Hole plugging device, hole plugging method and wafer processing equipment

Abstract

The invention provides a hole plugging device, a hole plugging method and wafer processing equipment, and the device comprises an image collection unit which is used for collecting the image information of a local region, with a plugged hole, of a processed workpiece; the control unit is used for acquiring coordinate position information of the blocked hole based on the image information; the execution unit comprises an execution tail end, and the execution tail end is provided with a plug mounting component and a plurality of distance measuring sensors; the control unit is further used for controlling the execution unit to move to a first target position or a second target position based on the coordinate position information of the blocked hole; when the execution unit is located at the first target position, the operation of plugging the plug into the plugging hole is executed; when in the second target position, measuring the distance through a distance measuring sensor; the control unit is further used for judging whether hole blocking operation is qualified or not based on the distances measured by the distance measuring sensors. According to the hole plugging device, the hole plugging method and the wafer processing equipment, the judgment accuracy of hole plugging operation can be improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a hole plugging device, a hole plugging method and wafer processing equipment. Background Art

[0002] In the wafer processing industry, cassettes (also called wafer boxes or wafer boxes) are used to safely store and transport wafers. The hole plugging operation refers to the sealing or blocking of certain holes in the cassette to distinguish different carriers or wafers during transportation or storage.

[0003] In the prior art, automatic hole plugging is generally used in the wafer processing process. In the automatic hole plugging operation, the main method is to identify the hole plugging status by taking photos, and the hole plugging operation is completed by a robot. However, when the hole plugging status is identified by taking photos with a camera, only the deviation of the hole plugging part in the horizontal plane can be identified, and the longitudinal state of the hole plugging cannot be identified. There is a situation where the detection is not in place, which will cause abnormal products to flow to the next process or customer end, causing rework and other problems. Summary of the invention

[0004] In order to solve at least one technical problem in the above-mentioned prior art, the embodiments of the present disclosure provide a hole plugging device, a hole plugging method and a wafer processing equipment.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] In a first aspect, an embodiment of the present disclosure provides a hole blocking device, comprising:

[0007] An image acquisition unit, used to acquire image information of a local area with a blocked hole on the workpiece;

[0008] A control unit, configured to obtain coordinate position information of the blocked hole based on the image information; and

[0009] An execution unit, the execution unit includes an execution end, the execution end is provided with a plug mounting component for grabbing the plug; the execution end is also provided with a detection unit, the detection unit includes a plurality of distance measuring sensors, the distance measuring sensors are used to measure the distance from the distance measuring sensor itself to the workpiece along the first direction;

[0010] The control unit is also used to control the execution unit to move to a first target position or a second target position based on the coordinate position information of the blocked hole; and the execution unit is used to execute the operation of plugging the plug into the blocked hole when it is at the first target position; and execute the operation of measuring the distance through the ranging sensor when it is at the second target position; the control unit is also used to determine whether the hole blocking operation at the hole blocking position is qualified based on the distances measured by several of the ranging sensors.

[0011] Exemplarily, a base is provided on the execution end, the detection unit and the plug mounting component are arranged on the base at intervals along a second direction, and the base is constructed to be retractable along the first direction, wherein the second direction is perpendicular to the first direction.

[0012] Exemplarily, the ranging sensor includes an optical sensor.

[0013] Exemplarily, the detection unit further includes a rangefinder mounting component, which is constructed to be circular or ring-shaped to match the shape and size of the blocked hole, and a plurality of the rangefinder sensors are evenly distributed along the circumference of the rangefinder mounting component.

[0014] Exemplarily, the rangefinder mounting component is detachably mounted on the base; and / or, the rangefinder mounting component is constructed to have an adjustable diameter.

[0015] Exemplarily, the control unit is further used to determine whether the hole plugging operation at the hole plugging position is qualified based on the distances measured by the plurality of distance measuring sensors, specifically including:

[0016] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to the second threshold, it is determined that the hole blocking position is not blocked or the blocking operation is unqualified;

[0017] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is qualified;

[0018] When the difference between the distances measured by the plurality of distance measuring sensors is greater than the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is unqualified.

[0019] Exemplarily, the execution unit includes a robot.

