Calibration device and method for spaceflight resistance strain type pressure sensor

Abstract

The invention belongs to the related technical field of spaceflight sensor calibration, and discloses a calibration device and method for a spaceflight resistance strain pressure sensor, and the calibration device comprises a displacement generation mechanism, a first supporting mechanism, a second supporting mechanism, and a fixing module. The first supporting mechanism and the second supporting mechanism are connected in series so as to be jointly used for supporting a sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism; the displacement generating mechanism is used for driving the sensor to move towards the fixing module so as to apply pressure to the sensor; wherein the sensor is horizontally arranged, and the pressure applying direction is perpendicular to the gravity direction of the sensor. According to the invention, the calibration accuracy is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field related to aerospace sensor calibration, and more specifically, relates to a calibration device and method for an aerospace resistive strain gauge pressure sensor. Background Art

[0002] In recent years, with the rapid development of the aerospace industry, spacecraft has increasingly higher requirements for sensor accuracy. Because spacecraft have restrictions on internal space, internal magnetic field environment and take-off weight, there is an urgent need for a small, reliable, non-magnetic, high-precision sensor. For example, the aerospace resistive strain pressure sensor designed by patent CN117664403A consists of a strain beam, a detection end, a resistive strain gauge and a conditioning circuit. When the detection end is subjected to pressure, it squeezes the strain beam and deforms, thereby changing the resistance of the strain gauge attached to the surface of the beam. After being processed by the conditioning circuit, a changing voltage signal is obtained. Sensor calibration can establish the relationship between the pressure and the output voltage. The premise for the sensor to work accurately is reasonable and accurate calibration.

[0003] However, existing calibration devices often ignore the sensor's own gravity, which will cause a systematic error in the calibration process; and the commonly used loading method is the weight method, which has friction on the rope, causing systematic errors and making it impossible to calibrate accurately. Summary of the invention

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a calibration device and method for an aerospace resistive strain type pressure sensor, which aims to solve the problem of low calibration accuracy of the existing resistive strain type pressure sensor.

[0005] To achieve the above object, according to one aspect of the present invention, a calibration device for aerospace resistance strain type pressure sensor is provided, the calibration device comprising a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module, the first supporting mechanism and the second supporting mechanism are connected in series to jointly support the sensor to be calibrated; the displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism;

[0006] The displacement generating mechanism is used to drive the sensor to move toward the fixing module to apply pressure to the sensor; wherein the sensor is arranged horizontally, and the direction of the pressure application is perpendicular to the gravity direction of the sensor.

[0007] Furthermore, the fixed end is used to measure the pressure exerted on the sensor; the sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, and the controller is used to perform fitting based on the received output voltage and pressure to obtain a relationship curve between the output voltage of the sensor and the pressure exerted on it, thereby completing the calibration of the sensor.

[0008] Furthermore, the displacement generating mechanism includes a displacement platform base plate, a two-dimensional displacement platform, an actuator bracket, a piezoelectric actuator and an actuator top, the two-dimensional displacement platform is fixed on the displacement platform base plate; the actuator bracket is fixed on the two-dimensional displacement platform; one end of the piezoelectric driver is fixedly connected to the driver bracket, and the other end is threadedly connected to the actuator top.

[0009] Furthermore, the actuator top is formed with an internal thread, and the end of the piezoelectric actuator away from the actuator bracket is formed with an external thread, and the corresponding internal thread is meshed with the external thread to form a threaded connection between the actuator top and the piezoelectric actuator.

[0010] Furthermore, the actuator bracket is formed with a cylindrical groove, and the cylindrical groove is used to accommodate the piezoelectric actuator, and the shell of the piezoelectric actuator is cylindrical.

[0011] Furthermore, the first supporting mechanism includes a first supporting member, a slide rail, a slide, a slide conversion member, a sensor holder and a force conversion frame, the slide rail is fixed on the first supporting member; the slide is slidably arranged on the slide rail; the slide conversion member is fixed on the slide; the sensor holder and the force holder are arranged on the slide conversion member, and both are used to support the sensor.

[0012] Furthermore, the slide rail is provided with a slideway, the slide is provided with a boss, the shape of the boss corresponds to the shape of the slideway, and the boss is movably arranged in the slideway, so that a sliding connection is formed between the slide and the slide rail.

