Multi-degree-of-freedom wide-low-frequency vibration isolator
By designing a multi-degree of freedom wide low-frequency vibration isolator and using a combined vibration isolation structure and a fluid damper, the shortcomings of existing vibration isolators in multi-degree of freedom and low-band broadband vibration control are solved, and vibration isolation in multiple degrees of freedom and wide frequency range is achieved, which is suitable for low-frequency broadband vibration control of precision instruments.
Patent Information
- Application Number
- CN202411553333.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-01
- Publication Date
- 2025-03-04
AI Technical Summary
Existing vibration isolators have shortcomings in multi-degree of freedom and low-band broadband vibration control, which is difficult to meet the effective isolation requirements of precision instruments for environmental vibration.
A multi-degree of freedom wide low-frequency vibration isolator is designed, adopting a combined structure of vertical vibration isolation device and horizontal vibration isolation device, using the movement of welded corrugated pipe and the ball in the ball channel, combining springs and fluid dampers to achieve vibration isolation in multiple degrees of freedom and wide frequency range.
It realizes multi-degree of freedom vibration isolation in horizontal and vertical directions, has adjustable damping capabilities, and is suitable for low-frequency broadband vibration control of precision instruments, improving the accuracy and stability of the equipment.
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Figure CN119554365A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of structural vibration reduction, and mainly relates to a multi-degree-of-freedom wide low-frequency vibration isolator. Background Art
[0002] With the rapid development of precision / ultra-precision manufacturing, high-end physics and chemistry experiments, the measurement or processing accuracy of many high-end equipment has reached the nanometer or even picometer level. However, in actual applications, it is difficult to achieve the set accuracy due to the presence of environmental vibrations that endanger the accuracy of the equipment in the space where it is placed. In order to effectively eliminate the interference of environmental vibrations on the accuracy of the equipment, it is usually necessary to use vibration isolators to isolate environmental vibrations. At present, most vibration isolators can only effectively isolate vibrations in one direction, and the vibration attenuation effect in other directions is insufficient, which makes it difficult to meet the needs of multi-degree-of-freedom vibration isolation in actual engineering applications; furthermore, the existing vibration isolators have insufficient control over the low-frequency vibrations of mechanical equipment and cannot meet the needs of low-frequency broadband vibration control; in addition, most vibration isolators have small damping and insufficient adjustability, which cannot achieve flexible application in the engineering field. Therefore, in order to solve the impact of environmental vibrations on the working accuracy of precision instruments, a vibration isolator that can effectively control multi-degree-of-freedom wide low-frequency vibrations is needed.
[0003] In view of this, the present invention is proposed. Summary of the invention
[0004] The present invention provides a multi-degree-of-freedom wide low-frequency vibration isolator to solve the problems of single vibration isolation direction, small damping force and narrow vibration isolation frequency range of traditional vibration isolators. The vibration isolator includes an end cover, a welded bellows, a guide pillar, a main spring, an upper groove plate of a rolling ball, a rolling ball, a rolling ball limiting plate, a rolling ball lower groove plate, a nut, a spring gasket, a first bolt, a second bolt, a third bolt, a fourth bolt and a gasket. The end cover and the welded bellows are connected by the second bolt, the spring gasket and the nut, the main spring realizes the guiding effect through the guide pillar, the guide pillar is connected to the end cover by the first bolt, and the welded bellows is connected to the upper groove plate of the rolling ball by eight third bolts, and the above parts constitute a vertical vibration isolation device. The rolling ball is placed between the upper groove plate of the rolling ball and the lower groove plate of the rolling ball, and is limited by the rolling ball limiting plate. The upper groove plate of the rolling ball and the lower groove plate of the rolling ball are connected by the fourth bolt and the gasket to form a horizontal vibration isolation device. The rolling ball can roll in the rolling ball groove to achieve the effect of horizontal vibration isolation.
