Rotary sintering apparatus

Abstract

The present application belongs to the field of semiconductor rotary sintering equipment, and particularly relates to a rotary sintering equipment. The rotary sintering equipment comprises a rotary feeding structure, the rotary feeding structure comprising a rotary assembly and a conveying assembly, the rotary assembly comprising a rotary material plate rotationally arranged and a rotary driving mechanism for driving the rotary material plate to rotate, and a hot-pressing station located on a rotation path of the rotary material plate; the conveying assembly comprising a first clamping mechanism, a moving mechanism and a second clamping mechanism arranged in a spaced manner relative to the first clamping mechanism, the first clamping mechanism being used for clamping a target object at a predetermined position, and the moving mechanism being slidingly arranged between the first clamping mechanism and the second clamping mechanism; a floating pressure head structure located at the hot-pressing station and above the rotary material plate; and a heating structure located at the hot-pressing station and below the rotary material plate. The conveying assembly and the floating pressure head structure of the present application are arranged along the circumference of the rotary material plate, so that the floor space of the rotary sintering equipment can be reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of semiconductor sintering equipment, and particularly relates to a rotary sintering equipment. BACKGROUND

[0002] At present, power semiconductor devices need to withstand high current, high voltage and high energy density, which requires the packaging interconnection material to have excellent electrical conductivity, thermal conductivity and mechanical properties. With the improvement of device integration and the gradual commercialization of the third generation of semiconductors represented by silicon carbide, the traditional connection method cannot meet the requirements of power devices in heat dissipation, electrical conductivity and mechanical properties. Under this background, a new packaging method represented by sintered silver process gradually becomes the mainstream technology of power device packaging.

[0003] In the currently applied pressure sintering technology, a hot-pressing sintering equipment is essential. The current sintering equipment is generally of a linear layout, one end of which is used for feeding, the sintering structure arranged in the middle is used for sintering, and the other end is used for discharging. Such a sintering equipment of linear layout usually occupies a large space, and needs to run back and forth during operation, which leads to inconvenience in operation. SUMMARY

[0004] The purpose of the embodiment of the present application is to provide a rotary sintering equipment, aiming to solve the problem of how to reduce the floor space occupied by the rotary sintering equipment.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present application is:

[0006] A rotary sintering equipment is provided for sintering a target object, the target object being located at a predetermined position, the rotary sintering equipment comprising:

[0007] A rotary feeding structure is used to transport the target object at the predetermined position to a hot-pressing station, the rotary feeding structure comprising a rotary assembly and a conveying assembly, the rotary assembly comprising a rotary feeding plate arranged to rotate and a rotary driving mechanism for driving the rotary feeding plate to rotate, the hot-pressing station being located on the rotation path of the rotary feeding plate; the conveying assembly comprising a first clamping mechanism, a transfer mechanism and a second clamping mechanism arranged in a spaced manner relative to the first clamping mechanism, the first clamping mechanism being used to clamp the target object at the predetermined position, the second clamping mechanism being arranged on the rotation path of the rotary feeding plate, the transfer mechanism being slidingly arranged between the first clamping mechanism and the second clamping mechanism; the transfer mechanism receives the target object at the first clamping mechanism and transfers the target object to the second clamping mechanism, the second clamping mechanism clamps the target object and releases the target object on the rotary feeding plate, the rotary feeding plate rotates by a predetermined angle and moves the target object to the hot-pressing station;

[0008] a floating pressure head structure located at the hot-pressing station and above the rotating material plate; and

[0009] a heating structure located at the hot-pressing station and below the rotating material plate;

[0010] wherein the conveying assembly and the floating pressure head structure are arranged along the circumference of the rotating material plate, and the floating pressure head structure presses the target object at the hot-pressing station towards the heating structure so that the heating structure heats and sinters the target object.

[0011] The application has the beneficial effect that the rotating assembly and the conveying assembly can realize automatic rotation and feeding of the material tray from a predetermined position to the hot-pressing station, improving the production efficiency. The rotation of the rotating material plate can accurately deliver the material tray to the hot-pressing station, reducing the cumbersome steps and errors of manual operation. The conveying assembly and the floating pressure head structure are arranged along the circumference of the rotating material plate, thereby reducing the floor space of the rotary sintering equipment and improving the convenience of operation. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiments or exemplary technical descriptions will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort.

[0013] Figure 1 is a schematic diagram of the three-dimensional structure of the rotary sintering equipment provided by the application;

[0014] Figure 2 is a schematic diagram of the floating pressure head structure of Figure 1 ;

[0015] Figure 3 is a schematic diagram of the force transmission mechanism of Figure 2 ;

[0016] Figure 4 is a schematic diagram of the pressure head assembly of the floating pressure head structure of Figure 1 ;

[0017] Figure 5 is a schematic diagram of the conveying assembly of Figure 1 ;

[0018] Figure 6 is a schematic diagram of the first clamping mechanism of Figure 1 ;

[0019] Figure 7 isFigure 1 is a schematic view of the second clamping mechanism in the third embodiment of the present application;

[0020] Figure 8 is a schematic view of the rotating assembly in the third embodiment of the present application; Figure 1 is a schematic view of the rotating assembly in the third embodiment of the present application;

[0021] Figure 9 is a schematic view of the hooking structure in the third embodiment of the present application and the hooking plate is in the first position;

[0022] Figure 10 is a schematic view of the hooking structure in the third embodiment of the present application and the hooking plate is in the second position;

[0023] Figure 11 is a schematic view of the hooking structure in the third embodiment of the present application and the hooking plate is in the second position; Figure 9 is an exploded schematic view of the hooking structure in the third embodiment of the present application. DETAILED DESCRIPTION

[0024] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not used to limit the present application.

