Laser scribing device and using method thereof

Abstract

The invention discloses a laser scribing device which comprises a support, a reflecting mirror, laser rays and a focusing mirror, the reflecting mirror is arranged on the support and provided with a mirror surface, the laser rays can be emitted to the mirror surface and reflected on the mirror surface, the reflection angle of the laser rays is adjustable, and the focusing mirror is arranged on the support. The focusing mirror is arranged on the support and can move relative to the reflecting mirror, and reflected light obtained after the laser light is reflected by the mirror face can be emitted out through the focusing mirror so that a battery substrate can be scribed. The laser scribing angle of the laser scribing device is adjustable, the thickness of a film layer on a battery substrate is guaranteed, and the battery performance is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser scribing, and in particular to a laser scribing device and a method for using the same. Background Art

[0002] With the rapid development of thin-film batteries, laser scribing equipment and related technologies have also been more widely used. The quality of laser scribing has a great influence on the performance of the battery cell. Taking the scribing of perovskite battery P2 as an example, the width of the scribing line, the edge morphology of the scribing line, the residual condition of the perovskite film layer after scribing, etc., all have an impact on the performance of the battery cell.

[0003] As for the edge morphology of the scribed lines, in the relevant technology, vertically incident laser is often used for scribe process. This will cause the edge of the P2 scribed line to have a relatively obvious height difference with respect to the original film layer and lack of buffering. During the subsequent electrode film layer evaporation, at the edge of the P2 scribed line close to the P1 side, due to the existence of a "steep slope", the coverage of the electrode layer will be affected, making the electrode thickness here relatively thin, thereby increasing the overall series resistance of the battery and affecting the battery performance. Summary of the invention

[0004] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. To this end, an embodiment of the present invention provides a laser scribing device and a method for using the same, wherein the laser scribing angle of the laser scribing device is adjustable to ensure the thickness of the film layer on the battery substrate and improve the battery performance.

[0005] The laser scribing device according to an embodiment of the present invention comprises:

[0006] Bracket;

[0007] A reflector, wherein the reflector is arranged on the bracket and has a mirror surface;

[0008] A laser beam, wherein the laser beam can be emitted onto the mirror surface and reflected on the mirror surface, and the reflection angle of the laser beam is adjustable;

[0009] A focusing mirror is arranged on the bracket and is movable relative to the reflecting mirror. After the laser light is reflected by the mirror surface, the reflected light can be emitted through the focusing mirror to scratch on the battery substrate.

[0010] The laser scribing device of the embodiment of the present invention has an adjustable reflection angle of the laser light, and the focusing mirror can be moved on the bracket as the reflection angle changes, so that the laser can achieve scribing at different inclination angles on the battery substrate, so that the scribing line has a slope. Compared with the vertically incident laser scribing in the prior art, the height difference between the edge of the scribing line and the original film layer has a buffer slope, ensuring that the thickness of the film layer on the battery substrate is not easily thinned due to the angle problem of scribing, thereby ensuring the performance of the battery, and the operation is simple.

[0011] In some embodiments, the laser scribing device further comprises a mounting seat, wherein the mounting seat is disposed on the bracket, the mounting seat is rotatable relative to the bracket, and the reflector is disposed on the mounting seat.

[0012] In some embodiments, the bracket has a slide rail, and the focusing lens is arranged on the slide rail and moves along the extension direction of the slide rail.

[0013] In some embodiments, the slide rail is arc-shaped, with the center of the reflector as the center of the circle.

[0014] In some embodiments, the laser scribing device further comprises a base, wherein the base is disposed on the slide rail, the base can be moved and positioned on the slide rail, and the focusing lens is disposed on the base.

[0015] In some embodiments, the laser scribing device further includes a laser emitter, and the laser emitter is used to emit the laser light toward the mirror surface along a horizontal direction.

[0016] In some embodiments, the battery substrate includes a battery base, a first electrode layer, a semiconductor film layer, and a second electrode layer arranged in sequence.

[0017] The laser scribing device includes P1 scribing, P2 scribing and P3 scribing. The P1 scribing is performed on the first electrode layer and the battery substrate by the reflected laser to form a first groove. The P2 scribing is performed on the semiconductor film layer by the reflected light to form a second groove. The P3 scribing is performed on the second electrode layer by the reflected light to form a third groove.

[0018] In some embodiments, at least one side surface of the second trench extends in a direction from the top surface of the semiconductor film layer to the top surface of the first electrode layer and is inclined toward a central axis of the second trench.

