1 by the driving frame 9, the limiting wheel 21 can move from the second limiting groove 23 to the fourth limiting groove 25, and the inclined block 26 can compress the limiting wheel 21. When the filter plate 8 enters the filter box 1, the arc groove 43 can limit the limiting wheel 21 to prevent the filter plate 8 from shaking. Then, the filter plate 8 is pushed upward by the pushing frame 45, and the limiting wheel 21 can move into the third limiting groove 24 through the connecting port 42. Then the limiting wheel 21 is extended, so that the limiting wheel 21 is stuck in the third limiting groove 24, thereby completing the conversion of the filter plate 8.

[0024] Refer to the instruction manual Figure 1 , Instruction Manual Figure 5 , Instruction Manual Figure 6 And the instruction manual Figure 7 The pushing frame 45 includes an eccentric wheel 46 located on both sides below the filter box 1, a rotating shaft 47 is installed on one side surface of the eccentric wheel 46, first rolling bearings 48 are installed on both sides of the filter box 1, one end of the rotating shaft 47 passes through the first rolling bearing 48 and extends to the outside of the filter box 1, and a first sprocket 49 is installed on one end of the rotating shaft 47 located on the outside of the filter box 1, and second rolling bearings 50 are installed on both sides of the cleaning box 5. A rotating rod 51 is installed through the second rolling bearing 50, and a second sprocket 52 is installed on one end of the rotating rod 51 located on the outside of the cleaning box 5. The first sprocket 49 and the second sprocket 52 are connected by a transmission chain 53, and a first gear 54 is installed on one end of the rotating rod 51 located on the inner side of the cleaning box 5, and a first movable rack 55 is installed on the upper end of the first U-shaped frame 14, and the first movable rack 55 can mesh with the first gear 54; The process of the pushing frame 45 pushing the filter plate 8 is as follows: when the upper filter plate 8 moves to the outside of the filter box 1, the first movable rack 55 can be meshed with the first gear 54, which can drive the first gear 54, the rotating rod 51, and the second sprocket 52 to rotate. The second sprocket 52 and the first sprocket 49 are meshed through the transmission chain 53, which can drive the first sprocket 49, the rotating shaft 47, and the eccentric wheel 46 to rotate. When the eccentric wheel 46 rotates, the filter plate 8 can be pushed upward.

[0025] Refer to the instruction manual Figure 6 , a second gear 56 is installed at one end of the rotating rod 51 located outside the cleaning box 5, and a second movable rack 57 is meshed at one end of the second gear 56. A limiting slide 58 is opened on one side of the second movable rack 57, and a limiting strip 59 is arranged in the limiting slide 58. One end of the limiting strip 59 is installed on the outside of the cleaning box 5, and a reset plate 60 installed on the cleaning box 5 is arranged on one side of the second movable rack 57. The reset plate 60 and the second movable rack 57 are connected by a reset spring 61. When the rotating rod 51 rotates, the second gear 56 can be driven to rotate, and the second gear 56 and the second movable rack 57 are meshed, so that the second movable rack 57 can move and stretch the reset spring 61. The limiting strip 59 and the limiting slide 58 can ensure the moving direction of the second movable rack 57. When the first movable rack 55 and the first gear 54 are separated, the second movable rack 57 can be returned to its original position under the pulling force of the reset spring 61, and the eccentric wheel 46 is rotated back to its original position under the action of the gear transmission.

[0026] Refer to the instruction manual Figure 5 The limiting wheel 21 includes a second spring pin 62 installed on the two side surfaces of the first U-shaped frame 14 and the second U-shaped frame 15, a moving block 63 is installed on the telescopic end of the second spring pin 62, a first universal ball 64 is installed on the lower end of the moving block 63, and a second universal ball 65 is installed on the side surface of the moving block 63 away from the first U-shaped frame 14 and the second U-shaped frame 15. The moving block 63 can be extended and retracted through the first and second spring pins 62, and the friction force when the limiting wheel 21 moves can be reduced through the first universal ball 64 and the second universal ball 65.

[0027] Refer to the instruction manual Figure 1The dryer 13 includes a heating box 66 installed at the upper end of the cleaning box 5, a blower 67 is installed at the upper end of the heating box 66, and the outlet end of the blower 67 extends into the heating box 66. A plurality of partitions 68 are installed in the heating box 66, a heater 69 is installed in the heating box 66, and an air outlet pipe 70 is installed at the lower end of the heating box 66. The lower end of the air outlet pipe 70 extends into the cleaning box 5. The blower 67 can draw external wind into the heating box 66. After the wind is heated by the heater 69 in the heating box 66, it can be discharged through the air outlet pipe 70 and dry the filter plate 8. The partition 68 can prolong the flow time of the wind in the heating box 66, which can facilitate sufficient heating of the wind.