[0025] It should be noted that when a component is referred to as "fixed to" or "disposed on" another component, it can be directly on the other component or indirectly on the other component. When a component is referred to as "connected to" another component, it can be directly or indirectly connected to the other component. The terms "upper", "lower", "left", "right", etc. indicate the orientation or positional relationship shown in the drawings, and are only used for convenience of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. For those skilled in the art, the specific meanings of the above terms can be understood according to the specific circumstances. The terms "first", "second" are only used for the purpose of convenience of description, and cannot be understood as indicating or implying relative importance or implying the number of technical features. The meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0026] Referring to Figures 1 to 3 , the present application provides a rotary sintering device which can sinter a target object, the target object including a plurality of semiconductor devices, and the plurality of semiconductor devices are arranged on a tray to move and sinter with the tray as a carrier. The rotary sintering device can sinter each semiconductor device.

[0027] Referring to Figures 1 to 6 , the rotary sintering device includes a rotary feeding structure, a floating pressure head structure 60, and a heating structure 70.

[0028] Referring to Figures 5 to 8 , the rotary feeding structure is used for conveying the tray 200 at a predetermined position to the hot-pressing station 44, and the rotary feeding structure comprises a rotary assembly 40 and a conveying assembly 30. The rotary assembly 40 comprises a rotary plate 41 arranged in rotation and a rotary driving mechanism 42 used for driving the rotary plate 41 to rotate, and the hot-pressing station 44 is located on a rotation path of the rotary plate 41. It can be understood that the rotary plate 41 is used for placing the tray 200, and when the driving mechanism 42 drives the rotary plate 41 to rotate, the tray 200 located on the rotary plate 41 can be conveyed to the hot-pressing station 44 in rotation, and the sintering mold 50 is arranged at the hot-pressing station 44.

[0029] Referring to Figures 5 to 8 , the conveying assembly 30 comprises a first clamping mechanism 31, a moving mechanism 33 and a second clamping mechanism 32 arranged in space relative to the first clamping mechanism 31, the first clamping mechanism 31 is used for clamping the tray 200 at a predetermined position, the second clamping mechanism 32 is arranged on the rotation path of the rotary plate 41, and the moving mechanism 33 is arranged in sliding between the first clamping mechanism 31 and the second clamping mechanism 32. The moving mechanism 33 can move in linear reciprocation along the horizontal direction, so as to continuously move the tray 200 from the first clamping mechanism 31 to the second clamping mechanism 32. Among them, the moving mechanism 33 receives the tray 200 at the first clamping mechanism 31, and moves the tray 200 to the second clamping mechanism 32, the second clamping mechanism 32 clamps the tray 200 and releases the tray 200 on the rotary plate 41, the rotary plate 41 rotates by a predetermined angle and moves the tray 200 to the hot-pressing station 44. The predetermined angle can be 30 degrees, 45 degrees or 90 degrees, which is not limited here and can be selected according to actual conditions.

[0030] Referring to Figures 1 to 3 , the floating pressure head structure is located at the hot-pressing station 44 and above the rotary plate 41; the heating structure 70 is located at the hot-pressing station 44 and below the rotary plate 41; the conveying assembly 30 and the floating pressure head structure are arranged along the circumference of the rotary plate 41, and the floating pressure head structure presses the target object at the hot-pressing station towards the heating structure 70, so that the heating structure 70 heats and sinters the target object.

[0031] Referring to Figures 1 to 3 , the rotary sintering equipment of the embodiment can realize the automatic rotary feeding of the tray 200 from the predetermined position to the hot-pressing station 44 through the rotary assembly 40 and the conveying assembly 30, and improves the production efficiency. The rotation of the rotary plate 41 can accurately deliver the tray 200 to the hot-pressing station 44, reducing the cumbersome steps and errors of manual operation. Moreover, the conveying assembly 30 and the floating pressure head structure 60 are arranged along the circumference of the rotary plate 41, so as to reduce the floor space of the rotary sintering equipment and improve the convenience of operation.

[0032] Referring to Figures 1 to 3 Optionally, the heating structure 70 comprises a heating table 71 located below the rotating material plate, a heating pipe arranged in the heating table 71, and a heating lifting mechanism 72 for driving the heating table to move in the vertical direction. The heating lifting mechanism 72 can drive the heating table 71 to ascend and cooperate with the floating head structure 60 to sinter each semiconductor device on the material tray 200.

[0033] Referring to Figures 2 to 4 The floating head structure 60 comprises a head assembly 62 and a pressing assembly 61.

[0034] Referring to Figures 2 to 4 The head assembly 62 comprises a positioning seat 64 fixedly arranged opposite to the rotating material plate 41, a plurality of heads 65 slidingly arranged between the positioning seat 64 and the target object, and a force transmission mechanism 63 connected to the positioning seat 64. The positioning seat 64 is located above the material tray, and the heads 65 are located below the positioning seat 64. The force transmission mechanism 63 comprises a pressing rod 631 slidingly connected to one end of the positioning seat 64, a first force transmission part 632 connected to the other end of the pressing rod 631, and a second force transmission part 633 connected to the head 65. The first force transmission part 632 and the second force transmission part 633 are in point-to-surface abutment. The heads 65 are arranged in a spaced manner, and each head 65 is provided with at least one force transmission mechanism 63. In this embodiment, the heads 65 are provided in six, and each force transmission mechanism 63 can transmit power to each head 65 respectively, so that each head 65 can apply pressure to the semiconductor devices at different positions on the material tray.

[0035] Referring to Figures 2 to 4 The pressing assembly 61 is connected to the positioning seat 64 and is used to drive each pressing rod 631 to move towards the target object, so that each pressing rod 631 drives each head 65 to press the target object at different positions. It can be understood that, due to the point-to-surface contact between the first force transmission part 632 and the second force transmission part 633, the pressing surface of the head 65 can float within a certain range relative to the horizontal plane, so as to uniformly press each semiconductor device.

