Flexible substrate coating equipment and method

Abstract

The invention discloses flexible substrate coating equipment and method, and belongs to the technical field of coating equipment, the equipment comprises a vacuum cavity, a transmission device and a sputtering device, the transmission device and the sputtering device are both arranged in the vacuum cavity, and the transmission device is used for transmitting a substrate body; the sputtering device comprises a first rectangular sputtering module, a multi-target sputtering module and a second rectangular sputtering module which are sequentially arranged on the transmission path of the base material body at intervals and are started according to setting to conduct sputtering coating on the passing base material body. The method comprises the following steps: unwinding: driving a base material body to move along a transmission path through a transmission device; a first rectangular sputtering module, a multi-target sputtering module and a second rectangular sputtering module are started according to setting to conduct film coating on the passing base material body; and cooling: laminating the base material body and arranging a liquid cooling device to cool the base material body. According to the invention, more complex coating requirements can be met.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to a flexible substrate coating equipment and method. Background Art

[0002] The coating of flexible materials usually adopts the vacuum winding coating technology to coat one or more layers of thin films on the surface of the flexible substrate. According to the working principle, it can be divided into evaporation winding coating and magnetron sputtering winding coating. The single-sided coating by a single method such as evaporation coating or sputtering coating has a slow coating rate and low production efficiency, which cannot meet the needs of coating more complex thin films. In addition, the temperature is high during the magnetron sputtering coating process, and the heat generated can easily cause carbonization and wrinkles of the flexible film, thereby affecting the product yield.

[0003] At present, the cooling efficiency of the substrate is enhanced by ventilating between the substrate and the coating drum. However, the substrate is not wound at the open part above the coating drum, and the gas introduced is easy to escape from here into the vacuum environment, affecting the vacuum required for coating. Therefore, most of the prior art uses liquid cooling to cool the substrate. For example, a Chinese patent document with announcement number CN213924996U discloses a magnetron sputtering winding coating device, including a coating chamber, a coating roller and a plurality of magnetron sputtering targets located below the coating roller, and a cleaning and heat dissipation mechanism is also provided in the coating chamber. The cleaning and heat dissipation mechanism includes a brush roller, a first cleaning roller and a second cleaning roller, and the first cleaning roller and the second cleaning roller are respectively provided with liquid cooling channels, and there is flowing coolant in the liquid cooling channels.

[0004] Although the coating equipment of this patent uses liquid cooling channels and coolant to cool the substrate, thus overcoming the defects of ventilation cooling, the coating equipment uses coating rollers to coat the substrate, and the coating method is single and cannot meet more complex coating requirements. Summary of the invention

[0005] The purpose of the present invention is to provide a flexible substrate coating device and method to solve the problem that the coating device in the prior art uses a coating roller to coat the substrate, the coating method is single and cannot meet more complex coating requirements.

[0006] In order to achieve the above-mentioned purpose, the present invention provides a flexible substrate coating equipment, including a vacuum chamber, a transmission device and a sputtering device, wherein the transmission device and the sputtering device are both arranged in the vacuum chamber, and the transmission device is used to transmit the substrate body; the sputtering device includes a first rectangular sputtering module, a multi-target sputtering module and a second rectangular sputtering module, and the three are arranged in sequence and spaced apart on the transmission path of the substrate body and the three are turned on according to the settings to sputter and coat the passing substrate body.

