Non-transparent thin film element measuring system and measuring method

Abstract

The invention discloses a system and a method for measuring a non-transparent thin film element, belongs to the technical field of optical analysis instruments, and solves the problems that in the prior art, the precision is not enough and the non-transparent thin film is easy to damage during thickness measurement of the non-transparent thin film. The non-transparent film element measuring system comprises a light-emitting assembly, an optical fiber, an optical fiber collimator, a measuring mechanism, an optical fiber spectrometer and terminal equipment, the light-emitting assembly and the optical fiber spectrometer are connected with the optical fiber collimator through the optical fiber, and when the non-transparent film element measuring system is used, a light source emitted by the light-emitting assembly is transmitted to the optical fiber collimator through the optical fiber; after the optical fiber collimator forms parallel light, the parallel light irradiates the measuring mechanism where the non-transparent film is placed, a Fabry-Perot cavity with a light interference function is formed in the measuring mechanism, the light is reflected to the optical fiber collimator, the optical fiber collimator transmits the light to the optical fiber spectrometer through an optical fiber, and the terminal equipment completes detection of the thickness of the non-transparent film through calculation. According to the invention, the non-transparent film is not damaged, and the thickness measurement precision can be met.

Description

Technical Field

[0001] The invention belongs to the technical field of optical analysis instruments, and in particular relates to a non-transparent thin film element measurement system and a measurement method. Background Art

[0002] With the development of science and technology, non-transparent film materials have gradually been widely used, especially soft non-transparent films, such as the insulating ion exchange membranes used in new energy batteries and non-woven fabrics in medical masks. The thickness of non-transparent films needs to be measured.

[0003] At present, the conventional technologies for measuring the thickness of micron-level transparent films include spectral confocal method, white light interferometry and ellipsometry. For non-transparent films, these conventional methods of using light beams to pass through transparent materials cannot be used. If a mechanical probe is used to measure the thickness of a non-transparent film, the measurement limit of the mechanical probe is a few microns, and the accuracy of measuring non-transparent films is not enough. In addition, it is easy to damage the non-transparent film. The industry also uses a double-sided spectral confocal method to measure the thickness of non-transparent films, that is, a spectral confocal displacement sensor is used on each side of the non-transparent film to measure the distance between the two sides of the non-transparent film at the same time, and then the difference in the distance between the two sides is calculated with reference to the same reference, which is the thickness of the non-transparent film. The disadvantage of this method is that its accuracy is difficult to achieve the order of tens of nanometers. Especially for soft non-transparent films, because they are prone to wrinkling during measurement, there will be greater errors. Summary of the invention

[0004] The object of the present invention is to provide a non-transparent film element measurement system and a measurement method, which solves the problem of insufficient precision and easy damage to the non-transparent film in the prior art in thickness measurement of the non-transparent film.

[0005] In order to achieve the above-mentioned purpose, the technical solution of the present invention is implemented as follows: a non-transparent film element measurement system includes a light-emitting component, an optical fiber, a fiber collimator, a measuring mechanism and a fiber spectrometer, wherein the light-emitting component and the fiber spectrometer are connected to the fiber collimator through the optical fiber. When in use, the light source emitted by the light-emitting component is transmitted to the fiber collimator through the optical fiber, and the fiber collimator forms parallel light and then irradiates the measuring mechanism on which the non-transparent film is placed, and a Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism, and the light is reflected to the fiber collimator, and the fiber collimator transmits the light to the fiber spectrometer through the optical fiber, and the fiber spectrometer completes the detection of the thickness of the non-transparent film.

[0006] In some embodiments, the measuring mechanism includes a first optical plate and a second optical plate, and at least two non-transparent films are placed between the first optical plate and the second optical plate.

[0007] In some embodiments, the measuring mechanism further includes at least two spheres, the spheres are disposed between the first optical plate and the second optical plate, and at least two non-transparent films are placed between the spheres and the second optical plate.