[0020] In a second aspect, the embodiments of the present disclosure further provide a hole plugging method, which is applied to the hole plugging device as described above; the hole plugging method comprises the following steps:

[0021] Collect image information of a local area with a blocked hole on the workpiece;

[0022] Based on the image information, obtaining coordinate position information of the blocked hole;

[0023] Based on the coordinate position information of the blocked hole, controlling the execution unit to move to a first target position;

[0024] The execution unit moves to the first target position, grabs the plug, and executes the operation of plugging the plug into the plugging hole;

[0025] Based on the coordinate position information of the blocked hole, controlling the execution unit to move to a second target position;

[0026] The execution unit moves to the second target position and performs the operation of measuring the distance through the distance measuring sensor;

[0027] Based on the distances measured by the plurality of distance measuring sensors, it is determined whether the hole plugging operation at the hole plugging position is qualified.

[0028] Exemplarily, judging whether the hole plugging operation at the hole plugging position is qualified based on the distances measured by the plurality of distance measuring sensors specifically includes:

[0029] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to the second threshold, it is determined that the hole blocking position is not blocked or the blocking operation is unqualified;

[0030] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is qualified;

[0031] When the difference between the distances measured by the plurality of distance measuring sensors is greater than the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is unqualified.

[0032] In a third aspect, an embodiment of the present disclosure further provides a wafer processing device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method described above when executing the computer program.

[0033] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0034] In the hole plugging device, hole plugging method and wafer processing equipment provided by the embodiments of the present disclosure, image information of a local area with a plugged hole on the workpiece is collected by an image acquisition unit, and the image information is identified by a control unit to obtain coordinate position information of the plugged hole, and according to the coordinate position information of the plugged hole, the execution unit can be controlled to first move to the first target position, so that the plugging head installation component in the execution unit grabs the plug and plugs the plug into the plugged hole, and then, the execution unit can move to the second target position, so that a plurality of ranging sensors in the execution unit measure the distance to the workpiece along the first direction, and the control unit determines whether the hole plugging operation at the plugging hole position is qualified based on the distance measured by the plurality of ranging sensors.

[0035] In this way, by simultaneously arranging the plug installation component and the distance measuring sensor on the execution unit, it is possible to identify the plug position and plug condition based on the image acquisition unit, and further judge the hole blockage condition by using the distance measuring sensor, so that the hole blockage status judgment is more accurate; and, the hole plugging operation and the hole plugging detection operation are completed by the same execution unit, so that the plug can be detected and adjusted immediately after the hole plugging operation is completed, thereby avoiding abnormal products from flowing to the next process or client. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 A schematic diagram showing image acquisition by an image acquisition unit in a hole plugging device provided in an embodiment of the present disclosure;

[0037] Figure 2 A schematic diagram showing the structure of an execution unit in a hole plugging device provided in an embodiment of the present disclosure;

[0038] Figure 3 A front view showing a detection unit in a hole plugging device provided in an embodiment of the present disclosure;

[0039] Figure 4 A top view of a detection unit in a hole plugging device provided in an embodiment of the present disclosure is shown;

[0040] Figure 5 A three-dimensional diagram showing a detection unit in a hole blocking device provided in an embodiment of the present disclosure;

[0041] Figure 6 It shows one of the schematic diagrams of the detection principle of the detection unit in the hole blocking device provided in the embodiment of the present disclosure;

[0042] Figure 7 The second schematic diagram shows the detection principle of the detection unit in the hole plugging device provided in the embodiment of the present disclosure. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0044] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0045] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0046] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0047] like Figures 1 to 5 As shown, the embodiment of the present disclosure provides a hole blocking device, comprising:

[0048] An image acquisition unit 100 is used to acquire image information of a local area with a plugged hole 20 on the workpiece 10;

[0049] A control unit (not shown in the figure), used to obtain the coordinate position information of the plugging hole 20 based on the image information; and

[0050] The execution unit 300 includes an execution end 310, and the execution end 310 is provided with a plug installation component 320 for grabbing the plug 30; the execution end 310 is also provided with a detection unit 330, and the detection unit 330 includes a plurality of distance sensors 331, and the distance sensors 331 are used to measure the distance from the distance sensor 331 itself to the workpiece 10 along the first direction Y;