[0007] The substrate body can be moved along the transmission direction under the drive of the transmission device. During the movement, the substrate body can pass through the first rectangular sputtering module, the multi-target sputtering module and the second rectangular sputtering module in sequence. The first rectangular sputtering module and the second rectangular sputtering module can deposit materials faster, more uniformly and over a larger area to meet the requirements of efficient production in industry. While meeting the requirements of deposition material rate and uniformity, the multi-target sputtering module can change the sputtering power, and can more flexibly regulate the components of functional materials, deposit the optimal material according to production requirements, so as to meet the deposition requirements of composite films / single-layer films of different thicknesses and different numbers of layers. This collaborative sputtering module system ensures that the material deposition process is both uniform and continuous while the substrate is moving through precise control and synchronization. Each module is responsible for a specific area, and their synergy reduces pauses and non-uniformity during the deposition process, thereby improving the overall production efficiency. In addition, this modular design also allows each sputtering source to be independently optimized to adapt to different materials and deposition requirements, further ensuring the high quality of the deposited layer. This multi-sputtering module collaborative working technology not only shortens the production cycle, but also reduces energy consumption and material waste, achieving a dual improvement in production efficiency and product quality.

[0008] Furthermore, the first rectangular sputtering module and the second rectangular sputtering module are symmetrically arranged with respect to the multi-target sputtering module. The symmetrical arrangement can further ensure the uniformity and continuity of the coating on the substrate body, and facilitates the grasping of the movement data of the substrate body.

[0009] Furthermore, the multi-target sputtering module is a multi-target confocal sputtering structure, and the multi-target sputtering module includes a first magnetron cathode and a second magnetron cathode, the first magnetron cathode includes an adjustment device and a target head, the adjustment device is connected to the target head and is used to adjust the angle of the target head; the structure of the second magnetron cathode is the same as that of the first magnetron cathode.

[0010] The angle of the target head can be adjusted by the adjustment device to achieve multi-angle sputtering coating and meet the coating process with different requirements. By controlling the working mode of the first magnetron cathode and the second magnetron cathode, the two films can be grown alternately to achieve different thickness combinations of the two materials and composite films with different numbers of layers.

[0011] Furthermore, the adjustment device includes a first connecting seat and a second connecting seat, and the two are rotatably connected via a rotating shaft, and the target head is installed on the second connecting seat; the first connecting seat is movably provided with a first connecting shaft, and the second connecting seat is movably provided with a second connecting shaft, and a driving member is connected between the first connecting shaft and the second connecting shaft, and the driving member drives the second connecting seat to deflect around the rotating shaft.

[0012] The action of the driving member can cause the second connection seat to deflect around the rotation axis, and at this time, both the first connection axis and the second connection axis rotate to avoid interfering with the action of the driving member. The target head is installed on the second connection seat, and the target head deflects synchronously with the second connection seat, thereby adjusting the angle of the target head relative to the substrate body.

[0013] Furthermore, the first rectangular sputtering module includes a cathode module, an adjustment device and a mounting flange, the adjustment device is connected to the mounting flange, the cathode module is connected to the adjustment device, and the adjustment device is used to adjust and fix the swing angle of the cathode module; a magnetic circuit module is provided on the side of the cathode module facing the substrate body; the structure of the second rectangular sputtering module is the same as that of the first rectangular sputtering module.

[0014] Furthermore, a plurality of liquid cooling devices are arranged in the vacuum chamber, and each of the liquid cooling devices is arranged corresponding to the first rectangular sputtering module, the multi-target sputtering module and the second rectangular sputtering module.

[0015] The liquid cooling device is set corresponding to the sputtering device, which can quickly cool down the substrate body after coating and ensure the temperature stability of the substrate body coating environment. Moreover, compared with gas cooling, the liquid cooling device will not affect the vacuum environment, and can maintain a good coating environment and increase the coating yield.

[0016] Furthermore, the liquid cooling device includes a cooling box, wherein the side of the cooling box close to the sputtering device is the cooling side, and the side away from the sputtering device is the heat dissipation side; a plurality of cooling plates are arranged on the outside of the cooling box, and the liquid cooling plates are connected to a power device, and the power device drives the cooling plates to move around the cooling box and pass through the cooling side and the heat dissipation side, and the substrate body bypasses the outside of the cooling box and contacts the cooling plates.