[0019] The method for using the laser scribing device according to the embodiment of the present invention includes:

[0020] S1. The laser transmitter emits laser light to the reflector, and the laser light is reflected on the mirror surface of the reflector;

[0021] S2, rotating the reflector to adjust the reflection angle of the laser light;

[0022] S3, moving the focusing mirror so that the reflected light formed by the laser light reflected by the mirror surface can be emitted through the focusing mirror, and the reflected light scribes the first electrode layer and the battery substrate P1 and forms the first groove;

[0023] S4, laying a semiconductor film layer on the first electrode layer, rotating the reflector and moving the focusing mirror to change the reflection angle of the reflected light, and the reflected light performs P2 scribing on the semiconductor film layer and forms a second groove;

[0024] S5. Lay a second electrode layer on the semiconductor film layer, rotate the reflector and move the focusing mirror to change the reflection angle of the reflected light, and the reflected light performs P3 marking on the second electrode layer and forms a third groove.

[0025] The method for using the laser scribing device of an embodiment of the present invention rotates the reflector and the focusing mirror so that the scribing lines formed by the reflected laser have an angle, thereby ensuring that the thickness of the film layer on the battery substrate is not easily thinned due to the angle of the scribing lines, thereby ensuring the performance of the battery. Moreover, the operating principle is simple and easy to implement.

[0026] In some embodiments, the extension direction of the side surface of the first groove is orthogonal to the thickness direction of the first electrode layer, at least one side surface of the second groove extends in a direction from the top surface of the semiconductor film layer to the top surface of the first electrode layer and is inclined toward the central axis of the second groove, and the extension direction of the side surface of the third groove is orthogonal to the thickness direction of the second electrode layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 Schematic diagram of a laser scribing device according to an embodiment of the present invention.

[0028] Figure numerals: 1. bracket; 2. reflector; 3. laser light; 31. reflected light; 32. reflection angle; 4. focusing mirror; 5. mounting seat; 6. slide rail; 7. base; 8. battery substrate; 81. battery base; 82. first electrode layer; 83. semiconductor film layer; 84. second electrode layer; 85. first groove; 86. second groove; 87. third groove. DETAILED DESCRIPTION

[0029] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0030] like Figure 1As shown, the laser scribing device of the embodiment of the present invention comprises a bracket 1, a reflector 2, a laser beam 3 and a focusing mirror 4. The reflector 2 is arranged on the bracket 1, and the reflector 2 has a mirror surface. The laser beam 3 can be emitted to the mirror surface and reflected on the mirror surface, and the reflection angle 32 of the laser beam 3 is adjustable. The focusing mirror 4 is arranged on the bracket 1 and is movable relative to the reflector 2. The reflected beam 31 of the laser beam 3 after being reflected by the mirror surface can be emitted through the focusing mirror 4 to scribe the battery substrate 8.

[0031] In the laser scribing device of the embodiment of the present invention, the reflection angle 32 of the laser light 3 is adjustable, and the focusing mirror 4 on the bracket 1 can move with the change of the reflection angle 32, so that the laser can achieve scribing at different inclination angles on the battery substrate 8, so that the scribing has a slope. Compared with the vertically incident laser scribing in the prior art, the height difference between the edge of the scribing line and the original film layer has a buffer slope, ensuring that the thickness of the film layer on the battery substrate 8 is not easy to be thin due to the angle problem of scribing, thereby ensuring the performance of the battery, and the operation is simple.

[0032] In some embodiments, the laser scribing device further comprises a laser emitter (not shown), which is used to emit laser light 3 toward the mirror surface in a horizontal direction. The reflector 2 is rotatable relative to the bracket 1 .

[0033] Specifically, the laser transmitter emits laser light 3 horizontally toward the reflector 2, and the change of the reflection angle 32 is achieved by rotating the reflector 2, which is easy to operate and has high precision.

[0034] In some embodiments, the laser scribing device further includes a mounting seat 5 , which is disposed on the bracket 1 . The mounting seat 5 is rotatable relative to the bracket 1 , and the reflector 2 is disposed on the mounting seat 5 .

[0035] Specifically, the reflector 2 is arranged on the mounting seat 5, which ensures that the reflector 2 is firmly mounted on the bracket 1. The reflector 2 is rotated by rotating the mounting seat 5, and the operation is simple.

