Pipeline connection method and device for reaction container, program and readable storage medium

Abstract

The invention belongs to the technical field of silicon carbide material manufacturing, and discloses a pipeline connection method, device and program of a reaction container and a readable storage medium. The pipeline connection method of the reaction container comprises the following steps: in response to a preparation signal generated after the reaction container reaches a specified position, driving a first pipeline to move forwards to approach a second pipeline of the reaction container; the driving motor rotates to drive the first pipeline to rotate, so that the first pipeline is in threaded connection with the second pipeline; and in response to a completion signal generated after connection of the first pipeline and the second pipeline is completed, gas conveying between the first pipeline and the second pipeline is started. According to the invention, after the reaction container is conveyed to any chamber, the reaction container can be quickly connected with the gas supply system, so that the atmosphere environment required by the reaction can be constructed in the reaction container.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon carbide material manufacturing, and in particular relates to a pipeline connection method, device, program and readable storage medium for a reaction container used in a silicon carbide material manufacturing system. Background Art

[0002] Silicon carbide is a representative ceramic material that is widely used throughout the industrial field due to its excellent physical, chemical and electrical properties.

[0003] In recent years, with the active progress in the development of semiconductor processing parts using silicon carbide materials, the importance of silicon carbide materials has increased. In particular, silicon carbide materials are widely used as components for etching processes in semiconductor process parts due to their high plasma tolerance. Silicon carbide materials for semiconductor etching process parts are the traditional method of manufacturing silicon carbide. Since quality and performance cannot be met by this method, chemical vapor deposition is often used in the prior art.

[0004] Chemical vapor deposition of silicon carbide uses a mixture of Si-containing gases such as SiH4, SiCl2, SiCl4 and C-containing gases such as C2H2, CH4, C3H8 as raw material gas, or CH3SiCl3, CH3SiH3, (CH3)3SiH), etc. There are some deposition methods using monolithic raw materials, and the production of silicon carbide materials by chemical vapor deposition has the disadvantage of low productivity because the process is carried out in an intermittent chemical vapor deposition furnace. However, if the intermittent chemical vapor deposition furnace is to be improved to a continuous chemical vapor deposition furnace, it is necessary to solve the problem of pipeline connection between the reaction container and the gas supply system after movement. Summary of the invention

[0005] In order to solve the deficiencies of the prior art, the present invention discloses, in a first aspect, a pipeline connection method for a reaction container, which is applied to chemical vapor deposition of silicon carbide materials, comprising:

[0006] In response to a preparation signal generated after the reaction container reaches a designated position, driving the first conduit to move forward to approach the second conduit of the reaction container;

[0007] The driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected;

[0008] In response to a completion signal generated after the connection between the first pipeline and the second pipeline is completed, gas delivery between the first pipeline and the second pipeline is started.

[0009] A further technical solution may be that, in the step of driving the motor to rotate to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected, the step includes:

[0010] In response to a positioning signal generated after the first pipe moves to a set position, the driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected.

[0011] A further technical solution may be that, in the step of driving the first pipeline to move forward to approach the second pipeline of the reaction container, the step further includes:

[0012] Acquire distance data generated by a distance sensor detecting a distance between the first pipe and the second pipe, and compare the distance data with set distance data;

[0013] If the distance data is the same as the set distance data, a positioning signal is generated.

[0014] A further technical solution may be that, in the step of driving the motor to rotate to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected, the step further includes:

[0015] Continuously obtain the torque data of the motor and compare the torque data of the motor with the set torque data;

[0016] If the difference between the torque data of the motor and the set torque data is within a preset error range, obtaining the distance data of the distance sensor, and comparing the distance data with the set distance data;

[0017] If the acquired distance data is greater than the set distance data, the acquired distance data is set as the new set distance data.

[0018] A further technical solution may be that, in the step of driving the first pipe to rotate so that the first pipe is threadedly connected to the second pipe, the step further includes:

[0019] Acquisition step: acquiring air pressure data of the reaction container, and comparing the acquired air pressure data with the set air pressure data;

[0020] Comparison step: if the difference between the acquired air pressure data and the set air pressure data is greater than a set threshold, it is determined that the sealing performance between the first pipe and the second pipe is weakened;

[0021] Adjustment steps: drive the motor to rotate to a set angle;

[0022] Verification step: After a set time interval, the acquired air pressure data is compared with the set air pressure data again. If the difference between the acquired air pressure data and the set air pressure data is less than the set threshold, the following sub-steps are performed:

[0023] Acquire the torque data of the motor, and set the acquired torque data as new end torque data;

[0024] Otherwise, repeat the above adjustment and inspection steps.