[0017] The cooling plate can move around the outside of the cooling box under the drive of the power device, and the substrate body itself can move under the drive of the transmission device. The cooling plate fits and moves together with the substrate body, and can cool the substrate body during the movement to maintain the stability of the overall temperature of the flexible substrate. In addition, multiple cooling plates that slide in a directional manner help the directional movement of the flexible substrate body, improve the movement stability of the substrate body, reduce the resistance between the flexible substrate body and the liquid cooling device, avoid damage to the surface of the substrate body, and ensure the coating quality of the flexible substrate body.

[0018] Furthermore, a liquid cooling tube and a heat sink are provided in the cooling box, the liquid cooling tube and the heat sink are arranged in close contact with each other, and the liquid cooling tube and the heat sink are both located on the heat dissipation side; the liquid cooling tube is connected to the liquid cooling system outside the vacuum cavity through a connecting tube.

[0019] The liquid cooling tube and the heat sink are fitted together, and the liquid cooling tube provides a stable cold source for the heat sink through an external liquid cooling system. When the cooling plate moves from the cooling side to the heat sink, the liquid cooling tube cooperates with the heat sink to cool the cooling plate. After cooling, the cooling plate continues to move to the cooling side to cool the coated substrate body.

[0020] Furthermore, the transmission device includes a unwinding roller, a winding roller and a plurality of guide rollers, wherein the plurality of guide rollers are arranged between the unwinding roller and the winding roller, and the substrate body is unwound by the unwinding roller, and is wound up by the winding roller after being redirected by the plurality of guide rollers and the liquid cooling device.

[0021] Both the unwinding roller and the winding roller can provide power for the substrate body to move, the guide roller can guide and redirect the substrate body, and the liquid cooling device can also guide the substrate body due to the movement of the outer cooling plate. The guide roller is arranged between the unwinding roller and the liquid cooling device, between the liquid cooling device and the liquid cooling device, and between the liquid cooling device and the winding roller.

[0022] The present invention also provides a flexible substrate coating method, comprising the following steps:

[0023] Unwinding, driving the substrate body to move along the transmission path through the transmission device;

[0024] Coating, starting the first rectangular sputtering module, the multi-target sputtering module and the second rectangular sputtering module according to settings to coat the substrate body passing through;

[0025] Cooling: a liquid cooling device is arranged on the substrate body to cool the substrate body.

[0026] Compared with the existing known technology, the technical solution provided by the present invention has the following beneficial effects:

[0027] A flexible substrate coating device of the present invention, the substrate body can be moved along the transmission direction under the drive of the transmission device, and the substrate body can pass through the first rectangular sputtering module, the multi-target sputtering module and the second rectangular sputtering module in sequence during the movement. The first rectangular sputtering module and the second rectangular sputtering module can deposit materials faster, more uniformly and over a larger area, meeting the requirements of efficient production in industry. The multi-target sputtering module can change the sputtering power while meeting the requirements of deposition material rate and uniformity, and can more flexibly regulate the components of functional materials, deposit the optimal material according to production requirements, so as to meet the deposition requirements of composite films / single-layer films of different thicknesses and different numbers of layers. This collaborative sputtering module system ensures that the material deposition process is both uniform and continuous while the substrate moves through precise control and synchronization. Each module is responsible for a specific area, and their synergy reduces pauses and unevenness during the deposition process, thereby improving the overall production efficiency. In addition, this modular design also allows each sputtering source to be independently optimized to adapt to different materials and deposition requirements, further ensuring the high quality of the deposited layer. This multi-sputtering module collaborative working technology not only shortens the production cycle, but also reduces energy consumption and material waste, achieving a dual improvement in production efficiency and product quality.

[0028] In a flexible substrate coating method of the present invention, a transmission device drives a flexible substrate body to move, and the substrate body passes through a corresponding sputtering device, and the sputtering device is turned on according to settings to coat the substrate body, so that films of different thicknesses and different numbers of layers can be obtained. A liquid cooling device is attached to the substrate body so that the substrate body can be cooled and a stable coating temperature environment can be maintained. The liquid cooling device can also absorb the heat of the sputtering device to improve the coating yield.

