Rotary adsorption carrying platform compatible with 2-8-inch steel ring

Abstract

The invention relates to a rotary adsorption platform deck compatible with a steel ring of 2-8 inches. A rotary DD motor mounted on a DD motor bottom plate drives a product adsorption lower jig plate above the rotary DD motor to rotate through a DD motor upper adapter plate, and a product adsorption upper jig plate is mounted on the product adsorption lower jig plate; the first adsorption cavity and the first adsorption sealing plate jointly form a first adsorption area, the second adsorption cavity and the second adsorption sealing plate jointly form a second adsorption area, and the multiple suction cups jointly form a third adsorption area. The method can be compatible with bare wafers in any shape within 2-8 inches, even various square ceramic pieces, and can also be compatible with 8-inch wafer strip steel rings.

Description

Technical Field

[0001] The present invention relates to the technical field related to semiconductor wafer processing, and in particular to a rotary adsorption carrier compatible with 2-8 inch steel rings. Background Art

[0002] Since silicon and silicon carbide are raw materials for manufacturing semiconductor silicon devices, they can be used in the production of wafers and are the pillars of the contemporary information technology industry. They are also green and environmentally friendly and have very broad prospects in the future, making wafer processing and production a hot industry in the semiconductor industry. With the continuous development and innovation of technology in the semiconductor industry, customers' demands for single machines are also diversified. This patent can be used for adsorption of silicon wafers and silicon carbide to meet micro-processing needs such as special-shaped cutting and drilling.

[0003] After massive searches, it was found that the existing Chinese patent announcement number is CN217444361U, which discloses a quartz rotary adsorption carrier, which includes a grooved quartz carrier, a quartz mounting plate, a carrier base, a rotating motor and a rotating shaft pad from top to bottom. The rotating motor is installed in the middle position of the rotating shaft pad, and the driving end of the top of the rotating motor is connected to the upper carrier base drive. A quartz mounting plate is installed on the carrier base, and a grooved quartz carrier is installed on the inner side of the top of the quartz mounting plate. Several suction cup brackets are evenly installed on the carrier base along the circumferential direction, and a suction cup is installed on the suction cup bracket. The present invention is a carrier for wafer cutting equipment to adsorb and fix the processed products, solves the problem of adsorption flatness, adsorbs the products firmly and evenly, and provides an illumination source at the same time. The backlight cooperates with the image to improve the positioning accuracy, and the rotating axis is equipped with a grating ruler system, which greatly improves the positioning accuracy.

[0004] In summary, the problems existing in the prior art are:

[0005] Wafer adsorption technology is a seemingly insignificant but crucial link. Whether it is etching, deposition or lithography, the wafer must be stably and accurately fixed in the correct position to ensure efficient chip production. With the current diversified proofing process requirements, customers usually want to verify the process requirements of wafers of different specifications on the same equipment, or the process verification of non-standard wafers. However, our usual adsorption carriers are only compatible with wafers of fixed specifications, such as 4, 6, and 8-inch wafers. If they are also compatible with other types of products of non-standard specifications such as 2-inch square, 3-inch square, and 4-inch square, the general carrier will not be able to adsorb.

[0006] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a rotating adsorption carrier that is compatible with 2-8 inch steel rings, making it more valuable for industrial use. Summary of the invention

[0007] In order to solve any of the above technical problems, the purpose of the present invention is to provide a rotating adsorption carrier compatible with 2 to 8 inch steel rings.

[0008] To achieve the above object, the present invention adopts the following technical solution:

[0009] The rotary adsorption stage compatible with 2-8 inch steel rings includes, from bottom to top, a DD motor base plate, a rotary DD motor, a lower jig plate for product adsorption, and an upper jig plate for product adsorption. The rotary DD motor installed on the DD motor base plate drives the upper lower jig plate for product adsorption to rotate through the upper adapter plate of the DD motor. The upper jig plate for product adsorption is installed on the lower jig plate for product adsorption. Several suction cups are evenly distributed along the circumferential direction on the outer side of the upper jig plate for product adsorption. The suction cups are installed on the lower jig plate for product adsorption through a suction cup mounting frame.

[0010] The bottom surface of the upper jig plate for product adsorption is provided with a first adsorption cavity and a second adsorption cavity in sequence from the inside to the outside, and the top surface of the lower jig plate for product adsorption is provided with a first adsorption sealing plate and a second adsorption sealing plate in sequence from the inside to the outside. The first adsorption cavity and the first adsorption sealing plate together constitute the first adsorption area, the second adsorption cavity and the second adsorption sealing plate together constitute the second adsorption area, and several suction cups together constitute the third adsorption area.

[0011] As a further improvement of the present invention, a right sensor is installed on the right side of the DD motor base plate through a right sensor mounting bracket, a left sensor is installed on the left side of the DD motor base plate through a left sensor mounting bracket, and an induction sheet is installed on the adapter plate on the DD motor.

