Pinhole array centering adjustment structure and adjustment method for multichannel soft X-ray energy spectrum measurement

Abstract

The invention discloses a pinhole array centering adjustment structure and adjustment method for multichannel soft X-ray energy spectrum measurement, and solves the problems that a traditional pinhole array fixing method is limited in adjustment range and low in adjustment precision. The device comprises a coarse adjustment platform, a rotary table and a pipeline support, the position of a pinhole pipeline is adjusted through the coarse adjustment platform, the rotary table and the pipeline support, up-down, front-back, left-right movement and horizontal rotation of the pinhole pipeline can be achieved, coarse in-position of a pinhole array is achieved, and the adjustment range of the pinhole array is determined; then the pinhole array is accurately adjusted through the pinhole adjusting structure, the pinhole fixing support is provided with a plurality of arc-shaped grooves, the pinhole fixing support can rotate relative to a lug plate in a pinhole pipeline through fastening screws penetrating through the arc-shaped grooves, rotation fine adjustment of the pinhole array can be achieved, and the adjusting range is limited through limiting bolts; and then accurate adjustment of the pinhole array is realized through the adjusting bolt, so that accurate centering of the pinhole array is realized.

Description

Technical Field

[0001] The invention relates to a multi-stage centering adjustment device, and in particular to a pinhole array centering adjustment structure and an adjustment method for multi-channel soft X-ray energy spectrum measurement. Background Art

[0002] The multi-channel time-resolved soft X-ray energy spectrum measurement technology based on flat crystal diffraction has the characteristics of high energy spectrum resolution and large linear dynamic range. It can achieve energy resolution of the eV level by using diffraction crystals, and through further conversion and modulation of the diffraction signals output by each channel and mixed measurement of multiple detectors, the dynamic range of the system is improved by orders of magnitude compared to a single detector.

[0003] In the measurement process of the multi-channel soft X-ray energy spectrum system, the measurement system consists of a source, a first-stage pinhole array, a second-stage hole array (blocking aperture), a third-stage pinhole array (beam-limiting aperture), a diffraction crystal, a radiation-visible light conversion system, a detector, etc. (see Figure 1 In order to measure the multi-channel X-ray energy spectrum, the source, front pinhole, middle pinhole and rear pinhole of each test channel need to be collinear (see Figure 2 ) to ensure the consistency of the optical path of each test channel.

[0004] At present, the commonly used method is to directly fix the structure of the multi-stage pinhole array on the pinhole pipe by screws, and adjust the position of the pinhole pipe to achieve the position of the pinhole array during centering. This method has a simple structure and is easy to operate, but the problems are: adjusting the position of the pinhole array through the pinhole pipe cannot achieve the precise position of the pinhole array, and the pinhole sizes in each level of the X-ray pinhole array are very small. When the installation position of a pinhole array is deviated, it is easy to cause the rear detection system to fail to receive the required diffraction signal, which directly affects the accuracy of the soft X-ray energy spectrum measurement results. Summary of the invention

[0005] The purpose of the present invention is to solve the problems of limited adjustment range and low adjustment accuracy of traditional pinhole array fixing methods, and to provide a pinhole array centering adjustment structure and adjustment method for multi-channel soft X-ray energy spectrum measurement.

[0006] In order to achieve the above object, the present invention adopts the following technical solution:

[0007] A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement includes a coarse adjustment platform; the special features thereof are:

[0008] The coarse adjustment platform is provided with a turntable, and four arc-shaped slots opposite to each other are provided on the turntable around the circumference, and the coarse adjustment platform and the turntable are connected by bolts passing through the arc-shaped slots;

[0009] The turntable is provided with a pipe support with a rectangular cross section, and a top block adjustment structure is respectively connected to the middle of two short sides and the middle of two long sides corresponding to the outer side of the rectangular cross section of the pipe support on the turntable, for adjusting and fixing the position of the pipe support;

[0010] The pipe support is provided with a semicircular groove with an opening facing upward, and semicircular fixing structures with an opening facing downward are connected at both ends close to the semicircular groove, a pinhole pipe is connected between the semicircular groove of the pipe support and the semicircular fixing structure, and the semicircular fixing structure and the semicircular groove of the pipe support form a clamping structure for clamping the pinhole pipe;

