Method for manufacturing a three-dimensional needle tip mold and method for manufacturing a three-dimensional needle tip

Abstract

The present application relates to the field of laser advanced manufacturing technology, specifically, it relates to a kind of preparation method of three-dimensional needle tip mould, including by the mask plate with the preset shape light transmission area laser is irradiated on mould base material, respectively on mould base material form first preset shape irradiation area and second preset shape irradiation area, make mould base material and laser along first direction and second direction according to preset speed relative movement, etching is formed on mould base material first groove and second groove.The intersection area of first groove and second groove is formed three-dimensional needle tip mould.First preset shape irradiation area along the length in first direction and second preset shape irradiation area along the length in second direction have no continuous same part, it is guaranteed that when laser etches mould base material, first groove and second groove all will not appear repeated etching situation, it is guaranteed that the three-dimensional needle tip mould formed is according to actual preset value and is formed the three-dimensional needle tip mould that meets the demand.

Description

Technical Field

[0001] This invention relates to the field of advanced laser manufacturing technology, specifically to a method for preparing a three-dimensional needle tip mold and a method for preparing a three-dimensional needle tip. Background Technology

[0002] With the development of the times and technology, the requirements for precision micro-devices are becoming increasingly stringent. As an important component of modern three-dimensional electrodes, the needle tip is an effective tool for the treatment of neurological diseases. The needle tip can penetrate the skin and reach deep into the tissue, serving as a sensor to stimulate nerves or record nerve signals.

[0003] Currently, there is a lack of a highly repeatable, low-cost, and efficient method for manufacturing needle tips. Mechanical forming relies on manual operation, resulting in poor repeatability and failing to meet precision requirements. Ion beam milling leads to impurity deposition on the sample surface, causing surface roughening and low processing efficiency. Electron beam deposition has low deposition efficiency, hindering large-scale fabrication. The performance and stability of needle tips prepared by electrochemical etching require further improvement. Summary of the Invention

[0004] This invention is made to solve the above-mentioned technical problems. Its purpose is to provide a method for preparing a three-dimensional needle tip mold and a method for preparing a three-dimensional needle tip, and to improve the electron beam deposition method to achieve efficient preparation of three-dimensional needle tips at a lower cost.

[0005] To achieve the above objectives, the present invention provides a method for preparing a three-dimensional needle tip mold, comprising: S1, irradiating a mold substrate with a laser through a mask having a light-transmitting area of ​​a preset shape, forming a first preset shape irradiation area on the mold substrate, causing the mold substrate and the laser to move relative to each other along a first direction at a preset speed, and etching a first groove on the mold substrate; S2, irradiating the mold substrate with a laser through a mask having a light-transmitting area of ​​a preset shape, forming a second preset shape irradiation area on the mold substrate, causing the mold substrate and the laser to move relative to each other along a second direction at a preset speed, and etching a second groove on the mold substrate that intersects with the first groove, wherein the intersection area of ​​the first groove and the second groove forms a three-dimensional needle tip mold; wherein the first preset shape irradiation area has no continuous identical portions along the first direction, and the second preset shape irradiation area has no continuous identical portions along the second direction.

[0006] Preferably, the preset shape light-transmitting area is either a triangular light-transmitting area or a triangular-like light-transmitting area; the first preset shape irradiation area is either a triangular irradiation area or a triangular-like irradiation area; and the second preset shape irradiation area is either a triangular irradiation area or a triangular-like irradiation area.

[0007] Preferably, the triangular irradiation area includes at least one included angle formed by two sides of equal length, and the direction of the included angle is consistent with the formation direction of the first groove or the second groove.

[0008] Preferably, the photomask has a light-transmitting area of ​​the preset shape; wherein step S1 is repeated m times to form m parallel first grooves on the mold substrate, and step S2 is repeated n times to form n parallel second grooves on the mold substrate.

[0009] Preferably, the photomask is provided with a plurality of light-transmitting areas of the preset shape, and the plurality of light-transmitting areas of the preset shape are not parallel to the first direction or the second direction.

[0010] Preferably, the mask for the preset shape light-transmitting area is provided in one way, wherein, before performing step S2, the orientation of the mask and / or the mold substrate is adjusted, and then a second groove intersecting the first groove is etched on the mold substrate.

[0011] Preferably, the first groove and the second groove are perpendicular to each other.