[0029] It will be apparent that elements or features described above in the context of a single embodiment may be used alone or in combination in other embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In the drawings, the sizes and proportions do not represent the sizes and proportions of actual products. The drawings are merely illustrative, and some non-essential elements or features are omitted for clarity.

[0031] Figure 1 Schematic diagram of the internal structure (including the substrate body) of the coating device in the embodiment of the present invention;

[0032] Figure 2 is a schematic diagram of the internal three-dimensional structure of the coating device in an embodiment of the present invention;

[0033] Figure 3 is a schematic structural diagram of a multi-target sputtering module in an embodiment of the present invention;

[0034] Figure 4is a schematic structural diagram of a first (second) rectangular sputtering module in an embodiment of the present invention;

[0035] Figure 5 is a schematic structural diagram of a liquid cooling device in an embodiment of the present invention;

[0036] Figure 6 is a schematic side view of the structure of a liquid cooling device in an embodiment of the present invention;

[0037] Figure 7 yes Figure 6 Cross-sectional view at AA in the middle.

[0038] Description of Reference Numerals

[0039] 100, vacuum chamber; 210, unwinding roller; 220, winding roller; 230, guide roller; 310, first rectangular sputtering module; 311, cathode module; 312, magnetic circuit module; 313, adjustment device; 314, mounting flange; 320, multi-target sputtering module; 321, target head; 3210, shielding cover; 3211, baffle; 3212, rotating rod; 322, first connecting seat; 323, second connecting seat; 324, rotating shaft; 325, driving member; 326, first connecting shaft; 327, second connecting shaft; 330, second rectangular sputtering module; 400, substrate body; 500, liquid cooling device; 510, cooling box; 520, cooling plate; 530, power device; 541, water inlet; 542, water outlet. DETAILED DESCRIPTION

[0040] The present invention will be described in detail below with reference to the accompanying drawings. What is described here is only a preferred embodiment of the present invention, and those skilled in the art can think of other ways to implement the present invention based on the preferred embodiment, and other ways also fall within the scope of the present invention.

[0041] Example

[0042] Reference Figure 1-Figure 7The present embodiment provides a flexible substrate coating device, including a vacuum chamber 100, a transmission device and a sputtering device, both of which are arranged in the vacuum chamber 100, and the transmission device is used to transmit the substrate body 400; the sputtering device includes a first rectangular sputtering module 310, a multi-target sputtering module 320 and a second rectangular sputtering module 330, which are arranged in sequence on the transmission path of the substrate body 400 and are turned on according to settings to sputter and coat the substrate body 400 passing through. The substrate body 400 can move along the transmission direction under the drive of the transmission device, and the substrate body 400 can pass through the first rectangular sputtering module 310, the multi-target sputtering module 320 and the second rectangular sputtering module 330 in sequence during the movement, and the first rectangular sputtering module 310 and the second rectangular sputtering module 330 can deposit materials faster, more uniformly and over a larger area, meeting the requirements of efficient production in industry. The multi-target sputtering module 320 can change the sputtering power while meeting the requirements of deposition material rate and uniformity, and can more flexibly regulate the composition of functional materials and deposit the optimal material according to production requirements to meet the deposition requirements of composite films / single-layer films of different thicknesses and numbers of layers.

[0043] It can be understood that this system of sputtering modules working together ensures that the material deposition process is both uniform and continuous while the substrate is moving through precise control and synchronization. Each module is responsible for a specific area, and their synergy reduces pauses and unevenness in the deposition process, thereby improving overall production efficiency. In addition, this modular design also allows each sputtering source to be independently optimized to adapt to different materials and deposition requirements, further ensuring the high quality of the deposited layer. This multi-sputtering module collaborative working technology not only shortens the production cycle, but also reduces energy consumption and material waste, achieving a dual improvement in production efficiency and product quality.