[0011] The two ends of the pinhole pipe are respectively connected to the pipe graticule plate, on which scale lines are arranged; a pinhole adjustment structure is connected to the inner wall between the two ends of the pinhole pipe; the pinhole adjustment structure is used to connect and adjust the pinhole array plate with the pinhole array provided thereon to achieve precise centering of the pinhole array, one side of the pinhole adjustment structure is connected to the pinhole graticule plate, on which microholes with a diameter of 1 mm are provided, and the pinhole graticule plate is used for precise centering adjustment.

[0012] Further, each of the top block adjustment structures comprises a top block, a fastening bolt and a fastening nut;

[0013] Among the four top blocks arranged opposite to each other, one pair of top blocks are respectively fixedly connected to the middle parts of the two short sides of the outer side of the rectangular cross-section of the turntable close to the pipe support, and the other pair of top blocks are respectively fixedly connected to the turntable and correspond to the middle parts of the two long sides of the pipe support. Each of the top blocks is connected to a fastening bolt, and each fastening bolt passes through the top block and is close to the outer surface of the pipe support, so as to adjust and fix the position of the pipe support. The fastening nut is connected to the end of the fastening bolt away from the pipe support, so as to lock the position of the fastening bolt.

[0014] Furthermore, the semicircular fixing structure includes 2n fixing bolts, 2n nuts and a semicircular pipe cover with an opening facing downward. The semicircular pipe cover is arranged opposite to the semicircular groove of the pipe support, and the two ends are connected to the pipe support by n fixing bolts and nuts respectively. By removing the fixing bolts, the pinhole pipe is clamped between the semicircular pipe cover and the semicircular groove of the pipe support, and then the semicircular pipe cover and the pipe support are fixedly connected by the fixing bolts, where n≥1.

[0015] Furthermore, the pinhole adjustment structure includes a frame-shaped pinhole fixing bracket, and the side walls around the pinhole fixing bracket are evenly connected with a plurality of adjustment bolts extending from the outside to the inside, one end of the adjustment bolt located inside the pinhole fixing bracket is connected to the pinhole array plate, and the adjustment bolt is located outside the pinhole fixing bracket and connected to the locking nut, the pinhole fixing bracket is connected to the inner wall of the pinhole pipe, and a pinhole graticule plate is arranged on the front side of the pinhole array plate.

[0016] Furthermore, a limit bolt is connected to the side wall of the pinhole fixing bracket near each adjusting bolt, and the limit bolt is used to limit the adjustment range of the pinhole fixing bracket; the limit bolt passes through the side wall of the pinhole fixing bracket, and its inner end abuts the pinhole array plate. The limit bolt is located outside the frame structure and is also sleeved with a small nut for tightening the limit bolt.

[0017] Furthermore, a plurality of ear plates are arranged in the middle of the inner wall of the pinhole pipe, a plurality of arc grooves are provided on the edge of the pinhole fixing bracket, and the ear plates and the pinhole fixing bracket are connected by fastening screws passing through the arc grooves.

[0018] Furthermore, the coarse adjustment platform comprises a lower bracket and an upper bracket of a rectangular parallelepiped structure, and the lower bracket and the upper bracket are connected by bolts;

[0019] The upper end of the upper bracket is connected to four screws, each screw is connected to a support nut, the upper part of the four screws that fits each support nut is connected to a loading platform, each screw is connected to a locking nut that fits the upper part of the loading platform, and the loading platform is connected to the turntable by bolts. The height of the loading platform can be adjusted by rotating the four screws, the support nut is used to support the loading platform, and the position of the loading platform is fixed by the locking nut.