[0005] Furthermore, the damping element of the vertical vibration isolation part of the multi-degree-of-freedom wide low-frequency vibration isolator is a welded bellows, including: a fifth bolt, an O-ring, a welded bellows chassis, an auxiliary bellows, a welded bellows connection plate, a main bellows, and a welded bellows damping plate. The welded bellows chassis, the auxiliary bellows, the welded bellows connection plate, the main bellows, the welded bellows damping plate, the main bellows, the welded bellows connection plate, the auxiliary bellows, and the welded bellows chassis are welded and connected from top to bottom. There are silicone oil injection holes in the center of the welded bellows chassis at both ends. After the silicone oil is injected, it is sealed by the fifth bolt and the O-ring to form a sealed oil cavity filled with silicone oil.
[0006] Furthermore, the ball upper groove plate is both a part of the vertical vibration isolation device and a part of the horizontal vibration isolation device. In the vertical vibration isolation part, the ball upper groove plate is connected to the welded bellows through the third bolt, and the lower end of the main spring contacts the inner ring platform of the cylindrical hole of the ball upper groove plate, thereby providing support force. In the horizontal vibration isolation part, the ball upper groove plate provides a ball groove for the ball movement.
[0007] Furthermore, the welded bellows is a key part for providing damping, wherein the main bellows and the auxiliary bellows provide stiffness. When disturbance occurs under the action of external load, the silicone oil flows in the damping hole in the center of the damping disk of the welded bellows, and the damping hole shears the silicone oil to generate a damping force. The different viscosities of the injected silicone oil can affect the damping effect of the welded bellows, and thus affect the vibration isolation effect of the vertical vibration isolation part of the isolator.
[0008] It should be noted that the radius and length of the damping hole of the welded bellows and the viscosity of the silicone oil are the main factors affecting its damping. Under the action of external load, the damping hole shears the silicone oil to generate damping force. The output damping can be changed by adjusting the structural parameters of the damping hole and the viscosity of the silicone oil.
[0009] Furthermore, the stiffness of the vertical vibration isolation part is provided by the main spring and the main bellows; the auxiliary spring is placed between the end cover and the welded bellows to apply a certain pre-pressure to the fluid cavity in the welded bellows to prevent bubbles from appearing in the cavity. Furthermore, the horizontal vibration isolation part of the multi-degree-of-freedom wide low-frequency vibration isolator achieves a vibration isolation effect through the rolling of the ball. The ball moves in the ball groove formed by the upper ball groove plate and the lower ball groove plate, and generates a damping force through rolling friction. In addition, the function of the ball limit plate is to keep the relative position between the balls fixed. The ball can roll freely in the ball groove, and the fourth bolt does not completely limit the relative position of the upper ball groove plate and the lower ball groove plate, but only realizes the limiting effect. The upper ball groove plate and the lower ball groove plate can move relative to each other, and vibration isolation of two degrees of freedom in the horizontal direction can be achieved.
[0010] Furthermore, the size, number, and material properties of the balls may affect the load-bearing capacity of the isolator and the load size and horizontal vibration isolation effect.
[0011] Furthermore, when the external environmental vibration interference disappears, the ball has a self-reset function.
[0012] It should be noted that the multi-degree-of-freedom, wide low-frequency vibration isolator provided by the present invention adopts the "spring parallel three-parameter fluid damper" solution in the vertical vibration isolation part design. The main spring provides support stiffness, the three-parameter fluid damper provides damping, and the main spring and the three-parameter fluid damper work together to achieve the vibration isolation effect in the vertical direction; the horizontal vibration isolation part, through the rolling of the ball in the ball groove, generates a friction damping force in the horizontal direction, thereby achieving vibration isolation of two degrees of freedom in the horizontal direction. Therefore, the multi-degree-of-freedom, wide low-frequency vibration isolator provided by the present invention can achieve broadband vibration isolation effects in the horizontal and vertical directions. Of course, in order to meet the vibration isolation requirements of specific mechanical equipment, according to actual conditions, the relevant parameters of the horizontal vibration isolation part and the vertical vibration isolation part can be adjusted to meet actual engineering needs.
[0013] Compared with the prior art, the multi-degree-of-freedom wide low-frequency vibration isolator provided by the present invention has the following beneficial effects:
[0014] 1. The present invention can achieve vibration isolation effects in three degrees of freedom through combined vibration isolation in vertical and horizontal directions.
[0015] 2. The present invention can achieve adjustable damping in the vertical and horizontal directions by adjusting the viscosity of the silicone oil and the pressure applied to the rolling ball.