[0012] Preferably, the mask in step S1 has a first preset shape light-transmitting area, and the mask in step S2 has a second preset shape light-transmitting area, with the first preset shape light-transmitting area and the second preset shape light-transmitting area pointing in different directions.

[0013] Preferably, the relative speed at which the mold substrate and the laser move along the first direction is equal to the relative speed at which the mold substrate and the laser move along the second direction.

[0014] The present invention provides a method for preparing a three-dimensional needle tip, comprising: sputtering conductive metal onto a three-dimensional needle tip mold formed by any of the above preparation methods; electroforming and depositing a three-dimensional needle tip in the three-dimensional needle tip mold; and demolding and removing the three-dimensional needle tip from the three-dimensional needle tip mold.

[0015] Based on the above description and practice, the method for preparing the three-dimensional needle tip mold of the present invention includes S1: irradiating a mold substrate with a laser through a mask having a light-transmitting area of ​​a preset shape, forming a first preset shape irradiation area on the mold substrate, causing the mold substrate and the laser to move relative to each other along a first direction at a preset speed, and etching a first groove on the mold substrate; the laser passes through the light-transmitting area of ​​the mask and is projected onto the mold substrate, and the frequency of the laser is controlled so that the first groove extends along the first direction on the mold substrate, serving as part of the structure of the three-dimensional needle tip mold. S2. A laser is irradiated onto a mold substrate using a mask with a pre-defined light-transmitting area, forming a second pre-defined irradiation area on the mold substrate. The mold substrate and the laser move relative to each other along a second direction at a pre-defined speed, etching a second groove that intersects with the first groove on the mold substrate. The intersection of the first and second grooves forms a three-dimensional needle tip mold. Similarly, by changing the direction of the laser on the mold substrate and controlling the laser frequency, the second groove extends along the second direction on the mold substrate as part of the three-dimensional needle tip mold structure. The first pre-defined irradiation area has no continuous identical length along the first direction, and the second pre-defined irradiation area has no continuous identical length along the second direction. This ensures that when the laser etches the mold substrate, a pointed first groove and a pointed second groove can be formed. Thus, a three-dimensional needle tip mold that meets the taper requirements can be formed according to the actual pre-defined values, improving the accuracy of the generated three-dimensional needle tip mold. Furthermore, forming the first and second grooves with a laser is relatively simple and reduces manufacturing costs. Attached Figure Description

[0016] Figure 1 This is a flowchart illustrating a method for preparing a three-dimensional needle tip mold according to one embodiment of the present invention.

[0017] Figure 2 This is a flowchart illustrating a method for preparing a three-dimensional needle tip mold according to another embodiment of the present invention.

[0018] Figure 3 This is a flowchart illustrating a method for preparing a three-dimensional needle tip in one embodiment of the present invention.

[0019] Figure 4 This is a structural diagram of a three-dimensional needle tip mold preparation device according to one embodiment of the present invention.

[0020] Figure 5 This is a structural diagram of a three-dimensional needle tip mold involved in one embodiment of the present invention.

[0021] Figure 6 This is a schematic diagram of the laser etching path of a three-dimensional needle tip mold according to one embodiment of the present invention.

[0022] Figure 7This is a structural diagram of a three-dimensional needle tip according to one embodiment of the present invention.

[0023] Figure 8 This is a schematic diagram of the shape of a triangular light-transmitting area of ​​a photomask in one embodiment of the present invention.

[0024] Figure 9 The diagram shows the depth variation of the needle tip mold at different speeds and frequencies, which is a method for preparing a three-dimensional needle tip mold according to the present invention.

[0025] Figure 10 The image shows a side view of the needle tip mold at different speeds and frequencies, illustrating the preparation method of the three-dimensional needle tip mold of the present invention. Detailed Implementation

[0026] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0027] Furthermore, the accompanying drawings are merely illustrative diagrams of the present invention and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted. It should be noted that in this invention disclosure, the terms "comprising," "configured with," and "set in" are used to indicate an open-ended inclusion, meaning that additional elements / components / etc. may exist besides those listed; the terms "first," "second," etc., are used only as labels and are not intended to limit the number or order of objects; the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention.

