Anti-blocking structure for semiconductor cutting mortar recovery system

Abstract

The invention relates to the technical field of semiconductor processing equipment, and discloses an anti-blocking structure for a semiconductor cutting mortar recovery system, which comprises a first pipeline, a second pipeline is arranged on one side of the first pipeline, adjusting assemblies are arranged at the joints of the two ends of the first pipeline and the second pipeline, and middle pipe fittings are arranged at the middle ends of the first pipeline and the second pipeline. A recycling assembly is arranged between the two middle pipe fittings. According to the anti-blocking structure for the semiconductor cutting mortar recycling system, by arranging the adjusting assembly, when the interior of the first pipeline is blocked, a short baffle can be controlled to descend to block openings in the two ends of the first pipeline, meanwhile, a long baffle ascends, openings in the two ends of a second pipeline communicate with the inner space of a U-shaped base, and normal use can be achieved; and when mortar conveying is not affected, the blocked first pipeline can be cleaned, and on the contrary, when the interior of the second pipeline is blocked, it can be achieved that mortar is conveyed while the blocked pipeline is cleaned.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing equipment, and in particular to an anti-blocking structure for a semiconductor cutting mortar recovery system. Background Art

[0002] The semiconductor cutting slurry recovery system is a system that can separate and recycle the slurry and coolant discharged from the cutting of semiconductor crystal blocks.

[0003] The existing semiconductor cutting slurry recovery system includes slurry recovery, coolant recovery and regeneration stock solution blending. During the slurry recovery process, the used mortar slurry discharged from the wire cutting machine is transported to a primary centrifuge through a pipeline, and the mortar is recovered through classification in the primary centrifuge. Since the mortar used in semiconductor cutting is a material that is very easy to precipitate, a single pipeline is generally used to transport the mortar in the mortar recovery system. Problems such as mortar precipitation leading to pipeline blockage and equipment failure to operate normally are often encountered. The machine can only be stopped and the feed pipeline must be manually disassembled for cleaning, which is time-consuming and labor-intensive. The cleaned mortar and recovery liquid are difficult to recycle, resulting in a certain amount of waste. Therefore, it is necessary to provide an anti-blocking structure for a semiconductor cutting mortar recovery system to solve the above problems. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides an anti-blocking structure for a semiconductor cutting slurry recovery system, which solves the problems mentioned in the above background.

[0005] The present invention provides the following technical solution: an anti-blocking structure for a semiconductor cutting slurry recovery system, comprising a No. 1 pipeline, a No. 2 pipeline is arranged on one side of the No. 1 pipeline, adjustment components are arranged at the connection points of the No. 1 pipeline and both ends of the No. 2 pipeline, intermediate pipes are arranged at the middle ends of the No. 1 pipeline and the No. 2 pipeline, and a recovery component is arranged between the two intermediate pipes; The adjustment component includes a U-shaped seat, the lower end of which is hollow, and the lower ends of both side walls of the U-shaped seat are provided with side openings. The U-shaped seat is connected to the interior of the first pipeline and the second pipeline respectively through the side openings on both sides.

[0006] Preferably, the two U-shaped seats are each provided with an interface pipe at the lower end on one side facing away from each other, the interface pipe arranged on the adjusting assembly at the front end of the No. 1 pipeline and the No. 2 pipeline is a feed interface pipe, and the interface pipe arranged on the adjusting assembly at the end of the No. 1 pipeline and the No. 2 pipeline is a discharge interface pipe, and T-shaped guide rail grooves are opened on both side walls of the U-shaped seat.

[0007] Preferably, the T-shaped guide rail groove is connected to the lower end space inside the U-shaped seat, and a top plate is provided on the upper end surface of the U-shaped seat.

[0008] Preferably, the adjustment assembly also includes a bidirectional screw, a handle and a lifting rod. The bidirectional screw is rotatably arranged on the U-shaped seat and is located between the two side walls of the U-shaped seat. The upper end of the bidirectional screw passes through the top plate and is connected to the handle. The bidirectional screw is rotatably connected to the top plate.

[0009] Preferably, the threads at both ends of the bidirectional screw are in opposite directions, and two lifting rods are provided. The bidirectional screw is threadably connected to the two lifting rods through threads at the upper and lower ends respectively. A short baffle is provided at one end of the lifting rod away from the bidirectional screw, and a long baffle is provided at the other end of the lifting rod away from the bidirectional screw. The short baffle and the long baffle are respectively slidably connected to two T-shaped guide rail grooves.