[0036] In some embodiments, the bracket 1 has a slide rail 6, and the focusing mirror 4 is arranged on the slide rail 6 and moves along the extension direction of the slide rail 6, so that the way of moving the focusing mirror 4 on the bracket 1 is simple, ensuring that the focusing mirror 4 is stable when moving along the slide rail 6, thereby improving the efficiency of matching the focusing mirror 4 with the reflected light 31.

[0037] In some embodiments, the slide rail 6 is arc-shaped and is centered at the center of the reflector 2. Specifically, the slide rail 6 is centered at the reflection point of the laser light 3 on the reflector 2, further improving the efficiency of the focusing lens 4 matching the reflected light 31 when moving along the slide rail 6.

[0038] In some embodiments, the laser scribing device further includes a base 7 , which is disposed on a slide rail 6 . The base 7 can be moved and positioned on the slide rail 6 , and the focusing lens 4 is disposed on the base 7 .

[0039] Specifically, the focusing mirror 4 is slidably mounted on the slide rail 6 through the base 7, ensuring that the focusing mirror 4 is firmly mounted on the slide rail 6. The base 7 can be positioned on the slide rail 6 to ensure that the focusing mirror 4 can remain stable when matching with the reflected light 31, thereby improving the scribing efficiency of the reflected light 31.

[0040] In some embodiments, the battery substrate 8 includes a battery base 81, a first electrode layer 82, a semiconductor film layer 83, and a second electrode layer 84 arranged in sequence. Specifically, the semiconductor film layer 83 includes a perovskite layer and a transmission layer.

[0041] The laser scribing device includes P1 scribing, P2 scribing and P3 scribing. The P1 scribing device scribes the first electrode layer 82 and the battery substrate 8 by reflecting the laser and forms the first groove 85. The P2 scribing device scribes the semiconductor film layer 83 by reflecting the light 31 and forms the second groove 86. The P3 scribing device scribes the second electrode layer 84 by reflecting the light 31 and forms the third groove 87.

[0042] In some embodiments, at least one side surface of the second groove 86 extends in a direction from the top surface of the semiconductor film layer 83 to the top surface of the first electrode layer 82 and is inclined toward the central axis of the second groove 86, so that the scribed line on the semiconductor film layer 83 has a slope, thereby ensuring the thickness of the second electrode layer 84 laid on the semiconductor film layer 83, and further ensuring the performance of the battery.

[0043] The method for using the laser scribing device according to the embodiment of the present invention includes:

[0044] S1. The laser transmitter emits laser horizontally toward the reflector 2, and the laser is reflected on the mirror surface of the reflector 2.

[0045] S2. Adjust the reflection angle 32 of the laser light 3 by rotating the reflector 2.

[0046] S3, move the focusing mirror 4, so that the reflected light 31 formed by the mirror reflection of the laser light 3 can be emitted through the focusing mirror 4, so that the reflected light 31 performs P1 scribing on the first electrode layer 82 and the battery substrate 8 and forms the first groove 85. The extension direction of the side surface of the first groove 85 is orthogonal to the thickness direction of the first electrode layer 82.

[0047] S4, laying a semiconductor film layer 83 on the first electrode layer 82, by rotating the reflector 2 and moving the focusing mirror 4, changing the reflection angle of the reflected light 31 by 32 degrees, the reflected light 31 is scribed P2 on the semiconductor film layer 83 and forms a second groove 86. At least one side of the second groove 86 extends in the direction from the top surface of the semiconductor film layer 83 to the top surface of the first electrode layer 82 and is inclined toward the central axis of the second groove 86, so that the scribed line on the semiconductor film layer 83 has a slope, ensuring the thickness of the second electrode layer 84 laid on the semiconductor film layer 83, and further ensuring the performance of the battery.

[0048] S5. Lay the second electrode layer 84 on the semiconductor film layer 83, and change the reflection angle of the reflected light 31 by 32 degrees by rotating the reflector 2 and moving the focusing mirror 4. The reflected light 31 scribes the second electrode layer 84 with a P3 line and forms a third groove 87. The extension direction of the side surface of the third groove 87 is orthogonal to the thickness direction of the second electrode layer 84.

[0049] The method for using the laser scribing device of an embodiment of the present invention rotates the reflector 2 and the focusing mirror 4 so that the scribing lines formed by the reflected laser have an angle, thereby ensuring that the thickness of the film layer on the battery substrate 8 is not easily thinned due to the angle of the scribing lines, thereby ensuring the performance of the battery. Moreover, the operating principle is simple and easy to implement.