[0013] Furthermore, a detachable connection is formed between the force conversion frame and the sensor holding frame, and the sensor holding frame is formed with a receiving groove, which is used to accommodate part of the sensor; the force conversion frame is provided with two threading grooves, which are used for the wiring of the sensor to pass through.

[0014] Furthermore, the sensor includes an end cover, a strain beam, a resistive strain gauge and a detection end, the detection end is columnar, one end of which is connected to the middle of one side of the strain beam, the end cover is connected to the middle of the other side of the strain beam, and a plurality of resistive strain gauges are respectively pasted on the two ends of the strain beam; the end cover, the strain beam and the resistive strain gauge are arranged in the receiving groove; the other end of the detection end passes through the force conversion frame and the second support member in sequence and is connected to the fixing module; the two ends of the strain beam are respectively connected to the force conversion frame.

[0015] The present invention also provides a calibration method for an aerospace resistive strain type pressure sensor, wherein the calibration method uses the calibration device for the aerospace resistive strain type sensor as described above to perform calibration.

[0016] In general, compared with the prior art, the above technical solution conceived by the present invention mainly has the following beneficial effects:

[0017] 1. The first supporting mechanism and the second supporting mechanism are connected in series to jointly support the sensor to be calibrated; the sensor is arranged horizontally, and the direction of pressure application is perpendicular to the gravity direction of the sensor, thereby shielding the influence of the sensor's own gravity on the calibration process, thereby improving the accuracy of the calibration.

[0018] 2. Using piezoelectric actuators as the output unit during the working process, piezoelectric actuators equipped with suitable drivers can perform nanometer-level feed motions with good stability. Therefore, during the working process, calibration can be performed with very small feed increments, that is, more calibration points can be obtained, greatly improving the calibration capability.

[0019] 3. The first supporting mechanism uses the movement of the slide to drive the movement of the sensor. Although there is friction between the slide and the slide rail, it will not be transmitted to the sensor and will not cause system error.

[0020] 4. Since a detachable connection is formed between the force conversion frame and the sensor holding frame, for different types of resistive strain type pressure sensors, the previous sensor can be removed, and the new type of pressure sensor to be calibrated can be installed and then connected together, so that high-precision calibration of different types of resistive strain type displacement sensors can be quickly achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a calibration device for an aerospace resistance strain type pressure sensor provided by the present invention;

[0022] Figure 2 yes Figure 1A schematic diagram of a sensor of a calibration device for an aerospace resistance strain type pressure sensor;

[0023] Figure 3 yes Figure 1 A schematic diagram of a first supporting mechanism of a calibration device for an aerospace resistance strain type pressure sensor;

[0024] Figure 4 yes Figure 1 A schematic diagram of a first supporting mechanism, a sensor and a second supporting mechanism of a calibration device for an aerospace resistance strain type pressure sensor;

[0025] Figure 5 yes Figure 1 A schematic diagram of a second supporting mechanism of a calibration device for an aerospace resistance strain type pressure sensor;

[0026] Figure 6 yes Figure 1 Schematic diagram of the fixing module of the calibration device of the aerospace resistive strain pressure sensor.

[0027] In all the drawings, the same figure numbers are used to represent the same elements or structures, among which: 11-displacement stage base plate, 12-two-dimensional displacement stage, 131-actuator bracket, 132-piezoelectric actuator, 133-actuator top, 21-first support member, 221-slide guide rail, 222-slide, 23-slide conversion member, 24-sensor holder, 25-force conversion frame, 31-end cover, 32-strain beam, 33-detection end, 34-resistance strain gauge, 41-second support member, 42-bearing adapter plate, 431-linear bearing holder, 432-linear bearing, 51-fixed end, 52-S-type force sensor, 53-force terminal. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] See also Figure 1The present invention provides a calibration device for a space resistance strain type pressure sensor, which can simulate the weightless environment of the space resistance strain type pressure sensor when it is working, reduce the influence of gravity on the calibration process, shield the influence of the sensor's own gravity on the calibration, and is more in line with the weightless working environment of the aerospace sensor; specifically, the sensor to be calibrated is placed horizontally so that the force direction of the sensor is perpendicular to the gravity direction, so that its force is not affected by its own gravity. At the same time, a piezoelectric actuator is used to provide feed during the calibration process, and nanometer-level feed can be achieved under ideal conditions, which greatly improves the interval between calibration points during the calibration process, thereby improving the calibration precision and accuracy.