[0012] As a further improvement of the present invention, a control valve is installed on one side of the jig plate on which the product is adsorbed via a control valve mounting frame.

[0013] As a further improvement of the present invention, the control valve is a manual valve or an electric valve.

[0014] As a further improvement of the present invention, a pipe fixing frame is installed on the rotating DD motor on the outer side of the lower jig plate under product adsorption, pipes are installed in the pipe fixing frame, and the pipe joints on one side of the pipes are installed on the pipe fixing frame through the pipe fixing plate.

[0015] As a further improvement of the present invention, a plurality of pipe limiting columns for limiting the positions of the pipes are further arranged in the pipe fixing frame.

[0016] As a further improvement of the present invention, a first mark and a second mark are sequentially arranged on the top surface of the jig plate for product adsorption from the inside to the outside.

[0017] By means of the above scheme, the present invention has at least the following advantages:

[0018] The present invention is compatible with bare wafers (including fragments) of any shape within 2 to 8 inches, and even various square ceramics, and is also compatible with 8-inch wafers with steel rings.

[0019] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 It is a structural schematic diagram of a rotating adsorption carrier compatible with 2-8 inch steel rings of the present invention;

[0022] Figure 2 yes Figure 1 Schematic diagram of the structure of the product adsorbed onto the bottom surface of the fixture plate;

[0023] Figure 3 yes Figure 1 Schematic diagram of the structure of the top surface of the fixture plate under product adsorption.

[0024] The meanings of the various reference numerals in the figures are as follows.

[0025] DD motor base plate 1, rotating DD motor 2, DD motor upper adapter plate 3, product adsorption lower fixture plate 4, product adsorption upper fixture plate 5, right sensor mounting frame 6, right sensor 7, induction plate 8, left sensor mounting frame 9, left sensor 10, control valve mounting frame 11, control valve 12, suction cup 13, suction cup mounting frame 14, drainage pipe fixing frame 15, drainage pipe 16, drainage pipe limiting column 17, drainage pipe fixing plate 18, drainage pipe joint 19, first mark 20, second mark 21, first adsorption chamber 22, second adsorption chamber 23, first adsorption sealing plate 24, second adsorption sealing plate 25. DETAILED DESCRIPTION

[0026] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The components of the embodiment of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiment of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0028] like Figure 1 to Figure 3 As shown, a rotary adsorption carrier compatible with 2-8 inch steel rings includes, from bottom to top, a DD motor bottom plate 1, a rotary DD motor 2, a product adsorption lower jig plate 4 and a product adsorption upper jig plate 5. The rotary DD motor 2 mounted on the DD motor bottom plate 1 drives the upper product adsorption lower jig plate 4 to rotate through the DD motor upper adapter plate 3. The product adsorption upper jig plate 5 is mounted on the product adsorption lower jig plate 4. Several suction cups 13 are evenly distributed along the circumferential direction on the outer side of the product adsorption upper jig plate 5. The suction cups 13 are mounted on the product adsorption lower jig plate 4 through a suction cup mounting frame 14. The vacuum suction cup has an external thread and a sealing ring, which is directly fixed on the suction cup mounting frame to ensure that there is no air leakage.

[0029] The bottom surface of the upper jig plate 5 for product adsorption is provided with the first adsorption cavity 22 and the second adsorption cavity 23 in sequence from the inside to the outside. The top surface of the lower jig plate 4 for product adsorption is provided with the first adsorption sealing plate 24 and the second adsorption sealing plate 25 in sequence from the inside to the outside. The first adsorption cavity 22 and the first adsorption sealing plate 24 together constitute the first adsorption area, the second adsorption cavity 23 and the second adsorption sealing plate 25 together constitute the second adsorption area, and a plurality of suction cups 13 together constitute the third adsorption area. The top surface of the upper jig plate 5 for product adsorption is provided with the first mark 20 and the second mark 21 in sequence from the inside to the outside. Among them, the inner area of ​​the first mark 20 is the first adsorption area, the inner area of ​​the second mark 21 is the second adsorption area, and the outer area of ​​the second mark 21 is the third adsorption area.

[0030] A right sensor 7 is installed on the right side of the DD motor base plate 1 through a right sensor mounting bracket 6, a left sensor 10 is installed on the left side of the DD motor base plate 1 through a left sensor mounting bracket 9, and an induction sheet 8 is installed on the adapter plate 3 of the DD motor.

[0031] A control valve 12 is installed on one side of the jig plate 5 on which the product is adsorbed via a control valve mounting frame 11 . The control valve 12 is a manual valve or an electric valve.

[0032] A pipe fixing frame 15 is installed on the rotating DD motor 2 on the outer side of the jig plate 4 under the product adsorption, and a pipe 16 is installed in the pipe fixing frame 15. A pipe joint 19 on one side of the pipe 16 is installed on the pipe fixing frame 15 through a pipe fixing plate 18. A plurality of pipe limiting columns 17 for limiting the position of the pipe 16 are also provided in the pipe fixing frame 15. The pipe of the air pipe is inserted into the pipe fixing plate through the pipe joint, and is limited to move in a fixed area by the pipe limiting column during movement, without interference.