[0025] A further technical solution may be that, during the gas transportation process between the first pipeline and the second pipeline, the following steps are further included:

[0026] Get the reaction flow program in the current reaction container;

[0027] Determine whether the reaction vessel is in a pressure-maintaining state;

[0028] If the reaction container is in a pressure-maintaining state, the air pressure data is acquired at a certain interval to obtain the first air pressure data and the second air pressure data;

[0029] Comparing the first air pressure data with the second air pressure data to obtain a first air pressure difference;

[0030] If the first air pressure difference is outside the preset air pressure deviation range, the driving motor rotates a set angle;

[0031] Acquire the torque data of the motor, and set the acquired torque data as new end torque data;

[0032] Repeat the above steps until the first air pressure difference is within the preset air pressure deviation range.

[0033] A further technical solution may be that the pipeline connection method further comprises:

[0034] Acquire distance data generated by a distance sensor detecting a distance between a first pipeline and a second pipeline;

[0035] Compare the acquired distance data with the set warning distance data;

[0036] If the acquired distance data is equal to the set warning distance data, a warning signal is generated.

[0037] The second aspect of the present invention further discloses a computer program, which, when executed, can implement the above-mentioned pipeline connection method.

[0038] The third aspect of the present invention further discloses a readable storage medium, wherein the readable storage medium has the above-mentioned computer program built therein.

[0039] The fourth aspect of the present invention further discloses a pipeline connection device for a reaction container, which is applied to silicon carbide material manufacturing equipment, comprising:

[0040] A first pipeline connected to a gas supply system, wherein the first pipeline can be threadedly connected to a second pipeline on the reaction container to achieve gas delivery;

[0041] A pushing component, connected to the first pipe, and used to push the first pipe to move along the length extension direction of the first pipe;

[0042] a motor connected to the first pipe, and used to drive the first pipe to rotate so that the first pipe can be threadedly connected to the second pipe;

[0043] A controller, the controller being used to:

[0044] In response to a preparation signal generated after the reaction container reaches a designated position, driving the first conduit to move forward to approach the second conduit of the reaction container;

[0045] The driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected;

[0046] In response to a completion signal generated after the connection between the first pipeline and the second pipeline is completed, gas delivery between the first pipeline and the second pipeline is started.

[0047] A further technical solution may be that the pipeline connection device further comprises:

[0048] A distance sensor, electrically connected to the controller, the distance sensor being used to detect the distance between the first pipeline and the second pipeline;

[0049] An air pressure sensor is electrically connected to the controller, and is used to detect the air pressure in the reaction container.

[0050] The present invention can quickly connect the reaction container with the gas supply system after the reaction container is transported to any chamber, so as to construct an atmosphere environment required for the reaction in the reaction container. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to more clearly illustrate the embodiments of the present invention or the existing technical solutions, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0052] Figure 1 A method flow chart of a pipeline connection method in an embodiment of the present invention;

[0053] Figure 2 It is a structural schematic diagram of a pipeline connection device in an embodiment of the present invention;

[0054] Figure 3 It is a structural schematic diagram of a driving assembly of a pipeline connection device in an embodiment of the present invention;

[0055] Figure 4 Schematic diagram of the structure of the connecting sleeve of the pipeline connecting device in the embodiment of the present invention.

[0056] Description of reference numerals:

[0057] A. Cavity;

[0058] 1. first pipeline; 11. sub-pipeline; 12. connecting sleeve; 121. limiting plate; 122. limiting interlayer; 123. driven wheel;

[0059] 2. Second pipeline;

[0060] 3. Reaction vessel;

[0061] 4. Pushing assembly; 41. Snap-on plate; 411. Arc-shaped notch;

[0062] 5. Motor; 51. Driving wheel;

[0063] 6. Base plate; 61. Electric cylinder. DETAILED DESCRIPTION

[0064] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0065] All other embodiments obtained under the premise of the above operation belong to the scope of protection of the present invention.

[0066] In order to improve the technical problem of low productivity of intermittent chemical vapor deposition furnaces, the applicant of this patent hopes to propose a continuous chemical vapor deposition furnace. In this type of chemical vapor deposition furnace, the reaction container passes through the preparation chamber, reaction chamber and heat treatment chamber in sequence, and the atmosphere and temperature are prepared in the preparation chamber respectively; chemical vapor deposition is completed in the reaction chamber, and the post-heat treatment and cooling operations are completed in the heat treatment chamber.