[0030] The calibration device includes a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module, wherein the first supporting mechanism and the second supporting mechanism are connected in series to jointly support the sensor to be calibrated. The displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism. The displacement generating mechanism is used to drive the sensor to move toward the fixing module to apply pressure to the sensor. The fixing module is used to measure the pressure exerted on the sensor. The sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, and then the relationship between the pressure exerted on the sensor and the output voltage is obtained to complete the calibration of the sensor. Among them, the sensor is an aerospace resistive strain pressure sensor.

[0031] See also Figure 4 , the displacement generating mechanism comprises a displacement stage bottom plate 11, a two-dimensional displacement stage 12, an actuator bracket 131, a piezoelectric actuator 132 and an actuator top 133, wherein the two-dimensional displacement stage 12 is fixed on the displacement stage bottom plate 11. The actuator bracket 131 is fixed on the two-dimensional displacement stage 12. One end of the piezoelectric driver is fixedly connected to the driver bracket, and the other end is threadedly connected to the actuator top 133. Specifically, the bottom surface of the two-dimensional displacement stage 12 is connected to the displacement stage bottom plate 11 through a locking screw, the actuator bracket 131 is connected to the table surface of the two-dimensional displacement stage 12 through a locking screw, and the piezoelectric actuator 132 is fixed to the actuator bracket 131 through a locking screw. The actuator top 133 is formed with an internal thread, and the end of the piezoelectric actuator 132 away from the actuator bracket 131 is formed with an external thread, and the corresponding internal thread is engaged with the external thread so that a threaded connection is formed between the actuator top 133 and the piezoelectric actuator 132. The actuator bracket 131 is formed with a cylindrical groove, and the cylindrical groove is used to accommodate the piezoelectric actuator 132. The shell of the piezoelectric actuator 132 is cylindrical.

[0032] In one embodiment, the two-dimensional translation stage 12 is divided into two parts, the lower part is respectively provided with four cylindrical countersunk holes, and the translation stage bottom plate 11 is provided with threaded bottom holes, and locking screws enter the threaded bottom holes from the corresponding countersunk holes to fix the two-dimensional translation stage to the translation stage bottom plate 11; the upper part of the two-dimensional translation stage is provided with four threaded bottom holes, and the bottom of the actuator bracket 131 is provided with four through holes, and the locking screws are screwed into the threaded bottom holes after passing through the through holes to fix the two-dimensional translation stage to the actuator bracket; the side with the line of the piezoelectric actuator 132 faces upward; the side of the actuator bracket is provided with a cylindrical countersunk hole, and the bottom of the piezoelectric actuator is provided with a threaded hole, and the screws are screwed into the threaded holes through the corresponding countersunk holes to fix the actuator bracket to the piezoelectric actuator; the actuator top 133 is used to expand the contact area of ​​the propulsion end of the piezoelectric actuator.

[0033] See also Figure 3 , the first supporting mechanism includes a first supporting member 21, a slide rail 221, a slide 222, a slide conversion member 23, a sensor holder 24 and a force conversion frame 25, and the slide rail 221 is fixed on the first supporting member 21. The slide 222 is slidably arranged on the slide rail 221. The slide conversion member 23 is fixed on the slide. The sensor holder 24 and the force holder are arranged on the slide conversion member 23, and both are used to support the sensor. The slide rail 221 is provided with a slideway, and the slide is provided with a boss, the shape of the boss corresponds to the shape of the slideway, and the boss is movably arranged in the slideway, so that a sliding connection is formed between the slide and the slide rail 221, and the slide can slide linearly along the slide rail 221. The force conversion frame 25 and the sensor holder 24 form a detachable connection, and the sensor holder 24 is formed with a receiving groove, which is used to accommodate part of the sensor; the force conversion frame 25 has two threading grooves, which are used for the wiring of the sensor to pass through so as to be connected to the debugging circuit, etc.

[0034] In one embodiment, the slide rail 221 is provided with four cylindrical countersunk holes, and the first support member 21 is correspondingly provided with four threaded bottom holes. The screws are screwed into the threaded bottom holes through the corresponding countersunk holes to fix the slide rail 221 on the first support member 21. The slideway is arranged on the side of the slide rail 221; since the surface of the slide is too small, the slide conversion member 23 is introduced to expand the area. The slide conversion member 23 is provided with four cylindrical countersunk holes and two threaded holes. The screws pass through the corresponding countersunk holes and enter the threaded holes of the slide, so that the slide conversion member is connected to the slide. The sensor holder 24 is in the shape of a "J", and cylindrical countersunk holes are respectively provided at both ends. The screws pass through the corresponding countersunk holes and are screwed into the corresponding threaded holes, so that the sensor holder is connected to the slide conversion member.