[0036] Referring to Figures 2 to 4 The floating head structure 60 can uniformly press a plurality of semiconductor devices through the cooperation of the head assembly 62 and the pressing assembly 61. Due to the point-to-surface contact between the first force transmission part 632 and the second force transmission part 633, the pressing rod 631 can float within a certain range when driving the head 65 to press the material tray, so as to adapt to the height difference of different semiconductor devices, improve the stability and consistency of the contact between the head 65 and each semiconductor device, and ensure that each target object is uniformly stressed, thereby improving the sintering quality and efficiency of the subsequent semiconductor devices.

[0037] Optionally, a plurality of sliding holes 641 are formed in the positioning seat 64, and the upper ends of the pressing rods 631 are respectively arranged in the sliding holes 641.

[0038] Please refer to Figures 2 to 4 In some embodiments, the abutting surface of the first force transmission part 632 is a plane and the abutting surface of the second force transmission part 633 is a convex arc surface, which can be a spherical surface.

[0039] Please refer to Figures 2 to 4 In some embodiments, the abutting surface of the second force transmission part 633 is a plane and the abutting surface of the first force transmission part 632 is a convex arc surface, which can be a spherical surface.

[0040] Please refer to Figures 2 to 4 Optionally, the abutting surfaces of the first force transmission part 632 and the second force transmission part 633 are respectively a plane and a convex arc surface, or the abutting surfaces of the second force transmission part 633 and the first force transmission part 632 are respectively a plane and a convex arc surface, so that the pressing head 65 can float within a certain range, adapt to the height difference of different semiconductor devices, and effectively reduce the friction between the first force transmission part 632 and the second force transmission part 633, thereby ensuring the smoothness and stability of force transmission.

[0041] Please refer to Figures 2 to 4 In some embodiments, the pressing head 65 is provided with a pressurizing hole 651, one end of the pressing rod 631 is arranged in the pressurizing hole 651, the second force transmission part 633 is located at the bottom of the pressurizing hole 651, and the first force transmission part 632 is located in the pressurizing hole 651 and connected with the pressing rod 631.

[0042] Optionally, the pressurizing hole 651 is formed in the pressing head 65, and one end of the pressing rod 631 is arranged in the pressurizing hole 651, thereby ensuring the stable connection between the pressing rod 631 and the pressing head 65. The second force transmission part 633 is located at the bottom of the pressurizing hole 651, so that the force transmission is more direct and effective, the force transmission efficiency is improved, the loss in the force transmission path is reduced, and the uniformity of the pressure applied by the pressing head 65 on the semiconductor device is ensured.

[0043] Please refer to Figures 2 to 4 In some embodiments, the force transmission mechanism 63 further comprises transverse compression springs 634 located in the pressurizing hole 651, the two ends of each transverse compression spring 634 abut against the first force transmission part 632 and the hole wall of the pressurizing hole 651 respectively, the transverse compression springs 634 are arranged in pairs, and the two transverse compression springs 634 in the same pair are symmetrical about the pressing rod 631. In this application, two pairs of transverse compression springs 634 are arranged, and four compression springs are arranged at equal arc degrees around the circumference of the pressing rod 631.

[0044] Please refer to Figures 2 to 4Optionally, by arranging the lateral compression spring 634 in the force transmission mechanism 63 and locating it in the pressurizing hole 651, additional support and buffering can be provided between the pressure head 65 and the pressurizing hole 651. The pair of lateral compression springs 634 are symmetrically arranged relative to the pressure rod 631, ensuring that the pressure head 65 can maintain a stable posture even when subjected to uneven pressure, improving the stability and precision of the pressing process and effectively preventing the pressure head 65 from deviating and tilting due to lateral force.

[0045] Please refer to Figures 2 to 4 In some embodiments, the first force transmission part 632 is provided with a limiting hole corresponding to the position of the lateral compression spring 634, and the lateral compression spring 634 is partially located in the limiting hole.

[0046] Optionally, by arranging the limiting hole on the first force transmission part 632 and partially locating the lateral compression spring 634 in the limiting hole, the lateral displacement of the lateral compression spring 634 can be limited, ensuring the stability of the force transmission mechanism 63 and ensuring that the lateral compression spring 634 does not deviate from its set position during operation, thereby improving the reliability and service life of the force transmission mechanism 63.

[0047] Please refer to Figures 2 to 4 In some embodiments, the force transmission mechanism 63 further comprises a longitudinal compression spring 635 sleeved on the pressure rod 631 and located in the pressurizing hole 651, one end of the longitudinal compression spring 635 abuts against the first force transmission part 632, and the other end of the longitudinal compression spring 635 is fixedly arranged to keep the first force transmission part 632 and the second force transmission part 633 in abutment. At the aperture of the pressurizing hole 651, a pressurizing cover plate 66 is arranged, and the two ends of the longitudinal compression spring 635 abut against the pressurizing cover plate 66 and the first force transmission part 632, respectively.

[0048] Please refer to Figures 2 to 4 Optionally, by arranging the longitudinal compression spring 635 sleeved on the pressure rod 631 in the force transmission mechanism 63, additional longitudinal support force can be provided. One end of the longitudinal compression spring 635 abuts against the first force transmission part 632, and the other end abuts against the pressurizing cover plate 66, ensuring that the first force transmission part 632 and the second force transmission part 633 always remain in abutment.

[0049] Please refer to Figures 2 to 4 In some embodiments, any pressure head 65 is provided with a plurality of force transmission mechanisms 63, and the force transmission mechanisms 63 are arranged at intervals. In this embodiment, any pressure head 65 is arranged at intervals with four force transmission mechanisms 63.

[0050] Please refer to Figures 2 to 4 Optionally, by arranging a plurality of force transmission mechanisms 63 on any pressure head 65 and arranging them at intervals, multi-point support and uniform force transmission of the pressure head 65 can be achieved, ensuring that the pressure head 65 can remain stable when subjected to pressure from different directions, effectively avoiding tilting and deviation of the pressure head 65, and improving the uniformity and precision of the pressing process.