[0008] In some embodiments, the measuring mechanism further includes two brackets, the two brackets are arranged between the first optical plate and the second optical plate, and the non-transparent film is placed between the two brackets.

[0009] In some embodiments, the first optical plate and the second optical plate are disposed in parallel, and the first optical plate and the second optical plate are equidistant from each other.

[0010] In some embodiments, the at least two spheres are evenly distributed at two ends of the first optical plate.

[0011] In some embodiments, the non-transparent film has the same shape as the first optical plate and the second optical plate.

[0012] In some embodiments, the stent is a ring-shaped metal stent.

[0013] In some embodiments, the first optical plate and the second optical plate are placed parallel to a horizontal plane.

[0014] In some embodiments, the optical fiber is a Y-shaped optical fiber, the light-emitting component emits light and transmits it to the optical fiber collimator through one side of the Y-shaped optical fiber, the optical fiber collimator forms parallel light and then projects it onto the measuring mechanism to form interference light, and the Fabry-Perot cavity with light interference function inside reflects the interference light to the optical fiber collimator and then transmits it to the optical fiber spectrometer through the other side of the Y-shaped optical fiber.

[0015] In some embodiments, the non-transparent thin film element measurement system further includes a terminal device, and the optical fiber spectrometer is connected to the terminal device.

[0016] Another technical solution of the present invention is: a non-transparent thin film element measurement method, using a non-transparent thin film element measurement system, the method comprises the following steps:

[0017] Step 1: placing a non-transparent film of a thickness to be measured in the measuring mechanism;

[0018] Step 2, the light source emitted by the light-emitting component is transmitted to the fiber collimator through the optical fiber, and the fiber collimator forms parallel light and then irradiates the measuring mechanism, a Fabry-Perot cavity with light interference function is formed in the measuring mechanism, and the light is reflected to the fiber collimator, and the fiber collimator transmits the light to the fiber spectrometer through the optical fiber. The detector obtains the thickness of the Fabry-Perot cavity when the non-transparent film is placed according to the reflected light with interference fringes formed by the fiber spectrometer through corresponding calculation;

[0019] Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity when no non-transparent film is placed according to the reflected light with interference fringes formed by the fiber optic spectrometer;

[0020] Step 4: Subtract the thickness of the system with the non-transparent film placed obtained in step 2 from the thickness of the non-transparent film element measurement system without load in step 3 to obtain the thickness of the non-transparent film.

[0021] Compared with the prior art, the light source emitted by the light emitting component in the non-transparent film element measurement system of the present invention passes through the optical fiber, the optical fiber collimator, the measuring mechanism, the optical fiber and the optical fiber spectrometer in sequence. When in use, the non-transparent film is placed in the measuring mechanism, the measuring mechanism forms a Fabry-Perot cavity with a light interference function, and the optical fiber spectrometer performs light splitting to form reflected light with interference fringes. The detector calculates the interval of the Fabry-Perot cavity based on the reflected light with interference fringes to obtain the thickness of the non-transparent film. The present invention can measure the non-transparent film without causing damage to the non-transparent film and can also meet the thickness measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of a non-transparent thin film element measurement system provided in Example 1 of the present invention;

[0023] Figure 2 A schematic diagram of the structure of a non-transparent thin film element measurement system provided in Example 2 of the present invention;

[0024] Figure 3 A schematic diagram of the structure of the non-transparent thin film element measurement system provided in Example 2 of the present invention when the system is unloaded;

[0025] Figure 4 A schematic diagram of the structure of a non-transparent thin film element measurement system provided in Example 3 of the present invention;

[0026] Figure 5 A schematic diagram of the structure of the non-transparent thin film element measurement system without load provided in Example 3 of the present invention;

[0027] Figure 6The non-transparent thin film element measurement system of the present invention measures the thin film light interference fringe pattern.