[0044] In order to prepare a film layer with a specific arrangement, the first rectangular sputtering module 310: a single material film layer; the multi-target sputtering module 320: a composite film of two materials, alternating the growth to adjust the different thickness combinations and different number of layers of the two materials; the second rectangular sputtering module 330: a single material film layer. Specifically, taking the deposition of the composite film Ru / CoxPt1-x / diamond-like carbon (DLC) on a flexible substrate as an example: the film layer Ru is deposited using the first rectangular sputtering module 310, the magnetic alloy CoxPt1-x is deposited using the multi-target sputtering module 320, and the diamond-like carbon is deposited using the second rectangular sputtering module 330.

[0045] Furthermore, in some embodiments of the present application, Figure 1As shown, the first rectangular sputtering module 310 and the second rectangular sputtering module 330 are symmetrically arranged about the multi-target sputtering module 320, which can further ensure the uniformity and continuity of the coating on the substrate body 400, and facilitate the grasp of the movement data of the substrate body 400 such as the moving distance and the moving speed.

[0046] Specifically, in some embodiments of the present application, the multi-target sputtering module 320 is a multi-target confocal sputtering structure, and the multi-target sputtering module 320 includes a first magnetron cathode and a second magnetron cathode, and the first magnetron cathode includes an adjustment device and a target head 321, and the adjustment device is connected to the target head 321 and is used to adjust the angle of the target head 321; the structure of the second magnetron cathode is the same as that of the first magnetron cathode. The angle of the target head 321 can be adjusted by the adjustment device to achieve multi-angle sputtering coating to meet the coating process with different requirements. By controlling the working mode of the first magnetron cathode and the second magnetron cathode, the two films can be alternately grown, and different thickness combinations of the two materials and composite films with different numbers of layers can be achieved.

[0047] Specifically, Figure 3 As shown, the adjustment device includes a first connection seat 322 and a second connection seat 323, which are rotatably connected via a rotating shaft 324, and a target head 321 is mounted on the second connection seat 323; the first connection seat 322 is movably provided with a first connection shaft 326, and the second connection seat 323 is movably provided with a second connection shaft 327, and a driving member 325 is connected between the first connection shaft 326 and the second connection shaft 327, and the driving member 325 drives the second connection seat 323 to deflect around the rotating shaft 324. The action of the driving member 325 can cause the second connection seat 323 to deflect around the rotating shaft 324, and at this time, the first connection shaft 326 and the second connection shaft 327 both rotate to avoid interfering with the action of the driving member 325. The target head 321 is mounted on the second connection seat 323, and the target head 321 deflects synchronously with the second connection seat 323, so that the angle of the target head 321 relative to the substrate body 400 can be adjusted. It should be noted that the driving member 325 is a component that can adjust the distance between the first connecting shaft 326 and the second connecting shaft 327. For example, the driving member 325 can be a hydraulic rod, an electric push rod, etc., or a manually adjustable double-headed threaded bolt, and the double heads of the bolt are respectively threadedly connected to the first connecting shaft 326 and the second connecting shaft 327. Turning the bolt can increase or decrease the distance between the first connecting shaft 326 and the second connecting shaft 327, thereby controlling the deflection direction and angle of the target head 321. After the bolt adjusts the deflection angle of the target head 321, the target head 321 is fixed by a fastener.

[0048] It should be noted that a shielding cover 3210 is provided at the sputtering end of the target head 321, and a baffle 3211 is provided at one end of the shielding cover 3210 away from the target head 321, and the baffle 3211 is connected to a rotating rod 3212, and the rotating rod 3212 is located on one side of the shielding cover 3210. The rotating rod 3212 can drive the baffle 3211 to rotate around the axial direction of the rotating rod 3212, so that the end of the shielding cover 3210 is fully or partially opened. The rotating rod 3212 is connected to the outer sides of the first connecting seat 322 and the second connecting seat 323, mainly for installation. The rotating rod 3212 has a rotating joint, which can rotate when the second connecting seat 323 deflects, so as to avoid the rotating rod 3212 interfering with the deflection of the second connecting seat 323.

