A performance testing system, method, and semiconductor process equipment for special gas delivery components.

Abstract

This invention relates to a performance testing system, method, and semiconductor process equipment for special gas delivery components. The performance testing system for special gas delivery components includes a first gas delivery unit, at least one testing unit, and a first vacuum unit. Its advantages lie in that, by connecting the testing unit to the first gas delivery unit and the first vacuum unit respectively, the testing unit can perform external leakage detection on the special gas delivery components. Furthermore, the testing unit can be equipped with various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, one-way valves, and pressure regulating valves, thereby enabling the system to test a variety of products and improving the overall applicability of the testing system.

Description

Technical Field

[0001] This invention relates to the field of testing technology for special gas delivery components, and in particular to a performance testing system, method, and semiconductor process equipment for special gas delivery components. Background Technology

[0002] In the semiconductor manufacturing industry, product performance is not only an important indicator of its technological advancement, but also a key factor directly affecting the quality of semiconductor products. The performance of semiconductor products includes, but is not limited to, electrical characteristics, thermal stability, reliability, and durability. Precise control of these performance parameters is crucial to ensuring the quality and reliability of the final product.

[0003] To effectively monitor and optimize the performance of semiconductor products, the industry widely employs a series of sophisticated testing methods. Among these, the testing of specialty gas delivery components is particularly crucial. As an indispensable part of the semiconductor manufacturing process, specialty gas delivery components are responsible for precisely controlling and delivering various specialty gases (such as doping gases and etching gases) to each stage of the production line. The purity, flow rate, and stability of these gases directly affect the manufacturing precision and performance of semiconductor devices.

[0004] Existing testing equipment for specialty gas delivery components typically only tests one type of product (e.g., valve bodies). However, when different specialty gas delivery components need to be tested, different testing equipment must be used, resulting in low practical applicability. Furthermore, while some semiconductor companies' testing equipment can be adapted to various specialty gas delivery components, such equipment can only test one performance characteristic of the component (i.e., flow rate, pressure, temperature, etc.), failing to provide comprehensive performance testing and thus exhibiting limitations.

[0005] Currently, no effective solutions have been proposed to address the problems existing in related technologies, such as the inability of existing testing equipment to adapt to different special gas delivery components for testing and the inability to comprehensively test the various performance characteristics of special gas delivery components. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of existing technologies by providing a performance testing system, method, and semiconductor process equipment for special gas delivery components. This addresses the problems in the existing testing equipment, such as its inability to adapt to different special gas delivery components and its inability to comprehensively test various performance characteristics of special gas delivery components.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0008] In a first aspect, the present invention provides a performance testing system for special gas delivery components, comprising:

[0009] The first gas delivery unit is connected to a high-pressure nitrogen source and is used to deliver high-pressure nitrogen for external leakage detection.

[0010] At least one test unit is provided, which is located downstream of the first gas delivery unit and connected to the first gas delivery unit, and is used to cooperate with the first gas delivery unit to perform external leakage detection.

[0011] A first vacuum unit is located downstream of and connected to the test unit, and is used to discharge test exhaust gas.

[0012] In some of these embodiments, it also includes:

[0013] A purging unit is located downstream of the first gas delivery unit and upstream of the test unit, and is connected to the first gas delivery unit, the test unit, and the waste gas treatment equipment, respectively. It is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the test unit and discharge the purging waste gas to the waste gas treatment equipment.

[0014] In some of these embodiments, it also includes:

[0015] The second gas delivery unit is connected to the high-pressure helium source and the test unit respectively, and is used to deliver high-pressure helium for internal leak detection.

[0016] The test unit works in conjunction with the second gas delivery unit to perform internal leakage detection.

[0017] In some of these embodiments, it also includes:

[0018] A pressurization unit is connected to the first gas delivery unit and the test unit, respectively, and is used to pressurize the test gas and deliver the pressurized test gas to the test unit.

[0019] In some of these embodiments, it also includes:

[0020] A first flow detection unit, which is connected to the test unit, is used to detect the gas flow rate input to the test unit;

[0021] The second flow detection unit is connected to the test unit and is used to detect the gas flow rate output by the test unit.

[0022] In a second aspect, the present invention also provides a semiconductor process apparatus, comprising:

[0023] The first aspect describes a performance testing system for specialty gas delivery components. A third aspect of the invention also provides a method for testing the performance of specialty gas delivery components, applied to the first aspect's performance testing system for specialty gas delivery components or the second aspect's semiconductor process equipment, comprising:

[0024] The first gas delivery unit works in conjunction with the test unit to perform external leakage detection on the special gas delivery components installed on the test unit.

[0025] In some of these embodiments, it also includes:

[0026] The second gas delivery unit works in conjunction with the test unit to perform internal leakage detection on the special gas delivery components installed on the test unit.

[0027] In some of these embodiments, it also includes:

[0028] The purging unit obtains high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit and discharge the purging exhaust gas to the exhaust gas treatment equipment.

[0029] In some of these embodiments, it also includes:

[0030] The pressurization unit pressurizes the test gas and delivers the pressurized test gas to the test unit to perform overpressure and pressure holding tests on the special gas delivery components installed on the test unit.

[0031] In some of these embodiments, it also includes:

[0032] With the first gas delivery unit delivering low-pressure gas to the front end of the test unit through the purging unit and the purging unit creating a vacuum condition at the rear end of the test unit, the valve body of the test unit is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit.

[0033] In some of these embodiments, it also includes:

[0034] The gas flow rate and gas pressure obtained by the test unit are obtained through the first flow detection unit and the second flow detection unit, so as to perform CV value test on the special gas delivery components installed on the test unit.

[0035] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0036] This invention discloses a performance testing system, method, and semiconductor process equipment for special gas delivery components. By connecting the testing unit to a first gas delivery unit and a first vacuum unit, the testing unit can perform external leakage detection on special gas delivery components. In addition, various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, check valves, and pressure regulating valves can be installed on the testing unit, thereby enabling the system to test a variety of products and improving the overall applicability of the testing system. Attached Figure Description

[0037] Figure 1 This is a schematic diagram (a) of a performance testing system for special gas delivery components according to an embodiment of the present invention.

[0038] Figure 2 This is a schematic diagram of the structure of the first gas delivery unit, the testing unit, and the first vacuum unit according to an embodiment of the present invention;

[0039] Figure 3 This is a schematic diagram (II) of a performance testing system for special gas delivery components according to an embodiment of the present invention.

[0040] Figure 4 This is a schematic diagram of the structure of the purging unit according to an embodiment of the present invention;

[0041] Figure 5 This is a schematic diagram (III) of a performance testing system for special gas delivery components according to an embodiment of the present invention.

[0042] Figure 6 This is a schematic diagram of the structure of the second gas delivery unit according to an embodiment of the present invention;

[0043] Figure 7 This is a schematic diagram (IV) of a special gas delivery component performance testing system according to an embodiment of the present invention.

[0044] Figure 8 This is a schematic diagram of the supercharging unit according to an embodiment of the present invention;

[0045] Figure 9 This is a schematic diagram (V) of a special gas delivery component performance testing system according to an embodiment of the present invention.

[0046] Figure 10 This is a schematic diagram of the structure of the first flow detection unit and the second flow detection unit according to an embodiment of the present invention;

[0047] Figure 11 This is a specific embodiment of the performance testing system for special gas delivery components according to an embodiment of the present invention.

[0048] The reference numerals in the accompanying drawings are as follows: 100, first gas delivery unit; 101, purification element; 102, filtration element; 103, first manual control element; 104, first automatic control element; 105, first detection element; 106, fifth manual control element; 107, fifth automatic control element; 108, fifth detection element; 109, sixth manual control element; 110, sixth automatic control element;

[0049] 200. Test unit; 201. Test disk element; 202. Second manual control element; 203. Second automatic control element; 204. Second detection element; 205. Third detection element; 206. Third manual control element; 207. Third automatic control element; 208. Fourth detection element; 209. Helium gas test element; 210. Eleventh manual control element; 211. Tenth automatic control element;

[0050] 300. First vacuum unit; 301. First vacuum element; 302. Fourth manual control element; 303. Fourth automatic control element; 304. First unidirectional element;

[0051] 400. Purge unit; 401. First pressure regulating element; 402. Second vacuum element; 403. Seventh manual control element; 404. Seventh automatic control element; 405. Eighth manual control element; 406. Eighth automatic control element; 407. Second unidirectional element; 408. Ninth manual control element; 409. Sixth detection element; 410. Third unidirectional element;

[0052] 500. Second gas delivery unit; 501. Tenth manual control element; 502. Second pressure regulating element; 503. Ninth automatic control element; 504. Micro-leakage control element;

[0053] 600. Boosting unit; 601. Boosting element; 602. Twelfth manual control element; 603. Eleventh automatic control element; 604. Thirteenth manual control element; 605. Twelfth automatic control element;

[0054] 700. First flow detection unit; 701. First flow detection element; 702. Fourteenth manual control element; 703. Thirteenth automatic control element; 704. Fifteenth manual control element; 705. Fourteenth automatic control element;

[0055] 800. Second flow detection unit; 801. Second flow detection element; 802. Third flow detection element; 803. Sixteenth manual control element; 804. Fifteenth automatic control element; 805. Third pressure regulating element; 806. Fourth unidirectional element; 807. Seventeenth manual control element; 808. Sixteenth automatic control element; 809. Fifth unidirectional element. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0057] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0058] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0059] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms “a,” “an,” “an,” “the,” and similar words used in this application do not indicate quantity limitation and may indicate singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units not listed, or may include other steps or units inherent to these processes, methods, products, or devices. The terms “connected,” “linked,” “coupled,” and similar words used in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. “Multiple” used in this application refers to two or more. “And / or” describes the relationship between related objects, indicating that three relationships may exist; for example, “A and / or B” can represent: A alone, A and B simultaneously, and B alone. The character " / " generally indicates that the preceding and following objects are in an "or" relationship. The terms "first," "second," and "third" used in this application are merely to distinguish similar objects and do not represent a specific ordering of the objects.