[0028] Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] This invention discloses a method for preparing a three-dimensional needle tip mold, utilizing a three-dimensional needle tip mold preparation device, please refer to... Figure 4 The fabrication equipment for this three-dimensional needle tip mold includes a helium-neon laser 1, an excimer laser 2, a mask changing stage 3, a reflector 4, a focusing objective lens 5, a sample placement stage 7, a moving stage 8, a motor 9, and a computer 10 equipped with system control applications. The computer 10 controls the entire fabrication equipment. The mold substrate 6 is mounted on the sample placement stage 7. The moving stage 8 carries the sample placement stage 7 and moves it in three directions under the drive of the motor 9. The helium-neon laser 1 is used to calibrate the optical path of the excimer laser 2, which is capable of generating 248nm KrF laser light. The reflector 4 is placed at a 45-degree angle to the horizontal plane, and the focusing objective lens 5 is placed between the sample placement stage 7 and the reflector 4. This ensures that the laser light path towards the center of the mask changing stage 3 passes horizontally and vertically through the transparent area of ​​the mask, and after passing through the reflector 4, vertically reaches the mold substrate 6. The sample substrate 6 is made of plexiglass, ensuring that it maintains a certain degree of stability under the irradiation of the helium-neon laser 1 and the excimer laser 2. For ease of description, all subsequent preparation methods will be described using the aforementioned preparation equipment.

[0030] For details, please refer to Figures 1 to 10 In some application scenarios, the fabrication method of this three-dimensional needle tip mold includes:

[0031] S1. A laser is irradiated onto the mold substrate 6 through a mask with a preset shape light-transmitting area, forming a first preset shape irradiation area on the mold substrate 6. The mold substrate 6 and the laser move relative to each other along the first direction at a preset speed, and a first groove 61 is etched on the mold substrate.

[0032] In this process, the excimer laser 2 emits a laser beam that passes through the light-transmitting area of ​​the mask plate on the mask changing stage 3 and is projected onto the mold substrate 6. The frequency of the laser is controlled to form a first groove 61 extending along a first direction on the mold substrate 6. At this time, the first groove 61 serves as part of the structure of the three-dimensional needle tip mold.

[0033] S2. A laser is irradiated onto the mold substrate 6 through a mask with a preset shape light-transmitting area, forming a second preset shape irradiation area on the mold substrate 6. The mold substrate 6 and the laser move relative to each other along the second direction at a preset speed, and a second groove 62 intersecting with the first groove 61 is etched on the mold substrate 6. The intersection area of ​​the first groove 61 and the second groove 62 forms a three-dimensional needle tip mold.

[0034] Similarly, changing the direction of the laser or the mold substrate 6 causes the laser to change its orientation on the mold substrate 6, and controlling the frequency of the laser causes a second groove 62 extending in the second direction to be formed on the mold substrate 6 as part of the structure of the three-dimensional needle tip mold.

[0035] In this design, the first preset shape irradiation area has no continuous identical parts along the first direction, and the second preset shape irradiation area has no continuous identical parts along the second direction. This ensures that when the laser etches the mold substrate, a pointed first groove and a second groove can be formed. This allows for the formation of a three-dimensional needle tip mold that meets the taper requirements based on actual preset values, thus improving the accuracy of the generated three-dimensional needle tip mold. On the other hand, the three-dimensional needle tip mold is formed by laser forming the first groove 61 and the second groove 62 respectively, which is relatively simple to operate and reduces the manufacturing cost.

[0036] Understandably, since the laser emitted by excimer laser 2 is invisible ultraviolet light, before emitting the laser to the mask changing stage 3 using excimer laser 2, the optical path of excimer laser 2 needs to be calibrated using helium-neon laser 1. At this time, helium-neon laser 1 emits visible red light, and the optical path of the visible red light can pass perpendicularly through the center of the transparent area of ​​the mask. Specifically, photosensitive paper is placed on the laser path, and the positions of the visible red light emitted by helium-neon laser 1 and the ultraviolet light emitted by excimer laser 2 on the photosensitive paper are compared until the positions of the light spots coincide. At this point, it can be determined that the optical paths of helium-neon laser 1 and excimer laser 2 coincide, thus completing the laser path calibration.