[0049] In some embodiments of the present application, Figure 4 As shown, the first rectangular sputtering module 310 includes a cathode module 311, an adjustment device 313 and a mounting flange 314, the adjustment device 313 is connected to the mounting flange 314, the cathode module 311 is connected to the adjustment device 313, and the adjustment device 313 is used to adjust and fix the deflection angle of the cathode module 311; a magnetic circuit module 312 is provided on the side of the cathode module 311 facing the substrate body 400; the structure of the second rectangular sputtering module 330 is the same as that of the first rectangular sputtering module 310. It should be noted that a scale is provided on the adjustment device 313 for accurately marking the deflection angle of the cathode module 311. The adjustment device 313 is also provided with a fastening bolt, which fixes the cathode module 311 after the cathode module 311 deflects to a specified angle.

[0050] In order to ensure the stability of the coating, the substrate body 400 needs to be cooled in time to improve the coating yield. Figure 1 and Figure 2 As shown, a plurality of liquid cooling devices 500 are arranged in the vacuum chamber 100, and each liquid cooling device 500 is respectively arranged corresponding to the first rectangular sputtering module 310, the multi-target sputtering module 320 and the second rectangular sputtering module 330. The liquid cooling device 500 is arranged corresponding to each sputtering device, which can quickly cool down the substrate body 400 after coating, and ensure the temperature stability of the coating environment of the substrate body 400. Moreover, compared with gas cooling, the liquid cooling device 500 will not affect the vacuum environment, can maintain a good coating environment, and increase the coating yield.

[0051] Specifically, if Figure 5 , Figure 6 and Figure 7As shown, the liquid cooling device 500 includes a cooling box 510, and the side of the cooling box 510 close to the sputtering device is the cooling side, and the side away from the sputtering device is the heat dissipation side. A plurality of cooling plates 520 are arranged on the outside of the cooling box 510, and the cooling plates 520 are connected to the power device 530. The power device 530 drives the cooling plates 520 to move around the cooling box 510 and pass through the cooling side and the heat dissipation side, and the substrate body 400 bypasses the outside of the cooling box 510 and contacts with the cooling plates 520. The cooling plates 520 can move around the outside of the cooling box 510 under the drive of the power device 530, and the substrate body 400 itself can rotate around the outside of the cooling box 510 under the drive of the transmission device. The cooling plates 520 move together with the substrate body 400, and the substrate body 400 can be cooled during the movement to maintain the stability of the overall temperature of the flexible substrate body 400. Moreover, the multiple cooling plates 520 that slide in a directional manner assist the directional movement of the flexible substrate body 400, improve the movement stability of the substrate body 400, reduce the resistance between the flexible substrate body 400 and the liquid cooling device 500, avoid damaging the surface of the substrate body 400, and ensure the coating quality of the flexible substrate body 400. It can be understood that the power device 530 uses a motor, and the motor drives the multiple cooling plates 520 to rotate around the outer side of the cooling box 510 through a wheel group driving a belt or a chain.

[0052] It should be noted that a liquid cooling pipe and a heat sink are provided in the cooling box 510, and the liquid cooling pipe and the heat sink are arranged in a close relationship, and both the liquid cooling pipe and the heat sink are located on the heat sink side; the liquid cooling pipe is connected to the liquid cooling system outside the vacuum chamber 100 through a connecting pipe. The liquid cooling pipe and the heat sink are arranged in a close relationship, and the liquid cooling pipe provides a stable cold source for the heat sink through an external liquid cooling system. When the cooling plate 520 moves from the cooling side to the heat sink side, the liquid cooling pipe cooperates with the heat sink to cool the cooling plate 520, and the cooled cooling plate 520 continues to move to the cooling side to cool the coated substrate body 400. It should be noted that the connecting pipe is connected to the cooling box 510 through the water inlet 541 and the water outlet 542. Among them, cold water enters the cooling box 510 from the water inlet 541, flows out of the cooling box 510 from the water outlet 542, and the cold water completes the circulation from the heat sink side to the cooling side in the cooling box 510.