[0067] That is to say, in the process of continuous chemical vapor deposition, the reaction vessel needs to be transported in sequence and passed through the preparation room, reaction chamber and heat treatment chamber. This is because, when three different chambers are used to realize the segmented continuous process, since each chamber is relatively independent, when the reaction vessel completes the work in one chamber and moves to the next chamber, the previous chamber can be connected to the new reaction vessel to realize continuous operation. That is to say, when a supply system for chemical vapor deposition equipment is provided, the preparation room, reaction chamber and heat treatment chamber of the continuous chemical vapor deposition furnace can operate on different reaction vessels at the same time. When the reaction container is transported to any chamber, it is necessary to establish a connection with the gas supply system to construct the atmosphere required for the reaction in the reaction container. The gas supply system is used to transport gas into the reaction container on the one hand, and to discharge the gas after the reaction is completed on the other hand.

[0068] The applicant has discovered that, in the process of using a continuous chemical vapor deposition furnace, after the reaction container is transported to any chamber, it is necessary to establish a connection with the gas supply system inside the chamber.

[0069] In view of this, the inventors of the present invention provide a pipeline connection method, a pipeline connection device, a program and a readable storage medium applied to a continuous vapor deposition furnace to meet the above requirements.

[0070] Implementation Method 1

[0071] In a first aspect, the present embodiment discloses a pipeline connection method for a reaction container, which is applied to chemical vapor deposition of silicon carbide materials, such as Figure 1 As shown, including:

[0072] In response to a preparation signal generated after the reaction container 3 reaches a designated position, the first pipeline 1 is driven to move forward to approach the second pipeline 2 of the reaction container 3;

[0073] The driving motor rotates to drive the first pipe 1 to rotate so that the first pipe 1 and the second pipe 2 are threadedly connected;

[0074] In response to a completion signal generated after the connection between the first pipeline 1 and the second pipeline 2 is completed, gas delivery between the first pipeline 1 and the second pipeline 2 is started.

[0075] The second aspect of this embodiment discloses a pipeline connection device for a reaction container, which is applied to silicon carbide material manufacturing equipment, including:

[0076] A first pipeline 1 is connected to a gas supply system, and the first pipeline 1 can be threadedly connected to a second pipeline 2 on a reaction container 3 to achieve gas transportation;

[0077] A pushing component 4, connected to the first pipe 1, and used to push the first pipe 1 to move along the length extension direction of the first pipe 1;

[0078] A motor 5 connected to the first pipe 1 and used to drive the first pipe 1 to rotate so that the first pipe 1 can be threadedly connected to the second pipe 2;

[0079] A controller, the controller being used to:

[0080] In response to a preparation signal generated after the reaction container 3 reaches a designated position, the first pipeline 1 is driven to move forward to approach the second pipeline 2 of the reaction container 3;

[0081] The driving motor 5 rotates to drive the first pipe 1 to rotate so that the first pipe 1 and the second pipe 2 are threadedly connected;

[0082] In response to a completion signal generated after the connection between the first pipeline 1 and the second pipeline 2 is completed, gas delivery between the first pipeline 1 and the second pipeline 2 is started.

[0083] In this embodiment, the pipeline connection device of the reaction container can be arranged on any cavity A in the silicon carbide material manufacturing equipment, and is used to connect with the pipeline on the reaction container 3 located in the cavity A to establish a connection with the gas supply system. Specifically, Figure 2 As shown, in the pipeline docking device, multiple first pipelines 1 can be provided, which are respectively connected to the gas supply system, and the multiple first pipelines 1 correspond to different functions; for example, some of the first pipelines 1 can be used to supply gas, each first pipeline 1 corresponds to a gas, and the gas supply system can supply gas to the reaction container 3 through these first pipelines 1, and control the supply amount of gas respectively to meet the reaction requirements; and some of the first pipelines 1 can also be used to extract the gas in the reaction container 3. The side of the reaction container 3 corresponding to the pipeline docking device is provided with a second pipeline 2 corresponding to the first pipeline 1 and connected to the internal space of the reaction container 3. In addition, it should be noted that the pipeline docking device can be arranged on both sides of the cavity A, corresponding to the two sides of the reaction container 3, respectively, for conveying gas into the reaction container 3 and discharging the gas after the reaction to the outside.