[0020] A pinhole array centering adjustment method for multi-channel soft X-ray energy spectrum measurement uses the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement; the method is special in that it includes the following steps:

[0021] S1. A coarse adjustment laser theodolite is set up on the central measurement channel aiming at the source area according to the test requirements, and the coarse adjustment laser theodolite is turned on to emit a beam of laser for coarse adjustment; at the same time, a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement is installed at a preset test position, wherein the pinhole array is used as a first-level pinhole array;

[0022] S2. According to the relative position of a laser beam in S1 and the center of the pipeline graticule, adjust the coarse adjustment platform, the turntable and the pipeline support until the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipeline graticule;

[0023] S3, remove the pipe graticules at both ends, aim at the source area according to the test requirements, set up another fine-tuning laser theodolite on another measurement channel, turn on the fine-tuning laser theodolite to emit another laser beam for fine-tuning;

[0024] S4, adjusting the pinhole adjustment structure according to the positions of one laser beam in S1 and another laser beam in S3 hitting the pinhole graticule plate, so that both laser beams can pass through the micro-holes on the pinhole graticule plate and enter the pinhole array on the pinhole array plate, completing the first-level pinhole array centering adjustment;

[0025] S5, installing the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at a preset test position, wherein the pinhole array serves as the next-level pinhole array;

[0026] S6. According to the relative position of a laser beam in S1 and the center of the pipeline graticule plate, adjust the coarse adjustment platform, the turntable and the pipeline support until the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipeline graticule plate;

[0027] S7, remove the pipe graticule plates at both ends, adjust the pinhole adjustment structure according to the positions of one laser beam in S1 and another laser beam in S3 hitting the pinhole graticule plate, adjust until both laser beams can pass through the micro-holes on the pinhole graticule plate and enter the pinhole array on the pinhole array plate, and complete the next level of pinhole array centering adjustment;

[0028] S8. Determine whether the number of installed pinhole array centering adjustment structures for multi-channel soft X-ray energy spectrum measurement meets the preset requirements; if so, complete the pinhole array centering adjustment for multi-channel soft X-ray energy spectrum measurement; if not, return to S5 until the centering adjustment of all levels of pinhole arrays is completed.

[0029] Furthermore, the up and down adjustment range of the coarse adjustment platform in S2 and S6 is -60mm to 60mm, the horizontal rotation range of the turntable is -6.5° to 6.5°, the front and rear movement range of the pipe support is -15mm to +15mm, and the left and right movement range of the pipe support is -15mm to +15mm.

[0030] Furthermore, the specific steps of adjusting the pinhole adjustment structure in S4 and S7 are: rotating, vertically and horizontally moving along the central axis of the pinhole adjustment structure, with a rotation range of -2° to +2°, and a vertical and horizontal movement range of -5mm to +5mm.

[0031] The beneficial effects of the technical solution of the present invention are:

[0032] (1) In a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention, the position of the pinhole pipe is adjusted by coarsely adjusting the platform, the turntable and the pipe support, so that the pinhole pipe can be moved up and down, forward and backward, left and right and rotated horizontally, thereby achieving the coarse positioning of the pinhole array and roughly determining the adjustment range of the pinhole array;

[0033] (2) In a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention, the pinhole array is precisely adjusted by the pinhole adjustment structure, a notch is provided on the pinhole fixing plate to realize the rotation of the pinhole array, a limit bolt is used to limit the adjustment range, and then the pinhole array is precisely adjusted by the adjustment bolt, thereby realizing precise centering of the pinhole array;

[0034] (3) The present invention provides a pinhole array centering adjustment method for multi-channel soft X-ray energy spectrum measurement. Through the coordination of coarse adjustment and fine adjustment, accurate centering of each level of the pinhole array is achieved, ensuring that the front pinhole, middle pinhole, and rear pinhole of each test channel are in line with the source, thereby ensuring the accuracy of the multi-channel soft X-ray energy spectrum measurement results. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram of a multi-channel energy spectrum measurement optical path in an embodiment of the present invention;

[0036] Figure 2 is a schematic diagram of the centering of multiple test channels in an embodiment of the present invention;

[0037] Figure 3 This is an appearance diagram of an embodiment of a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to the present invention;

[0038] Figure 4 This is a schematic diagram of the structure of the pipe dividing plates at both ends of an embodiment of a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention;

[0039] Figure 5 It is a diagram showing the relationship between the pinhole adjustment structure and other components in an embodiment of a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention;

[0040] Figure 6 The present invention is a diagram showing the connection relationship between a pipe support, a pinhole pipe and its internal components in an embodiment of a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement.