[0037] Furthermore, to prevent the excimer laser 2 from accumulating energy and knocking the mask off the mask changing stage 3 during etching of the mold substrate 6, the positions of the mold substrate 6 and the mask need to be adjusted for laser focusing before fabricating the three-dimensional needle tip mold. Specifically, this involves taking another piece of plexiglass with the same size as the mold substrate 6, fixing it on the sample placement stage 7, and having the computer 10 control the motor 9 to move the moving stage 8 vertically and make adjustments. This process is repeated until the image formed by the reflector 4 and the focusing lens 5 of the transparent area of ​​the mask falls on the upper surface of the sample without distortion. The vertical position at this point is confirmed as the focal point. This focal point is then fixed, the mold substrate 6 is replaced, and the three-dimensional needle tip mold is fabricated.

[0038] In some application scenarios, in order to form a three-dimensional needle tip mold on the mold substrate 6 that better meets the actual needs, the preset shape light-transmitting area is either a triangular light-transmitting area or a triangular-like light-transmitting area. The projection onto the mold substrate 6 via the reflector 4 and the focusing lens 5 is a triangle or a triangular-like shape. That is, the first preset shape irradiation area is either a triangular irradiation area or a triangular-like irradiation area; the second preset shape irradiation area is either a triangular irradiation area or a triangular-like irradiation area. As the excimer laser 2 emits a laser of a certain frequency to form a first groove 61 and a second groove 62 with a triangular or triangular cross section, the overlapping part of the first groove 61 and the second groove 62 can form a three-dimensional needle tip mold.

[0039] Furthermore, the dimensions of the triangular or near-triangular light-transmitting area need to be designed based on the actual requirements of the tip size and the magnification of the focusing objective lens 5. Typically, a magnification of 15x is selected for the focusing objective lens.

[0040] To ensure the resulting three-dimensional needle tip mold better meets practical needs, please refer to the following: Figure 8 The triangular irradiation area includes at least one included angle formed by two sides of equal length, and the direction of the included angle is consistent with the forming direction of the first groove 61 or the second groove 62. The three-dimensional needle tip formed by the mold has sufficient taper and the edge size of the three-dimensional needle tip is consistent. When applied, it is no longer necessary to make large cutting adjustments to the size, which simplifies the subsequent operation and reduces the cost of manpower and material resources.

[0041] Furthermore, this method for fabricating three-dimensional needle tip molds can also be used to fabricate multiple three-dimensional needle tip molds on a single mold substrate 6, thereby improving the overall fabrication efficiency of the three-dimensional needle tips in subsequent operations. In some application scenarios, a pre-defined light-transmitting area is provided on the photomask, wherein...

[0042] Step S1 is repeated m times to form m parallel first grooves on the mold substrate. After forming a first groove 61, the mold substrate 6 and the laser move in a direction different from the first direction, and then step S1 is performed again to form multiple non-overlapping and parallel first grooves 61.

[0043] Step S2 is repeated n times to form n parallel second grooves on the mold substrate. Similarly, after forming one second groove 62, the mold substrate 6 and the laser move in a direction different from the second direction, and step S2 is repeated to form multiple non-overlapping and parallel second grooves 62. At this time, multiple intersecting three-dimensional needle tip molds are formed at the overlapping points of multiple first grooves 61 and multiple second grooves 62 on the mold substrate 6. When generating three-dimensional needle tips in the future, multiple three-dimensional needle tips can be formed on the mold substrate 6, which greatly improves the efficiency of preparing three-dimensional needle tips using this three-dimensional needle tip mold without the need for additional complicated operation steps.

[0044] Understandably, in some application scenarios, the m-th step S1 and the n-th step S2 can be etched in a cross manner to form the first groove 61 and the second groove 62 as needed. This article does not limit the specific order of the multiple steps S1 and S2.

[0045] In other application scenarios, the photomask is provided with multiple preset shape light-transmitting areas. That is, multiple laser beams can be set, and each laser beam corresponds to a preset shape light-transmitting area. At this time, the image mapped on the sample substrate 6 is multiple first preset shape irradiation areas arranged in parallel. The mold substrate 6 and the laser move relative to each other along the first direction at a preset speed, and multiple parallel first grooves 61 are etched on the mold substrate 6. Similarly, the image on the sample substrate 6 is multiple second preset shape irradiation areas arranged in parallel. The mold substrate 6 and the laser move relative to each other along the second direction at a preset speed, and multiple parallel second grooves 62 are etched on the mold substrate 6. At this time, multiple three-dimensional needle tip molds can be formed on the mold substrate 6 by performing steps S1 and S2 only once, and multiple three-dimensional needle tips can be formed on the mold substrate 6 in the subsequent generation of three-dimensional needle tips. Multiple preset shape light-transmitting areas are not parallel to the first or second direction to avoid the laser from being mapped onto the mold substrate 6 through multiple preset shape light-transmitting areas. If the parallel preset shape irradiation areas coincide with the first or second direction, the laser will etch multiple times in the same direction on the mold substrate 6. Multiple laser beams and multiple preset shape light-transmitting areas can only form a three-dimensional needle tip mold. In severe cases, the mold substrate 6 may be damaged due to repeated etching of the same place on the mold substrate 6.