[0060] Example 1

[0061] This embodiment relates to the performance testing system for special gas delivery components of the present invention.

[0062] An illustrative embodiment of the present invention, such as Figure 1 As shown, a performance testing system for special gas delivery components includes a first gas delivery unit 100, at least one testing unit 200, and a first vacuum unit 300. The first gas delivery unit 100 is connected to a high-pressure nitrogen source and is used to deliver high-pressure nitrogen for external leakage detection. The testing unit 200 is located downstream of and connected to the first gas delivery unit 100, and works in conjunction with the first gas delivery unit 100 to perform external leakage detection. The first vacuum unit 300 is located downstream of and connected to the testing unit 200, and is used to discharge test waste gas.

[0063] It should be noted that the first end and the second end in this invention are respectively the two ends in the length direction.

[0064] like Figure 2As shown, the first gas delivery unit 100 includes a first gas delivery element, a purification element 101, and a filter element 102. The first gas delivery element is connected to both a high-pressure nitrogen source and a testing unit 200, and is used to deliver high-pressure nitrogen to the testing unit 200. The purification element 101 is disposed on the first gas delivery element and is used to purify the high-pressure nitrogen to improve its purity and reduce its humidity. The filter element 102 is disposed on the first gas delivery element and located downstream of the purification element 101, and is used to filter the high-pressure nitrogen to remove particulate matter.

[0065] Specifically, the first end of the first gas delivery element is connected to the high-pressure nitrogen pipeline, and the second end of the first gas delivery element is connected to the test unit 200.

[0066] In some of these embodiments, the first gas delivery element includes, but is not limited to, a stainless steel tube.

[0067] Specifically, the purification element 101 can purify the high-pressure nitrogen gas delivered by the first gas delivery element to remove moisture and oxygen from the high-pressure nitrogen gas.

[0068] In some of these embodiments, the purification element 101 includes, but is not limited to, a high-pressure purifier.

[0069] Specifically, the filter element 102 can filter the high-pressure nitrogen gas after it has been treated by the purification element 101, thereby removing particulate matter from the high-pressure nitrogen gas.

[0070] In some of these embodiments, the filter element 102 includes, but is not limited to, a particulate filter.

[0071] Furthermore, the first gas delivery unit 100 also includes a first manual control element 103, a first automatic control element 104, and a first detection element 105. The first manual control element 103 is disposed on the first gas delivery element and located downstream of the filter element 102, and is used to manually control the opening and closing of the first gas delivery element; the first automatic control element 104 is disposed on the first gas delivery element and located downstream of the first manual control element 103, and is used to automatically control the opening and closing of the first gas delivery element; the first detection element 105 is disposed on the first gas delivery element and located downstream of the first automatic control element 104, and is used to detect the temperature and pressure of the first gas delivery element.

[0072] In some of these embodiments, the first manual control element 103 includes, but is not limited to, a manual diaphragm valve.

[0073] In some of these embodiments, the first automatic control element 104 includes, but is not limited to, a pneumatic diaphragm valve.

[0074] In some of these embodiments, the first detection element 105 includes, but is not limited to, a temperature and pressure sensor.

[0075] like Figure 2 As shown, the test unit 200 includes a first test gas input element, a test disk element 201, and a first test gas output element. The first test gas input element is connected to the first gas delivery unit 100 and is used to acquire high-pressure nitrogen gas; the test disk element 201 is connected to the first test gas input element and is used for external leakage detection; the first test gas output element is connected to both the test disk element 201 and the first vacuum unit 300 and is used to output test waste gas.

[0076] Specifically, the first end of the first test gas input element is connected to the first gas delivery element, and the second end of the first test gas input element is connected to the test disk element 201.

[0077] In some of these embodiments, the first test gas input element includes, but is not limited to, a stainless steel tube.

[0078] Specifically, the test plate element 201 can be connected to the first test gas input element and the first test gas output element, and the test plate element 201 can be used to install components such as manual diaphragm valve, pneumatic diaphragm valve, vacuum transmitter, check valve, and pressure regulating valve.

[0079] In some of these embodiments, the test disk element 201 includes, but is not limited to, a test bench.

[0080] Specifically, the first end of the first test gas output element is connected to the test disk element 201, and the second end of the first test gas output element is connected to the first vacuum unit 300.

[0081] In some of these embodiments, the first test gas output element includes, but is not limited to, a stainless steel tube.

[0082] Furthermore, the test unit 200 also includes a first insulation element, a second insulation element, a second manual control element 202, a second automatic control element 203, a second detection element 204, a third detection element 205, a third manual control element 206, a third automatic control element 207, and a fourth detection element 208. Specifically, the first insulation element is disposed on the first test gas input element for insulation; the second insulation element is disposed on the first test gas output element for insulation; the second manual control element 202 is disposed on the first test gas input element for manual control of the opening and closing of the first test gas input element; the second automatic control element 203 is disposed on the first test gas input element and located upstream of the second manual control element 202 for automatic control of the opening and closing of the first test gas input element; the second detection element 204 is disposed on the first test gas input element and located downstream of the second manual control element 202 for detecting the temperature and pressure of the first test gas input element; the third detection element 205, the second manual control element 206, the third automatic control element 207, and the fourth detection element 208. A sensing element 205 is disposed on the first test gas output element and is used to detect the temperature and pressure of the first test gas output element; a third manual control element 206 is disposed on the first test gas output element and is located downstream of the third sensing element 205, and is used to manually control the opening and closing of the first test gas output element; a third automatic control element 207 is disposed on the first test gas output element and is located downstream of the third manual control element 206, and is used to automatically control the opening and closing of the first test gas output element; a fourth sensing element 208 is disposed on the first test gas output element and is located downstream of the third automatic control element 207, and is used to detect the temperature and pressure of the first test gas output element.

[0083] Specifically, the first insulation element covers the outer wall of the first test gas input element to insulate the first test gas input element.

[0084] In some of these embodiments, the first insulation element includes, but is not limited to, an insulation sleeve.

[0085] Specifically, the second insulation element covers the outer wall of the first test gas output element to insulate the first test gas output element.

[0086] In some of these embodiments, the second insulation element includes, but is not limited to, an insulation sleeve.

[0087] In some of these embodiments, the second manual control element 202 includes, but is not limited to, a manual diaphragm valve.

[0088] In some of these embodiments, the second automatic control element 203 includes, but is not limited to, a pneumatic diaphragm valve.

[0089] In some of these embodiments, the second detection element 204 includes, but is not limited to, a temperature and pressure sensor.

[0090] In some of these embodiments, the third detection element 205 includes, but is not limited to, a temperature and pressure sensor.

[0091] In some of these embodiments, the third manual control element 206 includes, but is not limited to, a manual diaphragm valve.

[0092] In some of these embodiments, the third automatic control element 207 includes, but is not limited to, an automatic diaphragm valve.

[0093] In some of these embodiments, the fourth detection element 208 includes, but is not limited to, a temperature and pressure sensor.

[0094] like Figure 2 As shown, the first vacuum unit 300 includes a first exhaust gas delivery element and a first vacuum element 301. The first exhaust gas delivery element is located downstream of and connected to the test unit 200, and is used to exhaust test waste gas; the first vacuum element 301 is located on the first exhaust gas delivery element and is used to create a vacuum environment for the first exhaust gas delivery element.

[0095] Specifically, the first end of the first emission gas delivery element is connected to the first test gas output element, and the second end of the first emission gas delivery element is connected to the exhaust port.

[0096] In some of these embodiments, the first exhaust gas delivery element includes, but is not limited to, a stainless steel pipe.

[0097] Specifically, the first vacuum element 301 is used to provide a vacuum negative pressure at the end of the first exhaust gas delivery element, thereby allowing the test exhaust gas inside the first exhaust gas delivery element to be discharged.

[0098] In some of these embodiments, the first vacuum element 301 includes, but is not limited to, a vacuum pump.