[0035] See also Figure 2 The sensor includes an end cap 31, a strain beam 32, a resistive strain gauge 34 and a detection end 33. The detection end 33 is columnar, one end of which is connected to the middle of one side of the strain beam 32. The end cap 31 is connected to the middle of the other side of the strain beam 32. A plurality of resistive strain gauges 34 are respectively pasted on the two ends of the strain beam 32. The end cap 31, the strain beam 32 and the resistive strain gauge 34 are arranged in the receiving groove. The other end of the detection end 33 passes through the force conversion frame 25 and the second support member 41 in sequence and is then connected to the fixing module. The two ends of the strain beam 32 are respectively connected to the force conversion frame 25.

[0036] In one embodiment, a stepped groove is formed in the middle of the strain beam 32, and a stepped protrusion is formed at the bottom of the corresponding detection end 33, the stepped protrusion cooperates with the stepped groove, and the stepped protrusion is stuck in the stepped part of the stepped groove; the end cap 31 is arranged at the top of the stepped groove, so that the detection end, the strain gauge and the end cap 31 are connected and can move together. The number of the resistive strain gauges 34 is four, and the four resistive strain gauges 34 are divided into two groups, and the two groups of resistive strain gauges 34 are respectively pasted on the long arms at both ends of the deformation beam.

[0037] The sensor is placed horizontally, and the detection end extends forward after passing through the force conversion frame 25 until the strain beam is attached to the force conversion frame. The sensor is rotated so that the long arm of the strain beam is set horizontally, that is, the four cylindrical countersunk holes on the strain beam are aligned with the four threaded holes on the force conversion frame, and the sensor is fixed to the force conversion frame by tightening with locking screws.

[0038] The force conversion frame is an "X"-shaped structure, which is placed on the slide conversion member. The "X"-shaped bottom of the force conversion frame rests on the sensor holder. The screws are screwed onto the sensor holder through the four cylindrical countersunk holes on the force conversion frame to achieve the connection. The force conversion frame, the sensor holder, the sensor, the slide conversion member and the slide are all fixed together and can slide one-dimensionally on the slide rail following the slide.

[0039] See also Figure 5 The second support mechanism includes a second support member 41, a bearing adapter plate 42, a linear bearing 432 and a linear bearing holder 431. The bearing adapter plate 42 is arranged on the second support member 41. The linear bearing holder 431 is arranged on the bearing adapter plate 42. The linear bearing 432 is arranged in a groove inside the linear bearing holder 431, and is used to support the detection end. The detection end extends out after passing through the linear bearing, and the second support mechanism provides support for the slender detection end to prevent sagging due to gravity.

[0040] The second support member 41 is used to provide sufficient height for the linear bearing. Due to space limitations, the second support member 41 cannot be designed to be too thick, and the top table has a certain width. In order to avoid the difficulty brought by the processing of the I-shaped structure, a split design and screw locking structure are adopted, and the second support member 41 and the bearing adapter plate 42 are adopted. The bearing adapter plate 42 has both threaded holes for installing the linear bearing holder 431 and countersunk holes fixed to the second support member. The screw is screwed into the screw hole of the second support member through the countersunk hole of the bearing adapter plate 42, so that the bearing adapter plate 42 is connected to the second support member. The screw passes through the linear bearing holder 431 and is screwed onto the bearing adapter plate 42. Among them, the hole card of the linear bearing holder 431 can be removed, the linear bearing is installed, and then the hole card is installed, and the linear bearing is fixed in the linear bearing holder 431.