[0046] To form the first groove 61 and the second groove 62 with different orientations, it is necessary to adjust the shape and orientation of the light-transmitting area on the mask. In some application scenarios, a mask setting with a preset shape for the light-transmitting area is provided, wherein, before performing step S2, the following is also included:

[0047] Step S20: Adjust the orientation of the mask and / or the mold substrate 6 so that the laser forms a second preset shape irradiation area on the mold substrate 6 with a different orientation from the first preset shape irradiation area, thereby etching a second groove 62 that intersects with the first groove 61 on the mold substrate 6 to form a three-dimensional needle tip mold.

[0048] Understandably, when the direction of the second preset shape irradiation area is adjusted by adjusting the direction of the mold substrate 6, the laser emitted by the excimer laser 2 is in the same direction as the mold substrate 6 along the first and second directions. When the direction of the second preset shape irradiation area is adjusted by adjusting the direction of the mask, the laser emitted by the excimer laser 2 is in a different direction from the mold substrate 6 along the first and second directions.

[0049] In some applications, the first and second grooves are perpendicular to each other to form a more regular three-dimensional needle tip with a larger taper.

[0050] In other application scenarios, the mask in step S1 has a first preset shape transparent area, and the mask in step S2 has a second preset shape transparent area. The first and second preset shape transparent areas point in different directions. Before step S2, the mask on the mask changing stage 3 is replaced. After focusing the helium-neon laser 1 and the excimer laser 2, the mold substrate 6 and the laser move relative to each other along the second direction at a preset speed. A second groove 62 intersecting with the first groove 61 is etched on the mold substrate 6. The intersection area of ​​the first groove 61 and the second groove 62 forms a three-dimensional needle tip mold.

[0051] In some applications, the relative speed of the mold substrate 6 and the laser along the first direction is equal to the relative speed of the mold substrate 6 and the laser along the second direction. For details, please refer to... Figure 9 and Figure 10 The moving speed of the mold substrate 6 is 0.01mm / s-0.002mm / s, the frequency of the pulsed laser emitted by the excimer laser 2 is 10Hz-20Hz, and the moving stage 8 drives the sample placement stage 7 to move a distance of 1-4mm to ensure that the energy density accumulated on the surface of the mold substrate 6 is the same. A three-dimensional needle tip mold with the same depth and taper can be formed at the first groove 61 and the second groove 62.

[0052] The present invention provides a method for preparing a three-dimensional needle tip, comprising:

[0053] Step S10: Sputter conductive metal onto a three-dimensional needle tip mold formed by any of the above preparation methods.

[0054] The three-dimensional needle tip mold was placed inside the electroplating machine, and the vacuum chamber pressure was adjusted to 1.1 × 10⁻⁶. -4 After mbar, sputtering was performed with a current ranging from 9.92A to 10.16A, a voltage ranging from 735V to 761V, and a sputtering power ranging from 7.21 to 7.73kW, to maintain a sputtering power of 1.5 × 10⁻⁶ mbar. -3 The sputtering time was set to mbar, cycle time 9.99 sec, sputtering time 1.8 sec, argon flow rate 6 sccm, and argon flow deviation 20%. Sputtering was performed 4 times under these conditions to sputter a conductive metal layer onto the entire 3D needle tip mold. The metal in the conductive metal layer could be nickel.

[0055] Understandably, before sputtering the 3D tip mold, the process also includes cleaning the 3D tip mold. This cleaning process can be achieved by rinsing the 3D tip mold with ultrapure water for three minutes and then drying it with clean nitrogen gas. This removes residues while preventing other chemical components inside non-pure water or other gases from reacting with the 3D tip mold, which could affect its shape and properties. It also prevents residues from depositing inside the 3D tip mold during etching, thus ensuring the overall cleanliness of the 3D tip mold.