[0010] Preferably, both ends of the intermediate pipe are provided with interface flanges, an upper mounting opening is provided at the center of the upper end surface of the intermediate pipe, an inner thread is provided on the inner wall of the upper mounting opening, and the upper mounting opening is threadedly connected to an upper cover via the inner thread.

[0011] Preferably, side ears are provided at the upper ends of both sides of the upper cover, a flow meter is provided at the center of the upper cover, and the lower end of the flow meter passes through the upper cover and extends into the interior of the intermediate pipe.

[0012] Preferably, a groove is provided on the inner side of the upper end surface of the upper mounting port, a sealing ring is provided inside the groove, and inner connecting pipes are provided on the sides of the two intermediate pipes close to each other.

[0013] Preferably, the recovery component includes a transverse pipe, a feeding pipe, a pump body and a discharge pipe. The two ends of the transverse pipe are respectively connected to the inner side connecting pipes of the two intermediate pipes, the lower end of the feeding pipe is connected to the middle end of the transverse pipe, and the discharge port at the upper end of the feeding pipe is connected to the suction port of the pump body.

[0014] Preferably, valves are provided on the transverse pipe and on both sides of the feeding pipe, the feed port at the upper end of the discharge pipe is connected to the discharge port of the pump body, and the discharge port at the lower end of the discharge pipe is connected to the discharge interface pipe of the terminal adjustment component.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The semiconductor cutting mortar recovery system uses an anti-blocking structure. By setting an adjustment component, when the No. 1 pipeline is blocked, the short baffle can be controlled to descend to block the openings at both ends of the No. 1 pipeline. At the same time, the long baffle rises, and the openings at both ends of the No. 2 pipeline are connected with the internal space of the U-shaped seat and can be used normally. The blocked No. 1 pipeline can be cleaned without affecting the mortar transportation. On the contrary, when the No. 2 pipeline is blocked, the long baffle can be controlled to descend to block the openings at both ends of the No. 2 pipeline, so as to realize the same way of transporting mortar while cleaning the blocked pipeline.

[0016] 2. The semiconductor cutting mortar recovery system uses an anti-blocking structure. By setting a recovery component, when pipeline No. 1 or pipeline No. 2 is blocked, the openings at both ends of the blocked pipeline are closed, and the valve close to the blocked pipeline is opened. At the same time, the pump body works, and part of the flowing mortar in the blocked pipeline can be extracted through the feeding pipe, and the extracted mortar can be discharged into the discharge interface pipe through the discharge pipe, which is convenient for the staff to clean the blocked pipeline through the upper installation port in the next step.

[0017] 3. The semiconductor cutting mortar recovery system uses an anti-blocking structure, which is convenient for installing the upper cover and the flow meter by providing an upper installation port. By providing the flow meter, it can be effectively used to monitor the flow of mortar inside the No. 1 pipeline and the No. 2 pipeline, and then the pipeline blockage can be judged by the flow of mortar, and cleaned in time to avoid more serious blockage. The upper cover can be rotated to open by holding the side ear, and then a bamboo piece can be inserted into the blocked pipeline through the upper installation port to clean the blockage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall structure of the anti-blocking structure for the semiconductor cutting slurry recovery system of the present invention; Figure 2 It is a partial cross-sectional view of the anti-blocking structure for the semiconductor cutting slurry recovery system of the present invention; Figure 3 It is a schematic diagram of the installation structure of the U-shaped seat and the interface pipe of the present invention; Figure 4 It is a partial structural schematic diagram of the regulating component of the present invention; Figure 5 It is a schematic diagram of the installation structure of the intermediate pipe and the flow meter of the present invention; Figure 6 It is a structural schematic diagram of the intermediate pipe of the present invention; Figure 7 It is a schematic diagram of the connection structure between the upper cover and the flow meter of the present invention; Figure 8 It is a schematic diagram of the structure of the recycling component of the present invention.