[0084] In this embodiment, the preparation signal described above can be a signal sent to the controller after confirming the position of the reaction container 3 through a variety of sensors such as a pressure sensor, a laser sensor, and a visual sensor. In response to the preparation signal generated after the reaction container 3 reaches the specified position, the controller drives the motor 5 to rotate while driving the first pipeline 1 to move forward, or after a certain period of time, to drive the first pipeline 1 to rotate. The first pipeline 1 gradually moves forward under the pushing action of the pushing component 4 and approaches the second pipeline 2; when the first pipeline 1 passes the set position, the first pipeline 1 is threadedly connected with the second pipeline 2 during the process of being driven to rotate by the motor 5.

[0085] In some other embodiments, the step of rotating the driving motor 5 to drive the first pipe 1 to rotate so that the first pipe 1 and the second pipe 2 are threadedly connected includes: in response to an in-position signal generated after the first pipe 1 moves to a set position, the driving motor 5 rotates to drive the first pipe 1 to rotate so that the first pipe 1 and the second pipe 2 are threadedly connected.

[0086] It should be noted that in the pipeline connection device, the first pipeline 1 needs to enter the cavity A through the through hole on the cavity A to connect with the second pipeline 2; and in order to maintain the sealing state of the cavity A, a sealing material needs to be provided in the through hole on the cavity A to seal the gap between the through hole and the first pipeline 1. However, the rotation of the first pipeline 1 will rub against the sealing material, causing the sealing material to wear, thereby affecting the sealing state of the cavity A. However, in the previous embodiment, the controller drives the motor 5 to rotate to drive the first pipeline 1 to rotate while responding to the preparation signal or after a period of time. In other words, before the first pipeline 1 is connected to the second pipeline 2, the motor 5 needs to drive the first pipeline 1 to idle for a period of time until the first pipeline 1 can be connected to the second pipeline 2, which will accelerate the wear of the sealing material. In this embodiment, in response to the in-place signal generated after the first pipeline 1 moves to the set position, the controller drives the motor 5 to rotate; in this way, the idling of the first pipeline 1 can be avoided, thereby reducing the wear of the sealing material, which is conducive to extending the service life of the sealing material. In some embodiments, the position of the first pipeline 1 can be determined by feedback information from the pushing component 4. For example, if the pushing component 4 is an electric cylinder, the moving distance of the first pipeline 1 can be controlled by controlling the electric cylinder to thereby determine the position of the first pipeline 1.

[0087] In some embodiments, the pipeline connection method further includes: in the step of driving the first pipeline 1 to move forward to approach the second pipeline 2 of the reaction container 3, it also includes:

[0088] Acquire distance data generated by a distance sensor detecting the distance between the first pipe 1 and the second pipe 2, and compare the distance data with set distance data;

[0089] If the distance data is the same as the set distance data, a positioning signal is generated.

[0090] Accordingly, the pipeline connection device further includes:

[0091] A distance sensor is electrically connected to the controller, and the distance sensor is used to detect the distance between the first pipeline 1 and the second pipeline 2.

[0092] In this embodiment, the distance between the first pipe 1 and the second pipe 2 is detected by a distance sensor to generate corresponding distance data. Then, the obtained distance data is compared with the preset distance data. If the two data match, it is determined that the first pipe 1 has moved to the preset position. At this time, the controller will output a position signal. Such a design can significantly improve the accuracy of the positioning of the first pipe 1.

[0093] As can be seen from the above, the first pipeline 1 needs to move axially on the one hand, and needs to rotate on the other hand. During the rotation of the first pipeline 1, the connection between the first pipeline 1 and the gas supply system may be affected. Therefore, in some embodiments, such as Figure 2 The first pipeline 1 may include:

[0094] Sub-pipeline 11, used for connecting with the gas supply system;

[0095] The connecting sleeve 12 is rotatably disposed on the sub-pipe 11 and is capable of axially moving relative to the sub-pipe 11 ; the connecting sleeve 12 is used for threaded connection with the second pipe 2 .

[0096] In this embodiment, if Figure 3 and Figure 4 As shown, the connecting sleeve 12 is rotatably arranged on the first pipe 1, and a sealing material is arranged at the connection between the two to maintain sealing, the pushing component 4 is connected to the connecting sleeve 12, and is used to push the connecting sleeve 12 to move along the axial direction of the sub-pipeline 11, and the motor 5 is connected to the connecting sleeve 12, and is used to drive the connecting sleeve 12 to rotate relative to the sub-pipeline 11. Such a configuration can ensure that the sub-pipeline 11 remains fixed relative to the gas supply system under the premise of ensuring the connection between the connecting sleeve 12 and the second pipe 2, and can effectively reduce the impact on the connection between the sub-pipeline 11 and the gas supply system. In some embodiments, the pushing component 4 can be an electric cylinder, a gas cylinder or an oil cylinder.