[0033] This patent adopts the micro-porous ultra-dense aluminum plate punching method, and is connected to 2 external vacuum generators. It is compatible with the adsorption of products of any shape within 2-8 inches, and the edge is equipped with a steel ring adsorption suction cup, and is also compatible with 8-inch steel rings.

[0034] The working principle of the present invention is as follows: when the equipment is ventilated, the vacuum generator works to generate a negative pressure gas source, and the air in the area is sucked away through the air pipe to generate negative pressure, so that the product is firmly adsorbed on the fixture. This rotating stage has three independent adsorption areas, which are realized by connecting two external vacuum generators. The first adsorption area is the adsorption area for products of any shape within 6 inches, the second adsorption area is the adsorption area for wafers between 6 inches and 8 inches, and the third adsorption area is the steel ring adsorption area. When the first vacuum generator is turned on, the first adsorption area is adsorbed, and all sizes of wafers within 6 inches can be adsorbed at this time, and the measured negative pressure value is below -50kpa (2, 3 inches and irregular ceramic tests); the second vacuum generator is turned on, the control valve is closed, and the second adsorption area is adsorbed, that is, 8-inch wafers are adsorbed; when the control valve is turned on, the third adsorption area is adsorbed, and the adsorption of 8-inch standard steel rings can be performed. Therefore, any shape of bare chip wafers (including fragments) within 2 to 8 inches can be adsorbed, and the switching of the control valve can be compatible with the adsorption of 8-inch standard steel rings. Because it is an ultra-dense perforated adsorption fixture, irregular products can also be firmly adsorbed.

[0035] Compared with the traditional fixed-size wafer adsorption, this stage can be compatible with bare wafers of any shape within 2 to 8 inches (including fragments), and even various square ceramics, and can also be compatible with 8-inch wafers with steel rings. And only two vacuum generators are needed for control, which reduces the bends caused by the rotation of the air pipe, reduces costs, and reduces the difficulty of programming software logic.

[0036] The present invention is compatible with bare wafers (including fragments) of any shape within 2 to 8 inches, and even various square ceramics, and is also compatible with 8-inch wafers with steel rings.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A rotating adsorption platform compatible with 2-8 inch steel rings, comprising, from bottom to top, a DD motor base plate (1), a rotating DD motor (2), a product adsorption lower jig plate (4) and a product adsorption upper jig plate (5), wherein the rotating DD motor (2) mounted on the DD motor base plate (1) drives the upper product adsorption lower jig plate (4) to rotate via the DD motor upper adapter plate (3), and the product adsorption upper jig plate (5) is mounted on the product adsorption lower jig plate (4), and a plurality of suction cups (13) are evenly distributed along the circumferential direction on the outer side of the product adsorption upper jig plate (5), and the suction cups (13) are mounted on the product adsorption lower jig plate (4) via a suction cup mounting frame (14); characterized in that: A first adsorption cavity (22) and a second adsorption cavity (23) are sequentially arranged on the bottom surface of the upper jig plate (5) for product adsorption from the inside to the outside, and a first adsorption sealing plate (24) and a second adsorption sealing plate (25) are sequentially arranged on the top surface of the lower jig plate (4) for product adsorption from the inside to the outside, the first adsorption cavity (22) and the first adsorption sealing plate (24) together constitute a first adsorption area, the second adsorption cavity (23) and the second adsorption sealing plate (25) together constitute a second adsorption area, and a plurality of the suction cups (13) together constitute a third adsorption area.

2. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 1, characterized in that: A right sensor (7) is installed on the right side of the DD motor base plate (1) via a right sensor mounting frame (6), a left sensor (10) is installed on the left side of the DD motor base plate (1) via a left sensor mounting frame (9), and an induction sheet (8) is installed on the adapter plate (3) on the DD motor.

3. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 1, characterized in that: A control valve (12) is installed on one side of the jig plate (5) on which the product is adsorbed via a control valve mounting frame (11).

4. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 3, characterized in that: The control valve (12) is a manual valve or an electric valve.

5. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 1, characterized in that: A pipe fixing frame (15) is installed on the rotating DD motor (2) below the outer side of the product adsorption lower jig plate (4), a pipe (16) is installed in the pipe fixing frame (15), and a pipe joint (19) on one side of the pipe (16) is installed on the pipe fixing frame (15) through a pipe fixing plate (18).

6. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 5, characterized in that: A plurality of pipe limiting columns (17) for limiting the position of the pipes (16) are also arranged in the pipe fixing frame (15).

7. The rotating adsorption platform compatible with 2-8 inch steel rings as claimed in claim 1, characterized in that: A first mark (20) and a second mark (21) are arranged in sequence from the inside to the outside on the top surface of the jig plate (5) on which the product is adsorbed.

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