[0028] In the figure, 1. light emitting component, 2. optical fiber, 3. optical fiber collimator, 4. measuring mechanism, 41. first optical plate, 42. second optical plate, 43. sphere, 44. bracket, 5. optical fiber spectrometer, 6. terminal device. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0030] In the description of the present invention, it should be clarified that the terms "vertical", "lateral", "longitudinal", "front", "rear", "left", "right", "up", "down", "horizontal" and the like indicating orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not mean that the device or element referred to must have a specific orientation or position, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] Example 1

[0032] The non-transparent thin film element measurement system provided in Example 1 of the present invention is as follows: Figure 1 As shown, it includes a light-emitting component 1, an optical fiber 2, a fiber collimator 3, a measuring mechanism 4 and a fiber spectrometer 5. The light-emitting component 1 and the fiber spectrometer 5 are connected to the fiber collimator 3 through the optical fiber 2. When in use, the light source emitted by the light-emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the measuring mechanism 4 on which a non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2, and the fiber spectrometer 5 completes the detection of the thickness of the non-transparent film.

[0033] After adopting the above scheme, when in use, the light emitting component 1 emits a wide-spectrum measurement light, and the non-transparent film is placed in the measuring mechanism 4, the measuring mechanism 4 forms a Fabry-Perot cavity with a light interference function, and the optical fiber spectrometer 5 performs light splitting to form a reflected light with interference fringes. The detector calculates the interval of the Fabry-Perot cavity based on the reflected light with interference fringes, that is, the thickness of the non-transparent film is obtained. The present invention can measure the non-transparent film without causing damage to the non-transparent film, and can also meet the thickness measurement accuracy. Non-transparent films include films made of metals and non-metallic materials.

[0034] In the specific implementation process of this embodiment, Figure 1 As shown, the measuring mechanism 4 includes a first optical plate 41 and a second optical plate 42 , and at least two non-transparent films are placed between the first optical plate 41 and the second optical plate 42 .

[0035] In the specific implementation process of this embodiment, Figure 1 As shown, the first optical plate 41 and the second optical plate 42 are arranged in parallel.

[0036] In the specific implementation process of this embodiment, Figure 1 As shown, the first optical plate 41 and the second optical plate 42 are placed parallel to a horizontal plane.

[0037] More specifically, the first optical plate 41 and the second optical plate 42 can be arranged parallel to the horizontal plane or perpendicular to the horizontal plane. Two non-transparent films are placed at both ends of the first optical plate 41, so that there is a certain distance between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, a Fabry-Perot cavity with light interference function corresponding to the non-transparent film is formed.

[0038] Furthermore, the first optical plate 41 and the second optical plate 42 can be optical materials such as optical glass or quartz. When selecting these optical plate materials, their thickness needs to be much greater than the thickness of the non-transparent film to be measured. In fact, various combinations of two planes can form a Fabry-Perot interference cavity. Therefore, the reflected light with interference fringes detected by the fiber spectrometer 5 includes interference fringes generated by various combinations of two planes, that is, all interference fringes between the upper and lower surfaces of the first optical plate 41, between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, between the upper and lower surfaces of the second optical plate 42, and between the upper surface of the first optical plate 42 and the lower surface of the second optical plate 42. According to the principle of interference, the smaller the spacing of the Fabry-Perot interference cavity, the lower the corresponding interference fringes, and vice versa. Because there is a minimum spacing between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, the interference fringes density corresponding to the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 is the lowest. Therefore, Fourier transform is used to process the original data of the Fabry-Perot interference cavity interference fringes formed between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 to obtain low-density interference fringes, that is, interference fringes corresponding to the non-transparent film.

[0039] In the specific implementation process of this embodiment, Figure 1 As shown, the optical fiber 2 is a Y-shaped optical fiber. The light emitting component 1 emits a light source and transmits it to the optical fiber collimator 3 through one side of the Y-shaped optical fiber. The optical fiber collimator 3 forms parallel light and then emits it to the measuring mechanism 4. The measuring mechanism 4 reflects the reflected light to the optical fiber collimator 3 and then transmits it to the optical fiber spectrometer 5 through the other side of the Y-shaped optical fiber.