[0051] In some embodiments, the pressurizing assembly 61 comprises a plurality of cylinder bodies 611 and a plurality of piston rods 612 connected to the cylinder bodies 611, the cylinder bodies 611 are provided with a plurality of piston cavities 613, each piston rod 612 is arranged in each piston cavity 613, and each piston rod 612 is used to drive a corresponding pressing rod 631. Optionally, the pressurizing assembly 61 can be a hydraulic cylinder, high-pressure oil is injected into the piston cavities 613 to push the piston rods 612 to move, and the movement of the piston rods 612 drives the corresponding pressing rods 631 to move.

[0052] Optionally, the plurality of piston rods 612 can realize independent driving of the plurality of pressing rods 631, thereby improving the flexibility and accuracy of the pressurizing process.

[0053] Please refer to Figures 5 to 8 In some embodiments, the pressurizing assembly 61 is arranged in layers along the axial direction of the pressing rod 631, and the plurality of piston rods 612 on any cylinder body 611 are drivingly connected to the plurality of piston rods 612 on the adjacent cylinder body 611.

[0054] It can be understood that in the present embodiment, three pressurizing assemblies 61 are arranged in layers along the vertical direction, the three cylinder bodies 611 are arranged in layers along the vertical direction, and the piston rods 612 in each layer are connected in sequence along the vertical direction, that is, any pressing rod 631 is driven by three piston rods 612, thereby providing greater driving force to the pressing rod 631.

[0055] Please refer to Figures 5 to 8 Optionally, by arranging the plurality of pressurizing assemblies 61 in layers along the axial direction of the pressing rod 631, the plurality of piston rods 612 on any cylinder body 611 are drivingly connected to the plurality of piston rods 612 on the adjacent cylinder body 611, thereby realizing multi-layer pressurizing.

[0056] Optionally, the positioning seat 64 is further provided with a heating hole, and a heating rod 68 is arranged in the heating hole, so that the pressing head 65 can also heat the semiconductor device when pressing the semiconductor device.

[0057] Optionally, a heat insulation column 67 is further arranged between the lowermost piston rod 612 and the pressing rod 631 to prevent heat transfer to the pressurizing assembly 61.

[0058] Optionally, the rotary driving mechanism 42 can be a combination of a motor and a gear assembly, and the gear assembly can transmit the rotary power of the motor to the rotary material plate 41.

[0059] Please refer to Figures 5 to 8In some embodiments, the rotating feeding structure further comprises a feeding table 34 with a feeding groove 341, two ends of the feeding table 34 extend towards the first gripping mechanism 31 and the second gripping mechanism 32 respectively, and the moving mechanism 33 is slidingly arranged in the feeding groove 341.

[0060] Optionally, the first gripping mechanism 31 is fixed on the feeding table 34, and the predetermined position is arranged in the feeding groove 341. By arranging the feeding table 34 with the feeding groove 341, the two ends of the feeding table 34 extend towards the first gripping mechanism 31 and the second gripping mechanism 32 respectively, so that the tray 200 can be kept stable in the feeding groove 341 during the moving process. The moving mechanism 33 is slidingly arranged in the feeding groove 341, which can effectively avoid the shaking and tilting of the tray 200 during the moving process, and improve the stability and reliability of the moving of the tray 200.

[0061] Optionally, the moving mechanism 33 is provided with a bottom template, and the tray 200 can be placed on the bottom template, so that the tray 200 can be conveyed by the support of the bottom template.

[0062] Please refer to Figures 5 to 8 In some embodiments, the moving mechanism comprises two oppositely arranged support frames 331, the two support frames 331 are slidingly connected to the two side groove walls of the feeding groove 341 respectively, and the two support frames 331 are used for supporting the two ends of the tray 200 respectively.

[0063] Optionally, a guide rail sliding block mechanism can be arranged on the groove wall of the feeding groove 341, the sliding of the support frames 331 is guided by the guide rail sliding block mechanism, the two support frames 331 are slidingly connected to the two side groove walls of the feeding groove 341 respectively, which ensures the stability and support force of the tray 200 during the moving process. The two support frames 331 can support the two ends of the bottom template respectively, and the tray 200 is placed on the bottom template, so that the tray 200 is not easy to tilt or fall during the conveying process, and the safety of the operation is improved.

[0064] Please refer to Figures 5 to 8 In some embodiments, the rotating feeding structure further comprises two synchronizing belts 342 rotatingly arranged in the feeding groove 341, a transmission shaft 344 rotatingly arranged along the groove width direction of the feeding groove 341, and a synchronous driver 343 for driving the rotation of the synchronizing belts 342. The two support frames 331 are connected to the two synchronizing belts 342 respectively, and the two ends of the transmission shaft 344 are drivingly connected to the two synchronizing belts 342 respectively. The synchronous driver 343 can be a servo motor.

[0065] Optionally, by setting two synchronous belts 342, and the two synchronous belts 342 are drivingly connected through the transmission shaft 344, when the synchronous driver 343 drives one of the synchronous belts 342 to rotate, the other synchronous belt 342 can also rotate synchronously through the transmission of the transmission shaft 344, and the two synchronous rotating synchronous belts 342 can respectively drive the two support frames 331 to synchronously slide, ensuring the synchronous movement of the two support frames 331, avoiding the problem of tilting and deviation of the tray 200 due to asynchronization. The arrangement of the transmission shaft 344 further enhances the transmission efficiency of the synchronous belt 342, so that the tray 200 can move smoothly on the predetermined path, improving the working efficiency and precision of the whole feeding structure.