[0099] Furthermore, the first vacuum unit 300 also includes a fourth manual control element 302, a fourth automatic control element 303, and a first unidirectional element 304. The fourth manual control element 302 is disposed on the first exhaust gas conveying element and is used to manually control the opening and closing of the first exhaust gas conveying element; the fourth automatic control element 303 is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element 302, and is used to automatically control the opening and closing of the first exhaust gas conveying element; the first unidirectional element 304 is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element 302 and upstream of the first vacuum element 301, and is used to ensure unidirectional flow of the test exhaust gas.

[0100] In some of these embodiments, the fourth manual control element 302 includes, but is not limited to, a manual diaphragm valve.

[0101] In some of these embodiments, the fourth automatic control element 303 includes, but is not limited to, a pneumatic diaphragm valve.

[0102] In some of these embodiments, the first one-way element 304 includes, but is not limited to, a one-way valve.

[0103] The usage method of this embodiment is as follows:

[0104] In the actual test, the staff manually opened all the manual diaphragm valves in the entire test system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the system test.

[0105] Subsequently, the system activates the first automatic control element 104, causing the purification element 101 and the filter element 102 to filter the high-pressure nitrogen gas delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter from the high-pressure nitrogen gas.

[0106] Then, the system activates the second automatic control element 203, causing the first gas delivery element to deliver high-pressure nitrogen to the test plate element 201. The external leakage detection of the special gas delivery element is performed by observing the changes in the values ​​of the second detection element 204 and the third detection element 205.

[0107] Finally, after the external leakage detection is completed, the system activates the third automatic control element 207, the fourth automatic control element 303, and the first vacuum element 301, so that the test exhaust gas can be discharged through the first exhaust gas delivery element.

[0108] The advantage of this embodiment is that by connecting the test unit to the first gas delivery unit and the first vacuum unit respectively, the test unit can perform external leakage detection on special gas delivery components. In addition, various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, check valves, and pressure regulating valves can be installed on the test unit, thereby enabling the system to test a variety of products and improving the applicability of the overall test system.

[0109] Example 2

[0110] This embodiment is a modified embodiment of embodiment 1.

[0111] like Figure 3 As shown, the performance testing system for special gas delivery components also includes a purging unit 400. The purging unit 400 is located downstream of the first gas delivery unit 100 and upstream of the testing unit 200, and is connected to the first gas delivery unit 100, the testing unit 200, and the waste gas treatment equipment, respectively. It is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the testing unit 200 and discharge the purging waste gas to the waste gas treatment equipment.

[0112] It should be noted that when replacing the special gas delivery components on the test unit 200, the pipelines in the entire test system need to be purged. This is achieved by setting up a purging unit 400 and cooperating with the first gas delivery unit 100 to perform the purging operation on the pipelines in the entire test system.

[0113] like Figure 4 As shown, the first gas delivery unit 100 also includes a second gas delivery element and a third gas delivery element. The second gas delivery element is connected to the first gas delivery element of the first gas delivery unit 100 and is used to acquire and deliver high-pressure nitrogen gas; the third gas delivery element is connected to the second gas delivery element, the purging unit 400, and the testing unit 200, respectively, and is used to acquire and deliver high-pressure nitrogen gas and low-pressure nitrogen gas to the testing unit 200.

[0114] Specifically, the first end of the second gas delivery element is connected to the first gas delivery element, and the connection between the first end of the second gas delivery element and the first gas delivery element is located downstream of the first detection element 105. The second end of the second gas delivery element is connected to the first end of the third gas delivery element.

[0115] In some of these embodiments, the second gas delivery element includes, but is not limited to, a stainless steel tube.

[0116] Specifically, the first end of the third gas delivery element is connected to the second end of the second gas delivery element and the second end of the purging unit 400, and the second end of the third gas delivery element is connected to the first end of the first test gas input element.

[0117] In some of these embodiments, the third gas delivery element includes, but is not limited to, a stainless steel tube.

[0118] Furthermore, the first gas delivery unit 100 also includes a fifth manual control element 106, a fifth automatic control element 107, a fifth detection element 108, a sixth manual control element 109, and a sixth automatic control element 110. Specifically, the fifth manual control element 106 is disposed on the second gas delivery element and is used to manually control the opening and closing of the second gas delivery element; the fifth automatic control element 107 is disposed on the second gas delivery element and upstream of the fifth manual control element 106, and is used to automatically control the opening and closing of the second gas delivery element; the fifth detection element 108 is disposed on the third gas delivery element and is used to detect the temperature and pressure of the third gas delivery element; the sixth manual control element 109 is disposed on the third gas delivery element and downstream of the fifth detection element 108, and is used to manually control the opening and closing of the third gas delivery element; the sixth automatic control element 110 is disposed on the third gas delivery element and upstream of the sixth manual control element 109, and is used to automatically control the opening and closing of the third gas delivery element.

[0119] In some of these embodiments, the fifth manual control element 106 includes, but is not limited to, a manual diaphragm valve.

[0120] In some of these embodiments, the fifth automatic control element 107 includes, but is not limited to, a pneumatic diaphragm valve.

[0121] In some of these embodiments, the fifth detection element 108 includes, but is not limited to, a temperature and pressure sensor.

[0122] In some embodiments, the sixth manual control element 109 includes, but is not limited to, a manual diaphragm valve.

[0123] In some of these embodiments, the sixth automatic control element 110 includes, but is not limited to, a pneumatic diaphragm valve.

[0124] like Figure 4 As shown, the purging unit 400 includes a purging gas delivery element, a first pressure regulating element 401, a second exhaust gas delivery element, a second vacuum element 402, and a power gas delivery element. The purging gas delivery element is located downstream of the first gas delivery unit 100 and upstream of the test unit 200, and is connected to both units, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test unit 200. The first pressure regulating element 401 is located on the purging gas delivery element and is used to regulate the pressure of the high-pressure nitrogen to obtain low-pressure nitrogen. The second exhaust gas delivery element is located downstream of the test unit 200 and is connected to it, for discharging purging exhaust gas. The second vacuum element 402 is located on the second exhaust gas delivery element and is used to create a vacuum environment within the second exhaust gas delivery element. The power gas delivery element is connected to both a power gas source and the second vacuum element 402, for delivering power gas to the second vacuum element 402.

[0125] Specifically, the first end of the purge gas delivery element is connected to the second end of the first gas delivery element, and the second end of the purge gas delivery element is connected to the first end of the third gas delivery element.

[0126] In some embodiments, the purging gas delivery element includes, but is not limited to, a stainless steel tube.

[0127] Specifically, the first pressure regulating element 401 can adjust the gas pressure inside the first gas conveying element's input purging gas conveying element, thereby adjusting the high-pressure nitrogen gas inside the first gas conveying element to low-pressure nitrogen gas.

[0128] In some of these embodiments, the first pressure regulating element 401 includes, but is not limited to, a pressure regulating valve.

[0129] Specifically, the first end of the second exhaust gas delivery element is connected to the second end of the first exhaust gas delivery element, and the connection between the second exhaust gas delivery element and the first exhaust gas delivery element is located between the fourth detection element 208 and the sixth manual control element 109. The second end of the second exhaust gas delivery element is connected to the exhaust port.

[0130] In some of these embodiments, the second exhaust gas delivery element includes, but is not limited to, a stainless steel tube.

[0131] Specifically, the second vacuum element 402 can create a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby allowing the gas in each pipeline of the test system to be quickly discharged through the second exhaust gas delivery element.

[0132] In some of these embodiments, the second vacuum element 402 includes, but is not limited to, a Venturi vacuum pump.

[0133] Specifically, the first end of the power gas delivery element is connected to the low-pressure nitrogen pipeline, and the second end of the power gas delivery element is connected to the second vacuum element 402.

[0134] In some of these embodiments, the power gas delivery element includes, but is not limited to, a stainless steel tube.

[0135] Furthermore, the purging unit 400 also includes a seventh manual control element 403, a seventh automatic control element 404, an eighth manual control element 405, an eighth automatic control element 406, a second one-way element 407, a ninth manual control element 408, a sixth detection element 409, and a third one-way element 410. Specifically, the seventh manual control element 403 is located on the purging gas delivery element and downstream of the first pressure regulating unit, and is used to manually control the opening and closing of the purging gas delivery element; the seventh automatic control element 404 is located on the purging gas delivery element and downstream of the first pressure regulating unit and upstream of the seventh manual control element 403, and is used to automatically control the opening and closing of the purging gas delivery element; the eighth manual control element 405 is located on the second exhaust gas delivery element and is used to manually control the opening and closing of the second exhaust gas delivery element; the eighth automatic control element 406 is located on the second exhaust gas delivery element and downstream of the eighth manual control element 405, and is used to automatically control the second exhaust gas delivery element. The gas conveying element is opened and closed; a second unidirectional element 407 is disposed on the second exhaust gas conveying element and is located downstream of the eighth automatic control element 406 and upstream of the second vacuum element 402, for making the purge exhaust gas flow in one direction; a ninth manual control element 408 is disposed on the power gas conveying element and is used to manually control the opening and closing of the power gas conveying element; a sixth detection element 409 is disposed on the power gas conveying element and is located downstream of the ninth manual control element 408, for detecting the temperature and pressure of the power gas conveying element; a third unidirectional element 410 is disposed on the power gas conveying element and is located downstream of the sixth detection element 409, for making the power gas flow in one direction.