[0040] More specifically, the optical fiber 2 is a Y-shaped optical fiber, which includes at least two optical fibers, namely at least one optical fiber connected to the light emitting component 1 and at least one optical fiber connected to the optical fiber spectrometer 5. The optical fiber 2 is neater and easier to disassemble or install.

[0041] In the specific implementation process of this embodiment, Figure 1 As shown, the non-transparent thin film element measurement system further includes a terminal device 6 , and the optical fiber spectrometer 5 is connected to the terminal device 6 .

[0042] More specifically, the terminal device 6 in this embodiment can be a computer, a mobile phone or a tablet, etc. The terminal device 6 is used to control the light-emitting component 1 and the fiber spectrometer 5 to complete the measurement of the thickness of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, the thickness of the non-transparent film.

[0043] According to the optical interference theory of Fabry-Perot cavity, two adjacent peak wavelengths λ1 and trough wavelengths λ2 are taken from the reflection spectrum. The relationship between the two adjacent peak wavelengths λ1 and trough wavelengths λ2 and the spacing d of the Fabry-Perot cavity is:

[0044]

[0045] The thickness of the non-transparent film is calculated using the above formula, where n is the refractive index of the air in the Fabry-Perot cavity, which is 1. The wavelength λ2 is greater than the wavelength λ1, so on the reflection spectrum obtained by the optical fiber spectrometer 5, two adjacent peak wavelengths λ1 and trough wavelengths λ2 are taken to calculate the interval of the corresponding Fabry-Perot cavity.

[0046] In the actual calculation process, in order to reduce the measurement error, the wavelengths corresponding to multiple pairs of peaks and troughs can be taken from the corresponding reflection spectrum, and multiple values ​​of the thickness of the non-transparent film can be calculated, and then the average value is calculated as the actual value of the thickness of the non-transparent insulating film.

[0047] The non-transparent film element measurement system of this embodiment 1 measured the thickness of the non-transparent insulating film of the new energy battery with a nominal value of 17 μm to be 17.7 μm. Figure 6 Shown is the interference fringe pattern of the non-transparent insulating film measured in this embodiment.

[0048] The working process provided by Example 1 of the present invention is as follows: the light-emitting component 1 emits a wide-spectrum measurement light, which is transmitted to the fiber collimator 3 through one side of the Y-shaped optical fiber. The fiber collimator 3 forms parallel light and then emits it to the measuring mechanism 4. The light reflected by the Fabry-Perot cavity in the measuring mechanism 4 forms interference light. The interference light enters the fiber collimator 3 and is introduced into the other side of the Y-shaped optical fiber, and then output to the fiber spectrometer 5. After being split by the fiber spectrometer 5, reflected light with interference fringes is formed. The terminal device 6 uses the principle of optical interference to complete the measurement of the thickness of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42.

[0049] Example 2

[0050] The difference between this embodiment 2 and embodiment 1 is that Figure 2 As shown, the measuring mechanism 4 further includes at least two spheres 43 , which are disposed between the first optical plate 41 and the second optical plate 42 , and at least two non-transparent films are placed between the spheres 43 and the second optical plate 42 .

[0051] More specifically, at least two spheres 43 are evenly arranged at both ends of the lower surface of the first optical plate 41, and the non-transparent film is divided into at least two pieces, which are respectively placed on the upper surface of the second optical plate 42 and pressed by at least two spheres 43 at both ends; thus, under the spacing of the spheres 43, the lower surface of the first optical plate 41 and the non-transparent film are equally spaced, that is, the lower surface of the first optical plate 41 and the non-transparent film form a Fabry-Perot cavity with light interference function, that is, Figure 2 d1 in.

[0052] In the specific implementation process of this embodiment, Figure 2 As shown, at least two spheres 43 are evenly arranged at two ends of the first optical plate 41 .