[0066] Please refer to Figures 5 to 8 In some embodiments, the first clamping mechanism 31 includes a fixedly arranged support seat 314, a lifter 313 arranged on the support seat 314, a first finger air cylinder 312 connected to the lifter 313, and a first clamping jaw 311 connected to the first finger air cylinder 312. Both ends of the first finger air cylinder 312 are provided with the first clamping jaw 311, and the first finger air cylinder 312 is used to drive the two first clamping jaws 311 to clamp the tray 200. The lifter 313 can drive the first finger air cylinder 312 to ascend or descend in the vertical direction. After the two first clamping jaws 311 clamp the tray 200, the lifter 313 drives the first finger air cylinder 312 to ascend, and the tray 200 ascends synchronously. The moving mechanism 33 moves to the lower side of the tray 200, and then the lifter 313 drives the first finger air cylinder 312 to descend until the tray 200 is released on the moving mechanism 33.

[0067] The first finger air cylinder 312 can drive the two first clamping jaws 311 to move towards each other or away from each other in the horizontal direction.

[0068] Optionally, the height of the two first clamping jaws 311 can be adjusted by the lifter 313, so that it can adapt to trays 200 of different heights, and realize accurate positioning and clamping of the tray 200. The first finger air cylinder 312 drives the first clamping jaw 311 to clamp the tray 200, ensuring the stability and safety during the clamping process, which can effectively reduce human operation errors and improve the reliability and production efficiency of automatic operation.

[0069] Optionally, the lifter 313 can be a cylinder or a synchronous belt 342 structure, which is prior art and will not be described here.

[0070] Please refer to Figures 5 to 8 In some embodiments, the first clamping jaw 311 includes a first clamping plate 3111 connected to the first finger air cylinder 312, and a first clamping head 3112 arranged on the first clamping plate 3111, and the first clamping head 3112 is arranged in two.

[0071] Optionally, the positions corresponding to each first clamping head 3112 on the tray 200 are provided with a limiting groove 208, and each first clamping head 3112 is clamped in each limiting groove 208 respectively, so as to stably clamp the tray 200 and provide more stable clamping force. The interval arrangement of each first clamping head 3112 ensures multi-point support and clamping of the tray 200, avoiding the inclination and sliding of the tray 200 caused by single-point clamping. The first clamping plate 3111 is connected with the first finger cylinder 312, so that the first clamping head 3112 can be flexibly adjusted in position to adapt to trays 200 of different sizes, improving the stability and safety of the clamping process and preventing the tray 200 from falling or deviating.

[0072] Referring to Figures 5 to 8 In some embodiments, the second clamping mechanism 32 comprises a preheating template 321 located above the rotating tray 41, a second finger cylinder 322 arranged on the preheating template 321, and a second clamping jaw 323 connected with the second finger cylinder 322. The two ends of the second finger cylinder 322 are provided with the second clamping jaw 323, and the second finger cylinder 322 is used to drive the two second clamping jaws 323 to clamp the tray 200.

[0073] Optionally, the preheating template 321 can slide in the vertical direction under the drive of external force, so as to facilitate the second finger cylinder 322 to drive the two second clamping jaws 323 to clamp the tray 200 from the transfer mechanism 33, and then release the tray 200 on the rotating tray 41 after the transfer mechanism 33 leaves. The preheating template 321 is provided below a preheating mold, which can preheat the tray 200 before it is transferred to the hot pressing station 44, ensuring the temperature uniformity of the tray 200 in the hot pressing station 44 and improving the sintering quality.

[0074] Referring to Figure 8 In some embodiments, the second clamping jaw 323 comprises a second clamping plate 3231 connected with the second finger cylinder 322 and a second clamping head 3232 arranged on the second clamping plate 3231, and the second clamping head 3232 is arranged in interval.

[0075] Optionally, the positions corresponding to each second clamping head 3232 on the tray 200 are provided with a limiting groove 208, and each second clamping head 3232 is clamped in each limiting groove 208 respectively, so as to stably clamp the tray 200 and provide more stable clamping force. The interval arrangement of each second clamping head 3232 ensures multi-point support and clamping of the tray 200, avoiding the inclination and sliding of the tray 200 caused by single-point clamping. The second clamping plate 3231 is connected with the second finger cylinder 322, so that the second clamping head 3232 can be flexibly adjusted in position to adapt to trays 200 of different sizes, improving the stability and safety of the clamping process and preventing the tray 200 from falling or deviating.

[0076] Optionally, the clamping directions of the two first clamping jaws 311 are perpendicular to the clamping directions of the two second clamping jaws 323.

[0077] Please refer to Figures 1 to 8 In some embodiments, the rotating material plate 41 is provided with a plurality of feeding grooves 411 for placing the feeding tray 200, and the feeding grooves 411 are arranged at intervals around the rotating center of the rotating material plate 41, and the rotating material plate 41 rotates to make each feeding groove 411 pass through the hot-pressing station in turn.

[0078] Optionally, in the embodiment, four feeding grooves 411 are arranged at equal arcs.

[0079] Optionally, by arranging a plurality of feeding grooves 411 on the rotating material plate 41, and arranging the feeding grooves 411 at intervals around the rotating center of the rotating material plate 41, a plurality of feeding trays 200 can be simultaneously accommodated and conveyed. The interval arrangement of the feeding grooves 411 enables the rotating material plate 41 to simultaneously perform feeding, hot-pressing and discharging during rotation, that is, one feeding groove 411 is in a feeding and preheating state, one feeding groove 411 is in a hot-pressing state, one feeding groove 411 is in a discharging state, and the other feeding groove 411 is in a standby feeding state, so that the feeding tray 200 can be continuously processed, and the sintering efficiency is improved.

[0080] Please refer to Figures 9 to 11 In some embodiments, the rotating sintering device further comprises an electrical slip ring 412 arranged at the rotating center of the rotating material plate 41, and the electrical slip ring 412 rotates synchronously with the rotating material plate 41.