[0028] Refer to the instruction manual Figure 1 The wind drawn by the blower 67 is filtered clean air, and the water sprayed by the sprinkler 12 is purified clean water, which can ensure the quality of the photoresist. Liquid outlets 71 are opened on both sides of the lower end of the cleaning box 5, and a baffle 72 is provided between the two liquid outlets 71. A collecting box 73 placed on the ground is provided below the liquid outlet 71. The liquid can be discharged into the collecting box 73 through the liquid outlet 71 for collection, and the baffle 72 can block the two liquids to prevent mixing.

[0029] Refer to the instruction manual Figure 1 And the instruction manual Figure 2 A avoidance opening 74 is provided on one side of the upper end of the first U-shaped frame 14, and interception rods 75 are installed on both sides of the upper end of the cleaning box 5. The interception rods 75 can intercept the second U-shaped frame 15, and the avoidance opening 74 can avoid the interception rods 75. After the first U-shaped frame 14 passes through the interception rods 75, the interception rods 75 can intercept the second U-shaped frame 15, and then when the first U-shaped frame 14 continues to move, the second U-shaped frame 15 will not move, which can facilitate the separation of the first U-shaped frame 14 and the second U-shaped frame 15, and facilitate the discharge of impurities. When the first U-shaped frame 14 moves in the opposite direction, the first U-shaped frame 14 can be pulled back to its original position by the connecting spring 19.

[0030] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein; and these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A photoresist filtering device capable of automatically cleaning a filter plate, comprising a filter box (1), a plurality of support legs (2) being mounted at the lower end of the filter box (1), a liquid inlet pipe (3) being mounted at the upper end of the filter box (1), and a liquid outlet pipe (4) being mounted at the lower end of the filter box (1), characterized in that: A filtering mechanism is installed on the filter box (1), and a cleaning mechanism is provided on one side of the filter box (1); The filtering mechanism comprises a cleaning box (5) mounted on one side of the upper end of the filter box (1); a plurality of supporting rods (6) are mounted on one side of the lower end of the cleaning box (5); an inlet and outlet (7) are arranged between the cleaning box (5) and the filter box (1); two filter plates (8) are arranged in the filter box (1); the two filter plates (8) are arranged vertically in the cleaning box (5); the filter plates (8) can be moved into the filter box (1) through the inlet and outlet (7); a driving frame (9) is mounted in the cleaning box (5); the driving frame (9) can drive the filter plates (8) to move between the cleaning box (5) and the filter box (1); and the two filter plates (8) can also exchange positions vertically when moving between the cleaning box (5) and the filter box (1); The cleaning mechanism comprises a solution tank (10) mounted on the ground at one side of the cleaning box (5), a degumming solution being placed in the solution tank (10), a sprayer (11) being mounted at the upper end of the cleaning box (5), an inlet end of the sprayer (11) extending into the solution tank (10), an outlet end of the sprayer (11) extending into the cleaning box (5), a water sprayer (12) being mounted at the upper end of the cleaning box (5), an outlet end of the water sprayer (12) extending into the cleaning box (5), and a dryer (13) mounted on the cleaning box (5) being provided at one side of the water sprayer (12).

2. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 1, characterized in that: The filter plate (8) comprises a first U-shaped frame (14) and a second U-shaped frame (15), the first U-shaped frame (14) being provided with connecting sleeves (16) on both sides of the surface, the second U-shaped frame (15) being provided with connecting rods (17) on both sides of the surface, one end of the connecting rod (17) being able to extend into the connecting sleeves (16), a connecting plate (18) being provided on one side of the first U-shaped frame (14), the connecting rod (17) and the connecting plate (18) being connected via a connecting spring (19), an inclined filter screen (20) being provided on the inner sides of the first U-shaped frame (14) and the second U-shaped frame (15), retractable limiting wheels (21) being provided on both sides of the surface, and first limiting grooves (22) being provided on both sides of the cleaning box (5), the lower side of the first limiting grooves (22) being provided with a plurality of movable members. A second limiting groove (23) is provided, third limiting grooves (24) are provided on both sides of the filter box (1), a fourth limiting groove (25) is provided below the third limiting groove (24), the first limiting groove (22) and the third limiting groove (24) are connected, the second limiting groove (23) and the fourth limiting groove (25) are connected, the fourth limiting groove (25) is shallower than the third limiting groove (24), the first limiting groove (22), the second limiting groove (23) and the third limiting groove (24) are the same in depth, a tilting block (26) is installed at the position where the second limiting groove (23) and the fourth limiting groove (25) are connected, the limiting wheel (21) can move among the first limiting groove (22), the second limiting groove (23), the third limiting groove (24) and the fourth limiting groove (25), and a pulling handle (27) is installed on one side surface of the first U-shaped frame (14).

3. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 2, characterized in that: The driving frame (9) comprises a servo motor (28) mounted on one side of the upper end of the filter box (1); the rotating end of the servo motor (28) is connected to a rotating screw (29) via a coupling; one end of the rotating screw (29) is mounted with a screw bearing (30); the screw bearing (30) is mounted on the inner surface of the filter box (1); the outer side of the rotating screw (29) is connected to a moving platform (31) via a thread; pushing plates (32) are mounted on both sides of the lower end of the moving platform (31); the pushing plates (32) can push the filter box (1); a first spring ejector pin (33) is mounted on the lower end of the moving platform (31); a pulley (34) is mounted on the lower end of the first spring ejector pin (33); an inclined surface is provided at the front end of the pulling handle (27); the pulley (34) can be moved to the inner side of the pulling handle (27); a guide block (35) is mounted on the upper end of the moving platform (31); a guide groove (36) is opened at the upper end of the filter box (1); the upper end of the guide block (35) extends into the guide groove (36).

4. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 3, characterized in that: Two through openings (37) are provided between the first limiting groove (22) and the second limiting groove (23); a rotating plate (38) is hingedly connected to one end of the through opening (37); a fixed plate (39) installed in the through opening (37) is provided below the rotating plate (38); the fixed plate (39) and the rotating plate (38) are connected via a telescopic spring (40); an intercepting plate (41) is installed on one side of the upper end of the through opening (37); the limiting wheel (21) can move from the first limiting groove (22) to the second limiting groove (23) at the through opening (37); and the third limiting groove (24) and the rotating plate (38) are connected via a telescopic spring (40). Two connecting ports (42) are provided between the fourth limiting slots (25); the limiting wheel (21) can move from the fourth limiting slot (25) to the third limiting slot (24) through the connecting ports (42); two arc-shaped slots (43) are provided at the lower end of the fourth limiting slot (25); the arc-shaped slots (43) are located below the connecting ports (42); two limiting blocks (44) are installed at the lower end of the third limiting slot (24); the limiting blocks (44) are located at one side of the connecting ports (42); a pushing frame (45) is installed in the filter box (1); the pushing frame (45) can push the filter box (1) upward.

5. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 4, characterized in that: The pushing frame (45) comprises eccentric wheels (46) located on both sides below the filter box (1), a rotating shaft (47) is mounted on one side surface of the eccentric wheel (46), first rolling bearings (48) are mounted on both sides of the filter box (1), one end of the rotating shaft (47) passes through the first rolling bearing (48) and extends to the outside of the filter box (1), a first sprocket (49) is mounted on one end of the rotating shaft (47) located on the outside of the filter box (1), second rolling bearings (50) are mounted on both sides of the cleaning box (5), and the first rolling bearings (51) are mounted on both sides of the cleaning box (5). A rotating rod (51) is installed through the second rolling bearing (50), and a second sprocket (52) is installed at one end of the rotating rod (51) located outside the cleaning box (5). The first sprocket (49) and the second sprocket (52) are connected by a transmission chain (53). A first gear (54) is installed at one end of the rotating rod (51) located inside the cleaning box (5). A first movable rack (55) is installed at the upper end of the first U-shaped frame (14), and the first movable rack (55) can mesh with the first gear (54).

6. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 5, characterized in that: A second gear (56) is mounted on one end of the rotating rod (51) located outside the cleaning box (5); a second movable rack (57) is meshed with one end of the second gear (56); a limiting slideway (58) is provided on one side of the second movable rack (57); a limiting bar (59) is provided in the limiting slideway (58); one end of the limiting bar (59) is mounted on the outside of the cleaning box (5); a reset plate (60) mounted on the cleaning box (5) is provided on one side of the second movable rack (57); the reset plate (60) and the second movable rack (57) are connected via a reset spring (61).

7. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 4, characterized in that: The limiting wheel (21) comprises a second spring pin (62) mounted on the surfaces of both sides of the first U-shaped frame (14) and the second U-shaped frame (15); a moving block (63) is mounted on the telescopic end of the second spring pin (62); a first universal ball (64) is mounted on the lower end of the moving block (63); and a second universal ball (65) is mounted on the surface of one side of the moving block (63) away from the first U-shaped frame (14) and the second U-shaped frame (15).

8. The photoresist filtering device capable of automatically cleaning the filter plate according to claim 1, characterized in that: The dryer (13) comprises a heating box (66) mounted on the upper end of the cleaning box (5); a blower (67) is mounted on the upper end of the heating box (66); an outlet end of the blower (67) extends into the heating box (66); a plurality of partitions (68) are mounted in the heating box (66); a heater (69) is mounted in the heating box (66); an air outlet pipe (70) is mounted on the lower end of the heating box (66); and a lower end of the air outlet pipe (70) extends into the cleaning box (5).

9. A photoresist filtering device capable of automatically cleaning a filter plate according to claim 8, characterized in that: The air drawn by the blower (67) is filtered clean air, the water sprayed by the sprinkler (12) is purified clean water, liquid outlets (71) are provided on both sides of the lower end of the cleaning box (5), a baffle (72) is provided between the two liquid outlets (71), and a collection box (73) placed on the ground is provided below the liquid outlet (71).

10. The photoresist filtering device capable of automatically cleaning the filter plate according to claim 7, characterized in that: An escape opening (74) is provided on one side of the upper end of the first U-shaped frame (14), and interception rods (75) are installed on both sides of the upper end of the cleaning box (5). The interception rods (75) can intercept the second U-shaped frame (15), and the escape opening (74) can avoid the interception rods (75).

Images