[0041] In the figure, 1. coarse adjustment platform, 1-1. lower bracket, 1-2. upper bracket, 1-3. screw, 1-4. support nut, 1-5. stage, 1-6. locking nut; 2. turntable; 3. top block adjustment structure, 3-1. top block, 3-2. fastening bolt, 3-3. fastening nut; 4. pipe support; 5. semicircular fixing structure, 5-1. fixing bolt, 5-2. nut, 5-3. semicircular pipe cover; 6. pinhole pipe; 7. pinhole adjustment structure, 7-1. pinhole fixing bracket, 7-2. limit bolt, 7-3. adjusting bolt, 7-4. locking nut, 7-5. fastening screw, 7-6. small nut; 8. pipe graticule plate; 9. pinhole array plate; 10. pinhole graticule plate. DETAILED DESCRIPTION

[0042] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement, such as Figure 3 and Figure 4 As shown, it includes a coarse adjustment platform 1; a turntable 2 is arranged on the coarse adjustment platform 1, and four arc-shaped slots opposite to each other are opened on the turntable 2 around the circumference. The coarse adjustment platform 1 and the turntable 2 are connected by bolts passing through the arc-shaped slots, and the turntable 2 can rotate relative to the coarse adjustment platform 1 through the arc-shaped slots. The central angle of the arc-shaped slot is 13°, with the middle being 0°, and the horizontal rotation range of the turntable 2 is -6.5° to 6.5°.

[0044] The adjustment platform 1 includes a lower bracket 1-1 and an upper bracket 1-2 of a rectangular structure, the lower bracket 1-1 and the upper bracket 1-2 are connected by bolts, the upper end of the upper bracket 1-2 is connected to four screw rods 1-3, each screw rod 1-3 is connected to a support nut 1-4, and a loading platform 1-5 is connected to the upper surface of the four screw rods 1-3 that fits the support nut 1-4, the loading platform 1-5 is connected to the turntable 2 by bolts, and each screw rod 1-3 is connected to a locking nut 1-6 that fits the upper surface of the loading platform 1-5; the height of the loading platform 1-5 can be adjusted by rotating and adjusting the height of the four screw rods 1-3, the support nut 1-4 is used to support the loading platform 1-5, and the position of the loading platform 1-5 is fixed by the locking nut 1-6. The up and down adjustment range of the coarse adjustment platform 1 is -60mm to 60mm.

[0045] A pipe support 4 with a rectangular cross-section is arranged on the turntable 2. A top block adjustment structure 3 is respectively connected to the middle of the two short sides and the middle of the two long sides of the rectangular cross-section of the pipe support 4 on the turntable 2, which is used to adjust and fix the position of the pipe support 4. The pipe support 4 is adjusted forward and backward and left and right through the top block adjustment structure 3. The forward and backward movement range is -15mm to +15mm, and the left and right movement range is -15mm to +15mm. The top block adjustment structure 3 includes a top block 3-1, a fastening bolt 3-2 and a fastening nut 3-3. The fastening bolt 3-2 passes through the top block 3-1 and is close to the surface of the pipe support 4. In order to facilitate the fixation of the pipe support 4, a groove can be opened on the pipe support 4, and the fastening bolt 3-2 extends into the groove to fix the pipe support 4. The fastening nut 3-3 is connected to the fastening bolt 3-2 to lock the position of the fastening bolt 3-2.

[0046] A semicircular groove with an upward opening is provided on the pipe support 4, and a semicircular fixing structure 5 with an downward opening is connected at both ends near the semicircular groove. A pinhole pipe 6 is connected between the semicircular groove of the pipe support 4 and the semicircular fixing structure, and a pinhole adjustment structure 7 is connected to the middle of the pinhole pipe 6; the pinhole adjustment structure 7 is used to connect and adjust a pinhole array plate 9 with a pinhole array provided thereon, so as to achieve precise centering of the pinhole array. The semicircular fixing structure 5 includes 4 fixing bolts 5-1, 2 nuts 5-2, and a semicircular pipe cover 5-3 with an downward opening. The semicircular pipe cover 5-3 is opposite to the semicircular groove of the pipe support 4, and both ends are connected to the pipe support 4 by 2 fixing bolts 5-1 and nuts 5-2, respectively.