[0081] It can be understood that the electrical slip ring 412 can communicate the outer pipe gas circuit, the electrical components for conveying electric energy and signals to the rotating material plate 41. By arranging the electrical slip ring 412, the wires connected to the rotating feeding structure 300 can be prevented from being entangled and knotted. The electrical slip ring 412 comprises a rotor mounted at the rotating center of the material plate and a stator connected to the rotor, and a plurality of gas circuit pipelines and a plurality of circuit pipelines are arranged on the stator. The gas circuit pipelines can convey nitrogen or inert gas to each feeding groove 411 to make each feeding groove 411 in an inert gas environment, or the gas circuit pipelines can absorb gas from each feeding groove 411 to make each feeding groove 411 in a vacuum environment. The gas circuit pipelines can also convey formic acid atomized gas with a reducing function to each feeding groove 411. The circuit pipelines can provide electric energy for each electrical component of the rotating feeding structure 300, such as sensors and controllers.

[0082] The rotating sintering device further comprises a discharging structure 35 for discharging the sintered feeding tray 200.

[0083] Please refer to Figures 9 to 11, the unloading structure 35 also comprises a conveying assembly 30 and a bin 202 for collecting the sintered tray 200, the second clamping mechanism 32 in the conveying assembly 30 can clamp the sintered tray 200 at one of the feeding grooves 411, the moving mechanism 33 moves the tray 200 to the first clamping mechanism 31, the first clamping mechanism 31 clamps the sintered tray 200 and releases it to a predetermined position, so as to collect the sintered tray 200 to the bin 202.

[0084] Optionally, two bins 202 are provided, one of which stores the tray 200 to be sintered, and the other of which is used to store the sintered tray 200.

[0085] Please refer to Figures 9 to 11 , the rotary sintering device also comprises a hooking structure for moving the tray to be sintered, i.e. moving the tray to be sintered from one of the bins 202 to a predetermined position, so that the conveying assembly 30 can convey the tray 200 at the predetermined position to the rotary plate 41.

[0086] The hooking structure comprises a hooking plate 10 arranged to slide relative to the predetermined position, a loading rack 11 arranged on the sliding path of the hooking plate 10, and a driving assembly 20 for driving the hooking plate 10 to move reciprocally along a predetermined direction; in this embodiment, the predetermined direction is the horizontal direction, and the hooking plate 10 can move linearly reciprocally under the action of an external force.

[0087] Please refer to Figures 9 to 11 , the hooking plate 10 has a first position 101 and a second position 102, when the driving assembly 20 drives the hooking plate 10 to move towards the predetermined position and the hooking plate 10 is at the first position 101, the hooking plate 10 is detachably connected to the clamping part 201; that is, one end of the hooking plate 10 is buckled to the clamping part 201; when the driving assembly 20 drives the hooking plate 10 to move away from the predetermined position and the hooking plate 10 is at the second position 102, the tray 200 moves synchronously and slides to the loading rack 11, and the hooking plate 10 is unbuckled from the tray 200, thereby completing the movement of the tray 200 and realizing the movement of the tray 200 to the predetermined position, i.e. the loading rack 11. The reverse process of the above process can realize the movement of the tray 200 from the loading rack 11 to the bin 202, i.e. the movement of the sintered tray 200 from the other loading rack 11 to the other bin 202, thereby realizing the unloading of the tray 200.

[0088] The hooking structure provided by the present application can accurately control the movement and connection of the hooking plate 10 by arranging the driving assembly 20, so that the material tray 200 can be smoothly moved from the material bin to the material loading frame 11 under the pulling of the hooking plate 10, and the stability and safety during the movement are ensured. At the same time, through the detachable connection between the hooking plate 10 and the clamping part 201, after the material tray 200 is located on the material loading frame 11, the material tray 200 can be disconnected with the hooking plate 10, which facilitates the subsequent conveying assembly 30 to convey the material tray 200 to the rotating material plate 41, so as to realize the automatic feeding of the material tray 200 and improve the flexibility and convenience of the overall operation.

[0089] Optionally, the opposite ends of the material tray 200 are provided with clamping parts 201.

[0090] Please refer to Figures 9 to 11 In some embodiments, the driving assembly 20 comprises a bracket 22 arranged to slide in a predetermined direction and a movement driver 21 for driving the bracket 22 to reciprocate, and the material loading vertical plate 111 is connected to the bracket 22. The movement driver 21 can be a pneumatic cylinder or a rodless pneumatic cylinder, which is not limited here and can be selected according to actual conditions.

[0091] Optionally, the combination of the bracket 22 and the movement driver 21 enables the hooking plate 10 to smoothly slide in a predetermined direction, ensuring the stability and accuracy of the material tray 200 during the hooking and releasing processes. The arrangement of the bracket 22 makes the whole structure more stable and firm, which can withstand a larger load and improve the reliability and durability of the equipment. At the same time, the application of the movement driver 21 enables the whole operation process to be highly automated, greatly reducing human intervention and improving production efficiency and operation safety.

[0092] Please refer to Figures 9 to 11 In some embodiments, the hooking plate 10 is rotationally connected to the bracket 22, and the driving assembly 20 further comprises a rotation driver 25 connected to the bracket 22 and used for driving the hooking plate 10 to rotate. When the hooking plate 10 is located at the first position 101, the rotation driver 25 drives the hooking plate 10 to rotate to enable the hooking plate 10 to clasp the clamping part 201; when the hooking plate 10 is located at the second position 102, the rotation driver 25 drives the hooking plate 10 to rotate in the reverse direction to enable the hooking plate 10 to disengage from the clamping part 201.

[0093] The rotation driver 25 can be a pneumatic cylinder. The rotation driver 25 drives the hooking plate 10 to rotate clockwise and upward by a predetermined angle, such as 5 degrees or 15 degrees, to enable the hooking plate 10 to clasp the clamping part 201, thereby realizing the connection between the hooking plate 10 and the material tray 200; or the rotation driver 25 drives the hooking plate 10 to rotate counterclockwise and downward by a predetermined angle, so that the hooking plate 10 is unclamped from the clamping part 201, thereby disconnecting with the material tray 200.