[0016] 3. The vertical vibration isolation of the present invention effectively improves the load capacity and vibration isolation effect of the vibration isolator through the design of a partial "spring parallel three-parameter fluid damper".
[0017] 4. The present invention has a simple structure, controllable cost, flexible interface, and adjustable damping, and can be used for low-frequency and broadband vibration control of precision instruments. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
[0019] Figure 1 It is a schematic diagram of the structure of a multi-degree-of-freedom wide low-frequency vibration isolator;
[0020] Figure 2 This is a schematic diagram of the installation of a multi-degree-of-freedom wide low-frequency vibration isolator;
[0021] Figure 3 It is a cross-sectional view of a multi-degree-of-freedom wide low-frequency vibration isolator structure;
[0022] Figure 4 This is a schematic diagram of the welded bellows structure;
[0023] Figure 5 It is a schematic diagram of the structure of the vertical vibration isolation part;
[0024] Figure 6 It is a cross-sectional view of the vertical vibration isolation structure;
[0025] Figure 7 It is a schematic diagram of the structure of the horizontal vibration isolation part;
[0026] Figure 8 It is a cross-sectional view of the horizontal vibration isolation structure;
[0027] Among them, 1-end cover, 2-auxiliary spring, 3-welded bellows, 4-guide pillar, 5-main spring, 6-rolling ball upper groove plate, 7-rolling ball, 8-rolling ball limit plate, 9-rolling ball lower groove plate, 10-first bolt, 11-nut, 12-spring gasket, 13-second bolt, 14-third bolt, 15-fourth bolt, 16-gasket, 17-fifth bolt, 18-O-ring, 19-welded bellows chassis, 20-auxiliary bellows, 21-welded bellows connecting plate, 22-main bellows, 23-welded bellows damping plate. DETAILED DESCRIPTION
[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.
[0029] The invention provides a multi-degree-of-freedom wide low-frequency vibration isolator.
[0030] like Figure 1 , Figure 2 and Figure 3As shown, the multi-degree-of-freedom wide low-frequency vibration isolator includes an end cover 1, a welded bellows 3, a guide pillar 4, a main spring 5, a rolling ball upper groove plate 6, a rolling ball 7, a rolling ball limiting plate 8, a rolling ball lower groove plate 9, a first bolt 10, a nut 11, a spring washer 12, a second bolt 13, a third bolt 14, a fourth bolt 15, and a washer 16; the end cover 1 and the welded bellows 3 are connected by a nut 11, a spring washer 12 and a second bolt 13, the main spring 5 is guided by the guide pillar 4, the guide pillar 4 is connected to the end cover 1 by the first bolt 10, and the welded bellows 3 is connected to the rolling ball upper groove plate 6 by eight third bolts 14, and the above parts constitute a vertical vibration isolation device. The rolling ball 7 is installed between the rolling ball upper groove plate 6 and the rolling ball lower groove plate 9, and is limited by the rolling ball limiting plate 8, and the rolling ball upper groove plate 6 and the rolling ball lower groove plate 9 are connected by the fourth bolt 15 and the washer 16 to form a horizontal vibration isolation device. The rolling ball 7 can move in the rolling ball groove to achieve the effect of horizontal vibration isolation.
[0031] like Figure 4 As shown, the welded bellows 3 includes: a bolt 17, an O-ring 18, a welded bellows chassis 19, an auxiliary bellows 20, a welded bellows connecting plate 21, a main bellows 22 and a welded bellows damping plate 23; the connection order of the various parts of the welded bellows is from top to bottom: the welded bellows chassis 19, the auxiliary bellows 20, the welded bellows connecting plate 21, the main bellows 22, the welded bellows damping plate 23, the main bellows 22, the welded bellows connecting plate 21, the auxiliary bellows 20, and the welded bellows chassis 19. The above parts are welded and processed in sequence. There is a silicone oil injection hole in the center of the welded bellows chassis 19. After the silicone oil is injected, it is sealed by the fifth bolt 17 and the O-ring 18 to form an oil chamber. In addition, the radius and length of the damping hole and the viscosity of the silicone oil of the welding bellows 3 are the main factors affecting its damping. Under the action of external load, the damping hole in the oil chamber of the welding bellows 3 shears the silicone oil to generate a damping force. The output damping can be changed by adjusting the structural parameters of the damping hole and the viscosity of the silicone oil.