[0051] The control unit is further used to control the execution unit 300 to move to the first target position or the second target position based on the coordinate position information of the blocking hole 20;

[0052] The execution unit 300 is used to: when in the first target position, execute the operation of plugging the plug 30 into the plugging hole 20; when in the second target position, execute the operation of measuring the distance through the distance measuring sensor 331;

[0053] The control unit is further configured to determine whether the hole plugging operation at the hole plugging position 20 is qualified based on the distances measured by the plurality of distance measuring sensors 331 .

[0054] In the hole plugging device provided in the embodiment of the present disclosure, the image information of the local area with the plugging hole 20 on the workpiece 10 is collected by the image acquisition unit 100, and the image information is identified by the control unit to obtain the coordinate position information of the plugging hole 20, and according to the coordinate position information of the plugging hole 20, the execution unit 300 can be controlled to move to the first target position first, so that the plugging head installation component 320 in the execution unit 300 grabs the plugging head 30 and plugs the plugging head 30 into the plugging hole 20, and then, the execution unit 300 can be moved to the second target position, and the several ranging sensors 331 in the execution unit 300 measure the distance to the workpiece 10 along the first direction Y, and the control unit determines whether the hole plugging operation at the position of the plugging hole 20 is qualified based on the distance measured by the several ranging sensors 331.

[0055] In this way, by simultaneously arranging the plug installation component 320 and the distance measuring sensor 331 on the execution unit 300, the position and condition of the plug 30 can be identified based on the image acquisition unit 100, and the distance measuring sensor 331 can be used to further judge the condition of the blocked hole 20, so that the judgment of the state of the blocked hole 20 is more accurate; and, the hole blocking operation and the hole blocking detection operation are completed by the same execution unit 300, so that the plug 30 can be detected and adjusted immediately after the hole blocking operation is completed, thereby avoiding abnormal products from flowing to the next process or client.

[0056] It should be noted that the hole plugging device provided in the embodiment of the present disclosure can be used to plug the holes 20 on the wafer box for storing wafers, but is not limited to this. That is, the workpiece 10 can include but is not limited to the wafer box.

[0057] In addition, in the above scheme, the local area with the plugged hole 20 on the workpiece 10 may refer to the entire area of ​​the surface of one side of the workpiece 10 with the plugged hole 20, or may refer to the local area of ​​the surface of one side of the workpiece 10 with the plugged hole 20.

[0058] In addition, as an exemplary embodiment, the image acquisition unit 100 can be any suitable device such as a camera.

[0059] As an exemplary embodiment, Figure 2 As shown, the execution unit 300 may include but is not limited to a robot, and the execution end 310 is the execution end 310 of the robot.

[0060] The execution end 310 may be provided with a base 311, the detection unit 330 and the plug mounting component 320 are arranged on the base 311 at intervals along the second direction X, and the base 311 is constructed to be retractable along the first direction Y, wherein the second direction X is perpendicular to the first direction Y.

[0061] By adopting the above solution, the execution end 310 of the manipulator is improved, and the execution end 310 is improved to be provided with a retractable base 311, and the plugging head installation component 320 and the detection unit 330 are simultaneously installed on the base 311, so that the three-dimensional movement of the manipulator can be used to complete the plugging operation and the plugging detection operation. Of course, it can be understood that the specific structure of the execution end 310 is not limited to this.

[0062] In addition, as an exemplary embodiment, the distance measuring sensor 331 may include but is not limited to an optical sensor. The distance measuring principle of the optical sensor is mainly based on the propagation characteristics and reflection characteristics of light. Common optical distance measuring technologies include laser distance measuring, infrared distance measuring and optical coherence tomography.

[0063] Some of the main distance measurement principles of optical sensors are as follows:

[0064] 1) Time of Flight (ToF): This method emits a beam of light (usually laser or infrared light) and then measures the time it takes for the light to be reflected from the object being measured. Based on the speed of light and time, the distance to the object can be calculated. The formula is: distance = speed of light × time / 2.