[0136] In some of these embodiments, the seventh manual control element 403 includes, but is not limited to, a manual diaphragm valve.

[0137] In some of these embodiments, the seventh automatic control element 404 includes, but is not limited to, a pneumatic diaphragm valve.

[0138] In some embodiments, the eighth manual control element 405 includes, but is not limited to, a manual diaphragm valve.

[0139] In some of these embodiments, the eighth automatic control element 406 includes, but is not limited to, a pneumatic diaphragm valve.

[0140] In some of these embodiments, the second one-way element 407 includes, but is not limited to, a one-way valve.

[0141] In some of these embodiments, the ninth manual control element 408 includes, but is not limited to, a manual diaphragm valve.

[0142] In some of these embodiments, the ninth automatic control element 503 includes, but is not limited to, a pneumatic diaphragm valve.

[0143] In some of these embodiments, the sixth detection element 409 includes, but is not limited to, a temperature and pressure sensor.

[0144] In some of these embodiments, the third one-way element 410 includes, but is not limited to, a one-way valve.

[0145] The usage method of this embodiment is as follows:

[0146] After testing a special gas delivery component, in actual work, the staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0147] Subsequently, the system activates the second automatic control element 203, the third automatic control element 207, the fourth automatic control element 303, the sixth automatic control element 110, the seventh automatic control element 404, and the eighth automatic control element 406, and deactivates the first automatic control element 104. The second vacuum element 402 provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby making the pipeline in the entire test system a vacuum state.

[0148] Then, the system activates the first automatic control element 104 and deactivates the eighth automatic control element 406, so that the high-pressure nitrogen gas is converted into low-pressure nitrogen gas through the first pressure regulating element 401, and the low-pressure nitrogen gas fills the entire test system pipeline, and the gas pressure in the pipeline reaches the standard requirement and is maintained for a period of time.

[0149] Finally, the system shuts down the first automatic control element 104 and turns on the eighth automatic control element 406. The second vacuum element 402 provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby venting the gas in the pipeline of the entire test system.

[0150] The advantage of this embodiment is that by setting up a purging unit and cooperating with the first gas delivery unit, the pipeline in the entire test system can be purged, thereby improving the accuracy of subsequent special gas delivery component testing.

[0151] Example 3

[0152] This embodiment is a modified embodiment of Embodiments 1-2.

[0153] like Figure 5 As shown, the special gas delivery component performance testing system also includes a second gas delivery unit 500. The second gas delivery unit 500 is connected to both a high-pressure helium source and a testing unit 200, and is used to deliver high-pressure helium for internal leak detection; the testing unit 200 cooperates with the second gas delivery unit 500 to perform internal leak detection.

[0154] like Figure 6As shown, the second gas delivery unit 500 includes a fourth gas delivery element. This fourth gas delivery element is connected to both a high-pressure helium source and the test unit 200, and is used to deliver high-pressure helium to the test unit 200.

[0155] Specifically, the first end of the fourth gas delivery element is connected to the high-pressure helium pipeline, and the second end of the fourth gas delivery element is connected to the first end of the first test gas input element.

[0156] In some of these embodiments, the fourth gas delivery element includes, but is not limited to, a stainless steel tube.

[0157] Furthermore, the second gas delivery unit 500 also includes a tenth manual control element 501, a second pressure regulating element 502, a ninth automatic control element 503, and a micro-leakage control element 504. Specifically, the tenth manual control element 501 is disposed on the fourth gas delivery element and is used to manually control the opening and closing of the fourth gas delivery element; the second pressure regulating element 502 is disposed on the fourth gas delivery element and located downstream of the tenth manual control element 501, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium; the ninth automatic control element 503 is disposed on the fourth gas delivery element and located downstream of the second pressure regulating element 502, and is used to automatically control the opening and closing of the fourth gas delivery element; and the micro-leakage control element 504 is disposed on the fourth gas delivery element and located downstream of the ninth automatic control element 503.

[0158] In some embodiments, the tenth manual control element 501 includes, but is not limited to, a manual diaphragm valve.

[0159] In some of these embodiments, the second pressure regulating element 502 includes, but is not limited to, a pressure regulating valve.

[0160] In some of these embodiments, the ninth automatic control element 503 includes, but is not limited to, a pneumatic diaphragm valve.

[0161] In some of these embodiments, the microleak control element 504 includes, but is not limited to, a microleak valve.

[0162] like Figure 6 As shown, the test unit 200 also includes a second test gas input element and a helium test element 209. The second test gas input element is connected to the first test gas output element of the test unit 200 and is used to acquire the test gas; the helium test element 209 is connected to the second test gas input element and is used for internal leak detection.

[0163] Specifically, the first end of the second test gas input element is connected to the second end of the first test gas output element, and the second end of the second test gas input element is connected to the helium test element 209.

[0164] In some of these embodiments, the second test gas input element includes, but is not limited to, a stainless steel tube.

[0165] In some of these embodiments, the helium testing element 209 includes, but is not limited to, a helium detector.

[0166] Furthermore, the test unit 200 also includes an eleventh manual control element 210 and a tenth automatic control element 211. The eleventh manual control element 210 is disposed on the second test gas input element and is used to manually control the opening and closing of the second test gas input element; the tenth automatic control element 211 is disposed on the second test gas input element and is located downstream of the eleventh manual control element 210, and is used to automatically control the opening and closing of the second test gas input element.

[0167] In some embodiments, the eleventh manual control element 210 includes, but is not limited to, a manual diaphragm valve.

[0168] In some of these embodiments, the tenth automatic control element 211 includes, but is not limited to, a pneumatic diaphragm valve.

[0169] like Figure 6 As shown, the test unit 200 also includes a second test gas output element. The second test gas output element is connected to both the first test gas output element and the first vacuum unit 300 of the test unit 200, and is used to output test exhaust gas.

[0170] Specifically, the first end of the second test gas output element is connected to the second end of the first test gas output element, and the second end of the second test gas output element is connected to the first end of the first emission gas delivery element and the second end of the second emission gas delivery element.

[0171] In some of these embodiments, the second test gas output element includes, but is not limited to, a stainless steel tube.

[0172] The usage method of this embodiment is as follows:

[0173] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0174] Subsequently, the system activates the second pressure regulating element 502, thereby converting the high-pressure helium into low-pressure helium.

[0175] Then, the system activates the ninth automatic control element 503, the micro-leakage control element 504, the second automatic control element 203, the third automatic control element 207, and the tenth automatic control element 211, thereby allowing low-pressure helium gas to enter the helium gas testing element 209 through the first test gas input element, the first test gas output element, and the second test gas input element.

[0176] Finally, the staff sprayed gas towards the special gas delivery components and observed the changes in the values ​​of the helium detection element, thereby realizing the internal leakage detection of the special gas delivery components.

[0177] The advantage of this embodiment is that by connecting the second gas delivery unit with the test unit, controlling the opening and closing of the diaphragm valve at the front end of the test disk element, and observing the numerical change of the helium detection element, the internal leakage detection of the special gas delivery element can be achieved.

[0178] Example 4

[0179] This embodiment is a modified embodiment of embodiments 1 to 3.

[0180] like Figure 7 As shown, the special gas delivery component performance testing system also includes a pressurization unit 600. The pressurization unit 600 is connected to both the first gas delivery unit 100 and the testing unit 200, and is used to pressurize the test gas and deliver the pressurized test gas to the testing unit 200.

[0181] like Figure 8 As shown, the pressurization unit 600 includes a fifth gas delivery element and a pressurization element 601. The fifth gas delivery element is connected to the first test gas input element of the test unit 200 and is used to acquire test gas; the pressurization element 601 is disposed on the fifth delivery element and is used to pressurize the test gas.

[0182] Specifically, the first end of the fifth gas delivery element is connected to the first end of the first test gas input element, the second end of the fifth gas delivery element is connected to the second end of the first test gas input element, and the connection between the fifth gas delivery element and the first test gas input element is located downstream of the second automatic control element 203 and upstream of the second detection element 204.

[0183] In some of these embodiments, the fifth gas delivery element includes, but is not limited to, a stainless steel tube.

[0184] In some of these embodiments, the booster element 601 includes, but is not limited to, a booster pump.

[0185] Furthermore, the pressurization unit 600 also includes a twelfth manual control element 602, an eleventh automatic control element 603, a thirteenth manual control element 604, and a twelfth automatic control element 605. The twelfth manual control element 602 is disposed on the fifth gas delivery element and located upstream of the pressurization element 601, and is used to manually control the opening and closing of the fifth gas delivery element; the eleventh automatic control element 603 is disposed on the fifth gas delivery element and located upstream of the twelfth manual control element 602, and is used to automatically control the opening and closing of the fifth gas delivery element; the thirteenth manual control element 604 is disposed on the fifth gas delivery element and located downstream of the pressurization element 601, and is used to manually control the opening and closing of the fifth gas delivery element; the twelfth automatic control element 605 is disposed on the fifth gas delivery element and located downstream of the pressurization element 601 and upstream of the thirteenth manual control element 604, and is used to automatically control the opening and closing of the fifth gas delivery element.