[0053] More specifically, in order to ensure the parallelism and stability between the first optical plate 41 and the second optical plate 42, at least two balls 43 are fixed at both ends of the first optical plate 41, and at least two balls 43 are fixed at both ends of the first optical plate 41 according to an even number. When a non-transparent film is placed on the non-transparent film element measurement system, at least two balls 43 are in contact with the non-transparent film, and the non-transparent film is in contact with the second optical plate 42. In this way, equal distances are formed between the lower surface of the first optical plate 41 and the non-transparent film and the upper surface of the second optical plate 42.

[0054] The non-transparent film element measurement system in this embodiment is not loaded when the non-transparent film is placed. Figure 3 As shown, under the spacing of the spheres 43, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 are equidistant from each other, that is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with light interference function. Figure 3 d2 in.

[0055] The original data of the reflection spectrum with light interference fringes measured twice by the optical fiber spectrometer 5 are processed by Fourier transform on the interference fringes of the Fabry-Perot interferometer cavity to obtain low-density interference fringes of the two measurements, and d1 and d2 are calculated respectively. The thickness of the non-transparent film can be obtained by subtracting d1 from d2.

[0056] The working process provided by Example 2 of the present invention is as follows: when the non-transparent thin film element measurement system is unloaded, the light emitting component 1 emits a wide-spectrum measurement light, which is transmitted to the optical fiber collimator 3 through one side of the Y-shaped optical fiber. The optical fiber collimator 3 forms parallel light and then emits it to the measurement mechanism 4. The light reflected by the Fabry-Perot cavity in the measurement mechanism 4 forms interference light. The interference light enters the optical fiber collimator 3 and is introduced into the other side of the Y-shaped optical fiber, and then output to the optical fiber spectrometer 5. After being split by the optical fiber spectrometer 5, it forms reflected light with interference fringes. The terminal device 6 uses the principle of optical interference to measure the thickness d2 of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42. When the non-transparent thin film is placed in the non-transparent thin film element measurement system, it is measured that the lower surface of the first optical plate 41, the non-transparent thin film and the upper surface of the second optical plate 42 respectively form an equal spacing d1, and the thickness of the non-transparent thin film can be obtained by subtracting d1 from d2.

[0057] Example 3

[0058] The difference between this embodiment 3 and embodiment 1 is that Figure 4 As shown, in the non-transparent film element measurement system, the measurement mechanism 4 further includes two brackets 44 . The two brackets 44 are arranged between the first optical plate 41 and the second optical plate 42 , and the non-transparent film is placed between the two brackets 44 .

[0059] More specifically, when a non-transparent film is placed on the non-transparent film element measurement system, the non-transparent film is placed on one of the brackets 44, the first optical plate 41 and the other bracket 44 are placed on the non-transparent film in sequence, and then the second optical plate 42 is placed under one bracket 44. In this way, under the spacing of the bracket 44 and the non-transparent film, the first optical plate 41 and the second optical plate 42 are respectively spaced equally, that is, a Fabry-Perot cavity with a light interference function corresponding to the non-transparent film is formed on the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42.

[0060] In the specific implementation process of this embodiment, Figure 4 As shown, the non-transparent film has the same shape as the first optical plate 41 and the second optical plate 42 .

[0061] More specifically, the shape of the bracket 44 is a ring or a rectangular frame or other shapes. When the bracket 44 is a ring, the corresponding non-transparent film, the first optical plate 41 and the second optical plate 42 are circular. When the bracket 44 is a rectangular frame, the corresponding non-transparent film, the first optical plate 41 and the second optical plate 42 are rectangular. The size of the first optical plate 41 and the second optical plate 42 is larger than the non-transparent film to ensure that the non-transparent film can pass smoothly when incident and reflected light.

[0062] In the specific implementation process of this embodiment, Figure 4 As shown, the stent 44 is an annular metal stent.

[0063] More specifically, the bracket 44 is an annular metal bracket, and the material of the annular metal bracket can be heat-stable Invar; the non-transparent film is made into an annular shape, and the corresponding first optical plate 41 and second optical plate 42 are circular in shape, and the first optical plate 41 and second optical plate 42 are sleeved on the annular metal bracket. In this way, under the spacing of the bracket 44 and the non-transparent film, an equal distance is formed between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with a light interference function corresponding to the non-transparent film, that is Figure 4 d3 in .