[0047] During rough centering, pipeline graticule plates 8 are installed at both ends of the pinhole pipeline 6. Scale lines are provided on the pipeline graticule plates 8. According to the position of the laser on the scale lines, the positions of the rough adjustment platform 1, the turntable 2 and the pipeline support 4 are adjusted until they are aligned with the center of the graticule plates.

[0048] like Figure 5As shown, the pinhole adjustment structure 7 includes a frame-shaped pinhole fixing bracket 7-1, and the side walls around the pinhole fixing bracket 7-1 are evenly connected with multiple adjustment bolts 7-3 extending from the outside to the inside. One end of the adjustment bolt 7-3 located in the pinhole fixing bracket 7-1 is connected to the pinhole array plate 9. The position of the pinhole array plate 9 can be adjusted horizontally and vertically through the adjustment bolts 7-3 on the side walls around. The vertical and horizontal adjustment ranges are both -5mm to +5mm. The adjustment bolt 7-3 is located on the outside of the pinhole adjustment structure 7 and is connected to the locking nut 7-4. The pinhole fixing bracket 7-1 is connected to the middle of the inner wall of the pinhole pipe 6. A limit bolt 7-2 is connected to the side wall of the pinhole fixing bracket 7-1 near each adjusting bolt 7-3. The limit bolt 7-2 passes through the side wall of the pinhole fixing bracket 7-1 and is close to the side wall of the pinhole fixing bracket 7-1. The adjustment range of the pinhole fixing bracket 7-1 is limited by the limit bolt 7-2. The limit bolt 7-2 is located outside the frame structure and is also connected with a small nut 7-6 for tightening the limit bolt 7-2.

[0049] like Figure 6 As shown, a plurality of ear plates are arranged in the pinhole pipe 6, a plurality of arc grooves are provided on the edge of the pinhole fixing bracket 7-1, and fastening screws 7-5 are connected at the arc grooves of the ear plates and the pinhole fixing bracket 7-1. The pinhole fixing bracket 7-1 can rotate relative to the pinhole pipe 6, and the rotation range is -2° to +2°.

[0050] During precision centering, a pinhole grating plate 10 is provided on the front side of the pinhole array plate 9. A microhole with a diameter of 1 mm is opened on the pinhole grating plate 10. During centering, aim the laser at the position of the 1 mm microhole on the pinhole grating plate 10, and adjust the adjusting bolts 7-3 around the pinhole fixing bracket 7-1 to change the position of the pinhole array until each laser beam can pass through the small pinhole array on the pinhole array plate 9.

[0051] In the measurement process of the multi-channel soft X-ray energy spectrum system, the measurement system consists of a source, a first-stage pinhole array, a second-stage hole array (blocking aperture), a third-stage pinhole array (beam-limiting aperture), a diffraction crystal, a radiation-visible light conversion system, a detector, etc. Figure 1 In order to realize the measurement of multi-channel X-ray energy spectrum, the source, front pinhole, middle pinhole and rear pinhole of each test channel need to be collinear, as shown in Figure 2 As shown, ensure the consistency of the optical path of each test channel.

[0052] At the same time, the present invention also provides a pinhole array centering adjustment method for multi-channel soft X-ray energy spectrum measurement, which is characterized by comprising the following steps:

[0053] S1. A coarse adjustment laser theodolite is set up on the central measurement channel aiming at the source area according to the test requirements, and the coarse adjustment laser theodolite is turned on to emit a beam of laser for coarse adjustment; at the same time, a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement is installed at the test position, wherein the pinhole array is used as the first-level pinhole array;