[0094] Optionally, by increasing the rotating driver 25, the hooking plate 10 can be flexibly rotated between different positions, realizing the automatic buckling and unbuckling operation between the hooking plate 10 and the clamping part 201, not only improving the accuracy and efficiency of the operation, but also reducing the mechanical wear and tear, prolonging the service life of the equipment. In addition, the application of the rotating driver 25 enables the hooking plate 10 to rotate smoothly between the first position 101 and the second position 102, improving the stability and safety during the hooking and releasing process of the tray 200.

[0095] Please refer to Figures 9 to 11 In some embodiments, the hooking plate 10 includes a plate body 12 of the rotating connection bracket 22 and a buckling plate 13 arranged at one end of the plate body 12, the other end of the plate body 12 is rotatably connected to the rotating driver 25, and the clamping part 201 is a clamping hole opened on the tray 200, and the buckling plate 13 is adapted to the shape of the clamping hole.

[0096] Optionally, by adapting the buckling plate 13 to the clamping part 201, the hooking plate 10 and the tray 200 can be firmly buckled. The adaptation design of the buckling plate 13 and the clamping hole shape ensures the stability and reliability of the tray 200 during the hooking and releasing process, avoiding the risk of tray 200 falling off or slipping.

[0097] In some embodiments, one end of the plate body 12 is provided with a rotating hole 14, and the rotating hole 14 is provided with a rotating shaft 251, and the output shaft of the rotating driver 25 is connected to the rotating shaft 251.

[0098] Optionally, by setting the rotating hole 14 on the plate body 12 and setting the rotating shaft 251 in the rotating hole 14, the hooking plate 10 can rotate more stably and smoothly, reducing mechanical friction and wear, and improving the durability of the equipment. The connection between the output shaft of the rotating driver 25 and the rotating shaft 251 ensures the effective transmission of driving force, so that the hooking plate 10 can rotate flexibly to realize accurate buckling and unbuckling operation.

[0099] In some embodiments, the shape of the rotating hole 14 is oval, circular, polygonal or track-shaped.

[0100] Optionally, by designing the rotating hole 14 as oval, circular, polygonal or track-shaped, the rotating shaft 251 can obtain greater flexibility and adaptability during rotation, further improving the stability and accuracy of the rotation of the hooking plate 10. Different shapes of the rotating hole 14 can adapt to different rotation requirements, improving the diversity and flexibility of rotation.

[0101] Optionally, in this embodiment, the shape of the rotating hole 14 is track-shaped, and in other embodiments, the shape of the rotating hole 14 can also be oval, which is not limited here and can be selected according to actual conditions.

[0102] Referring to Figures 9 to 11 In some embodiments, the driving assembly 20 further comprises guide rails 23 arranged in a predetermined direction and sliding blocks 24 slidingly connected with the guide rails 23, and the bracket 22 is connected with the sliding blocks 24. The predetermined direction is horizontal direction, and the length direction of the guide rails 23 is consistent with the predetermined direction.

[0103] Optionally, by increasing the cooperation of the guide rails 23 and the sliding blocks 24, the bracket 22 can smoothly slide in the predetermined direction, improving the stability and accuracy during the movement of the hooking plate 10. The arrangement of the guide rails 23 makes the whole structure more stable, can bear larger load, and enhances the reliability and durability of the equipment. The sliding connection of the sliding blocks 24 and the guide rails 23 enables the bracket 22 to move smoothly, reduces mechanical friction and wear, and prolongs the service life of the equipment.

[0104] Referring to Figure 1 In some embodiments, the material loading rack 11 comprises two oppositely arranged material loading vertical plates 111, the hooking plate 10 is located between the two material loading vertical plates 111, and a material loading groove 112 is formed on any one of the material loading vertical plates 111. The two ends of the tray 200 are slidingly arranged in the two material loading grooves 112, respectively.

[0105] Optionally, the material loading rack 11 comprises two oppositely arranged material loading vertical plates 111, so that the tray 200 can slide and support more stably, avoiding the risk of tilting or falling. The design of the material loading groove 112 on the material loading vertical plate 111 enables the tray 200 to smoothly slide onto the material loading rack 11, and the material loading groove 112 can limit the tray 200, improving the stability and reliability of the operation. The hooking plate 10 is located between the two material loading vertical plates 111, ensuring the stability and safety of the tray 200 during movement, reducing mechanical wear and operation errors.

[0106] Referring to ​ In some embodiments, the material loading groove 112 is provided with a guide surface 113 for guiding the tray 200 to slide in.

[0107] Optionally, by providing the guide surface 113 on the material loading groove 112, one end of the tray 200 can smoothly slide into the material loading groove 112, improving the convenience and efficiency of the operation. The guide surface 113 can effectively reduce the friction and resistance during the sliding of the tray 200, avoiding the situation that the tray 200 is stuck or slips.

[0108] Referring to ​In some embodiments, the rotary sintering device further comprises a material bin 202 for storing the material tray 200, and a plurality of material trays 200 are arranged in a vertical direction. The rotary sintering device further comprises a lifting structure 203 for lifting the material bin 202 in the vertical direction, so that after the last material tray 200 is moved away, the lifting structure 203 drives the material bin 202 to rise by a certain distance, so that the next material tray 200 is in a state ready to be moved, thereby realizing continuous feeding.

[0109] The above merely describes optional embodiments of the present application and is not intended to limit the present application. Various modifications and changes can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the scope of the claims of the present application.