[0065] 2) Phase difference method: This method calculates the distance by measuring the phase difference between the transmitted light wave and the received reflected light wave. The transmitted light wave is usually modulated, and the received light wave will have a phase difference due to the different propagation time. By analyzing the phase difference, the distance information can be obtained.

[0066] 3) Triangulation: This method uses geometric principles to calculate the distance of the target object by measuring the angle between two known points and the target object, and the known baseline length, using trigonometric functions. This method is commonly used in laser rangefinders and certain types of optical sensors.

[0067] 4) Structured light method: This technology projects a known pattern of light onto the surface of an object and analyzes the deformed pattern to obtain the distance and shape information of the object. This method is widely used in 3D scanning and object recognition.

[0068] 5) Laser interferometry: This method uses the interference phenomenon of lasers to obtain very high-precision distance information by accurately measuring the changes in interference fringes. It is suitable for occasions that require high-precision measurement.

[0069] In some embodiments of the present disclosure, the optical sensor may be a sensor that performs distance measurement based on any of the above-mentioned distance measurement principles, including but not limited to a laser rangefinder, an infrared rangefinder, and the like.

[0070] In addition, it should be noted that the distance measuring sensor 331 is not limited to being an optical sensor, and any other suitable distance measuring sensor 331 such as an ultrasonic distance measuring sensor may also be selected.

[0071] In addition, as an exemplary embodiment, Figures 3 to 5 As shown, the detection unit 330 also includes a rangefinder mounting component 332, and the rangefinder mounting component 332 is constructed to be circular or ring-shaped that matches the shape and size of the blocking hole 20, and a plurality of the rangefinder sensors 331 are evenly distributed along the circumference of the rangefinder mounting component 332.

[0072] By adopting the above scheme, the rangefinder mounting component 332 is constructed into a circle or annular shape, and a plurality of the ranging sensors 331 are evenly distributed along the circumference of the rangefinder mounting component 332. When the execution unit 300 is in the second target position, it is set that when the hole plugging operation is appropriate, the distance data measured by each of the ranging sensors 331 is equal to the preset distance value. If the distance data measured by some of the ranging sensors 331 deviates greatly from the preset distance value, it can be determined that the hole plugging operation has failed.

[0073] As an exemplary embodiment, the rangefinder mounting component 332 is detachably mounted on the base 311. In this way, when the hole plugging device provided by the embodiment of the present disclosure is applied to plugging holes of different sizes, the rangefinder mounting component 332 of an adapted size can be replaced according to the size of the plugging hole 20.

[0074] As another exemplary embodiment, the rangefinder mounting component 332 may also be configured to have an adjustable diameter to adapt to plugging holes 20 of different sizes. For example:

[0075] In some embodiments, the rangefinder mounting component 332 may be constructed in an annular shape, and may include a plurality of arc segments, the plurality of arc segments are sequentially connected end to end, and two adjacent arc segments are movably connected in a nested manner. When it is necessary to adjust the diameter of the rangefinder mounting component 332, the diameter of the rangefinder mounting component 332 may be adjusted by adjusting the degree of insertion and removal between two adjacent arc segments.

[0076] In some other embodiments, the rangefinder mounting component 332 may also be constructed in an annular shape, and may include a plurality of arc segments, adjacent arc segments are independent of each other, and each arc segment may reciprocate radially. When the diameter of the rangefinder mounting component 332 needs to be adjusted, the arc segment may be radially moved to radially expand or enlarge the diameter of the annular shape enclosed by the plurality of arc segments to adapt to the size of the blocking hole 20.

[0077] Furthermore, in some embodiments, the rangefinder mounting component 332 may be detachably mounted on the base 311 , and the diameter may be adjustable.

[0078] It is understandable that the above is only an example, and the manner in which the diameter size of the rangefinder mounting component 332 can be adjusted is not limited thereto.

[0079] In addition, as an exemplary embodiment, the control unit is further used to determine whether the hole plugging operation at the hole plugging position 20 is qualified based on the distances measured by the plurality of distance measuring sensors 331, specifically including:

[0080] When the difference between the distances measured by the distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all greater than or equal to the second threshold, it is determined that the hole 20 at the blocking hole 20 position is not blocked or the blocking hole operation is unqualified;

[0081] When the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position 20 is qualified;

[0082] When the difference between the distances measured by the distance measuring sensors 331 is greater than the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position 20 is unqualified.