[0186] In some of these embodiments, the twelfth manual control element 602 includes, but is not limited to, a manual diaphragm valve.

[0187] In some of these embodiments, the eleventh automatic control element 603 includes, but is not limited to, a pneumatic diaphragm valve.

[0188] In some of these embodiments, the thirteenth manual control element 604 includes, but is not limited to, a manual diaphragm valve.

[0189] In some of these embodiments, the twelfth automatic control element 605 includes, but is not limited to, a pneumatic diaphragm valve.

[0190] The usage method of this embodiment is as follows:

[0191] In actual work, when conducting overpressure and pressure holding tests on special gas transmission components, the staff manually open all manual diaphragm valves in the entire test system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0192] Subsequently, the system activates the first automatic control element 104, the fifth automatic control element 107, and the sixth automatic control element 110, thereby allowing the test gas to be pressure-regulated by the booster element 601, so that the pressure of the test gas exceeds the cylinder outlet pressure, and thus high-pressure test gas can be input into the front end of the test panel element 201.

[0193] Then, the system activates the second vacuum element 402, the third automatic control element 207, and the eighth automatic control element 406, thereby making the rear end of the test disk element 201 a vacuum state.

[0194] Finally, by observing the changes in the values ​​of the second detection element 204 and the third detection element 205, the staff can perform overpressure and pressure holding tests on the special gas conveying components.

[0195] The advantage of this embodiment is that the pressure of the test gas entering the test unit can be adjusted by setting a pressurization unit, thereby enabling the special gas delivery component performance testing system to test various performance characteristics of special gas delivery components.

[0196] Example 5

[0197] This embodiment is a modified embodiment of embodiments 1 to 4.

[0198] like Figure 9 As shown, the special gas delivery component performance testing system also includes a first flow detection unit 700 and a second flow detection unit 800. The first flow detection unit 700 is connected to the testing unit 200 and is used to detect the gas flow rate input to the testing unit 200; the second flow detection unit 800 is connected to the testing unit 200 and is used to detect the gas flow rate output from the testing unit 200.

[0199] like Figure 10 As shown, the first flow detection unit 700 includes a sixth gas delivery element and a first flow detection element. The sixth gas delivery element is connected to both the test unit 200 and the second gas delivery unit 500, and is used to acquire test gas. The first flow detection element is disposed on the sixth gas delivery element and is used to detect the gas flow rate input to the test unit 200.

[0200] Specifically, the first end of the sixth gas delivery element is connected to the first end of the first test gas input element, the second end of the sixth gas delivery element is connected to the first test gas input element, and the connection between the sixth gas delivery element and the first test gas input element is located downstream of the second automatic control element 203 and upstream of the second detection element 204.

[0201] In some of these embodiments, the sixth gas delivery element includes, but is not limited to, a stainless steel tube.

[0202] In some of these embodiments, the first flow detection element includes, but is not limited to, a flow controller.

[0203] Furthermore, the first flow detection unit 700 also includes a fourteenth manual control element 702, a thirteenth automatic control element 703, a fifteenth manual control element 704, and a fourteenth automatic control element 705. Specifically, the fourteenth manual control element 702 is disposed on the sixth gas conveying element and located upstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas conveying element; the thirteenth automatic control element 703 is disposed on the sixth gas conveying element and located upstream of the fourteenth manual control element 702, and is used to automatically control the opening and closing of the sixth gas conveying element; the fifteenth manual control element 704 is disposed on the sixth gas conveying element and located downstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas conveying element; the fourteenth automatic control element 705 is disposed on the sixth gas conveying element and located downstream of the first flow detection element and upstream of the fifteenth manual control element 704, and is used to automatically control the opening and closing of the sixth gas conveying element.

[0204] In some embodiments, the fourteenth manual control element 702 includes, but is not limited to, a manual diaphragm valve.

[0205] In some of these embodiments, the thirteenth automatic control element 703 includes, but is not limited to, an automatic diaphragm valve.

[0206] In some of these embodiments, the fifteenth manual control element 704 includes, but is not limited to, a manual diaphragm valve.

[0207] In some of these embodiments, the fourteenth automatic control element 705 includes, but is not limited to, an automatic diaphragm valve.

[0208] like Figure 10 As shown, the second flow detection unit 800 includes a seventh gas delivery element, a second flow detection element 801, an eighth gas delivery element, and a third flow detection element 802. The seventh gas delivery element is connected to both the test unit 200 and the first vacuum unit 300 to acquire the test gas. The second flow detection element 801 is disposed on the seventh gas delivery element and is used to detect the low-pressure gas flow rate output by the test unit 200. The eighth gas delivery element is connected to both the test unit 200 and the first vacuum unit 300 to acquire the test gas. The third flow detection element 802 is disposed on the eighth gas delivery element and is used to detect the high-pressure gas flow rate output by the test unit 200.

[0209] Specifically, the first end of the seventh gas delivery element is connected to the first test gas output element, and the connection between the first end of the seventh gas delivery element and the first test gas output element is located downstream of the third detection element 205 and upstream of the third manual control element 206. The second end of the seventh gas delivery element is connected to the second end of the first test gas output element.

[0210] In some of these embodiments, the seventh gas delivery element includes, but is not limited to, a stainless steel tube.

[0211] In some of these embodiments, the second flow detection element 801 includes, but is not limited to, a low-pressure mass flow meter.

[0212] Specifically, the first end of the eighth gas delivery element is connected to the first test gas output element, and the connection between the first end of the eighth gas delivery element and the first test gas output element is located downstream of the third detection element 205 and upstream of the third manual control element 206. The second end of the eighth gas delivery element is connected to the second end of the first test gas output element.

[0213] In some of these embodiments, the eighth gas delivery element includes, but is not limited to, a stainless steel tube.

[0214] In some of these embodiments, the third flow detection element 802 includes, but is not limited to, a high-pressure flow meter.

[0215] Furthermore, the second flow detection unit 800 also includes a sixteenth manual control element 803, a fifteenth automatic control element 804, a third pressure regulating element 805, a fourth one-way element 806, a seventeenth manual control element 807, a sixteenth automatic control element 808, and a fifth one-way element 809. Specifically, the sixteenth manual control element 803 is located upstream of the second flow detection element 801 and is used to manually control the opening and closing of the seventh gas delivery element; the fifteenth automatic control element 804 is located downstream of the sixteenth manual control element 803 and upstream of the second flow detection element 801 and is used to automatically control the opening and closing of the seventh gas delivery element; the third pressure regulating element 805 is located downstream of the second flow detection element 801 and is used to regulate the internal gas pressure of the seventh gas delivery element; and the fourth one-way element 806 is located on the seventh gas delivery element. The first manual control element 807 is located downstream of the third pressure regulating element 805 and is used to make the test exhaust gas flow in one direction. The second manual control element 807 is located upstream of the third flow detection element 802 and is used to manually control the opening and closing of the eighth gas conveying element. The third automatic control element 808 is located downstream of the seventh manual control element 807 and upstream of the third flow detection element 802 and is used to automatically control the opening and closing of the eighth gas conveying element. The fourth unidirectional element 809 is located downstream of the eighth gas conveying element and is used to make the test exhaust gas flow in one direction.

[0216] In some of these embodiments, the sixteenth manual control element 803 includes, but is not limited to, a manual diaphragm valve.

[0217] In some of these embodiments, the fifteenth automatic control element 804 includes, but is not limited to, an automatic diaphragm valve.

[0218] In some of these embodiments, the third pressure regulating element 805 includes, but is not limited to, a pressure regulating valve.

[0219] In some of these embodiments, the fourth one-way element 806 includes, but is not limited to, a one-way valve.

[0220] In some of these embodiments, the seventeenth manual control element 807 includes, but is not limited to, a manual diaphragm valve.

[0221] In some of these embodiments, the sixteenth automatic control element 808 includes, but is not limited to, an automatic diaphragm valve.

[0222] In some of these embodiments, the fifth one-way element 809 includes, but is not limited to, a one-way valve.

[0223] The usage method of this embodiment is as follows:

[0224] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0225] Subsequently, the system activates the first automatic control element 104, the seventh automatic control element 404, the sixth automatic control element 110, the thirteenth automatic control element 703, the fourteenth automatic control element 705, the fifteenth automatic control element 804, and the fourth automatic control element 303, so that the low-pressure test gas can pass through the first flow detection element, the second detection element 204, the test disk element 201, the third detection element 205, and the second flow detection element 801 in sequence, thereby obtaining the pressure and temperature of the low-pressure test gas at the front and rear ends of the test disk element 201;

[0226] Then, repeat the steps described in Example 2 to purge the entire system's pipelines to keep the pipelines clean;

[0227] Then, the system shuts down the seventh automatic control element 404 and the fifteenth automatic control element 804, and turns on the fifth automatic control element 107 and the sixteenth automatic control element 808, so that the high-pressure test gas can pass through the first flow detection element, the second detection element 204, the test disk element 201, the third detection element 205, and the third flow detection element 802 in sequence, thereby obtaining the pressure and temperature of the high-pressure test gas at the front and rear ends of the test disk element 201;

[0228] Finally, based on the pressure and temperature of the low-pressure test gas at the front and rear ends of the test disc element 201, and the pressure and temperature of the high-pressure test gas at the front and rear ends of the test disc element 201, the staff can obtain the CV value of the special gas delivery component installed on the test disc element 201.