[0097] In some embodiments, Figure 3 and Figure 4As shown, two limiting plates 121 are arranged on the outer tube wall of the connecting sleeve 12. The limiting plates 121 are circular and are arranged coaxially with the connecting sleeve 12. A limiting interlayer 122 is formed between the two limiting plates 121. A clamping plate 41 is arranged on the driving rod of the pushing component 4. The clamping plate 41 has an arc-shaped notch 411 on the side facing the connecting sleeve 12, which is used to cooperate with the limiting interlayer 122. When the driving rod of the pushing component 4 is driven, the connecting sleeve 12 can be driven to move through the cooperation between the arc-shaped notch 411 and the limiting interlayer 122. Due to the cooperation between the arc-shaped notch 411 and the limiting interlayer 122, when the motor 5 drives the connecting sleeve 12 to rotate, it will not affect the connection between the pushing component 4 and the connecting sleeve 12. In some embodiments, as Figure 3 and Figure 4 As shown, a coaxially arranged driven wheel 123 is also provided on the outer tube wall of the connecting sleeve 12, and a driving wheel 51 connected to the driven wheel 123 is connected to the driving shaft of the motor 5. The motor 5 can drive the connecting sleeve 12 to rotate through the cooperation between the driven wheel 123 and the driving wheel 51. In addition, in order to prevent the axial movement of the connecting sleeve 12 from affecting the connection between the motor 5 and the connecting sleeve 12, the motor 5 needs to be arranged to follow the connecting sleeve 12. Specifically, the motor 5 can be slidably arranged on a base plate 6, and is connected to an electric cylinder 61, which is used to drive the motor 5 to move on the base plate 6 along the axial direction of the connecting sleeve 12 so as to move synchronously with the connecting sleeve 12.

[0098] In some embodiments, each connecting sleeve 12 of the first pipeline 1 corresponds to a driving component 4 and a motor 5. In other embodiments, a driving component 4 can be connected to multiple connecting sleeves 12 to drive multiple connecting sleeves 12 to move at the same time; specifically, Figure 3 and Figure 4 As shown, the snap-in plate 41 is provided with a plurality of arc-shaped notches 411 for respectively cooperating with the limiting interlayers 122 on the plurality of connecting sleeves 12. When the driving rod of the pushing component 4 pushes the snap-in plate 41 to move, it can respectively cooperate with the limiting interlayers 122 on the plurality of connecting sleeves 12 through the plurality of arc-shaped notches 411 to drive the connecting sleeves 12 to move at the same time.

[0099] In some other embodiments, a motor 5 may be connected to the connecting sleeve 12 to drive multiple connecting sleeves 12 to rotate simultaneously. Figure 3 and Figure 4 As shown, the driving wheel 51 of the motor 5 is connected to the driven wheel 123 on one of the connecting sleeves 12, and the two adjacent connecting sleeves 12 are linked by gears or belts, so that when the motor 5 drives one of the connecting sleeves 12 to rotate, the two adjacent connecting sleeves 12 can rotate synchronously under the action of the gears or belts.

[0100] The third aspect of this embodiment further discloses a computer program, which, when executed, can implement the pipeline connection method described above.

[0101] The fourth aspect of this embodiment further discloses a readable storage medium, which contains the computer program described above.

[0102] Implementation Method 2

[0103] This embodiment discloses a pipeline connection method. This embodiment is a further improvement based on the first embodiment, and the improvement is that: in the step of driving the motor 5 to rotate to drive the first pipeline 1 to rotate so that the first pipeline 1 and the second pipeline 2 are threadedly connected, it also includes:

[0104] Continuously obtain the torque data of the motor 5, and compare the torque data of the motor 5 with the set torque data;

[0105] If the difference between the torque data of the motor 5 and the set torque data is within the preset error range, the distance data of the distance sensor is obtained, and the distance data is compared with the set distance data;

[0106] If the acquired distance data is greater than the set distance data, the acquired distance data is set as the new set distance data.

[0107] The motor 5 drives the first pipeline 1 to rotate so that the first pipeline 1 can be threadedly connected with the second pipeline 2. The torque when the motor 5 drives the first pipeline 1 to idle is different from the torque when the motor 5 drives the first pipeline 1 and the second pipeline 2 to rotate for threaded connection. When driving the first pipeline 1 and the second pipeline 2 to be threadedly connected, the torque of the motor 5 is greater. Therefore, by obtaining the torque data of the motor 5, the torque data of the motor 5 can be compared with the set torque data. If the difference between the torque data of the motor 5 and the set torque data is within the preset error range, it can be determined that the first pipeline 1 and the second pipeline 2 begin to be threadedly connected. At this time, the distance data of the current distance sensor is obtained, and the distance data is compared with the set distance data. If the obtained distance data is greater than the set distance data, it means that there is a deviation between the set distance data and the actual situation. Subsequently, the obtained distance data is set as the new set distance data to correct the data. In this way, the pipeline connection device can be controlled more accurately.