[0054] S2, such as Figure 3 As shown, perform coarse centering adjustment, install pipeline graticules 8 at both ends of the pinhole pipeline 6, adjust the coarse adjustment platform 1, turntable 2 and pipeline support 4 according to the position of the laser on the front and rear pipeline graticules, the up and down adjustment range of the coarse adjustment platform 1 is -60mm~60mm, the horizontal rotation range of the turntable 2 is -6.5°~6.5°, the front and back movement range of the pipeline support 4 is -15mm~+15mm, and the left and right movement range of the pipeline support 4 is -15mm~+15mm. Adjust until the laser is aimed at the center of the scale line;

[0055] S3, such as Figure 4 As shown, perform fine alignment, remove the pipeline graticule plates 8 installed at the front and rear, set the pinhole graticule plate 10 on the front side of the pinhole array plate 9, aim at the source area according to the test requirements, and then set up another fine-tuning laser theodolite on other measurement channels, turn on the fine-tuning laser theodolite to emit a beam of laser for fine-tuning;

[0056] S4, adjust the pinhole adjustment structure 7 according to the position of the laser beam in S1 and the laser beam in S3 hitting the pinhole grating plate 10, the adjustment range of the rotation of the pinhole fixing bracket 7-1 is -2°~+2°, the left and right adjustment range and the up and down adjustment range of the pinhole grating plate 9 are both -5mm~+5mm, and adjust until both laser beams can pass through the microholes on the pinhole differentiation plate 10 and then pass through the pinhole array on the pinhole array plate 9;

[0057] S5, installing the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at a preset test position, wherein the pinhole array serves as the next-level pinhole array;

[0058] S6, adjusting the coarse adjustment platform 1, the turntable 2 and the pipeline support 4 according to the relative position of the laser beam in S1 and the center of the pipeline graticule 8, so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipeline graticule 8;

[0059] S7, remove the pipe graticule plates 8 at both ends, adjust the pinhole adjustment structure 7 according to the positions of one laser beam in S1 and another laser beam in S3 hitting the pinhole graticule plate 10, and adjust until both laser beams can pass through the microholes on the pinhole graticule plate 10 and then pass through the pinhole array on the pinhole array plate 9, and the next level of pinhole array centering adjustment is completed;

[0060] S8. Determine whether the number of installed pinhole array centering adjustment structures for multi-channel soft X-ray energy spectrum measurement reaches three; if so, complete the pinhole array centering adjustment for multi-channel soft X-ray energy spectrum measurement; if not, return to S5 until the centering adjustment of all levels of pinhole arrays is completed.

[0061] After completing the above three-stage centering, place a light source at the source to observe the light integrity of the outer side of each level of pinhole array under darkroom conditions to check the centering of the pinhole array. If the light is uniform and without missing, it means that the front pinhole, middle pinhole, and rear pinhole on the test channel are collinear with the source. The three pinhole array centering adjustment structures for multi-channel soft X-ray energy spectrum measurement after the three-stage centering are placed in the multi-channel soft X-ray energy spectrum system for X-ray energy spectrum measurement.

[0062] The present invention discloses a method for adjusting the centering of a pinhole array for multi-channel soft X-ray energy spectrum measurement. The method adjusts the position of a pinhole pipe 6 by means of a coarse adjustment platform 1, a turntable 2 and a pipe support 4, so that the pinhole pipe 6 can be moved up and down, forward and backward, left and right and rotated horizontally, thereby achieving coarse positioning of the pinhole array and roughly determining the adjustment range of the pinhole array. Subsequently, the pinhole array is precisely adjusted by means of a pinhole adjustment structure 7. A plurality of arc grooves are provided on a pinhole fixing bracket 7-1. The pinhole fixing bracket 7-1 can be rotated relative to an ear plate in the pinhole pipe 6 by means of a fastening screw 7-5 passing through the arc groove. Thus, fine rotation adjustment of the pinhole array can be achieved. A limit bolt 7-2 is used to limit the adjustment range. Then, the pinhole array is precisely adjusted by means of an adjusting bolt 7-3, thereby achieving precise centering of the pinhole array.