[0056] Step S11: Electroforming deposition in a three-dimensional needle tip mold to form a three-dimensional needle tip.

[0057] The electroplated three-dimensional needle tip mold is placed in an electroforming machine, and an electroforming process using pulsed current followed by low current is employed to improve the uneven thickness and prevent electroforming nodules in the three-dimensional needle tip. Specifically, a frequency of 10... 3 With a pulsed current of Hz, the growth rate was 3.2 μm / Ah. After 10 hours of growth, the current was switched to a small current of 1-2A to improve the growth efficiency. After 60 hours of growth, a needle tip with a depth of more than 600 μm was obtained.

[0058] Understandably, the current setting within the electroforming equipment is crucial. An excessively high current setting results in a too-fast metal deposition rate, leading to a rough and uneven surface of the formed 3D needle tip, reducing its density and strength, and ultimately affecting its quality. Conversely, an excessively low current setting results in a slow growth rate and low production efficiency.

[0059] Step S12: Remove the three-dimensional needle tip from the three-dimensional needle tip mold.

[0060] After the growth of the needle tip is completed, the three-dimensional needle tip is removed from the entire mold substrate 6. The overlapping etched areas of the first groove 61 and the second groove 62 form the tapered region of the three-dimensional needle tip. After cleaning the three-dimensional needle tip with ultrapure water, it is cut to the required size using a laser, forming a shape as shown below. Figure 8 A single three-dimensional needle tip.

[0061] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A method for preparing a three-dimensional needle tip mold, characterized in that, include: S1. A laser is irradiated onto a mold substrate through a mask having a light-transmitting area of ​​a preset shape, forming a first preset shape irradiation area on the mold substrate. The mold substrate and the laser move relative to each other along a first direction at a preset speed, and a first groove is etched on the mold substrate. S2. A laser is irradiated onto the mold substrate using a mask with a preset-shaped light-transmitting area, forming a second preset-shaped irradiation area on the mold substrate. The mold substrate and the laser move relative to each other along a second direction at a preset speed. A second groove intersecting the first groove is etched onto the mold substrate. The intersection area of ​​the first groove and the second groove forms a three-dimensional needle tip mold. The first preset shape irradiation area has no consecutive identical parts along the first direction, and the second preset shape irradiation area has no consecutive identical parts along the second direction; The preset shape light-transmitting area can be either a triangular light-transmitting area or a triangular-like light-transmitting area. The first preset shape illumination area is either a triangular illumination area or a triangular-like illumination area; The second preset shape illumination area is either a triangular illumination area or a triangular-like illumination area.

2. The preparation method according to claim 1, characterized in that, The triangular irradiation area includes at least one included angle formed by two sides of equal length, and the direction of the included angle is consistent with the formation direction of the first groove or the second groove.

3. The preparation method according to claim 1, characterized in that, The photomask has a light-transmitting area of ​​the preset shape; wherein... Step S1 is repeated m times to form m parallel first grooves on the mold substrate, and step S2 is repeated n times to form n parallel second grooves on the mold substrate.

4. The preparation method according to claim 1, characterized in that, The photomask has multiple light-transmitting areas of the preset shape, and these multiple light-transmitting areas are not parallel to the first direction or the second direction.

5. The preparation method according to claim 1, characterized in that, One type of mask is provided for the preset shaped light-transmitting area, wherein... Before performing step S2, the method further includes: adjusting the orientation of the mask and / or the mold substrate, and then etching a second groove that intersects with the first groove on the mold substrate.

6. The preparation method according to claim 5, characterized in that, The first groove and the second groove are perpendicular to each other.

7. The preparation method according to claim 1, characterized in that, The photomask in step S1 has a first preset shape light-transmitting area, and the photomask in step S2 has a second preset shape light-transmitting area. The first preset shape light-transmitting area and the second preset shape light-transmitting area have different orientations.

8. The preparation method according to any one of claims 1-7, characterized in that, The relative speed at which the mold substrate and the laser move along the first direction is equal to the relative speed at which the mold substrate and the laser move along the second direction.

9. A method for preparing a three-dimensional needle tip, characterized in that, include: Sputtering conductive metal onto a three-dimensional needle tip mold formed by the preparation method as described in any one of claims 1-8 above; A three-dimensional needle tip is formed by electroforming deposition in the three-dimensional needle tip mold; Remove the three-dimensional needle tip from the three-dimensional needle tip mold.

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