[0108] In some other more preferred embodiments, the step of driving the first pipe 1 to rotate so that the first pipe 1 is threadedly connected to the second pipe 2 further includes:

[0109] In response to the in-position signal, the driving motor 5 rotates to drive the first pipeline 1 to rotate;

[0110] Obtaining torque data of the motor 5, and comparing the obtained torque data with the set end torque data;

[0111] If the acquired torque data is greater than or equal to the set end torque data, the motor 5 is controlled to stop rotating and a completion signal is generated.

[0112] From the above, it can be seen that the torque when the motor 5 drives the first pipeline 1 to idle is different from the torque when the motor 5 drives the first pipeline 1 and the second pipeline 2 to rotate for threaded connection. Similarly, the torque when the motor 5 drives the first pipeline 1 and the second pipeline 2 to rotate for threaded connection is different from the torque of the motor 5 after the first pipeline 1 and the second pipeline 2 are connected. When the first pipeline 1 and the second pipeline 2 are connected, the torque of the motor 5 is larger and relatively fixed. Therefore, the torque data of the motor 5 can be used to determine whether the connection between the first pipeline 1 and the second pipeline 2 is completed. Specifically, the torque data of the motor 5 is obtained, and the obtained torque data is compared with the set termination torque data; if the obtained torque data is greater than or equal to the set termination torque data, it is determined that the connection between the first pipeline 1 and the second pipeline 2 is completed, and the controller controls the motor 5 to stop rotating and generates a completion signal. In this way, the pipeline connection device can be controlled more accurately.

[0113] Implementation Method 3

[0114] This embodiment discloses a pipeline connection method. This embodiment is a further improvement based on the first or second embodiment, and the improvement is:

[0115] The gas transportation process between the first pipeline 1 and the second pipeline 2 also includes:

[0116] Acquisition step: acquiring the air pressure data of the reaction container 3, and comparing the acquired air pressure data with the set air pressure data;

[0117] Comparison step: if the difference between the acquired air pressure data and the set air pressure data is greater than a set threshold, it is determined that the sealing performance between the first pipe 1 and the second pipe 2 is weakened;

[0118] Adjustment steps: drive motor 5 to rotate to a set angle;

[0119] Verification step: After a set time interval, the acquired air pressure data is compared with the set air pressure data again. If the difference between the acquired air pressure data and the set air pressure data is less than the set threshold, the following sub-steps are performed:

[0120] Obtaining the torque data of the motor 5, and setting the obtained torque data as the new end torque data;

[0121] Otherwise, repeat the above adjustment and inspection steps.

[0122] The threaded connection between pipes is usually sealed by squeezing the sealing material provided between the pipes and filling the gap between the pipes with the sealing material to achieve the sealing between the pipes. However, during long-term use, the sealing material may age and fail to completely fill the gap between the pipes under the original force, thereby reducing the sealing performance. Therefore, in this case, the squeezing force between the pipes is usually increased to further squeeze the sealing material, thereby ensuring the sealing performance between the pipes. Accordingly, in this embodiment, the sealing performance between the first pipe 1 and the second pipe 2 can also be ensured by the above means.

[0123] Specifically, in this embodiment, the air pressure data in the reaction container 3 is obtained, and the obtained air pressure data is compared with the set air pressure data; if the difference between the obtained air pressure data and the set air pressure data is greater than the set threshold, it is determined that the sealing performance of the connection between the first pipe 1 and the second pipe 2 is weakened, and there may be gas leakage. Subsequently, the driving motor 5 rotates a set angle to drive the first pipe 1 to rotate a certain angle, and then through the threaded fit between the first pipe 1 and the second pipe 2, the sealing material at the connection between the first pipe 1 and the second pipe 2 is further squeezed.

[0124] After the set time interval, the acquired air pressure data is compared with the set air pressure data again. If the difference between the acquired air pressure data and the set air pressure data is less than the set threshold, it is determined that the sealing performance between the first pipeline 1 and the second pipeline 2 is restored, the torque data of the motor 5 is acquired, and the acquired torque data is set as the new termination torque data;

[0125] If the difference between the acquired air pressure data and the set air pressure data is greater than or equal to the set threshold, it is determined that the sealing performance between the first pipeline 1 and the second pipeline 2 is weakened and there is a gas leakage; repeat the above adjustment steps and inspection steps.