[0229] The advantage of this embodiment is that by connecting the first flow detection unit and the second flow detection unit to the test unit, the CV value of the special gas delivery components installed on the test unit can be tested, so that the entire system can test different performance of the special gas delivery components.

[0230] Example 6

[0231] This embodiment is a modified embodiment of embodiments 1 to 5.

[0232] In this embodiment, there are two test units 200, and the two test units 200 are arranged in parallel.

[0233] It should be noted that the number of test units 200 can also be 3, 4, etc. The number of test units 200 can be set according to actual testing needs, and no further restrictions are imposed here.

[0234] Furthermore, when there are multiple test units 200, in order to control the test gas entering different test units 200, each test unit 200 further includes a seventeenth automatic control element, an eighteenth manual control element, an eighteenth automatic control element, and a nineteenth manual control element. Specifically, the seventeenth automatic control element is located downstream of the first test gas input element and upstream of the second detection element 204 where the two first test gas input elements are connected in parallel, and is used to manually control the opening and closing of the first test gas input element; the eighteenth manual control element is located downstream of the first test gas input element and upstream of the seventeenth automatic control element and the second detection element 204, and is used to automatically control the opening and closing of the first test gas input element; the eighteenth automatic control element is located downstream of the first test gas output element and upstream of the two first test gas output elements connected in parallel, and is used to automatically control the opening and closing of the first test gas output element; the nineteenth manual control element is located downstream of the first test gas output element and upstream of the eighteenth automatic control element and the two first test gas output elements connected in parallel, and is used to manually control the opening and closing of the first test gas output element.

[0235] In some of these embodiments, the seventeenth automatic control element includes, but is not limited to, a pneumatic diaphragm valve.

[0236] In some of these embodiments, the eighteenth manual control element includes, but is not limited to, a manual diaphragm valve.

[0237] In some of these embodiments, the eighteenth automatic control element includes, but is not limited to, a pneumatic diaphragm valve.

[0238] In some embodiments, the nineteenth manual control element includes, but is not limited to, a manual diaphragm valve.

[0239] The usage method and advantages of this embodiment are the same as those of the above embodiments, and will not be repeated here.

[0240] Example 7

[0241] This embodiment relates to semiconductor process equipment in this invention.

[0242] A semiconductor process apparatus, including a performance testing system for special gas delivery components as described in any of Examples 1 to 6.

[0243] It should be noted that the semiconductor process equipment also includes a high-pressure nitrogen supply device, a high-pressure helium supply device, and a low-pressure nitrogen supply device. Specifically, the high-pressure nitrogen supply device is connected to the first gas delivery unit 100 of the special gas delivery component performance testing system; the high-pressure helium supply device is connected to the second gas delivery unit 500 of the special gas delivery component performance testing system; and the low-pressure nitrogen supply device is connected to the second vacuum element 402 of the special gas delivery component performance testing system.

[0244] The usage method of this embodiment is basically the same as that of Embodiments 1 to 6, and will not be repeated here.

[0245] The technical effects of this embodiment are basically the same as those of Embodiments 1 to 6, and will not be repeated here.

[0246] Example 8

[0247] This embodiment relates to a performance testing method for special gas delivery components in this invention.

[0248] A method for testing the performance of special gas delivery components, applied to the special gas delivery component performance testing system as described in any one of Examples 1 to 6 or the semiconductor process equipment as described in Example 7, comprising:

[0249] The first gas delivery unit 100 works in conjunction with the test unit 200 to perform external leakage detection on the special gas delivery components installed on the test unit 200.

[0250] Specifically, the performance testing method for special gas delivery components is described in Example 1.

[0251] Furthermore, the performance testing methods for special gas delivery components also include:

[0252] The purging unit 400 acquires high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit 200 and discharge the purging exhaust gas to the exhaust gas treatment equipment.

[0253] Specifically, the performance testing method for special gas delivery components is described in Example 2.

[0254] Furthermore, the performance testing methods for special gas delivery components also include:

[0255] The second gas delivery unit 500 works in conjunction with the test unit 200 to perform internal leakage detection on the special gas delivery components installed on the test unit 200.

[0256] Specifically, the performance testing method for special gas delivery components is described in Example 3.

[0257] Furthermore, the performance testing methods for special gas delivery components also include:

[0258] The pressurization unit 600 pressurizes the test gas and delivers the pressurized test gas to the test unit 200 to perform overpressure and pressure holding tests on the special gas delivery components installed on the test unit 200.

[0259] Specifically, the performance testing method for special gas delivery components is described in Example 4.

[0260] Furthermore, the performance testing methods for special gas delivery components also include:

[0261] When the first gas delivery unit 100 delivers low-pressure gas to the front end of the test unit 200 through the purging unit 400 and the purging unit 400 forms a vacuum condition at the rear end of the test unit 200, the valve body of the test unit 200 is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit 200.

[0262] Specifically, the staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test.

[0263] Subsequently, the system activates the first automatic control element 104, the seventh automatic control element 404, the sixth automatic control element 110, the eighth automatic control element 406, and the second vacuum element 402, thereby causing low-pressure test gas to be input into the front end of the test disk element 201 and a vacuum to be formed at the rear end of the test disk element 201.

[0264] Finally, by frequently opening and closing the second automatic control element 203 and the third automatic control element 207, and observing the numerical changes of the second detection element 204 and the third detection element 205, fatigue testing of the special gas delivery components installed on the test panel element 201 is achieved.

[0265] Specifically, the staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test.

[0266] Subsequently, the system activates the first automatic control element 104, the fifth automatic control element 107, the sixth automatic control element 110, and the fourth automatic control element 303, thereby causing high-pressure test gas to be input at the front end of the test disk element 201 and low-pressure test gas to be stored at the rear end of the test disk element 201.

[0267] Finally, by frequently opening and closing the second automatic control element 203 and the third automatic control element 207, and observing the numerical changes of the second detection element 204 and the third detection element 205, fatigue testing of the special gas delivery components installed on the test panel element 201 is achieved.

[0268] Furthermore, the performance testing methods for special gas delivery components also include:

[0269] The gas flow rate and gas pressure obtained by the test unit 200 are obtained by the first flow detection unit 700 and the second flow detection unit 800, so as to perform CV value testing on the special gas delivery components installed on the test unit 200.

[0270] Specifically, the performance testing method for special gas delivery components is described in Example 5.

[0271] The technical effects of this embodiment are basically the same as those of Embodiments 1 to 6, and will not be repeated here.

[0272] Example 9

[0273] This embodiment relates to a specific implementation of the present invention.

[0274] like Figure 11 As shown, the first gas delivery unit 100 includes a purifier (PUR), a particulate filter (DPF), manual diaphragm valves (V1, V2, V4), pneumatic diaphragm valves (T1, T2, T4), and temperature and pressure sensors (Z1, Z2).

[0275] The test unit 200 includes a test panel (DIT), manual diaphragm valves (V6, V11, C2, C4, C6, C8, V15), pneumatic diaphragm valves (T1, T2, T4, C1, C43, C5, C7, T16), temperature and pressure sensors (Z3, Z4, Z5), and a helium detector (HMLD).

[0276] The first vacuum unit 300 includes a manual diaphragm valve (V15), a pneumatic diaphragm valve (T16), a check valve (X5), and a vacuum pump (EVP).

[0277] The purging unit 400 includes a pressure regulating valve (Q1), manual diaphragm valves (V3, V14, V16), pneumatic diaphragm valves (T3, T15), check valves (X3, X4), a vacuum transmitter (VG), and a temperature and pressure sensor (Z6).

[0278] The second gas delivery unit 500 includes a pressure regulating valve (Q2), a manual diaphragm valve (V5), a pneumatic diaphragm valve (T5), and a micro-leakage valve (T6).

[0279] The booster unit 600 includes manual diaphragm valves (V7, V9), pneumatic diaphragm valves (T8, T10), and a booster pump (BP).

[0280] The first flow detection unit 700 includes a manual diaphragm valve (V8, V10), a pneumatic diaphragm valve (T9, T11), and a flow controller (FLW).

[0281] The second flow detection unit 800 includes a manual diaphragm valve (V12, V13), a pneumatic diaphragm valve (T13, T14), a pressure regulating valve (Q3), a check valve (X1, X2), a low-pressure mass flow meter (MFM), and a high-pressure flow meter (HPF).

[0282] Specifically, the performance testing method for the special gas delivery components in this embodiment is as follows:

[0283] (1) External leakage detection

[0284] The staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the system test;

[0285] PUR and DPF filter the high-pressure nitrogen gas transported by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter from the high-pressure nitrogen gas.