[0083] See also Figure 5 and Figure 6 As shown, taking the number of the three distance measuring sensors 331 as an example, assuming that when the execution unit 300 is at the second target position, the distance values ​​measured by the three distance measuring sensors 331 are d1, d2 and d3 respectively.

[0084] like Figure 6As shown, the first threshold value may be the allowable difference range of d1, d2 and d3 when the plugging operation is qualified, for example, the first threshold value may be 0. However, it is not limited thereto, for example, the first threshold value may also include a variation range of less than or equal to 10% of 0, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%.

[0085] The second threshold is the maximum distance value measured by the three distance measuring sensors 331 when the execution unit 300 is at the second target position and the hole plugging operation is qualified, that is, the second threshold is the preset maximum allowable distance value d0.

[0086] like Figure 7 As shown, when the data difference of d1, d2, and d3 is within the first threshold value but exceeds the preset maximum allowable distance value d0, it can be determined that the hole is not blocked 20 or the blocking operation has failed. At this time, the device can alarm to prompt the blocking operation failure; Figure 6 As shown, when the data difference of d1, d2, and d3 is within the first threshold value and does not exceed the preset maximum allowable distance value d0, it can be determined that the plugging operation is qualified; Figure 7 As shown, when the data of d1, d2, and d3 do not exceed the preset maximum allowable distance value d0, but the difference exceeds the first threshold, it can be determined that the plugging operation has failed. At this time, the device can alarm to prompt the failure of the plugging operation.

[0087] In summary, the hole plugging device provided in the embodiment of the present disclosure, by adding a distance measuring sensor 331 for detecting the state of the hole plugging 20 on the execution unit 300, can utilize the same execution unit 300 to perform the hole plugging 20 detection after completing the hole plugging operation, thereby improving the accuracy of the hole plugging operation and reducing rework and production waste.

[0088] In addition, the embodiment of the present disclosure further provides a method for plugging a hole 20, which is applied to the plugging hole device in the embodiment of the present disclosure; the method for plugging a hole 20 comprises the following steps:

[0089] Step S01, collecting image information of a local area with a blocked hole 20 on a workpiece 10;

[0090] Step S02, based on the image information, obtaining coordinate position information of the blocked hole 20;

[0091] Step S03, based on the coordinate position information of the blocked hole 20, controlling the execution unit 300 to move to a first target position;

[0092] Step S04, the execution unit 300 moves to the first target position, grabs the plug 30, and executes the operation of plugging the plug 30 into the plugging hole 20;

[0093] Step S05, based on the coordinate position information of the blocked hole 20, controlling the execution unit 300 to move to a second target position;

[0094] Step S06, the execution unit 300 moves to the second target position and performs an operation of measuring the distance through the distance measuring sensor 331;

[0095] Step S07 , based on the distances measured by the distance measuring sensors 331 , determining whether the hole plugging operation at the hole plugging position 20 is qualified.

[0096] Exemplarily, the above step S07 specifically includes:

[0097] Step S071: when the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all greater than or equal to the second threshold, it is determined that the hole 20 at the blocking hole 20 position is not blocked or the blocking hole operation is unqualified;

[0098] Step S072: when the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position 20 is qualified;

[0099] Step S073: when the difference between the distances measured by the plurality of distance measuring sensors 331 is greater than the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position 20 is unqualified.

[0100] Since the principle of solving the problem by the hole plugging method 20 provided in the embodiment of the present disclosure is similar to the principle of solving the problem by the above-mentioned hole plugging device, the embodiment of the hole plugging method 20 provided in the embodiment of the present disclosure can refer to the embodiment of the above-mentioned hole plugging device provided in the embodiment of the present disclosure, and will not be repeated here.

[0101] In addition, an embodiment of the present disclosure further provides a wafer processing device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method described above when executing the computer program.