[0126] It should be noted that the force acting on the sealing material is provided by the motor 5, and the greater the torque data of the motor 5, the greater the force provided. Therefore, in this embodiment, the driving motor 5 rotates the set angle to increase the force acting on the sealing material; accordingly, the torque data required by the motor 5 increases. After determining that the sealing performance between the first pipeline 1 and the second pipeline 2 is restored, the torque data of the motor 5 is obtained, and the obtained torque data is set as the new termination torque data to perform data correction, so that when the pipeline is connected next time, the new termination torque data can be used as a basis for judgment to determine whether the connection between the first pipeline 1 and the second pipeline 2 is completed, thereby ensuring the sealing performance between the first pipeline 1 and the second pipeline 2.

[0127] It is worth mentioning that during the reaction process in the reaction container 3, the corresponding air pressure is different at different reaction stages. Therefore, in this embodiment, multiple time periods can be set according to the reaction process, corresponding to multiple reaction stages respectively; and according to the reaction stages, the set air pressure data corresponding to different time periods are set. In other words, in the comparison step, the acquired air pressure data needs to be compared with the set air pressure data corresponding to the time period for judgment.

[0128] In some other embodiments, during the gas transportation process between the first pipeline 1 and the second pipeline 2, the following steps are also included:

[0129] Obtain the reaction flow program in the current reaction container 3;

[0130] Determine whether the reaction container 3 is in a pressure-maintaining state;

[0131] If the reaction container 3 is in a pressure-maintaining state, the air pressure data is acquired at a certain interval to obtain the first air pressure data and the second air pressure data;

[0132] Comparing the first air pressure data with the second air pressure data to obtain a first air pressure difference;

[0133] If the first air pressure difference is outside the preset air pressure deviation range, the driving motor 5 rotates by a set angle;

[0134] Obtaining the torque data of the motor 5, and setting the obtained torque data as the new end torque data;

[0135] Repeat the above steps until the first air pressure difference is within the preset air pressure deviation range.

[0136] This embodiment is similar to the above embodiment, and the termination torque data can be corrected to ensure the sealing performance. The difference is that in this embodiment, the relatively stable air pressure in the reaction container 3 during the pressure holding stage is utilized.

[0137] It is worth mentioning that the problem of weakened sealing performance due to aging of sealing materials can be solved by increasing the force applied to squeeze the sealing materials. However, after the sealing materials continue to age to a certain extent, the above-mentioned method of increasing the force will be difficult to ensure the sealing performance of the sealing materials. This solution has its limits.

[0138] Specifically, the pipeline connection method also includes:

[0139] Acquire distance data generated by a distance sensor detecting a distance between the first pipe 1 and the second pipe 2;

[0140] Compare the acquired distance data with the set warning distance data;

[0141] If the acquired distance data is equal to the set warning distance data, a warning signal is generated.

[0142] As can be seen from the above, the connection between the first pipe 1 and the second pipe 2 is through a threaded connection. Therefore, in the above embodiment, in the process of using the motor 5 to drive the first pipe 1 to continue to rotate to increase the force between the first pipe 1 and the second pipe 2, the distance between the first pipe 1 and the second pipe 2 is changing, so the degree of aging of the sealing material can be judged by the distance data. Specifically, the distance data generated by the distance sensor detecting the distance between the first pipe 1 and the second pipe 2 is obtained; the obtained distance data is compared with the set warning distance data; if the obtained distance data is equal to the set warning distance data, it is determined that the sealing performance of the sealing material has aged to the extent that it needs to be replaced, and the controller generates a warning signal. In some embodiments, in response to the warning signal, the controller can prompt the staff to replace the sealing material by means of a sound prompt or a message push.

[0143] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present invention rather than to limit them. Although the embodiments of the present invention have been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the embodiments of the present invention can still be modified or replaced by equivalents, and these modifications or equivalent replacements cannot cause the modified technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A pipeline connection method for a reaction container, applied to chemical vapor deposition of silicon carbide materials, characterized in that: include: In response to a preparation signal generated after the reaction container reaches a designated position, driving the first conduit to move forward to approach the second conduit of the reaction container; The driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected; In response to a completion signal generated after the connection between the first pipeline and the second pipeline is completed, the movement and rotation of the first pipeline are stopped and gas delivery between the first pipeline and the second pipeline is started.