[0041] See also Figure 6, the fixing module includes a fixing end 51, an S-shaped force sensor 52 and a force terminal 53. The S-shaped force sensor 52 is arranged at one end of the fixing end 51, and the force terminal 53 connects the S-shaped force sensor 52 and the detection end. The force terminal 53 is provided with a groove, and the shape of the groove is the same as the bottom of the detection end to increase the force-bearing area. The force terminal 53 is formed with an external thread, which can be screwed into the threaded hole of the S-shaped force sensor 52 to ensure that the detection end applies pressure to the middle of the S-shaped force sensor 52, that is, the most sensitive area to force. The fixing end 51 is made of steel with great rigidity. The great rigidity can ensure that the deformation of the fixing end when subjected to force during the calibration process is small enough, and the influence on the calibration is small enough. In one embodiment, the fixing end is a T-shaped steel with great rigidity, which is used to bear the force exerted on the sensor, and has great rigidity and is not easy to deform; a smaller surface is cut out of the fixing end as a working surface to reduce the workload of fine processing; and the S-shaped force sensor 52 is connected to the working surface.

[0042] The base plate of the translation stage, the first support member 21, the second support member and the fixed end all have M6 screw stepped holes, which are used to be installed and fixed on the optical platform. The optical platform is a common product on the market, and its upper surface has a matrix of M6 threaded holes with a spacing of 25mm×25mm. The base plate of the translation stage, the first support member, the second support member and the fixed end are fixed on the optical platform by locking screws at a certain interval.

[0043] The base plate of the translation stage, the first support member, the second support member and the fixed end have two common points, one is to ensure that the key components to be calibrated are of equal height, and the other is to ensure the relative positions of the various parts. The base plate of the translation stage and the fixed end are both provided with four cylindrical countersunk holes, the first support member is provided with two cylindrical countersunk holes, and the second support member is provided with two asymmetric cylindrical countersunk holes, and the countersunk holes are used to install locking screws to fix the corresponding components on the optical platform. The optical platform has a square array of threaded holes, and cylindrical countersunk holes are provided at appropriate positions to ensure the relative positions of the various components.

[0044] After installation, the two-dimensional displacement stage can be moved back to leave enough space for easy installation, and the actuator top can be adjusted to the center of the force conversion frame, and then a large range of displacement adjustment is performed to push the actuator top onto the force conversion frame. During operation, the controller is used to control the extension of the piezoelectric actuator, thereby driving the force conversion frame, the sensor holder, the sensor, the slide conversion frame and the slide to move as a whole. The detection end pushes against the force terminal 53 and squeezes to generate force, causing the strain beam to deform and generate deformation, thereby causing the resistance value of the resistive strain gauge to change.

[0045] The signal line of the resistive strain gauge is connected to the conditioning circuit or strain gauge, and then the voltage value on the piezoelectric actuator is adjusted by the controller to control the elongation. The greater the elongation, the greater the pressure. The elongation of the piezoelectric actuator is adjusted so that the reading of the S-type force sensor follows the expected value F. At this time, the conditioned value U measured by the resistive strain gauge is read out.

[0046] The present invention also provides a calibration method for an aerospace resistive strain type pressure sensor, wherein the calibration method uses the calibration device for the aerospace resistive strain type sensor as described above to perform calibration.

[0047] In one embodiment, the calibration method mainly includes the following steps:

[0048] (1) Start the S-type force sensor and adjust the reading of the S-type force sensor to zero.

[0049] (2) Connect the signal line of the resistive strain gauge to the conditioning circuit or strain gauge for balance adjustment so that the output is 0 at this time.

[0050] (3) Turn the screw rod of the two-dimensional translation stage. Stop turning when the actuator top just contacts the surface of the force conversion frame. Turn the other screw rod so that the actuator top is in the middle of the force conversion frame.

[0051] (4) Continue to turn the screw rod of the two-dimensional translation stage to roughly adjust the position of the sensor until the detection end of the sensor just hits the force-bearing terminal and the pressure read by the S-type force sensor is 0.

[0052] (5) Set the pressure increment. For example, if the pressure increment is F1, the maximum pressure during the calibration process is F M That is, it is expected that during the calibration process, the pressure will be calibrated every time it increases from 0 to F1 until the pressure reaches F M .

[0053] (6) Turn on the power of the piezoelectric actuator controller and start applying pressure to the piezoelectric actuator, and continuously adjust the voltage value so that the pressure reading is exactly the desired pressure value at this time.

[0054] (7) Record the voltage signal value U1 of the resistive strain gauge after conditioning.

[0055] (8) Repeat steps (6) and (7) to obtain data points (F1, U1), (2F1, U2), ... (nF1, U n ), a total of n.