[0019] In the figure: 1. Pipeline No. 1; 2. Pipeline No. 2; 3. Adjustment assembly; 301. U-shaped seat; 302. Side opening; 303. Interface pipe; 304. T-shaped guide groove; 305. Top plate; 306. Bidirectional screw; 307. Handle; 308. Lifting rod; 309. Short baffle; 310. Long baffle; 4. Intermediate pipe; 401. Interface flange; 402. Inner pipe; 403. Upper installation port; 404. Slot; 405. Sealing ring; 5. Upper cover; 501. Side ear; 6. Flow meter; 7. Recovery assembly; 701. Horizontal pipe; 702. Valve; 703. Feeding pipe; 704. Pump body; 705. Discharge pipe. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-8 , an anti-blocking structure for a semiconductor cutting slurry recovery system, comprising a No. 1 pipeline 1, a No. 2 pipeline 2 is arranged on one side of the No. 1 pipeline 1, adjustment components 3 are arranged at the connection points of both ends of the No. 1 pipeline 1 and the No. 2 pipeline 2, intermediate pipe fittings 4 are arranged at the middle ends of the No. 1 pipeline 1 and the No. 2 pipeline 2, and a recovery component 7 is arranged between the two intermediate pipe fittings 4; The adjustment component 3 includes a U-shaped seat 301, the lower end of the U-shaped seat 301 is hollow, and the lower ends of the two side walls of the U-shaped seat 301 are provided with side openings 302. The U-shaped seat 301 is connected to the interior of the No. 1 pipeline 1 and the No. 2 pipeline 2 through the side openings 302 on both sides.

[0022] Among them; the lower ends of the two U-shaped seats 301 facing away from each other are each provided with an interface pipe 303, the interface pipe 303 arranged on the adjusting component 3 at the front end of pipeline No. 1 and pipeline No. 2 is a feed interface pipe 303, and the interface pipe 303 arranged on the adjusting component 3 at the end of pipeline No. 1 and pipeline No. 2 is a discharge interface pipe 303, and T-shaped guide rail grooves 304 are opened on both side walls of the U-shaped seat 301, and the T-shaped guide rail grooves 304 are connected with the lower end space inside the U-shaped seat 301, and a top plate 305 is arranged on the upper end surface of the U-shaped seat 301, and the interface pipe 303 can be effectively used to connect with the semiconductor cutting mortar recovery equipment, and the top plate 305 can be used to block the upper end opening of the T-shaped guide rail groove 304.

[0023] Among them, the adjustment component 3 also includes a bidirectional screw 306, a handle 307 and a lifting rod 308. The bidirectional screw 306 is rotatably arranged on the U-shaped seat 301 and is located between the two side walls of the U-shaped seat 301. The upper end of the bidirectional screw 306 passes through the top plate 305 and is connected with the handle 307. The bidirectional screw 306 is rotatably connected to the top plate 305. By rotating the handle 307, the bidirectional screw 306 can be effectively driven to rotate synchronously. Through the rotation of the bidirectional screw 306 under the limiting action of the T-shaped guide groove 304, the two lifting rods 308 can move along the bidirectional screw 306 in the vertical direction to approach or move away from each other.

[0024] The threads at both ends of the bidirectional screw 306 are in opposite directions, and two lifting rods 308 are provided. The bidirectional screw 306 is threadedly connected to the two lifting rods 308 through the threads at the upper and lower ends. A short baffle 309 is provided at one end of the lifting rod 308 away from the bidirectional screw 306, and a long baffle 310 is provided at one end of the other lifting rod 308 away from the bidirectional screw 306. The short baffle 309 and the long baffle 310 are respectively slidably connected to the two T-shaped guide grooves 304, and the short baffle 309 and the long baffle 310 can be driven to move synchronously during the movement of the lifting rod 308, and The short baffle 309 moves in opposite directions to the long baffle 310. When a blockage occurs inside the No. 1 pipeline 1, the short baffle 309 can be controlled to descend to block the openings at both ends of the No. 1 pipeline 1. At the same time, the long baffle 310 rises, and the openings at both ends of the No. 2 pipeline 2 are connected to the internal space of the U-shaped seat 301 and can be used normally. The blocked No. 1 pipeline 1 can be cleaned without affecting the mortar transportation. Conversely, when a blockage occurs inside the No. 2 pipeline 2, the long baffle 310 can be controlled to descend to block the openings at both ends of the No. 2 pipeline 2, so as to realize the same way of transporting mortar while cleaning the blocked pipeline.