2. The pipeline connection method according to claim 1, characterized in that: The step of driving the motor to rotate to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected includes: In response to a positioning signal generated after the first pipe moves to a set position, the driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected.

3. The pipeline connection method according to claim 2, characterized in that: The step of driving the first pipeline to move forward to approach the second pipeline of the reaction container also includes: Acquire distance data generated by a distance sensor detecting a distance between the first pipe and the second pipe, and compare the distance data with set distance data; If the distance data is the same as the set distance data, a positioning signal is generated.

4. The pipeline connection method according to claim 3, characterized in that: The step of driving the motor to rotate to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected also includes: Continuously obtain the torque data of the motor and compare the torque data of the motor with the set torque data; If the difference between the torque data of the motor and the set torque data is within a preset error range, obtaining the distance data of the distance sensor, and comparing the distance data with the set distance data; If the acquired distance data is greater than the set distance data, the acquired distance data is set as the new set distance data.

5. The pipeline connection method according to claim 2, characterized in that: The step of driving the first pipe to rotate so that the first pipe is threadedly connected to the second pipe also includes: In response to the in-position signal, the driving motor rotates to drive the first pipe to rotate; Obtain the torque data of the motor, and compare the obtained torque data with the set end torque data; If the acquired torque data is greater than or equal to the set end torque data, the motor is controlled to stop rotating and a completion signal is generated.

6. The pipeline connection method according to claim 5, characterized in that: The gas transportation process between the first pipeline and the second pipeline also includes: Acquisition step: acquiring air pressure data of the reaction container, and comparing the acquired air pressure data with the set air pressure data; Comparison step: if the difference between the acquired air pressure data and the set air pressure data is greater than a set threshold, it is determined that the sealing performance between the first pipe and the second pipe is weakened; Adjustment steps: drive the motor to rotate to a set angle; Verification step: After a set time interval, the acquired air pressure data is compared with the set air pressure data again. If the difference between the acquired air pressure data and the set air pressure data is less than the set threshold, the following sub-steps are performed: Acquire the torque data of the motor, and set the acquired torque data as new end torque data; Otherwise, repeat the above adjustment and inspection steps.

7. The pipeline connection method according to claim 5, characterized in that: The gas transportation process between the first pipeline and the second pipeline also includes: Get the reaction flow program in the current reaction container; Determine whether the reaction vessel is in a pressure-maintaining state; If the reaction container is in a pressure-maintaining state, the air pressure data is acquired at a certain interval to obtain the first air pressure data and the second air pressure data; Comparing the first air pressure data with the second air pressure data to obtain a first air pressure difference; If the first air pressure difference is outside the preset air pressure deviation range, the driving motor rotates a set angle; Acquire the torque data of the motor, and set the acquired torque data as new end torque data; Repeat the above steps until the first air pressure difference is within the preset air pressure deviation range.

8. The pipeline connection method according to claim 6 or 7, characterized in that: Also includes; Acquire distance data generated by a distance sensor detecting a distance between a first pipeline and a second pipeline; Compare the acquired distance data with the set warning distance data; If the acquired distance data is equal to the set warning distance data, a warning signal is generated.

9. A computer program, characterized in that When the computer program is executed, the pipeline connection method according to any one of claims 1 to 8 can be implemented.

10. A readable storage medium, characterized in that: The readable storage medium has the computer program according to claim 9 built therein.

11. A pipe connection device for a reaction vessel, applied to silicon carbide material manufacturing equipment, characterized in that: include: A first pipeline is connected to the gas supply system, and the first pipeline can be rotatably connected to the second pipeline on the reaction container through a thread to realize gas delivery; A pushing component, connected to the first pipe, and used to push the first pipe to move along the length extension direction of the first pipe; a motor connected to the first pipe, and used to drive the first pipe to rotate so that the first pipe can be threadedly connected to the second pipe; A controller, the controller being used to: In response to a preparation signal generated after the reaction container reaches a designated position, driving the first conduit to move forward to approach the second conduit of the reaction container; The driving motor rotates to drive the first pipe to rotate so that the first pipe and the second pipe are threadedly connected; In response to a completion signal generated after the connection between the first pipeline and the second pipeline is completed, gas delivery between the first pipeline and the second pipeline is started.

12. The pipeline connection device according to claim 11, characterized in that: Also includes: A distance sensor, electrically connected to the controller, the distance sensor being used to detect the distance between the first pipeline and the second pipeline; An air pressure sensor is electrically connected to the controller, and is used to detect the air pressure in the reaction container.

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