[0053] In some embodiments of the present application, Figure 1As shown, the transmission device includes an unwinding roller 210, a winding roller 220 and a plurality of guide rollers 230, and the plurality of guide rollers 230 are arranged between the unwinding roller 210 and the winding roller 220. The substrate body 400 is unwound by the unwinding roller 210, and is wound up by the winding roller 220 after being guided and redirected by the plurality of guide rollers 230 and the liquid cooling device 500. Both the unwinding roller 210 and the winding roller 220 can provide power for the substrate body 400 to move, the guide roller 230 can guide and redirect the substrate body 400, and the liquid cooling device 500 can also guide the substrate body 400 due to the movement of the outer cooling plate 520. The guide roller 230 is arranged between the unwinding roller 210 and the liquid cooling device 500, between the liquid cooling device 500 and the liquid cooling device 500, and between the liquid cooling device 500 and the winding roller 220. The guide roller 230 can make the layout of each component of the transmission device more reasonable by guiding and redirecting, and can make full use of the space in the vacuum chamber 100. The guide roller 230 can also increase the length of the transmission path so that the substrate body 400 can be fully cooled. The guide roller 230 can also increase the tension of the substrate body 400 to prevent the flexible substrate body 400 from collapsing.

[0054] It can be understood that when it is necessary to adjust the coating height from the sputtering device to the substrate body 400, on the one hand, the position of the sputtering device can be adjusted to adjust the distance from the sputtering device to the coating surface of the substrate body 400; on the other hand, the position of the liquid cooling device 500 and the guide roller 230 can be adjusted to adjust the position from the coating surface of the substrate body 400 to the sputtering end face of the sputtering device.

[0055] Another aspect of the present application further provides a flexible substrate coating method, comprising the following steps:

[0056] Unwinding, driving the substrate body 400 to move along the transmission path through the transmission device;

[0057] Coating: the first rectangular sputtering module 310, the multi-target sputtering module 320 and the second rectangular sputtering module 330 are turned on according to the setting to coat the substrate body 400 passing by;

[0058] Cooling: A liquid cooling device 500 is provided on the substrate body 400 to cool the substrate body 400.

[0059] Through the above coating method, the transmission device drives the flexible substrate body 400 to move, and the substrate body 400 passes through the corresponding sputtering device. The sputtering device is turned on according to the setting to coat the substrate body 400, and films of different thicknesses and different numbers of layers can be obtained. The liquid cooling device 500 is attached to the substrate body 400 to cool the substrate body 400 and maintain a stable coating temperature environment. The liquid cooling device 500 can also absorb the heat of the sputtering device to improve the coating yield.

[0060] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "front", "rear", "left", "right", "up", "down", "top", "bottom", "inside", "outside", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0061] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0062] The protection scope of the present invention is limited only by the claims. With the help of the teachings of the present invention, those skilled in the art will easily recognize that alternative structures of the structures disclosed in the present invention can be used as feasible alternative embodiments, and the embodiments disclosed in the present invention can be combined to generate new embodiments, which also fall within the scope of the appended claims.

Claims

1. A flexible substrate coating device, comprising a vacuum chamber (100), a transmission device and a sputtering device, wherein the transmission device and the sputtering device are both arranged in the vacuum chamber (100), and the transmission device is used to transmit a substrate body (400); characterized in that: The sputtering device comprises a first rectangular sputtering module (310), a multi-target sputtering module (320) and a second rectangular sputtering module (330), the three of which are arranged in sequence and spaced apart on the transmission path of the substrate body (400) and are turned on according to settings to sputter and coat the substrate body (400) passing through.