[0063] The above description is only a specific embodiment of the present invention, and a comparison of the effects of the specific embodiments and the related comparative examples, but the protection scope of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement, comprising a coarse adjustment platform (1) with adjustable vertical height; characterized in that: The coarse adjustment platform (1) is provided with a turntable (2), and four arc-shaped slots are provided on the turntable (2) around a circumference and are opposite to each other in pairs. The coarse adjustment platform (1) and the turntable (2) are connected by bolts passing through the arc-shaped slots. The turntable (2) is provided with a pipe support (4) with a rectangular cross section, and a top block adjustment structure (3) is respectively connected to the middle of two short sides and the middle of two long sides of the turntable (2) corresponding to the outer side of the rectangular cross section of the pipe support (4), so as to adjust the position of the pipe support (4) and fix it; The pipe support (4) is provided with a semicircular groove opening upward, and semicircular fixing structures (5) opening downward are connected to both ends of the semicircular groove, and a pinhole pipe (6) is connected between the semicircular groove of the pipe support (4) and the semicircular fixing structure (5); The two ends of the pinhole pipe (6) are respectively connected to a pipe graticule plate (8), and the pipe graticule plate (8) is provided with scale lines; a pinhole adjustment structure (7) is connected to the inner wall between the two ends of the pinhole pipe (6); the pinhole adjustment structure (7) is used to connect and adjust a pinhole array plate (9) provided with a pinhole array, so as to achieve accurate centering of the pinhole array; one side of the pinhole adjustment structure (7) is connected to a pinhole graticule plate (10), and a microhole with a diameter of 1 mm is provided on the pinhole graticule plate (10).

2. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 1, characterized in that: Each of the top block adjustment structures (3) comprises a top block (3-1), a fastening bolt (3-2) and a fastening nut (3-3); Among the four top blocks (3-1) arranged opposite to each other, one pair of top blocks (3-1) is respectively fixedly connected to the middle of two short sides of the outer side of the rectangular cross section of the turntable (2) close to the pipe support (4), and the other pair of top blocks (3-1) is respectively fixedly connected to the turntable (2) and corresponds to the middle of two long sides of the pipe support (4). Each of the top blocks (3-1) is connected to a fastening bolt (3-2). Each fastening bolt (3-2) passes through the top block (3-1) and is close to the outer surface of the pipe support (4) for adjusting the position of the pipe support (4) and fixing the pipe support (4). The fastening nut (3-3) is connected to the end of the fastening bolt (3-2) away from the pipe support (4) and is used to lock the position of the fastening bolt (3-2).

3. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 1, characterized in that: The semicircular fixing structure (5) comprises 2n fixing bolts (5-1), 2n nuts (5-2) and a semicircular pipe cover (5-3) with an opening facing downward, wherein the semicircular pipe cover (5-3) is arranged opposite to the semicircular groove of the pipe support (4), and two ends thereof are connected to the pipe support (4) respectively by means of n fixing bolts (5-1) and nuts (5-2), wherein n≥1.

4. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 1, characterized in that: The pinhole adjustment structure (7) comprises a frame-shaped pinhole fixing bracket (7-1), the side walls of the pinhole fixing bracket (7-1) are evenly connected with a plurality of adjustment bolts (7-3) extending from the outside to the inside, one end of the adjustment bolt (7-3) located inside the pinhole fixing bracket (7-1) is connected to a pinhole array plate (9), the adjustment bolt (7-3) is located outside the pinhole fixing bracket (7-1) and is connected to a locking nut (7-4), the pinhole fixing bracket (7-1) is connected to the inner wall of the pinhole pipe (6), and a pinhole dividing plate (10) is arranged on the front side of the pinhole array plate (9).

5. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 4, characterized in that: A limiting bolt (7-2) is connected to the side wall of the pinhole fixing bracket (7-1) near each adjusting bolt (7-3); the limiting bolt (7-2) passes through the side wall of the pinhole fixing bracket (7-1) and its inner end abuts against the pinhole array plate (9); the limiting bolt (7-2) is located at an external position of the pinhole fixing bracket (7-1) and is also sleeved with a small nut (7-6) for tightening the limiting bolt (7-2).

6. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 4, characterized in that: The inner wall of the pinhole pipe (6) is provided with a plurality of ear plates, the edge of the pinhole fixing bracket (7-1) is provided with a plurality of arc-shaped grooves, and the ear plates and the pinhole fixing bracket (7-1) are connected by means of fastening screws (7-5) passing through the arc-shaped grooves.

7. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to claim 1, characterized in that: The coarse adjustment platform (1) comprises a lower bracket (1-1) and an upper bracket (1-2) of a rectangular parallelepiped structure, wherein the lower bracket (1-1) and the upper bracket (1-2) are connected by bolts; the upper end of the upper bracket (1-2) is connected to four screw rods (1-3), each screw rod (1-3) is connected to a support nut (1-4), the upper surfaces of the four screw rods (1-3) that are in contact with the support nuts (1-4) are connected to a loading platform (1-5), each screw rod (1-3) is connected to a locking nut (1-6) that is in contact with the upper surface of the loading platform (1-5), and the loading platform (1-5) and the turntable (2) are connected by bolts that pass through arc-shaped slots.

8. A pinhole array centering adjustment method for multi-channel soft X-ray energy spectrum measurement, using a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement according to any one of claims 1 to 7; characterized in that: The following steps are involved: S1. A coarse adjustment laser theodolite is set up on the central measurement channel aiming at the source area according to the test requirements, and the coarse adjustment laser theodolite is turned on to emit a beam of laser for coarse adjustment; at the same time, a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement is installed at a preset test position, wherein the pinhole array is used as a first-level pinhole array; S2, adjusting the coarse adjustment platform (1), the turntable (2) and the pipeline support (4) according to the relative position of the laser beam in S1 and the center of the pipeline graticule plate (8), so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipeline graticule plate (8); S3, remove the pipe graticules (8) at both ends, aim at the source area according to the test requirements, set up another fine-tuning laser theodolite on another measurement channel, turn on the fine-tuning laser theodolite to emit another laser beam for fine-tuning; S4, adjusting the pinhole adjustment structure (7) according to the positions of one laser beam in S1 and another laser beam in S3 hitting the pinhole grating plate (10), so that both laser beams can pass through the micro-holes on the pinhole grating plate (10) and enter the pinhole array on the pinhole array plate (9), thereby completing the first-level pinhole array centering adjustment; S5, installing the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at a preset test position, wherein the pinhole array serves as the next-level pinhole array; S6, adjusting the coarse adjustment platform (1), the turntable (2) and the pipeline support (4) according to the relative position of the laser beam in S1 and the center of the pipeline graticule plate (8), so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipeline graticule plate (8); S7, remove the pipe graticule plates (8) at both ends, adjust the pinhole adjustment structure (7) according to the positions of one laser beam in S1 and another laser beam in S3 hitting the pinhole graticule plate (10), and adjust until both laser beams can pass through the micro-holes on the pinhole graticule plate (10) and enter the pinhole array on the pinhole array plate (9), and complete the next level of pinhole array centering adjustment; S8. Determine whether the number of installed pinhole array centering adjustment structures for multi-channel soft X-ray energy spectrum measurement meets the preset requirements; if so, complete the pinhole array centering adjustment for multi-channel soft X-ray energy spectrum measurement; if not, return to S5 until the centering adjustment of all levels of pinhole arrays is completed.

9. The method for adjusting the centering of a pinhole array for multi-channel soft X-ray energy spectrum measurement according to claim 8, characterized in that: The vertical adjustment range of the coarse adjustment platform (1) in S2 and S6 is -60 mm to 60 mm, the horizontal rotation range of the turntable (2) is -6.5° to 6.5°, the forward and backward movement range of the pipe support (4) is -15 mm to +15 mm, and the left and right movement range of the pipe support (4) is -15 mm to +15 mm.

10. The pinhole array centering adjustment method for multi-channel soft X-ray spectrum measurement according to claim 8, characterized in that: The specific steps of adjusting the pinhole adjustment structure (7) in S4 and S7 are: Rotate, move vertically and horizontally along the central axis of the pinhole adjustment structure (7), with a rotation range of -2° to +2°, The range of vertical and horizontal movement is -5mm to +5mm.

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