Claims

1. A rotary sintering apparatus for sintering a target object located at a predetermined position, characterized in that, The rotary sintering device comprises: a rotary feeding structure for feeding the target object at the predetermined position to a hot-pressing station, the rotary feeding structure comprising a rotary assembly and a feeding assembly, the rotary assembly comprising a rotary plate arranged to rotate and a rotary driving mechanism for driving the rotary plate to rotate, the hot-pressing station being located on a rotating path of the rotary plate; the feeding assembly comprising a first gripping mechanism, a transferring mechanism and a second gripping mechanism arranged to be spaced apart from the first gripping mechanism, the first gripping mechanism being arranged to grip the target object at the predetermined position, the second gripping mechanism being arranged on the rotating path of the rotary plate, the transferring mechanism being arranged to slide between the first gripping mechanism and the second gripping mechanism; the transferring mechanism being arranged to receive the target object at the first gripping mechanism and transfer the target object to the second gripping mechanism, the second gripping mechanism being arranged to grip the target object and release the target object on the rotary plate, the rotary plate being arranged to rotate by a predetermined angle and move the target object to the hot-pressing station; a floating pressure head structure arranged at the hot-pressing station and above the rotary plate; and a heating structure arranged at the hot-pressing station and below the rotary plate; wherein the feeding assembly and the floating pressure head structure are arranged along a circumferential direction of the rotary plate, the floating pressure head structure being arranged to press the target object at the hot-pressing station towards the heating structure so that the heating structure heats and sinters the target object; the first gripping mechanism comprising a fixed support seat, a lifter arranged on the support seat, a first finger cylinder connected to the lifter and a first clamping jaw connected to the first finger cylinder, both ends of the first finger cylinder being provided with the first clamping jaw, the first finger cylinder being arranged to drive the two first clamping jaws to clamp the target object; the second gripping mechanism comprising a preheating template arranged above the rotary plate, a second finger cylinder arranged on the preheating template and a second clamping jaw connected to the second finger cylinder, both ends of the second finger cylinder being provided with the second clamping jaw, the second finger cylinder being arranged to drive the two second clamping jaws to clamp the target object; the rotary sintering device further comprises a material hooking structure for moving the target object in a material bin to the predetermined position, the target object being provided with a clamping part, the material hooking structure comprising: a material hooking plate arranged to slide relative to the predetermined position, a material loading rack arranged on a sliding path of the material hooking plate and a driving assembly for driving the material hooking plate to reciprocally move along a predetermined direction; the material hooking plate having a first position and a second position, the driving assembly driving the material hooking plate to move to the first position and the material hooking plate being detachably connected to the clamping part; the driving assembly driving the material hooking plate to move to the second position, the target object being synchronously moved and slid to the material loading rack, and the material hooking plate being disconnected from the target object.

2. The rotary sintering apparatus as claimed in claim 1, characterized in that: The floating pressure head structure comprises a pressure head assembly and a pressurizing assembly, the pressure head assembly comprises a positioning seat fixed relative to the target object, a pressure head slidingly arranged between the positioning seat and the target object, and a force transmission mechanism connected to the positioning seat, the force transmission mechanism comprises a pressure rod slidingly connected to one end of the positioning seat, a first force transmission part connected to the other end of the pressure rod, and a second force transmission part connected to the pressure head, the first force transmission part and the second force transmission part are in point-to-surface abutment, a plurality of pressure heads are arranged at intervals, and each pressure head corresponds to at least one force transmission mechanism; the pressurizing assembly is connected to the positioning seat and is used to drive each pressure rod to move towards the target object, so that each pressure rod drives each pressure head to press the different positions of the target object.

3. The rotary sintering apparatus as claimed in claim 2, characterized in that: The abutment surface of the first force transmission part is a plane and the abutment surface of the second force transmission part is a convex arc surface, or the abutment surface of the second force transmission part is a plane and the abutment surface of the first force transmission part is a convex arc surface.

4. The rotary sintering apparatus as claimed in claim 2, characterized in that: The pressure head is provided with a pressurizing hole, one end of the pressure rod is slidingly arranged in the pressurizing hole, the second force transmission part is located at the bottom of the pressurizing hole, and the first force transmission part is located in the pressurizing hole and connected to the pressure rod; the force transmission mechanism further comprises a transverse compression spring located in the pressurizing hole, both ends of the transverse compression spring abut against the first force transmission part and the hole wall of the pressurizing hole respectively, the transverse compression springs are arranged in pairs, and the two transverse compression springs in the same pair are symmetrical about the pressure rod.

5. The rotary sintering apparatus as claimed in claim 2, characterized in that: The pressurizing assembly comprises a cylinder body and a plurality of piston rods connected to the cylinder body, the cylinder body is provided with a plurality of piston cavities, each piston rod is arranged in each piston cavity, and each piston rod is used to drive each pressure rod, the pressurizing assembly is arranged in layers along the axial direction of the pressure rod, and the plurality of piston rods on any cylinder body are in driving connection with the plurality of piston rods on the adjacent another cylinder body.

6. A rotary sintering apparatus as claimed in any one of claims 1-5, characterized in that: The rotary feeding structure further comprises a feeding table provided with a feeding groove, both ends of the feeding table extend towards the first clamping mechanism and the second clamping mechanism respectively, and the transfer mechanism is slidingly arranged in the feeding groove; the transfer mechanism comprises two oppositely arranged support frames, both support frames are slidingly connected to the two side groove walls of the feeding groove respectively, and both support frames are used to support both ends of the target object.

7. A rotary sintering apparatus as claimed in any one of claims 1-5, characterized in that: The rotary material plate is provided with a feeding groove for placing the target object, a plurality of feeding grooves are arranged at intervals around the rotation center of the rotary material plate, and the rotary material plate rotates to make each feeding groove pass through the hot pressing station in turn.

8. A rotary sintering apparatus as claimed in any one of claims 1-5, characterized in that: The heating structure comprises a heating table located below the rotary material plate, a heating pipe arranged in the heating table, and a heating lifting mechanism driving the heating table to move in the vertical direction.

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