[0102] The other essential components of the wafer processing equipment should be understood by ordinary technicians in this field and will not be elaborated here, nor should they be regarded as limitations of the present disclosure.

[0103] Since the principle of solving the problem by the wafer processing equipment is similar to the principle of solving the problem by the above-mentioned hole plugging device, the embodiment of the wafer processing equipment provided in the embodiment of the present disclosure can refer to the embodiment of the above-mentioned hole plugging device provided in the embodiment of the present disclosure, and will not be repeated here.

[0104] There are a few points to note:

[0105] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0106] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0107] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0108] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A hole plugging device, characterized in that: include: An image acquisition unit, used to acquire image information of a local area with a blocked hole on the workpiece; A control unit, used to obtain coordinate position information of the blocked hole based on the image information; and An execution unit, the execution unit includes an execution end, the execution end is provided with a plug mounting component for grabbing the plug; the execution end is also provided with a detection unit, the detection unit includes a plurality of distance measuring sensors, the distance measuring sensors are used to measure the distance from the distance measuring sensor itself to the workpiece along the first direction; The control unit is also used to control the execution unit to move to a first target position or a second target position based on the coordinate position information of the blocked hole; and the execution unit is used to execute the operation of plugging the plug into the blocked hole when it is at the first target position; and execute the operation of measuring the distance through the ranging sensor when it is at the second target position; the control unit is also used to determine whether the hole blocking operation at the hole blocking position is qualified based on the distances measured by several of the ranging sensors.

2. The hole plugging device according to claim 1, characterized in that: A base is provided on the execution end, the detection unit and the plug mounting component are arranged on the base at intervals along a second direction, and the base is constructed to be retractable along the first direction, wherein the second direction is perpendicular to the first direction.

3. The hole plugging device according to claim 1, characterized in that: The distance measuring sensor includes an optical sensor.

4. The hole plugging device according to claim 2, characterized in that: The detection unit further comprises a rangefinder mounting component, which is constructed in a circular or ring shape matching the shape and size of the blocking hole, and a plurality of the rangefinder sensors are evenly distributed along the circumference of the rangefinder mounting component.

5. The hole plugging device according to claim 4, characterized in that: The rangefinder mounting component is detachably mounted on the base; and / or, the rangefinder mounting component is configured to have an adjustable diameter.

6. The hole plugging device according to claim 1, characterized in that: The control unit is further used to determine whether the hole plugging operation at the hole plugging position is qualified based on the distances measured by the plurality of distance measuring sensors, specifically including: When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to the second threshold, it is determined that the hole blocking position is not blocked or the blocking operation is unqualified; When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is qualified; When the difference between the distances measured by the plurality of distance measuring sensors is greater than the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is unqualified.

7. The hole plugging device according to claim 1, characterized in that: The execution unit includes a robot.

8. A method for plugging a hole, characterized in that: Applicable to the hole plugging device according to any one of claims 1 to 7; the hole plugging method comprises the following steps: Collect image information of a local area with a blocked hole on the workpiece; Based on the image information, obtaining coordinate position information of the blocked hole; Based on the coordinate position information of the blocked hole, controlling the execution unit to move to a first target position; The execution unit moves to the first target position, grabs the plug, and executes the operation of plugging the plug into the plugging hole; Based on the coordinate position information of the blocked hole, controlling the execution unit to move to a second target position; The execution unit moves to the second target position and performs the operation of measuring the distance through the distance measuring sensor; Based on the distances measured by the plurality of distance measuring sensors, it is determined whether the hole plugging operation at the hole plugging position is qualified.

9. The hole plugging method according to claim 8, characterized in that: The determining whether the hole plugging operation at the hole plugging position is qualified based on the distances measured by the plurality of distance measuring sensors specifically includes: When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to the second threshold, it is determined that the hole blocking position is not blocked or the blocking operation is unqualified; When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is qualified; When the difference between the distances measured by the plurality of distance measuring sensors is greater than the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, it is determined that the hole plugging operation at the hole plugging position is unqualified.

10. A wafer processing device, comprising a memory and a processor, wherein the memory stores a computer program, characterized in that: When the processor executes the computer program, the steps of the method according to any one of claims 8 to 9 are implemented.

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