[0056] (9) The relationship curve between the output voltage U and the pressure F of the resistance strain type displacement sensor is fitted according to the n data points obtained to complete the calibration. Specifically, the controller performs fitting according to the received voltage and pressure to obtain the relationship curve between the output voltage U and the pressure F of the resistance strain type displacement sensor.

[0057] (10) Reduce the voltage to zero and then increase the voltage again to perform a repeatability test.

[0058] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A calibration device for aerospace resistance strain type pressure sensor, characterized in that: The calibration device comprises a displacement generating mechanism, a first supporting mechanism, a second supporting mechanism and a fixing module, wherein the first supporting mechanism and the second supporting mechanism are connected in series to jointly support the sensor to be calibrated; the displacement generating mechanism is arranged adjacent to the first supporting mechanism, and the fixing module is arranged adjacent to the second supporting mechanism; The displacement generating mechanism is used to drive the sensor to move toward the fixing module to apply pressure to the sensor; wherein the sensor is arranged horizontally, and the direction of the pressure application is perpendicular to the gravity direction of the sensor.

2. The calibration device for aerospace resistance strain type pressure sensor according to claim 1, characterized in that: The fixed end is used to measure the pressure exerted on the sensor; the sensor is connected to a conditioning circuit or a strain gauge to measure the output voltage of the sensor, and the controller is used to perform fitting based on the received output voltage and pressure to obtain a relationship curve between the output voltage of the sensor and the pressure exerted on it, thereby completing the calibration of the sensor.

3. The calibration device for aerospace resistance strain type pressure sensor according to claim 1, characterized in that: The displacement generating mechanism comprises a displacement platform base plate, a two-dimensional displacement platform, an actuator bracket, a piezoelectric actuator and an actuator top, wherein the two-dimensional displacement platform is fixed on the displacement platform base plate; the actuator bracket is fixed on the two-dimensional displacement platform; one end of the piezoelectric driver is fixedly connected to the driver bracket, and the other end is threadedly connected to the actuator top.

4. The calibration device for aerospace resistance strain type pressure sensor according to claim 3, characterized in that: The actuator top is formed with an internal thread, and one end of the piezoelectric actuator away from the actuator bracket is formed with an external thread. The corresponding internal thread is meshed with the external thread so that a threaded connection is formed between the actuator top and the piezoelectric actuator.

5. The calibration device for aerospace resistance strain type pressure sensor according to claim 3, characterized in that: The actuator bracket is formed with a cylindrical groove, and the cylindrical groove is used to accommodate the piezoelectric actuator. The shell of the piezoelectric actuator is cylindrical.

6. The calibration device for aerospace resistance strain type pressure sensor according to claim 1, characterized in that: The first supporting mechanism includes a first supporting member, a slide rail, a slide, a slide conversion member, a sensor holder and a force conversion frame, the slide rail is fixed on the first supporting member; the slide is slidably arranged on the slide rail; the slide conversion member is fixed on the slide; the sensor holder and the force holder are arranged on the slide conversion member, and both are used to support the sensor.

7. The calibration device for aerospace resistance strain type pressure sensor according to claim 6, characterized in that: The slide rail is provided with a slideway, and the slide is provided with a boss, the shape of the boss corresponds to the shape of the slideway, and the boss is movably arranged in the slideway, so that a sliding connection is formed between the slide and the slide rail.

8. The calibration device for aerospace resistance strain type pressure sensor according to claim 6, characterized in that: The force conversion frame is detachably connected to the sensor holder, and the sensor holder is formed with a receiving groove for receiving part of the sensor; the force conversion frame is provided with two threading grooves for allowing the wiring of the sensor to pass through.

9. The calibration device for aerospace resistance strain type pressure sensor according to claim 8, characterized in that: The sensor includes an end cover, a strain beam, a resistive strain gauge and a detection end. The detection end is columnar, one end of which is connected to the middle of one side of the strain beam, and the end cover is connected to the middle of the other side of the strain beam. A plurality of resistive strain gauges are respectively pasted on the two ends of the strain beam; the end cover, the strain beam and the resistive strain gauge are arranged in the receiving groove; the other end of the detection end passes through the force conversion frame and the second support member in sequence and is then connected to the fixing module; the two ends of the strain beam are respectively connected to the force conversion frame.

10. A calibration method for an aerospace resistive strain gauge pressure sensor, characterized in that: The calibration method uses the calibration device of the aerospace resistive strain sensor described in any one of claims 1 to 9 for calibration.

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