2. A flexible substrate coating device according to claim 1, characterized in that: The first rectangular sputtering module (310) and the second rectangular sputtering module (330) are symmetrically arranged with respect to the multi-target sputtering module (320).

3. A flexible substrate coating device according to claim 1, characterized in that: The multi-target sputtering module (320) is a multi-target confocal sputtering structure, and the multi-target sputtering module (320) comprises a first magnetron cathode and a second magnetron cathode, the first magnetron cathode comprises an adjustment device and a target head (321), the adjustment device is connected to the target head (321) and is used to adjust the angle of the target head (321); the structure of the second magnetron cathode is the same as that of the first magnetron cathode.

4. A flexible substrate coating device according to claim 3, characterized in that: The adjusting device comprises a first connecting seat (322) and a second connecting seat (323), and the two are rotatably connected via a rotating shaft (324); the target head (321) is mounted on the second connecting seat (323); the first connecting seat (322) is movably provided with a first connecting shaft (326), and the second connecting seat (323) is movably provided with a second connecting shaft (327); a driving member (325) is connected between the first connecting shaft (326) and the second connecting shaft (327), and the driving member (325) drives the second connecting seat (323) to deflect around the rotating shaft (324).

5. The flexible substrate coating device according to claim 1, characterized in that: The first rectangular sputtering module (310) comprises a cathode module (311), an adjustment device (313) and a mounting flange (314); the adjustment device (313) is connected to the mounting flange (314); the cathode module (311) is connected to the adjustment device (313); the adjustment device (313) is used to adjust and fix the swing angle of the cathode module (311); a magnetic circuit module (312) is arranged on the side of the cathode module (311) facing the substrate body (400); the structure of the second rectangular sputtering module (330) is the same as that of the first rectangular sputtering module (310).

6. The flexible substrate coating device according to claim 1, characterized in that: A plurality of liquid cooling devices (500) are arranged in the vacuum chamber (100), and each of the liquid cooling devices (500) is arranged corresponding to the first rectangular sputtering module (310), the multi-target sputtering module (320), and the second rectangular sputtering module (330).

7. A flexible substrate coating device according to claim 6, characterized in that: The liquid cooling device (500) comprises a cooling box (510), wherein a side of the cooling box (510) close to the sputtering device is a cooling side, and a side away from the sputtering device is a heat dissipation side; a plurality of cooling plates (520) are arranged on the outside of the cooling box (510), wherein the cooling plates (520) are connected to a power device (530), and the power device (530) drives the cooling plates (520) to move around the cooling box (510) and pass through the cooling side and the heat dissipation side, and the substrate body (400) bypasses the outside of the cooling box (510) and contacts the cooling plates (520).

8. A flexible substrate coating device according to claim 7, characterized in that: A liquid cooling pipe and a heat sink are arranged in the cooling box (510); the liquid cooling pipe and the heat sink are arranged in close contact with each other; the liquid cooling pipe and the heat sink are both located on the heat dissipation side; and the liquid cooling pipe is connected to the liquid cooling system outside the vacuum chamber (100) via a connecting pipe.

9. The flexible substrate coating device according to claim 6, characterized in that: The transmission device comprises an unwinding roller (210), a winding roller (220) and a plurality of guide rollers (230), wherein the plurality of guide rollers (230) are arranged between the unwinding roller (210) and the winding roller (220), and the substrate body (400) is unwound by the unwinding roller (210), and is wound up by the winding roller (220) after being redirected by the plurality of guide rollers (230) and the liquid cooling device (500).

10. A method for coating a flexible substrate, characterized in that: The following steps are involved: Unwinding, driving the substrate body (400) to move along a transmission path through a transmission device; Coating, starting the first rectangular sputtering module (310), the multi-target sputtering module (320) and the second rectangular sputtering module (330) according to settings to coat the substrate body (400) passing through; Cooling: a liquid cooling device (500) is provided on the substrate body (400) to cool the substrate body (400).

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