[0032] like Figure 4 , Figure 5 and Figure 6As shown, the main body of the vertical vibration isolation device includes an end cover 1, a welded bellows 3, a guide pillar 4, a main spring 5 and a ball upper groove plate 6, etc. The ball upper groove plate 6 is connected to the welded bellows 3 through a third bolt 14, and the lower end of the main spring 5 contacts the inner ring platform of the cylindrical hole on the upper surface of the ball upper groove plate 6 to provide support force. The main bellows 22 and the main spring 5 jointly provide the stiffness of the vertical vibration isolation part, and the guide pillar 4 provides a guiding function for the main spring 5. The welded bellows 3 is a key part for providing damping, wherein the main bellows 22 and the auxiliary bellows 20 provide stiffness. When the external environment is disturbed, the silicone oil flows in the damping hole in the center of the welded bellows damping disk 23, and the damping hole shears the silicone oil to generate a damping force; the different viscosities of the injected silicone oil can affect the damping effect of the welded bellows 3, and then affect the vibration isolation effect of the vertical vibration isolation part of the vibration isolator. In addition, the auxiliary spring 2 is placed between the end cover 1 and the welding bellows 3, which can apply a certain pre-pressure to the fluid cavity in the welding bellows 3 to prevent bubbles from appearing in the cavity.
[0033] like Figure 7 and Figure 8 As shown, the upper groove plate 6 of the rolling ball is both a part of the vertical vibration isolation device and a part of the horizontal vibration isolation device. In the horizontal vibration isolation part, the upper groove plate 6 of the rolling ball provides a rolling ball groove for the movement of the rolling ball 7. The vibration isolation effect of the horizontal vibration isolation part comes from the rolling of the rolling ball 7. The rolling ball limit plate 8 can ensure that the relative position between the rolling balls 7 is fixed. The rolling ball 7 moves in the rolling ball groove formed by the upper groove plate 6 of the rolling ball and the lower groove plate 9 of the rolling ball. The rolling of the rolling ball 7 in the rolling ball groove generates friction damping force. The rolling ball 7 can roll freely in the rolling ball groove. The fourth bolt 15 does not completely limit the relative position of the upper groove plate 6 of the rolling ball and the lower groove plate 9 of the rolling ball, but only realizes the limiting effect. The upper groove plate 6 of the rolling ball and the lower groove plate 9 of the rolling ball can move relative to each other to realize vibration isolation of two degrees of freedom in the horizontal direction. In addition, the size, quantity and material properties of the rolling ball 7 can affect the bearing capacity and horizontal vibration isolation effect of the vibration isolator. In addition, when the vibration interference of the external environment disappears, the rolling ball 7 has a self-reset function.
[0034] like Figures 1 to 8 As shown, a multi-degree-of-freedom wide low-frequency vibration isolator is installed between the mechanical equipment and the interference source. Its initial position is that the balls 7 are evenly placed at the bottom of the ball rolling channel, and the main spring 5 and the welded bellows 3 are in a working state under the load. When the external environment interference excitation is input, the vertical vibration isolation part composed of the welded bellows 3 part and the main spring 5 starts to work, isolating the vibration transmitted to the mechanical equipment in the vertical direction; at the same time, the balls 7 in the ball rolling channel start to roll, isolating the vibration transmitted to the mechanical equipment in the horizontal direction.
[0035] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A multi-degree-of-freedom wide low-frequency vibration isolator, characterized in that: include: An end cover (1), a welded bellows (3), a guide pillar (4), a main spring (5), an upper groove plate (6) for rolling balls, a rolling ball (7), a rolling ball stop plate (8), a lower groove plate (9) for rolling balls, a first bolt (10), a nut (11), a spring washer (12), a second bolt (13), a third bolt (14), a fourth bolt (15), and a washer (16); the end cover (1) is connected to the welded bellows (3) through the nut (11), the spring washer (12), and the second bolt (13); the main spring (5) is guided by the guide pillar (4); the guide The support column (4) is connected to the end cover (1) through the first bolt (10), and the welded bellows (3) is connected to the upper groove plate (6) of the rolling ball through eight third bolts (14), so as to form a vertical vibration isolation device; the rolling ball (7) is installed between the upper groove plate (6) of the rolling ball and the lower groove plate (9), and is limited by the rolling ball limiting plate (8); the upper groove plate (6) of the rolling ball and the lower groove plate (9) of the rolling ball are connected through the fourth bolt (15) and the gasket (16), so as to form a horizontal vibration isolation device; the rolling ball (7) moves in the rolling ball groove to achieve horizontal vibration isolation.