[0286] The system activates T1, T2, T4, T7, and C1, causing the first gas delivery element to deliver high-pressure nitrogen to DIT. External leakage detection of the special gas delivery element is performed by observing the changes in the values ​​of Z3 and Z4.

[0287] After the external leakage detection is completed, the system activates C3, T12, T16, and EVP, allowing the test exhaust gas to be discharged through the first emission gas delivery element.

[0288] (2) Internal Leak Detection

[0289] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0290] The system activates Q2, thereby converting high-pressure helium into low-pressure helium.

[0291] The system activates T5, T6, T7, C1, C3, T12, and D16, allowing low-pressure helium gas to enter the HMLD through the first test gas input element, the first test gas output element, and the second test gas input element.

[0292] Finally, the staff sprayed air towards the special gas delivery components and observed the changes in the HMLD value, thereby realizing the internal leakage detection of the special gas delivery components.

[0293] (3) Overpressure holding test

[0294] In actual work, when conducting overpressure and pressure holding tests on special gas transmission components, the staff manually open all manual diaphragm valves in the entire test system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0295] PUR and DPF filter the high-pressure nitrogen gas transported by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter from the high-pressure nitrogen gas.

[0296] The system activates T1, T2, T4, and T8, thereby allowing the test gas to be pressure-regulated via BP, so that the pressure of the test gas exceeds the cylinder outlet pressure.

[0297] The system activates T10 and C1, allowing high-pressure test gas to be input into the DIT front end;

[0298] The system enables C3, T12, T15, and VG, thus allowing the DIT backend to be in a vacuum state;

[0299] By observing the changes in the values ​​of Z3 and Z4, staff can perform overpressure and pressure holding tests on special gas transmission components.

[0300] (4) CV value test

[0301] In practice, staff manually open all manual diaphragm valves in the entire testing system and keep all pneumatic diaphragm valves closed through the system to complete the preparation work before the test.

[0302] PUR and DPF filter the high-pressure nitrogen gas transported by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter from the high-pressure nitrogen gas.

[0303] The system activates T1 and Q1, thereby converting the high-pressure test gas into a low-pressure test gas through Q1.

[0304] The system activates T3, T4, T9, T11, C1, C3, and T13, allowing the low-pressure test gas to pass through FLW, Z3, Z4, and MFM sequentially, thereby obtaining the pressure and temperature of the low-pressure test gas at the front and back ends of the DIT.

[0305] The system shuts down T3, T9, and T11, and turns on T7, T15, and VG. VG provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby making the pipeline in the entire test system a vacuum state.

[0306] The system starts T3 and stops T15, allowing low-pressure nitrogen to fill the entire test system pipeline and ensuring that the gas pressure in the pipeline reaches the standard requirement and is maintained for a period of time.

[0307] The system shuts down T1 and opens T15. VG provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby venting the gas in the pipeline of the entire test system.

[0308] The system turns on T1, turns off T3, and turns on T2 and T9, so that the high-pressure test gas can pass through FLW, Z3, Z4 and MFM in sequence, thereby obtaining the pressure and temperature of the high-pressure test gas at the front and back ends of the DIT.

[0309] Staff can obtain the CV value of the special gas delivery components installed on the DIT based on the pressure and temperature of the low-pressure test gas at the front and rear ends of the DIT, and the pressure and temperature of the high-pressure test gas at the front and rear ends of the DIT.

[0310] (5) Fatigue test one

[0311] The staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0312] The system activates T1, T3, T4, T7, T12, T15, and VG, thereby allowing low-pressure test gas to be input at the front end of the DIT and creating a vacuum at the back end of the DIT.

[0313] By frequently opening and closing C1 and C3 and observing the changes in the values ​​of Z3 and Z4, fatigue testing of the special gas delivery components installed on the DIT can be achieved.

[0314] (6) Fatigue test II

[0315] The staff manually opened all the manual diaphragm valves in the entire testing system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0316] The system activates T1, T2, T4, T7, T12, and T16, thereby allowing high-pressure test gas to be input at the front end of the DIT and low-pressure test gas to be stored at the back end of the DIT.

[0317] By frequently opening and closing C1 and C3 and observing the changes in the values ​​of Z3 and Z4, fatigue testing of the special gas delivery components installed on the DIT can be achieved.

[0318] (7) Blowing

[0319] When changing the test type of the special gas delivery components or replacing the special gas delivery components on test panel element 201, the entire system needs to be purged. The specific purging method is as follows:

[0320] The system shuts down T3, T9, and T11, and turns on T7, T15, and VG. VG provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby making the pipeline in the entire test system a vacuum state.

[0321] The system starts T3 and stops T15, allowing low-pressure nitrogen to fill the entire test system pipeline and ensuring that the gas pressure in the pipeline reaches the standard requirement and is maintained for a period of time.

[0322] The system shuts down T1 and opens T15. VG provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby venting the gas in the pipeline of the entire test system.

[0323] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0324] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A performance testing system for special gas conveying components, characterized in that, include: The first gas delivery unit is connected to a high-pressure nitrogen source and is used to deliver high-pressure nitrogen for external leakage detection. At least one test unit is provided, which is located downstream of the first gas delivery unit and connected to the first gas delivery unit, and is used to cooperate with the first gas delivery unit to perform external leakage detection. A first vacuum unit is located downstream of the test unit and is connected to the test unit for discharging test exhaust gas. The first gas delivery unit includes: A first gas delivery element is connected to a high-pressure nitrogen source and the test unit, respectively, and is used to deliver high-pressure nitrogen to the test unit; A purification element is disposed on the first gas delivery element and is used to purify high-pressure nitrogen to improve the purity of high-pressure nitrogen and reduce the humidity of high-pressure nitrogen; A filter element is disposed on the first gas delivery element and located downstream of the purification element, for filtering high-pressure nitrogen to remove particulate matter from the high-pressure nitrogen. A first manual control element is disposed on the first gas delivery element and located downstream of the filter element, and is used to manually control the opening and closing of the first gas delivery element. A first automatic control element is disposed on the first gas delivery element and located downstream of the first manual control element, and is used to automatically control the opening and closing of the first gas delivery element. A first detection element is disposed on the first gas delivery element and located downstream of the first automatic control element, and is used to detect the temperature and pressure of the first gas delivery element; The test unit includes: The first test gas input element is connected to the first gas delivery unit and is used to obtain high-pressure nitrogen. A test disc element, which is connected to the first test gas input element, is used for external leakage detection; The first test gas output element is connected to the test disk element and the first vacuum unit respectively, and is used to output test exhaust gas. A first heat-insulating element is disposed on the first test gas input element for heat preservation; The second heat-insulating element is disposed on the first test gas output element and is used for heat preservation. A second manual control element is disposed on the first test gas input element and is used to manually control the opening and closing of the first test gas input element; The second automatic control element is disposed on the first test gas input element and located upstream of the second manual control element, and is used to automatically control the opening and closing of the first test gas input element; The second detection element is disposed at the first test gas input element and located downstream of the second manual control element, and is used to detect the temperature and pressure of the first test gas input element; A third detection element is disposed on the first test gas output element and is used to detect the temperature and pressure of the first test gas output element. A third manual control element is disposed on the first test gas output element and located downstream of the third detection element, and is used to manually control the opening and closing of the first test gas output element. A third automatic control element is disposed on the first test gas output element and located downstream of the third manual control element, and is used to automatically control the opening and closing of the first test gas output element. A fourth detection element is disposed at the first test gas output element and located downstream of the third automatic control element, and is used to detect the temperature and pressure of the first test gas output element; The first vacuum unit includes: A first emission gas conveying element is disposed downstream of the test unit and connected to the test unit for emitting test exhaust gas. A first vacuum element is disposed on the first exhaust gas delivery element to create a vacuum environment in the first exhaust gas delivery element; A fourth manual control element is disposed on the first exhaust gas conveying element and is used to manually control the opening and closing of the first exhaust gas conveying element; A fourth automatic control element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element, and is used to automatically control the opening and closing of the first exhaust gas conveying element. The first unidirectional element is disposed on the first exhaust gas conveying element and located downstream of the fourth manual control element and upstream of the first vacuum element, for causing the test exhaust gas to flow in one direction.

2. The performance testing system for special gas conveying components according to claim 1, characterized in that, Also includes: A purging unit, located downstream of the first gas delivery unit and upstream of the testing unit, and connected to the first gas delivery unit, the testing unit, and the waste gas treatment equipment, is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the testing unit and discharge the purging waste gas to the waste gas treatment equipment; and / or The second gas delivery unit is connected to the high-pressure helium source and the test unit respectively, and is used to deliver high-pressure helium for internal leak detection. The test unit cooperates with the second gas delivery unit to perform internal leak detection; and / or A pressurization unit, connected to both the first gas delivery unit and the testing unit, is used to pressurize the test gas and deliver the pressurized test gas to the testing unit; and / or A first flow detection unit, which is connected to the test unit, is used to detect the gas flow rate input to the test unit; The second flow detection unit is connected to the test unit and is used to detect the gas flow rate output by the test unit.