[0064] The non-transparent film element measurement system in this embodiment is not loaded when the non-transparent film is placed. Figure 5 As shown, under the spacing of the bracket 44, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 are equidistant from each other, that is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with light interference function. Figure 5 d4 in.

[0065] The original data of the reflection spectrum with light interference fringes measured twice by the optical fiber spectrometer 5 are processed by Fourier transform on the interference fringes of the Fabry-Perot interferometer cavity to obtain low-density interference fringes of the two measurements, and d3 and d4 are calculated respectively. The thickness of the non-transparent film can be obtained by subtracting d3 from d4.

[0066] The working process provided by Example 3 of the present invention is as follows: when the non-transparent thin film element measurement system is unloaded, the light emitting component 1 emits a wide-spectrum measurement light, which is transmitted to the optical fiber collimator 3 through one side of the Y-shaped optical fiber. The optical fiber collimator 3 forms parallel light and then emits it to the measurement mechanism 4. The light reflected by the Fabry-Perot cavity in the measurement mechanism 4 forms interference light. The interference light enters the optical fiber collimator 3 and is introduced into the other side of the Y-shaped optical fiber, and then output to the optical fiber spectrometer 5. After being split by the optical fiber spectrometer 5, the reflected light with interference fringes is formed. The terminal device 6 uses the principle of optical interference to measure the thickness d4 of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42. When the non-transparent thin film is placed in the non-transparent thin film element measurement system, it is measured that the lower surface of the first optical plate 41, the non-transparent thin film and the upper surface of the second optical plate 42 respectively form an equal spacing d3, and the thickness of the non-transparent thin film can be obtained by subtracting d3 from d4.

[0067] Example 4

[0068] A non-transparent thin film element measurement method provided in Example 4 of the present invention is applied to any non-transparent thin film element measurement system of Examples 1-3, and the method comprises the following steps:

[0069] Step 1: Place the non-transparent film whose thickness is to be measured in the measuring mechanism 4;

[0070] Step 2: The light source emitted by the light emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the light to the measuring mechanism 4. A Fabry-Perot cavity with a light interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2. The detector obtains the thickness of the Fabry-Perot cavity when the non-transparent film is placed according to the reflected light with interference fringes formed by the fiber spectrometer 5 through corresponding calculations;

[0071] Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity when no non-transparent film is placed according to the reflected light with interference fringes formed by the optical fiber spectrometer 5;

[0072] Step 4: Subtract the thickness of the system with the non-transparent film placed obtained in step 2 from the thickness of the non-transparent film element measurement system without load in step 3 to obtain the thickness of the non-transparent film.

[0073] In summary, in the process of measuring the thickness of the non-transparent film using the measurement method provided in Example 4 of the present invention, the light source emitted by the light-emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the light to the measuring mechanism 4 on which the non-transparent film is placed. A Fabry-Perot cavity with a light interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2. The fiber spectrometer 5 performs light splitting to form reflected light with interference fringes. The detector calculates the interval of the Fabry-Perot cavity based on the reflected light with interference fringes to obtain the thickness of the non-transparent film. In addition, in the process of measuring the thickness of the non-transparent film using the measurement method of this embodiment, the non-transparent film will not be damaged and the thickness measurement accuracy can be met.

[0074] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A non-transparent thin film element measurement system, characterized in that: The invention comprises a light-emitting component (1), an optical fiber (2), an optical fiber collimator (3), a measuring mechanism (4) and an optical fiber spectrometer (5). The light-emitting component (1) and the optical fiber spectrometer (5) are connected to the optical fiber collimator (3) through the optical fiber (2). When in use, the light source emitted by the light-emitting component (1) is transmitted to the optical fiber collimator (3) through the optical fiber (2). After the optical fiber collimator (3) forms parallel light, it is irradiated onto the measuring mechanism (4) on which a non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism (4), and the light is reflected to the optical fiber collimator (3). The optical fiber collimator (3) transmits the light to the optical fiber spectrometer (5) through the optical fiber (2). The optical fiber spectrometer (5) completes the detection of the thickness of the non-transparent film.