2. The multi-degree-of-freedom broadband vibration isolator according to claim 1, characterized in that: The welded bellows (3) comprises: a fifth bolt (17), an O-ring (18), a welded bellows chassis (19), an auxiliary bellows (20), a welded bellows connecting plate (21), a main bellows (22) and a welded bellows damping plate (23); the welded bellows chassis (19), the auxiliary bellows (20), the welded bellows connecting plate (21), the main bellows (22), the welded bellows damping plate (23), the main bellows (22), the welded bellows connecting plate (21), the auxiliary bellows (20) and the welded bellows chassis (19) are welded and connected from top to bottom, and silicone oil injection holes are provided at the centers of the welded bellows chassis (19) at both ends. After silicone oil is injected, the holes are sealed by the fifth bolt (17) and the O-ring (18) to form an oil chamber.
3. The multi-degree-of-freedom broadband vibration isolator according to claim 2, characterized in that: The ball upper groove plate (6) is both a part of the vertical vibration isolation device and a part of the horizontal vibration isolation device; in the vertical vibration isolation part, the ball upper groove plate (6) is connected to the welded bellows (3) through the third bolt (14), and the lower end of the main spring (5) contacts the inner ring platform of the cylindrical hole of the ball upper groove plate (6), thereby providing supporting force; in the horizontal vibration isolation part, the ball upper groove plate (6) provides the ball groove for the movement of the ball (7).
4. The multi-degree-of-freedom broadband vibration isolator according to claim 3, characterized in that: The welded bellows (3) is a key part for providing damping, wherein the main bellows (22) and the auxiliary bellows (20) provide rigidity. When disturbances occur in the external environment, silicone oil flows through the damping hole at the center of the welded bellows damping disk (23), and the damping hole shears the silicone oil to generate a damping force. Different viscosities of the injected silicone oil can affect the damping effect of the welded bellows (3), thereby affecting the vibration isolation effect of the vertical vibration isolation part of the vibration isolator.
5. The multi-degree-of-freedom broadband vibration isolator according to claim 4, characterized in that: The stiffness of the vertical vibration isolation part is provided by the main spring (5) and the main bellows (22).
6. The multi-degree-of-freedom broadband vibration isolator according to claim 4, characterized in that: It also includes the auxiliary spring (2), which is placed between the end cover (1) and the welding bellows (3) to apply pre-pressure to the fluid cavity in the welding bellows (3) to prevent bubbles from appearing in the cavity.
7. The multi-degree-of-freedom broadband vibration isolator according to claim 3, characterized in that: The horizontal vibration isolation part realizes the vibration isolation effect through the rolling of the rolling ball (7); the rolling ball (7) moves in the rolling ball groove formed by the rolling ball upper groove plate (6) and the rolling ball lower groove plate (9), and generates damping force through rolling friction; the rolling ball limiting plate (8) makes the relative position between the rolling balls (7) fixed; the rolling balls (7) roll freely in the rolling ball groove; the fourth bolt (15) does not completely limit the relative position of the rolling ball upper groove plate (6) and the rolling ball lower groove plate (9), so as to realize the limiting effect; the rolling ball upper groove plate (6) and the rolling ball lower groove plate (9) can move relative to each other, so as to realize vibration isolation of two degrees of freedom in the horizontal direction.
8. The multi-degree-of-freedom broadband vibration isolator according to claim 7, characterized in that: The rolling ball (7) can move in the rolling ball groove and has a self-resetting function.
9. A multi-degree-of-freedom broadband vibration isolator according to any one of claims 1 to 8, characterized in that: Multi-degree-of-freedom broadband vibration isolators can achieve broadband vibration isolation effects in horizontal and vertical directions.