[0025] Wherein; interface flanges 401 are provided at both ends of the intermediate pipe fitting 4, an upper mounting port 403 is provided at the center of the upper end surface of the intermediate pipe fitting 4, an internal thread is provided on the inner wall of the upper mounting port 403, the upper mounting port 403 is threadedly connected to the upper cover 5 through the internal thread, side ears 501 are provided at the upper ends of both sides of the upper cover 5, a flow meter 6 is provided at the center of the upper cover 5, the lower end of the flow meter 6 passes through the upper cover 5 and extends into the interior of the intermediate pipe fitting 4, the upper mounting port 403 is provided, it is convenient to install the upper cover 5 and the flow meter 6, by providing the flow meter 6, it can be effectively used to monitor the flow of mortar inside the No. 1 pipeline 1 and the No. 2 pipeline 2, and then the blockage of the pipeline can be judged by the flow of the mortar, and it can be cleaned in time to avoid more serious blockage, the upper cover 5 can be rotated to open by holding the side ears 501, and then a bamboo piece can be inserted into the blocked pipeline through the upper mounting port 403 to clean the blockage.

[0026] Among them; a card groove 404 is opened on the inner side of the upper end surface of the upper installation port 403, and a sealing ring 405 is arranged inside the card groove 404. The two intermediate pipes 4 are provided with an inner connecting pipe 402 on one side close to each other. The card groove 404 is provided to facilitate the installation of the sealing ring 405. The sealing ring 405 is provided to effectively ensure the sealing of the upper cover 5 after installation.

[0027] Among them, the recovery component 7 includes a transverse tube 701, a feeding tube 703, a pump body 704 and a discharge tube 705. The two ends of the transverse tube 701 are respectively connected to the inner side pipes 402 of the two intermediate pipes 4, the lower end of the feeding tube 703 is connected to the middle end of the transverse tube 701, the upper end discharge port of the feeding tube 703 is connected to the suction port of the pump body 704, and valves 702 are provided on the transverse tube 701 and on both sides of the feeding tube 703. The upper end feed port of the discharge tube 705 is connected to the discharge port of the pump body 704, and the lower end of the discharge tube 705 is connected to the suction port of the pump body 704. The end discharge port is connected to the discharge interface pipe 303 of the terminal adjustment component 3. When pipeline No. 1 or pipeline No. 2 is blocked, and the openings at both ends of the blocked pipeline are closed, the valve 702 close to the blocked pipeline is opened. At the same time, the pump body 704 works, and part of the flowing mortar in the blocked pipeline can be extracted through the feeding pipe 703, and the extracted mortar is discharged into the discharge interface pipe 303 through the discharge pipe 705, so as to facilitate the staff to clean the blocked pipeline through the upper installation port 403 in the next step.

[0028] Working principle: by turning the handle 307, the bidirectional screw 306 can be effectively driven to rotate synchronously. By rotating the bidirectional screw 306, under the limiting effect of the T-shaped guide groove 304, the two lifting rods 308 can be moved in the vertical direction along the bidirectional screw 306 to approach or move away from each other. During the movement of the lifting rod 308, the short baffle 309 and the long baffle 310 can be driven to move synchronously, and the movement directions of the short baffle 309 and the long baffle 310 are opposite. When the No. 1 pipeline 1 is blocked, the short baffle 309 can be controlled to descend to block the openings at both ends of the No. 1 pipeline 1. At the same time, the long baffle 310 rises, and the openings at both ends of the No. 2 pipeline 2 are connected with the internal space of the U-shaped seat 301 and can be used normally. The blocked No. 1 pipeline 1 can be cleaned without affecting the mortar transportation. On the contrary, when the No. 2 pipeline 2 is blocked, the long baffle 310 can be controlled to descend to block the openings at both ends of the No. 2 pipeline 2, so that the blocked pipeline can be cleaned while conveying mortar.