[0050] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0051] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0052] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0054] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0055] Although the above embodiments have been shown and described, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. Changes, modifications, substitutions and variations of the above embodiments by those of ordinary skill in the art are all within the scope of protection of the present invention.

Claims

1. A laser scribing device, characterized in that: include: Bracket (1); A reflector (2), the reflector (2) being arranged on the bracket (1), and the reflector (2) having a mirror surface; A laser beam (3), wherein the laser beam (3) can be emitted onto the mirror surface and reflected on the mirror surface, and the reflection angle (32) of the laser beam (3) is adjustable; A focusing mirror (4) is arranged on the bracket (1) and is movable relative to the reflecting mirror (2); reflected light (31) of the laser light (3) after being reflected by the mirror surface can be emitted through the focusing mirror (4) to scratch on the battery substrate (8).

2. The laser scribing device according to claim 1, characterized in that: It also comprises a mounting seat (5), wherein the mounting seat (5) is arranged on the bracket (1), the mounting seat (5) is rotatable relative to the bracket (1), and the reflector (2) is arranged on the mounting seat (5).

3. The laser scribing device according to claim 1, characterized in that: The support (1) is provided with a slide rail (6), and the focusing lens (4) is arranged on the slide rail (6) and moves along the extension direction of the slide rail (6).

4. The laser scribing device according to claim 3, characterized in that: The slide rail (6) is arc-shaped, and has the center of the reflector (2) as the center of the circle.

5. The laser scribing device according to claim 3, characterized in that: It also comprises a base (7), wherein the base (7) is arranged on the slide rail (6), the base (7) can be moved and positioned on the slide rail (6), and the focusing lens (4) is arranged on the base (7).

6. The laser scribing device according to claim 1, characterized in that: It also includes a laser transmitter, which is used to emit the laser light (3) toward the mirror in a horizontal direction.

7. The laser scribing device according to claim 1, characterized in that: The battery substrate (8) comprises a battery base (81), a first electrode layer (82), a semiconductor film layer (83) and a second electrode layer (84) which are arranged in sequence. The laser scribing device comprises P1 scribing, P2 scribing and P3 scribing, wherein the P1 scribing is performed on the first electrode layer (82) and the battery substrate (8) by the reflected laser and forms a first groove (85), the P2 scribing is performed on the semiconductor film layer (83) by the reflected light (31) and forms a second groove (86), and the P3 scribing is performed on the second electrode layer (84) by the reflected light (31) and forms a third groove (87).

8. The laser scribing device according to claim 7, characterized in that: At least one side surface of the second groove (86) extends in a direction from the top surface of the semiconductor film layer (83) to the top surface of the first electrode layer (82) and is inclined toward the central axis of the second groove (86).

9. A method for using a laser scribing device, characterized in that: include: S1, a laser transmitter emits a laser to a reflector (2), and the laser is reflected by a mirror surface of the reflector (2); S2, rotating the reflector (2) to adjust the reflection angle (32) of the laser light (3); S3, moving the focusing mirror (4) so ​​that the reflected light (31) formed by the laser light (3) reflected by the mirror surface can be emitted through the focusing mirror (4), and the reflected light (31) performs P1 scribing on the first electrode layer (82) and the battery substrate (8) to form a first groove (85); S4, laying a semiconductor film layer (83) on the first electrode layer (82), rotating the reflector (2) and moving the focusing mirror (4) to change the reflection angle of the reflected light (31), and the reflected light (31) performs P2 scribing on the semiconductor film layer (83) and forms a second groove (86); S5. Lay a second electrode layer (84) on the semiconductor film layer (83), rotate the reflector (2) and move the focusing mirror (4) to change the reflection angle of the reflected light (31), and the reflected light (31) is scribed with a P3 line on the second electrode layer (84) to form a third groove (87).

10. The method for using the laser scribing device according to claim 9, characterized in that: The extension direction of the side surface of the first groove (85) is orthogonal to the thickness direction of the first electrode layer (82), at least one side surface of the second groove (86) extends in a direction from the top surface of the semiconductor film layer (83) to the top surface of the first electrode layer (82) and is inclined toward the central axis of the second groove (86), and the extension direction of the side surface of the third groove (87) is orthogonal to the thickness direction of the second electrode layer (84).

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