2. The non-transparent thin film element measurement system according to claim 1, characterized in that: The measuring mechanism (4) comprises a first optical plate (41) and a second optical plate (42), and at least two non-transparent films are placed between the first optical plate (41) and the second optical plate (42).

3. The non-transparent thin film element measurement system according to claim 2, characterized in that: The measuring mechanism (4) further comprises at least two spheres (43), the spheres (43) being arranged between the first optical plate (41) and the second optical plate (42), and at least two non-transparent films being placed between the spheres (43) and the second optical plate (42).

4. The non-transparent thin film element measurement system according to claim 2, characterized in that: The measuring mechanism (4) further comprises two brackets (44), wherein the two brackets (44) are arranged between the first optical plate (41) and the second optical plate (42), and the non-transparent film is placed between the two brackets (44).

5. The non-transparent thin film element measurement system according to any one of claims 2 to 4, characterized in that: The first optical flat plate (41) and the second optical flat plate (42) are arranged in parallel, and the first optical flat plate (41) and the second optical flat plate (42) are equidistant from each other.

6. The non-transparent thin film element measurement system according to claim 3, characterized in that: The at least two spheres (43) are evenly arranged at two ends of the first optical plate (41).

7. The non-transparent thin film element measurement system according to claim 4, characterized in that: The non-transparent film has the same shape as the first optical plate (41) and the second optical plate (42).

8. The non-transparent thin film element measurement system according to claim 7, characterized in that: The stent (44) is an annular metal stent.

9. The non-transparent thin film element measurement system according to any one of claims 2 to 4, characterized in that: The first optical plate (41) and the second optical plate (42) are placed parallel to a horizontal plane.

10. The non-transparent thin film element measurement system according to any one of claims 2-4, 6-8, characterized in that: The optical fiber (2) is a Y-shaped optical fiber. The light emitting component (1) emits light and transmits it to the optical fiber collimator (3) through one side of the Y-shaped optical fiber. The optical fiber collimator (3) forms parallel light and then projects it onto the measuring mechanism (4) to form interference light. The Fabry-Perot cavity with light interference function inside reflects the interference light to the optical fiber collimator (3) and then transmits it to the optical fiber spectrometer (5) through the other side of the Y-shaped optical fiber.

11. The non-transparent thin film element measurement system according to any one of claims 2-4, 6-8, characterized in that: The non-transparent thin film element measurement system also includes a terminal device (6), and the optical fiber spectrometer (5) is connected to the terminal device (6).

12. A non-transparent thin film element measurement method, using the non-transparent thin film element measurement system according to any one of claims 1 to 11, characterized in that: The method comprises the following steps: Step 1: placing a non-transparent film whose thickness is to be measured in the measuring mechanism (4); Step 2: The light source emitted by the light emitting component (1) is transmitted to the fiber collimator (3) through the optical fiber (2); the fiber collimator (3) forms parallel light and then irradiates the parallel light onto the measuring mechanism (4); a Fabry-Perot cavity with a light interference function is formed in the measuring mechanism (4), and the light is reflected to the fiber collimator (3); the fiber collimator (3) transmits the light to the fiber spectrometer (5) through the optical fiber (2); the detector calculates the thickness of the Fabry-Perot cavity when the non-transparent film is placed according to the reflected light with interference fringes formed by the fiber spectrometer (5); Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity when no non-transparent film is placed based on the reflected light with interference fringes formed by the optical fiber spectrometer (5); Step 4: Subtract the thickness of the non-transparent film obtained in step 2 from the thickness of the non-transparent film element measurement system without load from step 3 to obtain the thickness of the non-transparent film.

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