[0029] Furthermore, by providing a recovery component 7, when pipeline No. 1 or pipeline No. 2 is blocked and the openings at both ends of the blocked pipeline are closed, the valve 702 near the blocked pipeline is opened, and at the same time the pump body 704 works, part of the flowing mortar in the blocked pipeline can be extracted through the feeding pipe 703, and the extracted mortar is discharged into the discharge interface pipe 303 through the discharge pipe 705, so that the staff can clean the blocked pipeline through the upper installation port 403 in the next step. By providing the upper installation port 403, it is convenient to install the upper cover 5 and the flow meter 6. By providing the flow meter 6, it can be effectively used to monitor the flow of mortar inside pipeline No. 1 and pipeline No. 2, and then the pipeline blockage can be judged by the flow of mortar, and cleaned in time to avoid more serious blockage. The upper cover 5 can be rotated to open by holding the side ear 501, and then a bamboo piece can be inserted into the blocked pipeline through the upper installation port 403 to clean the blockage.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An anti-blocking structure for a semiconductor cutting slurry recovery system, characterized in that: It comprises a No. 1 pipeline (1), a No. 2 pipeline (2) is arranged on one side of the No. 1 pipeline (1), adjustment components (3) are arranged at the connection points of both ends of the No. 1 pipeline (1) and the No. 2 pipeline (2), intermediate pipe fittings (4) are arranged at the middle ends of the No. 1 pipeline (1) and the No. 2 pipeline (2), and a recovery component (7) is arranged between the two intermediate pipe fittings (4); The regulating assembly (3) comprises a U-shaped seat (301), the lower end of the interior of the U-shaped seat (301) is hollow, and the lower ends of the two side walls of the U-shaped seat (301) are provided with side openings (302), and the U-shaped seat (301) is connected to the interior of the first pipe (1) and the second pipe (2) respectively through the side openings (302) on both sides.

2. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 1, characterized in that: The two U-shaped seats (301) are both provided with an interface pipe (303) at the lower ends of the sides facing away from each other. The interface pipe (303) provided on the adjustment component (3) at the front end of the first pipeline (1) and the second pipeline (2) is a feed interface pipe (303), and the interface pipe (303) provided on the adjustment component (3) at the end of the first pipeline (1) and the second pipeline (2) is a discharge interface pipe (303). T-shaped guide rail grooves (304) are provided on both side walls of the U-shaped seat (301).

3. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 2, characterized in that: The T-shaped guide rail groove (304) is in communication with the lower end space inside the U-shaped seat (301), and a top plate (305) is provided on the upper end surface of the U-shaped seat (301).

4. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 3, characterized in that: The adjustment assembly (3) further comprises a bidirectional screw (306), a handle (307) and a lifting rod (308); the bidirectional screw (306) is rotatably arranged on the U-shaped seat (301) and is located between two side walls of the U-shaped seat (301); the upper end of the bidirectional screw (306) passes through the top plate (305) and is connected to the handle (307); the bidirectional screw (306) is rotatably connected to the top plate (305).

5. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 4, characterized in that: The threads at both ends of the bidirectional screw (306) are in opposite directions. Two lifting rods (308) are provided. The bidirectional screw (306) is threadedly connected to the two lifting rods (308) through threads at the upper and lower ends. A short baffle (309) is provided at one end of the lifting rod (308) away from the bidirectional screw (306), and a long baffle (310) is provided at the other end of the lifting rod (308) away from the bidirectional screw (306). The short baffle (309) and the long baffle (310) are respectively slidably connected to the two T-shaped guide grooves (304).

6. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 1, characterized in that: Both ends of the intermediate pipe member (4) are provided with interface flanges (401); an upper mounting opening (403) is provided at the center of the upper end surface of the intermediate pipe member (4); an internal thread is provided on the inner wall of the upper mounting opening (403); and the upper mounting opening (403) is threadedly connected to an upper cover (5) via the internal thread.

7. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 6, characterized in that: Side ears (501) are provided at the upper ends of both sides of the upper cover (5), a flow meter (6) is provided at the center of the upper cover (5), and the lower end of the flow meter (6) passes through the upper cover (5) and extends into the interior of the middle pipe (4).

8. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 7, characterized in that: A slot (404) is provided on the inner side of the upper end surface of the upper mounting opening (403), a sealing ring (405) is provided inside the slot (404), and an inner connecting pipe (402) is provided on the side where the two intermediate pipes (4) are close to each other.

9. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 8, characterized in that: The recovery component (7) comprises a transverse tube (701), a feeding tube (703), a pump body (704) and a discharge tube (705); the two ends of the transverse tube (701) are respectively connected to the inner side pipes (402) of the two intermediate pipe pieces (4); the lower end of the feeding tube (703) is connected to the middle end of the transverse tube (701); and the discharge port at the upper end of the feeding tube (703) is connected to the suction port of the pump body (704).

10. The anti-blocking structure for a semiconductor cutting slurry recovery system according to claim 9, characterized in that: Valves (702) are provided on the transverse pipe (701) and on both sides of the feeding pipe (703); the feed port at the upper end of the discharge pipe (705) is connected to the discharge port of the pump body (704); and the discharge port at the lower end of the discharge pipe (705) is connected to the discharge interface pipe (303) of the terminal adjustment component (3).

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