3. The performance testing system for special gas conveying components according to claim 2, characterized in that, The first gas delivery unit further includes: The second gas delivery element is connected to the first gas delivery element of the first gas delivery unit and is used to acquire and deliver high-pressure nitrogen. A third gas delivery element, which is connected to the second gas delivery element, the purging unit, and the testing unit, is used to acquire and deliver high-pressure nitrogen and low-pressure nitrogen to the testing unit; and / or The purging unit includes: A purge gas delivery element is placed downstream of the first gas delivery unit and upstream of the test unit, and is connected to the first gas delivery unit and the test unit respectively, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test unit. A first pressure regulating element is disposed on the purge gas delivery element and is used to regulate the pressure of high-pressure nitrogen to obtain low-pressure nitrogen. The second emission gas delivery element is located downstream of the test unit and is connected to the test unit for emitting purge exhaust gas. A second vacuum element is disposed on the second exhaust gas delivery element to create a vacuum environment for the second exhaust gas delivery element; A power gas delivery element, wherein the power gas delivery element is connected to a power gas source and a second vacuum element respectively, and is used to deliver power gas to the second vacuum element; and / or The second gas delivery unit includes: A fourth gas delivery element, which is connected to both a high-pressure helium source and the test unit, is used to deliver high-pressure helium to the test unit; and / or The test unit also includes: The second test gas input element is connected to the first test gas output element of the test unit and is used to acquire the test gas. A helium testing element, wherein the helium testing element is connected to the second test gas input element, for internal leak detection; and / or The test unit also includes: A second test gas output element is connected to the first test gas output element and the first vacuum unit of the test unit, respectively, and is used to output test exhaust gas; and / or The booster unit includes: The fifth gas delivery element is connected to the first test gas input element of the test unit and is used to acquire test gas; A pressurizing element, disposed on the fifth gas delivery element, is used to pressurize the test gas; and / or The first flow detection unit includes: A sixth gas delivery element is connected to the test unit and the second gas delivery unit respectively, and is used to acquire test gas; A first flow detection element, disposed on the sixth gas delivery element, is used to detect the gas flow rate input to the test unit; and / or The second flow detection unit includes: A seventh gas delivery element is connected to the test unit and the first vacuum unit respectively, and is used to acquire test gas; The second flow detection element is disposed on the seventh gas delivery element and is used to detect the low-pressure gas flow rate output by the test unit; The eighth gas delivery element is connected to the test unit and the first vacuum unit respectively, and is used to acquire test gas; The third flow detection element is disposed on the eighth gas delivery element and is used to detect the flow rate of the high-pressure gas output by the test unit.

4. The performance testing system for special gas conveying components according to claim 3, characterized in that, The first gas delivery unit further includes: A fifth manual control element is disposed on the second gas delivery element and is used to manually control the opening and closing of the second gas delivery element; A fifth automatic control element is disposed on the second gas delivery element and upstream of the fifth manual control element, and is used to automatically control the opening and closing of the second gas delivery element; The fifth detection element is disposed on the third gas delivery element and is used to detect the temperature and pressure of the third gas delivery element; A sixth manual control element is disposed on the third gas delivery element and located downstream of the fifth detection element, and is used to manually control the opening and closing of the third gas delivery element; A sixth automatic control element, disposed on the third gas delivery element and located upstream of the sixth manual control element, is used to automatically control the opening and closing of the third gas delivery element; and / or The purging unit further includes: A seventh manual control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element, and is used to manually control the opening and closing of the purge gas delivery element; A seventh automatic control element is disposed on the purge gas delivery element and located downstream of the first pressure regulating element and upstream of the seventh manual control element, for automatically controlling the opening and closing of the purge gas delivery element; The eighth manual control element is disposed on the second exhaust gas conveying element and is used to manually control the opening and closing of the second exhaust gas conveying element; The eighth automatic control element is disposed on the second exhaust gas conveying element and located downstream of the eighth manual control element, and is used to automatically control the opening and closing of the second exhaust gas conveying element; The second unidirectional element is disposed on the second exhaust gas conveying element and located downstream of the eighth automatic control element and upstream of the second vacuum element, for making the purge exhaust gas flow in one direction. A ninth manual control element is disposed on the power gas delivery element and is used to manually control the opening and closing of the power gas delivery element; The sixth detection element is disposed on the power gas delivery element and located downstream of the ninth manual control element, and is used to detect the temperature and pressure of the power gas delivery element; A third unidirectional element, disposed in the motive gas delivery element and downstream of the sixth detection element, is used to ensure unidirectional flow of the motive gas; and / or The second gas delivery unit further includes: A tenth manual control element is disposed on the fourth gas delivery element and is used to manually control the opening and closing of the fourth gas delivery element; The second pressure regulating element is disposed in the fourth gas delivery element and located downstream of the tenth manual control element, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium. A ninth automatic control element is disposed on the fourth gas delivery element and located downstream of the second pressure regulating element, and is used to automatically control the opening and closing of the fourth gas delivery element; A microleak control element, wherein the microleak control element is disposed in the fourth gas delivery element and located downstream of the ninth automatic control element; and / or The test unit also includes: The eleventh manual control element is disposed on the second test gas input element and is used to manually control the opening and closing of the second test gas input element; A tenth automatic control element, disposed on the second test gas input element and located downstream of the eleventh manual control element, is used to automatically control the opening and closing of the second test gas input element; and / or The booster unit also includes: The twelfth manual control element is disposed on the fifth gas delivery element and located upstream of the pressurizing element, and is used to manually control the opening and closing of the fifth gas delivery element; The eleventh automatic control element is disposed on the fifth gas delivery element and located upstream of the twelfth manual control element, and is used to automatically control the opening and closing of the fifth gas delivery element; The thirteenth manual control element is disposed on the fifth gas delivery element and located downstream of the pressurizing element, and is used to manually control the opening and closing of the fifth gas delivery element; A twelfth automatic control element, disposed downstream of the fifth gas delivery element and upstream of the thirteenth manual control element, is used to automatically control the opening and closing of the fifth gas delivery element; and / or The first flow detection unit further includes: The fourteenth manual control element is disposed on the sixth gas delivery element and located upstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; The thirteenth automatic control element is disposed on the sixth gas delivery element and located upstream of the fourteenth manual control element, and is used to automatically control the opening and closing of the sixth gas delivery element; The fifteenth manual control element is disposed on the sixth gas delivery element and located downstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; A fourteenth automatic control element, disposed on the sixth gas delivery element and located downstream of the first flow detection element and upstream of the fifteenth manual control element, is used to automatically control the opening and closing of the sixth gas delivery element; and / or The second flow detection unit also includes; The sixteenth manual control element is disposed on the seventh gas delivery element and located upstream of the second flow detection element, and is used to manually control the opening and closing of the seventh gas delivery element; The fifteenth automatic control element is disposed on the seventh gas delivery element and located downstream of the sixteenth manual control element and upstream of the second flow detection element, and is used to automatically control the opening and closing of the seventh gas delivery element; The third pressure regulating element is disposed in the seventh gas conveying element and located downstream of the second flow detection element, and is used to regulate the gas pressure inside the seventh gas conveying element; A fourth unidirectional element is disposed on the seventh gas delivery element and located downstream of the third pressure regulating element, for making the test exhaust gas flow in one direction. The seventeenth manual control element is disposed on the eighth gas delivery element and located upstream of the third flow detection element, and is used to manually control the opening and closing of the eighth gas delivery element; The sixteenth automatic control element is disposed on the eighth gas delivery element and located downstream of the seventeenth manual control element and upstream of the third flow detection element, and is used to automatically control the opening and closing of the eighth gas delivery element. The fifth unidirectional element is disposed on the eighth gas delivery element and located downstream of the third flow detection element, and is used to make the test exhaust gas flow in one direction.

5. A semiconductor process apparatus, characterized in that, include: The performance testing system for special gas delivery components as described in any one of claims 1 to 4.

6. A method for testing the performance of special gas conveying components, applied to the special gas conveying component performance testing system as described in any one of claims 1 to 4 or the semiconductor process equipment as described in claim 5, characterized in that, include: The first gas delivery unit works in conjunction with the test unit to perform external leakage detection on the special gas delivery components installed on the test unit.

7. The method for testing the performance of special gas conveying components according to claim 6, characterized in that, Also includes: The second gas delivery unit works in conjunction with the test unit to perform internal leakage detection on the special gas delivery components installed on the test unit.

8. The method for testing the performance of special gas conveying components according to claim 6 or 7, characterized in that, Also includes: The purging unit obtains high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit and discharge the purging exhaust gas to the exhaust gas treatment equipment. and / or The pressurization unit pressurizes the test gas and delivers the pressurized test gas to the test unit to perform overpressure and pressure holding tests on the special gas delivery components installed on the test unit; and / or With the first gas delivery unit delivering low-pressure gas to the front end of the test unit through the purging unit and the purging unit creating a vacuum condition at the rear end of the test unit, the valve body of the test unit is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit. and / or The gas flow rate and gas pressure obtained by the test unit are obtained through the first flow detection unit and the second flow detection unit, so as to perform CV value test on the special gas delivery components installed on the test unit.

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